By Etching Patents (Class 29/603.18)
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Patent number: 6877212Abstract: A magnetic disk apparatus includes a magnetic reproducing head portion, and a magnetic recording head including a lower magnetic core and an upper magnetic core having a end portion and a rear portion. The rear portion is formed using a negative resist or an electron beam resist to form a frame for plating above the end portion of the upper magnetic core head.Type: GrantFiled: September 28, 2001Date of Patent: April 12, 2005Assignee: Hitachi Global Storage Technologies Japan, Ltd.Inventors: Tomohiro Okada, Tetsuya Okai, Shinobu Sasaki, Tadayuki Iwakura, Naoki Koyama, Harunobu Saito, Makoto Morijiri
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Patent number: 6868600Abstract: A method of manufacturing a thin film magnetic head having superior overwrite characteristics as well as an extremely small pole width is disclosed. The thin film magnetic head has a thin film coil provided in a recess region of a bottom pole. This makes it possible to appropriately ensure a thickness of the thin film coil, as well as to reduce a thickness of a second pole tip portion, and therefore it is possible to ensure superior overwrite characteristics, as well as to form the second pole tip portion having an extremely small uniform width. The method of manufacturing a thin film magnetic head forms a recess region in a second magnetic layer close to a first magnetic layer, and forms a first thin film coil for constituting a part of the thin film coil in the recess region.Type: GrantFiled: October 9, 2001Date of Patent: March 22, 2005Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Patent number: 6865798Abstract: A method for shaping an ABS of a magnetic head slider including a step of holding at least one row bar with a plurality of aligned thin-film magnetic head elements by adhering a first surface of the at least one row bar to an adhesive or UV tape capable of passing a laser beam there through, the first surface being opposite an ABS of the at least one row bar, a step of shaping the ABS of the at least one row bar in a convex shape by radiating a laser beam to the first surface of the at least one row bar through the adhesive or UV tape, a step of cutting the at least one row bar into individual magnetic head sliders, and a step of then, removing the magnetic head sliders from the adhesive or UV tape after weakening adhesion properties of the adhesive or UV tape.Type: GrantFiled: May 14, 2002Date of Patent: March 15, 2005Assignee: SAE Magnetics (H.K.) Ltd.Inventor: Osamu Fukuroi
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Patent number: 6862798Abstract: A method of making a magnetic head assembly wherein the magnetic head assembly has a write head with a pole tip includes the steps of forming a shaping layer on an underlying layer wherein the shaping layer has a side surface and a top surface, ion beam sputter depositing a ferromagnetic material layer on the underlying layer and on the side and top surfaces of the shaping layer and removing first and second portions of the ferromagnetic material layer from the underlying layer and the top surface of the shaping layer, respectively, leaving a remaining portion of the ferromagnetic material layer on the side surface of the shaping layer which is the aforementioned pole tip.Type: GrantFiled: January 18, 2002Date of Patent: March 8, 2005Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventors: James Bernard Kruger, Benjamin Lu chen Wang, Patrick Rush Webb, Howard Gordon Zolla
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Patent number: 6859998Abstract: An article is formed as a substrate having a projection extending outwardly therefrom. The article may be a magnetic recording head and the projection a write pole. The projection has a width in a thinnest dimension measured parallel to a substrate surface of no more than about 0.3 micrometers and a height measured perpendicular to the substrate of not less than about 5 times the width. The article is fabricated by forming an overlying structure on the substrate with an edge thereon, depositing a replication layer lying on the edge, depositing a filler onto the edge and the substrate, so that the filler, the replication layer, and the overlying structure in combination comprise a continuous layer on the substrate, selectively removing at least a portion of the replication layer from a free surface of the continuous layer inwardly toward the substrate, to form a defined cavity, and depositing a projection material into the defined cavity to form the projection.Type: GrantFiled: April 12, 2002Date of Patent: March 1, 2005Assignee: International Business Machines CorporationInventors: James Kruger, Benjamin L. Wang, Patrick R. Webb, Howard G. Zolla
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Patent number: 6854175Abstract: A method of manufacturing a thin film magnetic head capable of improving a yield while making a pole width extremely minute with high precision is provided. A write gap layer and a bottom pole are selectively etched in a region other than a portion corresponding to a front end part through the RIE with the front end part having an extremely minute uniform width as a mask in an atmosphere of gas including at least chlorine out of chlorine and boron trichloride and at an ambient temperature within a range of 30° C. to 300° C. The width (pole width) of a pole portion can be made uniform with high precision along a length direction so that the yield of the thin film magnetic head can be improved.Type: GrantFiled: October 12, 2001Date of Patent: February 15, 2005Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Patent number: 6851178Abstract: One of the major requirements for higher frequency extendability is to reduce yoke length and inductance in order to have fast saturation. This has been accomplished by using a design that provides a cavity in the lower pole piece inside which is located at least two coils, one on top of the other. A process for manufacturing the device is also described.Type: GrantFiled: October 24, 2002Date of Patent: February 8, 2005Assignee: Headway Technologies, Inc.Inventors: Cherng Chyi Han, Mao-Min Chen, Pokang Wang, Yimin Guo
