By Etching Patents (Class 29/603.18)
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Publication number: 20040047082Abstract: A method for forming an abutted junction GMR bottom spin valve sensor in which the free layer has a maximum effective length due to the elimination or minimization of bias layer and conducting lead layer overspreading onto the sensor element and the consequent reduction of current shunting. The overspreading is eliminated by forming a thin dielectric layer on the upper surface of the sensor element. When the biasing and conducting leads are formed on the abutted junction, they overspread onto this layer and the overspread can be removed by an ion-milling process during which the dielectric layer protects the sensor.Type: ApplicationFiled: September 6, 2002Publication date: March 11, 2004Applicant: Headway Technologies, Inc.Inventors: Cherng-Chyi Han, Mao-Min Chen, Pokang Wang
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Publication number: 20040047079Abstract: The invention provides a magnetic head for perpendicular recording capable of recording with high linear recording density and high track density, and a magnetic disk drive incorporating the same. In order to achieve this, one or more sides of the main pole of the magnetic head for perpendicular recording except for the trailing side are formed in a taper with an appropriate angle against the tip surface of the main pole, and the yoke whose widest principal plane is in parallel to the tip surface is provided on the bottom of the main pole.Type: ApplicationFiled: August 27, 2003Publication date: March 11, 2004Applicant: Hitachi, Ltd.Inventors: Kenchi Ito, Yoshiaki Kawato, Masafumi Mochizuki
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Publication number: 20040042133Abstract: A magnetic recording transducer, useful in a magnetic data storage device, having a read element with improved magnetic stability and a narrow track width is described. An MR stripe according to the invention has a magnetic-stability inducing (MSI) shape selected from an essentially trapezoidal shape, an essentially hexagonal shape, an essentially race-track shape, and an essentially half race track shape. These MSI shapes are oriented in a plane perpendicular to the air-bearing surface (ABS). The MSI shapes are used to encourage the formation of a single magnetic domain state with magnetization direction parallel to the ABS in the absence of a magnetic bias. In one embodiment according to the invention the sensor structure is overlaid on the sides of the top surface with layers of electrically conductive material (overlaid leads) to define an approximately rectangular active region of the larger MSI shape.Type: ApplicationFiled: August 27, 2002Publication date: March 4, 2004Inventor: Michael Andrew Parker
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Patent number: 6694604Abstract: A merged magnetic head has a top first pole tip layer and a bottom second pole tip layer which are located entirely between an air bearing surface and a coil layer. A write gap layer separates the pole tip layers from one another at the ABS. A zero throat height (ZTH) defining layer is located adjacent the top gap layer between the pole tip layers and is recessed from the ABS so as to further separate the pole tip layers from one another at a location recessed from the ABS so as to define the zero throat height of the write head where the first and second pole pieces first commence to separate from one another after the ABS.Type: GrantFiled: March 4, 2003Date of Patent: February 24, 2004Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventor: Hugo Alberto Emilio Santini
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Patent number: 6687977Abstract: A magnetoresistive device includes a metal layer, formed over a substrate, in which a groove is formed. A magnetoresistive element is formed in the groove, forming two magnetoresistive element portions that are separated by a conductive element. A sense current applied to the metal layer flows through the two magnetoresistive element portions with a predominant current-perpendicular-to-plane component. The method includes techniques that are less complex and less expensive than submicron photolithography to form the above described magnetoresistive device with submicron geometries.Type: GrantFiled: February 20, 2001Date of Patent: February 10, 2004Assignee: Western Digital (Fremont), Inc.Inventors: Kenneth E. Knapp, Ronald A. Barr
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Publication number: 20040016106Abstract: Embodiments include a slider having a silicon body and at least one carbide pad structure embedded therein. At least one head structure for reading and/or writing data is located on the silicon body. The silicon body includes an air bearing surface on which the head is located. The air bearing surface also includes at least a portion of the carbide pad structure thereon. In one aspect, the metal carbide structure may be made from a material such as titanium carbide, zirconium carbide, vanadium carbide, tungsten carbide, or molybdenum carbide. In another aspect, the head may be located on the air bearing surface between carbide pad structures.Type: ApplicationFiled: June 20, 2003Publication date: January 29, 2004Inventor: Jeffrey S. Lille
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Publication number: 20040016107Abstract: The present invention provides a non-actuatable, self-limiting wear contact pad slider and method for making the same. A protruding element surrounding the transducer is fabricated using a third etch step so that the protruding element has a height that is greater than or equal to the designed fly height of the aerodynamic lift surface minus the disk roughness.Type: ApplicationFiled: June 21, 2003Publication date: January 29, 2004Applicant: International Business Machines CorporationInventors: Pantelis S. Alexopoulos, Lee K. Dorius, Francis Chee-Shuen Lee, Timothy C. O'Sullivan, Gurinder Singh
