Potential Barrier Working In Avalanche Mode (e.g., Avalanche Photodiode) (epo) Patents (Class 257/E31.063)
  • Patent number: 7511357
    Abstract: A MOSFET device that includes a first Zener diode connected between a gate metal and a drain metal of said semiconductor power device for functioning as a gate-drain (GD) clamp diode. The GD clamp diode includes multiple back-to-back doped regions in a polysilicon layer doped with dopant ions of a first conductivity type next to a second conductivity type disposed on an insulation layer above the MOSFET device, having an avalanche voltage lower than a source/drain avalanche voltage of the MOSFET device wherein the Zener diode is insulated from a doped region of the MOSFET device for preventing a channeling effect.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: March 31, 2009
    Assignee: Force-MOS Technology Corporation
    Inventor: Fwu-Iuan Hshieh
  • Publication number: 20090026494
    Abstract: Avalanche photodiodes and methods for forming them are disclosed. The breakdown voltage of an avalanche photodiode is controlled through the inclusion of a diffusion sink that is formed at the same time as the device region of the photodiode. The device region and diffusion sink are formed by diffusing a dopant into a semiconductor to form a p-n junction in the device region. The dopant is diffused through a first diffusion window to form the device region and a second diffusion window to form the diffusion sink. The depth of the p-n junction is based on an attribute of the second diffusion window.
    Type: Application
    Filed: October 1, 2008
    Publication date: January 29, 2009
    Applicant: PRINCETON LIGHTWAVE, INC.
    Inventor: Mark Allen Itzler
  • Patent number: 7476598
    Abstract: A photodiode and a method of manufacturing the photodiode are provided. The method includes forming a diode junction structure including a light receiving unit and an electrode unit on a semiconductor substrate, forming a buffer oxide layer and an etching blocking layer on the junction structure, forming an interlayer insulating layer and an intermetal insulating layer and an interconnecting structure, exposing the etching blocking layer by etching the intermetal insulating layer and the interlayer insulating layer, removing a portion of the etching blocking layer and the buffer oxide layer of the light-receiving unit by dry etching, and exposing a semiconductor surface of the light-receiving unit by wet etching.
    Type: Grant
    Filed: February 2, 2007
    Date of Patent: January 13, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ho-Sung Son, Sung-Ryoul Bae, Dong-Kyun Nam
  • Publication number: 20090008738
    Abstract: An avalanche photodiode detector is provided. The avalanche photodiode detector comprises an absorber region having an absorption layer for receiving incident photons and generating charged carriers; and a multiplier region having a multiplication layer; wherein the multiplier region is on a mesa structure separate from the absorber region and is coupled to the absorber region by a bridge for transferring charged carriers between the absorber region and multiplier region.
    Type: Application
    Filed: September 12, 2008
    Publication date: January 8, 2009
    Inventors: Ping Yuan, Joseph C. Boisvert, Dmitri D. Krut, Rengarajan Sudharsanan
  • Publication number: 20090008566
    Abstract: A avalanche mode photodiode array (102) is fabricated using a silicon on insulator wafer and substrate transfer process. The array includes a plurality of photodiodes (100). The photodiodes (100) include an electrically insulative layer (206), a depletion region (204), and first (208) and second (210) doped regions. An interconnection layer (212) includes electrodes (214, 216) which provides electrical connections to the photodiodes. The photodiode array (102) is carried by a handle wafer (217).
    Type: Application
    Filed: January 17, 2007
    Publication date: January 8, 2009
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS N. V.
    Inventors: Prabhat Agarwal, Jan Sonsky, Lasse Juhana Kauppinen
  • Patent number: 7462889
    Abstract: An avalanche photodiode according to this invention include a light receiving region 101 surrounded by a ring-shaped trench 13, a first electrode 11 formed on the light receiving region 101, a second electrode 12 formed on the periphery of the ring-shaped trench 13 surrounding the light receiving region, a first semiconductor layer lying just under the first electrode 11, and a second semiconductor layer lying just under the second electrode 12. Conductivity types of the first semiconductor and the second semiconductor are identical.