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Patent number: 6849148Abstract: A magnetic tape head assembly is provided along with a method of manufacturing a magnetic tape head. The magnetic tape head comprises a cluster of thin film inductive or magnetoresistive read/write elements, an I-block preferably made of a ceramic material, a U-bar also preferably made of a ceramic material, and a base preferably made of a ceramic or metal material. The U-bar has a substantially U-shaped form providing a recess into which the I-block and the cluster are fixed. A bottom surface of the U-bar, I-block, and cluster is fixed to the base to form a slider assembly. A top surface of the U-bar, I-block, and cluster is machined or etched to form one or more tape bearing surfaces thereon.Type: GrantFiled: April 2, 2003Date of Patent: February 1, 2005Assignee: Lafe Technology LimitedInventor: Chuck Fai Lam
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Patent number: 6836956Abstract: A method of manufacturing a thin film magnetic head in which a top pole is divided into a pole tip and a tope pole layer, and the pole tip is formed on the flat surface of a bottom pole with a write gap layer in between. An insulating layer is formed in a region adjacent to the pole tip. A first layer of thin film coil is formed in a region wherein the insulating layer is formed. The thin film coil is covered by the insulating layer whose surface is flattened. A surface of the top pole layer facing the recording medium can be formed recessed from a surface of the pole tip facing the recording medium.Type: GrantFiled: December 6, 2001Date of Patent: January 4, 2005Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Publication number: 20040252416Abstract: Two embodiments of a GMR sensor of the bottom spin valve (BSV) spin filter spin valve (SFSV) type are provided together with methods for their fabrication. In each embodiment the sensor includes an in-situ naturally oxidized specularly reflecting layer (NOL) which is a more uniform and dense layer than such layers formed by high temperature annealing or reactive-ion etching. In one embodiment, the sensor has an ultra thin composite free layer and a high-conductance layer (HCL), providing high output and low coercivity. In a second embodiment, along with the same NOL, the sensor has a laminated free layer which includes a non-magnetic conductive layer, which also provides high output and low coercivity. The sensors are capable of reading densities exceeding 60 Gb/in2.Type: ApplicationFiled: June 12, 2003Publication date: December 16, 2004Applicant: Headway Technologies, Inc.Inventors: Cheng T. Horng, Ru-Ying Tong
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Publication number: 20040250414Abstract: A process for directly debonding sliders during single slider processing includes placing the sliders in pockets in a divider with one surface of each slider contacting a tape. A planerization material encapsulates the portions of the sliders which are not in contact with the tape. The planerization material is cured and the assembly is bonded to a process carrier. After ABS are etched into the sliders, the sliders are debonded by heating, cleaned, and inspected. The divider is removed from the carrier with the sliders still attached to the divider by the planerization material. The divider is then sandwiched between two lids to form a shim stack to enhance removal of the planerization material. The planerization material is removed in a hot solvent ultra-sonic bath and the lids are then removed for additional cleaning and inspection of the sliders.Type: ApplicationFiled: June 16, 2003Publication date: December 16, 2004Applicant: Hitachi Global Storage Technologies Netherlands B.V.Inventor: Xavier Charles Lelong
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Patent number: 6821715Abstract: A suspended resist bridge suitable for lithographically patterning MR sensors having trackwidths narrower than 0.2 micron is fabricated using the method of the present invention. First, PMGI is spun onto a substrate to form a first thin resist layer. Next, PMMA is spun onto the first resist layer to form a second resist layer. The PMMA layer is exposed to an electron beam to pattern the trackwidth of the MR sensors. E-beam exposed PMMA is then developed in an IPA solution. The resist structure is then placed in a basic solution for dissolving PMGI, which results in a fully undercut resist bridge that is used for patterning the MR sensors.Type: GrantFiled: May 10, 2001Date of Patent: November 23, 2004Assignee: International Business Machines CorporationInventors: Robert Edward Fontana, Jr., Jordan A. Katine, Jennifer Liu, Scott A. MacDonald, Michael J. Rooks, Hugo Alberto Emilio Santini
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Patent number: 6817086Abstract: A bilayer mask employed for lift off has a top strip which bridges between first and second bilayer portions and is completely undercut so that when one or more materials is sputter deposited the materials do not form fences abutting recessed edges of a bottom layer in undercuts below a top layer. Sacrificial protective layers are formed on a sensor and lead layers for protecting these components while overlapping portions of these materials on the top of the sensor formed during deposition can be removed by ion beam sputtering, after which the sacrificial protective layers can be removed by ion milling or reactive ion etching.Type: GrantFiled: August 12, 2002Date of Patent: November 16, 2004Assignee: International Business Machines CorporationInventors: Jennifer Qing Lu, Scott Arthur MacDonald, Hugo Alberto Emilio Santini