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Patent number: 6683749Abstract: A method of fabrication and a magnetic transducer having an inverted write element with a zero delta in pole tip width to provide improved bi-directional control over write track width and written erase bands on media. The transducer includes a top pole and a bottom pole configured to provide the same write track width and relatively small erase bands when either pole is the trailing pole depending on direction of movement of the media relative to the transducer. The bottom pole has an upper portion and a lower portion. The bottom pole upper portion width is less than the bottom pole lower portion width. The top pole has a main portion formed opposite to the bottom pole upper portion. The top pole main portion has a main portion width which is equal to the bottom pole upper portion width.Type: GrantFiled: December 19, 2001Date of Patent: January 27, 2004Assignee: Storage Technology CorporationInventors: Larry E. Daby, James C. Cates, John P. Biesecker
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Patent number: 6669855Abstract: A method of manufacturing a thin-film magnetic head allowing dimension control of the width of the magnetic pole and reduction of the time required for formation is provided. A layer of iron nitride formed by sputtering is selectively etched with the RIE to form a top pole tip. In this etching process with RIE, chlorine-type gas is selected as a gas seed for etching, and the process temperature is in a range of 50° C. to 300° C. Subsequently, using part of a first mask and a tip portion of the top pole tip as a mask, part of both the write gap layer and the second bottom pole are etched with the RIE similarly to the above process, to thereby form a magnetic pole. The etching conditions are optimized by performing the process with the RIE under the above conditions, so that both of the top pole tip and the magnetic pole can be formed with high precision, and that the time required for forming both of these elements can be significantly reduced.Type: GrantFiled: January 22, 2001Date of Patent: December 30, 2003Assignee: TDK CorporationInventors: Yoshitaka Sasaki, Atsushi Iijima, Seiji Yari, Katsuya Kanakubo
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Patent number: 6668443Abstract: The possibility of shorting between a spin valve and its underlying magnetic shield layer can be largely eliminated by choosing the bottom spin valve structure. However, doing so causes the hard longitudinal bias that is standard for all such devices to degrade. The present invention overcomes this problem by inserting a thin NiCr, Ni, Fe, or Cr layer between the antiferromagnetic layer and the longitudinal bias layers. This provides a smoother surface for the bias layers to be deposited onto, thereby removing structural distortions to the longitudinal bias layer that would otherwise be present. A process for manufacturing the structure is also described.Type: GrantFiled: July 30, 2001Date of Patent: December 30, 2003Assignee: Headway Technologies, Inc.Inventors: Chen-Jung Chien, Chyu-Jiuh Torng, Cherng-Chyi Han, Moris Dovek, Po-Kang Wang, Mao-Min Chen
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Publication number: 20030231437Abstract: A current-perpendicular-to the-plane (CPP) magnetoresistive device has two ferromagnetic layers separated by a nonmagnetic spacer layer with the free ferromagnetic layer having a central region of ferromagnetic material and nonmagnetic side regions formed of one or more oxides of the ferromagnetic material. One type of CPP device is a magnetic tunnel junction (MTJ) magnetoresistive read head in which the lower pinned layer has a width and height greater than the width and height, respectively, of the overlying central region of the upper free layer, with the side regions of the free layer being oxidized and therefore nonmagnetic. The MTJ read head is formed by patterning resist in the shape of the free layer central region over the stack of layers in the MTJ, ion milling or etching the stack down into the free layer, and then exposing the stack to oxygen to oxidize the ferromagnetic material in the side regions not covered by the resist.Type: ApplicationFiled: June 17, 2002Publication date: December 18, 2003Inventors: Jeffrey R. Childress, Elizabeth A. Dobisz, Robert E. Fontana, Kuok San Ho, Ching Hwa Tsang, Son Van Nguyen
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Patent number: 6663817Abstract: A method for producing sliders having positive camber on the air bearing surface. The method comprises (i) scribing the air bearing surface of a slider row along a line between individual sliders, (ii) flat plate lapping the air bearing surface of the slider row, and (iii) producing a pattern of stress on the back side of the slider row to create positive camber in each individual slider in the slider row.Type: GrantFiled: March 26, 1999Date of Patent: December 16, 2003Assignee: Hitachi Global Storage Technologies Netherlands, B.V.Inventors: Yu-En Percy Chang, Yuri Igor Markevitch, Scott Thomas
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Publication number: 20030223158Abstract: A reproducing head of a thin-film magnetic head incorporates an MR element, a pair of bias field applying layers located to be adjacent to side portions of the MR element, and a pair of electrode layers that are located on the bias field applying layers and overlap the MR element. The electrode layers each have a first layer, a second layer, and a third layer. The first layer is laid over part of the top surface of the MR element via a protection layer, the second layer overlaps the first layer, and the third layer is located on the second layer. The second layer is thinner than the third layer. In the method of manufacturing the reproducing head, after the protection layer is formed on an element-to-be film to make the MR element, a first electrode-to-be film to make the first layers is formed continuously without interposing a step of exposing the protection layer to the air.Type: ApplicationFiled: May 29, 2002Publication date: December 4, 2003Applicants: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.Inventors: Yoshitaka Sasaki, Takehiro Kamigama
