Angle Measuring Or Angular Axial Alignment Patents (Class 356/138)
  • Publication number: 20110128527
    Abstract: A particle-moving type orientation sensor including a housing, at least one light emitter, two light receivers, and a plurality of particles. The housing has an accommodating space having four zones, which are circularly arranged. A first opening is formed on the housing and connecting to a first zone. Two second openings are formed on the housing and respectively connecting to a second zone and a fourth zone. The light emitter emits light into the accommodating space through the first opening. The light receivers respectively receive light from the accommodating space through the second openings. The particles are arranged in the accommodating space. While the particle-moving type orientation sensor is tilting, the light emitter is partially blocked by the particles, and one of the light receivers is partially blocked by the particles, the light receivers respectively receive light with predetermined intensities and output electric signals with predetermined strengths.
    Type: Application
    Filed: November 30, 2009
    Publication date: June 2, 2011
    Inventors: Tsung-Ting SUN, Chung-Ping FENG
  • Publication number: 20110128528
    Abstract: A sensor may simultaneously sense the angular position of a first rotatable member relative to a frame of reference and the angular position of a second rotatable member relative to the first rotatable member up to a maximum displacement angle. The sensor may include a first and a second disk, each of which have an annular pattern which alternates between two different levels of optical transparency. The first disk may be coupled by a first coupling to the first rotatable member; and the second disk may be coupled by a second coupling to the second rotatable member. The first and the second annular patterns may be configured such that the angular displacement of the second rotatable member relative to the first rotatable member angle is accurately indicated by the sensor up to the maximum displacement angle, regardless of how the first annular pattern is aligned with respect to the second annular pattern at the time the couplings are coupled to their respective rotatable members.
    Type: Application
    Filed: November 30, 2009
    Publication date: June 2, 2011
    Applicant: BI TECHNOLOGIES, A DELAWARE CORPORATION
    Inventor: Steven Al-Rawi
  • Patent number: 7952698
    Abstract: A drop on a sample surface in a gaseous environment has a curved surface with a symmetry axis and a defined volume. To determine the contact angle, an object is imaged based on the reflection property of the surface of the drop, the position of the object with respect to the optical axis of an optical measuring system and the position of the object with respect to the sample surface, with the symmetry axis of the drop being arranged in or in the vicinity of the optical axis. The distance between the image and the optical axis of the drop is measured. The radius of curvature of the drop is determined based on the measured distance, and the contact angle is determined from the radius of curvature.
    Type: Grant
    Filed: January 7, 2009
    Date of Patent: May 31, 2011
    Assignee: Kruess GmbH Wissenschaftliche Laborgerate
    Inventors: Bernd Friedrich, Jan-Gerd Frerichs, Eike Kortz
  • Patent number: 7940380
    Abstract: A rotary position detector includes a housing having an inner space having a reflective element therewithin. A light source emits light rays upwardly. A base supports a light detector assembly having a first number of toroidal-sector-shaped light sensors disposed in pairs about a motor shaft axis, one “A” detector element and one “B” detector element alternately disposed. A light blocker rotates with the shaft above the light detector assembly and the light source and includes a second number of opaque, equal-surface-area elements arrayed about the axis, the second number equal to one-half the first number. A circuit measures a signal from the “A” and “B” detectors relating to an amount of light falling thereon, a difference related to an angular position of the motor shaft.
    Type: Grant
    Filed: May 6, 2008
    Date of Patent: May 10, 2011
    Inventor: William R. Benner, Jr.
  • Publication number: 20110102245
    Abstract: In various aspects and embodiments, incident electromagnetic radiation is received through a subwavelength aperture in a lens, the subwavelength aperture being defined by a substrate encased in a dielectric medium.
    Type: Application
    Filed: July 8, 2010
    Publication date: May 5, 2011
    Inventor: Brett A. Williams
  • Patent number: 7933006
    Abstract: A tilt inspection apparatus which detects tilt of an object to be observed with respect to a placement surface on which the object is placed, including: a light source which irradiates light or projects an image onto the object to be observed; a light shield plate which has a first slit extended in a first direction and a second slit extended in a second direction normal to the first direction, and is disposed between the light source and the object to be observed; and a carriage mechanism which supports the light shield plate so as to be rotatable in the in-plane direction of the light shield plate, and fixes the light shield plate while aligning the first slit normal to the placement surface is provided.
    Type: Grant
    Filed: October 1, 2009
    Date of Patent: April 26, 2011
    Assignee: Renesas Electronics Corporation
    Inventor: Tooru Kumamoto
  • Publication number: 20110085160
    Abstract: A detector for receiving light impinging at a reception point and for measuring, for a plurality of angles of incidence, at least one property of the light. The detector includes a plurality of light sensors, each of which is associated with an acceptance interval (which defines the angle of incidence which a light beam must have to reach the light sensor) and at least two acceptance intervals are different from one another. The detector further includes an optical conductor for conducting a light beam from the reception point to a particular light sensor, but only if the angle of incidence of the light beam belongs to the acceptance interval associated with the particular light sensor.
