By Etching Patents (Class 29/603.18)
  • Patent number: 7251878
    Abstract: A method and apparatus for defining leading edge taper of a write pole tip is disclosed. The fabrication process uses reactive ion etching to fabricate LET with tight control of the placement of LET's edge and to achieve higher angle for providing a higher effective write field at the pole tip while minimizing ATI for high-density perpendicular recording. The placement of a resist's edge is used to define the LET's edge and a CMP process is used to provide a planar surface for the fabrication of the write pole.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: August 7, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Quang Le, Jui-Lung Li, Yvette Chung Nga Winton, Sue Siyang Zhang, Yi Zheng
  • Patent number: 7249407
    Abstract: A method of manufacturing a magnetic head is provided which can improve controlling a thickness of a gap layer. A coil base layer having at least a surface layer formed of one or two or more alloys selected from Au, Ru, and Rh is formed on a contact layer. Thereby, since a surface of the coil base layer is not oxidized due to air exposure, the contact layer is not oxidized. As such, the coil base layer protects the contact layer, so that it is not necessary to perform an etching process for removing an oxide layer, as in the related art. Therefore, it is possible to further improve controlling a thickness of a gap layer without cutting the gap layer by the etching process, as compared with the related art.
    Type: Grant
    Filed: February 1, 2006
    Date of Patent: July 31, 2007
    Assignee: Alps Electric Co., Ltd.
    Inventor: Kiyoshi Kobayashi
  • Patent number: 7249408
    Abstract: The method of manufacturing a thin-film magnetic head in accordance with the present invention comprises the steps of forming a first magnetic pole layer; removing both sides in a track width direction of the first magnetic pole layer so as to leave a predetermined residual area in the first magnetic pole layer; forming an insulating layer about the residual area of the first magnetic pole layer; forming a gap layer made of a nonmagnetic material; forming a second magnetic pole layer magnetically connected to the first magnetic pole; and patterning the second magnetic pole layer by etching while using a mask.
    Type: Grant
    Filed: March 24, 2004
    Date of Patent: July 31, 2007
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Takehiro Kamigama, Hironori Araki
  • Patent number: 7246427
    Abstract: Biasing schemes used for CIP GMR devices were previously thought to be impractical for CPP devices due to current shunting by the abutted hard magnets. In the present invention the CPP stripe is a narrow conductor directly above the free layer. The resistivity of the latter is made to be relatively high so the sensing current diverges very little as it passes through it. This makes it possible to use abutted hard magnets for longitudinal bias with virtually no loss of sensing current due to shunting by the magnets.
    Type: Grant
    Filed: February 3, 2004
    Date of Patent: July 24, 2007
    Assignee: Headway Technologies, Inc.
    Inventors: Yimin Guo, Li-Yan Zhu
  • Patent number: 7246424
    Abstract: A magnetic device having a magnetic feature, the magnetic feature including a magnetic portion comprising a magnetic material, a region of non-magnetic material adjacent to the magnetic portion, and a stop layer disposed above the region of non-magnetic material, defining a planar upper boundary of the magnetic portion.
    Type: Grant
    Filed: April 13, 2004
    Date of Patent: July 24, 2007
    Assignee: Seagate Technology LLC
    Inventors: Picheng Huang, Paul E. Anderson, Laura C. Stearns, Song S. Xue
  • Patent number: 7240418
    Abstract: A slider includes a slider main body and a thin-film magnetic head element. The slider main body has an air bearing surface, an air inflow end, and an air outflow end. The air bearing surface has a first part closer to the air outflow end, a second part closer to the air inflow end, and a border part between the first part and the second part. The second part is slanted against the first part so that the entire air bearing surface has a convex shape bent at the border part.
    Type: Grant
    Filed: June 17, 2005
    Date of Patent: July 10, 2007
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Itoh, Takehiro Kamigama
  • Patent number: 7237323
    Abstract: A method of making a magnetic head having an air bearing surface (ABS) composed of a flat and smooth worked surface and having a reduced step produced between a rail portion on the ABS and an element portion. Steps of the method include forming an electromagnetic transducing element including an insulating layer on a board, and then removing only a specific plane of the board opposed to a magnetic recording medium up to a first predetermined depth. Forming an insulating film composed of the same material as that of the element insulating layer on the surface of the board after the removal. Polishing the surface of the element portion and then the insulating film is polished by a chemical mechanical polishing method till the element is exposed. Then forming a recessed portion having a second predetermined depth on the insulating film.
