Abstract: Crystal devices are disclosed, of which an exemplary device includes a crystal frame comprising a crystal vibrating piece having an electrode pattern and an outer frame supporting the crystal vibrating piece. The device also includes a crystal package base including at least one connection electrode formed on a first main surface and at least one external electrode formed on a second main surface, wherein the second main surface is opposite the first main surface. The crystal frame and crystal base are layered together with a lid wafer to form a 3-layer sandwich. The layers of the sandwich are bonded together by siloxane bonding, which results in the connection electrodes contacting the electrode pattern on the crystal vibrating piece.

Abstract: A quartz crystal vibrator element having the weight section is provided with the intermediate weight section formed to have an arm width W1 larger (thicker) than the arm width W of the vibrating arm section and smaller (thinner) than the arm width W2 of the tip weight section, thereby making the intermediate weight section follow the vibration (the amplitude) of the vibrating arm section. Further, the tip weight section formed to have an arm width W2 larger (thicker) than the arm width W1 of the intermediate weight section is provided, thereby making the tip weight section follow the vibration (the amplitude) of the vibrating arm section and the intermediate weight section. Therefore, the vibration characteristics of the vibrating arm section can be stabilized.

Abstract: A crystal device that has stable vibration characteristics and that offers high reliability and high accuracy. The crystal device includes a first major face, which contains a portion of a base and a portion of a vibrating prong within a single plane, formed on the crystal plate, and a second major face, which contains another portion of the base and another portion of the vibrating prong within a single plane, formed on a crystal plate, wherein the first major face and the second major face have different outer shapes. The shapes of the first and second major faces can be produced by first forming mask layer patterns on a crystal substrate by exposure through different mask patterns and then etching the crystal substrate using the thus formed mask layer patterns.

Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.

Abstract: A photoresist film forming process is performed by the use of a forming apparatus that has a sprayer which generates an air flow toward metal film on a wafer to spray the photoresist material, and a plurality of spacers which is disposed between a work stage and the wafer.

Abstract: In a method of manufacturing a piezoelectric vibrating reed for forming electrodes on a surface of a piezoelectric plate using a photolithography technique, an electrode forming step of forming excitation electrodes includes: an exposure step of exposing a photoresist (mask material); a developing step of immersing the photoresist in a developing solution to selectively remove the photoresist to thereby form a mask pattern; and an etching step of forming the excitation electrodes. An immersing step of immersing a piezoelectric plate on which the photoresist is applied in a first solution that is dissolvable in the developing solution and has lower viscosity than the developing solution is performed between the exposure step and the developing step.

Abstract: A piezoelectric vibrating reed includes: a pair of vibrating arm portions arranged in a line; an outer groove portion and an inner groove portion formed on both principal surfaces of the vibrating arm portions so as to extend along the Y direction (longitudinal direction) of the vibrating arm portions; and a base portion to which the pair of vibrating arm portions are connected, in which a plurality of groove portions is formed so as to be arranged in a line in the X direction (width direction) of the vibrating arm portions.

Abstract: A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.

Abstract: An exemplary piezoelectric vibrating device includes a piezoelectric frame that supports and surrounds a tuning-fork type piezoelectric vibrating piece having a pair of vibrating arms. The device also includes a lid and a package base that are siloxane-bonded to the frame. The lid defines at least one frequency-adjustment hole extending through the thickness dimension of the lid from an inner major surface thereof (facing the frame) to an outer major surface of the lid. The package base defines at least one through-hole electrode passing via a respective electrode through-hole through the thickness of the base from an inner major surface thereof (facing the frame) to the outer major surface thereof. The electrode is connected to the piezoelectric vibrating piece. The lid and base include external electrodes, made of an electrically conductive material, that cover the through-holes and frequency-adjustment hole(s).

Abstract: A quartz crystal unit has a quartz crystal resonator, a case for housing the quartz crystal resonator, and a lid for covering an open end of the case. The quartz crystal resonator comprises a quartz crystal tuning fork resonator capable of vibrating in a flexural mode of an inverse phase and having at least one groove, and an electrode is disposed on at least one of opposite side surfaces of each of the first and second quartz crystal tuning fork tines. The quartz crystal tuning fork resonator has a capacitance ratio r2 of a second overtone mode of vibration greater than 1500. The lid is connected to the case through a connecting member to cover the open end of the case.

