Sheet, Web, Or Strand Patents (Class 34/444)
  • Publication number: 20040123484
    Abstract: Disclosed is a high pressure processing method for subjecting a processing object to a high pressure processing using a high pressure fluid. In this method, the high pressure fluid is brought into collision with the surface of the processing object placed in a high pressure processing chamber, and then distributed along the surface of the processing object in an outward direction beyond the processing object.
    Type: Application
    Filed: October 21, 2003
    Publication date: July 1, 2004
    Applicants: KABUSHIKI KAISHA KOBE SEIKO SHO, DAINIPPON SCREEN MFG. CO., LTD.
    Inventors: Tetsuya Yoshikawa, Yoichi Inoue, Katsumi Watanabe, Kaoru Masuda, Katsuyuki Iijima, Tomomi Iwata, Yusuke Muraoka, Kimitsugu Saito, Ikuo Mizobata
  • Publication number: 20040118537
    Abstract: A process for manufacturing a cellulosic paper product (e.g., paper hand towels) exhibiting reduced malodor upon wetting. The process includes introducing a vanilla compound (e.g., vanillin) into the aqueous suspension of papermaking fibers from which the paper product is made, depositing the aqueous suspension of papermaking fibers onto a sheet-forming fabric to form a wet web and drying the wet web at high temperature in an oxidative environment to form a dried base sheet. The process of the present invention is particularly suited for reducing malodor released from cellulosic paper products made from through-air dried base sheet material.
    Type: Application
    Filed: December 20, 2002
    Publication date: June 24, 2004
    Applicant: Kimberly-Clark Worldwide, Inc.
    Inventors: Tameka Spence, Jason Patrick McDevitt
  • Publication number: 20040118536
    Abstract: A process for manufacturing a cellulosic paper product (e.g., paper hand towels) exhibiting reduced malodor upon wetting. The process includes introducing an organic aliphatic carboxylic acid (e.g., acetic acid) into the aqueous suspension of papermaking fibers from which the paper product is made, depositing the aqueous suspension of papermaking fibers onto a sheet-forming fabric to form a wet web and drying the wet web at high temperature in an oxidative environment to form a dried base sheet. The process of the present invention is particularly suited for reducing malodor released from cellulosic paper products made from through-air dried base sheet material.
    Type: Application
    Filed: December 20, 2002
    Publication date: June 24, 2004
    Applicant: Kimberly-Clark Worldwide, Inc.
    Inventors: Tameka Spence, Ralph Anderson
  • Patent number: 6749723
    Abstract: A property of a paper web is measured using one or more reflectance measurement sensors emitting measuring beams onto the web and receiving the beams reflected from the web, from which the web property is deduced. The web is supported on a web support during the measurement, such as on a passive or active airfoil or fabric. One or more measurement sensor(s) can be integrated within an active airfoil, and can comprise a plurality of optical fibers having sensing ends arranged in the airfoil such that the sensing ends of the fibers face the moving paper web through one or more apertures in a web-supporting panel of the airfoil. Alternatively, a traversing sensor can be mounted within the airfoil. Other embodiments include a reflectance sensor mounted adjacent an airfoil or other web support such as a through-air drying fabric or a support belt for the web.
    Type: Grant
    Filed: August 8, 2002
    Date of Patent: June 15, 2004
    Assignee: Metso Paper Karlstad AB
    Inventor: Anders Tommy Lindén
  • Patent number: 6745494
    Abstract: A system for high-pressure drying of semiconductor wafers includes the insertion of a wafer into an open vessel, the immersion of the wafer in a liquid, pressure-sealing of the vessel, pressurization of the vessel with an inert gas, and then the controlled draining of the liquid using a moveable drain that extracts water from a depth maintained just below the gas-liquid interface. Thereafter, the pressure may be reduced in the vessel and the dry and clean wafer may be removed. The high pressure suppresses the boiling point of liquids, thus allowing higher temperatures to be used to optimize reactivity. Megasonic waves are used with pressurized fluid to enhance cleaning performance. Supercritical substances are provided in a sealed vessel containing a wafer to promote cleaning and other treatment.
    Type: Grant
    Filed: December 30, 2002
    Date of Patent: June 8, 2004
    Assignee: Semitool, Inc.
    Inventors: Eric J. Bergman, Ian Sharp, Craig P. Meuchel, H. Frederick Woods
  • Publication number: 20040099393
    Abstract: An apparatus for decreasing heat emission and enhancing a vacuum system in a papermaking machine is provided. Such an apparatus includes a drying device having an inlet for receiving heated air for removing moisture from a paper web and an outlet for exhausting the moisture-containing air from the drying device. A vacuum system is configured to produce a suction and receive the moisture-containing air. A web handling device is disposed upstream of the drying device and is configured to interact with the web before the web is directed to the drying device. The web handling device is further configured to receive a portion of the moisture-containing air from the drying device, wherein the portion of the moisture-containing air is directed through the web by the web handling device to facilitate dewatering of the web before the moisture-containing air is received by the vacuum system.
