Abstract: A piezoelectric device including: a first electrode layer provided so as to overlie a substrate; a second electrode layer disposed so as to face the first electrode layer; and a piezoelectric layer disposed between the first electrode layer and the second electrode layer. The first electrode layer has a conductive layer and a barrier layer. The barrier layer is provided between the conductive layer and the piezoelectric layer so as to prevent the conductive layer from contacting the piezoelectric layer.

Abstract: The piezoelectric device includes a substrate, a first electrode deposited on the substrate, a piezoelectric film deposited on top of at least a part of the first electrode by vapor phase deposition, a second electrode deposited on the piezoelectric film and having a water vapor transmission rate of not more than 1 g/m2/day, and at least one protective film that covers at least peripheries of the second electrode and the piezoelectric film and which has an opening in a position corresponding to the piezoelectric film except the periphery thereof. The piezoelectric device has satisfactory moisture resistance and is capable of effectively preventing the ingress of moisture into the piezoelectric film.

Abstract: An acoustic wave device according to one embodiment of the present invention has a base with a vibrating body, a sealing member which is joined to the base in a frame-shaped region surrounding the vibrating body and faces the vibrating body with a space therebetween, and an intermediate layer between the frame-shaped region of the sealing member and the base. The frame-shaped region has a recess and at least a portion of the intermediate layer is located inside the recess.

Abstract: A boundary acoustic wave element includes an IDT electrode arranged at the interface between a piezoelectric substance and a dielectric layer, a heat dissipation film is arranged on the outer side surface of the dielectric layer or on the outer side surface of a sound-absorbing film laminated on the outer side of the dielectric layer, the heat dissipation film is arranged to have a portion that overlaps the IDT electrode in plan view, and the heat dissipation film is connected to a bump provided on the outer side surface of the sound-absorbing film, and is connected to a via-hole conductor that extends through the sound-absorbing film. The boundary acoustic wave element and a boundary acoustic wave device are excellent in a heat dissipation property and hence can provide enhanced electric power resistance, without causing an increase in chip size and an increase in the area of the mounting space.

Abstract: A method for packaging micro electromechanical systems (MEMS) microphone has steps of providing a base, arranging and mounting multiple microphone component assemblies on the base, providing a frame, mounting the frame on the base, forming multiple microphone units, providing a cover; mounting the microphone units on the cover and forming multiple MEMS microphones. Therefore, the MEMS microphones can be produced once in large quantities to save production time and costs.

Abstract: A surface mount crystal oscillator comprises a crystal blank, an IC chip having an oscillation circuit integrated thereon, and a hermetic package for accommodating the crystal blank and IC chip therein. The hermetic package comprises a substantially rectangular ceramic substrate formed with a metal film which makes a round on one main surface thereof, and a concave metal cover having an open end face bonded to the metal film. The IC chip is secured to the one main surface of the ceramic substrate through ultrasonic thermo-compression bonding using bumps, the crystal blank is disposed above the IC chip, and the ceramic substrate has the one main surface formed as a flat surface.

Abstract: Disclosed are apparatus and methodology for minimizing and compensating for cracking in piezoelectric devices so as to maintain long term functionality of the devices. Compensation for cracking is achieved by applying solid conductive electrodes over the entire surface of the piezoelectric device and extending the electrodes beyond the perimeter of the piezoelectric device. In this way electrical connections are maintained even in the presence of cracking. Cracking of the piezoelectric device is limited by minimizing the local bending moment of the piezoelectric device by way of applying insulative support materials that may vary in thickness.

Abstract: A magnetic head driving piezoelectric ceramic actuator having an actuator body and a coating layer. The actuator body has a piezoelectric ceramic substrate and first and second electrodes. The piezoelectric ceramic substrate has first and second principal surfaces, first and second side surfaces, and first and second edge surfaces. The first electrode has a first external electrode portion formed on a part of the first principal surface, and a second external electrode portion formed on the first edge surface. The second electrode has a third external electrode portion formed on the second edge surface, and a fourth external electrode portion formed on the first principal surface. Each of: at least a part of each of the first and second external electrode portions; and at least a part of each of the third and fourth external electrode portions, constitutes a joined portion mounted on the substrate by an electrically-conductive agent.