Abstract: To carry out frequency adjustment easily, accurately and efficiently without being influenced by a size of a piezoelectric vibrating piece and achieve low cost formation and promotion of maintenance performance, there is provided a method of fabricating a piezoelectric vibrating piece which is a method of fabricating a piezoelectric vibrating piece having a piezoelectric vibrating plate 11, a pair of exciting electrodes 12, 13, and a pair of mount electrodes 15, 16 by utilizing a wafer S, the method including an outer shape forming step of forming a frame portion S1 at a wafer and forming a plurality of piezoelectric plates at the frame portion to be connected thereto by way of a connecting portion 11a, an electrode forming step of forming pairs of exciting electrodes and pairs of mount electrodes respectively at the plurality of piezoelectric plates and forming a common electrode S2 respectively electrically connected to a plurality of the pairs of mount electrodes 15 on one side by way of the connecting por

Abstract: A wiring component for a motor coil includes a wire coil configured by a plurality of wire segments arranged in a circumferential direction so as to form a ring shape, each of the wire segments including an arc-shaped main-body portion made of a conductive wire rod bent in an arc shape, protruding portions formed at both end portions of the main-body portion, and upright portions respectively formed at end portions of the protruding portions in a manner of bending one of end portions of each of the protruding portions so that the upright portions protrude in a direction vertical relative to a planar surface including the main-body portion. The wire coil is arranged to form a plurality of layers, thereby forming a cylindrical shape, and the upright portions, at which the adjacent wire segments contact each other in the circumferential direction thereof, are electrically connected to each other.

Abstract: A flexural vibration element includes: a vibration element body composed of a plurality of vibrating arms provided in parallel, a connecting part connecting the vibrating arms, and one central supporting arm extending between the vibrating arms from the connecting part in parallel with the vibrating arms at equal distance from the arms; and a frame body disposed outside the vibration element body. In the flexural vibration element, the vibration element body is supported by the frame body at an end part, which is opposite to the connecting part, of the central supporting arm.

Abstract: A flexural-mode tuning-fork type quartz crystal resonator includes a proximal portion, a pair of vibrating arm portions, and a plurality of first concave portions. The vibrating arm portions project in a direction from the proximal portion. The first concave portions are formed into groove shapes in the upper and lower principal surfaces of the proximal portion, and extend in the widthwise direction perpendicular to the longitudinal direction of the pair of vibrating arm portions. The first concave portions formed in the upper principal surface of the proximal portion and those formed in the lower principal surface of the proximal portion are arranged at a predetermined interval not to face each other.

Abstract: Providing a piezoelectric vibrator and a manufacturing method thereof which is capable of achieving gettering in a state where the frequency change of the piezoelectric vibrating reed is suppressed. Providing a piezoelectric vibrator 1 including: a package 9 having a base board 2 and a lid board 3 which are bonded in a superimposed state and a cavity C formed between both boards 2, 3; and a piezoelectric vibrating reed 4 and a gettering material 27 which are accommodated in the same cavity C, wherein a shielding wall 21 is provided in the cavity C so as to shield the piezoelectric vibrating reed 4 from the gettering material 27, and the shielding wall 21 is connected to both the base board 2 and the lid board 3.

Abstract: A tuning-fork type crystal vibrating piece (20) is comprised of a base portion (23) comprising a piezoelectric material, a pair of parallel vibrating arms (21) with a designated thickness (D3) and width (W3) extend from the base portion, and a pair of weight portions (28) are formed by enlarging the width (W4) of the distal ends pair of vibrating arms. A cross-section of the pair of weight portions is formed symmetric with a central axis which is center of the pair of vibrating arms, and at least one portion of the pair of weight portions has a thickness which is less than the designated thickness (D3).

Abstract: A piezoelectric substrate includes rod-shaped resonating arms; a base portion that connects one set of end portions of the respective resonating arms; weight portions which are formed on the other end portions of the respective resonating arms and which have a width larger than that of the respective resonating arms; and groove portions which are formed on each of the front and rear surfaces along the center line of vibration of the respective resonating arms. The piezoelectric substrate also includes excitation electrodes which are formed on each of the front and rear surfaces of the respective resonating arms including the inner side of the respective groove portions. A plurality of frequency adjustment slits extending in a straight line form along the longitudinal direction of the respective resonating arms are formed on the respective weight portions so as to penetrate through the front and rear surfaces of the weight portions.

Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.

