Machining Magnetic Material (e.g., Grinding, Etching, Polishing) Patents (Class 29/603.16)
  • Patent number: 7870657
    Abstract: The manufacturing device for bending an electromagnetic element of an electrical machine, which includes a stator lamination (5), has a first device (10) for bending the stator lamination (5) to form a pre-curved stator lamination and a second device (25) for final forming of the pre-curved stator lamination. The second device (25) includes a first assembly (29) for axially fixing and pressing the pre-curved stator lamination and a second assembly for radially centering and pressing the pre-curved stator lamination. The first device (10) includes a bending mandrel (11) around which the stator lamination (5) bendable, which has an outer diameter that is larger than an inner diameter of the fully bent electromagnetic element.
    Type: Grant
    Filed: November 3, 2005
    Date of Patent: January 18, 2011
    Assignee: Robert Bosch GmbH
    Inventors: Eberhard Rau, Martin Henne, Klaus Pflueger
  • Patent number: 7866029
    Abstract: A method for forming a pattern film with a narrower width than the resolution of an exposure machine and a resist used independently of etching is provided. The method comprises the steps of: forming a first frame layer having end surfaces facing each other across a space having a width W1; forming a second frame layer having end surfaces facing each other across a space having a width W2 that is larger than the width W1, the space having the width W2 being located right above the space having the width W1; forming a trench-forming film provided with a trench having a minimum width W3 that is smaller than the width W1 so as to fill at least a part of the spaces having the width W1 and the width W2 respectively; and forming a pattern film so as to fill at least a part of the trench.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: January 11, 2011
    Assignee: TDK Corporation
    Inventors: Hirotaka Gomi, Mitsuharu Isobe, Noriyuki Ito, Hiroaki Funada, Takeshi Yamana, Makoto Terasawa, Yasuhiro Hasegawa
  • Patent number: 7861400
    Abstract: Write heads and corresponding methods of fabrication are provided using multiple electronic lapping guides to collect information regarding multiple distances of a write head, such as a throat height and a flare point distance of a write pole. A method of fabricating a write head includes fabricating a write pole and a corresponding write pole ELG. The method further includes fabricating a trailing shield and a corresponding trailing shield ELG. The method further includes performing a lapping process on the write head, and monitoring a lapping depth of the lapping process based on the resistance of the write pole ELG and the resistance of the trailing shield ELG.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: January 4, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventor: Jeffrey S. Lille
  • Patent number: 7861401
    Abstract: A high performance TMR element is fabricated by inserting an oxygen surfactant layer (OSL) between a pinned layer and AlOx tunnel barrier layer in a bottom spin valve configuration. The pinned layer preferably has a SyAP configuration with an outer pinned layer, a Ru coupling layer, and an inner pinned layer comprised of CoFeXBY/CoFeZ wherein x=0 to 70 atomic %, y=0 to 30 atomic %, and z=0 to 100 atomic %. The OSL is formed by treating the CoFeZ layer with oxygen plasma. The AlOx tunnel barrier has improved uniformity of about 2% across a 6 inch wafer and can be formed from an Al layer as thin as 5 Angstroms. As a result, the Hin value can be decreased by ? to about 32 Oe. A dR/R of 25% and a RA of 3 ohm-cm2 have been achieved for TMR read head applications.
    Type: Grant
    Filed: January 27, 2009
    Date of Patent: January 4, 2011
    Assignee: Headway Technologies, Inc.
    Inventors: Hui-Chuan Wang, Tong Zhao, Min Li, Kunliang Zhang
  • Patent number: 7841068
    Abstract: A method of fabricating a single-pole perpendicular magnetic recording head to contain a bevel angle promotion layer that facilitates the fabrication of the bevel angle in a trapezoidal main pole. The bevel angle promotion layer is made of a non-magnetic material that is softer than the material (e.g., Al2O3) that normally underlies the main pole. In one embodiment, the bevel angle promotion layer is formed between an end of the yoke and the air bearing surface (ABS), with the top surface of the bevel angle promotion layer being substantially coplanar with the top surface of the yoke. In other embodiment the bevel angle promotion layer is integrated with a leading edge taper material, which is formed of a magnetic material, to broaden the magnetic flux path between the yoke and the main pole.