    Type: Application
    Filed: June 9, 2009
    Publication date: April 14, 2011
    Inventors: Ties Van Bommel, Eduard Johannes Meijer, Rifat Ata Mustafa Hikmet
  • Patent number: 7920254
    Abstract: Aspects include metrology methods and systems for determining characteristics of conical shaft portions, such as angle of taper and crown height. In an example, a metrology system includes a fixture for supporting a workpiece. The fixture provides for translation in a longitudinal dimension, and rotation about an axis of symmetry. The system may include a sensor mounted for scanning lines including sections of the workpiece as well as control logic for coordinating translation of the workpiece to provide for an approximately constant ratio of longitudinal translation and lines scanned during scanning operations. The system may include image logic for assembling an image from image data generated during each scanning operation, edge detection logic for detecting an edge shape in each assembled image, and slope and crown height calculation logic for calculating a slope and a crown height of each of the detected edge shapes.
    Type: Grant
    Filed: October 15, 2008
    Date of Patent: April 5, 2011
    Assignee: Seagate Technology LLC
    Inventors: Ananda V. Mysore, Steve G. Gonzalez
  • Publication number: 20110075132
    Abstract: Optical fibers comprising a plurality of cleaved facets disposed at one end are disclosed. First and second facets of the plurality of cleaved facets are disposed at different angles. The optical fiber with the plurality of cleaved facets splits light from an optical component between an optical fiber core and a detector such that a portion of the light may be tapped off for monitoring. The first cleaved facet is disposed at a first angle such that a first portion of the light from an optical component is totally internally reflected into the fiber core. A second cleaved facet can be disposed at a second angle that is less than the first angle so that a second portion of light from the optical component refracts through the second facet to a detector. Methods of forming and using angle-cleaved optical fibers having a plurality of cleaved facets are also disclosed.
    Type: Application
    Filed: September 30, 2009
    Publication date: March 31, 2011
    Inventor: James Scott Sutherland
  • Publication number: 20110017905
    Abstract: A microfluidic device includes a platform having a disc shape, a chamber formed on the platform, and a home position mark formed on the platform. The at least one chamber and the home position mark are arranged at a same distance from a center of the platform. The home position mark has a light transmittance which is different from a light transmittance of the at least one chamber. A microfluidic system includes a light emitting part which emits light; a light receiving part arranged to receive the light emitted by the light emitting part; the microfluidic device arranged between the light emitting part and the light receiving part; an operating part which rotates the microfluidic device; and a control part which compares an intensity of light incident upon the light receiving part with a with a reference value to detect a reference angle of the microfluidic device.
    Type: Application
    Filed: March 12, 2010
    Publication date: January 27, 2011
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Yeong Bae YEO
  • Patent number: 7872739
    Abstract: The inner cylindrical body is mounted on the top surface of the rudder-stock; the outer cylindrical body is put on the inner cylindrical body exteriorly; the gudgeon pin provided on the top reverse surface of the outer cylindrical body is inserted into the gudgeon provided on the top surface of the inner cylindrical body; the pin protruded on the top surface of the outer cylindrical body is inserted into the chest fixated to the supports; the rotational movement checking device, that obstructs the pin to rotate, and at the same time, permits it to be displaced in the radial direction, is provided inside the chest; the scale is provided on the outer circumferential surface of the inner cylindrical body; and, the rudder angle detecting optical sensors facing the scale are mounted on the inner circumferential surface of the outer cylindrical body.
    Type: Grant
    Filed: April 23, 2008
    Date of Patent: January 18, 2011
    Assignee: Japan Hamworthy & Co., Ltd.
    Inventors: Yukio Tomita, Kenjiro Nabeshima, Takayuki Wakabayashi, Hirotaka Yamamoto
  • Patent number: 7873241
    Abstract: A method for superimposing optical information in a scanning microscope includes determining a transformation matrix, and superimposing first optical information of a CCD image and second optical information of at least one piece of second image information using the transformation matrix.
    Type: Grant
    Filed: September 27, 2005
    Date of Patent: January 18, 2011
    Assignee: Leica Microsystems CMS GmbH
    Inventors: Rafael Storz, Volker Seyfried
  • Patent number: 7865328
    Abstract: A position detecting method includes the steps of forming an image of a mark on a sensor, performing a first process that processes a raw signal obtained from the sensor with plural parameters, performing a second process that determines an edge of a signal processed by the first process for each parameter, determining a parameter from a result of the second process obtained for each parameter, and calculating a position of the mark based on a determined parameter.
