Abstract: Embodiments of an oscillator circuit are described. Embodiments described herein include an oscillator circuit suitable for a resonator with relatively high motional impedance, thus requiring relatively high amplification and having relatively high sensitivity to noise. However, the embodiments described are not intended to be limited to use with any particular type of resonator. In one embodiment, alternating current (AC) coupling, or capacitive coupling, is used in part to decouple the bias voltage placed on the resonator from the operating point of the amplified, allowing one voltage to be high relative to the other. In an embodiment, some legs, or all legs of the circuit that included drive circuitry and a resonator include differential signaling.

Abstract: An improved clocked data converter with a vibrating microelectromechanical systems (MEMS) resonator. The MEMS resonator is used as part of the clock circuitry of an analog to digital converter or a digital to analog converter. The MEMS resonator may be used as the frequency determining element of an on-chip oscillator, or as a bandpass filter used to clean up an external clock signal.

Abstract: Method for stabilizing the frequency of a MEMS (Micro Electro Mechanical Systems) reference oscillator, and a MEMS reference oscillator, wherein the method comprises following steps: using two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and selectively combining the desired properties from the MEMS components.

Abstract: An oscillation circuit comprises a SAW resonator having a pair of reflectors disposed on a piezoelectric substrate and a pair of IDTs which are set up in parallel between the pair of reflectors and which are constituted by teeth-of-a-comb electrodes; an inverter to which the pair of IDTs are connected in parallel; and a change-over unit which is provided between each of a pair of the teeth-of-a-comb electrodes constituting either of the IDTs of the pair of IDTs and the inverter and which changes over and connects an input side and an output side of the inverter connected to each of the pair of the teeth-of-a-comb electrodes.

Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a compensated microelectromechanical oscillator, having a microelectromechanical resonator that generates an output signal and frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the microelectromechanical resonator and, in response to a set of values, to generate an output signal having second frequency. In one embodiment, the values may be determined using the frequency of the output signal of the microelectromechanical resonator, which depends on the operating temperature of the microelectromechanical resonator and/or manufacturing variations of the microelectromechanical resonator. In one embodiment, the frequency adjustment circuitry may include frequency multiplier circuitry, for example, PLLs, DLLs, digital/frequency synthesizers and/or FLLs, as well as any combinations and permutations thereof.

Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a compensated microelectromechanical oscillator, having a microelectromechanical resonator that generates an output signal and frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the microelectromechanical resonator and, in response to a set of values, to generate an output signal having second frequency. In one embodiment, the values may be determined using the frequency of the output signal of the microelectromechanical resonator, which depends on the operating temperature of the microelectromechanical resonator and/or manufacturing variations of the microelectromechanical resonator. In one embodiment, the frequency adjustment circuitry may include frequency multiplier circuitry, for example, PLLs, DLLs, digital/frequency synthesizers and/or FLLs, as well as any combinations and permutations thereof.

Abstract: A system employing a resonating device and a controller implements a method involving an establishment by the controller of open-loop oscillations of the resonating device at a resonating frequency of the resonating device, and an establishment by the controller of closed-loop oscillations of the resonating device based on the open-loop oscillations of the resonating device at the resonating frequency. To this end, the controller controls an application and a tuning of a first open-loop drive signal to the resonating device based on a design-drive standard resonating frequency range whereby the controller can measure and designate a frequency of a resonating output signal from the resonating device as a calibration resonant frequency, and controls an application and a tuning of a second open-loop drive signal to the resonating device based on the calibration resonant frequency whereby the controller can subsequently apply a closed-loop drive signal to the resonating device.

Abstract: A micro-electromechanical system (MEMS) comprises a substrate incorporating an oscillatory ring, forcing electrodes for driving the ring into resonance, and sensing electrodes providing an electrical output signal dependent on oscillation of the ring as a result of such forcing and any externally applied force. A positive feedback circuit is provided for feeding back a signal dependent on the output signal of the sensing electrodes to the forcing electrodes in order to sustain oscillation of the ring. The use of positive feedback to drive the forcing electrodes in order to sustain oscillation of the ring is highly advantageous in such an application since it produces a system which exhibits very low phase noise of a magnitude considerably less than the phase noise experienced in use of a phase-lock loop circuit to sustain oscillation.