Abstract: An elastic wave device has the following elements: a piezoelectric substrate; an inter-digital transducer (IDT) electrode disposed on the piezoelectric substrate; internal electrodes disposed above the piezoelectric substrate and electrically connected to the IDT electrode; side walls disposed above the internal electrodes surrounding the IDT electrode; a cover disposed above the side walls so as to cover a space above the IDT electrode; an electrode base layer disposed on the internal electrodes outside the side walls; and connection electrodes disposed on the electrode base layer. Each connection electrode has a first connection electrode disposed on the electrode base layer, and a second connection electrode disposed on the first connection electrode. The horizontal sectional shape of the second connection electrode is non-circular.

Abstract: A coating film is formed on the whole surface area of a body part. Formation of the coating film may be done by immersing the body part in a solution of parfluoropolyether. Then, the parfluoropolyether constituting the coating film is joined with the side surfaces of the body part by irradiating Xenon excimer laser in a nitrogen atmosphere onto the side faces of the body part, or to the surface exposing an electrode layer. As a result, the protective film is formed only on the side surfaces of the body part. Thus, the protective film is formed as a monomolecular film. Total body part is then cleaned by 2,3-dihydrodecafluoropentane to remove non-reacted coating film, thereby completing a multi-layer piezoelectric element.

Abstract: An electronic component capable of withstanding stress from a printed circuit board or the like is provided. In an electronic component, a cavity hermetically sealed by a base and a lid is formed. In the cavity, a crystal resonator is supported by a supporting member over the top surface of the base. The base is made of glass. A stress buffer layer made of a conductive resin or the like is formed over the whole bottom surface of the base. An external electrode and an external electrode that are in continuity with the electrodes of the crystal resonator individually extend to the bottom surface of the stress buffer layer via the side surfaces of the base and stress buffer layer. The thus configured electronic component is surface-mounted by, for example, soldering the external electrode and external electrode formed on the bottom surface of the stress buffer layer to a printed circuit board.

Abstract: A piezoelectric resonator device includes a base holding a piezoelectric resonator element and a lid bonded to the base in order to hermetically seal the piezoelectric resonator element held on the base. In addition, the region of bonding of the base to the lid is composed of at least a nickel-cobalt layer comprising nickel and cobalt, and a metal layer laminated on the nickel-cobalt layer, with the base and lid bonded by heat-melting using a metallic braze material.

Abstract: A surface acoustic wave device, including: a piezoelectric substrate; an interdigitated transducer electrode disposed on the substrate; an oxide film disposed on surface of the interdigitated transducer electrode; and a hydrophobic film disposed on a surface of the oxide film.

Abstract: A manufacturing method for electronic device, includes: preparing a first substrate having a plurality of first regions; preparing a second substrate having a plurality of second regions; facing the first region and the second region each other, and connecting the first substrate and the second substrate while disposing at least a part of a functional element within a space between the first region and the second region; obtaining a plurality of first divisional substrates by cutting the first substrate at each of the first regions, after the connecting of the first substrate and the second substrate; forming a sealing film covering the plurality of the first divisional substrates on the second substrate, after cutting the first substrate; obtaining a plurality of second divisional substrates by cutting the second substrate at each of the second regions, after forming the sealing film; and obtaining a plurality of individual electronic devices.

Abstract: A piezoelectric component with a piezoelectric element includes a piezoelectric substrate, at least one oscillating section formed on the piezoelectric substrate, and an element wiring section connected to the oscillating section. A side face side hollow section forming layer and a lid face side hollow section forming layer made of photosensitive resin surround the top face and side face of the oscillating section while forming a gap so as to provide a hollow section.

Abstract: A surface acoustic wave device includes a piezoelectric substrate, an interdigital transducer (IDT) formed on the piezoelectric substrate, an interconnection electrode that is provided on the piezoelectric substrate and is connected to the IDT, the IDT being made of a metal identical to that of the IDT, an inorganic insulation layer that is provided on the piezoelectric substrate so that at least the interconnection electrode is exposed, an insulative resin layer that is located on an interface between the inorganic insulation layer and a portion of the interconnection electrode exposed from the inorganic insulation layer and is formed so as to cover a side surface of the interconnection electrode, and a metal layer that is provided on the interconnection electrode and the insulative resin layer.

