Abstract: Embodiments of the present disclosure are directed to a piezoelectric resonator. The resonator can have a base defining at least a first base portion and a second base portion and two or more vibrating arms projecting from the first base portion, the first vibrating arm being substantially parallel to the second vibrating arm. The resonator can define a generally planar first main surface and a generally planar second main surface defined by the base and the first and second vibrating arms wherein the first main surface is generally parallel to the second main surface. At least one groove can be formed in at least one of the first and second main surfaces of each of the first and second vibrating arms. The resonator can further have at least one vibration isolation arm projecting from the base, the vibration isolation arm being approximately perpendicular to the two or more vibrating arms.

Abstract: Provide a highly efficient manufacturing method of a piezoelectric vibrator and to provide a piezoelectric vibrator manufactured by this manufacturing method.

Abstract: A micro-electromechanical resonator suspended from an anchor. The resonator has: a length; a first width at a first distance from the anchor; and a second width at a second, greater distance from the anchor. The second width is greater than the first width, and the width of the resonator tapers gradually along at least part of its length from the second width to the first width.

Abstract: A resonator element includes: a base portion; and a resonating arm extending in a first direction from the base portion, wherein the resonating arm includes a first surface, a second surface facing the first surface, a first side surface extending in the first direction so as to connect the first and second surfaces, and a second side surface facing the first side surface, wherein the resonating arm includes a first width portion having a first width and a second width portion provided at a root of the resonating arm so as to have a second width larger than the first width, wherein the resonating arm includes a groove portion provided on at least one of the first and second surfaces so as to extend in the first direction, the groove portion in the second width portion having a width larger than a width of the groove portion in the first width portion, and wherein a sum of the width between the groove portion in the second width portion and the first side surface and the width between the groove portion in the

Abstract: A vibration device includes: a vibrating reed including a base having a notch, a plurality of vibrating arms extending from the base, and each including an arm section, a weight section, and a groove section, and a support section, wherein a mechanical resonant frequency f of the vibrating reed is higher than a thermal relaxation frequency f0 of the vibrating reed, and assuming that a closest approach distance between the notch and a crotch section formed between the vibrating arms is a base flexion width Wb, and an arm width of the vibrating arm in a case of replacing a cross-sectional shape of the vibrating arm having a thermoelastic loss equivalent to a thermoelastic loss of the cross-sectional shape and a thickness equal to a thickness of the cross-sectional shape is an effective arm width We, a relationship of Wb>We is satisfied.

Abstract: A piezoelectric vibrator according to the invention includes a base substrate and a lid substrate which are connected to each other and have a cavity formed therebetween; a piezoelectric vibrating reed that is mounted on the base substrate in the cavity; an external electrode that is formed on a lower surface of the base substrate; and a through electrode which is formed so as to pass through the base substrate, maintain the airtightness in the cavity, and electrically connect the piezoelectric vibrating reed with the external electrode. The through electrode is formed by a press molding by a forming mold having a pin, and includes a through hole of a taper-shaped section, in which a taper angle is in the range of 15° or more and 20° or less, and a conductive paste that is hardened after being filled in the through hole.

Abstract: A vibrator element includes: a base having a mounting surface; a vibrating arm which is extended from the base and has a first surface and a second surface that faces the first surface and is positioned on the mounting surface side, and which performs flexural vibration in a direction normal to the first and second surfaces; and a laminated structure which is provided on at least one of the first and second surfaces of the vibrating arm, and which includes at least a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, in which the vibrating arm is warped toward the mounting surface side.

Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.

Abstract: A method of manufacturing a piezoelectric vibration reed is provided. The piezoelectric vibration reed includes a pair of vibrating arm portions and a base portion. The pair of vibrating arm portions is disposed in parallel to each other. The base portion is configured to integrally support proximal end portions of the pair of vibrating arm portions in a longitudinal direction of the vibrating arm portions. The method of manufacturing the piezoelectric vibration reed forms a slit-shaped notched portion at a crotch portion located between the proximal end portions of the pair of vibrating arm portions.