    Type: Grant
    Filed: September 6, 2007
    Date of Patent: January 4, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventors: Satoru Oishi, Takehiko Suzuki
  • Patent number: 7860269
    Abstract: The invention is a method for the extraction, identification and comparison of skylines from imagery data specifically, for the purpose of accurately locating the position of a mobile platform for navigation purposes. The invention is carried out by processing images obtained using a compact mobile electro-optic device that is designed to be mounted on any mobile platform, such that a clear circumferential view of the surroundings is available. The method allows the position of the mobile platform to be determined in three dimensional space, relative to any arbitrary coordinate system; the exact map coordinates of the platform to be determined; or allows the platform to follow a previously traversed track.
    Type: Grant
    Filed: October 16, 2005
    Date of Patent: December 28, 2010
    Assignee: O.D.F. Optronics Ltd.
    Inventors: Ehud Gal, Yaron Greenhut
  • Publication number: 20100309459
    Abstract: An angle sensor, system and method employ a guided-mode resonance. The angle sensor includes a guided-mode resonance (GMR) grating and a resonance processor. The resonance processor determines an angle of incidence of a signal incident on the GMR grating. The resonance processor uses a guided-mode resonance response of the GMR grating to the signal to determine the angle of incidence. The angle sensing system includes the GMR grating, the resonance processor and further includes an optical source that produces the signal. The method includes providing a GMR grating, detecting a guided-mode resonance produced in the GMR grating when subjected to an incident signal, and determining an angle of incidence of the incident signal from one or both of a number of and a spectral distance between guided-mode resonances present in a response of the GMR grating to the incident signal.
    Type: Application
    Filed: March 4, 2008
    Publication date: December 9, 2010
    Inventors: David A. Fattal, Anna Pyayt, Raymond G. Beausoleil, Wei Wu
  • Patent number: 7847925
    Abstract: A system and method for forming acoustic beams is disclosed. One embodiment is an acoustic system configured to generate a plurality of beams non-orthogonal to a transducer array simultaneously with a vertical acoustic beam orthogonal to the array. The acoustic system includes a plurality of transducer elements arranged to form a two-dimensional array and electrically connected into rows in a first dimension and columns in a second dimension.
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: December 7, 2010
    Assignee: Teledyne RD Instruments, Inc.
    Inventor: Mark A. Vogt
  • Patent number: 7830500
    Abstract: An optoelectric angle-measuring device has a code carrier having a position code which can be detected optically as well as a scanning device in the form of a light-sensitive row or area for detecting the position code and generating a position-dependent scanning signal. The scanning device which is in the form of a scanning film, in particular, surrounds the code carrier or the code carrier essentially completely surrounds the scanning device along a circumference. This provides an extremely accurate angle-measuring device by virtue of the fact that a large part of the position code, in particular even the entire position code, can be detected.
    Type: Grant
    Filed: October 28, 2006
    Date of Patent: November 9, 2010
    Assignee: Leica Geosystems AG
    Inventors: Beat Aebischer, Heinz Lippuner, Bernhard Braunecker
  • Patent number: 7826070
    Abstract: As a light beam of a scanning optical system unit is adjusted in the state where the scanning optical system unit is assembled, its adjustment work and the assembly work of the scanning optical system are prevented from being useless. Thus, a scanning optical system adjusting device which can adjust the scanning optical system quickly and at a low cost is to be provided. A scanning optical system adjusting device according to the invention includes a static angle control unit configured to maintain a rotation angle of a rotary polygon mirror in the assembly unit of the scanning optical system at a predetermined angle and make the rotary polygon mirror static there, and a light beam parameter measuring unit configured to measure a predetermined parameter of a light beam reflected by the rotary polygon mirror maintained at the predetermined angle by the static angle control unit.
    Type: Grant
    Filed: August 17, 2007
    Date of Patent: November 2, 2010
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Tec Kabushiki Kaisha
    Inventors: Wataru Watanabe, Kazutoshi Takahashi
  • Patent number: 7817259
    Abstract: An apparatus and associated method for measuring spatial characteristics of a test object with stacked features. First and second measurement assemblies for measuring opposing first and second planar features, respectively, of a test object, by directing light beams into a gap between the features to measure a position and a static attitude of each feature.
    Type: Grant
    Filed: March 29, 2007
    Date of Patent: October 19, 2010
    Assignee: Seagate Technology LLC
    Inventors: Ronald Jacob Smith, John George Gerogeorge, Sham Sunder Nayar, Mark Curtis Fahrendorff, Shawn Stephen Silewski
  • Patent number: 7812940
    Abstract: A disclosed sensor includes a light emitter configured to transmit an emitted light beam having a range of wavelengths toward a reflecting element that is configured to produce a reflected light beam having a particular wavelength that is a function of an angle of incidence of the emitted light beam from a normal of the reflecting element. The sensor also includes a color sensor in proximity to and fixed relative to the light emitter and configured to (i) receive the reflected light beam, (ii) detect the particular wavelength of the reflected light beam, and (iii) transmit a color signal indicating the particular wavelength of the reflected light beam. The sensor further includes processing circuitry disposed in electrical communication with the color sensor and configured to receive the color signal and calculate the angle of incidence based on the particular wavelength.
