Abstract: A data input apparatus can communicate with an imaging unit capturing an image of a subject to output image data, and includes a display unit displaying a screen including data input areas, and a processor. The processor includes: a setting portion setting data input to the data input area; an instruction position acquiring portion acquiring an instruction position based on a relative position between a display surface of the display unit and a recording medium included in image data output by the imaging unit; an information acquiring portion acquiring information stored in the recording medium based on the image data; and an input information acquiring portion acquiring input information available for input to the data input area among the acquired information. If the acquired instruction position is a prescribed position, the setting portion sets the acquired input information as the data input to the data input area.

Abstract: A device for establishing one or several recording regions from an image region is provided. The device includes a neighborhood determining unit for determining whether two objects of the image region are neighboring. Additionally, the device includes a graph set determining unit for determining a graph set such that the graph set includes one or several complete graphs, each element of the complete graph being neighboring to every other element of this complete graph. Furthermore, the device includes a selection set determining unit configured to add a complete graph to the selection set when one of the elements of an object set is included by precisely this one of the complete graphs of the graph set. In addition, the device includes a recording region determining unit for determining the one or several recording regions based on the complete graphs of the selection set.

Abstract: Various examples are directed to systems, devices, and methods effective to generate updated pixel values in a stitched image. A processor may be programmed to identify a first block of pixels located in a region of a stitched image. The region may include pixels representing parallax views of a portion of a physical environment. The processor may determine a first average pixel value of pixels of the first block. The processor may identify a second block of pixels in the region. The processor may determine a second average pixel value of pixels of the second block. The processor may generate an updated pixel value for a pixel location of the first block or the second block. The updated pixel value may be based at least in part on the first average pixel value and the second average pixel value.

Abstract: The present invention relates in general to microscopy systems. In particular, the present invention relates to microscopes rendering digital images of samples, with the capability to digitally control the focus of the microscope system, and the software used to control the operation of the digital microscope system. Further, the present invention relates to a microscope structure that allows for compact and multi-functional use of a microscope, providing for light shielding and control with samples that require specific light wavelength characteristics, such as fluorescence, for detection and imaging.

Abstract: A digital microscope having a pivoting stand, a method for calibrating said stand and a method for automatic focus tracking and image center tracking upon actuation of the pivoting stand. The pivoting stand includes an angle sensor for determining a current pivot angle of the pivot arm (07). The current pivot angle is processed in the control unit to execute automatic focus tracking and/or center tracking upon actuation of the pivot arm (07). Calibration is performed using two pivot angles, wherein deviating focus and image center positions are ascertained, and a pivot-angle-dependent function for focus and the image center position is ascertained therefrom.

Abstract: Systems and methods are provided for determining a velocity or an inflation rate of a droplet in a microfluidic channel. The droplet is exposed to two or more temporally separated flashes of light, each flash including light of one wavelength band, and imaged using a detector configured to distinguish light in the wavelength bands. Two or more images of the droplet are acquired, each corresponding to one of the flashes, and all within a single video frame or photographic exposure. The images can be processed separately and the position or size of the droplet in each image is calculated. A velocity or inflation rate is then determined by dividing the change in position or size by the amount of time allowed to pass between the flashes.

Abstract: The disclosure relates to methods and systems for automatically focusing multiple images of one or more objects on a substrate. The methods include obtaining, by a processor, a representative focal distance for a first location on the substrate based on a set of focal distances at known locations on the substrate. The methods also include acquiring, by an image acquisition device, a set of at least two images of the first location. The images are each acquired using a different focal distance at an offset from the representative focal distance. The methods further include estimating, by a processor, an ideal focal distance corresponding to the first location based on comparing a quality of focus for each of the images, and storing the estimated ideal focal distance and the first location in the set of focal distances at known locations.

Abstract: A lens unit (120) shows longitudinal chromatic aberration and focuses an imaged scene into a first image for the infrared range in a first focal plane and into a second image for the visible range in a second focal plane. An optical element (150) manipulates the modulation transfer function assigned to the first and second images to extend the depth of field. An image processing unit (200) may amplify a modulation transfer function contrast in the first and second images. A focal shift between the focal planes may be compensated for. While in conventional approaches for RGBIR sensors contemporaneously providing both a conventional and an infrared image of the same scene the infrared image is severely out of focus, the present approach provides extended depth of field imaging to rectify the problem of out-of-focus blur for infrared radiation. An imaging system can be realized without any apochromatic lens.

