Machining Magnetic Material (e.g., Grinding, Etching, Polishing) Patents (Class 29/603.16)
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Patent number: 8607438Abstract: A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.Type: GrantFiled: December 1, 2011Date of Patent: December 17, 2013Assignee: Western Digital (Fremont), LLCInventors: Wei Gao, Guanxiong Li, Ming Mao, Chih-Ching Hu, Guanghong Luo, Miao Wang, Zhihong Zhang, Anup G. Roy
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Patent number: 8607439Abstract: A method and system for providing an energy assisted magnetic recording (EAMR) head are described. The method and system include providing a slider, an EAMR transducer coupled with the slider, and a top layer on the slider. The top layer includes a mirror well therein and has a substantially flat top surface. The method and system further includes providing a laser including a light-emitting surface and providing a mirror optically coupled with the laser. The laser is coupled to the top surface of the top layer external to the mirror well. The mirror has a bottom surface and a reflective surface facing the light-emitting surface of the laser. A portion of the bottom surface of the mirror is affixed to the top surface of the top layer. A portion of the mirror resides in the mirror well.Type: GrantFiled: March 31, 2010Date of Patent: December 17, 2013Assignee: Western Digital (Fremont), LLCInventors: Lei Wang, Dujiang Wan
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Patent number: 8590139Abstract: A method according to embodiments of the present invention comprises providing a magnetic stack comprising a magnetic layer sub-stack comprising magnetic layers and a bottom conductive electrode and a top conductive electrode electrically connecting the magnetic layer sub-stack at opposite sides thereof; providing a sacrificial pillar on top of the magnetic stack, the sacrificial pillar having an undercut with respect to an overlying second sacrificial material and a sloped foot with increasing cross-sectional dimension towards the magnetic stack, using the sacrificial pillar for patterning the magnetic stack, depositing an insulating layer around the sacrificial pillar, selectively removing the sacrificial pillar, thus creating a contact hole towards the patterned magnetic stack, and filling the contact hole with electrically conductive material.Type: GrantFiled: May 18, 2010Date of Patent: November 26, 2013Assignees: IMEC, Katholieke Universiteit Leuven, K.U. Leuven R&DInventors: Maria Op De Beeck, Liesbet Lagae, Sven Cornelissen
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Patent number: 8578594Abstract: A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench.Type: GrantFiled: June 6, 2011Date of Patent: November 12, 2013Assignee: Western Digital (Fremont), LLCInventors: Ming Jiang, Ronghui Zhou, Guanghong Luo, Masahiro Osugi, Danning Yang
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Patent number: 8578593Abstract: A method of manufacturing a thermally-assisted magnetic write head is provided. The method includes steps of: forming a laminate structure including the waveguide; the plasmon generator, and the magnetic pole in order; performing a first polishing process to planarize an end surface of the laminate structure; performing a first etching process to remove impurity attached on the end surface of the laminate structure, and to allow the plasmon generator to be recessed from the waveguide and the magnetic pole, thereby forming a recessed region on the end surface of the laminate structure; forming a protection layer on the end surface of the laminate structure such that at least the recessed region is filled; and performing a second polishing process on the end surface of the laminate structure formed with the protection layer until the plasmon generator is exposed, thereby completing the air bearing surface.Type: GrantFiled: October 12, 2010Date of Patent: November 12, 2013Assignees: TDK Corporation, SAE Magnetics (H.K.) Ltd.Inventors: Kosuke Tanaka, Shinji Hara, Tsutomu Chou, Yasutoshi Fujita
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Patent number: 8567045Abstract: As track densities increase, it becomes increasingly important, while writing in a given track, not to inadvertently write data in adjoining tracks. This problem has been overcome by limiting the width of material in the ABS plane to what it is at the write gap. The part of the lower pole that is wider than this is recessed back away from the ABS, thereby greatly reducing its magnetic influence on adjacent tracks. Four different embodiments of write heads that incorporate this notion are described together with a description of a general process for their manufacture.Type: GrantFiled: February 6, 2012Date of Patent: October 29, 2013Assignee: Headway Technologies, Inc.Inventors: Moris Dovek, Glen Garfunkel, Po Kang Wang