    Type: Grant
    Filed: July 2, 2007
    Date of Patent: November 30, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Tsung Yuan Chen, Yimin Hsu, Yinshi Liu
  • Patent number: 7841069
    Abstract: A method of manufacturing thin closure magnetic read/write heads, such as magnetic tape heads is provided. The method provides improved flexural strength of the closure so that the closure breakage during fabrication of the heads is mitigated and closure thickness is reduced. An array of chips is fabricated on a wafer. The array is closed, with a closure strip bonded to each row of the array. Closures span only the length of a row, so that the closures are not subjected to flexure during processing and breakage due to flexure is mitigated. Side bars are bonded to the array to form a column with dimensions similar to prior art columns. This allows columns manufactured by the invention to undergo additional processing using existing processes.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: November 30, 2010
    Assignee: International Business Machines Corporation
    Inventors: Robert G. Biskeborn, Calvin S. Lo
  • Patent number: 7836579
    Abstract: A simple method is provided for protecting slider mounted read/write transducers from electrostatic discharge damage during the manufacture of disk drives. The method involves placing a ball of conducting thermoplastic resin, such as a gold or silver epoxy, between the terminal pads of the transducer and using the ball to shunt the pads to read-head shields and the slider substrate and thence to ground. The epoxy ball is easily applied and easily removed and can be used at different stages in the manufacturing process.
    Type: Grant
    Filed: November 5, 2007
    Date of Patent: November 23, 2010
    Assignee: SAE Magnetics (HK) Ltd.
    Inventors: Niraj Mahadev, Kazumasa Yasuda, Rudy Ayala
  • Patent number: 7832084
    Abstract: A method of recording servo information includes writing servo information in a data storage medium using a compound magnetic recording head. The compound magnetic recording head has a substrate including first and second magnetically permeable substrate portions and a substantially non-magnetic member interposed between the first and second magnetically permeable substrate portions. A magnetically permeable layer is provided over the first and second magnetically permeable substrate portions of the substrate and includes first and second writing gap features associated with the first and second substrate portions. The writing gap features are formed using a patterned mask layer over the magnetically permeable layer, wherein the patterned mask layer comprises first and second patterned gap features corresponding to the first and second writing gap features.
    Type: Grant
    Filed: August 28, 2006
    Date of Patent: November 16, 2010
    Assignee: Advanced Research Corporation
    Inventors: Matthew P. Dugas, Theodore A. Schwarz, Gregory L. Wagner
  • Patent number: 7832085
    Abstract: A method of manufacturing a magnetic head includes the steps of: fabricating a substructure in which pre-head portions are aligned in a plurality of rows by forming components of a plurality of magnetic heads on a single substrate; and fabricating the plurality of magnetic heads by separating the pre-head portions from one another through cutting the substructure. In the step of fabricating the substructure, the resistance of an MR film that will be formed into an MR element by undergoing lapping later is detected to determine the target position of the boundary between a track width defining portion and a wide portion of a pole layer based on the resistance detected, and the pole layer is thereby formed. In the step of fabricating the magnetic heads, the surface formed by cutting the substructure is lapped such that the MR film is lapped and the resistance thereof thereby reaches a predetermined value.
    Type: Grant
    Filed: December 27, 2007
    Date of Patent: November 16, 2010
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Tetsuro Sasaki, Yuichi Watabe, Takamitsu Sakamoto
  • Patent number: 7827674
    Abstract: A method for providing a giant magneto-resistive (GMR) sensor for use in sensing magnetic flux is provided. The method comprises positioning a layer of Cu material between first and second layers of a specified ferromagnetic material. The respective end surfaces of the Cu layer and the first and second layers are initially located in a common plane and in a co-planar relationship with one another. The method further comprises removing an amount of material from the copper layer to form a new end surface thereof that is selectively spaced apart from the common plane and applying a protective coating to the new end surface of the Cu layer to inhibit corrosion of the Cu layer.
    Type: Grant
    Filed: June 5, 2008
    Date of Patent: November 9, 2010
    Assignee: Oracle America, Inc.
    Inventors: John P. Nibarger, Herbert House
  • Patent number: 7818875
    Abstract: A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
    Type: Grant
    Filed: December 7, 2005
    Date of Patent: October 26, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Hamid Balamame, Daniel Wayne Bedell, Mary Kathryn Gutberlet, Clarence Kai-Sheng Hsieh, Aron Pentek, Yi Zheng
  • Patent number: 7810228
    Abstract: An example method for manufacturing a magneto-resistance effect element involves irradiating inert gas ions to enhance an adhesive force between an area around an oxide layer and a metallic layer.
    Type: Grant
    Filed: July 5, 2007
    Date of Patent: October 12, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiromi Yuasa, Hideaki Fukuzawa, Yoshihiko Fuji
  • Patent number: 7810226
    Abstract: A manufacturing method of a thin-film element having a lower layer with a narrower width is provided, which comprises steps of: forming a first film and a second film on the first film; forming a second layer having a width WUP obtained by trimming the second film; forming a mask film having a smaller etching rate than the first film so as to cover the second layer; forming a pattern having a width WTR larger than the width WUP, obtained by collectively trimming the mask film covering the second layer and at least an upper portion of the first film; and forming a first layer having a width WLO smaller than the width WUP or having a portion with a width WLO smaller than the width WUP, obtained by trimming the first film without changing the width WUP of the second layer.
