Abstract: Disclosed is a plasma evaluation method that evaluates plasma P that forms a nitride film by an atomic layer deposition method. First, light emission from the plasma P generated from a gas G that contains nitrogen atoms and hydrogen atoms is detected. Then, evaluation of the plasma P is performed by using a result of comparing an intensity ratio between a first peak caused by hydrogen atoms and a second peak different from the first peak and caused by hydrogen atoms in an intensity spectrum of the detected light emission with a reference value calculated in advance from a relationship between the intensity ratio and an indicator that indicates a film quality of the nitride film.

Abstract: A liquid sampling, atmospheric pressure, glow discharge (LS-APGD) device as well as systems that incorporate the device and methods for using the device and systems are described. The LS-APGD includes a hollow capillary for delivering an electrolyte solution to a glow discharge space. The device also includes a counter electrode in the form of a second hollow capillary that can deliver the analyte into the glow discharge space. A voltage across the electrolyte solution and the counter electrode creates the microplasma within the glow discharge space that interacts with the analyte to move it to a higher energy state (vaporization, excitation, and/or ionization of the analyte).

Abstract: An apparatus includes: an electromagnetic waveguide and an iris structure providing an iris in the electromagnetic waveguide. The iris structure defines an iris hole. The apparatus further includes an electric field rotation arrangement configured to establish a 2N-pole electric field around a circumference of the iris hole, wherein N is an integer which is at least two. The electric field rotation arrangement may include at least four iris slots, each in communication with the iris hole, wherein a first one of the iris slots is further in disposed at a first side of the iris hole and a second one of the iris slots is disposed at a second side of the iris hole which is opposite the first side.

Abstract: A plasma generating unit for a process monitoring device includes a hollow first electrode extending in a length direction and a second electrode extending in the length direction and positioned within and displaced from the first electrode with a distance therebetween. The first electrode has an inner diameter and the second electrode has an outer diameter selected to vary the distance between the electrodes in the length direction so that the plasma generating unit generates a plasma by ionizing a gas flowing between the electrodes at a different position in the length direction based on a pressure of the gas.

Abstract: An elemental analysis apparatus 101 includes a treatment vessel 108 of which at least a part is optically transparent, a first electrode 104 covered by insulator 103, a second electrode 102, a bubble-generating part which generates a bubble 106, a gas-supplying apparatus 105 which supplies gas to the bubble-generating part in an amount necessary for generating the bubble 106, a power supply 101 which applies voltage between the first electrode 104 and the second electrode 102, and an optical detection device 110 which determines an emission spectrum of plasma that is generated by application of the voltage, and the apparatus conducts qualitatively or quantitatively analysis of a component contained in the liquid 109 based on the emission spectrum determined by the optical detection device 110.

Abstract: The invention relates to a method for ionizing and identifying gases, wherein the gases to be identified are ionized in a reaction chamber and the product ions are measured, wherein the measurement of the product ions takes place via electrical fields acting on the product ions and the detection is performed with a detector for ions. It is provided that ionization takes place via UV radiation, and that simultaneously or sequentially ionization by electrons takes place. The invention further relates to a device for ionizing and identifying gases, which includes an ion source chamber having an ion source and an ion mobility spectrometer. For this purpose, a partition between the ion source chamber and the ion mobility spectrometer has a UV-transparent window and a window permeable for electrons, wherein UV radiation and electron radiation can be generated in the ion source chamber with the ion source.

Abstract: In a high-frequency power supply for plasma having a housing and a high-frequency circuit substrate placed inside the housing elements for supplying a high-frequency current to a high-frequency inductive coil are mounted on the high-frequency circuit substrate, a cooling block for cooling the high-frequency circuit substrate, a fan for sending air to the elements on the high-frequency circuit substrate as wind are further provided, and fins for allowing air to flow through so that the air is cooled are formed on the surface of the cooling block. The housing is provided with an air path for supplying the air that has flown through the fins to the absorbing side of the fan.