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Patent number: 8555486Abstract: A method for fabricating a magnetic recording transducer is described. The transducer has an ABS location and a nonmagnetic intermediate layer having a pole trench. The method includes depositing at least one magnetic pole layer having a top surface and a pole tip portion proximate to the ABS location. A first portion of the magnetic pole layer(s) resides in the pole trench. The magnetic pole layer(s) have a seam in the pole tip portion that extends to the top surface. The method also includes cathodically etching a second portion of the magnetic pole layer(s) from the seam at a rate of not more than 0.1 nanometers/second, thereby forming a seam trench in the magnetic pole layer(s). The method also includes refilling the seam trench with at least one magnetic refill layer. At least an additional magnetic pole layer is deposited on the top surface and the magnetic refill layer(s).Type: GrantFiled: December 6, 2011Date of Patent: October 15, 2013Assignee: Western Digital (Fremont), LLCInventors: Jose A. Medina, Tiffany Yun Wen Jiang, Ming Jiang
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Patent number: 8533937Abstract: A method or forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.Type: GrantFiled: October 18, 2011Date of Patent: September 17, 2013Assignee: Western Digital (Fremont), LLCInventors: Jinwen Wang, Weimin Si, Jianxin Fang, Ying Hong, Hongzhou Jiang, Ching-Huang Lu, Yan Chen, Donghong Li, Lien-Chang Wang, Lieping Zhong, Tao Pan
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Publication number: 20130219699Abstract: A manufacturing method of a slider includes steps of: (a) providing a row bar with a plurality of slider elements connecting together; (b) lapping surfaces of the row bar so as to obtain a predetermined requirement; (c) lowering the temperature of the surfaces lapped in the step (b) before and/or during lapping; and (d) cutting the row bar into a plurality of sliders. The present invention can prevent a local high temperature generated on the magnetic head during lapping so that the performance of the magnetic head is improved.Type: ApplicationFiled: February 29, 2012Publication date: August 29, 2013Applicant: SAE Magnetics (H.K.) Ltd.Inventors: Chiuming Lueng, Mankit Lee, Lorest Garcia Pingul, Yasutoshi Fujita, Cheukman Lui, ChiYuen Mok, Cheukwing Leung, Juren Ding, Rongkwang Ni
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Patent number: 8499435Abstract: A thin-film magnetic head is constructed such that a main magnetic pole layer, a lower shield layer, an upper shield layer and a thin-film coil are laminated on a substrate. A method of manufacturing the thin-film magnetic head has a lower shield layer forming step. This step comprises a step of forming a first lower shield part in a lower shield planned area, including a planned line along the medium-opposing surface, a step of forming a partial lower seed layer having a partial arrangement structure in which the partial lower seed layer is arranged on a lower formation zone except a lower exception zone including the planned line, a step of forming a second lower shield part on the partial lower seed layer.Type: GrantFiled: October 24, 2011Date of Patent: August 6, 2013Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Shigeki Tanemura, Kazuki Sato, Atsushi Iijima
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Patent number: 8495813Abstract: A method of making an energy-assisted magnetic recording apparatus is provided. The method comprises the step of aligning a first wafer including a plurality of vertical cavity surface emitting lasers (VCSELs) with a second wafer including a plurality of magnetic recording heads, such that an emitting region of each of the plurality of VCSELs is disposed over a light redirecting structure of a corresponding one of the plurality of magnetic recording heads. The method further comprises the step of bonding the first wafer to the second wafer.Type: GrantFiled: August 7, 2012Date of Patent: July 30, 2013Assignee: Western Digital (Fremont), LLCInventors: Yufeng Hu, Jinshan Li
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Patent number: 8491801Abstract: A method and system provides a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming a sacrificial NFT structure having a shape a location corresponding to the NFT. A dielectric layer is deposited. A portion of the dielectric layer resides on the sacrificial NFT structure. At least this portion of the dielectric layer on the sacrificial structure is removed. The sacrificial NFT structure is removed, exposing an NFT trench in the dielectric layer. At least one conductive layer for the NFT is deposited. A first portion of the conductive layer(s) reside in the NFT trench. A second portion of the conductive layer(s) external to the NFT trench is removed to form the NFT.Type: GrantFiled: November 8, 2011Date of Patent: July 23, 2013Assignee: Western Digital (Fremont), LLCInventors: Shawn M. Tanner, Yufeng Hu, Ut Tran, Zhongyan Wang