Abstract: A cancellation circuit to remove the anti-resonance signal from a resonator. Micro-mechanical and surface and bulk acoustic wave resonators include an anti-resonance in an output signal. This has an undesirable effect on certain types of systems in their function and performance. An anti-resonance cancellation circuit removes the anti-resonance from the output of the resonators by providing a signal which is subtracted from the output of the resonator. The cancellation circuit includes a capacitor which is matched to the static capacitance of the resonator. The loads of the resonator and cancellation network are also matched.

Abstract: A vibrator has a frame portion having a planar frame shape, an in-frame fixed portion which is fixed to a base portion and located in the inner space surrounded by the inner periphery of the frame portion, and a driving electrode comprising a first driving electrode disposed so as to confront the outer peripheral portion of the vibrator, and a second driving electrode which is equipped to the in-frame fixed portion so as to confront the inner peripheral portion of the frame portion, and the back-side portion of the in-frame fixed portion and the inner peripheral portion of the frame portion confronting the back-side portion are designed in an unevenly-shaped portion.

Abstract: Provided herein is a xylophone bar magnetometer (XBM) with automatic resonance control, the XBM having a voltage input, a current drive input and a sensor output, having a voltage input switch for switching between a positive drive voltage and a negative drive voltage; a voltage controlled oscillator (VCO) for controlling the voltage input switch; and a feedback loop, connected between the sensor output and a input of the VCO.

Abstract: Circuits and methods are given, to realize and implement an oscillator circuit with an Average Controlled (AC) Resonator Driver. A newly introduced additional Field Effect Transistor within a voltage average stabilizing regulation loop controlling the crystal oscillator's amplifier element produces an average voltage value stabilized sinusoidal oscillation signal which is then transformed into a square wave with a precise duty-cycle of exactly 50%. Said circuits and methods are designed in order to be implemented with a very economic number of components, capable to be realized with modern integrated circuit technologies.

Abstract: A circuit and a method are given, to realize and implement an oscillator circuit with a Smart Current Controlled (SCC) Resonator Driver. A newly introduced controlled current source for a crystal oscillator's amplifier element produces a controlled driving current for the resonator element during operation in both phases of the oscillation cycle to reach for low phase noise and reduced power consumption of the circuit. Said circuit and method are designed in order to be implemented with a very economic number of components, capable to be realized with modern integrated circuit technologies.

Abstract: A torsion oscillator (FIG. 1) is stabilized in operation by determining the current resonant frequency (62); in a first procedure, observing the oscillator for change in resonant frequency (64), and then restoring the amplitude and median offset (66) without changing the drive frequency. In an alternative procedure, after determining the resonant frequency (62); setting the drive frequency close to but offset from the current resonant frequency (74), observing the oscillator for change in resonant frequency (76), and the restoring the close offset to the changed resonant frequency (78). By operating slightly off peak, the direction of resonant change is immediately known. The first procedure has less difficulties in implementation, but requires more power.

Abstract: A voltage-controlled oscillator includes a voltage-controlled phase-shift circuit, outputting a signal with the shift deviated from an input signal by a specified amount with an external control voltage Vt, a SAW resonator, a buffer, inputting a resonance signal having a specified resonance frequency from the SAW resonator, outputting a clock signal with a desired frequency, and outputting a positive-feedback-oscillation-loop output signal, wherein the voltage-controlled phase-shift circuit, the SAW resonator, and the buffer construct a positive-feedback oscillation loop, in which the frequency temperature characteristic of the SAW resonator is rotated by a specified amount using the temperature characteristic of the propagation delay time of the buffer to correct the frequency temperature characteristic of the SAW resonator.

Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a compensated microelectromechanical oscillator, having a microelectromechanical resonator that generates an output signal and frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the microelectromechanical resonator and, in response to a set of values, to generate an output signal having second frequency. In one embodiment, the values may be determined using the frequency of the output signal of the microelectromechanical resonator, which depends on the operating temperature of the microelectromechanical resonator and/or manufacturing variations of the microelectromechanical resonator. In one embodiment, the frequency adjustment circuitry may include frequency multiplier circuitry, for example, PLLs, DLLs, digital/frequency synthesizers and/or FLLs, as well as any combinations and permutations thereof.

Abstract: A stable high-frequency clock pulse apparatus and method including frequency source, overtone crystal unit coupled with a negative resistance oscillator, a bandpass overtone filter and a drive level control is provided. The apparatus can include a frequency multiplier. The frequency source can be a micromechanical resonator.

Abstract: A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator includes a free-standing oscillating structure having a plurality of thermally compensating members (65) which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring resonator.

Abstract: A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate in a first oscillation mode. The ring resonator includes a free-standing oscillating structure (6). Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.

Abstract: In order to quickly stop vibration of a vibrator of a vibrator controlling circuit, according to the present invention, an intermittent signal is generated by a spring vibration control integrated circuit, a switching element is turned on/off based on the intermittent signal from the spring vibration control integrated circuit, an intermittent electric current is supplied to a spring vibrator by switching of the switching circuit and the spring vibrator is vibrated. When vibration of the spring vibrator is stopped, a signal opposite to that when the spring vibrator is vibrated is applied from the spring vibration control integrated circuit to the switching element so as to cause the spring vibrator to generate a force to attenuate vibration and to stop the vibrator from vibrating.

Abstract: An oscillation circuit is provided with a positive feedback oscillation loop constructed by an amplifier, a SAW resonator with a prescribed resonance frequency, a phase-shifting circuit which outputs the phase of an input signal as an output signal with a prescribed shift and a tank circuit composed of an inductance element and a capacitive element, and an NTC thermistor with negative temperature characteristics is connected in parallel to the tank circuit. Moreover, a capacitive element with a capacity-temperature characteristic for correcting the quadratic frequency-temperature characteristic of the SAW resonator is used in the oscillation circuit as the oscillation element of the tank circuit.

Abstract: To provide a small-size oscillating device, a coil is disposed on a substrate.

Abstract: A differential oscillator circuit including first (10) and second (20) branches each including the series arrangement, between high (VDD) and low (VSS) supply potentials, of a transistor (4, 5) and bias means (2, 3, 8, 9) for imposing a determined current through the current terminals of the transistor. The transistors are interconnected so as to form a crossed pair of transistors, the most positive current terminal of each transistor (on the “drain” side) being connected to the control terminal of the other transistor of the crossed pair. This differential oscillator circuit further includes an electro-mechanical resonator (6) connected to the crossed transistor pair on the “drain” side, as well as a capacitive element (7) connected to the crossed transistor pair on the “source” side.

Abstract: The invention concerns a mechanical resonator with a planar monolithic vibrating structure extending along a closed contour whereof the axis of sensitivity is substantially perpendicular to the plane of said structure. The invention is characterised in that the planar structure (1) is a regular convex polygon with 4 k vertices (3) (k being the order of the vibrational mode implemented when the resonator is vibrated) and is suspended to a fixed base (4, 5) via n suspension arms (2) with substantially radial extension arranged substantially symmetrically.

Abstract: A quartz oscillator includes a base, a quartz thin-film formed on the base by epitaxial growth, a vibrating reed portion formed by processing the quartz thin-film, and excitation electrodes for vibrating the vibrating reed portion. At least one of the excitation electrodes may be formed by depositing a metal. The material for the base may include a single-element semiconductor, a compound semiconductor, and an oxide. When a semiconductor is used for the base, a semiconductor circuit may be provided to the base to form a module including a quartz oscillator.

Abstract: A neutralization of an equivalent parallel capacitor of a piezoelectric resonator is realized to obtain a stable activation of oscillation and secure a large frequency variation. A crystal resonator is connected between an input and output terminals of an inverting amplifier to form a Colpitts-type oscillator circuit, an input terminal of another inverting amplifier is connected to the output terminal through a capacitor and the output terminal is connected to the input terminal through another capacitor to form a Miller capacitor circuit for electrically neutralizing a parallel capacitor existing equivalently between both sides of the crystal resonator.