    Type: Grant
    Filed: March 19, 2007
    Date of Patent: October 12, 2010
    Assignee: TDK Corporation
    Inventors: Hiraku Hirabayashi, Yohei Koyanagi
  • Patent number: 7805827
    Abstract: In one embodiment of the present invention, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat, removing the surface region from a hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. A high density and covering performance are obtained when the angle of irradiating the ion beam is not smaller than about 60 degrees from a normal to the air bearing surface of the magnetic head slider and when the acceleration voltage for the ion beam is not higher than about 300 V in the step of removing part of the air bearing surface overcoat.
    Type: Grant
    Filed: July 12, 2006
    Date of Patent: October 5, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Nobuto Yasui, Hiroshi Inaba, Shinji Sasaki, Kazuhito Miyata
  • Patent number: 7793406
    Abstract: A method for manufacturing a perpendicular magnetic write head having a trailing shield and with a tapered step. The method includes forming a write pole with a non-magnetic trailing gap and first and second non-magnetic side gap layers. A mask is formed having an opening over a portion of the write pole that is configured to define a non-magnetic bump. A non-magnetic bump material is deposited into the opening in a manner that defines a non-magnetic bump having a tapered front edge. A magnetic wrap around shield can then be formed over the non-magnetic bump, so that the bump forms a tapered stepped feature on the wrap-around magnetic shield. The bump location can be controlled by an electric lapping guide, which is defined to be aligned to the bump front edge.
    Type: Grant
    Filed: December 5, 2007
    Date of Patent: September 14, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Yi Zheng
  • Patent number: 7788798
    Abstract: A method for manufacturing a magnetic write head having a wrap around magnetic shield. The method allows a highly accurate short wavelength such as 193 mm photolithography to be used to accurately define the placement and critical dimension of wrap around magnetic shield. The method includes the formation of a magnetic write pole, top gap, and side gap and the deposition of a RIEable fill layer thereover, and CMP to planarization. A 193 nm photolithography and ion milling is used to form a mask over the RIEable layer and one or more reactive ion etching processes are performed to pattern the RIEable layer through 193 nm photolithography mask. A wrap around shield can then be electroplated into the opening formed in the RIEable layer.
    Type: Grant
    Filed: November 21, 2007
    Date of Patent: September 7, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Hung-Chin Guthrie, Ming Jiang, Changqing Shi, Sue Siyang Zhang
  • Patent number: 7788797
    Abstract: A method for making a perpendicular magnetic recording write head that has a write pole, a trapezoidal-shaped trailing shield notch, and a gap between the write pole and notch uses a reactive ion beam etching (RIBE) process in CHF3 that removes filler material at the side edges of the write pole and thus widens the opening at the side edges. The gap is formed of a nonmagnetic mask film, such as alumina, a nonmagnetic metal protective film and a nonmagnetic gap layer. The nonmagnetic metal film is substantially less reactive to CHF3 than the filler material and protects the underlying mask film and write pole during the widening of the opening. The gap layer and trailing shield notch are deposited into a widened opening above the write pole, so the sides of the notch diverge to cause the generally trapezoidal shape.
    Type: Grant
    Filed: April 16, 2007
    Date of Patent: September 7, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: John I. Kim, Aron Pentek
  • Patent number: 7788796
    Abstract: A method for constructing a magnetic write head using an electrical lapping guide to carefully control critical dimensions during a lapping operation used to define an air bearing surface. The lapping guide is photolithograhically patterned in a common photolithographic step with another write head structure so that special relation between the lapping guide and critical dimensions of the write head structure can be carefully maintained. The electrical lapping guide can be patterned in a common photolithographic step as the write pole so that the location of the flare point can be carefully controlled with respect to the location of the lapping guide. A stitched flare structure can also be built together with the electrical lapping guide, then a self-aligned shield can be further built over this stitched flare structure so that both flare point and shield throat can be controlled tightly together by this electrical lapping guide during lapping process.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: September 7, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Wen-Chien David Hsiao, Ming Jiang, Vladimir Nikitin, Aron Pentek, Yi Zheng
  • Patent number: 7784171
    Abstract: A method is provided for manufacturing a magneto-resistive device. The magneto-resistive device is for reducing the deterioration in the characteristics of the device due to annealing. The magneto-resistive device has a magneto-resistive layer formed on one surface side of a base, and an insulating layer formed of two layers and deposited around the magneto-resistive layer. The layer of the insulating layer closest to the base is made of a metal or semiconductor oxide. This layer extends over end faces of a plurality of layers made of different materials from one another, which make up the magneto-resistive device, and is in contact with the end faces of the plurality of layers with the same materials.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: August 31, 2010
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Tetsuya Kuwashima, Norio Takahashi
  • Patent number: 7779535
    Abstract: An MR effect element that can obtain the sufficient back flux-guide effect under the condition of reducing the capacitance between the upper and lower electrode layers is provided. The element comprises: an MR effect multilayer provided on the lower electrode layer; an insulating layer surrounding a rear side surface and side surfaces opposed to each other in track width direction of the MR effect multilayer; and an upper electrode layer provided on the MR effect multilayer and the insulating layer, the insulating layer having a concave portion filled with a portion of the upper electrode layer, the concave portion positioned near the rear side surface of the MR effect multilayer, and a bottom point of a concave of the concave portion positioned at the same level or a lower level in stacking direction compared to an upper surface of the free layer.