Abstract: In a microscope for high resolution scanning microscopy of a sample, said microscope comprising—an illumination device for illuminating the sample, —an imaging device for scanning at least one point spot or line spot across the sample and for imaging the point spot or line spot into a diffraction-limited, stationary single image with magnification into a detection plane, —a detector device for detecting the single image in the detection plane for different scanning positions with a spatial resolution, which, taking into consideration the magnification, is at least twice as high as a full width at half maximum of the diffraction-limited single image, —an evaluation device for evaluating a diffraction pattern of the single image for the scanning positions from data of the detector device and for generating an image of the sample, said image having a resolution that is increased beyond the diffraction limit, provision is made for—the detector device to have a detector array, which has pixels and is larger than t

Abstract: An image processing apparatus, a method, and a program for allowing cells to be quantitatively observed. A computer obtains a cell membrane image obtained by performing fluorescent observation on a cell membrane of a cell serving as a sample and a tricellular tight junction (tTJ) image obtained by performing fluorescent observation on a protein localized in a tTJ of the cell. The computer derives the size of area of a region of the cell by identifying the region of each cell from the cell membrane image, derives the size of area of the region of the protein localized in the cell from the tTJ image, and dividing the obtained size of area of the region of the protein by the size of area of the region of the cell, thus calculating an index of adhesion strength of the cells. The invention can be applied to an observation system.

Abstract: An image processing device includes an input unit and an alignment unit. The input unit inputs a cell shape image and a fluorescence image. The cell shape image shows a shape of a cell in a tissue section. The fluorescence image shows expression of a specific protein as a fluorescent bright point in a region same as a region in the tissue section. The alignment unit aligns the cell shape image and the fluorescence image based on an information source detected in both the cell shape image and the fluorescence image.

Abstract: A preparation element set including an image sensor including a sensor surface, a sensor back surface, and a board; a package including a front surface, a back surface, and terminals on the back surface, the front surface touching or facing the sensor back surface; and a transparent plate facing the sensor surface with a subject placed therebetween, wherein the board includes a board surface and a board back surface, a distance between the board surface and the sensor surface is less than a distance between the board back surface and the sensor surface, a distance between the board surface and the sensor back surface is more than a distance between the board back surface and the sensor back surface, conductive holes pierce the board from the board surface to the board back surface, and conductors on the board surface are electrically connected to terminals by using the conductive holes.

Abstract: Provided is an audio reproduction device including: a light source provided in the vicinity of a speaker unit; a detection unit that detects a beat of an audio signal reproduced by the speaker, and outputs a detection signal corresponding to the beat; and a light emission control signal output unit that controls a light emission mode of the light source in accordance with the detection signal, and outputs a light emission control signal for allowing generation of white light for a short period at a peak of intensity of the light source.

Abstract: A control apparatus includes a first processing unit configured to calculate correlation information between image signals, which are respectively output from one of the pixel portions positioned in one of a plurality of first regions, a focus detection unit configured to perform focus detection on the basis of a calculation result by the first processing unit, a second processing unit configured to calculate correlation information between image signals, which are respectively output from the one of the pixel portions positioned in one of a plurality of second regions, a distribution information calculation unit configured to calculate distribution information corresponding to an object distance on the basis of a calculation result by the second processing unit, and a control unit configured to control the second processing unit and the distribution information calculation unit on the basis of the correlation information calculated by the first processing unit.

Abstract: The present invention relates to a method for determining a change in the mobility of a population of organisms over time, said method comprising: a) obtaining a first image (I1) of the population at a first time point (T1) b) obtaining a second image (I2) of the population at a second time point (T2) c) calculating the absolute differences between I1 and I2 (?D1) d) obtaining a third image (I3) of the population at a third time point (T3) e) obtaining a fourth image (I4) of the population at a fourth time point (T4) f) calculating the absolute differences between I3 and I4 (?D2). g) calculating the change between ?D1 and ?D2 to calculate a change mobility of the population as a whole.

Abstract: Systems and methods for capturing image data using a line scan camera. In an embodiment, a line scan camera captures image data of a sample as a plurality of image stripes. A processor may coarsely align two or more of the plurality of image stripes according to a synchronization process while the line scan camera is capturing at least one of the plurality of image stripes. Subsequently, the processor may also finely align the two or more image stripes using pattern matching.

