Abstract: An apparatus for observing the appearance of a surface (2) of a sample (1) of semitransparent material, the apparatus comprising a light source (11) for illuminating at least a region of interest (16) of the surface of the sample (1) from a predetermined direction and means (14) for observing a response to the illumination of the region of interest (16), wherein the illuminated region (5) comprises the region of interest (16) and a region surrounding the region of interest (16). In this way the influence of emitted scattered light (32) on the accuracy of the observation of the appearance of the sample (1) is minimized.

Abstract: Provided is a device for determining the surface topology and associated color of a structure, such as a teeth segment, including a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.

Abstract: A method for photoresist characterization includes forming a photoresist on a supportive structure; and characterizing the photoresist using a metrology tool selected from the group consisting of a transmission electron microscope (TEM), a scanning electron microscope (SEM), an atomic force microscope (AFM), a small angle X-ray scattering (SAXS) and a laser diffraction particle analyzer.

Abstract: A signal processing apparatus comprising: an optical sensor for outputting a detection signal by detecting a surface of a recording medium on which a correction image is to be formed; and a control section configured to obtain a detection signal of the surface of the recording medium with the correction image from which a dominant frequency component has been deleted by making reverse frequency analysis of an analysis signal that has been obtained by making a frequency analysis of a detection signal outputted by the optical sensor detecting the surface of the recording medium on which the correction image it formed.

Abstract: A sample surface such as a surface of a wood veneer sheet is illuminated by a dual color light system and electronically scanned with a color line scan camera. The light system provides red and green light fluxes that are incident to a veneer surface from different directions, and corresponding line images associated with the red and green light fluxes are processed by rescaling, linear to log conversion, edge filtering, and/or thresholding to provide binary surface maps associated with veneer surface roughness.

Abstract: Disclosed are a beam scanner and a surface measurement apparatus. The beam scanner includes a spinning mirror having top and bottom reflective surfaces and a plurality of side reflective surfaces between the top and bottom reflective surfaces, and rotating about a rotary shaft penetrating the top and bottom reflective surfaces to scan beams, falling onto the side reflective surface, in one direction, a first light source emitting first beams to the side reflective surface, a second light source emitting second beams to at least one of the top and bottom reflective surfaces, and a detector receiving beams reflected by the spinning mirror, among the second beams. The beam scanner and the surface measurement apparatus can achieve high-speed, high resolution surface measurement since errors caused by the movement of the spinning mirror for beam scanning are minimized.

Abstract: A defect detector for corrugated cardboard flutes comprises an optical projector for projecting to traveling flutes an inspection light having an effective line of which the length is about one pitch of flutes inclined slightly so that a tip of a normal flute is positioned on or slightly under the posterior end of the effective line and simultaneously a slope of an adjacent normal flute is positioned on the anterior end side of the effective line, an optical receiver equipped with a light-receiving element for receiving the inspection light reflected by a flute to output information according to the light-receiving position, and normal or abnormal determining means which determines that the flute height is normal if the light-receiving position detected is within an allowable range Wp.

Abstract: An apparatus for measuring a three-dimensional shape of a target object by analyzing an optical pattern projected onto the target object has an optical pattern projecting device that projects the optical pattern onto a portion of a measurement surface on which the target object is placed, the optical pattern having brightness changing periodically according to a position, a first line sensor that images an optical pattern-emitted region onto which the optical pattern is projected, a second line sensor that images an optical pattern-non-emitted region onto which the optical pattern is not projected, and a processing device that calculates a phase of the optical pattern at a pixel included in an image obtained by removing background information from images taken by the first and second line sensors based on a brightness value of the pixel and a neighboring pixel in the image, and calculates height information based on the calculated phase.

Abstract: A system and method are provided for the 3D measurement of the shape of material objects using non-contact structured light triangulation. The system includes a light projector for projecting a structured light pattern onto the surface of any object and a camera for capturing an image of the structured light pattern acting on the surface of the object. The system further includes computing device for determining the 3D measurement of the surface shape of the illuminated object through a triangulation algorithm employed based on a calculated correspondence between the projected structured light and the captured image. The structured light includes coded elements that lie within planes passing through vertices of the central projection areas of both the projector and the camera also that pass through the space of the object being measured.