    Type: Grant
    Filed: March 25, 2005
    Date of Patent: December 9, 2008
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Eiji Yagyu, Nobuyuki Tomita, Eitaro Ishimura, Masaharu Nakaji
  • Publication number: 20080283953
    Abstract: A single-photon avalanche detector is disclosed that is operable at wavelengths greater than 1000 nm and at operating speeds greater than 10 MHz. The single-photon avalanche detector comprises a thin-film resistor and avalanche photodiode that are monolithically integrated such that little or no additional capacitance is associated with the addition of the resistor.
    Type: Application
    Filed: May 17, 2007
    Publication date: November 20, 2008
    Applicant: PRINCETON LIGHTWAVE, INC.
    Inventor: Mark Allen Itzler
  • Patent number: 7453131
    Abstract: A photodetector circuit incorporates an APD detector structure (10) comprising a p? silicon handle wafer (12) on which a SiO2 insulation layer (14) is deposited in known manner. During manufacture a circular opening (16) is formed through the insulation layer (14) by conventional photolithography and etching, and an annular p+ substrate contact ring (18) is implanted in the handle wafer (12) after opening of the window (16). The APD itself is formed by implantation of a p region (20) and an n+ region (22). After the various implantation steps a metallisation layer is applied, and annular metal contacts are formed by the application of suitable photolithography and etching steps, these contacts comprising an annular contact (26) constituting the negative terminal and connected to the p+ substrate contact ring (18), an annular metal contact (28) constituting the positive terminal and connected to the n+ region (22) of the APD, and source and drain contacts (30) and (32) (not shown in FIG.
    Type: Grant
    Filed: July 3, 2003
    Date of Patent: November 18, 2008
    Assignee: QinetiQ Limited
    Inventors: Gillian Fiona Marshall, David John Robbins, Weng Y Leong
  • Publication number: 20080230862
    Abstract: Here, we demonstrate new material/structures for the photodetectors, using semiconductor material. For example, we present the Tunable Avalanche Wide Base Transistor as a photodetector. Particularly, SiC, GaN, AlN, Si and Diamond materials are given as examples. The desired properties of an optimum photodetector is achieved. Different variations are discussed, both in terms of structure and material.
    Type: Application
    Filed: March 22, 2007
    Publication date: September 25, 2008
    Inventor: Ranbir Singh
  • Publication number: 20080203508
    Abstract: An image sensing device having a protection pattern formed on microlenses is provided. The device includes a plurality of photodiodes provided in a semiconductor substrate. An insulating layer having a substantially flat top surface is disposed on the photodiodes. A plurality of microlenses are provided on the insulating layer and disposed over the photodiodes. The microlenses are covered with a protection pattern. The protection pattern can be formed of an oxide-based photosensitive polymer layer or a nitride-based photosensitive polymer layer, as examples. The protection pattern can have a substantially flat top surface.
    Type: Application
    Filed: September 18, 2007
    Publication date: August 28, 2008
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Jung-Hyun Cho, Jong-Woo Kim
  • Publication number: 20080164554
    Abstract: Avalanche photodiodes are provided, wherein the APDs provide both high optical coupling efficiency and low dark count rate. The APDs are formed such that their cap layer has an active region of sufficient width to enable high optical coupling efficiency but the APD still exhibits a low dark count rate. These cap layers have a device area with an active region and an edge region, wherein the size of the active region is substantially matched to the mode-field diameter of an optical beam, and wherein the size of the edge region is made small so as to reduce the number of defects included. These APD designs maintain a substantially uniform gain and breakdown voltage, as necessary for practical use.
    Type: Application
    Filed: March 19, 2008
    Publication date: July 10, 2008
    Applicant: PRINCETON LIGHTWAVE, INC.
    Inventors: Mark Allen Itzler, Rafael Ben-Michael
  • Publication number: 20080164555
    Abstract: Avalanche photodiodes are provided, wherein the APDs provide both high optical coupling efficiency and low dark count rate. The APDs are formed such that their cap layer has an active region of sufficient width to enable high optical coupling efficiency but the APD still exhibits a low dark count rate. These cap layers have a device area with an active region and an edge region, wherein the size of the active region is substantially matched to the mode-field diameter of an optical beam, and wherein the size of the edge region is made small so as to reduce the number of defects included. These APD designs maintain a substantially uniform gain and breakdown voltage, as necessary for practical use.