    Type: Grant
    Filed: January 15, 2009
    Date of Patent: October 12, 2010
    Assignee: Optical Alchemy, Inc.
    Inventor: Marc Daigle
  • Patent number: 7813837
    Abstract: A robot control system for controlling a position and an attitude of a robot head is provided with an operating head held by an operator and a sensor for detecting a position and an attitude of the operating head. An attitude recognition portion of the control means recognizes an initial attitude of the operating head when a control switch provided at the operating head is turned on, and acquires a displacement vector from the initial attitude by a change in the attitude of the operating head. An attitude conversion portion converts the displacement vector from the initial attitude to a displacement vector from the reference attitude corresponding to a predetermined reference attitude, and the control means makes the attitude of the robot head follow the displacement vector from the reference attitude. In whatever attitude the operator holds the operating head, the position and the attitude of the robot head can follow the change in the position and the attitude of the operating head.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: October 12, 2010
    Assignee: Shibuya Kogyo Co., Ltd.
    Inventor: Takayuki Furubo
  • Publication number: 20100245806
    Abstract: Methods and devices for angle determination, and retroreflecting foils are presented. A retroreflecting foil (1) is arranged at a surface, an angle of which is going to be determined. The retroreflecting foil has a lens surface with a plurality of spherical microlenses (4) and a reflecting surface with a plurality of spherical mirrors (5) of a second main radius of curvature. The lens surface of the retroreflecting foil is illuminated, and transitions between darkness and light in radiation reflected from the retroreflecting foil, either upon changing a relative angle between the retroreflecting foil and the illuminating light or spatial transitions over the surface of the retroreflecting foil, are observed. An angle measure associated with the transitions is determined. The spherical mirrors present preferably at least one inner point (22) of a spherical mirror surface at which reflection according to the second main radius of curvature is prohibited.
    Type: Application
    Filed: July 12, 2007
    Publication date: September 30, 2010
    Applicant: ROLLING OPTICS AB
    Inventor: Axel Lundvall
  • Publication number: 20100238430
    Abstract: This invention relates to a light angle selecting light detector device comprising a detector unit which is arranged to receive light selected by a selector unit. The device comprising at least one set of light passing areas. Each set of light passing areas consists of a first light passing area having a first size, which first light passing area is located on a first surface, and a second light passing area having a second size, which second light passing area is located on a second surface. The first light passing area and the second light passing area are arranged with a lateral displacement and form a light path from the first surface to the second surface for light having an incident angle between a maximum angle and a minimum angle.
    Type: Application
    Filed: October 21, 2008
    Publication date: September 23, 2010
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.
    Inventors: Eduard Johannes Meijer, Peter Vergeer, Rifat Ata Mustafa Hikmet
  • Patent number: 7793423
    Abstract: A piping alignment tool suitable for locating where an extension of an existing pipe must pass through obstructions such as walls. The tool has a tubular shape with oppositely disposed ends. Each end is formed to have multiple coaxial sets of different-sized pipe threads that allow the tool to be threaded onto a pipe having one of the pipe thread sizes formed on the tool. The tool is also equipped to generate light beams from each end, so that the light beam can be emitted from an end of the tool opposite a pipe onto which the tool has been threaded. By threading the tool onto a pipe and emitting a light beam from the end of the tool opposite the pipe, the location of an obstruction beyond the existing pipe is illuminated by the emitted light beam.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: September 14, 2010
    Inventors: Joey Lee Loftis, Kandy Lou Loftis
  • Publication number: 20100201961
    Abstract: A system for improving substrate critical dimension uniformity is described. The system includes an exposing means for exposing a plurality of mask patterns on a first plurality of substrates at predetermined locations with common splits of focus ({Fj}) and exposure dose ({Ek}) for each of the first plurality of substrates to form a plurality of perturbed wafers. A measuring means is provided for measuring a critical dimension of the plurality of mask patterns at each of the predetermined locations for each of the plurality of perturbed wafers. An averaging means is provided for averaging the critical dimension measured at each of the predetermined locations over the plurality of perturbed wafers to form a perturbed critical dimension map. A second measuring means is provided for measuring a sidewall angle of the plurality of mask patterns at each of the predetermined locations for each of the plurality of perturbed wafers.