Abstract: A method of measuring an object includes positioning the object on a moveable stage, performing a rotary scan of the object with a range sensor, and determining geometric parameters of the object based on the rotary scan.

Abstract: Disclosed is an apparatus for obtaining geometrical data relating to an internal surface of a cavity. The apparatus comprises a probe having an end portion insertable into the cavity in a direction of insertion, radiation directing means for directing electromagnetic radiation from the end portion to at least one location on the internal surface to cause the radiation to be reflected from said location, detection means for detecting the reflected radiation from the at least one location, and means for determining from the detected radiation a distance between the probe and the internal surface in a direction having at least a transverse component relative to the direction of insertion. The radiation directing means is adapted to direct the radiation at an acute angle relative to the direction of insertion.

Abstract: The present invention provides a band-pass filter, being capable of fitting a frequency spectrum area having phase information in a frequency spectrum image, to obtain a spectrum information corresponding to the phase information during the process of obtaining the phase information from the frequency spectrum image with respect to an object's surface profile. In another embodiment, the present invention further provides a method to optimize the spectrum range of the band-pass filter so as to enhance measuring accuracy and efficiency while restoring the surface of the object. In addition, by employing the foregoing method, the present invention further provides a measurement system for measuring three-dimensional surface shapes in which a deformed fringe pattern with respect to the measured object's surface is acquired and the phase information is obtained from the fringe pattern according to the foregoing method so as to restore the surface profile of the measured object.

Abstract: A method and system are provided which can easily determine relative positions and postures of a three-dimensional measurement device and an object when the measurement device is used to measure the object using a manipulator. The method includes fixing one of the measurement device and the object, supporting the other at a support point with the manipulator so that a position and support posture of the other can be changed, conducting first measurement with the support point being set to first position and posture, changing the support point to second position and posture so that the second position is a position where the posture is changed, about a reference position within a measurable area of the measurement device in the first measurement, to an opposite side by a degree equal to a portion corresponding to a change from the first posture to the second posture, and conducting second measurement.

Abstract: An optical method and apparatus are described for the measurement of properties of a travel vehicle or a travel surface upon which the travel vehicle travels, which includes providing an incident light from a light source to the travel surface, collecting light reflected from the travel surface, determining a surface induced Doppler shift from the incident and collected light and determining at least one of a motion property of the travel vehicle and a surface property of the travel surface based on the determined surface induced Doppler shift.

Abstract: An apparatus for checking mechanical pieces comprises a base (1), a locking and reference system (31), an optoelectronic measuring system (53), displacement systems (3, 9, 26) and a processing unit (25) for receiving and processing the signals of the optoelectronic system. The displacement systems also enable mutual translation displacements, along a transversal axis, between the optoelectronic system and the piece to be checked. A method of checking foresees to detect signals provided by the optoelectronic system relating to a surface (51) of the piece in the course of the mutual oscillations, at at least two different transversal positions (A, B), and carry out a processing in order to obtain information relating to a virtual surface (51?). The method and the apparatus enable to obtain information relating to the position and/or the arrangement and/or the shape of even very small-dimensioned component parts of hard disk storage units.

Abstract: A pitch measurement method of performing noncontact measurement of a pitch of target portions, the target portions being provided in an object and adjacent to each other, includes moving the object such that the target portions move along a same path, continuously acquiring and storing optical data of the target portions passing a predetermined position on the path from a fixed position, while focusing on the predetermined position, calculating a focusing evaluation value representing a degree of focus at an area corresponding to the predetermined position, using a movement distance of the target portions as a variable, according to a relationship between the optical data and the movement distance, and obtaining a point group of combinations of the movement distance and the focusing evaluation value, and applying a reference curve to the point group, thereby determining the pitch based on a position where the reference curve is applied.