Abstract: This disclosure relates to a method for analyzing a sample of material. The method includes (a) converting a portion of the sample into a plasma multiple times; (b) recording a spectrum of electromagnetic radiation emitted in response to each of the sample conversions to define a sequence of spectra for the sample, in which each member of the sequence corresponds to the spectrum recorded in response to a different one of the sample conversions; (c) using an electronic processor to compare the sequence of spectra for the sample to a sequence of spectra for each of at least one reference sample in a reference library; and (d) using the electronic processor to determine information about the sample based on the comparison to the reference samples in the library.

Abstract: A device is provided for mapping and for analysis of at least one element of interest included in a solid sample by laser-induced plasma optical emission spectrometry, enabling a high-resolution mapping, notably of elements such as hydrogen and oxygen, and is applicable to the fields of the nuclear industry and of aeronautics, and notably offers the advantage of not requiring costly installations. In one of the embodiments of the invention, a simultaneous mapping of elements such as hydrogen, oxygen and/or lithium is notably achievable.

Abstract: In a high-frequency power supply for plasma having a housing and a high-frequency circuit substrate placed inside the housing, elements for supplying a high-frequency current to a high-frequency inductive coil are mounted on the high-frequency circuit substrate , a cooling block for cooling the high-frequency circuit substrate is provided, and a coolant path a for allowing a coolant to flow through is formed inside the cooling block so that the coolant is allowed to flow through the coolant path when a high-frequency current is supplied and the coolant is not allowed to flow through the coolant path when a high-frequency current is not supplied.

Abstract: A cell for a vacuum ultraviolet plasma light source, the cell having a closed sapphire tube containing at least one noble gas. Such a cell does not have a metal housing, metal-to-metal seals, or any other metal flanges or components, except for the electrodes (in some embodiments). In this manner, the cell is kept to a relatively small size, and exhibits a more uniform heating of the gas and cell than can be readily achieved with a hybridized metal/window cell design. These designs generally result in higher plasma temperatures (a brighter light source), shorter wavelength output, and lower optical noise due to fewer gas convection currents created between the hotter plasma regions and surrounding colder gases. These cells provide a greater amount of output with wavelengths in the vacuum ultraviolet range than do quartz or fused silica cells. These cells also produce continuous spectral emission well into the infrared range, making them a broadband light source.

Abstract: Plasma devices and methods for using such plasma devices in analytical measurements are disclosed. In certain examples, a low flow plasma may be operative using a total argon gas flow of less than about five liters per minute, and in some embodiments, a plasma argon gas flow of less than about four liter per minute. In other examples, a plasma produced using inductive and capacitive coupling is disclosed.

Abstract: Particles of a flow of aerosol are collected and analyzed by passing them through a housing having an inlet area, an outlet area, and a collection and analysis area. A collection electrode has a tip disposed in the flow path in the collection and analysis area. Particles are collected on the tip of the collection electrode. A microwave pulse is applied to the collection and analysis area such that a plasma is created. Atomic emissions produced during at least part of the microwave step are collected for analysis of the ablated particles.

Abstract: A method and apparatus for actively monitoring conditions of a plasma source for adjustment and control of the source and to detect the presence of unwanted contaminant species in a plasma reaction chamber. Preferred embodiments include a spectrometer used to quantify components of the plasma. A system controller is provided that uses feedback loops based on spectral analysis of the plasma to regulate the ion composition of the plasma source. The system also provides endpointing means based on spectral analysis to determine when cleaning of the plasma source is completed.

Abstract: An analysis apparatus includes a plasma generation unit and an optical analysis unit. The plasma generation unit generates initial plasma by momentarily energizing a target substance to be turned into a plasma state, and maintains the target substance in the plasma state by irradiating the initial plasma with an electromagnetic wave for a predetermined period of time. The optical analysis unit identifies the target substance based on information with respect to emission intensity during a period from when the emission intensity reaches a peak due to the initial plasma until when the emission intensity increases and reaches approximately a constant value due to electromagnetic wave plasma maintained by the electromagnetic wave, or information with respect to emission intensity after the electromagnetic wave irradiation is terminated.

Abstract: The present invention discloses a combustor system and method of measuring impurities in the combustion system. The combustion system includes an up-stream fuel injection point; a down-stream turbine combustor; a flame zone in the turbine combustor comprising a plurality of axial sub-zones; an optical port assembly configured to obtain a non-axial, direct, optical view of at least one of the plurality of axial sub-zones, and an impurity detection system in optical communication with the optical port assembly.