    Type: Grant
    Filed: November 24, 2006
    Date of Patent: August 24, 2010
    Assignee: TDK Corporation
    Inventors: Takayasu Kanaya, Kazuki Sato
  • Patent number: 7770285
    Abstract: A magnetic read/write head is produced with an insert layer between the substrate and the magnetic transducer. The insert layer has a lower coefficient of thermal expansion than the substrate, which reduces the temperature pole tip recession (T-PTR) of the head because the insert layer is an intervening layer between the substrate and magnetic transducer. The insert layer is produced by plating, e.g., an Invar layer over the substrate prior to fabricating the magnetic transducer. The Invar layer is annealed and the structure planarized prior to depositing a non-magnetic gap layer followed by the fabrication of the magnetic transducer.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: August 10, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian R. Bonhote, Malika D. Carter, David A. Dudek, Wen-Chien D. Hsiao, John W. Lam, Vladimir Nikitin
  • Patent number: 7770284
    Abstract: A manufacturing method of an MR element in which current flows in a direction perpendicular to layer planes, includes forming on a lower electrode layer an MR multi-layered film having a cap layer at a top thereof, forming a mask on the cap layer of the MR multi-layered film, patterning the MR multi-layered film by milling through the mask to form an MR multi-layered structure, forming a magnetic domain control bias layer by using a lift off method using the mask, after forming the magnetic domain control bias layer, forming an additional cap layer on the cap layer and a part of the magnetic domain control bias layer, planarizing a top surface of the additional cap layer and the magnetic domain control bias layer, and forming an upper electrode layer on the planarized top surface.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: August 10, 2010
    Assignee: TDK Corporation
    Inventors: Naoki Ohta, Takeo Kagami
  • Patent number: 7770283
    Abstract: A multi-step process for notching the P1 pole of the write head element of a magnetic head. In a first step following the fabrication of the P2 pole tip, a layer of protective material is deposited on the approximately vertical side surfaces of the P2 pole tip. Thereafter, a first ion milling step, utilizing a species such as argon, is performed to mill through the write gap layer and to notch into the P1 pole layer therebelow. The removal of redeposited material from the side surfaces of the P2 pole tip is thereafter accomplished and the protective material formed on the side surfaces of the P2 pole tip protects the P2 pole tip during the redeposition clean up step. Thereafter, the protective material is removed from the side surfaces of the P2 pole tip, and a second ion milling step is performed to further notch the P1 pole material.
    Type: Grant
    Filed: February 3, 2006
    Date of Patent: August 10, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Daniel Wayne Bedell, Vladimir Nikitin, Aron Pentek, Sue Siyang Zhang
  • Patent number: 7770281
    Abstract: A method of forming a perpendicular magnetic recording write head having a trailing shield (TS) with a precisely defined throat height (TH) on an air-bearing slider includes depositing an electrical lapping guide (ELG) layer on the substrate adjacent to and spaced from the write pole (WP) layer. A nonmagnetic TS pad layer is deposited on both the gap layer and the ELG layer, with the TS pad layer patterned to have a front edge extending across the both the ELG layer and the gap layer and recessed from the line where the substrate will be later cut to form the slider. An ELG protection layer is patterned on the ELG layer, the TS pad layer material is removed from the ELG layer in the region recessed from the TS pad layer front edge, and the ELG layer is removed in regions not covered by the ELG protection layer.