Abstract: This invention is provided a piezoelectric vibrating reed which is capable of decreasing variation in the amount of etching reside as much as possible and suppressing influence of vibration loss on the vibration characteristics as much as possible. A piezoelectric vibrating reed comprising a vibrating section extensive in parallel in a longitudinal direction and a base to which the vibrating section is connected at this proximal end. The base comprises at least a first section and a second section defined from the side of the proximal end of the base long the longitudinal direction. The first section is wider in a transverse direction than the second section.

Abstract: Provided is a lead-free piezoelectric thin film containing a lead-free ferroelectric material and having low dielectric loss, high electromechanical coupling coefficient and high piezoelectric constant comparable to that of lead zirconate titanate (PZT). The piezoelectric thin film of the present invention has a (Bi, Na, Ba)TiO3 film composed of a perovskite composite oxide (Bi, Na, Ba)TiO3. The (Bi, Na, Ba)TiO3 film has (001) orientation and further contains Ag. The (Bi, Na, Ba)TiO3 film has a mole ratio of Ag to Ti of at least 0.001 but not more than 0.01.

Abstract: A resonator element includes: a resonating body having a first region and a second region, the first region receiving a compression stress or an extension stress by a vibration, the second region receiving an extension stress responding to the compression stress in the first region, or a compression stress responding to the extension stress of the first region; and at least one film layer, on a surface of the resonating body between the first and the second regions, having thermal conductivity higher than thermal conductivity of the resonating body. In the element, the film layer includes a recessed section in which at least one film layer is removed between the first and the second regions.

Abstract: To carry out frequency adjustment easily, accurately and efficiently and achieve low cost formation and promotion of maintenance performance without being influenced by a size of a piezoelectric vibrating piece, there is provided a method of fabricating a piezoelectric vibrating piece which is a method of fabricating a piezoelectric vibrating pieces having a piezoelectric plate 11, a pair of exciting electrodes 12, 13, and a pair of mount electrodes electrodes 15, 16 by utilizing a wafer S, the method including an outer shape forming step of forming a frame portion S1 at the wafer and forming a plurality of piezoelectric plates to be connected to the frame portion by way of a connecting portion 11a, an electrode forming step of respectively forming pairs of exciting electrodes and pairs of mount electrodes to the plurality of piezoelectric plates and forming a plurality of pairs of extended electrodes S2, S3 to be respectively electrically connected to the pairs of mount electrodes by way of the connecting po

Abstract: Provided are: a piezoelectric oscillation piece which has a pair of oscillation arms disposed in parallel with each other with base ends of the oscillation arms fixed to a base of the piezoelectric oscillation piece and with weight metal films formed at the tips of the oscillation arms; a base substrate on the upper surface of which the piezoelectric oscillation piece is mounted; a lid substrate joined with the base substrate such that the mounted piezoelectric oscillation piece can be accommodated in a cavity; and a control film disposed in the vicinity of the pair of the oscillation arms as viewed in the plan view and formed at least on either of the substrates in such a manner as to extend from the base end side to the tip side in the longitudinal direction of the oscillation arms for increasing the degree of vacuum inside the cavity by heating. The control film is locally deposited on the side surfaces of the oscillation arms in the vicinity of the control film by heating.

Abstract: A piezoelectric resonator device comprises a piezoelectric resonator plate, a base for holding the piezoelectric resonator plate, a lid for hermetically enclosing the piezoelectric resonator plate held on the base, and a support member made of a brittle material for reducing external stress to the piezoelectric resonator plate. The piezoelectric resonator plate is held on the base via a support member. In this case, the base, the piezoelectric resonator plate, and the support member are bonded with each other using a base bonding member and a piezoelectric resonator plate bonding member (connection bumps) by FCB using ultrasonic waves. The base is electrically and mechanically bonded with the support member via the base bonding member in a plurality of areas of the support member using ultrasonic waves.

Abstract: An exemplary tuning-fork type piezoelectric vibrating piece has at least a pair of vibrating arms extending from one end of a base portion in a certain longitudinal direction (e.g., Y-direction). Supporting arms extend from respective side edges of the base, outboard of the vibrating arms in the certain direction. The supporting arms have respective mounting regions near their distal tips. Each supporting arm progressively narrows from its proximal end, coupled to the respective side edge of the base, to its respective mounting region. The progressive narrowing can be via one or more constrictions along the length of the supporting arm.