    Type: Application
    Filed: November 22, 2002
    Publication date: May 27, 2004
    Applicant: Metso Paper Karlstad Aktiebolg (AB)
    Inventor: Dennis Edward Jewitt
  • Patent number: 6735883
    Abstract: Apparatus and a method for enhancing the effectiveness of a water spray (30) to cool and/or remoisten a web (12) of material. The apparatus includes a web dryer, preferably a flotation dryer (100), an electrostatic charge generating device (31) or devices, a water spray (30), an integrated power supply (20) to supply high voltage power to the charge device, and a drainage system (35) for handling excess liquid generated during the cooling and/or remoistening of the web. The cooling apparatus is capable of a modular arrangement to optimize spacing and facilitate the addition of cooling capacity where needed, such as with faster web speeds or heavier web weights. One or more temperature sensors can be used to optimize the amount of and rate of fluid fed to the spray nozzles. The spray nozzles and charge bars can be retractable with respect to the web to facilitate web-up procedures.
    Type: Grant
    Filed: July 15, 2002
    Date of Patent: May 18, 2004
    Assignees: Megtec Systems, Inc., Hurletron, Inc.
    Inventors: Michael P. Bria, Ed Salmon, David J. Welter, David M. Klein, Steven J. Siler
  • Patent number: 6732452
    Abstract: A paper web drying apparatus and process is provided in which the heated air drying medium is replaced with between 10 percent to 100 percent of live steam. The addition of a steam component to the drying medium provides for a higher drying temperature to be supplied to the wet moving web. The introduction of live pressurized steam contributes to the load of force of the drying medium, thereby decreasing the energy requirements of blower motors. The introduction of pressurized live steam also lowers the free atmospheric oxygen content of the drying medium which reduces the burning or scorch hazard associated with high temperature drying of a cellulose web.
    Type: Grant
    Filed: December 21, 2001
    Date of Patent: May 11, 2004
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventors: Philip S. Lin, Ronald F. Gropp, Kevin B. Sartain
  • Patent number: 6732453
    Abstract: A method and an apparatus for arranging exhaust air and supply air in a drying section covered with a hood (14) in a paper machine, having drying cylinders (10) or the like and devices operating by negative and positive pressure. The exhaust air from the devices operating by negative pressure, such as suction rolls (20) and suction boxes is supplied out from the drying section via a first heat recovery tower (22). Substitute air is supplied via this first heat recovery tower to the runnability components (38) operating by positive pressure in the drying section. Substitute air can be additionally supplied via a second separate heat recovery tower (22′) to devices (40, 42) supplying heating air and/or ventilation air. The main portion of the exhaust air from the air space of the hood is supplied via this second heat recovery tower and out from the drying section.
    Type: Grant
    Filed: August 20, 2002
    Date of Patent: May 11, 2004
    Assignee: Metso Paper, Inc.
    Inventor: Petri Norri
  • Patent number: 6729041
    Abstract: This substrate processing apparatus supplies wafers W accommodated in a closed processing container 10 with ozone gas and steam for processing the wafers W. The apparatus includes an ozone-gas generator 40 for supplying the ozone gas into the processing container 10, a steam generator 30 for supplying the steam into the processing container 10 and a steam nozzle 35 arranged in the processing container 10 and connected to the steam generator 30. The steam nozzle 35 is equipped with a nozzle body 35a having a plurality of steam ejecting orifices 35f formed at appropriate intervals and a heater 35h for preventing dewdrops of the steam from being produced in the nozzle body 35a. Consequently, it is possible to prevent the formation of dewdrops of solvent steam, which may produce origins of particles in the closed processing container, unevenness in cleaning (etching), etc., and also possible to improve the processing efficiency.
    Type: Grant
    Filed: December 28, 2001
    Date of Patent: May 4, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Naoki Shindo, Tadashi Iino
  • Patent number: 6729042
    Abstract: A method is described for enhancing mass and heat transport of fluids in a fine pore structure through an appropriate modulation of the fluid pressure. For example, in an air drying process for a porous material that contains liquid, the air pressure is modulated throughout the volume of the drying chamber. Alternatively, the fluid pressure is modulated in a process stream. As an example, this method can be used for rapid drying of any open porous substances ranging from small pored materials such as aerogels and xerogels, to larger pored substances or articles such as industrial articles, agricultural articles (e.g., densely stacked vegetables, coffee beans, hops and other grains), paper-based products, thin films, pharmaceuticals, cloth, and clothing.
    Type: Grant
    Filed: April 16, 2002
    Date of Patent: May 4, 2004
    Assignee: Aspen Systems, Inc.
    Inventor: Kang P. Lee
  • Patent number: 6725569
    Abstract: The device (10) and method are used for ventilating an offset pocket space (12) located in a drying section of a papermaking machine by injecting air from a heated dry air supply inlet (11). The offset pocket space (12) is situated between a set of three axially-parallel drying cylinders (20) over which consecutively runs a paper web (14). The device (10) comprises a first air outlet (50) where a first air stream is directed into a cleft (34) defined where the felt (16) rejoins the felt roll (26), and a second air outlet (52) where a second air stream is directed in close proximity to the felt (16) at a location which is upstream of the cleft (34). In use, the device (10) and the corresponding method allow the first air stream to flow through the felt (16) and lift the paper web (14) away from the felt (16) so as to reach the offset pocket space (12). The second air stream creates an air curtain to lower the pressure in a zone between the first (50) and the second air outlet (52).
