Abstract: Methods and apparatus for tuning devices having mechanical resonators are described. In one implementation, a mechanical resonator and a phase shifter are configured in a feedback loop, so that the phase shifter shifts the phase of the resonator output signal. The amount of phase shift induced by the phase shifter may be variable. In another implementation, an LC tuning subcircuit is coupled to a mechanical resonator. In some implementations, the LC tuning subcircuit has a variable capacitance. One or more of the apparatus described herein may be implemented as part, or all, of a microelectromechanical system (MEMS).

Abstract: A hybrid system having a non-MEMS device and a MEMS device is described. The apparatus includes a non-MEMS device and an integrated circuit including a MEMS device, the integrated circuit formed on a substrate. The integrated circuit includes a control circuit for the non-MEMS device and a MEMS control circuit for the MEMS device.

Abstract: A MEMS device includes a substrate, a cavity formed above the substrate, a first vibrator contained in the cavity, and a second vibrator contained in the cavity and having a natural frequency different from that of the first vibrator. The first vibrator and the second vibrator are preferably arranged along a long side of the cavity having a rectangular shape in plan view.

Abstract: A resonator comprising: a frame; a first oscillator configured to oscillate with respect to the frame; a first driver configured to drive the first oscillator at the first oscillator's resonant frequency; a first half of a first relative position switch mounted to the first oscillator; a second oscillator having substantially the same resonant frequency as the first oscillator, wherein the first and second oscillators are designed to respond in substantially the same manner to external perturbations to the frame; a second half of the first relative position switch mounted to the second oscillator; and wherein as the first oscillator oscillates there is relative motion between the first and second oscillators such that the first relative position switch passes through a closed state in each oscillation when the first and second switch halves pass by each other.

Abstract: The invention relates to a method for operating control equipment (1) of a resonance circuit (2), wherein the control equipment (1) comprises at least two circuit elements (8, 9) connected in series, in particular each comprising a recovery diode (13, 14) connected in parallel, between which a connection (6) of the resonance circuit (2) is connected. According to the invention, the circuit elements (8, 9) are actuated as a function of the voltage detected at the connection (6). The invention further relates to control equipment (1) of a resonance circuit (2).

Abstract: Oscillators and methods of operating the same, the oscillators include a pinned layer having a fixed magnetization direction, a first free layer over the pinned layer, and a second free layer over the first free layer. The oscillators are configured to generate a signal using precession of a magnetic moment of at least one of the first and second free layers.

Abstract: An oscillator includes a resonator section structured such that a dielectric is interposed between first and second conductors and such that the first and second conductors are electrically connected to a resonant tunneling diode, a capacitor section structured such that the dielectric is interposed between the first and second conductors, a line section configured to electrically connect the resonator section and the capacitor section in parallel to each other, and a resistor section configured to electrically connect the first and second conductors to each other. A first position of the resonator section and a second position of the capacitor section are connected to each other by the line section so that the first position and the second position are substantially electrically equivalent to each other in a wavelength range larger than a wavelength of an electromagnetic wave that resonates in the resonator section.

Abstract: Disclosed herein is a MEMS component. The MEMS component according to the exemplary embodiment of the present invention includes: a plate-shaped membrane 110; a post 130 disposed under an edge 115 of the membrane 110; a stopper 140 disposed under the membrane 110 and disposed more inwardly than the post 130 so as to form a space 143 between the stopper 140 and the post 130; and a cap 150 disposed under the post 130 so as to cover the post 130, whereby the influence of disturbance or noise occurring from external environments or interference from surrounding sensors can be interrupted by using a predetermined region 145 of the membrane 110 disposed above the space 143.

Abstract: The present invention is an oscillator which implements matched resonators which are driven at a same frequency, one hundred-eighty degrees out-of-phase. The resonators may be implemented in a same plane of a printed circuit board and located adjacent to each other, thus the resonators are affected by a same (ex.—same magnitude of) vibration interference. However, in the oscillator embodiments described herein, the vibration interference component cancels out of (ex.—is eliminated from) the oscillator output signal, leaving only the desired component.

Abstract: A crystalline semiconductor resonator device comprises two matched resonators which are aligned differently with respect to the crystal structure of the crystalline semiconductor. The resonators each comprise a portion of a material having a different temperature dependency of the Young's modulus to the temperature dependency of the Young's modulus of the crystalline semiconductor material. In this way, the suspension springs for the resonators have different properties, which influence the resonant frequency. The resonant frequency ratios between the first and second resonators at a calibration temperature and an operation temperature are measured. A frequency of one (or both) of the resonators at the operation temperature can then be derived which takes into account the temperature dependency of the one of the resonators.