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Patent number: 6813824Abstract: A liquid resist is introduced between adjacent conductive lines of a coil pattern girdling around a magnetic core piece. When the liquid resist is cured, an insulating resin filler can be fixed between the adjacent conductive lines of the coil pattern. An insulating metallic layer is formed to extend over the insulting resin filler and the conductive lines of the coil pattern. Thereafter, the insulating metallic layer is subjected to a flattening grinding treatment until at least a part of the conductive line is exposed at a flattened surface. Of the resist, of a higher fluidity, penetrates in every hole and corner between the adjacent conductive lines, the gap defined between the adjacent conductive lines is fully filled with the insulating material. No voids remain in the gap. The conductive line of the coil can be reliably prevented from corrosion or oxidation. Moreover, a relatively brittle of fragile insulating resin filler is reliably prevented from being subjected to the flattening.Type: GrantFiled: December 23, 2002Date of Patent: November 9, 2004Assignee: Fujitsu LimitedInventors: Minoru Hasegawa, Yoshinori Ohtsuka, Yuji Uehara, Takashi Sekikawa, Hiroshi Maeda, Masahiro Kakehi, Ikuya Tagawa, Tomoko Kutsuzawa, Syuji Nishida
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Patent number: 6804879Abstract: A method for producing a magnetic transducer with a inductive write head having a multilayer coil with a high aspect ratio and a short yoke is provided. A damascene process is used for two coil layers and a conventional process for the third coil layer. The process of the invention allows a seed layer for the coil to be deposited on the side walls of the trenches for the first and second coil layers. In one embodiment the seed layer for the coil is preceded by an adhesion layer.Type: GrantFiled: October 23, 2002Date of Patent: October 19, 2004Assignee: Hitachi Global Storage Technologies Netherlands, B.V.Inventors: Richard D. Hsiao, Quang Le, Edward Hin Pong Lee, Paul Phong Nguyen, Son Van Nguyen, Denny D. Tang, Bradley Douglas Webb, Patrick Rush Webb, Samuel Wei-san Yuan
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Patent number: 6804878Abstract: A method is provided of smoothing the perturbations on a surface, in particular the surface of a magnetic head slider, the method comprising several steps. At least one air-bearing surface to be smoothed is exposed to an ion species generated from a defined source to form a beam of incident radiation. The beam has a linear axis emanating from the source and thus forms an angle of incident radiation with respect to the surface to be smoothed. The at least one surface is smoothed by exposing the surface(s) to be smoothed to the beam of incident radiation, where the angle of incident radiation is less than 90° relative to a vertical axis drawn perpendicular to the surface to be smoothed. To make a corrosion resistant magnetic head slider, the method further comprises coating the smoothed surface with a layer of amorphous carbon.Type: GrantFiled: December 21, 1999Date of Patent: October 19, 2004Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventors: Richard Thomas Campbell, Richard Hsiao, Yiping Hsiao, Son Van Nguyen, Thao John Pham
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Patent number: 6799365Abstract: A manufacturing process of a disc drive slider has one or more bars with dull ends as a protection feature to prevent contact between peripheral edges of an air bearing surface and a disc surface when the slider is misaligned with the disc surface. The dull ends can be formed by a process of undercutting a resist layer during etching.Type: GrantFiled: June 25, 2002Date of Patent: October 5, 2004Assignee: Seagate Technology LLCInventor: Zine-Eddine Boutaghou
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Publication number: 20040190205Abstract: The present invention provides a thin film magnetic head and a method of manufacturing the same in which a magnetic sensitive layer can be excellently formed as a single magnetic domain while adapting the head to higher recording density and, further, which can display a higher resistance change rate. First magnetic domain control parts sandwich an upper layer part including a magnetic sensitive layer having first width W1, and second magnetic domain control parts sandwich a lower layer part having second width W2 which is larger than the first width W1. With such a configuration, while narrowing the magnetic sensitive layer, a vertical bias magnetic field having both sufficient intensity and uniformity can be applied to the magnetic sensitive layer. As a result, it can be promoted to form the magnetic sensitive layer as a single magnetic domain while adapting the head to higher recording density, so that reading operation can be performed more stably.Type: ApplicationFiled: March 26, 2004Publication date: September 30, 2004Applicant: TDK CORPORATIONInventor: Daisuke Miyauchi
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Publication number: 20040190206Abstract: A magnetic domain control underlayer is formed below a magnetoresistive multi-layered film thereby bringing the magnetic domain control film into contact with both lateral end faces of a free layer and appropriate magnetic domain control can be attained in a state of minimizing a surplus bias magnetic field from the magnetic domain control film.Type: ApplicationFiled: September 30, 2003Publication date: September 30, 2004Applicant: Hitachi Global Storage Technologies Japan, Ltd.Inventors: Norihiro Ookawa, Shuichi Kojima, Koji Okazaki, Satoshi Shigematsu, Yasunari Tajima