    Type: Grant
    Filed: September 9, 2004
    Date of Patent: July 3, 2007
    Assignee: TDK Corporation
    Inventor: Shunichi Katase
  • Patent number: 7237322
    Abstract: A method for making a tunnel valve head with a flux guide. The tunnel valve sensor is created by forming a tunnel valve at a first shield layer. The tunnel valve includes a free layer distal to the first shield layer, a first insulation layer deposited over the first shield layer and around the tunnel valve, a flux guide formed over the first insulation layer and coupling to the tunnel valve at the free layer, a second insulation layer formed over the flux guide and a second shield layer formed over the second insulation layer. The flux guide and the free layer are physically isolated by the first and second insulation layers to prevent current shunts therefrom. The structure achieves physical connection between the flux guide and the free layer and insulates the flux guide from the shields.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: July 3, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Hardayal Singh Gill
  • Patent number: 7237321
    Abstract: A method is described which uses a CMP resistant metal layer to replace the upper dielectric layer in the track width definition phase of a TMR or CPP spin valve magnetic head. The metal which is selected to be resistant to the CMP process can be rhodium (Rh), platinum (Pt), chromium (Cr), vanadium (V), etc. The additional CMP resistance of the refill layer structure provides a much larger processing window which results in higher yields. A CPP head according to the invention has a metal layer according to the invention above the hard bias structures on the sides of the sensor which define the track width.
    Type: Grant
    Filed: July 30, 2004
    Date of Patent: July 3, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Marie-Claire Cyrille, Frederick Hayes Dill, Jui-Lung Li
  • Patent number: 7231705
    Abstract: A pattern forming method includes forming a resist pattern for lift off of a first film disposed on a surface side of a base, patterning the first film by dry etching using the resist pattern as a mask, depositing a second film after patterning, removing the resist pattern to remove a portion of the second film on the resist pattern, and etching the surface side of the base after removing the resist pattern. The etching includes dry-etching the surface side of the base using etching particles with a main incident angle of the etching particles to the surface side of the base being set in a range of 60° to 90° relative to a normal direction of the one surface of the base. The dry etching is performed while rotating the base about an axis substantially parallel with the normal direction.
    Type: Grant
    Filed: February 9, 2004
    Date of Patent: June 19, 2007
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Kazuki Sato
  • Patent number: 7228617
    Abstract: The GMR read head includes a GMR read sensor and a longitudinal bias (LB) stack in a read region, and the GMR read sensor, the LB stack and a first conductor layer in two overlay regions. In its fabrication process, the GMR read sensor, the LB stack and the first conductor layer are sequentially deposited on a bottom gap layer. A monolayer photoresist is deposited, exposed and developed in order to open a read trench region for the definition of a read width, and RIE is then applied to remove the first conductor layer in the read trench region. After liftoff of the monolayer photoresist, bilayer photoresists are deposited, exposed and developed in order to mask the read and overlay regions, and a second conductor layer is deposited in two unmasked side regions. As a result, side reading is eliminated and a read width is sharply defined by RIE.
    Type: Grant
    Filed: September 29, 2003
    Date of Patent: June 12, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventors: Tsann Lin, Daniele Mauri
  • Patent number: 7225528
    Abstract: A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
    Type: Grant
    Filed: October 26, 2004
    Date of Patent: June 5, 2007
    Assignee: TDK Corporation
    Inventors: Takahiro Suwa, Mitsuru Takai, Kazuhiro Hattori, Shuichi Okawa
  • Patent number: 7219415
    Abstract: The method of manufacturing a thin film magnetic head is capable of precisely forming a core section with preventing the variation of the write-core head caused by ion milling for removing an electric conductive film and capable of improving yield of products. The method of manufacturing a thin film magnetic head, in which a core section having prescribed write-core width is formed by applying ion milling to an upper magnetic pole and a lower magnetic pole, comprises the steps of examining the write-core width of the core section; covering a surface of the core section with a protection film except an electric conductive film for preventing electro static charge of a wafer; and removing the exposed electric conductive film by ion milling.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: May 22, 2007
    Assignee: Fujitsu Limited
    Inventor: Masahiro Kakehi
  • Patent number: 7210217
    Abstract: A wire gap film is formed on a flat coplanar surface formed on a bottom pole by a bottom track pole and a thin film coil, first and second magnetic material films constituting a top pole are formed on a flat surface of the thin film coil, and the first and second magnetic material films, write gap film and bottom track pole are partially removed forming a top track pole and trim structure. The thin film coil is formed by first and second thin film coil halves having self-aligned coil windings and have a CVD formed first conductive film, and an electrolytic plating formed second conductive film. A thin insulating film is interposed between successive coil windings of the first and second thin film coil halves. Jumper wirings, formed with the top pole, connect innermost and outermost coil windings of the first and second thin film coil halves respectively.