    Type: Grant
    Filed: January 28, 2002
    Date of Patent: April 27, 2004
    Assignee: Enerquin Air Inc.
    Inventors: Rémi Turcotte, Dominique Thifault
  • Patent number: 6722056
    Abstract: Drying semiconductor wafers or substrates by introducing an polar organic compound in liquid form into or onto means for enhancing evaporation within a process chamber and allowing the liquid to evaporate and form a drying vapor within the process chamber.
    Type: Grant
    Filed: March 15, 2002
    Date of Patent: April 20, 2004
    Assignee: Akrion, LLC
    Inventor: Lawrence J. Myland
  • Patent number: 6718654
    Abstract: Device for a drying section useful in the manufacture of paper or paperboard as a fibrous web. The drying section includes a drying drum rotatable about a first axis of rotation and arranged such that the fibrous web runs in contact with a surface of the drying drum, at least about a part of its circumference, and is dried thereby. The device includes at least one press roller rotatable about a second axis of rotation which is essentially parallel with the first axis of rotation, and is arranged, with a line load, to bear against the fibrous web, whereby the drying drum supports the at least one press roller. The at least one press roller is positioned at a corresponding longitudinal edge of the fibrous web, the least one press roller having a first cross-sectional diameter (D) at outer short ends in the device, and a second cross-sectional diameter (d) at inner short ends of the device, the first cross-sectional diameter (D) being larger than the second cross-sectional diameter (d).
    Type: Grant
    Filed: May 23, 2002
    Date of Patent: April 13, 2004
    Assignee: Stora Kopparbergs Bergslags Aktiebolag (publ)
    Inventor: Lennart Westman
  • Publication number: 20040064967
    Abstract: A web-formed material (1), preferably a pulp web (1), is passed through a drying plant, comprising blow boxes arranged in a plurality of drying decks, floating above lower blow boxes, which at their upper sides blow out hot process air against the web-formed material (1). Water, in the form of steam, escaping from the web-formed material (1) is discharged by the process air, at least part of which is recirculated (43) whereas the non-recirculated process air is discharged as exhaust air (41) and is replaced by a corresponding portion of supply air (42) with a low water content. The temperature of the process air is controlled (4).
    Type: Application
    Filed: August 5, 2003
    Publication date: April 8, 2004
    Inventors: Jonas Birgersson, Per Holmberg
  • Publication number: 20040040175
    Abstract: The invention relates to a device and method for the drying of plastic webs. Said device comprises at least one group of nozzles, whereby each group comprises at least two nozzles, between which a gap is provided for the introduction of a plastic web. According to the invention, air streams from each of the nozzles (4,5; 14,15; 24,25) in a group may be directed at the gap (6) in such a way that a plastic web (3) fed through said gap is made to oscillate (at 3a). By means of the vibration of the plastic web, any water droplets (18) found on the web are quickly shaken from the web and the plastic web thus dried.
    Type: Application
    Filed: September 5, 2003
    Publication date: March 4, 2004
    Inventor: Franz Starlinger Huemer
  • Patent number: 6699365
    Abstract: This invention relates to a three-stream atomizing nozzle for use with a rewet shower. The nozzle has an air stream divider that separates the atomizing air from the source into three streams. The first stream is a straight air stream staying closest to and around the atomized water jet. The second stream is a swirl running around the first straight stream. The third stream is also a straight stream that wraps around the first straight stream and the second swirl. The nozzle also has a mixing chamber in which the three air streams are mixed together for the atomizing purpose. The nozzle can from the combination of the three air streams produce fine water droplets that are suitable for a paper rewet shower and more importantly creates a tailorable water mass profile. The mass profile can be tailored into a shape that is close to a square shape which is ideal for rewet showers as a square profile creates minimal coupling between adjacent zones.
    Type: Grant
    Filed: October 22, 2001
    Date of Patent: March 2, 2004
    Assignee: ABB Inc.
    Inventor: Shizhong Duan
  • Patent number: 6694640
    Abstract: A calender, a system, and a method of regulating the humidity in a calender. The calender includes a housing having at least two side pieces and a roll stack located at least partially between the side pieces, wherein a space is formed by the roll stack and the web between the side pieces, and a fan positioned to blow dry air into the space. The system is for regulating the humidity in a calender, the calender being used to treat a moisture-containing material web and including a housing having at least two side walls and a roll stack, the calender defining a space bounded at least by the roll stack, the web, and the at least two side walls, and includes a device for reducing the humidity of the space, wherein the humidity level in the space is reduced to a level which is below a saturation point. The method includes reducing the humidity of the space, wherein the humidity level in the space is reduced to a level which is below a saturation point.