Abstract: A piezoelectric vibration reed includes a pair of vibrating arm portions arranged in parallel to each other and a base portion. The base portion is integrally coupled to proximal ends of the pair of the vibrating arm portions in a longitudinal direction that the vibrating arm portions extend. The base portion includes a connecting portion, a mount portion, and a narrow portion between the connecting portion and the mount portion. The base portion further includes a pair of notched portions notched respectively inwardly from both sides of the base portion in the width direction and ribs projecting outwardly in the width direction of the base portion and arranged in the interiors of the notched portions.

Abstract: A piezoelectric vibrator including a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel, a pair of excitation electrodes that vibrate the pair of vibration arm portions, and a mount electrode that is electrically connected to the pair of excitation electrodes, the piezoelectric vibrating reed being mounted on the base substrate within the cavity via the mount electrode; an insulation film which is formed on the piezoelectric vibrating reed so as to cover the excitation electrodes; and a getter material formed of the metallic material that is formed on any of the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated.

Abstract: A piezoelectric vibration reed which is capable of inhibiting vibrations of a vibrating arm portion in the thickness direction and inhibiting the increase in CI value and a vibration leak, a piezoelectric vibrator, an oscillator, an electronic instrument, and a radio timepiece using the piezoelectric vibration reed is provided. A piezoelectric vibration reed includes: a pair of vibrating arm portions arranged side by side; groove portions formed on both main surfaces of the vibrating arm portions and extending in the Y direction (the longitudinal direction) of the vibrating arm portions; a base portion connecting the pair of vibrating arm portions; and the groove portions are each formed in the interior thereof with a rib extending from a wall surface on a ?Y side (proximal end side) to a +Y side (distal end side).

Abstract: There is provided a piezoelectric vibration reed including a pair of vibrating arm portions arranged in parallel to each other and a base portion integrally fixing proximal end portions in the longitudinal direction of the pair of vibrating arm portions, wherein the pair of vibrating arm portions is formed with first groove portions positioned on the side of the proximal end portions of the vibrating arm portions and second groove portions positioned on the side of distal end portions of the vibrating arm portions with respect to the first groove portions on main surfaces, the width of the first groove portions along the width direction orthogonal to the longitudinal direction of the vibrating arm portions on the main surfaces of the vibrating arm portions is formed to be smaller than the second groove portions, and reinforcing ribs projecting from bottom surfaces of the second groove portions are formed in the second groove portions.

Abstract: A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.

Abstract: A piezoelectric vibration piece includes a base made of a piezoelectric material; a plurality of vibration arms which is integrally formed with the base and extends in parallel; elongate grooves which are formed along longitudinal directions of the vibration arms; and excitation electrodes which include inner electrodes disposed in the elongate grooves and side electrodes disposed in side surfaces facing the inner electrodes, wherein widening portions in which the widths of the vibration arms are widened toward the base at a joint between the vibration arms of the base are formed, and the side electrodes are led to principal surfaces and side surfaces of the widening portions.

Abstract: Piezoelectric devices are disclosed that include a chip plate sandwiched between a lid plate and a base plate. The chip plate includes a tuning-fork type piezoelectric vibrating piece surrounded by an outer frame. The lid plate includes a concavity on its inner major surface, and the base plate includes a concavity on its inner major surface. The lid plate, chip plate, and base plate are bonded together to form a package containing the piezoelectric vibrating piece. The tuning-fork type piezoelectric vibrating piece includes a base having an X-direction width and at least pair of vibrating arms extending from the base in a Y-direction. The tuning-fork type piezoelectric vibrating piece is coupled to the outer frame by supporting arms extending in the Y-direction outboard of the vibrating arms. The concavity of the lid plate includes at least one base-movement “buffer” extending in the X-direction at a location corresponding to the base of the vibrating piece.

Abstract: A tuning fork quartz crystal resonator has a base and two resonating arms extended in parallel from the same side of the base. Each resonating arm has asymmetric grooves on its upper and bottom surface, and the via-hole to reliably connect the top and bottom electrode. The asymmetric groove design can simplify the manufacturing process and lower the manufacturing cost. The base has continuous concave on both side surfaces and a recess on the main surface. The energy of ultrasonic wave propagating via the base mounting pads into the ceramic package can be reduced. This unique tuning fork quartz crystal resonator can prevent dramatic reduction of the Q value, and retain the outstanding quality of the resonator.