    Type: Grant
    Filed: September 21, 2005
    Date of Patent: May 1, 2007
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.), Ltd.
    Inventors: Yoshitaka Sasaki, Takehiro Kamigama
  • Patent number: 7207100
    Abstract: A method of manufacturing a magnetic head manufactures a magnetic head having a base, and a laminate stacked on the base and including a magneto-resistive device. The method mechanically polishes a surface of a structure including the base and the laminate close to a magnetic recording medium, wherein the surface of the structure includes an end face of the laminate including an end face of the magneto-resistive device and a surface of the base. Next, the method selectively etches a first region on the surface of the structure close to the magnetic recording medium, wherein the first region includes the surface of the base but does not include the end face of the magneto-resistive device. Subsequently, the method entirely etches the surface of the structure close to the magnetic recording medium.
    Type: Grant
    Filed: December 17, 2004
    Date of Patent: April 24, 2007
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Kunihiro Ueda, Kentaro Nagai, Shunji Saruki
  • Patent number: 7207099
    Abstract: A thin-film magnetic head comprises a read head and a write head. The read head and the write head are placed such that a top shield layer of the read head and a bottom pole layer of the write head are opposed to each other. A magnetism intercepting layer is provided between the top shield layer and the bottom pole layer. The magnetism intercepting layer is made of a nonmagnetic metal material that is capable of being formed through plating, such as platinum. The top shield layer, the magnetism intercepting layer and the bottom pole layer are consecutively formed through plating.
    Type: Grant
    Filed: February 15, 2005
    Date of Patent: April 24, 2007
    Assignee: TDK Corporation
    Inventors: Atsushi Yamaguchi, Shigeru Shoji
  • Patent number: 7207098
    Abstract: A method of forming a reader of a magnetic head includes multiple processing steps. First, a sensor is formed having an air bearing surface. Next, a hard mask is formed on the sensor extending a distance from the air bearing surface substantially equal to the desired stripe height of the sensor. Finally, a portion of the sensor not covered by the hard mask is removed.
    Type: Grant
    Filed: June 27, 2003
    Date of Patent: April 24, 2007
    Assignee: Seagate Technology LLC
    Inventors: Huaqing Yin, David C. Seets, Hong Wang
  • Patent number: 7200918
    Abstract: Embodiments include a slider having a silicon body and at least one carbide pad structure embedded therein. At least one head structure for reading and/or writing data is located on the silicon body. The silicon body includes an air bearing surface on which the head is located. The air bearing surface also includes at least a portion of the carbide pad structure thereon. In one aspect, the metal carbide structure may be made from a material such as titanium carbide, zirconium carbide, vanadium carbide, tungsten carbide, or molybdenum carbide. In another aspect, the head may be located on the air bearing surface between carbide pad structures.
    Type: Grant
    Filed: June 20, 2003
    Date of Patent: April 10, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Jeffrey S. Lille
  • Patent number: 7197814
    Abstract: A writing magnetic pole portion composed of a first magnetic film and a second magnetic film formed on the first magnetic film via a gap film is fabricated on a given wafer. Then, the writing magnetic pole portion is swung forward and backward around a rotation standard axis parallel to a center line of the writing magnetic pole portion in a direction parallel to a surface of the. Then, the writing magnetic pole portion is milled during the swing of the writing magnetic pole portion to define the width of the writing magnetic pole portion.
    Type: Grant
    Filed: June 13, 2005
    Date of Patent: April 3, 2007
    Assignee: TDK Corporation
    Inventors: Taro Oike, Makoto Yoshida, Tetsuo Miyazaki, Shin Narushima, Hiroyuki Miyamoto
  • Patent number: 7194798
    Abstract: Methods suitable for use in making a write coil of a magnetic head includes the steps of forming a seed layer made of ruthenium (Ru) over a substrate; forming, over the seed layer, a patterned resist having a plurality of write coil trenches patterned therein; electroplating electrically conductive materials within the plurality of write coil trenches to thereby form a plurality of write coil layers; removing the patterned resist; and performing a reactive ion etch (RIE) in ozone gas (O3) for removing exposed seed layer materials in between the plurality of write coil layers. Advantageously, the write coil layers remain undamaged from the RIE in the ozone gas. Other structures may be fabricated in a similar manner.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: March 27, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian René Bonhôte, Quang Le
  • Patent number: 7194796
    Abstract: A magnetic head and method for forming the same. Leads are added to a wafer stack having a free layer, a bias layer, and a spacer layer between the free layer and bias layer. A gap is formed between the leads. A protective layer is added to the wafer stack such that the gap is covered, as well as facing ends of the leads. Material is removed from at least one side area of the wafer stack using the protective layer as a mask. The protective layer is removed. A portion of the bias layer below the gap is processed for reducing a magnetic moment of the bias layer in the portion of the bias layer below the gap for forming a sensor in which magnetic moments of end portions of the free layer are pinned by magnetic moments of end portions of the bias layer, and preferably antiparallel thereto.