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Patent number: 6655009Abstract: A method of fabricating a second pole piece layer of a write head is constructed using first and second photoresist layers which are sensitive to light with different bandwidths. The second photoresist layer, which is on top of the first photoresist layer, is light exposed with light that excludes light that would change the molecular structure of the first or bottom photoresist layer. After light exposure and development of the second photoresist layer to provide an opening for yoke and back gap portions of the second pole piece layer, the first photoresist layer is light exposed with light that includes the light excluded in the light exposure step of the second photoresist layer. The light exposure of the first photoresist layer and its developing provides the first photoresist layer with an opening for electroplating the second pole tip of the second pole piece layer.Type: GrantFiled: June 11, 2001Date of Patent: December 2, 2003Assignee: International Business Machines CorporationInventors: Bin Huang, Edward Hinpong Lee
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Patent number: 6655007Abstract: A method of making read sensor with self-aligned low resistance leads is provided. In the method a masking step has been eliminated by employing first, second and third protective capping layers in the construction of the read sensor and first and second lead layers. The first capping layer serves as a protective layer for the read sensor sites, the second capping layer protects low resistance lead layer portions during removal of the first capping layer from high resistance lead layer sites and then serves as a sacrificial layer during removal of spin valve material from the low resistance lead layer sites. The third capping layer protects the first and second lead layers during milling of low resistance lead layer material in field regions about the read sensor and first and second lead layers. The method aligns front edges of the low resistance lead layer portions with a rear edge of the read sensor so as to lower the overall resistance of the lead layers.Type: GrantFiled: January 16, 2001Date of Patent: December 2, 2003Assignee: Hitachi Global Storage Technologies Netherlands B. V.Inventor: Richard Hsiao
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Publication number: 20030218836Abstract: An MR element includes a free layer. Hard magnetic layers are placed on both sides of the MR element and apply a bias magnetic field to the free layer. A pair of electrode layers are placed as spaced from each other, and supplies a sense current to the free layer. Layer structures are placed between portions overlapping with the respective electrode layers in the ambilateral regions of the free layer, and the electrode layers. Each layer structure includes a nonmagnetic layer, a ferromagnetic layer, and an antiferromagnetic layer. A direction of magnetization of the ferromagnetic layer is fixed by the antiferromagnetic layer, and a magnetic thickness of the ferromagnetic layer is set greater than that of the free layer.Type: ApplicationFiled: May 12, 2003Publication date: November 27, 2003Applicant: TDK CORPORATIONInventors: Koji Shimazawa, Yoshihiro Tsuchiya, Koichi Terunuma
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Patent number: 6651312Abstract: A method of manufacturing a composite type thin film magnetic head, in which saturation and leakage of a magnetic flux can be suppressed although a pole portion is miniaturized and throat height, apex angle and MR height can be precisely formed to have desired values, is proposed. A recessed portion is formed in a substrate by using, as a mask, a first magnetic layer. A second magnetic layer and a thin film coil are formed within the recessed portion such that the thin film coil is supported by an insulating layer in an isolated manner. Surfaces of the magnetic layers and the insulating layer are flattened to form a common unit for manufacturing a composite type thin film magnetic head. A third magnetic layer is formed and coupled with the second magnetic layer. A flat write gap layer and a flat fourth magnetic layer are then formed.Type: GrantFiled: July 19, 2000Date of Patent: November 25, 2003Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Publication number: 20030214765Abstract: A transducing head has a magnetoresistive sensor, a first bias element, and a second bias element. The magnetoresistive sensor is positioned between the first and second bias elements, and has a sensor width. The first bias element has a first length and the second bias element has a second length. The direction of the first and second lengths are substantially similar to the direction of the sensor width. The first and second lengths in the range of about one-tenth to about twenty times the sensor width.Type: ApplicationFiled: January 21, 2003Publication date: November 20, 2003Applicant: Seagate Technology, LLCInventors: Mai Abdelhamid Ghaly, David James Larson, Paul Edward Anderson, Kristin J. Duxstad, Brenda Anne Everitt, Patrick John Moran, Steven Barclay Slade, Eric Walter Singleton