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Patent number: 8486286Abstract: A method and system for providing an energy assisted magnetic recording (EAMR) transducer coupled with a laser are described. The laser provides energy. The EAMR transducer has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The EAMR transducer includes a near field transducer (NFT) proximate to the ABS for focusing the energy onto the region of the media. The method and system include providing a heat sink having a bottom thermally coupled with the NFT and a top surface at an angle with respect to the ABS. The angle is greater than zero and less than ninety degrees. The method and system also include providing a write pole and at least one coil. The write pole is configured to write to a region of the media. The write pole has a bottom surface thermally coupled with the top surface of the heat sink. The at least one coil is for energizing 24.Type: GrantFiled: December 21, 2010Date of Patent: July 16, 2013Assignee: Western Digital (Fremont), LLCInventors: Wei Gao, Shing Lee
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Patent number: 8486285Abstract: A method for forming a write pole comprises forming a stop layer over a substrate layer of a wafer, the stop layer having an opening above a damascene trench in the substrate layer, and forming a buffer layer over the stop layer, the buffer layer having an opening above the opening of the stop layer. The method further comprises plating a layer of magnetic material over the wafer, disposing a first sacrificial material over a region of the magnetic material above the damascene trench, performing a milling or etching operation over the wafer to remove the magnetic material not covered by the first sacrificial material and to remove the first sacrificial material, disposing a second sacrificial material over the wafer, and performing a polishing operation over the wafer to remove the region of the magnetic material above the damascene trench, the second sacrificial material, and the buffer layer.Type: GrantFiled: August 20, 2009Date of Patent: July 16, 2013Assignee: Western Digital (Fremont), LLCInventors: Ronghui Zhou, Ming Jiang, Xiaohai Xiang, Jinwen Wang, Guanghong Luo, Yun-Fei Li
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Patent number: 8474128Abstract: A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.Type: GrantFiled: April 7, 2011Date of Patent: July 2, 2013Assignee: HGST Netherlands B.V.Inventors: Zvonimir Z. Bandic, Elizabeth Ann Dobisz, Jui-Lung Li, Henry Hung Yang
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Patent number: 8474127Abstract: A method for enhancing thermal stability, improving biasing and reducing damage from electrical surges in self-pinned abutted junction heads. The method includes forming a free layer, forming first hard bias layers abutting the free layer and forming second hard bias layers over the first hard bias layers discontiguous from the free layer, the second hard bias layers being anti-parallel to the first hard bias layers, the first and second hard bias layers providing a net longitudinal bias on the free layer.Type: GrantFiled: July 27, 2006Date of Patent: July 2, 2013Assignee: HGST Netherlands B.V.Inventors: Hardayal Singh Gill, Wen-Chien Hsiao, Jih-Shiuan Luo
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Patent number: 8468692Abstract: A variable resistance memory device has memory cells that are operated by Joule's heat and which are highly thermally efficient. Conductive patterns are formed on a substrate; sacrificial patterns exposing a portion of the top surface of each of the conductive patterns are formed on the conductive patterns, lower electrodes are formed by etching upper portions of the conductive patterns using the sacrificial patterns as an etching mask, then mold patterns are formed on the lower electrodes and cover exposed sidewall surfaces of the sacrificial patterns, and then the sacrificial patterns are replaced with variable resistance patterns.Type: GrantFiled: October 4, 2011Date of Patent: June 25, 2013Assignee: Samsung Electronics Co., Ltd.Inventor: Byeung Chul Kim
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Patent number: 8468682Abstract: A method for providing a perpendicular magnetic recording transducer is described. The method and system include providing a metallic underlayer and providing an insulator, at least a portion of which is on the metallic underlayer. The method and system also include forming a trench in the insulator. The bottom of the trench is narrower than the top of the trench and includes a portion of the metallic underlayer. The method and system also include providing a nonmagnetic seed layer that substantially covers at least the bottom and sides of the trench. The method and system also include plating a perpendicular magnetic pole material on at least a portion of the seed layer and removing a portion of the perpendicular magnetic pole material. A remaining portion of the perpendicular magnetic pole material forms a perpendicular magnetic recording pole.Type: GrantFiled: March 6, 2012Date of Patent: June 25, 2013Assignee: Western Digital (Fremont), LLCInventor: Lei Larry Zhang