    Type: Grant
    Filed: July 10, 2003
    Date of Patent: March 27, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Kim Y. Lee, Jih-Shiuan Luo
  • Patent number: 7194797
    Abstract: Methods for use in forming a CPP read sensor for a magnetic head are disclosed. In a particular example, a plurality of read sensor layers are formed over a first shield layer and a resist without undercuts is formed over the plurality of read sensor layers in a central region. With the resist in place, read sensor materials in side regions adjacent the central region are removed by milling to thereby form a read sensor structure in the central region. Insulator materials and metallic seed materials are then deposited in the side regions. High angle ion milling is performed to reduce a thickness of the insulator materials, the metallic seed materials, or both, along sidewalls of the read sensor structure. Magnetic hard bias materials are subsequently deposited over the metallic seed materials, and a second shield layer is formed over the structure after the resist is removed.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: March 27, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Mustafa Michael Pinarbasi
  • Patent number: 7185417
    Abstract: A method for shaping an ABS of a magnetic head slider including a step of holding at least one row bar with a plurality of aligned thin-film magnetic head elements by adhering a first surface of the at least one row bar to an adhesive or UV tape capable of passing a laser beam there through, the first surface being opposite an ABS of the at least one row bar, a step of shaping the ABS of the at least one row bar in a convex shape by radiating a laser beam to the first surface of the at least one row bar through the adhesive or UV tape, a step of cutting the at least one row bar into individual magnetic head sliders, and a step of then, removing the magnetic head sliders from the adhesive or UV tape after weakening adhesion properties of the adhesive or UV tape.
    Type: Grant
    Filed: January 4, 2005
    Date of Patent: March 6, 2007
    Assignee: Sae Magnetics (H.K.) Ltd.
    Inventor: Osamu Fukuroi
  • Patent number: 7185415
    Abstract: A method for fabricating a magnetic head includes forming a first pole and a flux shaping layer in spaced relation to the first pole. A nonmagnetic layer is formed adjacent the flux shaping layer and positioned on an air bearing surface (ABS) side of the flux shaping layer. A tapered recess is created in the nonmagnetic layer, the taper of the recess increasing (i.e., becoming deeper) towards the flux forming layer. The recess is filled with a magnetic material. A probe layer is formed such that it is in electrical communication with the magnetic material filling the recess.
    Type: Grant
    Filed: August 29, 2003
    Date of Patent: March 6, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Gautam Khera, Sanford J. Lewis, Galina Moutchaidze, Aron Pentek, Hugo Alberto Emilio Santini, Mason Lamar Williams, III
  • Patent number: 7181829
    Abstract: A main magnetic pole layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed under the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily introduce a recording magnetic field to a fore end of the main magnetic pole layer.
    Type: Grant
    Filed: September 8, 2005
    Date of Patent: February 27, 2007
    Assignee: Alps Electric Co., Ltd.
    Inventors: Toru Takahashi, Hisayuki Yazawa, Hideki Gochou, Kiyoshi Kobayashi, Minoru Yamada, Kiyoshi Sato, Toshinori Watanabe
  • Patent number: 7181828
    Abstract: In a method for manufacturing a perpendicular magnetic recording head, a groove defined by the inner side surfaces of a first nonmagnetic layer and the top surface of a main magnetic pole layer is formed using the difference in etching rates for dry etching between the main magnetic pole layer and the first nonmagnetic layer. An auxiliary magnetic pole layer is formed on the groove with a nonmagnetic material layer disposed therebetween. A projection integrated with the auxiliary magnetic pole layer is formed in a recess of the nonmagnetic material layer on the groove. This projection extends toward the main magnetic pole layer.
    Type: Grant
    Filed: August 6, 2004
    Date of Patent: February 27, 2007
    Assignee: Alps Electric Co., Ltd.
    Inventors: Hisayuki Yazawa, Kiyoshi Kobayashi
  • Patent number: 7178222
    Abstract: Insulating layers are formed on both sides of a multilayer film, and bias layers are formed in contact with at least portions of both end surfaces of a free magnetic layer. The bias layers are formed so as not to extend to the upper surface of the multilayer film. In this construction, a sensing current from electrode layers appropriately flows through the multilayer film, and a bias magnetic field can be supplied to the free magnetic layer from the bias layers through both side surfaces of the free magnetic layer. Furthermore, the magnetic domain structure of the free magnetic layer can be stabilized to permit an attempt to decrease instability of the reproduced waveform and Barkhausen noise.
