Abstract: The invention relates to a silicon resonator (10) of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base (14), a plurality of parallel arms (11, 12, 13) capable of vibrating and actuator (18, 21, 22), wherein the arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift.

Abstract: A method for manufacturing a quartz crystal unit comprises the steps of forming a quartz crystal tuning fork resonator having a quartz crystal tuning fork shape, forming at least one groove in at least one of opposite main surfaces of each of first and second quartz crystal tuning fork tines so that a spaced-apart distance between the first and second quartz crystal tuning fork tines is greater than or equal to a width of the at least one groove, determining the dimension of each of the quartz crystal tuning fork shape and the at least one groove so that a capacitance ratio r1 of a fundamental mode of vibration of the quartz crystal tuning fork resonator is less than a capacitance ratio r2 of a second overtone mode of vibration thereof, mounting the quartz crystal tuning fork resonator on a mounting portion of a case, and connecting a lid to the case to cover an open end of the case.

Abstract: A quartz crystal unit has a quartz crystal tuning fork resonator that is capable of vibrating in a flexural mode and that has a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines. The quartz crystal tuning fork resonator is mounted on a mounting portion of the case after which the oscillation frequency of the quartz crystal tuning fork resonator is adjusted. The quartz crystal unit comprising the quartz crystal tuning fork resonator has a series resistance R1 of a fundamental mode of vibration less than a series resistance R2 of a second overtone mode of vibration. At least one groove is formed in at least one of opposite main surfaces of each of the first and second quartz crystal tuning fork tines so that a width of the at least one groove is greater than a distance in the width direction of the at least one groove measured from an outer edge of the at least one groove to an outer edge of the corresponding one of the first and second quartz crystal tuning fork tines.

Abstract: Tuning-fork-type crystal vibrating pieces are disclosed that have a base and a pair of vibrating arms extending from one side of the base in a designated longitudinal direction. A root portion is situated between the vibrating arms, and includes a first taper surface. Extending outboard of the vibrating arms from respective sides of the base are respective supporting arms that extend in the designated direction. Between each supporting arm and the respective vibrating arm is a respective supporting-arm root portion. Each supporting-arm root portion has a second taper surface in the thickness direction of the base.

Abstract: Piezoelectric nanostructures, including nanofibers, nanotubes, nanojunctions and nanotrees, may be made of piezoelectric materials alone, or as composites of piezoelectric materials and electrically-conductive materials. Homogeneous or composite nanofibers and nanotubes may be fabricated by electrospinning. Homogeneous or composite nanotubes, nanojunctions and nanotrees may be fabricated by template-assisted processes in which colloidal suspensions and/or modified sol-gels of the desired materials are deposited sequentially into the pores of a template. The electrospinning or template-assisted fabrication methods may employ a modified sol-gel process for obtaining a perovskite phase in the piezoelectric material at a low annealing temperature.

Abstract: A piezoelectric vibrator manufacturing method includes a cavity forming step for forming depressions for a cavities on at least one of two wafers; a bonding electrode film forming step for forming bonding electrode films on bonded surfaces of the both wafers; a mount pattern forming step for forming a pair of mount patterns in the cavity; a through hole forming step for forming a pair of through holes in the cavity; a through electrode forming step for forming a pair of through electrodes electrically connected with the pattern in the cavity; a mount step for electrically connecting the pattern and a piezoelectric vibrating strip, a superimposing step for superimposing the both wafers and storing getter materials; a bonding step for anodically bonding the both wafers to fabricating a wafer member; a gettering step for adjusting the degree of vacuum in the interior of the cavity while measuring a series resonance resistance value; and a cutting step for cutting the wafer member into individual pieces.

Abstract: Providing a piezoelectric vibrating reed which has low disconnection possibility and ensures reliability for stable operation without requiring strict exposure position accuracy.

Abstract: A tuning-fork-type piezoelectric vibrating plate with a suppressed CI value and a piezoelectric device using thereof are provided. The tuning-fork-type piezoelectric vibrating plate includes: a base section formed by a piezoelectric material; and a pair of vibrating arms extended from the base section along a predetermined direction. On a front surface and a back surface of the vibrating arms, a first excitation groove is formed at the base section side, a second excitation groove is formed at a tip side of the vibrating arms, and a partition section is formed to separate the first excitation groove from the second excitation groove. A length from the base section side of the first excitation groove to the tip side of the second excitation groove in the predetermined direction is L1; a length of the first excitation groove in the predetermined direction is L2, and the ratio L2/L1 ranges from 0.51 to 0.65.