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Patent number: 8468683Abstract: Methods of making write poles for perpendicular magnetic recording write heads. The bevel angle of the write pole for a perpendicular magnetic recording write head affects the performance of the write head. By forming reinforcement layer on the polymeric underlayer mask to enhance the mask durability during ion mill and tapering the polymeric underlayer above the non-magnetic mill mask layer using oxygen and nitrogen based reactive ion etch process, the bevel angle of the magnetic write pole can be increased greatly to meet the demands of the next and future generations of magnetic recording write heads.Type: GrantFiled: October 31, 2011Date of Patent: June 25, 2013Assignee: HGST Netherlands B.V.Inventors: Guomin Mao, Yi Zheng
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Publication number: 20130152381Abstract: A method according to one embodiment includes contacting an oxidant with an AlTiC portion of a magnetic head for recessing TiC grains of the AlTiC portion. A method according to another embodiment includes contacting a peroxide with an AlTiC portion of a magnetic head for recessing TiC grains of the AlTiC portion from a media bearing surface of the AlTiC portion.Type: ApplicationFiled: February 14, 2013Publication date: June 20, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: International Business Machines Corporation
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Patent number: 8453317Abstract: Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.Type: GrantFiled: October 14, 2010Date of Patent: June 4, 2013Assignee: HGST Netherlands, B.V.Inventors: Donald Allen, Jennifer Ai-Ming Leung, Aron Pentek, Thomas Roucoux
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Patent number: 8453316Abstract: A method of forming a magnetic head comprises the steps of: selectively exposing through the use of a photomask a photoresist layer unpatterned; forming a pattern for forming a pole layer by developing the photoresist layer after the exposure; and forming the pole layer through the use of the pattern. The photomask includes first to third regions. The first region has such a perimeter that a projection image thereof is shaped along a perimeter of an ideal shape of the top surface of the pole layer. The second region touches the perimeter of the first region, and is located outside the first region. The third region is located inside the first region without touching the perimeter of the first region. The third region suppresses deviation of the pole layer from its desired shape which may be caused by the effect of light reflected while the photoresist layer is exposed.Type: GrantFiled: July 2, 2009Date of Patent: June 4, 2013Assignee: Headway Technologies, Inc.Inventors: Yoshitaka Sasaki, Kazuo Ishizaki, Hiroyuki Itoh
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Patent number: 8451567Abstract: A CPP (Current Perpendicular to Plane) MR (Magnetoresistive) read head and its method of fabrication includes a patterned CPP MR sensor stack having a SAF (Synthetic Antiferromagnetic) free layer structure that is longitudinally biased by the combination of an exchange biasing layer formed over the sensor stack and hard biasing layers that are formed adjacent to the patterned sides of the stack. The combination provides the stack with high resolution reading capabilities without the necessity for a narrow read gap formed by closely spaced top and bottom shields. Sixteen embodiments are described that provide different versions of the exchange biasing layer, different positions of the hard biasing layers and different patternings of the CPP MR sensor stack.Type: GrantFiled: December 13, 2010Date of Patent: May 28, 2013Assignee: Headway Technologies, Inc.Inventors: Yuchen Zhou, Wenyu Chen, Joe Smyth
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Patent number: 8443510Abstract: A method for providing at least one transducer including magnetic structure and having an air-bearing surface (ABS) are described. The method includes providing a lapping electronic lapping guide (lapping ELG) and a targeting ELG. The lapping ELG and targeting ELG each are coplanar with the desired thickness of the magnetic structure and have a back edge at the distance from the ABS such that the ELG back edges are substantially aligned with the flare point. The targeting ELG has a front edge at a front edge distance from the ABS corresponding to an intersection of the bevel and the desired thickness. The method further includes lapping the transducer and terminating the lapping based on a first resistance of the lapping ELG and a second resistance of the targeting ELG.Type: GrantFiled: May 28, 2009Date of Patent: May 21, 2013Assignee: Western Digital (Fremont), LLCInventors: Changqing Shi, Ming Jiang, Lijie Guan
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Patent number: 8424192Abstract: A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.Type: GrantFiled: August 8, 2005Date of Patent: April 23, 2013Assignee: Western Digital (Fremont), LLCInventors: Danning Yang, Lei Wang, Yingjian Chen, Brant Nease, Kyusik Sin