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Publication number: 20030214760Abstract: A reproducing head of a thin-film magnetic head incorporates an MR element, a pair of bias field applying layers located to be adjacent to the side portions of the MR element, and a pair of electrode layers that are located on the bias field applying layers and overlap the MR element. The electrode layers each have a first layer that is laid over part of the top surface of the MR element via a protection layer, and a second layer that overlaps the first layer. In the method of manufacturing the reproducing head, after forming the protection layer on an element-to-be film to make the MR element, a first electrode-to-be film to make the first layers is formed continuously without interposing a step of exposing the protection layer to the air.Type: ApplicationFiled: May 17, 2002Publication date: November 20, 2003Applicants: Headway Technologies, Inc., SAE Magnetics (H.K. ) Ltd.Inventors: Yoshitaka Sasaki, Takehiro Kamigama
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Publication number: 20030200647Abstract: All the electrode films corresponding to respective metal materials are laminated on a substrate beforehand, a first electrode film located farthest from the substrate is formed with a first metal pattern suitable for the first electrode film, and then the first electrode film is etched away so as to expose a second electrode film located lower than the first electrode film. Therefore, the second electrode film suitable for a metal material of a second metal pattern can selectively be plated, whereby the second metal pattern can be formed while optimizing the combination of its metal material and electrode film. Also, the second electrode film for the later step does not attach to the previously formed first metal pattern.Type: ApplicationFiled: April 9, 2003Publication date: October 30, 2003Applicant: TDK CorporationInventor: Akifumi Kamijima
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Patent number: 6631549Abstract: A bottom spin valve sensor employs a seed layer for a nickel oxide (NiO) antiferromagnetic pinning layer for the purpose of increasing magnetoresistance of the sensor (dR/R). The spin valve sensor can be a simple spin valve or an antiparallel (AP) spin valve sensor. In the preferred embodiment the seed layer is tantalum oxide TayOx or copper (Cu).Type: GrantFiled: November 24, 2000Date of Patent: October 14, 2003Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventor: Mustafa Pinarbasi
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Publication number: 20030189799Abstract: A magnetoresistive reproducing head is manufactured by forming a magnetoresistive film and a lead layer continuously, then etching only the lead layer by using a first layer photo-resist pattern, forming a second layer photo-resistive pattern while leaving the first layer photo-resist pattern, etching the magnetoresistive film and then forming a domain control film and an outer lead layer, thereby enabling to avoid the effect at all on the positional relation between the lead layer and domain control film, whereby a head in which the riding amount of the lead layer on the magnetoresistive film is in right-to-left symmetry and the sensitivity profile is in right-to-left symmetry can be manufactured at a good yield.Type: ApplicationFiled: August 16, 2002Publication date: October 9, 2003Inventors: Yasunobu Yanagisawa, Akira Morinaga, Masatoshi Arasawa, Shuichi Kojima, Makoto Morijiri
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Publication number: 20030189798Abstract: The GMR read head includes a GMR read sensor and a longitudinal bias (LB) stack in a read region, and the GMR read sensor, the LB stack and a first conductor layer in two overlay regions. In its fabrication process, the GMR read sensor, the LB stack and the first conductor layer are sequentially deposited on a bottom gap layer. A monolayer photoresist is deposited, exposed and developed in order to open a read trench region for the definition of a read width, and RIE is then applied to remove the first conductor layer in the read trench region. After liftoff of the monolayer photoresist, bilayer photoresists are deposited, exposed and developed in order to mask the read and overlay regions, and a second conductor layer is deposited in two unmasked side regions. As a result, side reading is eliminated and a read width is sharply defined by RE.Type: ApplicationFiled: April 5, 2002Publication date: October 9, 2003Inventors: Tsann Lin, Daniele Mauri
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Patent number: 6629357Abstract: A magnetic head manufacturing method. In one embodiment, a wafer including magnetic head devices formed on the surface thereof are cut out into individual sliders. Photoresist is applied on the air bearing surfaces of the sliders and is then baked. The surface tension causes the photoresist at the peripheral regions of the air bearing surface to taper and become rounded or thinned. The air bearing surface is then uniformly dry-etched such that the peripheral regions of the air bearing surface are rounded in a tapered shape.Type: GrantFiled: February 10, 1999Date of Patent: October 7, 2003Assignee: Read-Rite SMI Corp.Inventor: Shin-ichi Akoh
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Patent number: 6627094Abstract: The method of the present invention is capable of manufacturing a thin film head, which includes a protection layer having enough corrosion-resisting property and water-repellent property, which is capable of keeping the magnetic head clean even if temperature and humidity are high, and which has enough durability and reliability. The method of manufacturing the thin film head, in which a pad, which contacts a disk, and a floating pattern are formed in a disk-side face, comprises the steps of: forming a adhesion layer on the disk-side face of a substrate, which is a main body of the thin film head; forming a protection layer on the adhesion layer; coating the protection layer with resist; patterning the resist so as to form a pad hole at a prescribed position, at which the pad is formed; forming a pad film on resist-coated faces including an inner face of the pad hole; and lifting off the resist so as to form the pad.Type: GrantFiled: November 30, 2000Date of Patent: September 30, 2003Assignee: Fujitsu LimitedInventors: Motoichi Watanuki, Hiroyuki Nakajima