    Type: Grant
    Filed: February 4, 2000
    Date of Patent: February 24, 2004
    Assignee: Voith Sulzer Papiertechnik Patent GmbH
    Inventor: Franz Kayser
  • Patent number: 6668844
    Abstract: Workpieces requiring low levels of contamination, such as semiconductor wafers, are loaded into a rotor within a process chamber. The process chamber has a horizontal drain opening in its cylindrical wall. The chamber is closed via a door. A process or rinsing liquid is introduced into the chamber. The liquid rises to a level so that the workpieces are immersed in the liquid. The chamber slowly pivots or rotates to move the drain opening down to the level of the liquid. The liquid drains out through the drain opening. The drain opening is kept near the surface of the liquid to drain off liquid at a uniform rate. An organic solvent vapor is introduced above the liquid to help prevent droplets of liquid from remaining on the workpieces as the liquid drains off. The rotor spins the workpieces to help to remove any remaining droplets by centrifugal force.
    Type: Grant
    Filed: July 16, 2001
    Date of Patent: December 30, 2003
    Assignee: Semitool, Inc.
    Inventors: Eric Lund, Joe Lanfrankie, Gil Lund, Dana Scranton, Eric Bergman
  • Publication number: 20030230003
    Abstract: An apparatus and method for treating a moving substrate of indefinite length. The apparatus has a control surface positioned in close proximity to a surface of the substrate to define a control gap between the substrate and the control surface. A first chamber is positioned near the control surface, with the first chamber having a gas introduction device. A second chamber is positioned near the control surface, the second chamber having a gas withdrawal device. The control surface and the chambers together define a region wherein the adjacent gas phases possess an amount of mass. Upon inducement of at least a portion of the mass within the region, the mass flow is controlled to significantly reduce dilution of the gas phase component in the adjacent gas phase. This is accomplished through the introduction of a controlled gas stream thereby reducing the flow of an uncontrolled ambient gas stream due to pressure gradients in the system.
    Type: Application
    Filed: April 23, 2003
    Publication date: December 18, 2003
    Applicant: 3M Innovative Properties Company
    Inventors: Craig A. Miller, Nirmal K. Jain, William Blake Kolb
  • Publication number: 20030226279
    Abstract: A dry end section for a paper-making machine for producing a high-bulk tissue is provided. Such a machine comprises a through-air dryer adapted to finally dry a paper web and a through-air drying fabric configured to transport the web through the through-air dryer. A separating device is included for facilitating separation of the web from the through-air drying fabric. A reel is also provided and is configured to receive the web thereon. The web is received directly on the separating device or on a fabric wrapped about the separating device. In some instances, the web may be compressed between the separating device and an adjacent roll or by a web-compressing device disposed along the fabric transporting the web. The web is then transported to the reel directly from the fabric or other support mechanism extending between the separating device and the reel, without free draw of the web. Associated methods are also provided.
    Type: Application
    Filed: June 11, 2002
    Publication date: December 11, 2003
    Applicant: Metso Paper Karlstad AB
    Inventors: Ingvar Berndt Erik Klerelid, Lars-Erik Roland Onnerlov, Leif Soren Videgren
  • Patent number: 6647640
    Abstract: A drying station for drying printed sheets transported by a transport belt includes an irradiation device for irradiating the printed sheets, a deflection section located in vicinity of the irradiation device for guiding the transport belt away from the irradiation device, and a shielding device disposed between the transport belt and the irradiation device for shielding the transport belt against radiation from the irradiation device while the sheets are exposed to the radiation. A printing machine including the drying station and a method for drying printed sheets are also provided.
    Type: Grant
    Filed: July 29, 2002
    Date of Patent: November 18, 2003
    Assignee: Heidelberger Druckmaschinen AG
    Inventor: Martin Greive
  • Publication number: 20030208922
    Abstract: An apparatus and a method for preventing solvent droplets from falling on wafers during a solvent drying process of a semiconductor wafer. The apparatus is constructed by a body having a cavity therein for holding a wafer, means for introducing a solvent vapor in the cavity, a plurality of condenser coils on an inside wall of the cavity, and a plurality of condensing plates attached to the plurality of condenser coils on a surface facing the wafer for condensing solvent vapor and flowing condensed solvent into a reservoir thus preventing solvent droplets from falling on the wafer surface.
    Type: Application
    Filed: May 10, 2002
    Publication date: November 13, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Feng Chia Hsu
  • Publication number: 20030192197
    Abstract: A product dispenser and carrier (10, 110, 210, 310, 410, 510) for attachment to a surface such as a dryer fin includes a plate member (11, 111, 211, 311, 411, 511) and a product carrier (21, 121, 221, 321, 421, 521). The plate member (11, 111, 211, 311, 411, 511) attaches to the surface and the product carrier (21, 121, 221, 321, 421, 521) releasably attaches to the plate member (11, 111, 211, 311, 411, 511). Product (31, 131, 431, 531) is operatively connected to the product carrier (21, 121, 221, 321, 421, 521).