Abstract: The present invention relates in particular to a method for the quantitative measurement of biomolecular targets that have been deposited on a biochip (1) of the type with a matrix of probes hybridized by the targets, the matrix comprising a multitude of measurement points (2) each comprising a plurality of probes, characterized in that it comprises the following steps: a) at least one laser beam (18) is focused onto each measurement point, in order to extract therefrom a hot confined plasma comprising a chemical element to be quantified that is present in the targets and optionally in the probes; b) the light emission lines from the plasma are detected and analysed for each measurement point, by measuring the respective intensities of these lines; and then c) the concentration in each measurement point of the element or of a group incorporating it within the targets is determined via a prior calibration of the lines establishing a correlation between the intensities of the lines specific to the element to be

Abstract: The object of the invention is a system for analyzing gases which are at a pressure on the order of a secondary vacuum. The system includes a gas ionization device that includes a cathode having conducting walls defining a cylindrical volume and a disc including at least one central through hole, an anode placed substantially at the center of the hole, a plasma source, the plasma being generated in the cylindrical volume by the combined action of an electric field and a magnetic field, orthogonal to the electric field, a system for collecting the light radiation emitted by the plasma, a cylindrical cavity coaxial to the anode having a conductance lower than that of the cylindrical volume and arranged between the ionization device and the collector system, and an analysis device for the ionized gases including an optical spectrometer for analyzing the evolution of the radiating spectrum.

Abstract: A plasma diagnostic apparatus includes a vacuum chamber unit having at least one electrode and having plasma generated inside. A bias power unit is disposed inside the vacuum chamber unit to apply a radio frequency voltage to an electrode that supports a wafer. A spectrum unit decomposes light emitted from inside the plasma according to wavelengths. A light detection unit detects the light decomposed according to wavelengths. A control unit controls a turn-on and turn-off process of the light detection unit according to a waveform of the radio frequency voltage.

Abstract: A device for analyzing materials by plasma spectroscopy is of the portable and independent type, comprising a housing (10) containing a laser generator (18) that emits laser pulses that are focused on the surface of a material to be analyzed by means of a parabolic mirror (32) that is movable in translation inside the housing in order to perform a series of spot measurements along a scan line on the surface of the material to be analyzed and in order to take a measurement from a calibration sample (50) mounted in the measurement endpiece (22) of the housing (10).

Abstract: Ionization devices that have at least two modes of ionization, and that can switch between these two modes of operation, are described. Illustratively, the ionization devices can switch between a photoionization (PI) mode and a combined mode of electroionization (EI) and PI (EI/PI mode).

Abstract: A Plasma Emission Transfer and Modification Device allowing for alteration of the plasma shape or characteristics for e.g. optimized viewing of relevant Plasma zones or improved coupling of a Plasma to the subsequent spectrometer optics, at the same time avoiding negative effects (e.g. heat transfer from the spectro-chemical source into subsequent system components) is described.

Abstract: A method, system and apparatus for an automated sample introduction system, utilizing a demountable direct injection high efficiency nebulizer (d-DIHEN) is provided which incorporates an inductively coupled plasma optical emission spectrometer (ICP-OES) for the measurement of the phosphorus content in acid-digested nucleotides and deoxyribonucleic acid (DNA). An external pulse-free peristaltic pump provides samples from a container via a probe, and the pump is stopped when the probe is removed from the container.

Abstract: A processing system having a chamber for in-situ optical interrogation of plasma emission to quantitatively measure normalized optical emission spectra is provided. The processing chamber includes a confinement ring assembly, a flash lamp, and a set of quartz windows. The processing chamber also includes a plurality of collimated optical assemblies, the plurality of collimated optical assemblies are optically coupled to the set of quartz windows. The processing chamber also includes a plurality of fiber optic bundles. The processing chamber also includes a multi-channel spectrometer, the multi-channel spectrometer is configured with at least a signal channel and a reference channel, the signal channel is optically coupled to at least the flash lamp, the set of quartz windows, the set of collimated optical assemblies, the illuminated fiber optic bundle, and the collection fiber optic bundle to measure a first signal.