Abstract: A semiconductor device capable of enhanced sub-bandgap photon absorption and detection is described. This semiconductor device includes a p-n junction structure formed of a semiconductor material, wherein the p-n junction structure is configured such that at least one side of the p-n junction (p-side or n-side) is spatially confined in at least one dimension of the device (e.g., the direction perpendicular to the p-n junction interface). Moreover, at least one side of the p-n junction (p-side or n-side) is heavily doped. The semiconductor device also includes electrical contacts formed on a semiconductor substrate to apply an electrical bias to the p-n junction to activate the optical response at target optical wavelength corresponds to an energy substantially equal to or less than the energy band-gap of the first semiconductor material. In particular embodiments, the semiconductor material is silicon.

Abstract: Provided is an optical scanning observation apparatus including: a light source unit (30) for outputting laser light; a scanning part (23) for scanning, on an object of observation (70), a condensing position of the laser light output from the light source; and a detection unit (40) for sampling signal light obtained through scanning of the laser light, and converting the signal light into an electric signal, in which a sampling time for detecting signal light per one sampling is varied in accordance with changes in scanning rate of the scanning part (24) scanning on the object of observation (70). In this manner, variation in resolution of an image resulting from changes in scanning rate per each sampling can be reduced.

Abstract: A disclosed method involves: receiving, by a processing device, a first plurality of photon count values indicating a number of photons detected by an optical system during a plurality of first time periods as a result of laser beam excitation of an observation volume of a sample during fluorescence fluctuation microscopy analysis; calculating, by the processing device based on the first plurality of photon count values, a first count rate per molecule indicating the average number of photons detected per molecule of the observation volume; and generating, by the processing device based on the first count rate per molecule, a control signal for configuring a phase modulation device of the optical system.

Abstract: A method for utilizing a multi-beam confocal scanning system to generate an image of a sample, the image having an improved resolution, is provided. An array of beams may be positioned at a first location on the sample. A first plurality of images may be captured, where each of the first plurality of images is associated with a beam of the array of beams at the first location. The array of beams may be adjusted by a specific distance to a second location on the sample, the specific distance being smaller than an optical resolution limit of the multi-beam confocal scanning system. A second plurality of images may be captured, where each of the second plurality of images is associated with a beam of the array of beams at the second location.

Abstract: A spectral image data processing apparatus which conducts multivariate analysis on spectral image data of a sample, including: a region setting unit configured to set a region of interest for performing multivariate analysis in a sample in which a difference needs to be distinguished, the region of interest being set in accordance with spectral image data of the sample; and an analysis unit configured to perform the multivariate analysis with spectral image data inside the region of interest and spectral image data of region of non-interest which is a region other than the region of interest being distinguished from each other.

Abstract: An optical imaging system includes a first diffractive optical element that receives a multi-wavelength beam of light and separates the received beam of light into diffractive orders. The optical imaging system also includes a second diffractive optical element that includes panels displaced along the second diffractive element in at least one direction, where each panel is positioned to receive and pass the multi-wavelength beam of one of the diffractive orders. A refractive optical element is positioned to receive multi-wavelength beams of the diffractive orders that pass through the second diffractive element, and an optical lens that receives the multi-wavelength beams of the diffractive orders that pass through the refractive element and focuses each of the multi-wavelength beams of the diffractive orders to a different location on an image plane at the same time.

Abstract: Method of detecting surface features of a microarray. The method includes providing a microarray to an optical scanner, wherein the microarray includes a surface having features. The method also includes carrying out a scanning process using the optical scanner, wherein the scanning process includes: (i) acquiring images of sequential regions on the surface, wherein a defocus spread is applied to the optical scanner during the acquiring, (ii) determining a focus score for the images, (iii) adjusting the optical scanner to a different defocus spread based on the focus score, and (iv) repeating (i) through (iii) at the different defocus spread, thereby acquiring images of further sequential regions on the surface. The method also includes analyzing the images to distinguish different target molecules at the features of the microarray. The images that are analyzed were acquired at the defocus spread and at the different defocus spread during the scanning process.