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Patent number: 6793557Abstract: An electrical lapping guide is disclosed which is suitable for use with a single slider having a magnetic recording head. The electrical lapping guide provides for monitoring the progression of lapping; does not require additional electrical connection pads; and, is removable after completion of lapping.Type: GrantFiled: May 24, 2002Date of Patent: September 21, 2004Assignee: International Business Machines CorporationInventors: Richard D. Bunch, Timothy Clark Reiley
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Patent number: 6792670Abstract: A method is provided for manufacturing a magnetoresistive device substructure. The substructure includes: a TMR element; a bias field inducing layer that covers the TMR element; and a front flux probe layer formed on the bias field inducing layer and introducing a signal flux to the TMR element. In the manufacturing method, the TMR element and a dummy element are first formed. The dummy element has a shape similar to the TMR element and located in a specific position with respect to the TMR element. Next, the bias field inducing layer is formed on the TMR element in a specific position referring to the position of the dummy element. At the same time, a dummy bias field inducing layer is formed in a position located off the dummy element. Next, the front flux probe layer and a dummy front flux probe layer are formed at the same time on the bias field inducing layer and the dummy element, respectively.Type: GrantFiled: March 16, 2001Date of Patent: September 21, 2004Assignee: TDK CorporationInventors: Kazuki Sato, Noriaki Kasahara, Koji Shimazawa
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Publication number: 20040179307Abstract: A magnetoresistive read head has read head layers that are shaped to form an air bearing surface and a sensor stripe cavity with an open side at the air bearing surface. A sensor stripe is deposited in the sensor stripe cavity. The sensor stripe has a front surface that is set back from the air bearing surface to define an encapsulation cavity extending from the front surface to the air bearing surface. An encapsulation layer is deposited in the encapsulation cavity. The encapsulation layer encapsulates the front surface.Type: ApplicationFiled: March 12, 2003Publication date: September 16, 2004Applicant: Seagate Technology LLCInventors: Daniel Paul Burbank, Kevin Richard Heim
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Patent number: 6785952Abstract: A first magnetic film, a gap film, a thin film coil supported by a insulated film and a second magnetic film are formed in turn. The second magnetic film has a pole part opposite to the first magnetic film via the gap film and a yoke part extending backward from the pole part to be magnetically connected to the first magnetic film. The forefront surface of the yoke part is receded from an air bearing surface. The pole part of the second magnetic film has a step d1 in a running direction of a magnetic recording medium and a step d2 in the perpendicular direction to the running direction within the yoke forefront surface and its periphery as is viewed from the yoke forefront surface. A protective film embeds the steps d1 and d2, and covers an inductive type thin film magnetic head element entirely. Thereby, without debasing the overwrite characteristic when the pole part is miniaturized, a thin film magnetic head having a narrowed track width can be provided.Type: GrantFiled: February 19, 2002Date of Patent: September 7, 2004Assignee: TDK CorporationInventor: Akifumi Kamijima
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Patent number: 6785954Abstract: A method for fabricating a longitudinally hard biased, bottom spin valve GMR sensor with a lead overlay (LOL) conducting lead configuration and a narrow effective trackwidth. The advantageous properties of the sensor are obtained by providing two novel barrier layers, one of which prevents oxidation of and Au diffusion into the free layer during annealing and etching and the other of which prevents oxidation of the capping layer during annealing so as to allow good electrical contact between the lead and the sensor stack.Type: GrantFiled: April 17, 2002Date of Patent: September 7, 2004Assignee: Headway Technologies, Inc.Inventors: Cheng T. Horng, Mao-Min Chen, Chen-Jung Chien, Cherng-Chyi Han, Ru-Ying Tong, Chyu-Jiuh Torng, Hui-Chuan Wang
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Patent number: 6785953Abstract: A method of making a magnetic head, which has an air bearing surface (ABS) and a back gap (BG), comprising the steps of: forming a second pole tip of a second pole piece with a top surface and a bottom surface at an ABS site for said ABS; the top surface of the second pole tip having a write region located at the ABS site and a stitch region which is recessed in its entirety from the ABS site toward said back gap; depositing a protective sacrificial layer on the write region of the second pole tip; removing said sacrificial layer from only the stitch region of the second pole tip; and forming a second pole piece yoke of a second pole piece magnetically connected to the stitch region of the second pole tip.Type: GrantFiled: June 18, 2001Date of Patent: September 7, 2004Assignee: International Business Machines CorporationInventor: Hugo Alberto Emilio Santini