Abstract: Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.

Abstract: Piezoelectric vibrating pieces are disclosed that include a base portion and first and second vibrating arms extending in a longitudinal direction from the base portion. Each vibrating arm has first and second main surfaces, a first groove on the first main surface, and a second groove on the second main surface. The grooves extend in the longitudinal. By adjusting the length and shapes of at least the first grooves relative to each other, the rigidity of the vibrating arms can be balanced and adverse effects of deformed regions between the vibrating arms caused by anomalous etching can be reduced.

Abstract: A quartz crystal device includes a crystal resonator element and a package including a plurality of components. The plurality of components are bonded using a metal paste sealing material containing a metallic particle having an average particle size from 0.1 to 1.0 ?m, an organic solvent, and a resin material in proportions of from 88 to 93 percent by weight from 5 to 15 percent by weight, and from 0.01 to 4.0 percent by weight, respectively, to hermetically seal the crystal resonator element in the package.

Abstract: A flexural vibration element includes: a plurality of vibrating arms provided in parallel with each other; a connecting part connecting the vibrating arms; and one central supporting arm extending between the vibrating arms from the connecting part in parallel with the vibrating arms at equal distance from the arms. In the flexural vibration element, the connecting part has a groove formed on each of front and rear surfaces thereof, and the groove is provided in an area of the connecting part in which compressive stress and tensile stress due to flexural vibration of the vibrating arms alternately occur at a vibrating arm side and an opposite side of the vibrating arm side, in a width direction of the vibrating arms.

Abstract: To provide a wafer preventing a breakage of a crack or a chip off from being brought about in a polishing step and a polishing apparatus and a polishing method of polishing the wafer, there is provided a wafer in a shape of a plate substantially in an angular rectangular shape used as a raw material of a piezoelectric vibrator. All of corner portions D1, D2, D3, D4 substantially in the angular shape are formed in shapes of curved faces by chamfering providing curvatures. The corner portions D1, D2, D3, D4 in the shapes of the curved faces at least include a first curved face portion and a second curved face portion chamfered by curvatures different from each other or the same curvature. A reference face of a crystal orientation of the raw material is specified by the first curved face portion or the second curved face portion.

Abstract: A vibratory structure includes: a first X-cut crystal substrate; a second X-cut crystal substrate stacked on the first X-cut crystal substrate so that the x-axis of the second X-cut crystal substrate is parallel to the x-axis of the first X-cut crystal substrate; a base formed by the first X-cut crystal substrate and the second X-cut crystal substrate; and vibratory arm sections formed so as to be integrated together with the base in one body, and protruding from the base.

Abstract: A flexural resonator element includes a base body and a beam with a groove and a through-hole, the beam being extended in a Y direction from the base body and flexurally vibrating in an X direction orthogonal to the Y direction, the groove being formed on a surfaces of the beam perpendicular to a Z direction orthogonal to the X direction and the Y direction, and the through-hole having a smaller width in the X direction than a width of an opening of the groove in the X direction and penetrating from an inner surface of the groove formed on the surface of the beam to a surface of the beam opposite to the surface of the beam having the groove.

Abstract: An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof is easily fixed, is provided. It includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm portion and a lower detection arm portion respectively connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion with the upper detection arm portion in between. The fixed portion includes one or more slits extending at least in a direction intersecting with the extending direction of the upper detection arm portion.

Abstract: A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.

Abstract: To achieve small-sized formation by shortening a total length after ensuring a length of a base portion capable of sufficiently reducing vibration leakage, there is provided a piezoelectric vibrating piece 2 including a piezoelectric plate 10 including a pair of vibrating arm portions 11, 12 arranged in parallel with each other in a state of being extended in one direction from base ends to front ends, and a base portion 13 having connecting portions 13a respectively connected to the pair of vibrating arm portions at middle positions from the base ends to the front ends for integrally supporting the pair of vibrating arm portions by way of the connecting portions, exciting electrodes 20, 21 respectively formed on outer surfaces of the pair of vibrating arm portions for vibrating the pair of vibrating arm portions when a drive voltage is applied thereto, a pair of mount electrodes 22, 23 formed on an outer surface of the base portion and electrically connected respectively to the pair of exciting electrodes, i

Abstract: To provide a piezoelectric resonator in which a casing houses a tuning-fork piezoelectric resonator element and whose failure occurrence caused when shavings of adjustment films scatter and adhere to excitation electrodes is prevented.