Abstract: A flexural vibration element includes: a plurality of vibrating arms provided in parallel with each other; a connecting part connecting the vibrating arms; and one central supporting arm extending between the vibrating arms from the connecting part in parallel with the vibrating arms at equal distance from the arms. In the flexural vibration element, the connecting part has a groove formed on each of front and rear surfaces thereof, and the groove is provided in an area of the connecting part in which compressive stress and tensile stress due to flexural vibration of the vibrating arms alternately occur at a vibrating arm side and an opposite side of the vibrating arm side, in a width direction of the vibrating arms.

Abstract: A vibrating reed includes: a base; and a vibrating arm which is extended from one end portion of the base, the vibrating arm having an arm portion which is disposed on the base side, a weight portion which is disposed on a tip side of the arm portion and has a larger width than the arm portion, main surfaces which are respectively disposed on front and back sides of the vibrating arm, side surfaces each of which extends in a longitudinal direction of the vibrating arm to connect the main surfaces on the front and back sides and which are formed so as to face each other, a first groove portion which is a bottomed groove formed at least one of the main surfaces along the longitudinal direction of the vibrating arm, a first excitation electrode which is formed on groove side surfaces each connecting a bottom of the first groove portion with the one main surface, a second excitation electrode which is formed on the both side surfaces, and a projection-in-groove which is disposed on the tip side of a bisector bise

Abstract: A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

Abstract: The subject processes are for making piezoelectric vibrators, particularly those having a tuning-fork configuration. An exemplary process includes preparing a flat plate of piezoelectric crystal material exhibiting anisotropic etching properties. A corrosion-resistant film is formed on both major surfaces of the piezoelectric material. A first coating of photoresist is formed on the surfaces of the corrosion-resistant film. A lithographic exposure is performed of the pattern of a piezoelectric vibrating device on only one side of the piezoelectric plate. Then, the corrosion-resistant film, appearing unprotected on the one surface, is removed after developing the photoresist. A first etching is performed of the piezoelectric material appearing unprotected after removal of the corrosion-resistant film.

Abstract: A piezoelectric device according to the present invention includes lead wires (12) each having one end electrically connected to a circuit pattern, and a piezoelectric oscillator (13) having terminals (13a) electrically connected to the other ends of the lead wires (12), wherein the piezoelectric oscillator (13) is retained in suspension by the other ends of the lead wires (12), and a support member (14) is provided on surfaces (12b) opposite to connecting surfaces (12a) of the lead wires (12) connected to the piezoelectric oscillator (13) at the other ends thereof.

Abstract: In the disclosed piezoelectric devices a piezoelectric frame includes a vibrating piece. An excitation electrode is formed on the vibrating piece. An outer frame portion surrounds the vibrating piece and includes an extraction electrode connected to the excitation electrode. A package base is bonded to one surface of the outer frame portion and includes a connection electrode connected to the extraction electrode. The package base includes an external terminal formed on a surface thereof opposite the surface on which the connection electrodes are formed. Through-hole conductors connected the connection electrodes with respective external terminals. A lid is bonded to an opposing surface of the piezoelectric frame. An exhaust channel is in communication with the extraction electrode adjacent the through-hole conductors.

Abstract: A piezoelectric element having a crystal structure that enables a piezoelectric film to be formed in an unstressed state is provided. The piezoelectric film contains an a-axis oriented crystal and a c-axis oriented crystal, where a difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 ?. The present inventors have newly found that a stress accumulated in the piezoelectric film can be reduced while maintaining favorable piezoelectric properties when a condition that the difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 ? is satisfied. When the condition is satisfied, the c-axis oriented crystal and the a-axis oriented crystal are properly balanced and as a result crystal particles of the piezoelectric film are closest-packed on its base in an ideal state, which contributes to a reduced stress.

Abstract: A piezoelectric vibrator which can be manufactured efficiently and a manufacturing method thereof are provided. The piezoelectric vibrator includes: a tuning-fork-type piezoelectric vibrating piece which has a pair of vibration arm portions, excitation electrodes formed on base end portions of the vibration arm portions, and weight metal films formed on distal end portions of the vibration arm portions; and a package which houses the piezoelectric vibrating piece therein. A gettering film on which a laser radiation flaw is formed is formed on intermediate portions between the base end portions and the distal end portions of the vibration arm portions. A first metal film included in the excitation electrode, a second metal film included in the weight metal film and the gettering film are formed using the same material.

Abstract: The present invention provides a piezoelectric vibration piece of tuning fork type which comprises a pair of arms extending in parallel to each other from a base. Each of the arms has a weight added section which has at least two bulges projecting in the opposite directions at different longitudinal locations along the respective arm, and the at least two bulges are shaped and located such that both arms are equal in weight and a gravity center of the respective arms is situated on a center line running longitudinally through the respective arms and at a same longitudinal location along the respective arms.