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Patent number: 6785955Abstract: A method and system for providing a writer is disclosed. The method and system include providing a first pole, an insulator covering a portion of the first pole and a coil on the first insulator. The coil includes a plurality of turns. The method and system also include providing a second insulator covering the coil, providing a second pole on the second insulator and providing a write gap separating a portion of the first pole from a second portion of the second pole. A first portion of the second pole is coupled with the first pole. In one aspect, the method and system include providing a coil having a plurality of turns with a pitch of no more than 1.2 micrometers. In another aspect, the plurality of turns of the coil is provided using a hard mask layer on a photoresist layer. A portion of the hard mask layer and a portion of the photoresist layer define a plurality of spaces between the pluralities of turns of the coil. In another aspect, the writer is a pedestal defined zero throat writer.Type: GrantFiled: January 23, 2001Date of Patent: September 7, 2004Assignee: Western Digital (Fremont), Inc.Inventors: Yingjian Chen, Hugh Craig Hiner, Benjamin Chen, Xizeng Shi, Kyusik Sin
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Patent number: 6783874Abstract: First electrode layers are formed on second antiferromagnetic layers, and in a step separate from the above, second electrode layers are formed above internal end surfaces of the second antiferromagnetic layers and the first electrode layers and parts of the upper surface of the multilayer film with an additional film provided therebetween. Since the first and the second electrode layers are formed separately, it is not necessary to perform mask alignment twice, and hence an overlap structure can be precisely formed in which the thickness of the second electrode layer at the left side is equivalent to that at the right side.Type: GrantFiled: April 2, 2003Date of Patent: August 31, 2004Assignee: Alps Electric Co., Ltd.Inventors: Naoya Hasegawa, Eiji Umetsu, Naohiro Ishibashi, Masahiro Oshima
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Publication number: 20040160709Abstract: A method for forming a top spin-valve SyAP GMR read sensor having a novel conductive lead overlay configuration and the sensor so formed. The lead overlay electrically contacts the sensor at a position within the SyAP pinned layer, thus simultaneously assuring improved electrical contact and destroying the GMR properties of the sensor at the junction to improve the definition of the sensor track width.Type: ApplicationFiled: February 19, 2004Publication date: August 19, 2004Applicant: HEADWAY TECHNOLOGIES, INC.Inventors: Charles C. Lin, Cheng T. Horng, Min Li, Kochan Ju
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Patent number: 6775902Abstract: A magnetic head is fabricated by providing a substrate with a planar surface, forming at least one cavity in the planar substrate, depositing a second yoke layer in the cavity, forming a second pole tip in the cavity in contact with the second yoke layer, patterning an inductive coil in the cavity, depositing a gap layer over the second pole tip, sputtering a first pole tip over the gap layer, etching the first and second pole tips and the gap layer to form a stack of layers, depositing a protective layer over the stack of layers, leveling the protective layer to expose the first pole tip, and patterning a first yoke layer in contact with the first pole tip.Type: GrantFiled: June 9, 2000Date of Patent: August 17, 2004Assignee: Western Digital (Fremont) Inc.Inventors: Yiming Huai, Durga P. Ravipati, Mark D. Thomas, Carlos Corona, William D. Jensen
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Publication number: 20040150922Abstract: A magneto-resistive device is provided for reducing the deterioration in the characteristics of the device due to annealing. The magneto-resistive device has a magneto-resistive layer formed on one surface side of a base, and an insulating layer formed of two layers and deposited around the magneto-resistive layer. The layer of the insulating layer closest to the base is made of a metal or semiconductor oxide. This layer extends over end faces of a plurality of layers made of different materials from one another, which make up the magneto-resistive device, and is in contact with the end faces of the plurality of layers with the same materials.Type: ApplicationFiled: December 30, 2003Publication date: August 5, 2004Applicant: TDK CORPORATIONInventors: Takeo Kagami, Tetsuya Kuwashima, Norio Takahashi
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Publication number: 20040145836Abstract: In a magnetoresistive head according to the present invention, a magnetic domain control film formed at the end of a free layer of a stack of magnetoresistive layers is formed of a Co alloy film, and an underlayer controlling the crystallization state of the Co alloy film and an amorphous metal film layer for controlling the crystallization state of the underlayer are disposed below the magnetic domain control film.Type: ApplicationFiled: September 16, 2003Publication date: July 29, 2004Applicant: Hitachi Global Storage Technologies Japan, Ltd.Inventors: Shuichi Kojima, Norihiro Ookawa, Koji Okazaki, Yasunobu Yanagisawa, Akira Morinaga
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Publication number: 20040125513Abstract: A thin-film magnetic head comprises a magnetoresistive film, a pair of magnetic domain control layers for applying a bias magnetic field to the magnetoresistive film, a pair of electrode layers for supplying a current to the magnetoresistive film, first and second shield layers for shielding the magnetoresistive film, a first insulating layer disposed between the magnetoresistive film and magnetic domain control layer and the first shield layer, and a second insulating layer disposed between the magnetoresistive film and electrode layer and the second shield layer. The shield layers have a distance therebetween shorter at a position where the electrode layer and magnetic domain control layer are laminated than that at a position where the magnetoresistive film is located.Type: ApplicationFiled: December 5, 2003Publication date: July 1, 2004Applicant: TDK CORPORATIONInventors: Kosuke Tanaka, Koji Shimazawa, Koichi Terunuma