Abstract: A piezoelectric vibrator includes a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel and is mounted on the base substrate within the cavity; and a getter material of a metallic film that is formed on the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated. A restriction portion, which is arranged in the cavity and restricts a scattering direction of the getter material evaporated by the heating to suppress a scattering amount scattering toward the vibration arm portion, is formed in the base substrate or the lid substrate.

Abstract: A tuning-fork type piezoelectric resonator plate includes: at least a plurality of leg portions serving as vibrating portions; a bonding portion bonded to the outside, and a base portion from which the leg portions and the bonding portion protrude. The plurality of leg portions protrude from a first end face of the base portion and are provided side-by-side on the first end face. The bonding portion protrude from a second end face located opposite the first end face of the base portion at a position located opposite a center position of the plurality of leg portions in a width direction of the first end face of the base portion. And, at least a base end portion of the bonding portion is used as a bond region that is bonded to the outside.

Abstract: A vibrator element includes: a base section formed on a plane including a first direction and a second direction perpendicular to the first direction; and a vibrating arm extending from the base section in the first direction, wherein the vibrating arm flexurally vibrates in a normal direction of the plane, and has a first surface one of compressed and extended due to the flexural vibration and a second surface one of extended when the first surface is compressed and compressed when the first surface is extended, the first surface is provided with a first mass section, and the second surface is provided with a second mass section, and at least one of the first mass section and the second mass section has a portion, which fails to be opposed to the other of the first mass section and the second mass section in a plan view in the normal direction.

Abstract: An object of the invention is to provide a method of manufacturing a stacked crystal resonator whereby a large number of stacked crystal resonators formed on a wafer can be easily broken away from the wafer, and the risk of damage to the outside surfaces and the like of the stacked crystal resonators is reduced. There is formed a framed crystal plate connected to a first wafer by a first support section, a cover connected to a second wafer by a second support section, and a base connected to a third wafer by a third support section, and a thickness of at least one of the first support section through third support section is thinner than a thickness the connected wafer.

Abstract: An object of the invention is to provide a surface mounted resonator that improves impact resistance by the shape of a mounting terminal provided on an outside bottom face of a stacked resonator. A surface mounted crystal resonator is provided with a plurality of mounting terminals electrically connected to a hermetically sealed crystal piece at both ends of an outside bottom face having a rectangular shape long in the lengthwise direction, the mounting terminals having the same external dimensions with a total dimension of the mounting terminals in a lengthwise direction of the outside bottom face being 70% or more [but less than 100%] of a dimension in the lengthwise direction of the outside bottom face. Respective facing sides of the mounting terminals facing each other in a central area of the outside bottom face are formed curved in a convex shape such that a curvature thereof decreases gradually.

Abstract: This invention is provided a piezoelectric vibrating reed which is capable of decreasing variation in the amount of etching reside as much as possible and suppressing influence of vibration loss on the vibration characteristics as much as possible. A piezoelectric vibrating reed comprising a vibrating section extensive in parallel in a longitudinal direction and a base to which the vibrating section is connected at this proximal end. The base comprises at least a first section and a second section defined from the side of the proximal end of the base long the longitudinal direction. The first section is wider in a transverse direction than the second section.

Abstract: A method of manufacturing a quartz crystal unit comprises disposing a metal film on opposite surfaces of a quartz crystal wafer and then etching the wafer to form a two-line tuning fork resonator vibratable in a flexural mode of an inverse phase. A groove is formed in the opposite main surfaces of both tines, and the length of each groove is determined relative to the length of the resonator so that the series resistance of the fundamental mode of vibration of the resonator is less than the series resistance of the second overtone mode of vibration thereof. The resonator is then mounted in case after which the resonant frequency of the resonator is adjusted.

Abstract: There are provided a piezoelectric vibrating reed which can be reliably bonded ultrasonically and which can be efficiently manufactured, a piezoelectric vibrator, a method of manufacturing a piezoelectric vibrator, an oscillator, an electronic apparatus, and a radio-controlled timepiece. A piezoelectric vibrating reed includes: a piezoelectric plate having vibrating portions and a base portion adjacent to the vibrating portions; excitation electrodes formed in the vibrating portions; mount electrodes formed in the base portion; lead-out electrodes for making the excitation electrodes and the mount electrodes electrically connected to each other; and a passivation film which is formed of an electrically insulating material and covers the excitation electrodes and the lead-out electrodes. These electrodes disposed on one surface of the base portion are formed only in a region covered by the passivation film.