Abstract: An actuator for actuating a fuel injection valve has a piezoactuator, enclosed in an actuator housing unit (14, 16). The housing unit has a cylindrical actuator housing (14) which is elongate in its axial direction (A) and at least partially encased by an extruded plastic coat. The actuator housing unit (14, 16), in its encased area, is provided with a ventilation aperture (20) in which a ventilation element (22) produced from a microporous material is disposed.

Abstract: A piezoelectric actuator unit includes a piezoactuator and a casting compound enclosing the piezoactuator. The casting compound is disposed in a sleeve that includes a hydrophobic material.

Abstract: An apparatus and method for generating electricity using piezoelectric material. The apparatus comprises a first elongate member and a second elongate member that are joining together at first and second points which are spaced apart from each other. The second elongate member comprises a piezoelectric element, or has a piezoelectric element mounted thereon. When pressure is applied to the first elongate member, the second elongate member is stretched and the stretching force is applied to the piezoelectric element. This generates electricity. A similar arrangement with a third elongate member may be provided on the other side of the second elongate member. The apparatus may be placed in a shoe or underneath a floor, so that the variation in pressure caused by walking may be used in generate electricity.

Abstract: A piezoelectric actuator includes a substrate; a diaphragm overlying the substrate; a lower electrode overlying the diaphragm; a piezoelectric body overlying the lower electrode; an upper electrode that includes a first upper sub-electrode which overlies the piezoelectric body and which has a first sputtering rate and also includes a second upper sub-electrode which overlies the first upper sub-electrode, which has a second sputtering rate less than the first sputtering rate, and which is the uppermost layer; and a protective film extending over side surfaces of the piezoelectric body and the second upper sub-electrode, a portion of the protective film that overlies the second upper sub-electrode being removed by sputtering.

Abstract: A piezoelectric element includes a substrate; a first conductive layer disposed on or above the substrate; a piezoelectric layer covering a top and a side of the first conductive layer; a relaxing layer disposed on or above the piezoelectric layer and along an edge of a top surface of the piezoelectric layer; and a second conductive layer covering at least the relaxing layer and the piezoelectric layer.

Abstract: An ultrasound transducer that includes a backing layer, an insulating layer disposed on top of the backing layer, and a plurality of conductive traces disposed on top of the insulating layer are disclosed. Each of the conductive traces has an upper face. A plurality of transducer elements, each having (a) a core of piezoelectric material and (b) a conductive coating disposed beneath the core, are bonded directly to the upper face of a respective one of the plurality of conductive traces. Methods for fabricating ultrasound transducers are also disclosed.

Abstract: A method is provided for encapsulating permanent magnets of a rotor of a generator. Magnets, which are shorter than a rotor yoke in an axial direction, are placed outside of the yoke leaving a short portion of the yoke free at both ends. Spacers of a non-magnetic material are placed between the magnets. End barriers are placed on the free portions of the yoke. A thin sheet of a non-magnetic material is folded around the magnets and the spacers, covering the entire length of the rotor, including the barriers. An air tight membrane is placed on the outside of the sheet and sealed to the ends of the yoke so that the membrane and the yoke together form an air tight enclosure. A vacuum is applied to the air tight enclosure between the membrane and the yoke. Resin is infused into the air tight enclosure and set.

Abstract: Various embodiments of the present invention relate to an encapsulated ceramic element coated with polymer material applied precisely to the element edges that are exposed during dicing. Methods of applying the polymer, as well as specific polymers that are particularly useful are disclosed. For example, the polymer material may be applied using precise application methods such as ink-jet printing to direct-write the material precisely where specifically desired. Another method described in the use of photolithographic methods. Additionally, the inventors have identified polyimide as a particularly useful polymer material in connection with certain aspects.

Abstract: A crystal device for surface mounting, in which a metal cover is jointed to the metal ring by seam welding, satisfies relationships A2/A1<C2/C1 and B2/B1<D2/D1, where A1 is a length of a long side of the metal ring, A2 is a length of a straight portion of a long side except for curved portions, B1 is a length of a short side of the metal ring, B2 is a length of a straight portion of the short side except for the curved portions thereof, C1 is a length of a long side of the metal cover, C2 is a length of a straight portion of the long side except for the curved portions thereof, D1 is a length of a short side of the metal cover, and D2 is a length of a straight portion of the short side except for the curved portions thereof.

