Abstract: A vibration layer is formed by the AD method on a cavity plate before forming pressure chambers, a common electrode is formed on the vibration layer, and a piezoelectric layer is formed on the common electrode by the AD method. Subsequently, the pressure chambers are formed in the cavity plate by the etching. After that, individual electrodes are formed on the piezoelectric layer. Subsequently, the stack of the cavity plate, the vibration layer, the common electrode, the piezoelectric layer, and the individual electrodes is heated at about 850° C. to simultaneously perform the annealing of the piezoelectric layer and the sintering of the individual electrodes and the common electrode. Accordingly, the atoms of the cavity plate are suppressed from being diffused into the driving portions of the piezoelectric layer.

Abstract: Disclosed herein is a method of manufacturing an inertial sensor using a polling method of a piezoelectric element performing a polling after packaging the piezoelectric element, the method of manufacturing an inertial sensor including: forming a driving electrode and a sensing electrode on a flexible substrate on which a piezoelectric material is deposited; electrically connection the driving electrode and the sensing electrode; packaging the flexible substrate; polling by applying voltage and heat to the driving electrode and the sensing electrode; and electrically separating the driving electrode from the sensing electrode by applying heat to the driving electrode and the sensing electrode.

Abstract: A tubular clip for securing a sleeve to the body of a piezoelectric actuator in an actuator assembly. In use, the wall of the clip has a plurality of corrugations. The pitch of the corrugations is variable in the direction of the longitudinal axis of the clip. The clip is configurable into an unfitted configuration and into a fitted configuration and in the fitted configuration the minimum transverse internal separation of the clip walls is less than in the unfitted configuration.

Abstract: The present invention presents a piezoelectric piece for a piezoelectric vibrator and a manufacturing method thereof. The piezoelectric piece for a piezoelectric vibrator in accordance with an embodiment of the present invention includes: a base; and a vibrating arm connected to the base and having a groove formed therein. Here, one surface inside the groove includes: a first slope extended from an upper portion of the groove in a lower direction so as to have a first angle; and a second slope extended from a lower portion of the first slope in a lower direction so as to have a second angle that is greater than the first angle, and a rate of a depth of the first slope for a depth of the groove is greater than or equal to 0.5 and less than or equal to 1.

Abstract: Provided is an ultrasonic probe that is capable of easily dissipating heat generated therein using porous carbon allotrope foams. The ultrasonic probe includes: a matching layer; a piezoelectric layer disposed on a bottom surface of the matching layer; and a backing layer disposed on a bottom surface of the piezoelectric layer and formed of porous carbon allotrope foams and backing materials.

Abstract: In sputter etching to improve the adhesion between upper electrodes and lead electrodes, the sputter etching of surfaces of the upper electrodes under an Ar gas flow at a flow rate of 60 sccm or more can reduce the residence time of Ar ions on the surfaces of the upper electrodes because of the Ar gas flow. This can prevent the charging of the upper electrodes due to the buildup of ionized Ar gas on the surfaces, reduce the influence of charging on piezoelectric elements, and provide a method for manufacturing a piezoelectric actuator that includes the piezoelectric elements each including a piezoelectric layer having small variations in hysteresis characteristics and deformation characteristics.

Abstract: A method for manufacturing a switching element which has enough resistance to repeat switching operations and which can be miniaturized and have low power consumption, and a display device including the switching element are provided. The switching element includes a first electrode to which a constant potential is applied, a second electrode adjacent to the first electrode, and a third electrode over the first electrode with a spacer layer formed of a piezoelectric material interposed therebetween and provided across the second electrode such that there is a gap between the second electrode and the third electrode. A potential which is different from or approximately the same as a potential of the first electrode is applied to the third electrode to expand and contract the spacer layer, so that a contact state or a noncontact state between the second electrode and the third electrode can be selected.

Abstract: In a piezoelectric actuator including a substrate, an insulating layer formed on the substrate, an adhesive layer formed on the insulating layer, a Pt lower electrode layer formed on the adhesive layer, and a PZT piezoelectric layer formed on the Pt lower electrode layer, the adhesive layer is made of TiOx having a composition x which is graded so that the composition x on the side of thio insulating layer is larger than the composition x on the side of the Pt lower electrode layer.