Abstract: A resonator element includes at least one resonating arm that vibrates in a torsional mode, wherein the resonating arm includes a structural portion having a first portion disposed in a first direction in a sectional view in the width direction and a second portion connected to the first portion so that the center of gravity departs from the center of gravity of the first portion in the first direction and a second direction perpendicular to the first direction, wherein the first portion vibrates in a stretch mode in the length direction of the resonating arm with an application of a voltage, and wherein the second portion does not substantially vibrate in the stretch mode in the length direction of the resonating arm with the application of the voltage or vibrates in a stretch mode with a phase different from that of the first portion.

Abstract: Methods are disclosed for manufacturing tuning-fork type piezoelectric vibrating devices. In an exemplary method a metal film is formed on both surfaces of a piezoelectric wafer, followed by application of photoresist. A first metal-film-etching step etches the metal film after removal of the photoresist layer outside the profile outline of the devices. A first piezoelectric-etching step etches the wafer surface but not through to the rear surface; thus, outside the profile outline the metal film is removed. A second metal-film-etching step etches the metal film after removal of the photoresist layer from first groove regions. A second piezoelectric-etching step etches outside the profile outline and the groove regions through to the rear surface.

Abstract: A resonator element includes: a base portion, a first resonating arm that is extended from the base portion along a first direction, and a second resonating arm that is extended from the base portion along a first direction opposite to the first resonating arm, wherein the first resonating arm and the second resonating arm are arranged such that a base end portion of one side resonating arm and a middle portion of the other side resonating arm are arranged in the second direction orthogonal to the first direction.

Abstract: A flexural mode resonator element includes: a vibration arm extending from a base end toward a tip; a base joined to the vibration arm at the base end; and supporting arms arranged on both sides of the base in a width direction perpendicular to an extending direction of the vibration arm and joined to the base, wherein the base has a reduced cross-section portion disposed along the extending direction of the vibration arm between a joint portion with the vibration arm and a joint portion with the supporting arms, and the reduced cross-section portion is disposed so as to satisfy a relationship 2×W1?L?6×W1 where L is the length of the reduced cross-section portion in the extending direction of the vibration arm, and W1 is the arm width of the vibration arm.

Abstract: A flexural vibration piece including a vibrator having a first region on which a compressive stress or a tensile stress acts and a second region on which a tensile stress acts when a compressive stress acts on the first region and a compressive stress acts when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path formed of a material having a thermal conductivity higher than the vibrator and that thermally connects the regions, wherein when m is the number of heat conduction paths, ?th is the thermal resistivity of the heat conduction path, ?v is the thermal resistivity of the vibrator, tv is the thickness of the vibrator in a direction orthogonal to the first plane, and tth is the thickness of the heat conduction path, a relationship of tth?(1/m)×tv×(?th/?v) is satisfied.

Abstract: A tuning fork-type piezoelectric resonator plate has a resonator blank comprising a pair of vibrating leg portions and a base portion from which the leg portions protrude. The pair of leg portions are arranged in parallel protrudingly from one end face of the base portion, and a pronged portion is formed between the pair of leg portions in an intermediate position in a width direction of the one end face of the base portion. The base portion has a pair of through holes along the one end face of the base portion, and on another end face side opposite to the one end face of the base portion, a joining region that joins to an external portion. The pair of through holes are specially positioned and have special wall surface configurations.

Abstract: A unit comprising a quartz crystal resonator vibratable in a flexural mode and having a base portion including a length less than 0.5 mm, and first and second vibrational arms connected to the base portion, at least one groove being formed in each of two of opposite main surfaces of each of the first and second vibrational arms, and an electrode being disposed on a surface of the at least one groove formed in each of the two of the opposite main surfaces of each of the first and second vibrational arms so that the electrode disposed on the surface of the at least one groove formed in each of the two of the opposite main surfaces of the first vibrational arm has an electrical polarity opposite to an electrical polarity of the electrode disposed on the surface of the at least one groove formed in each of the two of the opposite main surfaces of the second vibrational arm.