    Type: Application
    Filed: March 19, 2008
    Publication date: July 10, 2008
    Applicant: PRINCETON LIGHTWAVE, INC.
    Inventors: Mark Allen Itzler, Rafael Ben-Michael
  • Publication number: 20080121867
    Abstract: In an avalanche photodiode provided with a substrate including a first electrode and a first semiconductor layer, formed of a first conductivity type, which is connected to the first electrode, the configuration is in such a way that, at least an avalanche multiplication layer, a light absorption layer, and a second semiconductor layer having a bandgap that is larger than that of the light absorption layer are layered on the substrate; a second conductivity type conductive region is formed in the second semiconductor layer; and the second conductivity type conductive region is arranged so as to be connected to a second electrode. With the foregoing configuration, an avalanche photodiode having a small dark current and a high long-term reliability can be provided with a simple process.
    Type: Application
    Filed: October 25, 2004
    Publication date: May 29, 2008
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Eiji Yagyu, Eitaro Ishimura, Masaharu Nakaji
  • Patent number: 7368750
    Abstract: A semiconductor light-receiving device includes: a semi-insulating substrate; a semiconductor layer of a first conduction type that is formed on the semi-insulating substrate; a buffer layer of the first conduction type that is formed on the semi-insulating substrate and has a lower impurity concentration than the semiconductor layer of the first conduction type; a light absorption layer that is formed on the buffer layer and generates carriers in accordance with incident light; a semiconductor layer of a second conduction type that is formed on the light absorption layer; and a semiconductor intermediate layer that is interposed between the buffer layer and the light absorption layer, and has a forbidden bandwidth within a range lying between the forbidden bandwidth of the buffer layer and the forbidden bandwidth of the light absorption layer.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: May 6, 2008
    Assignee: Fujitsu Quantum Devices Limited
    Inventors: Gang Wang, Yoshihiro Yoneda
  • Patent number: 7348607
    Abstract: The present invention includes a planar avalanche photodiode having a first n-type semiconductor layer defining a planar contact area, and a second n-type semiconductor layer having a p-type diffusion region. Further features of the structure includes an n-type semiconductor multiplication layer, an n-type semiconductor absorption layer, and a p-type contact layer. Further embodiments include a planar avalanche photodiode having a first n-type semiconductor layer defining a planar contact area, an n-type semiconductor multiplication layer, an n-type semiconductor absorption layer and a p-type semiconductor layer electrically coupled to a p-type contact layer.
    Type: Grant
    Filed: February 3, 2003
    Date of Patent: March 25, 2008
    Assignee: Picometrix, LLC
    Inventors: Cheng C. Ko, Barry Levine
  • Patent number: 7348608
    Abstract: A planar avalanche photodiode includes a small localized contact layer on the top of the device produced by either a diffusion or etching process and a semiconductor layer defining a lower contact area. A semiconductor multiplication layer is positioned between the two contact areas and a semiconductor absorption layer is positioned between the multiplication layer and the upper contact layer. The photodiode has a low capacitance and a low field near the edges of the semiconductor multiplication and absorption layers.
    Type: Grant
    Filed: April 30, 2004
    Date of Patent: March 25, 2008
    Assignee: Picometrix, LLC
    Inventors: Cheng C. Ko, Barry Levine
  • Publication number: 20080067620
    Abstract: A photodiode designed to capture incident photons includes a stack of at least three superposed layers of semiconductor materials having a first conductivity type The stack includes: an interaction layer designed to interact with incident photons so as to generate photocarriers, a collection layer to collect the photocarriers; a confinement layer designed to confine the photocarriers in the collection layer. The collection layer has a band gap less than the band gaps of the interaction layer and confinement layer. The photodiode also includes a region which extends transversely relative to the planes of the layers. The region is in contact with the collection layer and confinement layer and has a conductivity type opposite to the first conductivity type so as to form a p-n junction with the stack.