    Type: Application
    Filed: April 23, 2010
    Publication date: August 12, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shinn-Sheng Yu, Chih-Ming Ke, Jacky Huang, Chun-Kuang Chen, Tsai-Sheng Gau
  • Publication number: 20100201970
    Abstract: A method and system for monitoring a fleet-angle of a cable. An embodiment may monitor the fleet-angle of a cable being spooled or unspooled in multiple radial directions and without use of a mechanical monitoring apparatus. The method and system may employ a fleet angle sensor device having a bell-shaped aperture across which propagate one or more collimated light beams that may be used to detect excessive fleet-angle of the cable. The light beams may be generated by a fleet-angle sensor disposed in the fleet angle sensor device proximate to the aperture. Various light-beam patterns within the aperture may provide different advantages when determining deviations of the cable from the aperture center axis.
    Type: Application
    Filed: February 9, 2009
    Publication date: August 12, 2010
    Applicant: Lockheed Martin Corporation
    Inventor: Alain Pellen
  • Publication number: 20100182595
    Abstract: A three dimensional light measuring apparatus, and more particularly, to a light measuring apparatus that three dimensionally measures the light emitted from an optical object without moving the optical object or the light measuring apparatus using a hemispherical scattering unit having a scattering layer is provided.
    Type: Application
    Filed: May 23, 2007
    Publication date: July 22, 2010
    Inventor: Min Jun Jang
  • Publication number: 20100171823
    Abstract: A wafer has an annular ridge formed along an outer periphery thereof to serve as a reinforcing portion, and a circuit pattern surrounded with the reinforcing portion. The wafer is placed on a wafer placement plane of a holding stage in a state that the circuit pattern is directed downward. The wafer placement plane is larger in size than the wafer. On the holding stage, a center of the wafer is aligned with a center of the holding stage in such a manner that a plurality of guide pins are engaged with relevant cutout portions formed on the reinforcing portion. Then, the holding stage rotates while suction-holding the reinforcing portion of the wafer, and simultaneously a photosensor detects a portion for alignment formed on the outer periphery of the wafer.
    Type: Application
    Filed: December 29, 2009
    Publication date: July 8, 2010
    Inventors: Masayuki Yamamoto, Satoshi Ikeda
  • Publication number: 20100165331
    Abstract: A method for obtaining an incident angle ?i is provided. The method is used in a panel having at least one icon, wherein the at least one icon has a plurality of protrusions, and a light-emitting source is disposed under the at least one icon. The method includes steps of obtaining a distance W between two centers of two bottoms of two trenches formed at two sides of one of the plurality of protrusions; obtaining a half of the distance W; obtaining a vertical distance H between the light-emitting source and a center of the distance W; and performing an inverse trigonometric function operation for the half of the distance W over the vertical distance H so as to obtain the incident angle ?i.
    Type: Application
    Filed: September 28, 2009
    Publication date: July 1, 2010
    Inventors: Sheng Chung Chen, Chin Yi Wu
  • Publication number: 20100162566
    Abstract: The invention relates to a tool for tuning the pitch of the blades of a model propeller (50) with pivoting blades, characterized in that it comprises: means (2, 13-16) for mounting the model propeller in the tool, able to make it possible to position the propeller in such a way that its axis of rotation coincides with a fixed reference axis (3) of the tool, and to place each blade of the propeller successively in a measurement position, optical means (4, 8-11) for determining the angle between a chord of a blade (51) in measurement position and a fixed reference plane of the tool orthogonal to the reference axis on the basis of two points (5, 6), referred to as measurement points, sighted by the said optical means on the suction face of the said blade in measurement position. The invention extends to a tool set additionally comprising at least one standard propeller provided with fixed blades of different pitches, and to a tuning method using the tool or the tool set according to the invention.
    Type: Application
    Filed: December 22, 2009
    Publication date: July 1, 2010
    Applicant: Airbus Operations S.A.S.
    Inventors: Jean Marc MERCIER, Philippe DE LAROQUE, Thierry BERGEAUD, Jean Luc LARCHER, Jean Marc PROSPER, Viken MEKHSIAN, Maurice DUFOUR
  • Publication number: 20100149518
    Abstract: The present invention relates to a measuring instrument and methods for such a measuring instrument for tracking a moving object, measuring a distance to an object. According to the invention, sets of target position data including at least horizontal (Ha) and vertical angle (Va) between the measuring instrument (1) and said at least one target (9) in consecutive measurements during a measurement session are obtained (40; 50; 60; 70); a model describing a path of and/or a distance to the target (9) is calculated; at least a present position of the target is estimated (44; 53; 65; 74) using the model; and, the estimated position of the target (9) is used (45; 56; 67; 79) when searching for the target (9).
    Type: Application
    Filed: March 8, 2007
    Publication date: June 17, 2010
    Applicant: TRIMBLE AB
    Inventors: Mikael Nordenfelt, Thomas Klang
  • Publication number: 20100149524
    Abstract: The present invention relates to a method and a device for determining the spatial position of a sensor, in which a rough position information initially is determined by rough detection of the position of the sensor, and then the more accurate position of the sensor is obtained by measuring at least three reflectors mounted on the sensor with a laser tracker, wherein the search region of the laser of the laser tracker is limited for the reflectors with reference to the rough position information.