Abstract: In a unit comprising a quartz crystal resonator, a case having a mounting portion, and a lid connected to the case, the quartz crystal resonator having a base portion, and first and second vibrational arms connected to the base portion, at least one groove being formed in at least one of opposite main surfaces of each of the first and second vibrational arms, at least one mounting arm being connected to the base portion having a length L1 less than 0.5 mm and extending in a common direction with at least one of the first and second vibrational arms, the at least one mounting arm being mounted on the mounting portion of the case.

Abstract: Embodiments of a vibrational energy harvester are provided. A vibrational energy harvester can include a translator layer sandwiched between two stator layers. The translator layer can include a plate having an array of magnets and two or more piezoelectric patches coupled to a tether beam attached to the plate. The stator layers can have a printed circuit board with multilayer electrical windings situated in a housing. In operation, vibration of the housing can result in bending of the piezoelectric patches coupled to the tether beam. This bending simultaneously results in a relative displacement of the translator, which causes a voltage potential in the piezoelectric patches, and a relative velocity between the translator and the stators, which induces a voltage potential in the stator coils. These voltage potentials generate an AC power, which can be converted to DC power through a rectification circuit incorporating passive and active conversion.

Abstract: A flexural vibrator element has a vibrator arm extending from a base section and having a rectangular cross-sectional shape, the vibrator arm having first and second step sections composed of step surfaces intersecting respectively with a left side surface and a right side surface, and step side surfaces intersecting respectively with an upper surface and a lower surface, between the lower surface, the upper surface and the left side surface, the right side surface, and first and fourth detection electrodes on the left and right side surfaces and second and third detection electrodes on the step side surfaces are respectively separated in a thickness direction of the vibrator arm. The first through fourth detection electrodes are patterned with accuracy by exposure from the upper surface and the lower surface using a common exposure device by existing photo etching.

Abstract: A double-side tuning fork-type bending vibration piece having a basal part, a pair of drive vibration arms, a pair of detection vibration arms, drive electrodes and detection electrodes includes adjustment films of a metallic material or the like formed in connecting areas between the vibration arms and the basal part. The adjustment films are formed in such a way as to cover an area of tapered portions formed in connecting parts between the drive vibration arms and the basal part, an area of the basal part near the tapered portions and an area of the drive vibration arms. While monitoring a detection current outputted from the detection electrodes when the drive vibration arms are excited in driving mode, the adjustment films are partly deleted by laser irradiation so that the detection current becomes 0.

Abstract: A package for an electronic component includes a first substrate and a second substrate. In the package, an interior space capable of housing the electronic component is formed between the first substrate and the second substrate, a sealing hole communicating with the interior space and an exterior is formed in at least one of the first substrate and the second substrate, the interior space can be airtightly sealed by melting a solid sealant provided in the sealing hole, and an interior wall of the sealing hole has a curved surface extending in directions of penetration and inner periphery of the sealing hole.

Abstract: To obtain an inexpensive piezoelectric vibration component having vibration characteristics whose degradation resulting from deposition of moisture due to a temperature change is less likely to occur without increasing the cost of a sealing structure and the number of parts, a piezoelectric vibration component includes a piezoelectric vibrating element accommodated in a package being sealed, and when the volume of the piezoelectric vibrating element is Ve and the volume within the package obtained by subtraction of the volume Ve of the piezoelectric vibrator from the volume of the space of the package is Vp Ve/Vp>(Se×M)/{(Sp+Se)×2.72} where Se is the surface area of the piezoelectric vibrating element, Sp is the surface area of the space inside the package when the piezoelectric vibrating element inside the package is absent, and M is the maximum mass of moisture per unit volume [?g/mm3] at the use temperature and 100% relative humidity.