Abstract: A resonator and a method of manufacturing a resonator are provided. The resonator includes a sacrificial layer formed on a substrate, and a resonant structure formed on the sacrificial layer, the resonant structure comprising a carbon nano-substance layer and a silicon carbide layer.

Abstract: A parametric feedback oscillator includes a resonator which has at least one transduction element and at least one electromechanical resonating element. The resonator is configured to accept as input a parametric excitation signal at a frequency 2?0 and to provide a resonating output signal at a frequency ?0. A cascaded feedback path in any electrically coupled cascade order includes at least one non-linear element, at least one phase shifter electrically, and at least one amplifier. The cascade feedback path is configured to receive as input the resonating output signal at a frequency ?0 and configured to provide as output a feedback path signal as the parametric excitation signal at a frequency 2?0 to the resonator. A parametric feedback oscillator output terminal is configured to provide the resonating output signal at the frequency ?0 as an output signal. A method of causing a parametric feedback oscillation is also described.

Abstract: Some embodiments regard a method comprising: generating a current according to a movement of the MEMS device; the movement is controlled by a control signal; generating a peak voltage according to the current; and adjusting the control signal when the peak voltage is out of a predetermined range.

Abstract: The resonator comprises an oscillating element and first and second excitation electrodes of the oscillating element. An AC signal generator is connected to the first and second excitation electrodes and delivers first and second signals of the same amplitudes and in antiphase on the first and second electrodes. A first DC voltage source is connected to a third electrode. A second DC voltage source is connected to a fourth electrode. An additional electrode is electrically connected to the oscillating element. A signal representative of oscillation of the oscillating element is provided by the additional electrode formed by an anchoring point of the oscillating element and biased by a third DC voltage.

Abstract: Wireless power transfer is received using a magneto mechanical system. A magneto mechanical system may include an array of magneto-mechanical oscillators, wherein each oscillator may comprise a magnetic symmetrical part and a suspension engaged to the magnetic part. The system may further include a coil formed around the array and electromagnetically coupled to the oscillators to produce an electric current caused by electromagnetic coupling with the oscillators.

Abstract: There is provided with a resonator which can correct the resonance frequency of a vibrator in a wide range and with a high accuracy and also provided with an oscillator using the resonator. In the resonator configured by the vibrator 101, electrodes 4, 5 disposed so as to oppose to parts of the surface of the vibrator 101 via gaps, and variable voltage sources 24, 25 for applying a voltage to both or one of the vibrator 101 and the electrodes 4, 5, each of the electrodes 4, 5 is configured by plural electrodes. The electrodes 4, 5 are respectively disposed via gaps close to the portions of the vibrator 101 having different vibration amplitudes. The DC voltages being applied are independently adjusted with respect to the electrodes 4, 5 which differ in distances from the shaft of the vibrator among the plural electrodes close to the vibrator 101.

Abstract: Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable plate located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.

Abstract: It is possible to reduce the size of a surface acoustic wave (SAW) resonator by enhancing a Q value. In a SAW resonator in which an IDT having electrode fingers for exciting SAW is disposed on a crystal substrate, the IDT includes a first region disposed at the center of the IDT and a second region and a third region disposed on both sides of the first region. A frequency is fixed in the first region and a portion in which a frequency gradually decreases as it approaches an edge of the IDT is disposed in the second region and the third region. When the frequency of the first region is Fa, the frequency at an edge of the second region is FbM, and the frequency at an edge of the third region is FcN, the variations in frequency are in the ranges of 0.9815<FbM/Fa<0.9953 and 0.9815<FcN/Fa<0.9953, respectively.

Abstract: A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.

Abstract: Periodic signal generators include an oscillator circuit, which is configured to generate a first periodic signal at an output thereof, and a piezoelectric-based microelectromechanical resonator. The resonator is configured to generate a second periodic signal at a first electrode thereof, which is electrically coupled to the oscillator circuit. A variable impedance circuit is provided, which is electrically coupled to a second electrode of the piezoelectric-based microelectromechanical resonator. The variable impedance circuit is configured to passively modify a frequency of the second periodic signal by changing an induced electromechanical stiffness in at least a portion of the piezoelectric-based microelectromechanical resonator.