    Type: Grant
    Filed: September 5, 2003
    Date of Patent: February 20, 2007
    Assignee: Alps Electric Co., Ltd.
    Inventor: Naoya Hasegawa
  • Patent number: 7178221
    Abstract: In a thin-film magnetic head having a multilayered film developing a magnetoresistive effect, which is present between an upper shielding layer and a lower shielding layer both formed above an AlTiC substrate, a recess for defining the lower shielding layer is formed in an underlayer present on a surface of the AlTiC substrate, and a lower shielding layer made of NiFe is provided in the recess. A SiO2 film is interposed between the underlayer and the lower shielding layer.
    Type: Grant
    Filed: September 23, 2004
    Date of Patent: February 20, 2007
    Assignee: Alps Electric Co., Ltd.
    Inventor: Kiyoshi Sato
  • Patent number: 7174621
    Abstract: A thin film magnetic head has coil layer formed in a space surrounded by a lower core layer, a protruding layer and a back gap layer. The top of these layers are planarized to a continuous flat surface. A lower magnetic pole layer, a gap layer, an upper magnetic pole layer and an upper core layer are formed on the flat surface and are precisely formed in a predetermined shape. The track width Tw can also be set to a predetermined dimension by the width of the upper magnetic pole layer at a surface facing the recording medium. Also, the magnetic path can be shortened to improve magnetic properties.
    Type: Grant
    Filed: January 27, 2005
    Date of Patent: February 13, 2007
    Assignee: Alps Electronic Co., Ltd.
    Inventors: Kiyoshi Sato, Toshinori Watanabe, Toshihiro Kuriyama
  • Patent number: 7174623
    Abstract: A method of making a magnetic head involves providing a partially constructed magnetic head which has a top surface formed by a front P2 pole tip, a back gap P2 pedestal, and insulator materials disposed between the front P2 pole tip and the back gap P2 pedestal; forming a layer of selectively etchable materials over the top surface of the partially constructed magnetic head, the layer having a front edge that is recessed away from an air bearing surface (ABS); forming additional insulator materials over the selectively etchable material layer and over a front portion of the front P2 pole tip; performing a chemical-mechanical polishing (CMP) to form a substantially coplanar top surface with the selectively etchable material layer and the additional insulator materials; etching to remove the selectively etchable material layer; and depositing yoke layer materials over the resulting structure.
    Type: Grant
    Filed: April 15, 2004
    Date of Patent: February 13, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Edward Hin Pong Lee
  • Patent number: 7162791
    Abstract: Currently, in a process of manufacturing a top spin valve structure, the shield-to-shield separation of a spin valve head cannot be below about 800 ?, mainly due to sensor-to-lead shorting problems. This problem has now been overcome by inserting a high permeability, high resistivity, thin film shield on the top or bottom (or both) sides of the spin valve sensor. A permeability greater than about 500 is required together with a resistivity about 5 times greater than that of the free layer and an MrT value for the thin film shield that is 4 times greater than that of the free layer.
    Type: Grant
    Filed: December 14, 2004
    Date of Patent: January 16, 2007
    Assignee: Headway Technologies, Inc.
    Inventors: Kochan Ju, Cheng Horng, Youfeng Zheng, Simon Liao, Jei-Wei Chang
  • Patent number: 7159304
    Abstract: Multiple thin films of spin-valve GMR sensor are formed in a trapezoidal cross-sectional shape by laminating an antiferromagnetic layer, a pinned magnetic layer, a nonmagnetic conductive layer, a free magnetic layer and a nonmagnetic protective layer on a lower insulated gap layer. The amount of etching of the lower insulated gap layer produced in the process of patterning the spin-valve giant magnetoresistive layers into the multiple thin films of spin-valve GMR sensor is 10 nm or less. Further, the angle ? which the tangent line of each side face of the multiple thin films to the middle line of the free magnetic layer in its thickness direction forms with respect to the middle line of the free magnetic layer becomes 45 degrees or more. This structure makes it possible to provide such a spin-valve giant magnetoresistive head that it meets the requirements for securing constant breakdown voltage and preventing instability of MR output voltage waveform.
    Type: Grant
    Filed: February 17, 2004
    Date of Patent: January 9, 2007
    Assignee: Hitachi Global Storage Technologies Japan, Ltd.