    Type: Application
    Filed: June 11, 2009
    Publication date: June 17, 2010
    Applicant: STEINBICHLER OPTOTECHNIK GMBH
    Inventors: Thomas Mayer, Thomas Nasswetter, Marcus Steinbichler, Andreas Weber
  • Publication number: 20100147328
    Abstract: A foreign matter removal method that removes foreign matter attached to a surface of a substrate having been subjected to predetermined processing. An edge of a rotating substrate mounted on a mounting stage is irradiated with misalignment measurement laser light. The misalignment measurement laser light other than the laser light blocked by the edge of the substrate is received, and power thereof is detected. The amount of misalignment of the substrate is calculated based on the detected power of the misalignment measurement laser light and a detected rotation angle of the rotating substrate. The misalignment of the substrate is corrected for based on the calculated amount of misalignment. After that, foreign matter removal laser light is irradiated, and a process gas that is to react with the foreign matter is jetted to the edge of the substrate. Consequently, the foreign matter attached to the substrate is decomposed and removed.
    Type: Application
    Filed: December 14, 2009
    Publication date: June 17, 2010
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Takehiro SHINDOU
  • Publication number: 20100128259
    Abstract: A laser tracker system for measuring six degrees of freedom may include a main optics assembly structured to emit a first laser beam, a pattern projector assembly structured to emit a second laser beam shaped into a two-dimensional pattern, and a target. The target may include a retroreflector and a position sensor assembly. A center of symmetry of the retroreflector may be provided on a different plane than a plane of the position sensor assembly. A method of measuring orientation of a target may include illuminating the target with a laser beam comprising a two-dimensional pattern, recording a position of the two-dimensional pattern on a position sensor assembly to create a measured signature value of the two-dimensional pattern, and calculating an orientation of the target based on the measured signature value.
    Type: Application
    Filed: November 17, 2009
    Publication date: May 27, 2010
    Applicant: FARO TECHNOLOGIES, INC.
    Inventors: Robert E. Bridges, Lawrence B. Brown, John M. Hoffer, JR., Kevin R. Ackley
  • Publication number: 20100123398
    Abstract: A precision approach path indicator system (PAPI) including multiple LHA indicators and power sources. Each LHA indicator comprises several assembly modules, with each module made up of several red and white LEDs, several collimating lens, one optical combiner, and one projection lens set. From a side view of the module, the red LEDs are placed on top of white LEDs, with a collimating lens in front of each LED. The optical combiner is in front of both the red and white LEDs, slightly above the white LEDs in vertical placement. The optical combiner has a reflective coating on the bottom surface, and a red light filter coating on the projection surface. The combined beam of light is projected out through a projection lens at front of the assembly module.
    Type: Application
    Filed: November 12, 2009
    Publication date: May 20, 2010
    Inventors: Rongsheng Tian, Yong Tian
  • Publication number: 20100118296
    Abstract: An apparatus has a first plate having a first array of holes, with a first plate alignment hole having a smaller size than the other holes in the array, a second plate having a second array of holes to be alignable to the first array of holes, a second plate alignment hole having a smaller size than the other holes in the array, and the first plate alignment hole and the second plate alignment hole having different positions. A method of aligning plates provides a first plate having a top and bottom and first array of holes including a first plate alignment hole having a size smaller than the other holes in the first array, places a second plate having a second array of holes on the top of the first plate such that the first array of holes and the second array of holes align, directs light at the bottom of the first plate, locates a profile of the first plate alignment hole in the second array of holes to verify alignment.
    Type: Application
    Filed: January 18, 2010
    Publication date: May 13, 2010
    Applicant: XEROX CORPORATION
    Inventor: James M. Stevenson
  • Publication number: 20100118305
    Abstract: To measure the rotation angle of two objects rotating in relation to each other, a transmitter (12) emits at least two linearly polarized light rays (a, b, d, c, d), whose polarization planes are rotated relative to one another. The light passes through a polarization filter (16), which revolves relative to the transmitter in dependence on the angle of rotation. The intensity of the light rays (a, b, d, c) is modulated in phase-shifted fashion. The intensity of the light that passes through the polarization filter (16) is measured by a receiver (18) and is evaluated as a signal that is dependent on the rotation angle.
    Type: Application
    Filed: November 13, 2009
    Publication date: May 13, 2010
    Applicant: SICK STEGMANN GmbH
    Inventors: Josef Siraky, Mark Johnson
  • Patent number: 7702126
    Abstract: A method and apparatus for utilizing a machine vision vehicle wheel alignment system to measure an orientation of one or more vehicle supporting surfaces of a vehicle lift system, and to measure and compensate one or more vehicle measurements relative to the vehicle supporting surface of the vehicle lift system.