Abstract: An upper adhesion layer 35 formed between a piezoelectricity layer 32 and an upper electrode layer 34 so as to abut on the piezoelectricity layer 32 and the upper electrode layer 34 is included. The upper adhesion layer 35 includes a first tungsten layer 47 made of tungsten in which an ? phase and a ? phase coexist and a second tungsten layer 48 made of ?-phase tungsten. The first tungsten layer 47 is configured so as to abut on the piezoelectricity layer 32. It is possible to obtain a piezoelectric device which is capable of improving the adhesion property of both the piezoelectricity layer and the electrode layer and reducing a basic point voltage fluctuation at the time of high-temperature operation so as to improve reliability.

Abstract: In an exemplary method for making crystal vibrating devices, four wafers are provided: a crystal wafer, a base wafer, a first-lid wafer, and a second-lid wafer. The crystal wafer defines multiple crystal vibrating pieces including respective frames and respective electrodes formed on both main surfaces thereof. The base wafer defines multiple base plates bondable to one main surface of respective frames. The first-lid wafer defines multiple first lids bondable to the other main surface of the respective frames. Each first lid defines a void registrable with respective electrodes. The second-lid wafer is sized similarly to and bondable to the first-lid wafer so as to sealably close the voids. In a first bonding step the crystal wafer is bonded to the base wafer and first-lid wafer. In a subsequent adjustment step the thickness of at least one electrode per each crystal vibrating piece is adjusted to adjust the vibrational frequency of the respective vibrating portion.

Abstract: Piezoelectric vibrating pieces are disclosed that include a base, a pair of vibrating arms, and a pair of supporting arms. The base is fabricated of piezoelectric material. The vibrating arms extend straight from the base in a designated longitudinal direction and having a first thickness. A respective supporting arm extends straight from the base and outboard of each vibrating arm in the designated longitudinal direction. Each supporting arm includes at least a respective second region that has second thickness different from the first thickness.

Abstract: A piezoelectric resonator element and a piezoelectric device, which prevent the vibration of the resonating arm section from leaking to the side of the base portion and stabilize the vibration of the resonating arm section, and an electronic apparatus using these devices are obtained. The quartz crystal resonator element as the piezoelectric resonator element is provided with a base portion formed of a piezoelectric material, a plurality of resonating arm sections each extending from the base portion via an arm base section, and an elongated groove section formed along a longitudinal direction of the resonating arm section, and the arm base section has an arm width, which is larger than an arm width of the resonating arm section and smaller than a distance between imaginary centerlines of the respective resonating arm sections in a width direction of the resonating arm section.

Abstract: A resonator element includes a base portion in which a pair of notches is formed, a pair of resonating arms which is extended in parallel from one end side of a first portion of the base portion. The resonating arm is provided with a bottomed elongated groove which has an opening along at least one principal surface of both principal surfaces and a weight portion which is formed at the tip end side of the resonating arm on the opposite side of a root of the resonating arm attached to the base portion and which has a larger width than on the root side. The weight portion is formed so that the proportion of the length of the weight portion to the length from the root to the tip end side in a longitudinal direction of the resonating arm is within a range of 35% to 41%.

Abstract: A resonator element includes at least one resonating arm that vibrates in a torsional mode, wherein the resonating arm includes a structural portion having a first portion disposed in a first direction in a sectional view in the width direction and a second portion connected to the first portion so that the center of gravity departs from the center of gravity of the first portion in the first direction and a second direction perpendicular to the first direction, wherein the first portion vibrates in a stretch mode in the length direction of the resonating arm with an application of a voltage, and wherein the second portion does not substantially vibrate in the stretch mode in the length direction of the resonating arm with the application of the voltage or vibrates in a stretch mode with a phase different from that of the first portion.

Abstract: There is provided a method of manufacturing piezoelectric vibrators 1. The method includes a process for through holes 35 and 36, which pass through a base substrate wafer, so that openings of the through holes are opened to the outside of the recesses for cavities C; a process for patterning a bonding layer 30, pairs of mounting layers, and pairs of extraction electrode layers 33 and 34 on the upper surface of the base substrate wafer with the same conductive material; and a process for electrically isolating the extraction electrode layers 34 in the middle by irradiating a part (area S2) of the extraction electrode layers 34, which are formed between the bonding layer and openings of through holes 36, with laser light after both the wafers are anodically bonded to each other. The bonding layer 30 surrounds the recesses, the pairs of mounting layers are in the recesses, and the pairs of extraction electrode layers 33 and 34 electrically connect the pairs of mounting layers to the bonding layer.