    Inventors: Masatoshi Arasawa, Haruko Tanaka, Makoto Morijiri, Koichi Nishioka, Shuichi Kojima, Masayasu Kagawa
  • Patent number: 7159301
    Abstract: A method of manufacturing a slider comprises the steps of: forming a slider material including a substrate, a thin-film magnetic head element and an insulating portion; forming a first surface in the slider material by etching a surface of the substrate facing toward a recording medium; forming a medium facing layer in the slider material so as to be adjacent to the first surface; and forming a medium facing surface in the slider material by lapping a surface of the medium facing layer facing toward the recording medium and a surface of the insulating portion facing toward the recording medium. The substrate has a hardness greater than that of the insulating portion. As the substrate and the medium facing layer are compared in hardness, the medium facing layer has a hardness closer to that of the insulating portion.
    Type: Grant
    Filed: October 5, 2001
    Date of Patent: January 9, 2007
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Takehiro Kamigama
  • Patent number: 7159302
    Abstract: A method for manufacturing a write head having a small write pole tip that emits magnetic flux sufficient for effective perpendicular recording. The method creates a leading edge taper (LET) between the write pole tip and a magnetic flux guide to create a sufficient magnetic flux in the write pole. The LET is fabricated by ion milling away a sacrificial striated material whose layers have different rates of ion milling. The top layer of material thus mills away faster than lower layers, creating the required tapering of a negative mold. An endpoint material stops the milling. The LET magnetic material is then spattered into the negative mold, resulting in a well defined taper of magnetic flux shaping material extending the magnetic flux guide to the write pole tip, such that the write pole tip is able to emit sufficient magnetic flux for perpendicular recording.
    Type: Grant
    Filed: March 31, 2004
    Date of Patent: January 9, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Michael Feldbaum, Quang Le
  • Patent number: 7155810
    Abstract: A GMR read head for a magnetic head, in which the hard bias layers are fabricated immediately next to the side edges of the free magnetic layer, and such that the midplane of the hard bias layer and the midplane of the free magnetic layer are approximately coplanar. The positioning of the hard bias layer is achieved by depositing a thick hard bias seed layer, followed by an ion milling step is to remove seed layer sidewall deposits. Thereafter, the hard bias layer is deposited on top of the thick seed layer. Alternatively, a first portion of the hard bias seed layer is deposited, followed by an ion milling step to remove sidewall deposits. A thin second portion of the seed layer is next deposited, and the hard bias layer is then deposited.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: January 2, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventor: Mustafa Michael Pinarbasi
  • Patent number: 7155809
    Abstract: A method of manufacturing a thin-film magnetic head comprises the steps of forming a first pole layer, forming a gap layer on a pole portion of the first pole layer, and forming a second pole layer on the gap layer. The second pole layer incorporates a first layer adjacent to the gap layer, and a second layer including a track width defining portion. The step of forming the second pole layer includes the steps of: forming a magnetic layer for forming the first layer on the gap layer; forming the second layer on the magnetic layer; and etching the magnetic layer to align with a width of the track width defining portion, so that the magnetic layer is formed into the first layer and the width of each of the first layer and the second layer taken in a medium facing surface is made equal to the track width.
    Type: Grant
    Filed: April 12, 2006
    Date of Patent: January 2, 2007
    Assignees: Headway Technologies, Inc, SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Itoh, Takehiro Kamigama
  • Patent number: 7152304
    Abstract: Patterned, longitudinally and transversely antiferromagnetically exchange biased GMR sensors are provided which have narrow effective trackwidths and reduced side reading. The exchange biasing significantly reduces signals produced by the portion of the ferromagnetic free layer that is underneath the conducting leads while still providing a strong pinning field to maintain sensor stability. In the case of the transversely biased sensor, the magnetization of the free and biasing layers in the same direction as the pinned layer simplifies the fabrication process and permits the formation of thinner leads by eliminating the necessity for current shunting.
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: December 26, 2006
    Assignee: Headway Technologies, Inc.
    Inventors: Cheng T. Horng, Min Li, Ru-Ying Tong, Yun-Fei Li, You Fong Zheng, Simon Liao, Kochan Ju, Cherng Chyi Han
  • Patent number: 7152305
    Abstract: A magnetoresistive (MR) read head is disclosed including a shield layer with a recessed portion and a protruding portion defined by the recessed portion. Also included is an MR sensor located in vertical alignment with the protruding portion of the shield layer. Further provided is at least one gap layer situated above and below the MR sensor. At least one of such gap layers is positioned in the recessed portion of the shield layer. By this design, a combined thickness of the gap layers is thinner adjacent to the MR sensor and the protruding portion of the shield layer, while being thicker adjacent to the recessed portion of the shield layer. As such, optimum insulation is provided while maintaining planar gap layer surfaces to avoid the detrimental ramifications of reflective notching and the swing curve effect.