    Type: Application
    Filed: April 10, 2002
    Publication date: October 16, 2003
    Inventors: Gregory G. Griese, John E. Thomas, Brian A. Chute, Kathryn A. Netschke, Stephan M. Hubig, Terry J. Klos, Jamie W. Lerbs, Trevor J. Wilhelmson, Scott T. Russell
  • Patent number: 6615510
    Abstract: Liquid is removed from wafers for drying a wafer that has been wet in a liquid bath. The wafer and the bath are separated at a controlled rate as the wafer is positioned in a gas-filled volume. The controlled rate is generally not less than the maximum rate at which a meniscus will form between the liquid bath and the surface of the wafer when the liquid bath and the wafer are separated. The gas-filled volume is defined by a hot chamber that continuously transfers thermal energy to the wafer in the gas-filled volume. Hot gas directed into the volume and across the wafer and out of the volume continuously transfers thermal energy to the wafer.
    Type: Grant
    Filed: August 28, 2002
    Date of Patent: September 9, 2003
    Assignees: Lam Research Corporation, Oliver Design, Inc.
    Inventors: Oliver David Jones, Kenneth C. McMahon, Jonathan E. Borkowski, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust, James M. Olivas
  • Patent number: 6584703
    Abstract: The invention relates to a method by means of which the machine-direction moisture of a web being calendered or coated and calendered can be controlled in an optimal manner that takes into account moisture content changes along the entire path of the coating and drying process. Advantageously, all the dryers and the calender of the coater section are controlled in an integrated manner in order to obtain a controlledly processed product which is optimized in regard to energy consumption and product quality. Each process section and unit contributing to the drying of the web is identified by means of a mathematical submodel describing the specific evaporation rate in the respective process section/unit and, by chaining these submodels, a composite model is compiled for the entire process, whereby the composite model makes it possible to manage the drying operation in the process so that the individual units are controlled as a portion of the overall process.
    Type: Grant
    Filed: October 1, 2001
    Date of Patent: July 1, 2003
    Assignee: Metso Paper, Inc.
    Inventors: Tapio Mäenp{umlaut over (aa)}, Vesa Ijäs
  • Publication number: 20030115773
    Abstract: A paper web drying apparatus and process is provided in which the heated air drying medium is replaced with between 10 percent to 100 percent of live steam. The addition of a steam component to the drying medium provides for a higher drying temperature to be supplied to the wet moving web. The introduction of live pressurized steam contributes to the load of force of the drying medium, thereby decreasing the energy requirements of blower motors. The introduction of pressurized live steam also lowers the free atmospheric oxygen content of the drying medium which reduces the burning or scorch hazard associated with high temperature drying of a cellulose web.
    Type: Application
    Filed: December 21, 2001
    Publication date: June 26, 2003
    Applicant: Kimberly-Clark Worldwide, Inc.
    Inventors: Philip S. Lin, Ronald F. Gropp, Kevin B. Sartain
  • Publication number: 20030115772
    Abstract: A high speed dryer section has single-wire draw drying groups (R1, RN). A paper or board web (W) is supported by a wire (F) as it meanders over drying cylinders (20) in an upper row and reversing cylinders/rolls (21) in a lower row. A first cylinder drying group (R1) has at least five drying cylinders. In the first cylinder drying group (R1) a runnability component (30) is placed in a pocket space defined by every two successive drying cylinders (20) and the reversing roll (21) between them and by the drying wire (F) for applying a high under-pressure of 1000-8000 Pa to an area (50Y) in which the web (W) separates from the drying cylinder (20), and by which runnability component (30) a lower under-pressure of 100-500 Pa is produced in at least part of the rest of the pocket space (T).
    Type: Application
    Filed: December 18, 2002
    Publication date: June 26, 2003
    Inventors: Kari Juppi, Antti Komulainen
  • Patent number: 6581300
    Abstract: A method and apparatus for drying veneer wherein the feeder upstream of the drying station displaces the veneer at different speeds on the right and left sides of the transport path of the veneer as seen in the direction of transport so as automatically to impart an inclined orientation of the veneer of 20° to 60° to a line perpendicular to the transport direction before the veneer reaches the drying station. In the drying station and the cooling station the veneer retains this inclined orientation and in these stations the veneer is subjected to multiple rerouting or the application of pressure.
    Type: Grant
    Filed: December 20, 2001
    Date of Patent: June 24, 2003
    Assignee: Babcock-BSH GmbH
    Inventors: Ingo Grebe, Helmut Wünsche
  • Publication number: 20030110660
    Abstract: A drying section of a machine for the manufacture of a material web, in particular of a paper or of a board web, comprises a smoothing nip which is extended in the web running direction and is formed between two pressing areas lying opposite one another of which at least one is formed by a shoe roll, with at least 70%, and preferably at least 90%, of the outer shoe roll diameter lying above the machine base.
    Type: Application
    Filed: October 17, 2002
    Publication date: June 19, 2003
    Inventor: Jens Muller
  • Publication number: 20030106239
    Abstract: A drying system for drying a semiconductor substrate is provided. The drying system includes: a chamber for housing a vapor distributor and a fluid bath, said fluid bath being disposed in a lower portion of the chamber and said distributor being disposed in an upper portion of the chamber for distributing vapor for drying the substrate; and a fluid flow system for supplying fluid flow into said fluid bath for cleaning and drying the substrate and for draining said fluid from the fluid bath, wherein the chamber includes a plurality of exhaust vents disposed at the upper portion for venting the vapor.