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Publication number: 20040117976Abstract: The method of making a thin-film magnetic head in accordance with the present invention forms a cover layer on an insulating layer about a magnetoresistive film so as to eliminate a protrusion riding on the magnetoresistive film. Then, the protrusion can be eliminated by etching. The part of insulating layer clad with the cover layer is not etched. This can prevent short-circuit from occurring because of thinning the insulating layer.Type: ApplicationFiled: November 10, 2003Publication date: June 24, 2004Applicant: TDK CORPORATIONInventors: Kazuki Sato, Takeo Kagami
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Publication number: 20040109265Abstract: A spin valve sensor with a thin antiferromagnetic (AFM) layer exchange coupled to a self-pinned antiparallel coupled bias layer in the lead overlap regions is provided. The spin valve sensor comprises a ferromagnetic bias layer antiparallel coupled to a free layer in first and second passive regions where first and second lead layers overlap the spin valve sensor layers and a thin AFM layer exchange coupled to the bias layer to provide a pinning field to the bias layer.Type: ApplicationFiled: December 6, 2002Publication date: June 10, 2004Applicant: International Business Machines CorporationInventor: Hardayal Singh Gill
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Publication number: 20040109263Abstract: A manufacturing method of a magnetic head includes a process for forming a lift-off mask pattern on a magnetoresistance effect element, such that the upper part of the lift-off mask pattern is larger in size than the lower part, a process for forming a couple of electrodes on the magnetoresistance effect element using the lift-off mask pattern as a mask, and a process for removing the lift-off mask pattern. The process for forming the lift-off mask pattern is performed according to a dry etching process.Type: ApplicationFiled: March 27, 2003Publication date: June 10, 2004Inventors: Shoichi Suda, Masayuki Takeda, Keiji Watanabe
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Patent number: 6747842Abstract: A thin film magnetic head and a method of manufacturing the same allowing miniaturization of a magnetic pole width with high precision are provided. After forming a first insulating layer portion having an opening between a thin film coil and a position corresponding to the ABS to cover the thin film coil, a second insulating layer portion is formed to cover at least this opening. A top pole is then formed on the second insulating layer portion. Because part of the second insulating layer portion is provided in the opening, the surface of the second insulating layer portion is positioned lower at the portion corresponding to the opening region as compared to the configuration where no opening is disposed in the first insulating layer portion. As a result, the apex angle is reduced, thereby making it possible to miniaturize a tip portion of the top pole with high precision.Type: GrantFiled: December 21, 2001Date of Patent: June 8, 2004Assignee: SAE Magnetics (H.K.) Ltd.Inventor: Naoto Matono
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Publication number: 20040103524Abstract: A read sensor for a magneto resistive head is formed through the use of a bilayer lift-off mask. According to one embodiment, a release layer is formed on top of a sensor layer. A silicon-containing resist layer is formed over the release layer. The resist layer is patterned according to the desired dimensions of the read sensor. Then, plasma etching, such as oxygen plasma etching, is used to remove the portion of the release layer that is exposed by removal of resist material. The release layer may be etched to undercut the patterned resist layer, or may entirely removed beneath the patterned resist layer to provide a bridge of the resist material. In either case, isotropic plasma etching, anisotropic plasma etching, or some combination thereof may be applied.Type: ApplicationFiled: December 2, 2002Publication date: June 3, 2004Inventors: Gregory Breyta, Mark Whitney Hart, Bulent Nihat Kurdi, Dennis Richard McKean, Alfred Floyd Renaldo, Douglas Johnson Werner
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Patent number: 6742242Abstract: A method of manufacturing a combination type thin film magnetic head having an inductive type thin film magnetic head supported by a substrate including forming a first magnetic layer extending from an air bearing surface and forming an insulating layer on a surface of a portion of the first magnetic layer such that the insulating layer extends at least the air bearing surface and includes a -shaped cut-out portion.Type: GrantFiled: October 9, 2001Date of Patent: June 1, 2004Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Patent number: 6742241Abstract: To provide a method of manufacturing a thin film magnetic head capable of realizing an accurate control of a pole width and a sufficient overwrite characteristic even when the pole width is narrowed. In a connecting portion of an intermediate portion and a tip portion in a top pole, a step face in a width direction of almost the right angle is provided. The step face has a first corner at an intersection portion between the step face and a side face in the tip portion. A positive photoresist is used for a photolithography process to form the top pole. A photomask used at the time of exposure includes a projection in a shape having an acute angle portion in a portion corresponding to the first corner in the top pole. Consequently, a wedge-shaped recess is formed in the first corner in the top pole. Thus, even when the throat height is changed, the recording track width is not changed and the recording track width