Abstract: Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. Apparatus is provided for filtering signals utilizing vibrating micromechanical resonators. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.

Abstract: A clock signal generator in an integrated circuit semiconductor device and a method of generating a clock signal, the clock signal generator comprising: a semiconductor substrate (2); an oscillator unit (4) which comprises at least one support member (10, 12) which is fixed relative to the substrate (2), an oscillator arm (6) which is oscillatably disposed to the at least one support member (10, 12) with regard a reference position, which oscillator arm (6) includes first and second conductive sections (6a, 6b) at positions extended from the at least one support member (10, 12), and at least one biasing element (14, 16) for biasing the oscillator arm (6) towards the reference position; a driver (18) which is disposed at the substrate (2) in spaced relation adjacent one of the conductive sections (6a) of the oscillator arm (6), which driver (18) is configured in use to drive the one of the conductive sections (6a) of the oscillator arm (6) towards or away therefrom when an electrical signal is applied thereto;

Abstract: There is disclosed a differential oscillator circuit including first (10) and second (20) branches each including the series arrangement, between high (VDD) and low (VSS) supply potentials, of a first transistor (4, 5), a first current source (2, 3) and resistor means (8, 9, 18, 19; 18*, 19*). The first transistors are interconnected so as to form a crossed pair of transistors, the most positive current terminal of each transistor (on the “drain” side) being connected to the control terminal of the other transistor of the crossed pair. This differential oscillator circuit further includes an electro-mechanical resonator (6) connected to the crossed transistor pair on the “drain” side, as well as a capacitive element (7) connected to the crossed transistor pair on the “source” side. Advantageously, for high frequency applications, the electro-mechanical resonator can be of the bulk acoustic wave type.

Abstract: A time base having a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator (4) supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator has a central post (5) extending from the substrate along the axis of rotation, and a free-standing oscillating structure (6) including an outer ring (60) coaxial with the axis of rotation, and a plurality of spring elements (62) disposed symmetrically around the central post and connecting the outer ring to the central post.

Abstract: There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit.

Abstract: A high-frequency module includes a dielectric plate in which a resonator is formed and a cover for covering the dielectric plate. A hole is provided in the cover. A laser beam for laser trimming passes through the hole. The area of opening and the depth of the hole are defined so that electromagnetic waves in a usable frequency band are cut off in the hole. An electrical characteristic is measured in a state where all components including the cover are assembled, and laser trimming is performed through the hole so as to obtain a desired characteristic.

Abstract: There are provided a stable and highly sensitive nanometric mechanical oscillator having a considerably high detection resolution that enables detection of variation in force or mass on the nanometer order, as well as a method of fabricating the same, and a measurement apparatus using the same. A nanometric mechanical oscillator (10) includes a base (11), a tetrahedral oscillator mass (13); and an elastic neck portion (12) for connecting the base (11) and the tetrahedral oscillator mass (13). The oscillator (10) assumes a mushroom-like shape and has a nanometric size. The oscillator mass (13) assumes a tetrahedral shape and is suitable to be used as a probe of a scanning forth microscope in which the oscillator mass (13) serving as a probe is caused to approach to an arbitrary sample surface in order to observe the surface state.

Abstract: A circuit and method for assuring rapid initiation of resonant oscillation of an electromechanically oscillatory system driven by phase lock loop circuits. An open loop starting signal commences driving of the object at a starting frequency above the resonant frequency. The starting signal reduces the drive frequency until the resonant frequency of the system is reached and the starting signal is removed.

Abstract: A linear actuator includes a mover equipped with an outer yoke and a magnet, a stator equipped with coils and an inner yoke, and leaf springs for linking the movable section and the stator. The actuator is assembled such that the leaf springs are deformed when the mover stays at a balanced position. This structure can maximize a vibration stroke of the mover.