Abstract: A method of manufacturing a sensor network is described which includes stretching a silicon substrate over a desired area, and generating a plurality of nodes fabricated on the stretchable silicon substrate. The nodes include at least one of an energy harvesting and storage element, a communication device, a sensing device, and a processor. The nodes are interconnected via interconnecting conductors formed in the substrate.

Abstract: A method of manufacturing a piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode, in which unevenness on one surface of the piezoelectric layer is formed by forming an oxidizable metal layer on the one surface of the piezoelectric layer; aggregating the metal layer by thermal oxidation; and performing isotropic etching on the metal layer aggregated on the one surface of the piezoelectric layer.

Abstract: In a piezoelectric device, an ultrasound probe, and a droplet discharge unit of the present invention, each of a pair of first and second electrodes is placed on a piezoelectric member having a single orientation in a direction perpendicular to a thickness direction thereof to extend in a direction perpendicular to the thickness direction or along the thickness direction and in a direction perpendicular to the direction of the orientation. Therefore, the piezoelectric device of the present invention has excellent piezoelectric properties. Further, the ultrasound probe and the droplet discharge unit of the present invention have good efficiency.

Abstract: An interactive card or the like employs a piezoelectric charge generator (piezo-strip) for temporarily driving an indicator. The piezo-strip may be displaced (bent) in order to generate charge to drive the indicator. Printed electronic processes are utilized to produce the indicator and/or the piezoelectric charge generator. An indicator is formed on a substrate by way of a printed electronics process. A displaceable region of piezoelectric material associated with the said substrate is formed by way of a printed electronics process. Electrical interconnections are formed on said substrate by way of a printed electronics process. The electrical interconnections connecting said indicator and said first region of piezoelectric material such that displacement of said first region of piezoelectric material generates a voltage therein that is provided to said indicator in order to actuate said indicator and thereby indicate the displacement of said first region of piezoelectric material.

Abstract: In the case where a slit is provided in a projection portion of an outlet plate, patterning property of a slit can be improved, and a desired slit can be formed. The present invention is a manufacturing method of a liquid ejection head including a substrate; an ejection outlet plate; a channel; and the supply ports formed between the substrate and the ejection outlet plate by joining of the ejection outlet plate onto the substrate; and a projection portion having a slit at a position facing the supply port of the ejection outlet plate, the method including the steps of: forming a first member on the substrate; forming a mold material for forming the slit between first member on the substrate; forming a second member serving as the ejection outlet plate on the mold material; forming the projection portion by removing the mold material.

Abstract: There is provided a method of manufacturing liquid transporting apparatus including: providing a channel unit; providing a piezoelectric actuator having a first and second active portion corresponding to a central portion and an outer periphery portion of the pressure chamber, respectively. The first and second active portions are sandwiched between an upper electrode and an intermediate electrode, and between the upper electrode and a lower electrode, respectively. The method further includes joining the channel unit and the piezoelectric actuator by positioning such that the intermediate electrode overlaps the central portion of the pressure chamber. Accordingly, since it is possible to make the first active portion overlap the central portion of the pressure chamber, it is possible to apply a appropriate pressure to the liquid in the pressure chamber without excessively small deformation of the first active portion.

Abstract: Provided are an acoustic probe and a method of manufacturing the acoustic probe including a chip module substrate, a piezoelectric unit for cross-converting ultrasound and an electric signal while the piezoelectric unit is vibrating, and a connection unit for supporting the piezoelectric unit and electrically connecting the piezoelectric unit and the chip module substrate.

Abstract: Disclosed herein are a piezoelectric actuator module and a method of manufacturing the same. The piezoelectric actuator module includes: a plate; a piezoelectric element disposed on the plate and having a through-hole formed therein; and a feeding wire inserted into the through-hole to apply an external voltage to the piezoelectric element.

Abstract: A piezoelectric actuator includes one piezoelectric layer, a common electrode disposed on the lower surface of the piezoelectric layer and individual electrodes disposed on the upper surface of the piezoelectric layer. In the piezoelectric layer, a plurality of metal patterns arranged at regular intervals in the conveyance direction and in a direction orthogonal to the conveyance direction and overlapping with pressure chambers are provided substantially at the central part in the direction of the thickness. The metal patterns are not electrically continuous with each other and not electrically continuous with other parts. The metal patterns situated outermost in the conveyance direction are disposed so as to cross the edge of the pressure chamber. Some metal patterns overlap with the individual electrode and the other metal patterns do not overlap with the individual electrode.