Abstract: An image acquisition apparatus includes an optical system, an imaging device, a movement controller, and a multiple exposure processing unit. The optical system includes an objective lens for magnifying a portion of an imaging target. The imaging device is capable of performing all-pixel simultaneous exposure and is configured to image the portion magnified by the optical system. The movement controller is configured to move a focal point of the objective lens in a thickness direction of the portion of the imaging target. The multiple exposure processing unit is configured to perform multiple exposure of the imaging device at a plurality of positions such that, for each of ranges sectioned by positions in a direction in which the focal point is movable, an average image that covers each of the ranges is obtained.

Abstract: Size reduction is achieved while also achieving both high sensitivity and high pixel density. Provided is an image acquisition device including an image acquisition element that acquires an image of a sample, a closed container that accommodates and seals the image acquisition element therein, a camera body that accommodates the closed container, and a displacement member that moves the image acquisition element relative to the camera body in a direction perpendicular to an optical axis of the image acquisition element. At least a portion of the displacement member is disposed outside the closed container.

Abstract: An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.

Abstract: A system is provided for adaptively conformed imaging of work pieces having disparate configurations, which comprises a mount unit for holding at least one work piece, and an imaging unit for capturing images of the work piece held by the mount unit. At least one manipulator unit is coupled to selectively manipulate at least one of the mount and imaging units for relative displacement therebetween. A controller coupled to automatically actuate the manipulator and imaging units executes scene segmentation about the held work piece, which spatially defines at least one zone of operation in peripherally conformed manner about the work piece. The controller also executes an acquisition path mapping for the work piece, wherein a sequence of spatially offset acquisition points are mapped within the zone of operation, with each acquisition point defining a vantage point for the imaging unit to capture an image of the work piece from.

Abstract: A system includes a visual inspection system and an image analysis system. The visual inspection system includes an inspection camera that captures images from within an interior of at least one of a utility line and a tunnel for installing a utility line, and a first communication interface that communicates image data corresponding to the images. The image analysis system includes a second communication interface that receives the image data from the visual inspection system, a model adaptation module that modifies a classifier model based on at least one of feedback data and training data, and a classifier module that implements the classifier model to identify a plurality of features in the image data corresponding to defects and that modifies the image data according to the identified plurality of features. The defects include at least one of a cross-bore, a lateral pipe, and an imperfection.

Abstract: An autofocus apparatus includes, in one embodiment, a light source; a splitter; a fiber optic circulator; an optical collimator; a balance detector; and a microprocessor. The fiber optic circulator couples one of the split light signals at a first port, to the optical collimator at a second port, and to the balance detector at the third port. The optical collimator directs the light beam from the fiber optic circulator onto a sample through a Dichroic mirror and a microscope objective. The balance detector uses another one of the split light signals as an input, and converts a light signal, reflected off of a substrate the sample is placed on, into an analog voltage signal. The microprocessor processes the output of the balance detector and position feedbacks from an adjustable microscopy stage to generate a command for moving the position of the adjustable microscopy stage to achieve a desired focus.

Abstract: A structured illumination microscopy optical arrangement includes a projection path and an imaging path. The imaging path includes an imaging sensor and imaging optical elements. The projection path includes a light generator, a pattern generating element such as a spatial light modulator (SLM), and projection optical elements including an output lens and a projector artifact suppression element (PASE) located in the projection path between the SLM and the output lens. The PASE may include birefringent material which splits respective light rays of the structured illumination pattern source light to provide at least one replication of the structured illumination pattern with an offset transverse to the projection path. The offset replication of the structured illumination pattern increases the accuracy of the system by reducing spatial harmonic errors and spurious intensity variations due to projector pixel gap artifacts which may otherwise produce errors in resulting Z-height measurements.

Abstract: An imaging system consisting of a cell-phone with camera as the detection part of an optical train which includes other components. Optionally, an illumination system to create controlled contrast in the sample. Uses include but are not limited to disease diagnosis, symptom analysis, and post-procedure monitoring, and other applications to humans, animals, and plants.

Abstract: In one example embodiment, a microscope control device a controller configured to store a plurality of images having different depth positions. In one example embodiment, the microscope control device divides the plurality of images into a plurality of sub-regions. In one example embodiment, the microscope control device, for each sub-region, generates in-focus position information which corresponds to a depth position.