can be prevented from being widened.Type: GrantFiled: July 3, 2000Date of Patent: June 1, 2004Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Patent number: 6735850Abstract: The present invention provides an improved bias magnet-to-magnetoresistive element interface and method of fabrication. In a preferred embodiment, the wall/walls of an MR element opposing a bias layer are formed by over etching to provide vertical side walls without taper. In the preferred embodiment, a protective element is formed over the MR element to protect it during etch processes. In some embodiments, a filler layer is deposited prior to bias layer formation. In CIP embodiments, any portion of the filler layer forming on vertical side walls of the MR element is etched to provide an exposed side wall surface for contiguous bias layer formation. In CPP embodiments, the filler layer forms on a vertical back wall and electrically insulates the MR element from the bias layer.Type: GrantFiled: May 20, 2002Date of Patent: May 18, 2004Assignee: Western Digital (Fremont), Inc.Inventors: Matthew Gibbons, Kenneth E. Knapp, Ronald A. Barr, Benjamin P. Law, James Spallas, Ming Zhao
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Publication number: 20040085684Abstract: A magnetic head for use with a magnetic recording medium includes a top write pole for use in recording information on the magnetic recording medium, and a solenoidal coil structure having a lower coil layer disposed below the top write pole and an upper coil layer disposed above the top write pole. The upper coil layer and the lower coil layer are insulated from the top write pole.Type: ApplicationFiled: November 5, 2002Publication date: May 6, 2004Inventors: Vijay K. Basra, Lawrence G. Neumann, Zhenghao Jeffrey Liu
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Patent number: 6729015Abstract: A method of manufacturing a thin film magnetic head includes forming a recording gap layer of a non-alumina base nonmagnetic material on a lower magnetic pole layer, the lower magnetic pole layer being composed of materials that are milled at the same rate. An upper magnetic pole layer is formed on the recording gap layer, and a single piece of equipment is used to trim the lower magnetic pole layer and pattern the recording magnetic gap layer such that the lower magnetic pole layer has a width that is substantially the same as that of the upper magnetic pole layer. The recording gap layer and the upper and lower half-gap layers are then removed over a region of the underlying substrate. Prescribed areas of tan air-bearing surface (ABS) are then etched to form a slider shape having a protruding part and a depressed part, the ABS and the side surface having a common edge such that the depressed part along the common edge extends into, but not beyond, the region.Type: GrantFiled: October 8, 1999Date of Patent: May 4, 2004Assignee: Read-Rite SMI CorporationInventors: Naoto Matono, Tatsuya Shiromoto, Tomihito Miyazaki
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Publication number: 20040075960Abstract: Although it is known that exchange bias can be utilized in abutted junctions for longitudinal stabilization, a relatively large moment is needed to pin down the sensor edges effectively. Due to the inverse dependence of the exchange bias on the magnetic layer thickness, a large exchange bias has been difficult to achieve by the prior art. This problem has been solved by introducing a structure in which the magnetic moment of the bias layer has been approximately doubled by pinning it from both above and below through exchange with antiferromagnetic layers. Additionally, since the antiferromagnetic layer is in direct abutted contact with the free layer, it acts directly to help stabilize the sensor edge, which is an advantage over the traditional magnetostatic pinning that had been used.Type: ApplicationFiled: October 22, 2002Publication date: April 22, 2004Applicant: Headway Technologies, Inc.Inventors: Yun-Fei Li, Hui-Chuan Wang, Chyu-Jiuh Torng, Cherng-Chyi Han, Mao-Min Chen
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Patent number: 6722018Abstract: A method of making a magnetic write head includes forming a strip of negative photoresist on a wafer at an ABS site with a width that defines a track width of the write head and which has a height above a desired height of a second pole tip. An alumina layer is formed on the wafer and on the strip with a thickness above the wafer that is equal to or greater than a desired height of the second pole tip. The alumina layer is then mechanically polished until the negative photoresist strip is exposed. The negative photoresist strip is then removed leaving an opening in the alumina layer after which the second pole tip is formed in the opening. In a first embodiment of the invention the second pole tip and the second pole piece yoke are one piece and are planar and in a second embodiment of the invention a P2 yoke is stitched to the second pole tip. In both embodiments the first pole piece of the write head can be notched without damaging the second pole tip.Type: GrantFiled: June 18, 2001Date of Patent: April 20, 2004Assignee: International Business Machines CorporationInventor: Hugo Alberto Emilio Santini
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Patent number: 6721143Abstract: As the dimensions of spin valve heads continue to be reduced, a number of difficulties are being encountered. One such is with the longitudinal bias when an external magnetic field can cause reversal of the hard magnet, thereby causing a hysteric response by the head. This coercivity reduction becomes more severe as the hard magnet becomes thinner. This problem has been overcome by inserting a decoupling layer between the antiferromagnetic layer that is used to stabilize the pinned layer of the spin valve itself and the soft ferromagnetic layer that is used for longitudinal biasing. This soft ferromagnetic layer is pinned by a second antiferromagnetic layer deposited on it on its far side away from the first antiferromagnetic layer. The presence of the decoupling layer ensures that the magnetization of the soft layer is determined only by the second antiferromagnetic layer. The inclusion of the decoupling layer allows more latitude in etch depth control during manufacturing.Type: GrantFiled: August 22, 2001Date of Patent: April 13, 2004Assignee: Headway Technologies, Inc.Inventors: You Feng Zheng, Kochan Ju, Cheng T. Horng, Simon Liao, Ru Ying Tong