Abstract: A tire shape measuring system measures a surface shape on the basis of an image of a line of light (a light section line) emitted to a surface of a relatively rotating tire using a light-section method. The shape measuring system includes a light projector for emitting a plurality of lines of light onto a tire surface in directions different from a direction in which the height of the surface is detected so as to form a plurality of separate light section lines and a camera for capturing images of the light section lines in directions in which chief rays of the lines of light are specularly reflected by the tire surface. The shape measuring system individually detects the coordinates of the light section lines from images of pre-defined independent image processing target areas for each captured image and calculates the distribution of the surface height using the detected coordinates.

Abstract: A method for inspecting a surface of an object, including scanning the surface using an array of opto-electronic sensors, obtaining a reflected light signal from a location on the surface, combining the light signals to form a representation of geometrical features of the surface, and processing the representation to obtain geometric quantities of the geometrical features. An apparatus for inspecting a well screen, including an array of a plurality of opto-electronic sensors, a motion control unit, and a processor for obtaining a geometric quantity of the well screen based on an image obtained by the sensor array and the location registered by the motion control unit.

Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, critical dimension and overlay misregistration. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.

Abstract: Disclosed are systems and methods for characterizing a nonlinear propagation environment by numerically propagating a measured output waveform resulting from a known input waveform. The numerical propagation reconstructs the input waveform, and in the process, the nonlinear environment is characterized. In certain embodiments, knowledge of the characterized nonlinear environment facilitates determination of an unknown input based on a measured output. Similarly, knowledge of the characterized nonlinear environment also facilitates formation of a desired output based on a configurable input. In both situations, the input thus characterized and the output thus obtained include features that would normally be lost in linear propagations. Such features can include evanescent waves and peripheral waves, such that an image thus obtained are inherently wide-angle, farfield form of microscopy.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: A method of measuring and storing a center of rotation of a nozzle in a pick and place machine is provided. The method includes coupling an artifact to the nozzle. A substantially collimated laser beam is directed at the artifact, which is rotated while the collimated laser beam is energized. Edges of a shadow cast by the rotating artifact are detected and used to calculate error of a coordinate of the center of rotation of the nozzle. A coordinate of the center of rotation of the nozzle is calculated based upon a previous coordinate of the center of rotation and the error. The calculated coordinate of the center of rotation is stored for subsequent measurements.

Abstract: The invention relates to a method for the detection of objects in a detection region, wherein at least one transmitted light bundle is transmitted into the detection region, transmitted light reflected back or remitted back from an object, when present, is detected by a receiver unit having reception elements arranged in the form of an M×N matrix, wherein M>1 and N>1, and the distance of the object is determined by triangulation from the position of the at least one light patch produced by the reflected or remitted light at the receiver unit. In addition to the position of the reflected or remitted light, the two-dimensional energy distribution of the at least one received light patch within the light incident on the receiver unit is evaluated to determine further information on the object in addition to the distance of the object determined by triangulation, with a light patch quality value being determined which includes information on the homogeneity of the light reflected or remitted at the object.

Abstract: Provided is a method of designing an optical metrology system for measuring structures on a workpiece wherein the optical metrology system is configured to meet one or more signal criteria. The design of the optical metrology system is optimized by using collected signal data in comparison to the one or more signal criteria. In one embodiment, the optical metrology system is used for stand alone systems. In another embodiment, the optical metrology system is integrated with a fabrication cluster in semiconductor manufacturing.

Abstract: The invention concerns a method for the contactless scanning of three-dimensional objects (1). The objects are scanned using a bundled light beam (7), preferably using a laser beam. The object is scanned in at least two different measuring sections. When scanning in two different measuring sections, the measuring lines on the object (1) are not parallel. As an alternative or additional option, the object (1) is rotated during one measuring operation and not during the other.