Abstract: A display device is provided, which includes a display unit configured to display one or more images thereon, an operation unit configured to accept an external operation, and a controller configured to perform a display process to control the display unit to display a plurality of images without concurrently displaying identifiers that are respectively provided to the images, and a scrolling process to, in response to the operation unit accepting a scrolling operation, control the display unit to display the identifiers to be superimposed on the images, respectively, and move the images displayed thereon, together with the identifiers in a direction responsive to the scrolling operation.

Abstract: A method for operating an imaging system of a machine vision inspection system to provide an extended depth of field (EDOF) image. The method comprises (a) placing a workpiece in a field of view; (b) periodically modulating a focus position of the imaging system without macroscopically adjusting the spacing between elements in the imaging system, the focus position is periodically modulated over a plurality of positions along a focus axis direction in a focus range including a workpiece surface height; (c) exposing a first preliminary image during an image integration time while modulating the focus position in the focus range; and (d) processing the first preliminary image to remove blurred image contributions occurring in the focus range during the image integration time to provide an EDOF image that is focused throughout a larger depth of field than the imaging system provides at a single focal position.

Abstract: At least two chemically different substances of interest of an unstained biological specimen that for each a substance image is generated, indicating for every region of the image an amount of the substance. A multicolor image is generated on the basis of the substance images.

Abstract: The disclosure relates to methods and systems for automatically focusing multiple images of one or more objects on a substrate. The methods include obtaining, by a processor, a representative focal distance for a first location on the substrate based on a set of focal distances at known locations on the substrate. The methods also include acquiring, by an image acquisition device, a set of at least two images of the first location. The images are each acquired using a different focal distance at an offset from the representative focal distance. The methods further include estimating, by a processor, an ideal focal distance corresponding to the first location based on comparing a quality of focus for each of the images, and storing the estimated ideal focal distance and the first location in the set of focal distances at known locations.

Abstract: A method of using a scanning microscope to rapidly form a digital image of an area. The method includes performing an initial set of scans to form a guide pixel set for the area and using the guide pixel set to identify regions representing structures of interest in the area. Then, performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions, and not scanning elsewhere in the area.

Abstract: Among other things, an imaging device has a photosensitive array of pixels, and a surface associated with the array is configured to receive a specimen with at least a part of the specimen at a distance from the surface equivalent to less than about half of an average width of the pixels.

Abstract: An image processing device 20 acquires captured images obtained by imaging a sample including a target cell, performs machine learning based on a first image feature quantity, sets a plurality of object regions for detecting the target cell in the captured images, and displays the plurality of object regions in an order determined based on the first image feature quantity of each of the plurality of object regions. The image processing device 20 calculates a second image feature quantity in each of the plurality of object regions, sorts the plurality of displayed object regions in an order of the second image feature quantity similar to the second image feature quantity of a reference object region selected from among the plurality of object regions, and displays the plurality of object regions.

Abstract: Systems and techniques for an optical scanning microscope and/or other appropriate imaging system includes components for scanning and collecting focused images of a tissue sample and/or other object disposed on a slide. The focusing system described herein provides for determining best focus for each snapshot as a snapshot is captured, which may be referred to as “on-the-fly focusing.” The devices and techniques provided herein lead to significant reductions in the time required for forming a digital image of an area in a pathology slide and provide for the creation of high quality digital images of a specimen at high throughput.

Abstract: A method and device for autofocusing in a microscope (11), wherein two preferably spot-shaped, markers (12) are generated on an object, the spacing (d) of the markers representing an indication of the defocusing of a working plane (9) in the object from the focal plane (10) of the microscope (11). A focus drive (6) displaces the working plane (9) into the focal plane (10) as a function of the marker spacing (d). In order to allow rapid and exact focusing to be performed, a detector (4) acquires an image of the markers (12) generated on the object, an evaluation unit (7a) determines the spacing of the markers (12), and a control unit (7b) adjusts, as a function of the determined marker spacing (d), the speed of the focus drive (6) at which the working plane (9) is displaced into the focal plane (10).

Abstract: Provided is a camera including a housing; an intermediate plate that divides the interior of the housing into first and second chambers; image acquisition elements disposed in the first chamber within the housing; a motor disposed in the second chamber within the housing; a pivot shaft that extends through the intermediate plate and transmits a driving force from the motor; a bearing that is provided in a through-hole area for the pivot shaft extending through the intermediate plate and seals a gap formed around the pivot shaft; and a prism that is connected to the pivot shaft in the first chamber and is moved by the driving force transmitted by the pivot shaft so as to switchably guide light from a sample to at least one of the image acquisition elements.