Abstract: To provide a light source which realizes accurate determination of the particle density of a plasma atmosphere without disturbing the state of the plasma atmosphere. The light source of the invention includes a tubular casing 12; a cooling medium passage 30 for causing a cooling medium to flow therethrough, the passage being provided along the inner wall of the casing; a lens 50 provided at a tip end of the casing; a first electrode 44 and a second electrode 45 which are provided in the casing and before the lens so as to be vertical to the axis of the casing and parallel to each other; and an insulating spacer 46 provided between the first electrode and the second electrode.

Abstract: A device for mass spectroscopy comprising a chamber configured to provide an atomization source, a boost device configured to provide radio frequency energy to the chamber, and a mass analyzer in fluid communication with the chamber and configured to separate species based on mass-to-charge ratios is disclosed. In certain examples, a boost device may be used with a flame or plasma to provide additional energy to a flame or plasma to enhance desolvation, atomization, and/or ionization.

Abstract: Aluminum, boron and silicon were identified as potential leachables from borosilicate glassware and a silica based QMA during handling of aqueous 18F. The addition of only 0.4 ppm aluminum as AlCl3 in the eluent vial resulted in a strong reduction in the labeling yield of a model [18F]fluoride SN2 reaction (from 80 to 40% incorporation). The addition of boron as KBO2 and silicon as NaSiO3 did not result in any significant decrease in labeling yield. Interestingly, there was an interaction effect between AlCl3 and KBO2 in which the negative effect from AlCl3 on labeling yield was counteracted by KBO2. The present invention demonstrates that aluminum and boron from borosilicate glassware have a strong influence on the labeling yield in nucleophilic SN2 reactions with n.c.a [18F]fluoride.

Abstract: A device for sustaining a plasma in a torch is provided. In certain examples, the device comprises a first electrode configured to couple to a power source and constructed and arranged to provide a loop current along a radial plane of the torch. In some examples, the radial plane of the torch is substantially perpendicular to a longitudinal axis of the torch.

Abstract: A method for the detection of mercury or other heavy metals in a gas stream comprises the steps of: providing a pulsed microwave power supply; supplying a microwave generator with power from the pulsed microwave power supply; using the microwave generator to power a short circuited waveguide to create a plasma torch located in a chamber; feeding a sample of the gas stream to the plasma torch; using the plasma torch to transform oxidized elements in the gas stream to atomic elements; and analyzing by atomic fluorescence of the gas stream having the atomic elements with an excitation lamp for the presence of at least one metal.

Abstract: The invention provides a system and a method of eliminating interference for impurities measurement in noble gases based on emission spectroscopy which provide very stable, sensitive and interference free results. The method mainly relies on the use of a combination of particularly designed means serially connected for cancelling interferences and proper means for correcting linearity issues. The proposed method is particularly advantageous since it offers long-term stability while providing very accurate and reliable results, even at sub-ppb and up to 10,000 ppm levels, whatever the surrounding conditions and the additional impurities that could be present in the gas under analysis.

Abstract: An apparatus and a method for optically analyzing a sample are provided. The apparatus includes a first optical device that transmits a narrow waveband of light and has a first filter and a first monochromator that provide different paths for the narrow waveband of the light. The apparatus may also include a light source that generates the light as broadband excitation light, in which case the first optical device transmits a narrow waveband of the broadband excitation light through the first filter or the first monochromator. Further, the apparatus may include a second optical device that directs the narrow waveband of the broadband excitation light onto the sample and receives emission light from the sample, a third optical device that transmits a narrow waveband of the emission light, and a detector that converts the narrow waveband of the emission light into an electrical signal.

Abstract: Disclosed is a method for verifying representativeness of samples collected in a contaminated soil. The method includes the steps of horizontally and vertically collecting the samples from the contaminated soil on a basis of a stratum of the contaminated soil at a predetermined sampling interval; measuring a total concentration of trace elements by analyzing the collected samples according to the sampling interval; and determining horizontal and vertical sampling intervals and a sample number based on a statistical analysis result for the total concentration of the trace elements.