Abstract: A radiofrequency oscillator comprises: a free layer (4), a current injector (6) for injecting spin-polarized current into the free layer, this injector having a spin-polarized current injection face (16) directly in contact with the free layer, a magnetoresistive contact (8) having a measurement face (26) directly in contact with the free layer, in order to form, in combination with the free layer, a tunnel junction for measuring the precession of the magnetization of the free layer, a conducting pad (30) directly in contact with the free layer in order to make an electrical current flow through the injector without passing through the magnetoresistive contact. At least part of the measurement face (26) and part of the injection face (16) are placed facing each other on each side of the free layer (4).

Abstract: In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, the line occupying ratio causing the maximum electromechanical coupling coefficient and the line occupying ratio causing the maximum reflection of the surface acoustic waves in the IDT are different from each other, the center of the IDT has the line occupying ratio causing an increase in electromechanical coupling coefficient in comparison with the edges of the IDT, and the edges of the IDT have the line occupying ratio causing an increase in reflection of the surface acoustic waves in comparison with the center of the IDT.

Abstract: An oscillatory apparatus and methods of utilizing the same. In one embodiment, the apparatus comprises a force sensor having a proof mass, with one or more sensing electron tunneling electrodes disposed thereon, and a frame comprising one or more reference electron tunneling electrodes. Conductive plates disposed on the sensor base and capping wafers induce oscillations of the proof mass. The sensing and the reference electrode pairs are disposed in a face-to-face configuration, thus forming a digital switch characterized by one or more closed states. In the closed state, the switch generates triggering events, thereby enabling the sensing apparatus to generate a digital output indicative of the mass position. The time period between consecutive trigger events is used to obtain mass deflection due to external forcing. Time separation between the triggering events is based on the physical dimensions established during fabrication, thus not requiring ongoing sensor calibration.

Abstract: An oscillating circuit for determining a resonant frequency of an electro-mechanical oscillating device and for driving the electro-mechanical oscillating device at the determined resonant frequency includes a driving circuit and a start-up, impetus injection circuit. The driving circuit is configured to receive one or more reference signals and further configured to provide a driving signal related to the reference signals to the electro-mechanical oscillating device. The start-up, impetus injection circuit is operably coupled to the electro-mechanical oscillating device and configured to selectively provide a start-up excitation signal to the electro-mechanical oscillation device. The start-up, impetus injection circuit is activated upon start-up of the oscillating circuit to drive the electro-mechanical oscillation device and the driving circuit determines a resonant frequency by measuring a parameter related to the resonant frequency of the electro-mechanical oscillating device.

Abstract: In order to provide a MEMS resonator having a higher Q factor, by suppressing losses in high-frequency signals due to barriers of thin-film lamination portions, in cases where there exist junction interfaces (barriers), such as pn junctions, in AC-current input/output lines for a vibrator (1) and electrodes (2, 3), the MEMS resonator is structured such that a DC current is flowed therethrough along with an AC current at the same time, in order to reduce resistance losses applied to the AC current, wherein there are provided DC bias circuits (22, 23, 24) for continuously flowing DC currents through the junction interfaces, in an input-electrode side and/or output-electrode side.

Abstract: Methods and apparatus for tuning devices having mechanical resonators are described. In one implementation, a mechanical resonator and a phase shifter are configured in a feedback loop, so that the phase shifter shifts the phase of the resonator output signal. The amount of phase shift induced by the phase shifter may be variable. In another implementation, an LC tuning subcircuit is coupled to a mechanical resonator. In some implementations, the LC tuning subcircuit has a variable capacitance. One or more of the apparatus described herein may be implemented as part, or all, of a microelectromechanical system (MEMS).

Abstract: A temperature compensation method for a piezoelectric oscillator including a piezoelectric vibrator having a frequency temperature characteristic with a hysteresis characteristic, and an oscillation circuit which oscillates the piezoelectric vibrator and outputs an oscillation signal, wherein, to a temperature compensation circuit which can calculate a quantity of temperature compensation using frequency temperature information indicating a temperature characteristic of an oscillation frequency of the piezoelectric vibrator and temperature information of the piezoelectric vibrator at the time of oscillation of the oscillation signal, the oscillation signal and the frequency temperature information are outputted, includes: calculating, as the frequency temperature information, an intermediate value between elevated-temperature frequency temperature information of the piezoelectric vibrator that is generated in the case where ambient temperature of the piezoelectric vibrator is elevated, and lowered-temperature

Abstract: A vibrating member includes a base portion, a plurality of vibrating arms which extend from one end portion of the base portion, are provided in parallel in a first direction, and extend in a second direction perpendicular to the first direction, a linking portion which is provided between the base end portions of two adjacent vibrating arms and extends from the other end portion of the base portion, and a support portion which is connected to the base portion through the linking portion.