Abstract: This aims to provide a multi-layer piezoelectric element, which is made excellent in durability and suppressed in the reduction of a displacement degree, even if the element is largely displaced or driven at a high speed, and an injection device and a fuel injection system using the element. The multi-layer piezoelectric element comprises a stacked body comprising a plurality of ceramic layers and a plurality of internal electrode layers, each of the plurality of internal electrode layers being sandwiched between ceramic layers of the plurality of ceramic layers that are located opposite to each other. The plurality of ceramic layers comprises a plurality of piezoelectric layers, and a low-rigidity ceramic layer which has a rigidity lower than that of the plurality of piezoelectric layers and that of the plurality of internal electrode layers.

Abstract: In a method for producing a multilayer encapsulation (1) of a piezo actuator (5) such that the piezo actuator (5) is protected towards the outside without having to use an additional enveloping housing-type structure, in order to produce the multilayer encapsulation (1), an electrically insulating elastic layer (10) is first applied to the surface of the piezo actuator (5), whereupon a metallic layer is applied to the electrically insulating elastic layer (10) so as to planarly cover the same.

Abstract: A piezoelectric actuator assembly comprising at least a stack of interior piezoelectric wafers which, in one embodiment, each include first and second spaced-apart strips of conductive material defining first and second wrap-around electrodes. The interior wafers are stacked in an alternating relationship wherein the first electrodes and the second electrodes are disposed in an opposed relationship. In one embodiment, the assembly includes an end piezoelectric wafer located at each end of the stack of interior wafers and includes a wrap-around electrode in contact with the interior wafers. A conductive end plate is coupled to each of the end piezoelectric wafers. A terminal wire is coupled to each conductive end plate.

Abstract: An electronic component capable of withstanding stress from a printed-circuit board or the like is provided. In an electronic component, a cavity hermetically sealed by a base and a lid is formed. In the cavity, a crystal resonator is supported by a supporting member over the top surface of the base. The base is made of glass. A stress buffer layer made of a conductive resin or the like is formed over the whole bottom surface of the base. An external electrode and an external electrode that are in continuity with the electrodes of the crystal resonator individually extend to the bottom surface of the stress buffer layer via the side surfaces of the base and stress buffer layer. The thus configured electronic component is surface-mounted by, for example, soldering the external electrode and external electrode formed on the bottom surface of the stress buffer layer to a printed-circuit board.

Abstract: A piezoceramic surface actuator having a plurality of piezoceramic plates (3) separated from one another by in each case a positive or negative electrode (2a, 2b), wherein the positive and negative electrodes (2a, 2b) alternate and are constructed integrally with the piezoceramic plates (3), and having collector electrode surfaces (4a, 4b) for the positive and negative electrodes (2a, 2b), which are connected to the associated positive or negative electrodes (2a, 2b) in a conducting manner and are arranged on two exterior sides of the surface actuator that are opposite from one another, is plate-shaped and has a much greater width of the piezoceramic plates (3), defined by the distance between the opposite collector electrode surfaces (4a, 4b), than the thickness of the surface actuator.

Abstract: A piezoelectric device includes a piezoelectric substrate, a conductive pattern which is provided on one main surface of the piezoelectric substrate and which includes an IDT electrode, a supporting layer which is arranged on the one main surface of the piezoelectric substrate so as to surround the periphery of an IDT-forming region in which the IDT electrode is provided and which has a thickness greater than that of the IDT electrode, and a cover layer which is arranged on the supporting layer and which covers the IDT-forming region. The supporting layer includes removed sections provided at a plurality of positions at least in a region close to the IDT-forming region, the removed sections being obtained by partially removing a portion of the supporting layer to be bonded to the one main surface of the piezoelectric substrate.

Abstract: A plurality of micro three-dimensional structure elements each having a movable structure fixed on a sacrifice layer, and fixation portions of the micro three-dimensional structure elements for the sacrifice layer are arranged into a film-like elastic body, and then the sacrifice layer is removed. Thus, a three-dimensional structure in which the individual micro three-dimensional structure elements are arranged independently of one another within the elastic body is manufactured.