    Type: Application
    Filed: September 12, 2007
    Publication date: March 20, 2008
    Applicant: Commissariat A L'Energie Atomique
    Inventor: Johan ROTHMAN
  • Publication number: 20080012087
    Abstract: An avalanche photodiode includes a high quality electrooptically active substrate, a handle substrate bonded to the active substrate, and an avalanche photodiode active area formed in the high quality electrooptically active substrate including a high field region for generating avalanche current gain. By using a handle wafer bonded to the active substrate, the avalanche photodiode of the subject invention has a greater strength and thickness without the reduction of desirable electrical characteristics.
    Type: Application
    Filed: March 20, 2007
    Publication date: January 17, 2008
    Inventors: Henri Dautet, Richard Seymour
  • Publication number: 20070273770
    Abstract: A method for encoding information that is encoded in spatial variations of the intensity of light characterized by a first wavelength in light characterized by a second wavelength, the method comprising: transmitting the first wavelength light through a photo-conducting material in which electron-hole pairs are generated by absorbing photons from the first wavelength light to generate a first density distribution of electrons homologous with the spatial variations in intensity of the first wavelength light; trapping electrons from the first electron density distributions in a trapping region to generate an electric field homologous with the density distribution in a material that modulates a characteristic of light that passes therethrough responsive to an electric field therein; transmitting a pulse of light having sufficient energy to generate electron-hole pairs in the photo-conducting material through the modulating material and thereafter through the photo-conducting layer to generate a second additional
    Type: Application
    Filed: March 12, 2007
    Publication date: November 29, 2007
    Applicant: 3DV Systems Ltd.
    Inventors: Amnon Manassen, Giora Yahav
  • Patent number: 7268339
    Abstract: A method is provided for forming a semiconductor-detection device that provides internal gain. The method includes forming a plurality of bottom trenches in a bottom surface of an n-doped semiconductor wafer; and forming a second plurality of top trenches in a top surface of the semiconductor wafer. The bottom surface and the top surface are opposed surfaces. Each of the bottom trenches is substantially parallel to and substantially juxtaposed to an associated one of the top trenches. The method further includes doping the semiconductor wafer with at least one p-type dopant to form a p-region that defines at least one n-well within the p-region, wherein a p-n junction is formed substantially at an interface of the n-well and the p-region; and removing a portion of the bottom surface to form a remaining-bottom surface, wherein a portion of the n-well forms a portion of the remaining-bottom surface.
    Type: Grant
    Filed: September 27, 2005
    Date of Patent: September 11, 2007
    Assignee: Radiation Monitoring Devices, Inc.
    Inventors: Richard Farrell, Kofi Vanderpuye
  • Publication number: 20070120226
    Abstract: An avalanche photodiode has improved low-noise characteristics, high-speed response characteristics, and sensitivity. The avalanche photodiode includes a first conductivity type semiconductor layer, a second conductivity type semiconductor layer, a semiconductor multiplication layer interposed between the first conductivity type semiconductor layer and the second conductivity type semiconductor layer, and a semiconductor light-absorbing layer interposed between the semiconductor multiplication layer and the second conductivity type semiconductor layer. The avalanche photodiode further comprises a multiplication suppressing layer which suppresses multiplication of charge carriers in the semiconductor light-absorbing layer, located between the semiconductor light-absorbing layer and the second conductivity type semiconductor layer.
    Type: Application
    Filed: February 2, 2007
    Publication date: May 31, 2007
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masaharu NAKAJI, Eitaro ISHIMURA, Eiji YAGYU, Nobuyuki TOMITA
  • Patent number: 7145208
    Abstract: A MOS transistor including a substrate, a gate dielectric layer on the substrate, a stacked gate on the gate dielectric layer, and a source/drain in the substrate beside the stacked gate is provided. In particular, the stacked gate includes, from bottom to top, a first barrier layer, an interlayer, a work-function-dominating layer, a second barrier layer and a poly-Si layer, wherein the work-function-dominating layer includes a metallic material.
    Type: Grant
    Filed: June 25, 2004
    Date of Patent: December 5, 2006
    Assignee: United Microelectronics Corp.
    Inventors: Chih-Wei Yang, Yi-Sheng Hsieh, Wei-Min Lin, Wen-Tai Chiang, Wei-Tsun Shiau