Abstract: In a method for determining a structure parameter of a target pattern, a first series of calibration spectra are determined from at least one reference pattern, each spectra being determined using a different known value of at least one structure parameter of the respective reference pattern. The first series of calibration spectra does not take into account parameters of an apparatus used to produce the reference pattern. A representation of each of the first series calibration spectra is stored in a central library. A second series of calibration spectra corresponding to at least one of the stored spectra for a target spectrum is determined using the parameters of the apparatus for measuring the target spectrum. A measured target spectrum is produced by directing a beam of radiation onto the target pattern. The measured target spectrum and the second series of calibration spectra are compared, where this comparison is used to derive a value for the structure parameter of the target pattern.

Abstract: A method and apparatus to digitize three-dimensional objects. A projection assembly is retained in fixed relation to an imaging assembly. The projection assembly projects a fixed gradient light pattern into a focal zone of the imaging assembly. The imaging assembly integrates the illumination over time such that the fixed gradient reveals the features of the three dimensional object.

Abstract: A shape evaluation device performs simulation by using an annular light source or concentric light source instead of a rectilinear light source and calculates a characteristic line for performing shape evaluation. The shape evaluation device includes a calculation device (2) having: a distance vector calculation unit (2a) for acquiring a distance vector representing a distance between the circle and the vector, a distance function unit (2b) for acquiring a distance function from the distance vector, and a distance function calculation unit (2c) for acquiring a point on a curved surface where the value of the distance function is a predetermined value. By performing simulation using the annular or concentric light source, it is possible to obtain a characteristic line capable of observing distortion in all the directions by one calculation.

Abstract: To generate a simulated diffraction signal, one or more values of one or more photoresist parameters, which characterize behavior of photoresist when the photoresist undergoes processing steps in a wafer application, are obtained. One or more values of one or more profile parameters are derived using the one or more values of the one or more photoresist parameters. The one or more profile parameters characterize one or more geometric features of the structure. A simulated diffraction signal is generated using the one or more values of the one or more profile parameters. The simulated diffraction signal characterizes behavior of light diffracted from the structure. The generated simulated diffraction signal is associated with the one or more values of the one or more photoresist parameters.

Abstract: A tire shape detecting apparatus includes a projector that applies a plurality line light beams in a continuously joined manner, from a direction different from the detection height direction (Z-axis direction) in one light section line, or that applies one line light beam in a condensed manner in the line length direction thereof in order that the one light section line may be formed on the one line Ls on the surface of the tire; and a camera for picking up images of the plurality of line light beams applied to the tire surface in the direction in which the principal ray of each of the plurality of line light beams performs specular reflection with respect to the tire surface, or in the direction in which the principal ray of the condensed one line light beam performs specular reflection with respect to the tire surface.

Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.

Abstract: A three-dimensional measurement method is provided for measuring an object shape in a non-contact manner by using a non-contact sensor and a sensor moving mechanism that changes a position and a posture of the sensor and can operate by numerical control, moving the non-contact sensor in accordance with measurement path information indicating plural positions and postures of the sensor at the respective positions. The measurement path information is set in advance by teaching.

Abstract: An optical scanning probe is provided and includes a housing, a diaphragm disposed in the housing, a rotor, a conduit, an optical fiber module, and a reflector disposed on the rotor, wherein the diaphragm and the housing forms a chamber. The rotor is movably disposed in the chamber and has several fans. The conduit is disposed in the housing to conduct fluid into the chamber, thus impelling the fans and the rotor. The optical fiber module is disposed in the housing and through the diaphragm to transmit a light beam. The reflector rotates with the rotor and reflects the light beam for 360° scanning.

Abstract: A system and a method are provided for detecting a surface characteristic of a surface. A plurality of transponders are located on the surface for transmitting electromagnetic surface waves and for receiving the electromagnetic surface waves upon being reflected, diffracted, refracted, scattered, or otherwise altered by ice on the surface. A controller is coupled to the plurality of transponders. The controller is adapted to coordinate the plurality of transponders for imaging the surface characteristic of the surface.