Abstract: A ZnO monolithically integrated tunable surface acoustic wave (MITSAW) device uses tunable acousto-electric and acouso-optic interaction between surface acoustic waves (SAW) and a two dimensional electron gas (2DEG) in a ZnO/MgxZn1−xO quantum well. The high electromechanical coupling coefficients of piezoelectric ZnO in conjunction with the low acoustic loss and high velocity of sapphire (Al2O3) offers high frequency and low loss RF applications. The 2DEG interacts with the lateral electric field resulting in ohmic loss which attenuates and slows the surface acoustic wave. This mechanism is used to tune the acoustic velocity. The high coupling coefficients offered by the ZnO/R—(Al2O3) systems allows large velocity tuning. Combined with the optical characteristics of the wide and direct band gap (about 3.3 eV) semiconductor and transparent ZnO electrodes, the MITSAW chip can be used for UV optical signal processing.

Abstract: Microelectromechanical resonators that can be fabricated on a semiconductor die by processes normally used in fabricating microelectronics (e.g., CMOS) circuits are provided. The resonators comprises at least two vibratable members that are closely spaced relative to a wavelength associated with their vibrating frequency, and driven to vibrate one-half a vibration period out of phase with each other, i.e. to mirror each others motion. Driving the vibratable members as stated leads to destructive interference effects that suppress leakage of acoustic energy from the vibratable members into the die, and improve the Q-factor of the resonator. Vibratable members in the form of vibratable plates that are formed by deep anisotropic etching one or more trenches in the die are disclosed. Embodiments in which two sets of vibratable plates are spaced by ½ the aforementioned wavelength to further suppress acoustic energy leakage, and improve the Q-factor of the resonator are disclosed.

Abstract: The present invention concerns a low frequency oscillator device including a quartz resonator (1) and an electronic maintenance circuit for maintaining the vibrations of said quartz resonator. According to the present invention, the quartz resonator is arranged to vibrate according to a torsional mode and therefore has a single cutting angle defined by a rotation at a determined angle (&thgr;) about the crystallographic axis X of the quartz crystal. This resonator includes in particular at least one undesired fundamental flexural vibrating mode at a first frequency and a desired fundamental torsional vibrating mode at a second frequency higher than said first frequency. Moreover, the electronic maintenance circuit is an inverter circuit (2) whose transconductance value (gm) is determined such that said device cannot oscillate according to the undesired fundamental flexural vibrating mode but according to the desired fundamental torsional vibrating mode of said resonator.

Abstract: Techniques and apparatus for causing electromagnetic interaction between an oscillator and a quantum ensemble with transition moments to transfer energy. In implementation, a mechanical oscillator with an electromagnetically polarized moving part is placed close to the quantum ensemble to extract energy from said quantum ensemble so as to reduce an entropy of the quantum ensemble.

Abstract: A vibrating reed is provided which includes a base; and a vibration arm section formed so as to protrude from this base wherein a through groove is formed in the vibration arm section, and a rigidity reinforcing section is provided in the through groove, and thus the frequency is not decreased and the CI value is not increased.

Abstract: Several MEMS-based architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. A method and apparatus are provided for upconverting and filtering an information signal utilizing a vibrating micromechanical device based on an AC signal having a desired frequency. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.

Abstract: A method and resulting formed device are disclosed wherein the method combines polysilicon surface-micromachining with metal electroplating technology to achieve a capacitively-driven, lateral micromechanical resonator with submicron electrode-to-resonator capacitor gaps. Briefly, surface-micromachining is used to achieve the structural material for a resonator, while conformal metal-plating is used to implement capacitive transducer electrodes. This technology makes possible a variety of new resonator configurations, including disk resonators and lateral clamped-clamped and free-free flexural resonators, all with significant frequency and Q advantages over vertical resonators. In addition, this technology introduces metal electrodes, which greatly reduces the series resistance in electrode interconnects, thus, minimizing Q-loading effects while increasing the power handling ability of micromechanical resonators.