Abstract: An exemplary tuning-fork type piezoelectric vibrating piece has a rectangular base having upper and lower main surfaces and a pair of vibrating arms extending longitudinally from the base. The vibrating arms also have the upper and lower main surfaces. Each main surface of each vibrating arm defines a respective vibrating-arm groove extending longitudinally into the base. Each main surface of the base has at least one respective step-side surface situated outboard, in an X-axis direction, of each vibrating-arm groove. Each step-side surface is parallel with the respective vibrating-arm groove. A first electrode is situated on the vibrating-arm grooves of the first vibrating arm and on the at least one respective step-side surface on each main surface. A second electrode is situated on the vibrating-arm grooves of the second vibrating arm and on the at least one respective step-side surface on each main surface. The first and second electrodes are energized with different electrical polarities.

Abstract: A vibrator element includes: a base portion; a vibrating arm that extends in a first direction from the base portion, has a width in a second direction perpendicular to the first direction in the plan view, and has a thickness in a third direction perpendicular to the first direction and the second direction; and an inter digital transducer, in which electrode fingers are arranged in the first direction, disposed at least one of a first surface, which is perpendicular to the third direction, and a second surface, which faces the first surface, of the vibrating arm, wherein the vibrating arm is vibrated in the third direction by stretching or contacting the vibrating arm in the first direction by using an electric field in the first direction that is generated by the inter digital transducer.

Abstract: Surface-mounted piezoelectric devices are disclosed that include a package having a base and a lid made of a piezoelectric material or of glass. The package defines an internal cavity containing a tuning-fork type crystal vibrating piece having a pair of vibrating arms. The volume of the cavity is at least twelve times the volume of the pair of vibrating arms. Piezoelectric devices having these characteristics exhibit reduced CI degradation.

Abstract: A flexural resonator element includes a base body and a beam with a groove and a through-hole, the beam being extended in a Y direction from the base body and flexurally vibrating in an X direction orthogonal to the Y direction, the groove being formed on a surfaces of the beam perpendicular to a Z direction orthogonal to the X direction and the Y direction, and the through-hole having a smaller width in the X direction than a width of an opening of the groove in the X direction and penetrating from an inner surface of the groove formed on the surface of the beam to a surface of the beam opposite to the surface of the beam having the groove.

Abstract: A resonator element includes: a base section; and at least one resonating arm formed so as to extend from the base section, and having a flexural vibrating section, wherein the flexural vibrating section includes a pair of principal surfaces formed along a direction in which the resonating arm performs a flexural vibration, and outer side surfaces intersecting with the principal surfaces of the resonating arm, the flexural vibrating section is provided with at least three groove sections, the groove sections are formed on both or either one of the principal surfaces in a direction intersecting with the principal surfaces, and at least a part or the whole of an outer wall formed of the outer side surface and the groove section and at least a part or the whole of an inner wall formed of the groove sections adjacent to each other are electrically vibrated in a flexural manner.

Abstract: There is provided a method of manufacturing a package 1 having a base substrate 10 and a lid substrate 20 bonded to each other and both formed of a glass base material; and a cavity C formed between the both substrates for storing an encapsulated object 2 in a state of being hermetically encapsulated, including: a depression forming step for forming a depression C1 for a cavity which defines the cavity when the both substrates are superimposed to each other on at least one of the both substrates; and a bonding step for superimposing the both substrates so as to store the encapsulated object in the depression and then bonding the both substrates to encapsulate the encapsulated object in the cavity, characterized in that in the depression forming step, printed layers 12 are laminated on an upper surface of a flat plate-shaped glass base material 11 in a frame shape in plan view by screen printing, and then the printed layers and the glass base material are baked at the same time to form the depression.

Abstract: A piezoelectric vibrating reed includes a piezoelectric plate having a pair of vibrating arms provided parallel to each other, a base portion to integrally fix the pair of vibrating arms at a base end side thereof, and groove portions formed on both principal surfaces of the pair of vibrating arms in a constant length from base end portions toward tip end portions of the vibrating arms, and an electrode film formed of a base metal layer and a finishing metal layer laminated on outer surfaces of the piezoelectric plate and configured to vibrate the pair of vibrating arms when a predetermined voltage is applied thereon. The finishing metal layer of the electrode film is removed either partially or entirely at least in regions from the base end portions to the tip end portions of the vibrating arms.