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Patent number: 8418353Abstract: A method for providing energy assisted magnetic recording (EAMR) heads using a substrate are described. The substrate has front and back sides and apertures therein. The apertures are through-holes between the front and back sides of the substrate. The method includes providing a transmission medium in the apertures and fabricating EAMR transducers on the front side of the substrate. The EAMR transducers correspond to the apertures and the EAMR heads. The method also includes electrically insulating the back side of the substrate. The back side of the substrate is also prepared for mounting of the lasers. The lasers then are coupled the back side of the substrate. The lasers correspond to the EAMR heads and are configured to provide light through the apertures to the EAMR transducers. The method also includes separating the substrate into the EAMR heads.Type: GrantFiled: December 23, 2009Date of Patent: April 16, 2013Assignee: Western Digital (Fremont), LLCInventors: Mark Moravec, Suwanchai Kongdum, Anucha Nontprasat
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Patent number: 8419954Abstract: A method for fabricating a side shield for a magnetic transducer is described. The transducer has a nonmagnetic layer, a pole, a gap layer between the pole sidewalls and the nonmagnetic layer, and a hard mask having a hard mask aperture. A removal mask having a removal aperture exposing part of the pole and hard mask aperture is provided. The removal mask covers part of the hard mask aperture and the part of the hard mask. A trench in the nonmagnetic layer is formed by removing part of the nonmagnetic layer. A seed layer is deposited. A deposition mask having a deposition aperture therein is provided. The deposition aperture exposes part of the trench and part of the nonmagnetic layer. Side shield material(s) are deposited. Part of the side shield material(s) external to the deposition trench are removed. A remaining portion of the side shield material forms the side shield.Type: GrantFiled: October 31, 2011Date of Patent: April 16, 2013Assignee: Western Digital (Fremont), LLCInventors: Yan Chen, Donghong Li, Lien-Chang Wang
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Patent number: 8416528Abstract: A magnetic head includes a main pole and a return path section located above a top surface of a substrate. The main pole has an end face located in a medium facing surface. The return path section is located on the front side in the direction of travel of a recording medium relative to the main pole and is farther from the top surface of the substrate than is the main pole. The return path section has: a front end face located on the front side of the main pole in the medium facing surface; and an inclined surface located on the front side and connected to the front end face. The inclined surface is not exposed in the medium facing surface. An angle greater than 90° is formed between the front end face and the inclined surface.Type: GrantFiled: May 3, 2012Date of Patent: April 9, 2013Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Shigeki Tanemura, Kazuki Sato, Yukinori Ikegawa, Atsushi Iijima, Tatsuya Shimizu
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Patent number: 8413317Abstract: A method and system for fabricating a microelectric device are described. A write pole of an energy assisted magnetic recording head or a capacitor might be fabricated. The method includes depositing a resist film and curing the resist film at a temperature of at least 180 degrees centigrade. A cured resist film capable of supporting a line having an aspect ratio of at least ten is thus provided. A portion of the cured resist film is removed. A remaining portion of the resist film forms the line. An insulating or nonmagnetic layer is deposited after formation of the line. The line is removed to provide a trench in the insulating or nonmagnetic layer. The trench has a height and a width. The height divided by the width corresponds to the aspect ratio. At least part of the structure is provided in the trench.Type: GrantFiled: November 12, 2010Date of Patent: April 9, 2013Assignee: Western Digital (Fremont), LLCInventors: Dujiang Wan, Hai Sun, Ge Yi, Wei Gao, Hong Zhang, Guanghong Luo, Yunjun Tang, Tiffany Yun Wen Jiang, Zhigang Zhou, Wencheng Su
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Publication number: 20130081262Abstract: With at least one from among a base member and a hub member as a workpiece, a manufacturing method for a rotating device including a hub member on which a recording disk is to be mounted and a base member configured to rotatably support the hub member via a bearing unit comprises: a cutting step in which a cutting water agent is applied while the workpiece is being cut; a removing step in which the cutting water agent that remains adhered to the workpiece after cutting is removed; and an assembling step in which the rotating device is assembled using the workpiece after removing the cutting water agent.Type: ApplicationFiled: September 28, 2012Publication date: April 4, 2013Applicant: ALPHANA TECHNOLOGY CO., LTD.Inventor: Alphana Technology Co., Ltd.