Abstract: The invention concerns a novel bulk acoustic wave (BAW) resonator design and method of manufacturing thereof The bulk acoustic wave resonator comprises a resonator portion, which is provided with at least one void having the form of a trench which forms a continuous closed path on the resonator portion. By manufacturing the void in the same processing step as the outer dimensions of the resonator portion, the effect of processing variations on the resonant frequency of the resonator can be reduced. By means of the invention, the accuracy of BAW resonators can be increased.

Abstract: The present invention is a piezoelectric crystal oscillator using parametric amplification to enhance the Q. Parametric amplification is accomplished by driving the same region of the crystal as used for the oscillator with an overtone of the crystal resonator.

Abstract: An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.

Abstract: The present invention relates to an oscillator. The oscillator includes a resonator unit configured to resonate terahertz waves generated by an active layer using intersubband transitions of a carrier. The oscillator further includes a strain generating unit configured to generate strain of the active layer. Still furthermore, the oscillator includes a control unit configured to control the strain generating unit in accordance with the oscillation characteristic (the frequency or the output) of the terahertz waves resonated by the resonator unit.

Abstract: It is possible to reduce the size of a surface acoustic wave resonator by enhancing the Q value. In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, a line occupying ratio is defined as a value obtained by dividing the width of one electrode finger by the distance between the center lines of the gaps between one electrode finger and the electrode fingers adjacent to both sides thereof, and the IDT includes a region formed by gradually changing the line occupying ratio from the center to both edges so that the frequency gradually becomes lower from the center to both edges than the frequency at the center of the IDT.

Abstract: A resonator in which in addition to the normal anchor at a nodal point, a second anchor arrangement is provided and an associated connecting arm between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration.

Abstract: A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.

Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

Abstract: One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.

Abstract: A MEMS vibrator according to the invention includes: a first electrode fixed to a surface of a substrate; and a second electrode having a beam portion including a second face facing a first face of the first electrode, and a supporting portion supporting the beam portion and fixed to the surface of the substrate. The beam portion has a first portion whose length in a normal direction of the first face of the beam portion monotonically decreases toward a tip of the beam portion.

Abstract: An oscillation circuit includes a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other, an amplifier circuit (an inverting amplifier circuit) having an input terminal and an output terminal, and a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the MEMS vibrator and the output terminal to each other to thereby connect the one of the MEMS vibrators and the amplifier circuit (the inverting amplifier circuit) to each other.

Abstract: The invention provides a method for manufacturing a piezoelectric vibrator, a piezoelectric vibrator, and an oscillator, whereby mounting of the piezoelectric vibrating piece by flip-chip bonding is ensured. A manufacturing method of a piezoelectric vibrator is a method for manufacturing a piezoelectric vibrator that includes: a base substrate; a lid substrate bonded to the base substrate; a piezoelectric vibrating piece including a crystal plate having on its outer surface excitation electrodes, and mount electrodes electrically connected to the excitation electrodes; inner electrodes to be electrically connected to the piezoelectric vibrating piece; and metal bumps to provide electrical interconnections between the inner electrodes and the mount electrodes.

Abstract: Disclosed herein is a resonator including, a vibrating portion having a conductor portion, and three or more insulating portions provided so as to electrically separate the conductor portion into a plurality of blocks, wherein when a potential difference is caused across both ends in each of the three or more insulating portions, the vibrating portion carries out a resonance vibration based on a longitudinal vibration in accordance with a frequency of an A.C. signal inputted to each of corresponding ones of the plurality of blocks in the conductor portion.

Abstract: An oscillating circuit for determining a resonant frequency of an electro-mechanical oscillating device and for driving the electro-mechanical oscillating device at the determined resonant frequency includes a driving circuit and a start-up, impetus injection circuit. The driving circuit is configured to receive one or more reference signals and further configured to provide a driving signal related to the reference signals to the electro-mechanical oscillating device. The start-up, impetus injection circuit is operably coupled to the electro-mechanical oscillating device and configured to selectively provide a start-up excitation signal to the electro-mechanical oscillation device. The start-up, impetus injection circuit is activated upon start-up of the oscillating circuit to drive the electro-mechanical oscillation device and the driving circuit determines a resonant frequency by measuring a parameter related to the resonant frequency of the electro-mechanical oscillating device.