Abstract: A biological observation apparatus is configured as follows. Namely, the biological observation apparatus includes a marker attached to a living body in order to detect the vibration of the living body, a high-sensitivity camera which forms an observation image of the living body, a high-speed camera which forms an image of light from the marker, and an optical system including a first BA which prevents the light from the marker from entering the high-sensitivity camera.

Abstract: An image processing apparatus includes an image acquisition unit, a visual field information generation unit, and a display controller. The image acquisition unit is configured to acquire an input image having a first resolution, the input image being generated by capturing an observation image of an observation target of a user. The visual field information generation unit is configured to compare a specimen image with the input image, the specimen image including an image of the observation target and having a second resolution that is higher than the first resolution, to generate visual field information for identifying a visual field range corresponding to the input image in the specimen image. The display controller is configured to acquire information corresponding to the visual field range in the specimen image, based on the visual field information, and output a signal for displaying the information.

Abstract: Systems and methods for capturing a digital image of a slide using an imaging line sensor and a focusing line sensor. In an embodiment, a beam-splitter is optically coupled to an objective lens and configured to receive one or more images of a portion of a sample through the objective lens. The beam-splitter simultaneously provides a first portion of the one or more images to the focusing sensor and a second portion of the one or more images to the imaging sensor. A processor controls the stage and/or objective lens such that each portion of the one or more images is received by the focusing sensor prior to it being received by the imaging sensor. In this manner, a focus of the objective lens can be controlled using data received from the focusing sensor prior to capturing an image of a portion of the sample using the imaging sensor.

Abstract: The objective optical system includes a first optical system configured to collimate a divergent light flux from an object, a second optical system configured to converge the light flux from the first optical system, a beam splitter disposed between the first optical system and the second optical system, a reflector disposed on a side where the light flux from the second optical system is condensed and configured to reflect the light flux, and a third optical system configured to converge the light flux reflected by the reflector and then passing through the second optical system and the beam splitter. When a direction in which the light flux travels in the objective optical system is defined as an optical axis direction, positions of respective portions of the reflector in the optician axis direction are each changeable.

Abstract: An image-classification apparatus includes: a first feature extraction unit to acquire a feature value of each of block images obtained by segmenting an input image; an area-segmentation unit to assign each of the block images to any one of K areas based on the feature value; a second feature extraction unit to acquire, based on an area-segmentation result, a feature vector whose elements including, the number of adjacent spots, each including two block images adjacent to each other in the input image, for each combination of the areas whereto the two block images are assigned; or a ratio of the number of block images assigned to each of the K areas to all the number of block images adjacent to a block image assigned to each of the K areas; and a classification unit to classify to which of a plurality of categories the input image belongs.

Abstract: An image processor, a program and a microscope enable a TIRF image and a confocal image to be superposed simply and accurately. A reference point detection unit 111 detects, reference points, three or more images respectively from a TIRF image of a predetermined surface of a sample obtained using a total internal reflection fluorescence microscope, and a confocal image of the predetermined surface of the sample obtained using a confocal microscope. A superposing unit superposes the TIRF image and the confocal image using a coordinate transformation coefficient.

Abstract: An image acquisition apparatus includes first and second imaging elements, an image formation optical system, a subject stage that supports a subject, and a control unit. The image formation optical system forms an image of the subject on light-receiving surfaces of the first and second imaging elements. The control unit acquires imaging results by imaging a correction mark disposed on the subject stage while changing a relative position between the first imaging element and the correction mark in an optical axis direction of the image formation optical system. The control unit moves, in accordance with the imaging results, the first imaging element or subject stage in the optical axis direction so the first imaging element and the correction mark are conjugate, acquires an imaging result by imaging the correction mark, and moves, in accordance with the acquired imaging result, the second imaging element in the optical axis direction.

Abstract: The illumination optical system is configured to illuminate a sample placed on an object plane with light. The illumination optical system includes multiple light source areas which are mutually coherent and arranged separately from one another in a pupil plane of the illumination optical system. Among distances from a center of a pupil of the illumination optical system to centers of the multiple light source areas, at least one of the distances is different from the other distances.