Abstract: An electromechanical transformation device comprises an alkaline niobate piezoelectric ceramic composition and a rigid body adhered onto the major surface of the piezoelectric ceramic composition. The piezoelectric ceramic composition is made of crystal structures such as orthorhombic crystals formed at the side where the temperature is lower than the orthorhombic-to-tetragonal phase transition temperature, tetragonal crystals formed at the side where the temperature is higher than the orthorhombic-to-tetragonal phase transition temperature as well as at the side where the temperature is lower than the tetragonal-to-cubic phase transition temperature, and the cubic crystals formed at the side where the temperature is higher than the tetragonal-to-cubic phase transition temperature.

Abstract: A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole over the resonator, a second layer disposed over the first layer, the second layer covering a gap being positioned above the through-hole and being communicated with the through-hole, and a third layer covering the first layer and the second layer, and the third layer sealing the gap.

Abstract: A method of forming at least one curved plate having first and second layers, the first layer being formed of a first material and the second layer being formed of a second material, the method including forming one or more blocks of a fusible material on a surface of a substrate; baking the one or more blocks to deform their shape; and depositing the first and second materials over the one or more deformed blocks to form the first and second layers.

Abstract: A fabrication method for parallel-plate structures and a parallel-plate structure arrangement, wherein the structures have a middle layer, grown on a substrate and disposed between top and bottom electrode layers, wherein the middle layer and the top and bottom electrode layers are deposited on a bottom substrate, and wherein the middle layer is grown first and the top and bottom electrodes are essentially deposited afterwards.

Abstract: A liquid ejection head has a plurality of pressure chambers each communicating with an ejection port at one end and with an ink supply port at the other end. Each of the pressure chambers has lateral walls formed by piezoelectric elements and configured so as to eject ink from the corresponding ejection port as a result of a capacity change of the pressure chamber due to an expansion or contraction of the piezoelectric elements. The liquid ejection head is constituted by a plate-shaped piezoelectric portion and a plurality of column-shaped piezoelectric portions arranged thereon. The plate-shaped piezoelectric portion has a plurality of holes and a plurality of through holes located around the holes. Each of the column-shaped piezoelectric portions has a hollow section. Each hole of the plate-shaped piezoelectric portion and the hollow section of the corresponding column-shaped piezoelectric portion form a pressure chamber.

Abstract: A piezoelectric element includes a substrate having a first surface with a predetermined orientation; a lower electrode layered on the first surface of the substrate; a piezoelectric thin film layered on the lower electrode and having a piezoelectric body; and an upper electrode layered on the piezoelectric thin film. A voltage is to be impressed between the lower electrode and the upper electrode to deform the piezoelectric thin film. The piezoelectric thin film is epitaxially grown on the lower electrode using a physical vapor deposition or a chemical vapor deposition.

Abstract: An elastic wave device includes a supporting substrate, a high-acoustic-velocity film stacked on the supporting substrate and in which an acoustic velocity of a bulk wave propagating therein is higher than an acoustic velocity of an elastic wave propagating in a piezoelectric film, a low-acoustic-velocity film stacked on the high-acoustic-velocity film and in which an acoustic velocity of a bulk wave propagating therein is lower than an acoustic velocity of a bulk wave propagating in the piezoelectric film, the piezoelectric film is stacked on the low-acoustic-velocity film, and an IDT electrode stacked on a surface of the piezoelectric film.

Abstract: A piezo-stack includes a plurality of lateral surfaces and a first passivation layer applied to a first lateral surface. The first passivation layer terminates flush with opposing lateral surfaces that adjoin the first lateral surface.

Abstract: A method for forming an acoustic resonator comprising: forming a piezoelectric material on a first substrate; and applying the piezoelectric material to a second substrate on which the acoustic resonator is fabricated upon.