    Type: Grant
    Filed: May 10, 2007
    Date of Patent: August 10, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Aron Pentek
  • Patent number: 7765676
    Abstract: A method for constructing a magnetoresistive sensor using an etch mask that is resistant to the material removal process used to define the sensor width and stripe height. The method may include the use of a Ta etch mask formed under a photoresist mask, and the use of an ion milling process to define the sensor. The etch mask remains substantially intact after performing the ion milling and therefore is readily removed by a later CMP process. The etch mask layer is also very resistant to high temperatures such as those used in a desired atomic layer deposition of alumina, which is used to deposit conformal layers of alumina around the sensor.
    Type: Grant
    Filed: November 18, 2004
    Date of Patent: August 3, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Marie-Claire Cyrille, Elizabeth Ann Dobisz, Wipul Pemsiri Jayasekara, Jui-Lung Li
  • Patent number: 7765678
    Abstract: A method of bonding a metal ball for a magnetic head assembly is provided. The method comprises: preparing a capillary; disposing the capillary so as to face a bonding surface of the electrode pad of the slider and that of the electrode pad of the flexible printed circuit board; carrying the metal ball to the bonding surfaces by introducing the metal ball and the inactive gas stream into the carrying route of the capillary; positioning and retaining the metal ball on the bonding surfaces by the inactive gas stream passing through the carrying route and issued radially from the cutoff portions; and melting the metal ball by directly applying laser beams via the cutoff portions of the capillary, and bonding the electrode pad of the slider and the electrode pad of the flexible printed circuit board by the melted metal.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: August 3, 2010
    Assignee: TDK Corporation
    Inventors: Ooki Yamaguchi, Takao Haino
  • Patent number: 7757380
    Abstract: Methods for improving within wafer and wafer to wafer yields during fabrication of notched trailing shield structures are disclosed. Ta/Rh CMP stop layers are deposited prior to planarization and notch formation to ensure a planar surface for trailing shield structures. These stop layers may be blanket deposited or patterned prior to CMP. Patterned stop layers produce the highest yields.
    Type: Grant
    Filed: November 10, 2006
    Date of Patent: July 20, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Amanda Baer, Hung-chin Guthrie, Yimin Hsu, Ming Jiang, Aron Pentek
  • Patent number: 7748104
    Abstract: A method and structure for reducing corrosion during the manufacture of perpendicular write heads is disclosed. Auxiliary pole structures (otherwise known as trailing shields and wrap around shields) are susceptible to corrosion due to their iron containing composition and small dimensions. The impact of corrosion can be reduced by utilizing a gap material comprising an upper surface of noble metals, which extends from underneath the auxiliary pole and is exposed to the same corrosive environment during processing. The area of the exposed gap material is limited to optimize corrosion protection.
    Type: Grant
    Filed: April 25, 2006
    Date of Patent: July 6, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian Rene Bonhote, Quang Le, Jui-Lung Li, Scott Arthur MacDonald
  • Publication number: 20100162556
    Abstract: A method for manufacturing a magnetic head for magnetic data recording, that allows a lapping termination point to be easily and accurately determined during lapping. The method includes constructing a lapping guide that has an electrically is formed to provide an abrupt change in resistance at a point where lapping should be terminated. This point of abrupt resistance change is located relative to the flare point of the write pole that the distance between the flare point and the air bearing surface can be accurately maintained. This abrupt resistance change also makes it possible to monitor both a stripe height defining rough lapping and an angled kiss lapping process using a single measurement channel.
    Type: Application
    Filed: December 30, 2008
    Publication date: July 1, 2010
    Inventors: Unal Murat Guruz, Edward Hin Pong Lee, Vladimir Nikitin, Michael Ming Hsiang Yang, Yuan Yao
  • Patent number: 7743487
    Abstract: A perpendicular write head includes a beveled main pole having corners defining a track width and having a planarized surface and encapsulated on either side thereof and below by an alumina layer, the alumina layer having a polished surface and extending above the main pole on either side thereof as steps.
    Type: Grant
    Filed: June 14, 2006
    Date of Patent: June 29, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Amanda Baer, Hamid Balamane, Michael Feldbaum, Ming Jiang, Aron Pentek, Neil Leslie Robertson, Sue Siyang Zhang
  • Patent number: 7739786
    Abstract: An apparatus and a method for manufacturing a magnetic head slider are to improve product quality of the magnetic head slider while simplifying the process and reducing the manufacturing time. The apparatus includes: holding devices for holding the both ends of a block member of an array of the magnetic head sliders respectively; a cutting device for cutting out a potion in which the magnetic head sliders are to be formed from the block member; and a cut surface treatment device having cut surface treating parts on the front and back surfaces of the cutting device for treating cut surfaces opposite to each other which form the predetermined two cut surfaces of the magnetic head sliders.