Abstract: For objects with non-Lambertian surfaces, an object surface is mapped by effectively modifying the reflective properties of the object surface being sensed. By effectively making the surface Lambertian with high albedo, a calibration imaging task is achieved using a typical camera from a single or small number of camera positions. The calibration method temporarily modifies the surface properties of the imaged object by applying a thin and opaque layer, such as a coating, covering, or veneer, to the object for the duration of the calibration imaging task. The surface of this layer is a Lambertian reflector, with medium to high albedo. The layer is snugly applied, so a shape of the layer is as close as possible to that of the surface. Once the layer is applied, imaging of the layer surface essentially yields the same shape as the underlying object.

Abstract: Apparatus is disclosed for determining the track of origin of a cigarette manufactured in a cigarette making machine having a plurality of tracks. The cigarette making machine (60) is arranged such that the circumferential position of the tipping paper seam and the circumferential position of the tobacco wrapping paper seam are different for different tracks. The apparatus comprises a detector (20, 22; 36; 50) arranged to detect radiation from the cigarette (18) and to produce a signal representative of the detected radiation, and a processor (30; 54) arranged to process the signal produced by the detecting means to identify a shadow cast by a tipping paper seam and a shadow cast by a wrapping paper seam.

Abstract: A record medium determining device 1, which determines a kind of a record medium 16 by irradiating a laser light 17 to a surface of the record medium 16, detecting a received light position and a received light intensity of a reflected light 18 by a line sensor 14, and comparing a distribution state of the received light position and the received light intensity with a previously determined distribution state, is disposed on the upstream side of a record medium conveyance path 653 with respect to a fixing unit.

Abstract: An apparatus for and a method of fitting or removing a motor vehicle tyre (4) comprising a rotatably supported wheel receiving device (2) to which the rim (3) is to be fixed, at least one fitting or removal tool (5), a rotary drive device (10) for the wheel receiving device and a sensing device (6), (7), (8) for sensing the radially outer rim contour (12), (14) along which the at least one fitting or removal tool is to be guided during the fitting or removal operation, wherein the sensing device (6), (7), (8) is a sensing device which contact-lessly senses the rim contour and the sensing signals of which are converted into electrical sensing signals, and connected to the sensing device (6), (7), (8) is a control device (9) which evaluates the electrical sensing signals and which controls the at least one fitting or removal tool (5) in the fitting or removal operation in dependence on the sensing signals without contact with the rim surface.

Abstract: A shape measuring apparatus and a shape measuring method suited for measuring an edge profile of a thin sample such as a semiconductor wafer or the like is provided. A distribution of surface angle and an edge profile of a measurement site is calculated by emitting light at sequentially different angle to the measurement site of a wafer by sequentially switching and lighting a plurality of LEDs each disposed at one of plurality of positions in one plane by an LED driving circuit, obtaining an image data showing a luminance distribution of the reflected light form the measurement site through a camera by a calculator each time light is emitted and, estimating an emitting angle of the light when the luminance of the reflected light becomes peak based on image data and emitting angle of the light corresponding to each LED by the calculator.

Abstract: A method is provided for determining an actual profile of an object printed on a substrate. The method can include receiving an actual spectrum signal associated with the object, selecting a first model profile, and generating a first model spectrum signal associated with the first model profile. The method can further include comparing the first model spectrum signal with the actual spectrum signal. If the first model spectrum signal and the actual spectrum signal do not match a desired tolerance, the aforementioned selecting, generating, and comparing can be repeated with a second model profile. The second model profile can be selected based on the first model spectrum signal having undergone an optimization process based on a number of variable parameters of the first model profile, where the number of variable parameters is reduced by approximating the first model profile to a single shape with a reduced number of variable parameters.

Abstract: A three-dimensional shape measuring system is provided with a measuring unit having a three-dimensional measurement range and adapted to measure the three-dimensional shape of a measurement object in a noncontact manner, a measurement range shifting unit for shifting the position of the measurement range of the measuring unit, a shape calculating unit for calculating the overall three-dimensional shape of the measurement object from a plurality of measurement data obtained by shifting the measurement range relative to the measurement object, and a judging unit for setting judgment areas in specified peripheral areas within the measurement range and judging the presence or absence of any unmeasured area of the measurement object outside the measurement range based on measurement data corresponding to the judgment areas.