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Publication number: 20130083432Abstract: A magnetic read head having a hard bias structure that both optimizes magnetic bias field and also ensures manufacturability while maintaining sensor stripe height integrity. The read head includes a sensor stack having a back edge and first and second laterally opposed sides. A hard bias structure extending from each of the first and second sides of the sensor stack has a neck portion located near the sensor and having a back edge that is aligned with and parallel to the back edge of the sensor stack. The hard bias structure also includes a flared portion having a back edge that defines an angle relative to the air bearing surface of the read head. The back edge preferably defines and angle of 45-75 degrees relative to the air bearing surface.Type: ApplicationFiled: September 29, 2011Publication date: April 4, 2013Applicant: Hitachi Global Storage Technologies Netherlands B.V.Inventors: Quang Le, Simon H. Liao, Shuxia Wang, Guangli Liu, Yongchul Ahn
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Patent number: 8407882Abstract: According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.Type: GrantFiled: September 14, 2009Date of Patent: April 2, 2013Assignee: HGST Netherlands B.V.Inventors: Takateru Seki, Zhou Wenjun, Kazuo Takeda, Takefumi Kubota
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Patent number: 8404431Abstract: A method for manufacturing a thin-film magnetic head includes processes of forming a polishing position sensor and a recording head portion alongside on one side of a wafer. The process of forming the recording head portion has a step of performing a photolithography process after applying an alkali soluble resin film and a photoresist film in the named order. The process of forming the polishing position sensor has a step of performing a photolithography process on the photoresist film while having only the photoresist film out of the alkali soluble resin film and the photoresist film.Type: GrantFiled: November 4, 2011Date of Patent: March 26, 2013Assignee: TDK CorporationInventors: Hitoshi Hatate, Hisayoshi Watanabe, Masachika Hashino, Koichi Otani
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Patent number: 8404128Abstract: A method and system for providing a magnetic recording transducer having a pole are disclosed. The pole has side(s), a bottom, and a top wider than the bottom. The method and system include providing at least one side gap layer that covers the side(s) and the top of the pole. At least one sacrificial layer is provided on the side gap layer(s). The sacrificial layer(s) are wet etchable and cover the side gap layer(s). The magnetic recording transducer is planarized after the sacrificial layer(s) are provided. Thus, a portion of the side gap and sacrificial layer(s) is removed. A remaining portion of the sacrificial layer(s) is thus left. The method and system also include wet etching the sacrificial layer(s) to remove the remaining portion of the sacrificial layer(s). A wrap around shield is provided after the remaining portion of the sacrificial layer(s) is removed.Type: GrantFiled: February 23, 2009Date of Patent: March 26, 2013Assignee: Western Digital (Fremont), LLCInventors: Hong Zhang, Ge Yi, Lei Wang, Dujiang Wan, Guanghong Luo, Xiaohai Xiang
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Patent number: 8402635Abstract: A method of manufacturing a magnetic head, including a magneto resistance effect (MR) element that reads a magnetic recording medium, is disclosed. A multilayer film is formed on a shield layer. Unnecessary portions of the multilayer film are removed from both sides of the MR element in a first direction orthogonal to a lamination direction of the multilayer film and parallel to the MR element surface facing the magnetic recording medium. An insulating layer is formed on a surface exposed by removal of the unnecessary portions. An integrated soft magnetic layer covering both sides of the MR element in the first direction and an upper side of the MR element is formed, thereby configuring a second shield layer. An anisotropy application layer is formed on the second shield layer, thereby providing exchange anisotropy to the soft magnetic layer, and magnetizing the soft magnetic layer in a predetermined direction.Type: GrantFiled: March 21, 2011Date of Patent: March 26, 2013Assignee: TDK CorporationInventors: Naomichi Degawa, Takumi Yanagisawa, Satoshi Miura, Yoshikazu Sawada, Takahiko Machita, Kenzo Makino, Takekazu Yamane, Shohei Kawasaki
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Patent number: 8393073Abstract: A method for constructing a magnetoresistive sensor that avoids shadowing effects of a mask structure during sensor definition. The method includes the use of an antireflective coating (ARC) and a photosensitive mask deposited there over. The photosensitive mask is formed to cover a desired sensor area, leaving non-sensor areas exposed. A reactive ion etch is performed to transfer the pattern of the photosensitive mask onto the underlying ARC layer. The reactive ion etch (RIE) is performed with a relatively high amount of platen power. The higher platen power increases ion bombardment of the wafer, thereby increasing the physical (ie mechanical) component of material removal relative to the chemical component. This increase in the physical component of material removal result in an increased rate of removal of the photosensitive mask material relative to the ion mill resistant mask.Type: GrantFiled: July 21, 2008Date of Patent: March 12, 2013Assignee: HGST Netherlands B.V.Inventors: Richard Jule Contreras, Michael Feldbaum, Mustafa Michael Pinarbasi