Abstract: A ZnO monolithically integrated tunable surface acoustic wave (MITSAW) device uses tunable acousto-electric and acouso-optic interaction between surface acoustic waves (SAW) and a two dimensional electron gas (2DEG) in a ZnO/MgxZn1-xO quantum well. The high electromechanical coupling coefficients of piezoelectric ZnO in conjunction with the low acoustic loss and high velocity of sapphire (Al2O3) offers high frequency and low loss RF applications. The 2DEG interacts with the lateral electric field resulting in ohmic loss which attenuates and slows the surface acoustic wave. This mechanism is used to tune the acoustic velocity. The high coupling coefficients offered by the ZnO/R-(Al2O3) systems allows large velocity tuning. Combined with the optical characteristics of the wide and direct band gap (about 3.3 eV) semiconductor and transparent ZnO electrodes, the MITSAW chip can be used for UV optical signal processing.

Abstract: A filter constructed of a plurality of micro-mechanical resonators that are weakly coupled together. Micro-machining techniques enable the fabrication of a plurality of resonators having nearly identical frequency performance characteristics, with the difference in resonant frequency between and among the plurality of resonators being no more than approximately 1%. Any number of resonators may be coupled in virtually any configuration (e.g., circular, square, triangular, straight, etc.) to form a filter in accordance with the present invention. One of the resonators of the filter is driven into motion by an electrical signal, and the resonating movement (i.e., physical response) is detectable using optical interference techniques and systems directed at a resonator other than the resonator driven into motion.

Abstract: A Q-controlled microresonator and devices including such resonators.

Abstract: An oscillator module in which external wires can be reduced, and characteristics of a resonator and oscillation margin can be measured. A circuit portion for oscillation and a two-port surface acoustic wave resonator are sealed in a package, one of the terminals of the two-port surface acoustic wave resonator is connected inside the package to an input terminal of the circuit portion for oscillation. The number of external terminals provided at the package is reduced, enabling the oscillator module to be made small-scale and at lower cost. Furthermore, it is possible to measure the insertion loss and resonant frequency of the two-port surface acoustic wave resonator, and the oscillation margin of the oscillator module, making it possible to improve the yield of the oscillator and reduce costs.

Abstract: A pulse forming circuit for a vibration type actuator apparatus. This circuit forms pulses by shifting an output from a frequency dividing circuit while changing the shift amount of a time delaying circuit using a ring oscillator for shifting an output from the frequency dividing circuit every time an output is generated by a frequency dividing circuit. With this arrangement, the actuator can be driven by using high-resolution pulse signals.

Abstract: A magnetron assembly for sputter deposition and a method for using such assembly are described. The novel magnetron assembly is equipped with traversing magnets that are capable of moving in a radial direction toward and away from a center axis of the magnetron simultaneously with the rotational motion of the assembly. The traversing magnets enables a substantially uniform magnetic flux distribution to be formed which leads to not only a more uniform film deposition on a wafer surface, but also a more uniformly consumed metal target surface leading to a longer target life. The non-uniformity of a film deposited in a metal sputtering process frequently seen when using a conventional magnetron assembly is substantially eliminated.

Abstract: An integrated oscillator and associated methods are provided for providing clock signals. The integrated oscillator preferably includes a micro-mechanical oscillating circuit for providing an oscillating clock signal. The micro-mechanical oscillating circuit preferably includes a support layer, a fixed layer positioned on a support layer, remaining portions of a sacrificial layer positioned only on portions of the fixed layer, and an oscillating layer positioned on the remaining portions of the sacrificial layer, overlying the fixed layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency. The spaced relation is preferably formed by removal of unwanted portions of the sacrificial layer.

Abstract: A method and system employing a feedback signal indicative of monitored motion of an electro-mechanical acoustic transducer to generate one or both of a control signal for driving the transducer at its natural resonance frequency, and a warning signal indicating that the transducer is not vibrating at a frequency within a selected frequency range. In preferred embodiments, the transducer is a voice coil loudspeaker mounted in or on a vehicle. In other preferred embodiments, the electro-mechanical transducer is driven by an initial electrical pulse followed by a sequence of electrical pulses. A feedback signal indicative of monitored motion of a moving portion of the transducer is generated. Each pulse (following the initial pulse) is applied at a time (determined by the feedback signal) so as to drive the transducer at its actual natural resonance frequency.