Abstract: A piezoelectric vibrating piece includes a vibrator, a framing portion that surrounds the vibrator, and a connecting portion that connects the vibrator and the framing portion together. At least one of a front surface and a back surface of the connecting portion is formed at a depth of 5 ?m to 15 ?m with respect to the framing portion.

Abstract: When protective portions are independently provided for each energy generation element, a leakage current inspection between the protective portions and the energy generation elements cannot be performed at once. Therefore, there is a concern that the inspection in manufacturing a substrate for liquid ejection head requires time. Therefore, the substrate for liquid ejection head is manufactured by performing a leakage current inspection between a connecting portion that is electrically connected to plurality of protective portions and a terminal to which the plurality of energy generation elements are connected, and thereafter removing the connecting portion.

Abstract: A manufacturing method of an ultrasonic generating device includes applying a compressive force to an attachment unit toward a first axial direction while a first end of a bolt-shaped member is a free end and the second end thereof is fixed, and thereby generating a first elastic force in the attachment unit. The manufacturing method includes attaching a fastening member to a bar portion of the bolt-shaped member in a balanced condition in which a second elastic force of the bolt-shaped member and the first elastic force are in balance, and thereby maintaining the balanced condition.

Abstract: The liquid jet head is provided with a piezoelectric substrate having a plurality of groove rows in each of which elongated ejection grooves and elongated non-ejection grooves are alternately arranged in a reference direction. In adjacent ones of the groove rows, ends on a second side of ejection grooves included in a groove row located on a first side and ends on the first side of non-ejection grooves included in a groove row located on the second side are separated from each other, and overlap each other in a thickness direction of the piezoelectric substrate.

Abstract: A liquid jet head includes a piezoelectric body substrate having a plurality of groove arrays, in each of which ejection grooves penetrating from the upper surface to the lower surface are arrayed in a reference direction, drive electrode provided on side faces of the ejection grooves, and terminal electrodes provided on the lower surface, and electrically connected to the drive electrodes; and a flexible circuit board electrically connected from the terminal electrodes, and connected to the lower surface of the piezoelectric body substrate. The piezoelectric body substrate includes a first opening portion that penetrates from the upper surface to the lower surface between the plurality of groove arrays, and the flexible circuit board is led out from the lower surface to the upper surface of the piezoelectric body substrate through the first opening portion.

Abstract: A method for repolarizing a piezoelectric actuator associated with an injector mounted on an internal combustion engine of a vehicle, the piezoelectric actuator having undergone initial polarization before the vehicle was used, includes with the engine stopped: applying a first polarization voltage to the terminals of the piezoelectric actuator during a first specified time interval of not less than ten minutes, stopping the application of the first polarization voltage during a second time interval, following the first time interval and at least equal to the latter, applying a second polarization voltage to the terminals of the piezoelectric actuator during a third specified time interval, following the second time interval, stopping the application of the second polarization voltage to the terminals of the piezoelectric actuator after the third time interval, the successive first, second and third time intervals defining a repolarization sequence of the piezoelectric actuator.

Abstract: The present invention relates to an electromechanical converter, in particular an electromechanical sensor, actuator and/or generator, which comprises a polymer element obtainable from a reaction mixture comprising a polyisocyanate, a polyisocyanate prepolymer and a compound having at least two isocyanate-reactive hydroxy groups. The present invention additionally relates to a process for the production of such an electromechanical converter and to the use of a polymer element according to the invention as an electromechanical element. The present invention relates further to an electronic and/or electrical device comprising an electromechanical converter according to the invention and to the use of an electromechanical converter according to the invention in an electronic and/or electrical device.

Abstract: An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2?-? scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle ?. The full width at half maximum is not greater than 10 degrees.

Abstract: The present invention relates to a piezoelectric device. A piezoelectric device in accordance with an embodiment of the present invention includes a piezoelectric member and a connection member which are coupled to each other, wherein the piezoelectric member includes a polycrystalline member made of a polycrystalline piezoelectric material, a single crystal member made of a single crystal piezoelectric material and coupled to the connection member, and a textured member provided between the polycrystalline member and the single crystal member and having intermediate properties of the polycrystalline piezoelectric material and the single crystal piezoelectric material.