Abstract: A piezoelectric element has a piezoelectric body, two electrodes sandwiching the piezoelectric body, a protective layer covering the piezoelectric body and the two electrodes, and an antistatic layer formed on and/or in the protective layer.

Abstract: A piezoelectric actuator (2) comprising a stack of one or more piezoelectric elements (4) defining an external surface, and passivation means (20) applied to the external surface of the stack, wherein the passivation means (20) includes a self-supporting polyimide material (20b) (e.g. in the form of a layer, film or membrane).

Abstract: A piezoelectric device comprising a device body bearing encapsulation means to protectively encapsulate the device body wherein the encapsulation means includes an ion exchange membrane.

Abstract: A method of producing an acoustic wave device includes: forming an interdigital electrode 3 on a piezoelectric substrate 2; forming a barrier film 4 so as to cover the interdigital electrode 3; forming a medium 5 on the barrier film 4; measuring a frequency characteristic of an acoustic wave excited by the interdigital electrode 3; and forming, in an excitation region, an adjustment region having a thickness different from other portions by patterning the barrier film 4 or further providing an adjustment film. When forming the adjustment region, an area T of the adjusting area is adjusted in accordance with the measured frequency characteristic.

Abstract: A piezoelectric resonator includes: a package having a cavity; a plurality of electrode pads formed within the cavity; a first bonding section and a second bonding section that include silicone base conductive adhesive and are formed on the plurality of the electrode pads, respectively; and a piezoelectric vibrating element having one end supported by the first bonding section and the second bonding section, wherein the piezoelectric vibrating element has a piezoelectric substrate having mutually opposing first face and second face, a first electrode that is formed on the first face and electrically connected to the first bonding section, and a second electrode that is formed on the second face and electrically connected to the second bonding section, wherein an area of the piezoelectric vibrating element supported by the first bonding section and the second bonding section defines a supported region and an area of the piezoelectric vibrating element that is not supported by the first bonding section or the s

Abstract: A liquid ejecting head includes a flow passage substrate having a pressure generation chamber in communication with a nozzle opening. A piezoelectric element includes first and second electrode and a piezoelectric substance layer and is positioned over one surface of the flow passage substrate. The piezoelectric element is deformed to form a convex toward the pressure generation chamber when the piezoelectric element is driven. A protection film formed from an inorganic material covers the piezoelectric element and has an opening through which an upper surface of the second electrode is exposed. An end of the opening in the protection film viewed in a direction of the length of the pressure generation chamber is located closer to the center than is an area at which the center of curvature of a curve of the piezoelectric element that forms near a wall around the pressure generation chamber during deformation operation.

Abstract: A coating providing high abrasion and chemical resistance composed of a barrier layer from vanadium, molybdenum, niobium, tantalum and the like, and an outer layer of diamond-like carbon. The coating is especially applicable for acoustic wave device (AWD) based sensors, and for passivating an electrode such as an electrode deposited on the AWD sensing area. The coating provides excellent mechanical and acoustical characteristics for coating acoustic wave devices allowing the sensor to operate in harsh environments.

Abstract: A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the intermediate electrode, and an upper electrode disposed on the second piezoelectric layer.

Abstract: An ultrasonic sensor includes a cylindrical case with a bottom. A piezoelectric element is bonded to an inner side of a bottom portion of the case, and a felt is bonded to the piezoelectric element. A cap is fitted to an opening of the case. The cap includes a fixing portion and a substrate which is harder than the fixing portion. Terminals are press-fitted to the substrate. Wires are connected to the terminals, so that the terminals are electrically connected to the piezoelectric element. A through hole is provided in the fixing portion. Resin before being foamed is injected from the through hole and then foamed, so that the case is filled with foamable resin while an excess amount of foamable resin is pushed out from the through hole.

Abstract: A piezoelectric actuator module is proposed having one or a plurality of piezoelectric actuators which is or are clamped in between an actuator head and an actuator base. According to the invention, at least the piezoelectric actuator is provided with a protection layer system. Provision is made of at least one surrounding element for tightly fixing the protection layer system to the actuator head, to the actuator base and/or to the piezoelectric actuator. The at least one surrounding element is composed of a material having a shape memory and can be pressed onto the protection layer system after a mounting-dictated expansion.