Abstract: Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degrees out of phase relative to one another. The vibrating beams are attached, at least at one end, to a torsional coupling element that is joined to a mounting pad along a non-translating suspension boundary. Counterbalances are attached to the vibrating beams, and the resonator is configured such that dynamic forces and moments coupled to each torsional coupling element from the vibrating beams are balanced along each nominal non-translating suspension boundary proximate to the symmetry axis and along the symmetry axis proximate to each nominal non-translating suspension boundary. Each non-translating suspension boundary is a torsional axis for a twisting deformation of the first torsional coupling element.

Abstract: A vibrating element includes: a vibrating body having frequency temperature dependency; and a temperature characteristic correcting part provided on a surface of the vibrating body. The temperature characteristic correcting part has a temperature characteristic of at least one of a Young's modulus and a thermal expansion coefficient and is expressed by a temperature characteristic curve which has at least one of an inflection point and an extremal value. In the vibrating element, a temperature of at least one of the inflection point and the extremal value is within an operating temperature range of the vibrating body.

Abstract: Piezoelectric vibrating pieces are disclosed. An exemplary piece includes a base and at least a pair of vibrating arms connected to the base. The vibrating arms extend from one end of the base in a first direction. A vibrating root portion is situated between the vibrating arms. A pair of supporting arms extend, outboard of the vibrating arms, in the first direction from the one end of the base. Respective supporting root portions are situated between each vibrating arm and its outboard supporting arm, at the same position (denoted, e.g., K1, K2) in the first direction of the vibrating root portion.

Abstract: A vibrator element includes: a base portion; a plurality of vibrating arms which extends in the Y-axis direction from the base portion so as to be arranged in a line in the X-axis direction, and piezoelectric elements which are formed on the vibrating arms so as to allow the vibrating arms to perform flexural vibration in the Z-axis direction. The respective vibrating arms include first surfaces which are compressed or expanded in response to flexural vibration and second surfaces which are expanded when the first surfaces are compressed and which are compressed when the first surfaces are expanded. The vibrating arms have the piezoelectric elements which are formed close to the first surfaces, and the other vibrating arm has the piezoelectric element which is formed close to the second surface.

Abstract: A quartz crystal oscillator has an amplifier, a capacitor, a resistor and a quartz crystal unit comprised of a case, a quartz crystal tuning fork resonator vibratable in a flexural mode and a lid connected to the case. At least one groove with a first surface opposite a first side surface and a second surface connected to the first surface through a third surface is formed in each of first and second main surfaces of each of first and second quartz crystal tuning fork tines. The width of each groove is greater than a distance in the width direction of the groove measured from an outer edge of the groove to an outer edge of the corresponding tuning fork tine. A first electrode is disposed on the first surface of the groove and a second electrode is disposed on the first side surface so that the first electrode has an electrical polarity opposite to the electrical polarity of the second electrode.

Abstract: An electronic apparatus has a display portion, and first and second oscillating circuits each having a quartz crystal resonator, the quartz crystal resonator of each of the first and second oscillating circuits vibrating in a different mode from each other. One of the quartz crystal resonators is a quartz crystal tuning fork resonator having first and second tuning fork tines. Electrodes are disposed on side surfaces of each of the first and second tuning fork tines so that the electrodes of the first tuning fork tine have an electrical polarity opposite to an electrical polarity of the electrodes of the second tuning fork tine. The capacitance ratio r1 of a fundamental mode of vibration of the quartz crystal tuning fork resonator is less than a capacitance ratio r2 of a second overtone mode of vibration thereof. An output signal of the oscillating circuit having the quartz crystal tuning fork resonator is a clock signal used to display time information at the display portion of the electronic apparatus.

Abstract: Piezoelectric frames are disclosed that include a tuning-fork type piezoelectric vibrating portion having a pair of vibrating arms extending from a base portion in a first direction (Y-direction). The vibrating arms have a first width W1. A respective excitation electrode is formed on each vibrating arm. Supporting arms extend from the base portion in the first direction, outboard of respective vibrating arms. The supporting arms have a second width W2. A respective connecting arm extends from each supporting arm in a second direction that crosses the first direction. An outer frame connects to the connecting arms, has a side extending in the first direction with a third width W3, and has another side extending in the second direction with a fourth width W4. The second width W2 is 1.4 times smaller than the first width W1.