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Publication number: 20030156359Abstract: A thin-film electrode layer having a superior electromigration resistance is disclosed. The thin-film electrode layer includes a first base layer composed of &bgr;-Ta, a main conductive layer composed of Au, and a protective layer. The protective layer is a composite of a Cr sublayer and an &agr;-Ta sublayer. A thin-film magnetic head having the thin-film electrode layers and a method for forming electrodes in the thin-film magnetic head are also disclosed.Type: ApplicationFiled: February 18, 2003Publication date: August 21, 2003Inventors: Akira Takahashi, Jun Takahashi, Yuko Kawasaki, Kenji Honda, Naohiro Ishibashi, Eiji Umetsu
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Patent number: 6606782Abstract: To form a spin valve device, start by forming a gap layer. Form a buffer layer with a layer of refractory material on the buffer layer. Form patterned underlayers including a magnetic material for providing trackwidth and longitudinal bias on the buffer layer comprising either a lower antiferromagnetic layer stacked with a ferromagnetic layer or a Cr layer stacked with a permanent magnetic layer. Form an inwardly tapered depression in the patterned underlayers down to the buffer layer by either ion milling through a mask or a stencil lift off technique. Form layers covering the patterned underlayers that cover the inwardly tapered depression. Form free, pinned, spacer and antiferromagnetic layers. Form conductors either on a surface of the antiferromagnetic layer aside from the depression or between the buffer layer and the patterned underlayers.Type: GrantFiled: March 22, 2002Date of Patent: August 19, 2003Assignee: Headway Technologies, Inc.Inventors: Tai Min, Po-Kang Wang, Moris Musa Dovek
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Publication number: 20030145453Abstract: The lower electrode is at least exposed at the surface of a substructure layer in a current-perpendicular-to-the-plane structure magnetoresistive element. A resist is formed to extend over the surface of the substructure layer. A patterning void is defined in the resist. The shape of the patterning void is designed to correspond to the contour of the magnetoresistive multilayered film. The magnetoresistive multilayered film is formed by deposition within the patterning void. This method enables avoidance of a dry etching process effected on the magnetoresistive multilayered film. Scrapings or waste of the magnetoresistive multilayered film are not generated at all. The side surfaces of the magnetoresistive multilayered film are completely prevented from attachment or adhesion of scrapings or waste. The side surfaces of the magnetoresistive multilayered film are kept stainless.Type: ApplicationFiled: October 28, 2002Publication date: August 7, 2003Applicant: FUJITSU LIMITEDInventors: Chikayoshi Kamata, Shin Eguchi, Atsushi Tanaka, Tooru Fukuya
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Patent number: 6591481Abstract: A magnetoresistive device comprises a magnetoresistive element, two bias field applying layers that apply a longitudinal bias magnetic field to the magnetoresistive element, and two electrode layers that are located adjacent to one of the surfaces of each of the bias field applying layers and overlap one of the surfaces of the magnetoresistive element. The magnetoresistive element incorporates a protection layer located on a soft magnetic layer. A sacrificial coating layer is formed on the protection layer. Before forming the electrode layers, the coating layer and an oxide layer, formed through natural-oxidizing part of the top surface of the coating layer, are removed through etching. After the electrode layers are formed, the portion of the protection layer located in the region between the two electrode layers is oxidized, and a high resistance layer is thereby formed.Type: GrantFiled: August 3, 2001Date of Patent: July 15, 2003Assignee: TDK CorporationInventors: Koji Shimazawa, Noriyuki Ito, Koichi Terunuma
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Patent number: 6591480Abstract: A method for fabricating a flux concentrating stitched write head for high data rate applications wherein said flux concentration is achieved by means of a non-magnetic step embedded into a portion of the lower magnetic pole just beneath the write gap layer. The design permits extremely short throat heights, which will be required by future high data rate applications.Type: GrantFiled: May 12, 2000Date of Patent: July 15, 2003Assignee: Headway Technologies, Inc.Inventors: Mao-Min Chen, Pokang Wang, Cherng-Chyi Han
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Patent number: 6560853Abstract: A method makes a magnetic head with a zero throat height (ZTH) comprising the steps of forming a first pole piece layer, forming the ZTH defining insulation layer on a first portion of the first pole piece layer, forming an insulation layer on the ZTH defining insulation layer and a first insulation layer on a second portion of the first pole piece layer, forming a coil layer on the first insulation layer so that the ZTH defining insulation layer is located entirely between the coil layer and the ABS, forming at least a second insulation layer on the coil layer, forming the second pole piece over a front portion of a top surface of the ZTH defining insulation layer and on the second insulation layer so that the ZTH defining insulation layer causes the second pole piece to separate from the first pole piece layer and forming the first insulation layer with a thickness that is less than a thickness of the ZTH defining insulation layer so that a pole tip portion of the second pole piece can be frame plated withType: GrantFiled: May 1, 2000Date of Patent: May 13, 2003Assignee: International Business Machines CorporationInventor: Hugo Alberto Emilio Santini