Abstract: An in-situ time domain spectroscopy (TDS)-based method (200) for non-contact characterization of properties of a sheet material while being produced by a manufacturing system (700). A time domain spectrometry system (100) and calibration data for the system is provided. The calibration data includes data for transmitted power through or reflected power from the sheet material as a function of a moisture content of the sheet material. At least one pulse of THz or near THz radiation from a transmitter (111) is directed at a location on a sheet material sample (130) while being processed by the manufacturing system (700). Transmitted or reflected radiation associated with at least one transmitted or reflected pulse from the sample location is synchronously detected by a detector (110) to obtain the sample data.

Abstract: An advance process control (APC) system for a plasma process machine is provided, which includes at least an optical emission spectroscopy (OES) system and an APC analysis apparatus. The OES system is used for monitoring a testing object in the plasma process machine. The APC analysis apparatus is used for analyzing the data received from the OES system.

Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.

Abstract: Embodiments of the invention relate to a method and apparatus for analyzing a target material. Specific embodiments can be referred to as laser ablation laser-induced breakdown spectroscopy (LA-LIBS). Embodiments of the invention relate to the use of a first laser beam pulse incident on a target material to create an ablation event so as to produce an ablation plume of target material. Such ablation events can include, for example, plasma ablation, sub-plasma ablation, and thermal desorption. At least a portion of the ablation plume of target material can then be transported a sufficient distance away from the ablation event that a second laser beam pulse can interact with the at least a portion of the ablation plume of target material to create an analytical plasma such that the analytical plasma is uncoupled from the ablation event.

Abstract: A method of measuring a gadolinia content using inductively coupled plasma-atomic emission spectrometry is provided. The method can include grinding sintered gadolinium using a percussion mortar to obtain a ground sample; warming the ground sample and then dissolving it with an acid solution to obtain dissolved gadolinia; diluting the dissolved gadolinia with distilled water to obtain a diluted gadolinia solution; measuring mass of each of a uranium element and a gadolinium element in the diluted gadolinia solution by a unit of ppm using the inductively coupled plasma-atomic emission spectrometry; and calculating a molar fraction of gadolinium from the diluted gadolinia solution and then calculating the gadolinia content using the molar fraction of gadolinium.

Abstract: An arrangement for in-situ optical interrogation of plasma emission to quantitatively measure normalized optical emission spectra in a plasma chamber is provided. The arrangement includes a flash lamp and a set of quartz windows. The arrangement also includes a plurality of collimated optical assemblies, which is optically coupled to the set of quartz windows. The arrangement further includes a plurality of fiber optic bundles, which comprises at least an illumination fiber optic bundle, a collection fiber optic bundle, and a reference fiber optic bundle. The arrangement more over includes a multi-channel spectrometer, which is configured with at least a signal channel and a reference channel. The signal channel is optically coupled to at least the flash lamp, the set of quartz windows, the set of collimated optical assemblies, the illuminated fiber optic bundle, and the collection fiber optic bundle to measure a first signal.

Abstract: A plasma generating unit for a process monitoring device includes a hollow first electrode extending in a length direction and a second electrode extending in the length direction and positioned within and displaced from the first electrode with a distance therebetween. The first electrode has an inner diameter and the second electrode has an outer diameter selected to vary the distance between the electrodes in the length direction so that the plasma generating unit generates a plasma by ionizing a gas flowing between the electrodes at a different position in the length direction based on a pressure of the gas.

Abstract: A device for analyzing materials by plasma spectroscopy is of the portable and independent type, comprising a housing (10) containing a laser generator (18) that emits laser pulses that are focused on the surface of a material to be analyzed by means of a parabolic mirror (32) that is movable in translation inside the housing in order to perform a series of spot measurements along a scan line on the surface of the material to be analyzed and in order to take a measurement from a calibration sample (50) mounted in the measurement endpiece (22) of the housing (10).

Abstract: Devices and techniques for using four wave mixing in optical sensing of various materials, including isotopes, chemical and biological substances.