    Type: Application
    Filed: January 29, 2002
    Publication date: June 12, 2003
    Inventors: Hun-jung Yi, Ki-seok Lee, Bo-yong Lee, Sang-oh Park, Pil-kwon Jun, Sang-mun Chon, Kyung-dae Kim
  • Publication number: 20030101615
    Abstract: An apparatus and a method for preventing a wafer mapping system of an SMIF system from being polluted by a corrosive gas remaining on wafers according to the present invention are disclosed. The wafer mapping system includes a plurality of mirrors and sensors used to detect the positions of the wafers. The apparatus of the prevent invention comprises a pipe having a plurality of holes thereon and a purge gas flowing inside the pipe, and is characterized in that the purge gas is emitted out from the plurality of holes toward the mirrors of the wafer mapping system, thereby preventing the mirrors from being polluted by the corrosive gas remaining on the wafers. The method of the prevent invention is characterized by emitting a purge gas from a pipe toward the mirrors of the wafer mapping system, thereby preventing the mirrors from being polluted by the corrosive gas remaining on the wafers.
    Type: Application
    Filed: December 5, 2001
    Publication date: June 5, 2003
    Applicant: PROMOS TECHNOLOGIES, INC.
    Inventors: San-Pen Chen, Shun-Lian Wu, William Wang
  • Publication number: 20030084587
    Abstract: An apparatus for performing contaminant sensitive processing on a substrate. A substrate load chamber receives the substrate from an ambient contaminant laden environment, and isolates the substrate from the ambient contaminant laden environment. The substrate load chamber further forms a first environment of intermediate cleanliness around the substrate. A substrate pass through chamber receives the substrate from the substrate load chamber, and isolates the substrate from the intermediate cleanliness of the first environment of the substrate load chamber. The substrate pass through chamber further forms a second environment of high cleanliness around the substrate. A substrate transfer chamber receives the substrate from the substrate pass through chamber, and isolates the substrate from the high cleanliness of the second environment of the substrate pass through chamber.
    Type: Application
    Filed: December 18, 2002
    Publication date: May 8, 2003
    Applicant: LSI Logic Corporation
    Inventors: Kiran Kumar, Zhihai Wang, Rudy Rios, Wilbur G. Catabay, Richard D. Schinella
  • Patent number: 6555013
    Abstract: A method and apparatus for treating an aqueous-containing sludge in which the sludge is filtered on an elongate moving sheet of a water permeable unwoven fabric on paper. The moving sheet is folded and compressed between rollers whereby to express water therefrom. The folded moving sheet and contained sludge is dried, and the dried sheet and sludge is incinerated. Combustion heat from the incineration step is used in the drying step.
    Type: Grant
    Filed: June 6, 2001
    Date of Patent: April 29, 2003
    Assignee: Omega Co., Ltd.
    Inventors: Shinichi Nakamura, Kunihiko Fukuzuka, Kenji Nagayoshi
  • Patent number: 6553689
    Abstract: A vapor collection method and apparatus capable of capturing vapor compositions without substantial dilution. The method and apparatus utilize a material that has a surface with an adjacent gas phase. A chamber is positioned in close proximity to a surface of the material. The position of the chamber creates a relatively small gap between the surface of the material and the chamber. The adjacent gas phase between the chamber and the surface define a region possessing an amount of mass. At least a portion of the mass is drawn through the region by induced flow. The utilization of a small gap limits the flow of mass that is external to the chamber from being swept through the chamber by induced flow.
    Type: Grant
    Filed: September 21, 2001
    Date of Patent: April 29, 2003
    Assignee: 3M Innovative Properties Company
    Inventors: Nirmal K. Jain, Peter T. Benson, James L. Capps, William Blake Kolb, Eldon E. Lightner, Norman L. Rogers, Jr., Robert A. Yapel
  • Publication number: 20030074805
    Abstract: A method and apparatus for impingement of fluid onto a moving surface. The apparatus includes an asymmetric slot nozzle having an opening formed between an upstream wall and a downstream wall. The nozzle is disposed generally adjacent the surface onto which the fluid is to be impinged forming an impingement distance between each of the walls of the nozzle and the surface. The impingement distance of the upstream wall is greater than the impingement distance of the downstream wall such that at least a portion of the fluid is delivered through the nozzle in a direction that is counter to the machine direction.
    Type: Application
    Filed: October 22, 2001
    Publication date: April 24, 2003
    Applicant: The Procter & Gamble Company
    Inventor: Savas Aydore
  • Patent number: 6543156
    Abstract: A system for high-pressure drying of semiconductor wafers includes the insertion of a wafer into an open vessel, the immersion of the wafer in a liquid, pressure-sealing of the vessel, pressurization of the vessel with an inert gas, and then the controlled draining of the liquid using a moveable drain that extracts water from a depth maintained just below the gas-liquid interface. Thereafter, the pressure may be reduced in the vessel and the dry and clean wafer may be removed. The high pressure suppresses the boiling point of liquids, thus allowing higher temperatures to be used to optimize reactivity. Megasonic waves are used with pressurized fluid to enhance cleaning performance. Supercritical substances are provided in a sealed vessel containing a wafer to promote cleaning and other treatment.