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Patent number: 8381392Abstract: A method, including depositing a layer of material onto a base portion of a wafer, is disclosed. The layer of material has a first surface adjacent the base portion. The method also includes depositing a pattern of masking material onto a portion of a second surface of the layer. Material from the layer of material that is unprotected by the pattern of masking material is removed from the layer of material. By removing such material a portion of the layer of material is suspended from the base portion.Type: GrantFiled: May 11, 2010Date of Patent: February 26, 2013Assignee: Seagate Technology LLCInventors: Jie Zou, Kaizhong Gao
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Patent number: 8381391Abstract: A method for providing a magnetic recording transducer is described. The method includes providing a pinned layer for a magnetic element. In one aspect, a portion of a tunneling barrier layer for the magnetic element is provided. The magnetic recording transducer annealed is after the portion of the tunneling barrier layer is provided. The annealing is at a temperature higher than room temperature. A remaining portion of the tunneling barrier layer is provided after the annealing. In another aspect, the magnetic transducer is transferred to a high vacuum annealing apparatus before annealing the magnetic transducer. In this aspect, the magnetic transducer may be annealed before any portion of the tunneling barrier is provided or after at least a portion of the tunneling barrier is provided. The annealing is performed in the high vacuum annealing apparatus. A free layer for the magnetic element is also provided.Type: GrantFiled: June 26, 2009Date of Patent: February 26, 2013Assignee: Western Digital (Fremont), LLCInventors: Chando Park, Qunwen Leng, Mahendra Pakala
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Patent number: 8375564Abstract: A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.Type: GrantFiled: December 8, 2009Date of Patent: February 19, 2013Assignee: Western Digital (Fremont), LLCInventors: Guanghong Luo, Danning Yang, Weimin Si, Dujiang Wan, Yun-Fei Li, Lijie Guan, Ming Jiang
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Patent number: 8375565Abstract: A method fabricates a transducer having an air-bearing surface (ABS). The method includes providing at least one near-field transducer (NFT) film and providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film. The method also includes defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film. The disk portion corresponds to a critical dimension of the NFT from an ABS location. The method also includes lapping the at least one transducer. The lapping is terminated based on a signal from the ELG.Type: GrantFiled: May 28, 2010Date of Patent: February 19, 2013Assignee: Western Digital (Fremont), LLCInventors: Yufeng Hu, Zhongyan Wang, Jinshan Li
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Patent number: 8371019Abstract: A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.Type: GrantFiled: July 20, 2011Date of Patent: February 12, 2013Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventors: Sue Siyang Zhang, Yi Zheng, Qiping Zhong, Honglin Zhu
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Patent number: 8353098Abstract: A method of manufacturing a perpendicular magnetic recording head capable of easily and accurately forming a main magnetic-pole layer having a shape suitable for concentrating a magnetic flux is provided. A nonmagnetic layer having a recessed section (a first recessed section and a second recessed section) is formed, and then an additional nonmagnetic layer is formed on an inner surface of the recessed section. Then, a magnetic layer is formed in the recessed section formed with the additional nonmagnetic layer, and then the magnetic layer is cut to form an air bearing surface, so as to form the main magnetic-pole layer.Type: GrantFiled: March 12, 2010Date of Patent: January 15, 2013Assignee: SAE Magnetics (H.K.) Ltd.Inventors: Tetsuya Mino, Naoto Matono, Ikuhito Onodera, Kazushi Nishiyama, Michitoshi Tsuchiya, Kenji Sasaki
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Patent number: 8347488Abstract: A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.Type: GrantFiled: December 9, 2009Date of Patent: January 8, 2013Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventors: Liubo Hong, Aron Pentek, Yi Zheng
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Patent number: 8347487Abstract: A fabricating method of a magnetoresistance sensor is provided with cost effective and process flexibility features. Firstly, a substrate is provided. Then, at least one magnetoresistance structure and at least one bonding pad are formed over the substrate, wherein the bonding pad is electrically connected with the magnetoresistance structure. Then, a passivation layer is formed over the magnetoresistance structure and the bonding pad. Then, a magnetic shielding and concentrator structure is formed over the passivation layer at a location corresponding to the magnetoresistance structure. Finally, bonding pad openings is formed on the passivation layer by patterned polyimide, thereby exposing the bonding pad. After bonding pad was opened, the patterned polyimide can be removed or retained as an additional protection layer.Type: GrantFiled: June 30, 2011Date of Patent: January 8, 2013Assignee: Voltafield Technology CorporationInventors: Fu-Tai Liou, Chih-Chien Liang, Chien-Min Lee