Abstract: A device has a substrate, a piezo polymer layer arranged adjacent the substrate, a first electrode in contact with a first side of the layer, and a second electrode arranged adjacent the first electrode, such that when the piezo layer flexes, the first and second electrodes are arranged to detect one of a change in voltage or resistance, wherein at least one of the piezo polymer layer or the electrodes are deposited by printing. A method including depositing a spacer layer onto a substrate, depositing a piezo polymer layer onto the substrate, patterning an array of first electrodes in contact with the piezo polymer layer, and patterning an array of second electrodes adjacent the array of first electrodes, wherein depositing includes one of printing and laminating and pattering includes one of printing and etching.

Abstract: Methods are disclosed for manufacturing piezoelectric vibrating pieces and devices including such pieces. According to an embodiment of the method, a piezoelectric vibrating piece is produced from a piezoelectric wafer. To form the piece, a profile of the piezoelectric vibrating piece is formed in a piezoelectric wafer. A first metal film (chromium; Cr) is formed on the surface of the piezoelectric piece. The chromium film is surface-oxidized to form a film having Cr foundation layer and an oxidized surface. A second metal film (gold; Au) is formed on the oxidized surface. Then, in selected regions not destined to become electrodes, the second metal film is removed, leaving electrode patterns at designated regions of the piezoelectric vibrating piece.

Abstract: A flexural vibration element includes: a plurality of vibrating arms provided in parallel with each other; a connecting part connecting the vibrating arms; and one central supporting arm extending between the vibrating arms from the connecting part in parallel with the vibrating arms at equal distance from the arms. In the flexural vibration element, the connecting part has a groove formed on each of front and rear surfaces thereof, and the groove is provided in an area of the connecting part in which compressive stress and tensile stress due to flexural vibration of the vibrating arms alternately occur at a vibrating arm side and an opposite side of the vibrating arm side, in a width direction of the vibrating arms.

Abstract: A piezoelectric vibration piece that can ensure good drive level characteristics and a piezoelectric vibrator, oscillator, electronic device and radio-controlled timepiece in which the piezoelectric vibration piece is used are provided. The width of the base-end side of the grooves 5 is narrower than that of the tip side of the grooves 5. The base 4 includes: a mount section 4a on the outer surface of which mount electrodes 12, 13 are formed to mount the piezoelectric vibration piece 1; and an intermediate section 4b that is connected to the mount section 4a and the pair of vibrating arms 3a, 3b so as to be positioned between the mount section 4a and the pair of vibrating arms 3a, 3b, on the outer surface of which leading electrodes 14a, 14b that connect the pair of excitation electrodes 10, 11 and the mount electrodes 12, 13 are formed. The width of the mount section 4a is wider than that of the intermediate section 4b.

Abstract: Piezoelectric frames are disclosed that include a tuning-fork type piezoelectric vibrating piece. The vibrating piece has at least a pair of vibrating arms that extend in a longitudinal direction (e.g., Y-direction) from a first end edge of a piezoelectric base, and at least one excitation electrode on the pair of vibrating arms. Respective supporting arms extend in the longitudinal direction, outboard of each vibrating arm. The vibrating piece is surrounded by and attached to a frame portion also made of piezoelectric material. A pair of connecting portions connects the supporting arms to the frame portion. The connecting portions extend from respective supporting arms to the frame portion in a direction that intersects the longitudinal direction. The connecting portions are connected to the frame portion at designated locations that are more than 50% of the designated length of the vibrating piece from the second end edge of the base.

Abstract: An exemplary piezoelectric vibrating device has a lid plate, a chip plate including a tuning-fork type vibrating piece surrounded by an outer frame, and a package base arranged where the chip plate is sandwiched between the lid plate and package base, and the three layers are bonded together. The tuning-fork type piezoelectric vibrating piece is connected to the outer frame by supporting arms. A base-movement buffer having a predetermined height in the X-direction extends from the inner edge surface of the outer frame toward a side edge of the base. The base-movement buffer has a height in the X-direction that is proportional to the length from the base-movement buffer to a point at which the tuning-fork type piezoelectric vibrating piece is coupled to the outer frame.

Abstract: A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

Abstract: A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.

Abstract: Providing a piezoelectric vibrating reed which is capable of decreasing variation in the amount of etching residue as much as possible and suppressing influence of vibration loss on the vibration characteristics as much as possible.