Abstract: A method for producing an electric contact-connection of a multilayer component is specified. A main body has internal electrode layers, a insulating material, an electrically conductive material and a photosensitive material are provided. The insulating material and the electrically conductive material are arranged in a structured manner on an outer side of the multilayer component for the alternate contact-connection of the internal electrode layers. The structured arrangement is produced by the photosensitive material. A multilayer component comprising such a contact-connection is furthermore specified.

Abstract: System for converting thermal energy into electrical energy (S1) intended to be arranged between a hot source (SC) and a cold source (SF), comprising means for converting thermal energy into mechanical energy (6) and a piezoelectric material, with the means for converting thermal energy into mechanical energy (6) comprising groups (G1, G2) of at least three bimetallic strips (9, 11, 13) linked mechanically together by their longitudinal ends and suspended above a substrate (12), each bimetallic strip (9, 11, 13) comprising two stable states wherein it has in each of the states a curvature, with two directly adjacent bimetallic strips (9, 11, 13) having for a given temperature opposite curvatures, with the switching from one stable state of the bimetallic strips (9, 11, 13) to the other causing the deformation of a piezoelectric material.

Abstract: A liquid jet head includes a piezoelectric body substrate on which ejection grooves penetrating from an upper surface to a lower surface and non-ejection grooves open on the lower surface are alternately arranged in a reference direction and form a groove row, a cover plate that includes a liquid chamber communicating with the ejection grooves and is bonded on the upper surface of the piezoelectric body substrate, a nozzle plate that includes nozzles communicating with the ejection grooves and is bonded on the lower surface of the piezoelectric body substrate. Common drive electrodes are installed on side surfaces of the ejection grooves, which are on the lower-surface side from nearly 1/2 of a thickness of the piezoelectric body substrate, and individual drive electrodes are installed on side surfaces of the non-ejection grooves, which are on the lower-surface side from nearly 1/2 of a thickness of the piezoelectric body substrate.

Abstract: A manufacturing method of polarizing polyvinylidene fluoride (PVDF) piezoelectric film without metalized electrode includes providing a polyvinylidene fluoride (PVDF) piezoelectric film that is stretched into ? phase; providing two glass substrates having an indium tin oxide (ITO) layer respectively, wherein the PVDF piezoelectric film is located between the two glass substrates, and the two ITO layers are coated located separately on top of and below the PVDF piezoelectric film; and imposing a DC electric field onto two ITO layers, wherein the DC electric field of polarization is 400 to 900 kV/cm approximately.

Abstract: A piezoelectric vibrating piece includes a vibrating portion, a framing portion, and a connecting portion. The framing portion surrounds the vibrating portion. The connecting portion connects the vibrating portion and the framing portion. The connecting portion includes an inclined surface disposed on at least one of a front surface and a back surface of the connecting portion. A boundary between the inclined surface and a flat surface is established in a middle region that is away from a connecting region of the connecting portion and the vibrating portion, and is away from a connecting region of the connecting portion and the framing portion.

Abstract: A piezoelectric device includes a piezoelectric vibrating piece, a base, a first lid, and a second lid. The piezoelectric vibrating piece includes an electrode. The base holds the piezoelectric vibrating piece. The first lid is bonded to the base. The first lid houses the piezoelectric vibrating piece in a cavity. The first lid has an opening portion that opens the cavity. The second lid is bonded to a front surface of the first lid so as to cover the opening portion. The opening portion is fabricated at a position overlapping a portion including a region of the piezoelectric vibrating piece excluding the electrode, or a portion including a region excluding the piezoelectric vibrating piece in plan view.

Abstract: A piezoelectric energy harvester device has a cantilevered structure with a rectangular proof mass portion defined by holes through a substrate along three sides of a proof mass portion and supported by a thinned hinge portion for free pivotal movement relative to an anchor portion. Elongated strips of piezoelectric energy harvesting units are formed in side-by-side spaced positions on the hinge portion and aligned parallel or perpendicular to a stress direction. Multiplexing electronics coupled to contact pads on the anchor portion selectively connects different strip combinations to power management circuitry, responsive to variations in vibration magnitude or modes.