    Type: Grant
    Filed: June 19, 2003
    Date of Patent: December 26, 2006
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Douglas Werner
  • Patent number: 7146711
    Abstract: A method for forming a planar GMR read-head having a narrow read gap, a narrow track-width and being well insulated from its lower shield. The method requires the formation of a planarized bottom magnetic shield in which concave regions, symmetrically disposed about a track-width region, are filled with a layer of dielectric to provide added insulation. The dielectric filled shield is planarized and an additional planar dielectric layer, a thin planar GMR sensor layer and a planar PMGI layer of uniform thickness is formed on it. A layer of photoresist is deposited on the PMGI layer and a bi-layer lift-off stencil of uniform height above the GMR layer and symmetric overhang regions is formed. The uniformity of the lift-off stencil, which is a result of the planarity of the layers on which it is formed, allows the deposition of conductive lead and biasing layers with controlled overspread.
    Type: Grant
    Filed: December 13, 2002
    Date of Patent: December 12, 2006
    Assignee: Headway Technologies, Inc.
    Inventors: Cherng Chyi Han, Mao-Min Chen, Jiun-Ting Lee
  • Patent number: 7143505
    Abstract: A thin film magnetic head is capable of reducing inductance by shortening a magnetic path, and also preventing a cavity from being formed in a coil insulating layer. The coil insulating layer is deposited on a lower core layer and at the rear of a recording portion, and a coil forming groove is formed in the coil insulating layer. Then, a coil layer is embedded in the coil forming groove. With this arrangement, bulges of the layers from an upper surface of the recording portion can be decreased so as to shorten a magnetic path.
    Type: Grant
    Filed: July 30, 2003
    Date of Patent: December 5, 2006
    Assignee: Alps Electric Co., Ltd.
    Inventor: Kiyoshi Sato
  • Patent number: 7140094
    Abstract: Magnetic heads capable of recording and reading with high sensitivity and resolution are provided by minimizing the outflow of magnetic fluxes from a flux guide to magnetic shields while using a flux guide structure for an MR element. In the magnetic head, magnetic shields exposed on a surface opposite a magnetic recording medium (air bearing surface) and a flux guide exposed between the magnetic heads via a non-magnetic layer are provided, and magnetic fluxes are guided by the flux guide to a magnetoresistive (MR) element formed in a position not exposed on the air bearing surface. The height of the magnetic shields in direction perpendicular to the air bearing surface is less than the distance from the air bearing surface to the MR element.
    Type: Grant
    Filed: October 7, 2003
    Date of Patent: November 28, 2006
    Assignee: Hitachi, Ltd.
    Inventor: Hiroaki Nemoto
  • Patent number: 7140096
    Abstract: A method of manufacturing a magnetoresistance effect device, including: forming a first ferromagnetic body, a nonmagnetic dielectric layer on the first ferromagnetic body, and a second ferromagnetic body on the nonmagnetic dielectric layer; etching part of an external region of a predetermined ferromagnetic tunnel junction region using a first linear mask pattern which is traversing the predetermined ferromagnetic tunnel junction region; and etching another part of the external region of the predetermined ferromagnetic tunnel junction region using a second linear mask pattern which is traversing the predetermined ferromagnetic tunnel junction region and intersecting with the first linear mask pattern.
    Type: Grant
    Filed: July 25, 2003
    Date of Patent: November 28, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tatsuya Kishi, Shigeki Takahashi, Kentaro Nakajima, Minoru Amano, Masayuki Sagoi, Yoshiaki Saito
  • Patent number: 7140092
    Abstract: A representative method for manufacturing a highly-laminated magnetic inductor core includes: depositing at least a first layer of a ferromagnetic material; depositing at least a first layer of a sacrificial conductive material; depositing a support structure formed of a ferromagnetic material; and removing the sacrificial conductive material, thereby leaving the at least first layer of ferromagnetic material mechanically supported by the support structure.
    Type: Grant
    Filed: January 5, 2004
    Date of Patent: November 28, 2006
    Assignee: Georgia Tech Research Corporation
    Inventors: Jin-Woo Park, Paul Floretn Cros, Mark Allen, Yong Kyu Yoon
  • Patent number: 7134185
    Abstract: A method and system for forming a microscopic transducer are described. The method and system include forming a plurality of adjoining sensor layers. The sensor layers include a first magnetically soft layer, a nonmagnetic layer on the first magnetically soft layer, and a second magnetically soft layer on the nonmagnetic layer. The method and system also include forming a sidewall over the second magnetically soft layer. The sidewall formation includes forming a base having a surface oriented substantially perpendicular to the sensor layers and depositing an electrically conductive material on the surface. The method and system also include removing a portion of the sensor layers not covered by the sidewall.
    Type: Grant
    Filed: January 5, 2004
    Date of Patent: November 14, 2006
    Assignee: Western Digital (Fremont), Inc.