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Patent number: 6557242Abstract: A merged magnetic head has a top first pole tip layer and a bottom second pole tip layer which are located entirely between an air bearing surface and a coil layer. A write gap layer separates the pole tip layers from one another at the ABS. A zero throat height (ZTH) defining layer is located adjacent the top gap layer between the pole tip layers and is recessed from the ABS so as to further separate the pole tip layers from one another at a location recessed from the ABS so as to define the zero throat height of the write head where the first and second pole pieces first commence to separate from one another after the ABS.Type: GrantFiled: December 27, 1999Date of Patent: May 6, 2003Assignee: International Business Machines CorporationInventor: Hugo Alberto Emilio Santini
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Publication number: 20030081358Abstract: A first and a second longitudinal bias-applying films are formed via a first mask at both sides of a magnetoresistive effective element film so that the difference in surface level between the magnetoresistive effective element film and the first and the second longitudinal bias-applying films is set within ±20 nm. Then, a first and a second electrode films are formed so as to cover edge portions of the magnetoresistive effective element film and the first and the second longitudinal bias-applying films.Type: ApplicationFiled: May 24, 2002Publication date: May 1, 2003Applicant: TDK CORPORATIONInventors: Noriyuki Ito, Kosuke Tanaka, Koichi Terunuma
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Patent number: 6553649Abstract: A method makes a merged magnetic head that has an air bearing surface and read and write head portions wherein the write head portion has a pole tip, yoke and back gap regions. A method of making the write head comprises steps of forming first and second pole pieces wherein the first pole piece has a first pole tip and the second pole piece has a second pole tip, forming a gap layer which separates the pole tips in the pole tip region and connecting the first and second pole pieces in the back gap region, forming an insulation stack with a write coil embedded therein between the first and second pole pieces in the yoke region and forming the first pole tip with a width at the air bearing surface that defines a track width of the write head portion. The read head portion is formed on the write head portion with a first shield layer which is a common layer with the second pole piece.Type: GrantFiled: April 6, 2000Date of Patent: April 29, 2003Assignee: Hitachi Global Storage Technologies Netherlands BVInventor: Hugo Alberto Emilio Santini
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Patent number: 6550131Abstract: A method for making a thin-film magnetic head with a magnetoresistive layer having a desired shaped to facilitate narrowing of the track width, wherein the surface, in the depth direction, is not curved, and wherein the shape and magnetic anisotropy of each sublayer of the magnetoresistive layer is stabilized to ensure improved reading characteristics.Type: GrantFiled: June 9, 2000Date of Patent: April 22, 2003Assignee: Alps Electric Co., Ltd.Inventor: Kiyoshi Sato
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Patent number: 6551173Abstract: A process for finishing a disc drive slider in which a pressure generator applies multiple pressures to the back surface of one slider while the front surface of the one slider contacts a lapping surface to form a finished front surface of the slider. The slider is part of a substrate having multiple unfinished sliders formed in it. An etch process is used to etch trenches in the substrate aligned between the sliders and to form webs joining the sliders together. After the sliders are finished by lapping, the webs are removed to separate the sliders. The multiple sliders are conveniently held together during the finishing process and the etching process avoids damage to the sliders.Type: GrantFiled: July 9, 2001Date of Patent: April 22, 2003Assignee: Seagate Technology LLCInventor: Zine-Eddine Boutaghou
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Patent number: 6548009Abstract: An apparatus and method for controlling twist curvature of a disc head slider is provided, where the slider has a bearing surface, a back surface, which is opposite to the bearing surface, a longitudinal axis and a transverse axis. The apparatus obtains a measure of the twist curvature of the bearing surface and selectively alters material stresses in a working surface of the slider. The material stresses are altered asymmetrically with respect to the longitudinal axis and the transverse axis based on the measure of the twist curvature to induce a change in the twist curvature.Type: GrantFiled: June 15, 2000Date of Patent: April 15, 2003Assignee: Seagate Technology LLCInventors: Mohamed-Salah H. Khlif, Richard A. Strom