Abstract: A method for manufacturing a quartz crystal unit comprises the steps of forming a quartz crystal tuning fork resonator vibratable in a flexural mode of an inverse phase and having a quartz crystal tuning fork base and first and second quartz crystal tuning fork tines connected to the quartz crystal tuning fork base, forming at least one groove having at least three stepped portions in at least one of opposite main surfaces of each of first and second quartz crystal tuning fork tines, disposing an electrode on a surface of one of the at least three stepped portions of the at least one groove and an electrode on one of opposite side surfaces of each of the first and second quartz crystal tuning fork tines, mounting the quartz crystal tuning fork resonator on a mounting portion of a case, and connecting a lid to the case to cover an open end of the case, wherein the step of forming the quartz crystal tuning fork base and the first and second quartz crystal tuning fork tines is performed before the step of formin

Abstract: A method for fabricating an integrated electronic compass and circuit system. The fabrication method begins with providing a semiconductor substrate comprising a surface region. One or more CMOS integrated circuits are then formed on one or more portions of the semiconductor substrate. Once the CMOS circuits are formed, a thickness of dielectric material is formed overlying the one or more CMOS integrated circuits. A substrate is then joined overlying the thickness of the dielectric material. Once joined, the substrate is thinned to a predetermined thickness. Following the thinning process, an electric compass device is formed within one or more regions of the predetermined thickness of the substrate. Other mechanical devices or MEMS devices can also be formed within one or more regions of the thinned substrate.

Abstract: A radio frequency microelectromechanical (RF MEMS) device can comprise an actuation p-n junction and a sensing p-n junction formed within a semiconductor substrate. The RF MEMS device can be configured to operate in a mode in which an excitation voltage is applied across the actuation p-n junction varying a non-mobile charge within the actuation p-n junction to modulate an electric field acting upon dopant ions and creating electrostatic forces. The electrostatic forces can create a mechanical motion within the actuation p-n junction. The mechanical motion can modulate a depletion capacitance of the sensing p-n junction, thereby creating a motional current. At least one of the p-n junctions can be located at an optimal location to maximize the efficiency of the RF MEMS device at high resonant frequencies.

Abstract: An oscillator includes oscillator circuitry (8) including a transconductance stage (2) and a resonator (3). A comparator (10) produces first (CLK) and second (/CLK) clock signals which indicate the timing of positive and negative phases of a differential output signal (VIN+-VIN?) produced by the transconductance circuit in response to the resonator. A synchronous rectifier (14) converts the differential output signal to a current (IRECT) in response to the first and second clock signals. A switched capacitor notch filter (15) filters the current in response to the first and second clock signals. A control current (ICONTROL) which controls the transconductance of the transconductance circuit is generated in response to the notch filter. The resonator may be a MEMS resonator.

Abstract: Systems and methods for operating with oscillators configured to produce an oscillating signal having an arbitrary frequency are described. The frequency of the oscillating signal may be shifted to remove its arbitrary nature by application of multiple tuning signals or values to the oscillator. Alternatively, the arbitrary frequency may be accommodated by adjusting operation one or more components of a circuit receiving the oscillating signal.

Abstract: The invention pertains to a method for exciting a resonant element of a microstructure, this element being mobile according to one degree of freedom. The method comprises a step for applying a charged particle beam to said microstructure, the beam being configured so as to drive the element in an alternating motion depending on its degree of freedom.

Abstract: A device has a resonator coupled to input and output nodes, the resonator being characterized by a transducer to drive the output node, and further characterized by a feedthrough capacitance such that portions of the input signal bypass the transducer to allow a spurious signal to reach the output node. The device includes a compensation capacitor coupled to the output node to define a compensation capacitance in accordance with the feedthrough capacitance. A phase inversion circuit is coupled to the compensation capacitance to generate a compensation signal and coupled to the output node such that the spurious signal is offset by the compensation signal. In some cases, a differential amplifier of the phase inversion circuit has the compensation capacitance in a feedback path to offset the feedthrough capacitance. In these and other cases, the compensation capacitance and the feedthrough capacitance may be unmatched to avoid overcompensation.

Abstract: A method of multi-stage substrate etching and a terahertz oscillator manufactured by using the method are provided. The method comprises the steps of forming a first mask pattern on any one surface of a first substrate, forming a hole by etching the first substrate using the first mask pattern as an etching mask, bonding, to the first substrate, a second substrate having the same thickness as a depth to be etched, forming a second mask pattern on the second substrate bonded, forming a hole by etching the second substrate using the second mask pattern as an etching mask, and removing an oxide layer having the etching selectivity between the first substrate and the second substrate.