Abstract: A tuning fork oscillating piece includes: a base; a pair of oscillating arms extending from the base in directions substantially parallel with each other; a drive piezoelectric element provided at least on one main surface or side surface of each of the oscillating arms to allow bending oscillation of the oscillating arms by piezoelectric distortion caused by applied charge; a detection piezoelectric element provided on the surface opposed to the surface of each of the oscillating arms on which the drive piezoelectric element is provided to convert the piezoelectric distortion caused by the bending oscillation of the oscillating arms into charge and output the charge. The drive piezoelectric element has a drive piezoelectric section. The detection piezoelectric element has a detection piezoelectric section. The absolute value of the piezoelectric d constant of the drive piezoelectric section is larger than the absolute value of the piezoelectric d constant of the detection piezoelectric section.

Abstract: An electrode forming region for providing lead electrodes (65a, 65b) is provided on a crystal resonator plate (2). Opposed side surfaces (67a, 67b) of a substrate (6) are formed and inclined in the same direction with respect to a front major surface (63). Also, an adhesion reinforcing portion (7) for reinforcing adhesion to a conductive adhesive (5) is provided in the electrode forming region for the lead electrodes (65a, 65b). For example, the adhesion reinforcing portion (7) is a notch portion which is cut and formed in the opposed side surfaces (67a, 67b). Thereby, an adhesion strength of the crystal resonator plate (2) and the conductive adhesive (5) is increased.

Abstract: A piezoelectric vibration piece includes a base made of a piezoelectric material; a plurality of vibration arms which is integrally formed with the base and extends in parallel; elongate grooves which are formed along longitudinal directions of the vibration arms; and excitation electrodes which include inner electrodes disposed in the elongate grooves and side electrodes disposed in side surfaces facing the inner electrodes, wherein widening portions in which the widths of the vibration arms are widened toward the base at a joint between the vibration arms of the base are formed, and the side electrodes are led to principal surfaces and side surfaces of the widening portions.

Abstract: A method of manufacturing a piezoelectric vibrating reed from a wafer, the piezoelectric vibrating reed including a pair of vibration arm portions that is arranged in parallel, a base portion that integrally fixes proximal end sides of the pair of vibration arm portions, and groove portions which are formed on both surfaces of the pair of vibration arm portions along the longitudinal direction of the vibration arm portions, respectively, the method including a protective film forming process of forming a protective film in an area other than a position corresponding to the groove portions in the wafer; and a groove portion forming process of forming the groove portions by using the protective film as a mask to perform dry etching with respect to the wafer, wherein, in the protective film forming process, a first protective film forming process of forming the protective film of a predetermined thickness with respect to a first surface of the wafer and a second protective film forming process of forming the pro

Abstract: A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

Abstract: To provide a piezoelectric resonator in which a casing houses a tuning-fork piezoelectric resonator element and whose failure occurrence caused when shavings of adjustment films scatter and adhere to excitation electrodes is prevented.

Abstract: Grooves (2a, 3a) are formed in the tines (2, 3) of an oscillator, side surface electrodes (2e, 3e) are formed on the side surfaces of the tines, and groove electrodes (2d, 3d) are formed in the grooves, respectively. The width of the tines (2, 3) is fixed through the whole length of the tines, while, in a part close to the lower end of the tine, the width of the grooves (2a, 3a) is gradually reduced toward the lower end, whereby a trapezoid region (D) is formed between the side surface of the tine and the groove in this part, and a part of the region (D) is used as an arrangement region of an electrode (5c) which connects the groove electrode and the side surface electrode.

Abstract: Piezoelectric vibrating pieces are disclosed made of a piezoelectric material to be mounted in a package. A representative piece includes a base formed of a piezoelectric material, having first and second ends, extending between the ends in a length direction, and having a designated width. The piece includes at least a pair of vibrating arms extending in the length direction from one end of the base, and a pair of supporting arms extending partially in a width direction from between the first and second ends of the base. The supporting arms further extend in the length direction outboard of the base and vibrating arms, and include an adhesive region at the tips of the supporting arms. The adhesive regions are used for mounting the piece to a package. Whereas the tips of the supporting arms do not extend beyond the tips of the vibrating arms, the axial length of supporting arms is greater than the length of the vibrating arms.