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Patent number: 6539610Abstract: A high throughput method for producing the narrow track width inductive head is also provided, whereby the heads may be manufactured in substantial volumes. The new head may be merged or piggy-backed MR or GMR heads, comprising a first pole piece, P1, and a second pole piece, P2, and is distinctly characterized by write track width is significantly reduced by a preliminary ion milling process before P1 notching is performed. The preliminary step utilizes an ion milling process to trim the write track width, P2B, at an angle between 45 to 85 degrees from the wafer normal. The MR head may then undergo conventional P1 notching.Type: GrantFiled: July 14, 2000Date of Patent: April 1, 2003Assignee: International Business Machines CorporationInventors: Jyh-Shuey (Jerry) Lo, John I. Kim, Timothy J. Moran
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Patent number: 6531084Abstract: A method for laser edge treating (LET) a slider and a slider with laser edge treatment, wherein the laser treatment is used to modify the curvature along the air-bearing surface, including altering a slider edge ridge that forms at the edges of the air bearing surface due to compressive stresses induced in the air bearing surface by a prior lapping step. The laser makes positive and negative adjustments to crown, cross curve, and twist as measured on the air bearing surface by selectively altering the treatment pattern or the treatment location on the slider's side edges.Type: GrantFiled: May 8, 2000Date of Patent: March 11, 2003Assignee: Seagate Technology LLCInventors: Richard Albert Strom, Mohamed-Salah Houceine Khlif
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Patent number: 6526649Abstract: To present a manufacturing method of a magneto-resistive effect type head capable of manufacturing a magneto-resistive effect type head with stabilized head characteristics. A magneto-resistive effect type head is manufactured in a method comprising a step of forming a magneto-resistive effect film (30) in a trapezoidal shape (30A) having a specified abutting angle &thgr;1 by means of ion milling through a resist mask of overhang structure, a step of forming bias magnet films (31) for filling in sides of the magneto-resistive effect film (30), and a step of forming an electrode film (33) to overlap partly with the magneto-resistive effect film (30) through the resist mask. The angle of the ion milling is 5° or less to the normal of the substrate surface. The angle of ion beam sputtering when forming the electrode film (33) is 30° or less to the normal of the substrate surface.Type: GrantFiled: June 1, 2001Date of Patent: March 4, 2003Assignee: Sony CorporationInventor: Shigehisa Ohkawara
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Publication number: 20030039079Abstract: As the dimensions of spin valve heads continue to be reduced, a number of difficulties are being encountered. One such is with the longitudinal bias when an external magnetic field can cause reversal of the hard magnet, thereby causing a hysteric response by the head. This coercivity reduction becomes more severe as the hard magnet becomes thinner. This problem has been overcome by inserting a decoupling layer between the antiferromagnetic layer that is used to stabilize the pinned layer of the spin valve itself and the soft ferromagnetic layer that is used for longitudinal biasing. This soft ferromagnetic layer is pinned by a second antiferromagnetic layer deposited on it on its far side away from the first antiferromagnetic layer. The presence of the decoupling layer ensures that the magnetization of the soft layer is determined only by the second antiferromagnetic layer. The inclusion of said decoupling layer allows more latitude in etch depth control during manufacturing.Type: ApplicationFiled: August 22, 2001Publication date: February 27, 2003Applicant: Headway Technologies, Inc.Inventors: You Feng Zheng, Kochan Ju, Cheng T. Horng, Simon Liao, Ru Ying Tong
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Publication number: 20030039082Abstract: A magneto-resistive head including: a soft-magnetic film arranged to be in contact with both end portions of the spin bulb film; and a permanent magnet film arranged so as to be in contact with the lower portion of the soft-magnetic film and not in contact with the free layer of the spin bulb film. With the structure in which the lower portion of the free layer of the spin bulb film is in direct contact with the end portion of the soft-magnetic film while the free layer of the spin bulb film is not in contact with the permanent magnet film, it is possible to provide a spin bulb element having a high reproduction sensitivity even when the track width is small, and a production method of the same.Type: ApplicationFiled: February 8, 2002Publication date: February 27, 2003Inventor: Satoshi Shigematsu
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Publication number: 20030030948Abstract: By forming insulating layers on two sides of a laminate, forming a free magnetic layer continuously on the laminate and the insulating layers, and placing the free magnetic layer in a single magnetic domain by an exchange bias method, reproducing output and changing rate of resistance of a CPP type magnetic sensor can be improved even when recording density is increased in the future.Type: ApplicationFiled: August 9, 2002Publication date: February 13, 2003Inventor: Eiji Umetsu
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Patent number: 6513228Abstract: A method for forming a perpendicular magnetic read/write head having an air bearing surface and comprising a substantially planar top pole and a shared pole is disclosed. The steps include forming a top pole, a shared pole, and a yoke wherein the top pole and shared pole are connected distally from the air bearing surface by a yoke. A conductive coil is formed that wraps around the top pole and is positioned adjacent to the air bearing surface, with a lower portion of the coils extending between the top pole and the shared pole.Type: GrantFiled: September 21, 2000Date of Patent: February 4, 2003Assignee: Seagate Technology LLCInventors: Sakhrat Khizroev, Dmitri Litvinov, Billy Wayne Crue