    Type: Grant
    Filed: June 22, 2006
    Date of Patent: June 22, 2010
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventor: Ryuji Fujii
  • Patent number: 7739787
    Abstract: In an MR element, each of a pinned layer and a free layer includes a Heusler alloy layer. The Heusler alloy layer has two surfaces that are quadrilateral in shape and face toward opposite directions. The Heusler alloy layer includes one crystal grain that touches four sides of one of the two surfaces. In a method of manufacturing the MR element, a layered film to be the MR element is formed and patterned, and then heat treatment is performed on the layered film patterned, so that crystal grains included in a film to be the Heusler alloy layer in the layered film grow and one crystal grain that touches four sides of one of the surfaces of the film to be the Heusler alloy layer is thereby formed.
    Type: Grant
    Filed: March 8, 2007
    Date of Patent: June 22, 2010
    Assignee: TDK Corporation
    Inventors: Koji Shimazawa, Yoshihiro Tsuchiya, Tomohito Mizuno, Daisuke Miyauchi, Shinji Hara, Takahiko Machita
  • Publication number: 20100146773
    Abstract: A main pole layer is deposited within an opening in a patterned photoresist layer on a substrate. The photoresist is thinned to expose an upper portion of a pole tip region that is then trimmed to a rectangular shape while a lower portion retains an inverted trapezoidal shape. Thereafter, a second trimming process forms a pole tip with a first width in the upper rectangular portion and a second thickness and second width which is less than the first width in the lower portion. A CMP step subsequently thins the upper portion to a first thickness of 0.04 to 0.08 microns while the second thickness remains at 0.16 to 0.32 microns. The bottom surface of the lower portion along the ABS becomes the trailing edge in a recording operation. The pole tip has a consistent first width (track width) that is not influenced by CMP process variations.
    Type: Application
    Filed: February 8, 2010
    Publication date: June 17, 2010
    Inventors: Donghong Li, Yoshitaka Sasaki
  • Publication number: 20100146774
    Abstract: A method of lapping a magnetic head slider includes a step of lapping a lapping surface of a row bar provided with a plurality of MR read head elements arranged along at least one line, a step of obtaining at least one output signal from at least one of the plurality of MR read head elements of the row bar during lapping, the at least one output signal corresponding to element resistance, a step of detecting at least one peak value of the obtained at least one output signal, and a step of controlling an amount of lapping of the row bar depending upon the detected at least one peak value.
    Type: Application
    Filed: December 11, 2008
    Publication date: June 17, 2010
    Applicant: TDK Corporation
    Inventors: Naoki Ohta, Takeo Kagami
  • Patent number: 7721415
    Abstract: A thin-film magnetic head is manufactured as follows. First, a base insulating layer having a magnetic pole forming depression sunken into a form corresponding to the main magnetic pole layer is formed, a stop film for CMP is formed such as to fill the magnetic pole forming depression, and then a magnetic layer is formed on the stop film. Next, the magnetic layer is separated by forming a separation groove substantially surrounding the magnetic pole forming depression on the outside thereof, and thus separated magnetic layer is formed with a cover insulating film adapted to cover the whole upper face. The surface is polished by CMP until the stop film is exposed, so that the part of magnetic layer remaining on the inside of the magnetic pole forming depression is used as the main magnetic pole layer. Further, a recording gap layer, a write shield layer, and a thin-film coil are formed.
    Type: Grant
    Filed: April 19, 2006
    Date of Patent: May 25, 2010
    Assignees: Headway Technologies, Inc, SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Takehiro Horinaka, Takehiro Kamigama, Tatsushi Shimizu
  • Patent number: 7716814
    Abstract: Components of a plurality of magnetic heads are formed on a single substrate to fabricate a magnetic head substructure in which a plurality of pre-head portions are aligned in a plurality of rows. The substructure is cut to separate the plurality of pre-head portions from one another, and the plurality of magnetic heads are thereby fabricated. The surface formed by cutting the substructure is lapped to form a lapped surface. The lapped surface is lapped so as to reach a target position of a medium facing surface. The substructure incorporates first to fourth resistor elements each of which detects the position of the lapped surface. The third and fourth detection elements are located at positions shifted from the first and second resistor elements along the direction orthogonal to the medium facing surface.
    Type: Grant
    Filed: February 5, 2007
    Date of Patent: May 18, 2010
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Itoh, Kazuo Ishizaki, Ryuji Fujii, Tatsushi Shimizu
  • Patent number: 7716811
    Abstract: Head elements are formed on a wafer to suppress deterioration in pinning strength of a pinned layer, which is caused by ESD generated during air bearing surface polishing of a thin film magnetic head. The wafer is cut into rovers in each of which are connected head elements. Rover air bearing surfaces are polished until an MR elements attain a predetermined height. A final polishing step finishes air bearing surfaces by applying an electroconductive polishing liquid to achieve a predetermined shape and surface roughness with high accuracy. A pinning defect occurrence rate is reduced by suppressing deterioration in pinning strength of a pinned layer of a read element. To achieve this, a specific resistance of the electroconductive polishing liquid is controlled to 5 G?·cm or less. A shallow rail and a deep rail are formed on the air bearing surfaces, and the rover is cut into thin film magnetic heads.