Abstract: A method for producing a tuning-fork type crystal vibrating piece relates to a crystal tuning fork comprising a basal portion, a first vibrating arm, and a second vibrating arm, wherein both arms extend from the basal portion. The method for producing a crystal tuning fork comprises a step of forming a first metallic film into a shape including the contours of the basal portion, the first vibrating arm and second vibrating arm on a first surface of a quartz wafer; a step of forming a second metallic film on the second surface opposite to the first surface of the quartz wafer into a shape covering at least a root area near the basal portion between the first vibrating arm and the second vibrating arm, and a step of wet-etching the quartz substrate in etching solution after forming the first and second metallic films.

Abstract: An exemplary piezoelectric vibrating piece comprises a base formed of a piezoelectric material; and a pair of vibrating arms extending from one end of the base in a designated direction; wherein the vibrating arm comprises an arm portion in which only the inner side slopes as it becomes narrower to the distal end and a hammer-head portion that is formed wider than the arm portion at the distal end of the vibrating arms.

Abstract: A flexural mode resonator element includes: a vibration arm extending from a base end toward a tip; a base joined to the vibration arm at the base end; and supporting arms arranged on both sides of the base in a width direction perpendicular to an extending direction of the vibration arm and joined to the base, wherein the base has a reduced cross-section portion disposed along the extending direction of the vibration arm between a joint portion with the vibration arm and a joint portion with the supporting arms, and the reduced cross-section portion is disposed so as to satisfy a relationship 2×W1?L?6×W1 where L is the length of the reduced cross-section portion in the extending direction of the vibration arm, and W1 is the arm width of the vibration arm.

Abstract: A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.

Abstract: Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention includes: a LaNiO3 film having a (001) orientation; an interface layer having a (001) orientation and composed of a compound represented by a chemical formula ABO3 (where A is represented by (Bi,Na)1-xCx (0?x?1), B is Ti or TiZr, and C is an alkali metal other than Na); and a (Bi,Na,Ba)TiO3 film having a (001) orientation. The LaNiO3 film, the interface layer, and the (Bi,Na,Ba)TiO3 film are laminated in this order.

Abstract: A resonator element includes: a base part; plural vibrating arms extended from the base part, each having a first principal surface and a second principal surface opposed to each other and a first side surface and a second side surface connecting the first principal surface and the second principal surface and opposed to each other, the first side surface of at least one vibrating arm of the plural vibrating arms having a first step part provided from the first principal surface side and a second step part provided from the second principal surface side; a first electrode provided on the second side surface of the vibrating arm; a second electrode provided in a position opposed to the first electrode of the first step part; and a third electrode provided in a position opposed to the first electrode of the second step part.

Abstract: To provide a method for manufacturing a piezoelectric resonator which can conduct frequency matching with high reliability when performing rough adjustment of the frequency by adjusting the shape of a piezoelectric oscillating piece before forming an electrode film, and thereby it becomes possible to avoid reduction of the yield. Etching for forming the shape of a piezoelectric oscillating piece, and etching for forming grooves are conducted simultaneously, and after forming the grooves, the shape formation of the piezoelectric oscillating piece is started again from the same depth as the groove in a state of covering the groove with a metal film, and after the shape formation, matching of frequency is conducted by etching the side surface of the piezoelectric oscillating piece in succession. By composing such a structure, it is possible to conduct rough adjustment of frequency at a low etching rate so that the frequency matching can be performed with no due difficulty and with high accuracy.

Abstract: A piezoelectric oscillator which can conduct fine trimming adjustment and adjust frequencies highly precisely, particularly with no use of an expensive laser trimming apparatus with a small spot diameter, and a method of the same are provided. The method includes: a first step wherein a first spot train is formed on a mass adjustment film at a pitch smaller than the diameter of a film removal spot matched with the spot diameter of laser, and a second step wherein a train space to the first spot train is adjusted in accordance with the target frequency of a tuning fork crystal vibrating piece to form a second train and after, and these steps are in turn conducted, whereby fine trimming adjustment is performed.

Abstract: A tuning fork quartz crystal resonator has a base and two resonating arms extended in parallel from the same side of the base. Each resonating arm has asymmetric grooves on its upper and bottom surface, and the via-hole to reliably connect the top and bottom electrode. The asymmetric groove design can simplify the manufacturing process and lower the manufacturing cost. The base has continuous concave on both side surfaces and a recess on the main surface. The energy of ultrasonic wave propagating via the base mounting pads into the ceramic package can be reduced. This unique tuning fork quartz crystal resonator can prevent dramatic reduction of the Q value, and retain the outstanding quality of the resonator.