Abstract: The present invention is direct to a nano-probe corona tool and uses thereof. A nano-probe corona tool is disclosed having a tip with a diameter in the nano-scale, typically around 100 nm. The nano-probe corona tool is constructed of electrically conductive material. On the other end of the tool, a pulsed voltage source outputs a pulsed voltage to generated a pulsed electrical potential at the tip. The pulsed electrical potential at the tip causes a plasma discharge corona to occur. Uses of the corona discharge include, but are not limited to, optical emission spectroscopy, in the enhancement of deposition of coatings and nanoscale welding, e.g., nanotube or nanowires to a contact pad and welding two nanowires together, and in nanoscale surgery. For example, a nano-probe comprising CNTs may be inserted into cell membranes. The resulting corona discharge may be used to destroy tumors within the cell.

Abstract: Provided are a process monitoring device for monitoring semiconductor device manufacturing processes, a semiconductor process apparatus including the same, and a process monitoring method thereof. The process monitoring device generates plasma from the exhaust gas of the process chamber using DBD-type electrodes and analyzes a spectrum of emission light from the plasma, thereby monitoring the semiconductor manufacturing process performed in the process chamber.

Abstract: A system includes an optical sensor that optically measures and spatially resolves in three dimensions at least one chemical species within a flame produced by a device and a component that correlates the three dimensionally measured at least one chemical species to at least one parameter of the device.

Abstract: An inspection apparatus for acquiring information on a measurement object using electromagnetic waves, comprising a substrate; a transmission line that is formed on the substrate; an electromagnetic wave generating unit for supplying an electromagnetic wave to the transmission line; an electromagnetic wave detecting unit for detecting the electromagnetic wave that has propagated through the transmission line; and a walled structure. The walled structure includes a side wall portion that extends along the transmission line within a region in which the electromagnetic wave that propagates through the transmission line and the measurement object interact with each other.

Abstract: The present invention relates to a method for adapting a detection device to be coupled to a liquid chromatography column and equipped with means for forming and conveying an aerosol as well as means for the formation of an aerosol and the conveyance thereof towards these detection means.

Abstract: A method of measuring a gadolinia content using inductively coupled plasma-atomic emission spectrometry is provided. The method can include grinding sintered gadolinium using a percussion mortar to obtain a ground sample; warming the ground sample and then dissolving it with an acid solution to obtain dissolved gadolinia; diluting the dissolved gadolinia with distilled water to obtain a diluted gadolinia solution; measuring mass of each of a uranium element and a gadolinium element in the diluted gadolinia solution by a unit of ppm using the inductively coupled plasma-atomic emission spectrometry; and calculating a molar fraction of gadolinium from the diluted gadolinia solution and then calculating the gadolinia content using the molar fraction of gadolinium.

Abstract: A disclosed device comprises an edge bonding seal configured to be mounted to an edge bead of the electrostatic chuck. The edge bonding seal includes a monitoring layer comprised of a first material configured to emit a species capable of being optically monitored. The edge bonding seal further includes an edge bonding layer configured to be interspersed at least between the monitoring layer and the plasma environment. The edge bonding layer is comprised of a second material susceptible to erosion due to reaction with the plasma environment and configured to expose the monitoring layer to the plasma environment upon sufficient exposure to the plasma environment.

Abstract: A non-radioactive atmospheric pressure device for ionization of analytes comprises an atmospheric pressure chamber having an inlet for carrier gas, a first electrode at one end, and a counter-electrode at the other end of the chamber for creating an electrical discharge in the carrier gas thus creating metastable neutral excited-state species. Optionally, a grid is provided to generate electrons or ions by contact with the excited-state species. The carrier gas containing the excited-state species or the electrons generated therefrom is directed at an analyte at atmospheric pressure near ground potential to form analyte ions.

Abstract: A non-radioactive atmospheric pressure device for ionization of analytes comprises an atmospheric pressure chamber having an inlet for carrier gas, a first electrode at one end, and a counter-electrode at the other end of the chamber for creating an electrical discharge in the carrier gas thus creating metastable neutral excited-state species. Optionally, a grid is provided to generate electrons or ions by contact with the excited-state species. The carrier gas containing the excited-state species or the electrons generated therefrom is directed at an analyte at atmospheric pressure near ground potential to form analyte ions.