    Type: Grant
    Filed: March 18, 2002
    Date of Patent: April 8, 2003
    Assignee: Semitool, Inc.
    Inventors: Eric J. Bergman, Ian Sharp, Craig P. Meuchel, H. Frederick Woods
  • Publication number: 20030056391
    Abstract: The present invention provides a drying method of a substrate surface and a supporting fixture of substrate used in such a method, which, in the drying treatment applied after a chemical and/or water dipping treatment of a semiconductor wafer or a liquid crystal substrate, permits improvement of substrate product yield and is excellent in economic merits, particularly without causing defective drying of the substrate surface near the carrier holding section.
    Type: Application
    Filed: September 17, 2002
    Publication date: March 27, 2003
    Applicant: m .FSI LTD.
    Inventor: Satoshi Shikami
  • Publication number: 20030056911
    Abstract: A tissue sheet is made using a modified wet pressing machine in a modified wet pressing process employing an integrally sealed air press. After initial formation and conventional vacuum dewatering, the wet web is conformed to the surface contour of a relatively coarse fabric to give the web a textured surface. By creating a pressure differential across the web of at least 30 inches of mercury and an air stream through the web of at least 500 SCFM/in2, the air press noncompressively dewaters the wet web to a consistency of about 30 to about 40 percent prior to a heated drying cylinder. The web is dried to substantially preserve its three-dimensional, throughdried-like texture. The process provides a web having an exceptionally high degree of bulk and absorbency not expected in wet-pressed products.
    Type: Application
    Filed: July 18, 2002
    Publication date: March 27, 2003
    Inventors: Michael Alan Hermans, Frank Stephen Hada, Steven Jack Hickey
  • Publication number: 20030051369
    Abstract: A method and apparatus for drying a moving material web, including pre-drying the web in an infrared dryer including at least one infrared radiator and drying the web in an air dryer including a dryer air, the air dryer operated such that a heat transfer coefficient between the dryer air and the web progresses in an ascending way as viewed in the direction of web travel.
    Type: Application
    Filed: September 17, 2002
    Publication date: March 20, 2003
    Inventor: Richard Aust
  • Publication number: 20030051371
    Abstract: A coating device for coating a coating solution on a web has a roller and a weir which partially constructs a solution store space. In the solution store space the coating solution is stored. When the web sequentially moves in a direction, the roller rotates and the solution in the solution store space is supplied on the web. Thereby a part of the solution overflows the weir such that another part of the solution may remain on the web to have a constant width in a widthwise direction of the web. A drying device has plural drying zones in which the web is fed after the coating of the coating solution. One of the drying zones is neighbored to the coating device. A top of the plural drying zones is constructed of a blow regulation member so as to confront to the solution on the web. The blow regulation member has holes through which is exhausted a gas evaporated from the layer of the solution on the web.
    Type: Application
    Filed: July 17, 2002
    Publication date: March 20, 2003
    Applicant: FUJI PHOTO FILM CO., LTD.
    Inventors: Seiji Ishizuka, Shinji Hikita, Tomonari Ogawa, Toshio Shibata, Takashi Nawano, Hidetomo Itoh
  • Patent number: 6533872
    Abstract: A method for treating substrates, such as silicon wafers, wherein the substrates are immersed for some time in a bath containing a liquid and are taken therefrom so slowly that practically all of the liquid remains in the bath. The substrates are brought from the liquid directly into contact with a vapor of an organic solvent which is mixed with a carrier gas and introduced from gas leads having outlet nozzles. The vapor is miscible with the liquid to yield a mixture having a surface tension lower than that of the liquid, and which does not condense on the substrates. No drying marks with organic or metallic residues or other contaminations remain on the substrates.
    Type: Grant
    Filed: November 13, 2000
    Date of Patent: March 18, 2003
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Adriaan F. M. Leenaars, Jacques J. Van Oekel
  • Patent number: 6513263
    Abstract: The ventilator is used to ventilate an offset pocket in the drying section of a papermaking machine. The papermaking machine comprises a row of spaced-apart upper drying rolls and a row of spaced-apart lower drying rolls. It also comprises two rows of spaced-apart felt rolls disposed intermediate the upper drying rolls and the lower drying rolls, respectively, and a paper web intermittently carried by two felts entrained over the upper drying rolls and over the lower drying rolls, respectively. The ventilator comprises a ventral face and a dorsal face. The ventral face comprises at least one ventral orifice disposed adjacent to the felt and the dorsal face comprises at least one dorsal orifice disposed adjacent to a combined draw of felt and paper web.
    Type: Grant
    Filed: May 11, 2001
    Date of Patent: February 4, 2003
    Assignee: Enerquin Air Inc.