    Type: Grant
    Filed: December 15, 2004
    Date of Patent: April 20, 2010
    Assignee: Hunter Engineering Company
    Inventors: Timothy A. Strege, Patrick Callanan, David A. Voeller, Mark S. Shylanski
  • Patent number: 7701564
    Abstract: Embodiments of the present invention include a method for measuring an angle between a first surface and a second surface of an object. The method includes rotating an object around a center axis of the object and shining a light source perpendicular to the center axis of the object. The method further includes measuring an intensity of a reflected light with respect to time and determining an angle between two or more surfaces of the object based on the intensity of the reflected light with respect to time.
    Type: Grant
    Filed: May 18, 2005
    Date of Patent: April 20, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Mike Babin, Stephen Eichblatt, Xiao Z. Wu
  • Patent number: 7693325
    Abstract: A system and methods for transprojection of geometry data acquired by a coordinate measuring machine (CMM). The CMM acquires geometry data corresponding to 3D coordinate measurements collected by a measuring probe that are transformed into scaled 2D data that is transprojected upon various digital object image views captured by a camera. The transprojection process can utilize stored image and coordinate information or perform live transprojection viewing capabilities in both still image and video modes.
    Type: Grant
    Filed: January 14, 2004
    Date of Patent: April 6, 2010
    Assignee: Hexagon Metrology, Inc.
    Inventors: Sandeep Pulla, Homer Eaton
  • Patent number: 7688432
    Abstract: A rotary position detector includes a housing and a light source positioned to emit light rays onto a light detector assembly having a first number of toroidal-sector-shaped light sensors, which are disposed in “A,B” pairs about a motor shaft axis so that each “A” detector is circumferentially positioned between two “B” detectors. A light blocker is affixed for rotation with a motor shaft between the light detector assembly and light source and has a second number of opaque, pie-shaped elements arrayed about the shaft, the second number equal to one-half of the first number. An angular subtense of the light blocker elements is greater than that of a detector element. A signal connection between the light detector elements and a circuit measures a signal from the “A” and “B” detectors relating to an amount of light falling thereon, a difference therebetween related to an angular position of the shaft.
    Type: Grant
    Filed: January 21, 2008
    Date of Patent: March 30, 2010
    Inventor: William R. Benner, Jr.
  • Patent number: 7684028
    Abstract: A remote sensing angle gauge includes a sensor responding to physical stimulus and transmitting a resulting impulse for measuring an angle, and a user interface separate and remote from said sensor and in communication with said sensor unit. The user interface receives a signal from the resulting impulse of said sensor unit, and determines the angle measurement according to the received signal from said sensor unit and inputted data from said interface unit. The inputted data by a user includes an offset and orientation of the sensor. The gauge can be zeroed before initiating the measurement. The sensor can be connected to the user interface through a detachable electrical connection. The sensor can include an adaptor accommodating a detachable and adjustable connection to an area being measured. The results of the measurement on the user interface can be remotely monitored, while measuring the angle with the sensor.
    Type: Grant
    Filed: December 14, 2006
    Date of Patent: March 23, 2010
    Assignee: SPX Corporation
    Inventors: Kevin Willcock, Michael Shevela, Michael F. Banar
  • Publication number: 20100067845
    Abstract: Disclosed is an inclinometer system capable of detecting the inclination of the ground using a fiber bragg grating sensor to precisely measure the deformation of the ground. The inclinometer system includes at least one measuring unit, and the measuring unit includes a body provided therein with a receiving part, a frame inserted into the body, a weight member inserted in to the frame and having one end hinged to the frame, the weight member rotating in cooperation to inclination of the body, an optical fiber 5 passing through both the body and the frame such that one end of the optical fiber is fixed to the weight member, a fixing member installed into the frame to fix an opposite end of the optical fiber, and a fiber bragg grating (FBG) sensor attached to the optical fiber.
    Type: Application
    Filed: June 23, 2009
    Publication date: March 18, 2010
    Inventor: Geun Suk LEE
  • Publication number: 20100060884
    Abstract: The present invention provides an attachment angle measuring device and an attachment angle measuring method which realize accurate measurement of attachment angle between an axle carrier and an absorber. An attachment angle measuring device measures an attachment angle ? between an axle carrier and an absorber as in the following. A slit light is projected to a first reflection position on an outer peripheral surface of an absorber rod and a reflected light from the first reflection position is received. A slit light is projected to a second reflection position on the outer peripheral surface of the absorber rod different from the first reflection position and a reflected light from the second reflection position is received. A first optical path distance between a projection start position of the slit light and the first reflection position is calculated based on the reflected light.