Abstract: The invention relates to a tuning-fork type crystal resonator in which the frequency adjustment accuracy is increased, and a frequency adjustment method thereof. In a tuning-fork type crystal resonator having a tuning-fork shaped piece of quartz crystal in which a pair of tuning fork arms extend from a tuning fork base, and a frequency adjustment method thereof, there is provided a first frequency adjustment step for adjusting an oscillation frequency by forming inclined surfaces spanning from outer peripheral surfaces surrounding the pair of tuning fork arms toward distal end surfaces, by using a femtosecond laser irradiated in a direction from the outer peripheral surfaces toward the distal end surfaces, or in a direction from the distal end surfaces toward the outer peripheral surfaces.

Abstract: In an exemplary method for making crystal vibrating devices, four wafers are provided: a crystal wafer, a base wafer, a first-lid wafer, and a second-lid wafer. The crystal wafer defines multiple crystal vibrating pieces including respective frames and respective electrodes formed on both main surfaces thereof. The base wafer defines multiple base plates bondable to one main surface of respective frames. The first-lid wafer defines multiple first lids bondable to the other main surface of the respective frames. Each first lid defines a void registrable with respective electrodes. The second-lid wafer is sized similarly to and bondable to the first-lid wafer so as to sealably close the voids. In a first bonding step the crystal wafer is bonded to the base wafer and first-lid wafer. In a subsequent adjustment step the thickness of at least one electrode per each crystal vibrating piece is adjusted to adjust the vibrational frequency of the respective vibrating portion.

Abstract: An object is to provide a crystal device in which an influence due to an electroconductive adhesive is reduced, and vibration characteristics of a crystal piece are favorably maintained.

Abstract: A resonator element includes: three or more resonating arms, each of the resonating arms including; a lower electrode provided on a first surface of the resonating arm, a piezoelectric film formed on the lower electrode, an upper electrode formed on the piezoelectric film, a first wiring line coupled to the lower electrode, and a second wiring line coupled to the upper electrode; and a base to which the resonating arms are connected. In the resonator element, the resonating arm vibrates in a thickness direction of the resonating arm. The resonating arms adjacent to each other vibrate in opposite directions from each other. The first surface is opposed to a second surface in the thickness direction. The second wiring line is drawn out to the second surface through side surfaces of the resonating arm so as to surround the resonating arm.

Abstract: A quartz crystal vibrator element having the weight section is provided with the intermediate weight section formed to have an arm width W1 larger (thicker) than the arm width W of the vibrating arm section and smaller (thinner) than the arm width W2 of the tip weight section, thereby making the intermediate weight section follow the vibration (the amplitude) of the vibrating arm section. Further, the tip weight section formed to have an arm width W2 larger (thicker) than the arm width W1 of the intermediate weight section is provided, thereby making the tip weight section follow the vibration (the amplitude) of the vibrating arm section and the intermediate weight section. Therefore, the vibration characteristics of the vibrating arm section can be stabilized.

Abstract: A flexural vibration piece includes: a base portion; a vibrating arm extending from the base portion and having a first surface, a second surface opposing the first surface, and side surfaces connecting the first surface and second surface, wherein a laminated structure including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and second electrode, is formed on each of the first surface and second surface, the piezoelectric layer formed on the first surface side and the piezoelectric layer formed on the second surface side have mutually opposite polarization directions, and the first electrode formed on the first surface side and the first electrode formed on the second surface side are connected to each other.

Abstract: Providing a package and a method for manufacturing the package capable of achieving improvement in the degree of vacuum in the cavity, and to provide a piezoelectric vibrator, an oscillator, an electronic device, and a radio-controlled timepiece. There is provided a package which includes a plurality of kinds of gettering materials 20, 21 having different activation temperatures and which are capable of being activated by heating is disposed in the cavity C.

Abstract: A flexural mode resonator element includes: a vibration arm extending from a base end toward a tip; a base joined to the vibration arm at the base end; and supporting arms arranged on both sides of the base in a width direction perpendicular to an extending direction of the vibration arm and joined to the base, wherein the base has a reduced cross-section portion disposed along the extending direction of the vibration arm between a joint portion with the vibration arm and a joint portion with the supporting arms, and the reduced cross-section portion is disposed so as to satisfy a relationship 2×W1?L?6×W1 where L is the length of the reduced cross-section portion in the extending direction of the vibration arm, and W1 is the arm width of the vibration arm.

Abstract: A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.

Abstract: A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.

Abstract: A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.