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Patent number: 8349197Abstract: A method for manufacturing a magnetic write head having a write pole and a trailing wrap around magnetic shield, and having a non-magnetic step layer and a non-magnetic bump to provide additional spacing between the write pole and the trailing wrap around shield at a location removed from the air bearing surface. A magnetic write pole material is deposited on a substrate and a non-magnetic step layer is deposited over the write pole. A reactive ion milling can he used to pattern the non-magnetic step layer to have a front edge that is located a desired distance from an air hearing surface. A patterning and ion milling process is then performed to define a write pole, and then a layer of alumina is deposited and ion milled to from a tapered, non-magnetic bump at the front the non-magnetic step layer.Type: GrantFiled: November 20, 2009Date of Patent: January 8, 2013Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventors: Liubo Hong, Wen-Chien D. Hsiao, Yimin Hsu, Yi Zheng
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Patent number: 8347489Abstract: A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.Type: GrantFiled: September 1, 2010Date of Patent: January 8, 2013Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventors: Liubo Hong, Aron Pentek, Yi Zheng, Honglin Zhu
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Patent number: 8341826Abstract: A method and system for fabricating magnetic transducer are described. The method and system include providing a main pole having a bottom, a top wider than the bottom, and a top bevel. A nonmagnetic gap covering the main pole is provided. A portion of the nonmagnetic gap resides on the top of the main pole. A first seed layer is provided. At least a portion of the first seed layer covers the portion of the nonmagnetic gap on top of the main pole. A portion of the nonmagnetic gap on the magnetic recording transducer is removed after the first seed layer is provided. A second seed layer is provided after the portion of the nonmagnetic gap is removed. The second seed layer covers at least the portion of the first seed layer. A wrap-around shield layer is provided on the second seed layer.Type: GrantFiled: April 12, 2010Date of Patent: January 1, 2013Assignee: Western Digital (Fremont), LLCInventors: Hai Jiang, Yunhe Huang, Jinwen Wang, Yun-Fei Li, Ying Hong
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Patent number: 8341825Abstract: A thermally-assisted magnetic head includes a slider including an air bearing surface (ABS) and a waveguide with a core that extends from a light entering surface to the ABS, and a laser diode (LD) unit attached to the light entering surface. The LD unit faces the light entering surface, and a photo detector faces the ABS. A polarizer that only transmits light having a polarization component orthogonal to a polarization direction of linearly polarized laser light is disposed between the ABS and the photo detector. An LD of the LD unit is activated, and the linearly polarized laser light enters the core from the light entering surface. Light radiated from the ABS enters the polarizer, and an alignment of the slider and the LD unit is performed while the photo detector detects the light transmitted through the polarizer.Type: GrantFiled: November 16, 2010Date of Patent: January 1, 2013Assignee: TDK CorporationInventors: Shinji Hara, Koji Shimazawa, Eiji Komura, Tsutomu Chou, Seiichi Takayama
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Patent number: 8336194Abstract: A method of fabricating a tunneling magnetoresistance (TMR) reader is disclosed. A TMR structure comprising at least one ferromagnetic layer and at least one nonmagnetic insulating layer is provided. A first thermal annealing process on the TMR structure is performed. A reader pattern definition process performed on the TMR structure to obtain a patterned TMR reader. A second thermal annealing process is performed on the patterned TMR reader.Type: GrantFiled: November 3, 2009Date of Patent: December 25, 2012Assignee: Western Digital (Fremont), LLCInventors: Lu Yuan, Jian X. Shen, Geoffrey W. Anderson, Christopher Ng
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Patent number: 8333008Abstract: A method and system for fabricating a perpendicular magnetic recording head, and the head so formed, are described. The method includes depositing an underlayer directly on an insulating layer. The underlayer preferably includes at least one of a nonferromagnetic metal, silicon oxide, and silicon nitride. A pole layer, which has a pole removal rate, is provided on the underlayer. The method and system further include forming a perpendicular magnetic recording pole from the pole layer. The perpendicular magnetic recording pole has a top and a bottom that is narrower than the top. The process of forming the perpendicular magnetic recording pole further includes removing a portion of the pole layer such that a pole removal rate for the pole layer is less than or substantially equal to a removal rate of the underlayer during the removing step.Type: GrantFiled: July 29, 2005Date of Patent: December 18, 2012Assignee: Western Digital (Fremont), LLCInventors: Kyusik Sin, Lei Wang, Yingjian Chen