    Type: Grant
    Filed: October 27, 2006
    Date of Patent: May 18, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Takateru Seki, Akihiro Namba, Hideo Yamakura, Takahiro Noji
  • Patent number: 7712204
    Abstract: A manufacturing method of a thin-film head includes the steps of, laminating and patterning a soft magnetic layer with iron alloy that contains silicon and aluminum through a base layer on a substrate; laminating an insulating layer on the patterned soft magnetic layer; performing a chemical-mechanical polishing of a surface of the laminated insulating layer and the patterned soft magnetic layer with a first acid slurry; forming a lower shield layer by a mechanical polishing with a second weak acid, or neutral slurry with a pH different from that of the first slurry; and forming a lower shield gap layer and a magnetoresistive effect layer on the lower shield layer.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: May 11, 2010
    Assignee: TDK Corporation
    Inventors: Kazuhiko Maejima, Makoto Hasegawa, Atsuhiro Nonaka, Hiroshi Kamiyama, Teruhisa Shindo, Hiroshi Yamazaki
  • Patent number: 7712205
    Abstract: In a magnetic head manufacturing method, a floated surface of each block having plural magnetic head elements formed and arranged on a substrate is ground and lapped in a grinding/lapping step. The grinding/lapping step contains an angle adjusting step for adjusting the angle of the floated surface of the block with reference to a magnetic-head-element formed surface of a substrate and grinding the floated surface concerned, and a finishing lapping step of lapping the floated surface at an angle adjusted in the angle adjusting step.
    Type: Grant
    Filed: November 16, 2005
    Date of Patent: May 11, 2010
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshiaki Ito, Osamu Fukuroi, Hiroyasu Tuchiya, Kenji Kodaka
  • Patent number: 7712207
    Abstract: A method for manufacturing a magnetic write pole and trailing wrap around magnetic shield for use in a perpendicular magnetic data recording system. The method includes the use of a hard mask structure with end point detection material embedded in a hard mask material. The novel hard mask structure provides the mill resistance of a hard mask, with the end point detection advantages of an end point detection layer.
    Type: Grant
    Filed: December 22, 2006
    Date of Patent: May 11, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Aron Pentek, Yi Zheng, Howard Gordon Zolla
  • Patent number: 7712206
    Abstract: A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.
    Type: Grant
    Filed: May 22, 2006
    Date of Patent: May 11, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Ming Jiang, Aron Pentek, Yi Zheng
  • Patent number: 7698807
    Abstract: Formation of the magnetic sensor layers of a magnetic sensor are separated into at least two depositions to reduce the dimension of the sensor. The free layer portion of the sensor is deposited at a different process step than the pinned layer portion. The top of the free layer stack can be a tunnel barrier, the free layer, or part of the free layer. The free layer stack also may contain an in-stack bias layer. The longitudinal bias layer may be patterned in a separate processing step, which allows the stack containing the free layer to be effectively thinner and allow smaller track width dimensions.
    Type: Grant
    Filed: January 20, 2006
    Date of Patent: April 20, 2010
    Assignee: Hitachi Global Storage Technologies, Netherlands B.V.
    Inventors: Jeffrey Robinson Childress, Robert E. Fontana, Jr., Jeffrey S. Lille
  • Publication number: 20100077600
    Abstract: According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.
    Type: Application
    Filed: September 14, 2009
    Publication date: April 1, 2010
    Inventors: Takateru Seki, Zhou Wenjun, Kazuo Takeda, Takefumi Kubota
  • Publication number: 20100073816
    Abstract: An aspect of the present invention relates to a magnetic head employed in a linear tape drive in the form of a sliding-contact linear tape drive. The magnetic head comprises multiple indentations that are observed in a surface topographic image viewed by a scanning probe microscope on a surface (sliding contact surface) of sliding contact with a magnetic tape, and the multiple indentations satisfy (1) to (4) below: (1) an average area of the indentations in the sliding contact surface ranges from about 0.2 ?m2 to about 1.0 ?m2; (2) a standard deviation of an area of the indentations ranges from about 0.5 ?m2 to about 2.0 ?m2; (3) an area ratio of the indentations in the sliding contact surface ranges from about 20 percent to about 50 percent; and (4) an average depth of the indentations is equal to or greater than about 15 nm.