    Type: Application
    Filed: October 10, 2008
    Publication date: March 11, 2010
    Inventors: Shinji Tohyama, Yuichiro Oka, Koji Tomida
  • Patent number: 7675612
    Abstract: A laser measuring device (50) including a housing (56) with a laser device present therein for generating and projecting at least one laser beam (52, 54), perpendicular to an alignment surface (34) of the housing, or to a mount (14) that is connected to the housing. In order to enable an exceedingly precise alignment of a laser beam to the center point of an opening in a room boundary, such as the floor, without requiring costly adjustment operations, it is proposed that the alignment surface (34) be equipped with at least three synchronously adjustable positioning elements, which lie in a circle, through the center point of which the laser beam (54), which extends perpendicular to the alignment surface (34), or its extension, passes.
    Type: Grant
    Filed: November 21, 2006
    Date of Patent: March 9, 2010
    Assignee: Stabila Messgerate Gustav Ullrich GmbH
    Inventor: Gabriel Kallabis
  • Publication number: 20100053615
    Abstract: A rotation detection kit, comprising: a beam source; a receiver comprising at least one beam intensity sensor; a polariser device for location in the path of a beam emitted from the beam source and received by the beam sensor; and a modulator. The modulator is configured to modulate at least one of i) the beam source and ii) a beam emitted by the beam source to create a discretely varying polarisation orientation thereby defining first and at least second temporally spaced beam portions. The temporally spaced beam portions are incident on the polariser device and the beam sensor and have substantially identical profiles and at least an initial common propagation axis toward the polariser device.
    Type: Application
    Filed: April 9, 2008
    Publication date: March 4, 2010
    Applicant: Renishaw PLC
    Inventors: Stephen Mark Angood, Christopher Kemp, Raymond John Chaney, Mark Adrian Vincent Chapman, David Roberts McMurtry
  • Patent number: 7672044
    Abstract: As a preliminary stage in manufacturing a lens or lens part for an objective, in particular a projection objective for a microlithography projection system, an optical blank is made from a crystal material. As a first step in manufacturing the optical blank, one determines the orientation of a first crystallographic direction that is defined in the crystallographic structure of the material. The material is then machined into an optical blank so that the first crystallographic direction is substantially perpendicular to an optical blank surface of the optical blank. Subsequently, a marking is applied to the optical blank or to a mounting element of the optical blank. The marking has a defined relationship to a second crystallographic direction which is oriented at a non-zero angle relative to the first crystallographic direction.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: March 2, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Birgit Enkisch, Hartmut Enkisch, Toralf Gruner
  • Publication number: 20100046857
    Abstract: Improvements to the art of orientation measurement are disclosed whereby the phase angle of each of the plurality of orientation dependent radiation patterns is measured at a single common and unique point of measurement on the observation surface and correspondingly in the image of the observation surface, and whereby a central landmark is located at the point of measurement without loss of accuracy in the determination of the plurality of phase angles of orientation dependent radiation so that the precise point of measurement can be determined in the image without errors introduced by an offset between the positions of landmarks and the position of phase angle measurement.
    Type: Application
    Filed: August 25, 2009
    Publication date: February 25, 2010
    Inventor: Brian Stewart Randall Armstrong
  • Publication number: 20100049354
    Abstract: The invention relates to a method for ensuring the dimensional constancy of multisegment physical structures, in particular aircraft structures, during assembly, having the following steps: a spatially-fixed three-dimensional coordinate system (90) which encloses the subsequent assembled physical structure is set up; a plurality of segments (31, 32, 33) of the physical structure to be assembled are introduced into the spatially-fixed three-dimensional coordinate system (90); the positions of the individual segments (31, 32, 33) and of already assembled groups of segments (31, 32, 33) are recorded repeatedly within the spatially-fixed three-dimensional coordinate system (90) during assembly; and the position of a respective segment (31, 32, 33) or of a respective already assembled group of segments (31, 32, 33) is corrected if a respective record shows that the positions of the respective segment (31, 32, 33) or of the respective already assembled group of segments (31, 32, 33) is outside a tolerance band, whi
    Type: Application
    Filed: April 27, 2007
    Publication date: February 25, 2010
    Inventors: Ulrich Stark, Jorg Schrickel, Oliver Kraatz, Dirk Gross
  • Patent number: 7667833
    Abstract: A Theoretical Overlay Photographic (TOP) alignment method uses the overlay of a theoretical projected image of a perfectly aligned concentrator on a photographic image of the concentrator to align the mirror facets of a parabolic trough solar concentrator. The alignment method is practical and straightforward, and inherently aligns the mirror facets to the receiver. When integrated with clinometer measurements for which gravity and mechanical drag effects have been accounted for and which are made in a manner and location consistent with the alignment method, all of the mirrors on a common drive can be aligned and optimized for any concentrator orientation.
    Type: Grant
    Filed: June 12, 2007
    Date of Patent: February 23, 2010
    Assignee: Sandia Corporation
    Inventor: Richard B. Diver