    Inventor: Rémi Turcotte
  • Publication number: 20030009904
    Abstract: When atmosphere inside a wafer carrier is replaced by introducing a gas into the wafer carrier from a gas inlet provided to the wafer carrier that can accommodate wafers. At the same time, the atmosphere inside the wafer carrier is sucked to make an inside pressure negative relative to an outside pressure.
    Type: Application
    Filed: July 10, 2002
    Publication date: January 16, 2003
    Applicant: SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.
    Inventor: Kenji Tokunaga
  • Patent number: 6491761
    Abstract: The present invention is directed to a mothod for preventing the formation of additional surface stains on destained steel sheet processed in a continuous pickle line operation.
    Type: Grant
    Filed: July 24, 2000
    Date of Patent: December 10, 2002
    Assignee: Bethlelem Steel Corporation
    Inventors: John W. Wray, Darrell E. Murphy, Michael Pilnock
  • Publication number: 20020162243
    Abstract: Pulp fibers can be treated with chemical additives with a minimal amount of unretained chemical additives present later in the process water. The present invention is a method for preparing chemically treated pulp fiber. A fiber slurry is created comprising process water and pulp fibers. The fiber slurry is transported to a web-forming apparatus of a pulp sheet machine thereby forming a wet fibrous web. The wet fibrous web is dried to a predetermined consistency thereby forming a dried fibrous web. The dried fibrous web is treated with a chemical additive thereby forming a chemically treated dried fibrous web. The dried fibrous web contains chemically treated pulp fibers. The chemically treated pulp fibers retain from between about 10 to about 100 percent of the applied amount of the chemical additive when the chemically treated pulp fibers are redispersed in water.
    Type: Application
    Filed: March 7, 2001
    Publication date: November 7, 2002
    Inventors: Troy Michael Runge, Louise Cynthia Ellis Coe, Mike Thomas Goulet, Ricardo Toru Nishihata, Vera Maria Sacon
  • Patent number: 6473990
    Abstract: A micropore drying apparatus having a noncircular profile. The apparatus has a machine direction and dries a web thereon as the web or apparatus moves in the machine direction. The micropore drying apparatus comprises a micropore drying medium which has pores therethrough smaller than the interstitials in the web to be dried thereon. The micropore drying medium may be movable or stationary, as desired. The noncircular profile may have a major axis which is substantially vertically oriented. This arrangement provides the advantage that greater residence time for the web to be dried thereupon is provided, without increasing the machine direction footprint.
    Type: Grant
    Filed: August 14, 2001
    Date of Patent: November 5, 2002
    Assignee: The Procter & Gamble Company
    Inventors: Paul Dennis Trokhan, Osman Polat, Donald Eugene Ensign, Michael Gomer Stelljes, Jr.
  • Patent number: 6470597
    Abstract: A process and an apparatus for removing water from a material are disclosed. The material can be selected from the group consisting of fibrous webs, textiles, plastics, non-woven webs, building materials, or any combination thereof, and may comprise an agricultural product, a food product, a pharmaceutical product, a biotechnology product, etc. The process comprises providing a material; providing an oscillatory flow-reversing impingement gaseous media having predetermined frequency; providing a gas-distributing system designed to emit the oscillatory flow-reversing impingement gas onto the material; and impinging the oscillatory flow-reversing gas onto the material, thereby removing moisture from the material.
    Type: Grant
    Filed: May 3, 2000
    Date of Patent: October 29, 2002
    Assignee: Institute of Paper Science and Technology, Inc.
    Inventor: Gordon Keith Stipp
  • Publication number: 20020152636
    Abstract: An apparatus and method for cleaning objects having generally irregular surface features, such as reloadable photographic cameras, has a partial enclosure having opposing side walls, and a top wall joining the opposing side walls. An air ionizing element composed of an ion emitter and an air knife is arranged in the enclosure for electrostatically neutralizing the object with ions entrained in a curtain-like stream of air directed onto the object.
    Type: Application
    Filed: February 7, 2002
    Publication date: October 24, 2002
    Inventors: Gerard W. Ernst, Thomas Albano, Dean L. Smith, Klaus R. Pohl
  • Patent number: 6446358
    Abstract: Disclosed is a drying nozzle for realizing a high-efficiency drying device capable of drying an object to be processed to a sufficient degree. The drying nozzle includes a drying gas supply portion having an air supply tube for supplying air for drying a substrate whose surface is wet with a liquid by being sprayed against the surface of the substrate, and a gas/liquid mixture discharge portion which is spaced apart from the surface of the substrate by a predetermined distance to thereby make the thickness of the liquid adhering to the surface of the substrate prior to the drying constant and which has a porous material having a large number of through-holes for discharging the air/liquid mixture consisting of air and the liquid,from the surface of the substrate, the drying gas supply portion and the gas/liquid mixture discharge portion being arranged along the surface of the object so as to be adjacent to each other.
    Type: Grant
    Filed: July 14, 2000
    Date of Patent: September 10, 2002
    Assignee: Alps Electric Co., Ltd.
    Inventors: Kenichi Mitsumori, Nobuaki Haga