    Type: Application
    Filed: September 24, 2009
    Publication date: March 25, 2010
    Applicant: FUJIFILM Corporation
    Inventors: Yasushi KOMORI, Shiho Kamisawa
  • Patent number: 7681303
    Abstract: Embodiments of the present invention provide a method of manufacturing a magnetic head slider, the method being adapted so that throat height of a main magnetic pole piece of a perpendicular recording magnetic head can be controlled with high accuracy. According to one embodiment, a first Electrical Lapping Guide element (ELG) is disposed on the same layer as a plated underlayer of a shield of one write head in a row bar, and other ELGs are disposed on the same layer as that of a main magnetic pole piece of another write head. Front end positions (Tops) are detected from changes in resistance values of the other ELGs and an ending position of lapping is calculated. Since the front end positions (Tops) of the other ELGs are accurate, it is possible to assign a correlation to throat height “Th” of the main magnetic pole piece and the resistance value of the first ELG by detecting this resistance value existing when the front end positions (Tops) are detected.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: March 23, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Akira Kondo, Koji Tanaka, Kimitoshi Etoh, Ichiro Oodake
  • Patent number: 7676905
    Abstract: A magnetoresistive sensor having a pinned layer that extends beyond the stripe height defined by the free layer of the sensor. The extended pinned layer has a strong shape induced anisotropy that maintains pinning of the pinned layer moment. The extended portion of the pinned layer has sides beyond the stripe height that are perfectly aligned with the sides of the sensor within the stripe height. This perfect alignment is made possible by a manufacturing method that uses a mask structure for more than one manufacturing phase, eliminating the need for multiple mask alignments.
    Type: Grant
    Filed: August 15, 2005
    Date of Patent: March 16, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Mustafa Michael Pinarbasi
  • Patent number: 7661188
    Abstract: In a manufacturing method of a glass substrate for a magnetic disk including a cleaning process of the glass substrate, the cleaning process includes a process of contacting the glass substrate with a cleaning solution containing a compound, such as thioglycolic acid or a thioglycolic acid derivative, having a thiol group as a functional group.
    Type: Grant
    Filed: March 24, 2006
    Date of Patent: February 16, 2010
    Assignee: Hoya Corporation
    Inventor: Yoshinori Marumo
  • Patent number: 7657992
    Abstract: A method of making a perpendicular magnetic recording (PMR) head with single or double coil layers and with a small write shield stitched onto a main write shield. The stitched shield allows the main write pole to produce a vertical write field with sharp vertical gradients that is reduced on both sides of the write pole so that adjacent track erasures are eliminated. From a fabrication point of view, both the main pole and the stitched shield are defined and formed using a single photolithographic process, a trim mask and CMP lapping process so that the main shield can be stitched onto a self-aligned main pole and stitched shield.
    Type: Grant
    Filed: December 11, 2007
    Date of Patent: February 9, 2010
    Assignee: Headway Technologies, Inc.
    Inventors: Cherng-Chyi Han, Kenichi Takano
  • Patent number: 7650684
    Abstract: A method for fabricating a magnetic head including a spin valve sensor having a sensor layer stack that includes a pinned magnetic layer, a spacer layer formed on the pinned magnetic layer, and a free magnetic layer formed on the spacer layer. In a preferred embodiment the spacer layer is comprised of CuOx. The method includes the plasma smoothing of the upper surface of the pinned magnetic layer prior to depositing the spacer layer, and a preferred plasma gas is a mixture of argon and oxygen.
    Type: Grant
    Filed: July 16, 2004
    Date of Patent: January 26, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Wen-Yaung Lee, Tsann Lin, Danielle Mauri, Alexander Michael Zeltser
  • Patent number: 7645182
    Abstract: An apparatus for lapping a slider comprises a lapping head for supporting elements while pressing the elements against a rotating lapping plate, the elements that are to be formed into sliders, a holding mechanism for supporting the lapping head, the holding mechanism having a first engaging member that extends in a vertical direction, a base for supporting the holding mechanism, the base having a second engaging member that extends in the vertical direction, wherein the second engaging member is engaged with the first engaging member to form an internal space therebetween, and a decompressing mechanism for decompressing the internal space. The holding mechanism is subjected to vertically upward force from the decompressed internal space in order to be movably supported by the base in the vertical direction.
    Type: Grant
    Filed: March 24, 2008
    Date of Patent: January 12, 2010
    Assignee: Sae Magnetics (H.K.) Ltd.
    Inventors: Kiyohiko Abe, Masashi Kobayashi, Hiroyasu Tsuchiya, Santoso Tan, Zhong Xian Wei, Chun Hua Zhang, Fa Hong Li, Ming Yuan Chen