Abstract: The piezoelectric/electrostrictive film type element includes a substrate, a lower electrode film, a piezoelectric/electrostrictive film and an upper electrode film. The substrate and the lower electrode film are fixed adherently each other. The piezoelectric/electrostrictive film and the lower electrode film are fixed adherently each other. The film thickness of the lower electrode film is 1 ?m or less. The coverage of the lower electrode film is 90% or more. The piezoelectric/electrostrictive film is composed of a piezoelectric/electrostrictive ceramic. The piezoelectric/electrostrictive ceramic contains lead zirconate titanate and a bismuth compound. The bismuth/lead ratio in the peripheral section inside the grain which is relatively close to the grain boundary is greater than the bismuth/lead ratio in the center section inside the grain which is relatively far from the grain boundary.

Abstract: Provided is a piezoelectric/electrostrictive film type element in which the film thickness of the piezoelectric/electrostrictive film is small, the piezoelectric/electrostrictive film is dense, and the piezoelectric/electrostrictive film has good durability and insulation quality. The piezoelectric/electrostrictive film type element includes a substrate, a lower electrode film, a piezoelectric/electrostrictive film and an upper electrode film. The substrate and the lower electrode film are fixed adherently each other. The film thickness of the piezoelectric/electrostrictive film is 5 ?m or less. The piezoelectric/electrostrictive film is composed of a piezoelectric/electrostrictive ceramic. The piezoelectric/electrostrictive ceramic contains lead zirconate titanate and a bismuth compound.

Abstract: Disclosed herein is an inertial sensor including: a flexible part; a mass body connected to the flexible part; and a support part connected to the flexible part and supporting the mass body in a floated state to displace the mass body, wherein the flexible part has an upper piezoresistor disposed on one surface thereof and a lower piezoresistor disposed on the other surface thereof to detect a displacement of the mass body.

Abstract: A self-powered piezoelectric energy harvesting microsystem device has CMOS integrated circuit elements, contacts and interconnections formed at a proof mass portion of a die region of a semiconductor wafer. Piezoelectric energy harvesting unit components connected to the integrated circuit elements are formed at a thinned beam portion of the die region that connects the proof mass portion for vibration relative to a surrounding anchor frame portion. A battery provided on the proof mass portion connects to the integrated circuit elements. In a cantilever architectural example, the battery is advantageously located at a distal end of the proof mass portion, opposite the joinder with frame portion via the beam portion.

Abstract: An elastic wave device includes elastic wave elements, each including a piezoelectric layer directly or indirectly supported by a supporting substrate and an electrode disposed in contact with the piezoelectric layer, and a highly heat-conductive member stacked on a surface of the supporting substrate, opposite to the surface supporting the piezoelectric layer, in which the thermal conductivity of the supporting substrate is higher than the thermal conductivity of the piezoelectric layer, the coefficient of linear expansion of the supporting substrate is lower than the coefficient of linear expansion of the piezoelectric layer, the highly heat-conductive member has a larger area than the surface of the supporting substrate supporting the piezoelectric layer, and the thermal conductivity of the highly heat-conductive member is higher than that of the piezoelectric layer.

Abstract: A piezoelectric device is manufactured in which the material of a supporting substrate can be selected from various alternative materials. Ions are implanted into a piezoelectric substrate to form an ion-implanted portion. A temporary supporting substrate is formed on the ion-implanted surface of the piezoelectric substrate. The temporary supporting substrate includes a layer to be etched and a temporary substrate. The piezoelectric substrate is then heated to be divided at the ion-implanted portion to form a piezoelectric thin film. A supporting substrate is then formed on the piezoelectric thin film. The supporting substrate includes a dielectric film and a base substrate. The temporary supporting substrate is made of a material that produces a thermal stress at the interface between the temporary supporting substrate and the piezoelectric thin film less than the thermal stress at the interface between the supporting substrate and the piezoelectric thin film.

Abstract: The invention describes a manufacturing method for an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin-film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.

Abstract: A method capable of manufacturing a quartz vibrator by disposing a metallic bonding material on one main surface of a ceramic plate having a quartz vibrating element mounted thereon. Thereafter, the bonding of a cap having a recess to the ceramic plate by disposing the cap on the one main surface of the ceramic plate so that an open side of the recess faces the ceramic plate, melting the bonding material, and then allowing the bonding material to set, is carried out.