Abstract: The present invention relates to a system for three-dimensional (3-D) acoustic imaging of a scattering structure using information from a two-dimensional (2-D) image. The system uses a characterized sensor array to emit a signal from the sensor array into an object of interest to generate at least one 2-D representation of the object of interest. The 2-D representation comprises a plurality of x and y coordinate pairs and at least one candidate scattering structure. The candidate scattering structure comprises a shape defined by at least one pair of x and y coordinates. The candidate scattering structure shape is restricted to at least one pair of x and y coordinates. The pair of x and y coordinates of the candidate scattering structure shape are then compared with a first coordinate-dependent response function to assign an x, y, and z position of a scattering structure in 3-D space.

Abstract: A system and method for measuring the threaded surface of an internally threaded component is provided, where the inspection system includes at least one measuring probe, wherein the at least one measuring probe includes an emitter and a receiver and is sized and shaped to be positionable adjacent at least a portion of the threaded surface at an offset distance, wherein the emitter is configured to emit electromagnetic energy that is incident upon the threaded surface to generate reflected electromagnetic energy responsive to the threaded surface and wherein the receiver is configured to receive at least a portion of the reflected electromagnetic energy and generate threaded surface data. A processing device is also provided, wherein the processing device is in signal communication with the measuring probe to receive the threaded surface data and process the threaded surface data to determine physical characteristics of the threaded surface.

Abstract: The invention provides a handheld electronic gauge that is configured to obtain measurement data for an object, such as a wheel, rail, axle, or the like. The gauge includes one or more position sensors that automatically determine when the gauge is in a measurement position. The invention also provides a handheld computing device that can automatically determine when a gauge is in the measurement position and automatically obtain measurement data using the gauge. As a result, the invention provides a solution for measuring an object, such as a railway wheel, that is portable and capable of repeatedly providing various desired measurements, irrespective of the operator.

Abstract: A three-dimensional shape measurement photographing apparatus, including a plurality of photographing units for obtaining a measurement image group of a plurality of measurement images for measuring a three-dimensional shape of a subject, an emission unit for emitting light, including pattern light, within an angle of view of the photographing units, a photographing control unit for controlling the photographing units to obtain a pre-image of the subject before obtaining the measurement image group and to obtain the measurement images of the subject illuminated by the pattern light, a determination unit for setting a plurality of areas on the pre-image and determining whether to emit the pattern light with respect to each of the areas, and an emission control unit for controlling the emission unit such that the pattern light is emitted only to an area for which a determination has been made to emit the pattern light.

Abstract: A method for measuring the internal space of an elongate body. The elongate body has in a global xyz-coordinate system a longitudinal axis x. A laser profile scan is carried out, in which a laser scanner, which carries out scans in a plane, is moved through the internal space of the elongate body. The scan plane is tilted about the y-axis by a tilt angle ? or about the z-axis by a tilt angle ?. Preferably, the scan plane is tilted about the y-axis and the z-axis corresponding to the global coordinate system of the internal space. An apparatus for carrying out the method.

Abstract: An apparatus for the representation of an area on the three-dimensional surface of a patient's body, with a control device which provides three-dimensional coordinates of at least one area to be represented on the surface of the patient's body, wherein the area pre-sets a desired intersection area of a radiation area on the surface of the patient's body, characterized in that at least one projection device featuring a laser is provided, by which the desired intersection area can be projected to the three-dimensional surface of the patient's body on the basis of the provided coordinates, while at least one laser beam generated by the laser can be guided along the contour of the desired intersection area sufficiently rapidly, so that the impression of a closed contour around the desired intersection area results.

Abstract: A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.

Abstract: A method for extracting parameters of a cutting tool is provided. The method comprises positioning the cutting tool on a moveable stage, performing one or more rotary scans of a first section of the cutting tool to generate a scanning point cloud, indexing a plurality of points of the scanning point cloud, detecting one or more feature points based on the indexed scanning point cloud, and extracting one or more parameters based on the detected feature points. A system for extracting the parameters is also presented.