    Inventors: Kenneth E. Knapp, Kyusik Sin
  • Patent number: 7134184
    Abstract: The problem of increased edge sensitivity associated with the reduction of the spacing between bias magnets in a CPP head has been solved by limiting the width of the bias cancellation layer and by adding an extra layer of insulation to ensure that current through the device flows only through its central area, thereby minimizing its edge reading sensitivity.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: November 14, 2006
    Assignee: Headway Technologies, Inc.
    Inventors: Jei-Wei Chang, Koichi Terunuma, Youfeng Zheng, Kochan Ju
  • Patent number: 7131186
    Abstract: On a surface of a bottom pole, a write gap film and first magnetic material film having a high saturation magnetic flux density are formed, and the first magnetic material film is etched to remain a portion extending from an air bearing surface to a throat height zero reference position and a first non-magnetic film is formed in a removed portion. The first non-magnetic material film is polished to obtain a flat surface which is coplanar with a surface of the first magnetic material film. A second magnetic material film having a high saturation magnetic flux density is formed on the flat surface. The second magnetic material film, first magnetic material film, write gap film and bottom pole are partially removed by RIE using a mask formed on the flat surface.
    Type: Grant
    Filed: June 8, 2004
    Date of Patent: November 7, 2006
    Assignees: Headway Technologies, Inc., Sae Magnetics (H.K.), Ltd.
    Inventors: Yoshitaka Sasaki, Takehiro Kamigama
  • Patent number: 7127801
    Abstract: A thin film magnetic head that includes an improved P2 pole tip/yoke interface. The process for forming the P2 pole tip/yoke interface includes a CMP polishing step that is performed on the surface of the wafer subsequent to the plating of the P2 pole tip. This CMP step utilizes a relatively soft polishing pad and an acidic polishing slurry which preferentially attacks the P2 pole tip material, such that the CMP step results in the recession of the upper surface of the P2 pole tip relative to the dielectric layer surrounding it, as well as the significant rounding of the upper edges of the dielectric trench in which the P2 pole tip is formed. Thereafter, when the yoke is plated onto the P2 pole tip the rounded upper edges of the dielectric trench result in a concave curved interface between the yoke and the P2 pole tip.
    Type: Grant
    Filed: March 24, 2005
    Date of Patent: October 31, 2006
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventors: Ashok Lahiri, Edward Hin Pong Lee, Eric James Lee, Hong Xu
  • Patent number: 7124498
    Abstract: A non-magnetic material layer which is formed with a taper region of which the film thickness is gradually reduced over the top surface and the side of an upper core layer and the side of the gap layer is formed by cutting the gap layer and the upper core layer on a lower core layer with a track width and the lower periphery of the taper region is contacted with the top surface of the lower core layer. On the top surface of the lower core layer extending from the lower periphery of the taper region to the both sides, the slopes inclined in the direction apart from the upper core layer are formed and a protrusion having a track width is formed on the lower core layer. The material layer having the same material as the lower core layer adhered to the outside of the non-magnetic material layer is removed.
    Type: Grant
    Filed: May 12, 2005
    Date of Patent: October 24, 2006
    Assignee: Alps Electric Co., Ltd.
    Inventor: Kiyoshi Sato
  • Patent number: 7120989
    Abstract: For PMR (Perpendicular Magnetic Recording) design, one of the major technology problems is the use of CMP to fabricate the pole structure. If the device is under-polished there is a danger of leaving behind a magnetic shorting layer while if it is over-polished there may be damage to the main pole. This problem has been overcome by surrounding the main pole, write gap, stitched write head pillar with a layer of CMP etch stop material which, using optical inspection alone, allows CMP (performed under a first set of conditions) to be terminated just as the stitched write head gets exposed. This is followed by a second CMP step (performed under a second set of conditions) for further fine trimming of the stitched head, as needed.
    Type: Grant
    Filed: February 18, 2004
    Date of Patent: October 17, 2006
    Assignee: Headway Technologies, Inc.
    Inventors: Danning Yang, Cherng-Chyi Han
  • Patent number: 7120988
    Abstract: A method and materials to fabricate a trailing shield write pole that resolve the problems of controlling the write gap and preventing damages to the write gap or pole during fabrication of the subsequent structure. This process also introduces a CMP assisted lift-off process to remove re-deposition and fencing (increase yields) and a method to create dishing in the top of the write pole. Moreover, also included in this disclosure are suitable materials that can function as an ion mill transfer layer, CMP layer, and RIEable layer.
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: October 17, 2006
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Quang Le, Edward Hin Pong Lee, Jui-Lung Li, Aron Pentek, Nian-Xiang Sun