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Publication number: 20020191351Abstract: A method of making a magnetic write head includes forming a strip of negative photoresist on a wafer at an ABS site with a width that defines a track width of the write head and which has a height above a desired height of a second pole tip. An alumina layer is formed on the wafer and on the strip with a thickness above the wafer that is equal to or greater than a desired height of the second pole tip. The alumina layer is then mechanically polished until the negative photoresist strip is exposed. The negative photoresist strip is then removed leaving an opening in the alumina layer after which the second pole tip is formed in the opening. In a first embodiment of the invention the second pole tip and the second pole piece yoke are one piece and are planar and in a second embodiment of the invention a P2 yoke is stitched to the second pole tip. In both embodiments the first pole piece of the write head can be notched without damaging the second pole tip.Type: ApplicationFiled: June 18, 2001Publication date: December 19, 2002Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: Hugo Alberto Emilio Santini
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Publication number: 20020189078Abstract: A bilayer mask employed for lift off has a top strip which bridges between first and second bilayer portions and is completely undercut so that when one or more materials is sputter deposited the materials do not form fences abutting recessed edges of a bottom layer in undercuts below a top layer. Sacrificial protective layers are formed on a sensor and lead layers for protecting these components while overlapping portions of these materials on the top of the sensor formed during deposition can be removed by ion beam sputtering, after which the sacrificial protective layers can be removed by ion milling or reactive ion etching.Type: ApplicationFiled: August 12, 2002Publication date: December 19, 2002Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jennifer Qing Lu, Scott Arthur MacDonald, Hugo Alberto Emilio Santini
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Publication number: 20020191342Abstract: A recording/reproduction element is mounted on a magnetic head slider via a piezoelectric element so that a displacement of the piezoelectric element performs fine control of the position of the recording/reproduction, thus enabling to obtain a fine spacing and a high track positioning accuracy. This improves a linear recording density and a track density. A pair of electrodes 15a and 15b are formed on both sides of a piezoelectric element to constitute a piezoelectric actuator. The electrode 15a is arranged so as to oppose to the rear surface (air flow out end) of a magnetic head slider 11. A recording/reproduction element 12 is arranged on the other electrode 15b in a state electrically insulated.Type: ApplicationFiled: August 5, 2002Publication date: December 19, 2002Inventor: Masahiro Yanagisawa
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Patent number: 6493926Abstract: A method for forming a bi-layer lift-off mask for use in fabricating an abutted junction type GMR read-head sensor with a narrow trackwidth of less than 0.5 microns. The mask has a novel suspension bridge structure that avoids problems associated with bilayer lift-off masks of the prior art, namely insufficient or excessive undercutting of the lower layer that produces fence formations in the conducting lead layer or collapse of the mask structure rendering removal difficult.Type: GrantFiled: April 16, 2001Date of Patent: December 17, 2002Assignee: Headway Technologies, Inc.Inventors: Cherng-Chyi Han, Rodney Lee, Mao-Min Chen, Pokang Wang
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Patent number: 6482330Abstract: A method for making a credit card (or other type of data storing card) comprising a magnetic strip includes the step of depositing a magnetic recording layer on a substrate, cutting the substrate into strips, and mounting the strips onto the credit card. In one embodiment, the strips comprise glass that is sufficiently thin to be bendable. The magnetic recording layer is sputtered onto the glass using a high temperature sputtering apparatus. In another embodiment, the substrate is a metal foil. The data recording capacity of the magnetic strip is greater than that which can be achieved by using particulate media.Type: GrantFiled: October 1, 1999Date of Patent: November 19, 2002Assignees: Komag, Inc., UltraCard, Inc.Inventor: Christopher H. Bajorek
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Patent number: 6477765Abstract: What is disclosed is a method of fabricating a thin film magnetic write transducer and the resulting write transducer structure. The method starts with the formation of a bottom pole of the write transducer on a base layer or substrate. This is followed by the formation of a write gap layer, formation of a coil, and formation a coil insulating layer. A thin top pole inner layer is then deposited over the entire structure. Next, a thick top pole outer layer is formed over the top pole inner layer. Preferably, the top pole outer layer is formed by plating through a photoresist mask that defines the top pole shape. Finally, the top pole inner layer is milled using the top pole outer layer as a mask. The top pole produced by this method has parallel sidewalls that are helpful in writing narrow data tracks. Use of the photoresist mask during plating of the top pole outer layer and ion milling of the top pole inner layer provides good dimensional control of the top pole's width.Type: GrantFiled: November 4, 1999Date of Patent: November 12, 2002Assignee: Storage Technology CorporationInventor: Steven Charles Herrera