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Patent number: 6718623Abstract: A reproducing head of a thin-film magnetic head incorporates an MR element, a pair of bias field applying layers located to be adjacent to the side portions of the MR element, and a pair of electrode layers that are located on the bias field applying layers and overlap the MR element. The electrode layers each have a first layer that is laid over part of the top surface of the MR element via a protection layer, and a second layer that overlaps the first layer. In the method of manufacturing the reproducing head, after forming the protection layer on an element-to-be film to make the MR element, a first electrode-to-be film to make the first layers is formed continuously without interposing a step of exposing the protection layer to the air.Type: GrantFiled: May 17, 2002Date of Patent: April 13, 2004Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.)Inventors: Yoshitaka Sasaki, Takehiro Kamigama
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Publication number: 20040061982Abstract: The GMR read head includes a GMR read sensor and a longitudinal bias (LB) stack in a read region, and the GMR read sensor, the LB stack and a first conductor layer in two overlay regions. In its fabrication process, the GMR read sensor, the LB stack and the first conductor layer are sequentially deposited on a bottom gap layer. A monolayer photoresist is deposited, exposed and developed in order to open a read trench region for the definition of a read width, and RIE is then applied to remove the first conductor layer in the read trench region. After liftoff of the monolayer photoresist, bilayer photoresists are deposited, exposed and developed in order to mask the read and overlay regions, and a second conductor layer is deposited in two unmasked side regions. As a result, side reading is eliminated and a read width is sharply defined by RIE.Type: ApplicationFiled: September 29, 2003Publication date: April 1, 2004Inventors: Tsann Lin, Daniele Mauri
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Publication number: 20040061985Abstract: A magneto-resistive (MR) sensor is provided including a pinned layer, and a free layer disposed above the pinned layer. Also included is a pair of leads disposed over portions of the free layer. Further, a pinning layer is disposed below the pinned layer. Disposed below the pinning layer is an underlayer. For enhanced operation, first portions of the pinned layer disposed below the leads have a first pinned layer magnetization parallel with a free layer magnetization associated with the free layer in the absence of an external field. Further, a second portion of the pinned layer has a second pinned layer magnetization perpendicular with the free layer magnetization in the absence of the external field.Type: ApplicationFiled: September 26, 2002Publication date: April 1, 2004Applicant: INTERNATIONAL BUSINESS MACHINESInventor: Jeffrey G. McCord
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Publication number: 20040060165Abstract: The object of the invention is to provide a thin film magnetic head and a method of manufacturing the same, which allow the magnetic pole width to be precisely controlled and a sufficient overwrite performance to be attained even in a case where the magnetic pole width is microfabricated. The coupling position where the intermediate portion and the tip of the top pole are coupled each other is located closer to the air bearing surface than the throat height 0 position (TH0 position) which is the reference point for determining the throat height TH. The tip of the top pole defines the write track width on a recording medium. At least the portion of the intermediate portion from the TH0 position to the rear edge portion of the tip has a width wider than that of the tip. The intermediate portion suppresses saturation of the magnetic flux before flowing into the tip of the top pole.Type: ApplicationFiled: September 17, 2003Publication date: April 1, 2004Applicant: TDK CorporationInventor: Yoshitaka Sasaki
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Publication number: 20040057163Abstract: A read head, which has a head surface facing a moving magnetic medium, includes a read sensor that has first and second side top surface portions and a central top surface portion located between the first and second side top surface portions. First and second overlaying lead layers interface the first and second side top surface portions. First and second hard bias and tapered lead layers interface the first and second overlaying lead layers. A central top surface portion of the read sensor has a width that defines a track width of the read sensor. A method of making the read head includes ion-milling a partially oxidized portion of a cap layer and, after depositing the aforementioned first and second hard bias and tapered lead layers, preferentially reactive ion etching (RIE) the overlaying lead layer not covered by the first and second hard bias and tapered lead layers, so as to define the central top surface portion of the read sensor.Type: ApplicationFiled: September 25, 2002Publication date: March 25, 2004Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: Tsann Lin