Abstract: An acoustic wave sensor assembly includes piezoelectric material, a first acoustic wave resonator element structure mounted on the piezoelectric material for interacting with an electrical signal, the acoustic wave resonator element structure being operable to interact with an acoustic wave propagating within the piezoelectric material to produce a first frequency response. Further acoustic wave resonator element structures are mounted on the piezoelectric material for interacting with electrical signals, the further acoustic wave resonator element structures being operable to interact with further acoustic waves propagating within the piezoelectric material to produce subsequent frequency responses. The first acoustic wave resonator element structure and further acoustic wave resonator element structures are combined to form a ladder or lattice filter network to produce an overall frequency response.

Abstract: Provided are barrier coatings and methods for applying barrier coatings to piezoelectric actuators that are intended for use in automotive fuel injectors. The barrier coatings are characterised by the presence of at least one organic layer, and additionally metal and/or non-metallic inorganic layers. The barrier coatings described show advantage in resisting permeation by liquid fuel, water and other contaminants.

Abstract: An actuator module including a piezoactuator, for example for a piezoinjector for metering fuel in an internal combustion engine, is proposed. The piezoactuator has piezoelements stacked one above another between an actuator head and an actuator foot and is provided with at least one elastomer layer enclosing the piezoelements. The elastomer layer is enveloped by a corrugated bellows or by telescopic tubes, composed of a material that is diffusion-impermeable with respect to a fuel to be metered by the piezoinjector. The corrugated bellows or the telescopic tubes have on their periphery grooves which can absorb expansions of the elastomer layer or of the piezoactuator.

Abstract: A method includes applying a lip, comprised of a first material, along at least a portion of an actuator of an electronic device, and applying a coating, comprised of an elastic material, to cover a part of the actuator, the coating disposed to facilitate actuation of the actuator.

Abstract: A piezoelectric actuator with piezoelectric elements, fastened between an actuator head and an actuator foot, and with a plastic sleeve surrounding at least the piezoelectric elements is proposed, which is set in a clamping ring on the actuator head and/or the actuator foot of the piezoelectric actuator. The respective clamping ring may be a metal part or a plastic part, which is equipped with clamping lugs suitable for setting the plastic sleeve and is thrust, pressed, or shrunk onto the respective actuator head and/or actuator foot of the steel piezoelectric actuator.

Abstract: A piezoelectric device, having a piezoelectric vibrating piece and a circuit element being electrically connected, is provided with a package for storing inside at least the piezoelectric vibrating piece of the piezoelectric device. The package is made up of a substrate and a cover body, and on the outer surface of the package, an electrode terminal electrically connected to at least the circuit element or the piezoelectric vibrating piece is provided. The electrode terminal includes an external connecting terminal which is electrically connected with an external circuit board and an input-output terminal which is electrically non-connected with the external circuit board, at the time of mounting the package on the external circuit board. The surface of the external connecting terminal and that of the input-output terminal are formed of materials different from each other so that adhesive characteristics to a mounting material such as a solder are varied.

Abstract: A panel that can change its stiffness and/or surface roughness and thereby its sound quality is provided. The panel includes a layer having an outer surface and an inner surface oppositely disposed from the outer surface. The panel can also include an electroactive actuator that is operable to change its shape when a voltage is applied thereto. The change in shape of the electroactive actuator results in a change in stiffness and/or surface roughness of the panel and therefore a change in the panel's acoustic characteristics. In some instances, the electroactive actuator is at least partially within the panel and upon changing of its shape results in a change in the roughness of a surface that faces a sound source. In other instances, the activation of the electroactive actuator results in an increase in stiffness of the panel.

Abstract: A piezoelectric element includes a substrate, a lower electrode formed above the substrate, a piezoelectric layer formed above the lower electrode, an upper electrode formed above the piezoelectric layer, a protection layer formed on the lateral sides of the piezoelectric layer, and a self-organized monomolecular film formed on the side of each of the protection layer not facing the piezoelectric layer.