Reflective Element Moved By Deformable Support Patents (Class 359/224.1)
  • Patent number: 8610997
    Abstract: As for the method that modulates optical path length by the position of reflection plane of light, the movement of the position-movable plate in micrometer-size electromechanical device can be restricted by the stopping plates placed above and below the edge of the position-movable plate, the distance between the stopping plates may be set depending on the desired amount in modulating the optical path length. The voltage differential in the device is operable to create electrostatic attraction, to perform transition movement of the position-movable plate between the stopping plates, the light reflector connected to the position-movable plate takes at least two states in positioning, enabling to modulate the optical path length of reflected light by the light reflector with high reproducibility and high accuracy.
    Type: Grant
    Filed: October 22, 2011
    Date of Patent: December 17, 2013
    Inventor: Toshiyuki Kaeriyama
  • Patent number: 8598891
    Abstract: Detecting and/or mitigating the presence of particle contaminants in a MEMS device involves converting benign areas in which particles might become trapped undetectably by electric fields during test to field-free regions by extending otherwise non-functional conductive shield and gate layers and placing the same electrical potential on the conductive shield and gate layers. Particle contaminants can then be moved into detection locations remote from the potential trap areas and having particle detection structures by providing some mechanical disturbance.
    Type: Grant
    Filed: February 25, 2013
    Date of Patent: December 3, 2013
    Assignee: Analog Devices, Inc.
    Inventors: Vineet Kumar, William A. Clark, John A. Geen, Edward Wolfe, Steven Sherman
  • Patent number: 8599460
    Abstract: A movable beam (182a) and a movable beam (182b) each having one end fixed to a frame portion (181) of a mirror substrate (108) are provided inside the frame portion (181). The movable beam (182a) and the movable beam (182b) each having one end fixed to a corresponding to one of two opposite inner sides of the frame portion (181) are aligned at a predetermined distance on the same line in the direction in which the two sides face each other. Each of the movable beam (182a) and the movable beam (182b) has the other end displaceable in the normal line direction of the mirror substrate (108) and therefore has a cantilever structure. A mirror (183) is arranged between the movable beam (182a) and the movable beam (182b) and connected to them via a pair of connectors (109a, 109b).
    Type: Grant
    Filed: April 15, 2008
    Date of Patent: December 3, 2013
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventors: Mitsuo Usui, Shingo Uchiyama, Fusao Shimokawa, Etsu Hashimoto, Johji Yamaguchi, Tohru Matsuura, Toshifumi Konishi
  • Patent number: 8593712
    Abstract: A fast steering mirror has n plate springs (40a to 40d) and m drive means (50a to 50d). The plate springs (40a to 40d) are arranged such that a cross-sectional plane passing through the center of the thickness of each of the plate springs is on the same plane as the reflection surface of a mirror (20), and are arranged rotationally symmetric to each other about the center (O20). The plate springs each have a section extending along the circumference of the mirror holder, the section being obtained by dividing the perimeter of the mirror holder substantially into n sections. The drive means (50a to 50d) are arranged such that a cross-sectional plane passing through the center of torque generated by each of the drive means is on the same plane as the reflection surface of the mirror (20) and are rotationally symmetric to each other about the center (O20).
    Type: Grant
    Filed: June 1, 2010
    Date of Patent: November 26, 2013
    Assignees: NEC Corporation, NEC Toshiba Space Systems, Ltd.
    Inventors: Daisuke Eto, Kazuhiko Aoki, Hisaya Niizawa
  • Patent number: 8587853
    Abstract: A two-dimensional optical scanner and an image display apparatus are provided. The optical scanner includes: a movable portion having a mirror portion, and a first driving portion which is configured to oscillate the mirror portion around a first axis; a second driving portion which is configured to oscillate the movable portion around a second axis perpendicular to the first axis; and a driving controller which is configured to drive the first driving portion in a first driving method and is configured to drive the second driving portion in a second driving method different from the first driving method. While the first driving portion oscillates the mirror portion around the first axis, the second driving portion oscillates the movable portion around the second axis, so that the mirror portion reflects a beam of light incident to the mirror portion such that the two-dimensional optical scanner performs a two-dimensional scanning.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: November 19, 2013
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Hitoshi Takeda
  • Publication number: 20130301103
    Abstract: In an optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator for rocking the mirror with respect to a first axis of the mirror, a support body supporting the movable frame, and a second piezoelectric actuator for rocking the mirror through the movable frame with respect to a second axis of the mirror, at least one piezoelectric sensor is provided for sensing rocking vibrations of the mirror caused by the first and second piezoelectric actuators. The second piezoelectric actuator includes a pair of meander-type pieoelectric actuators opposite to each other with respect to the first axis. Each of the second meander-type piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every cantilever and connected from the support body to the movable frame in parallel with the first axis. The piezoelectric sensor is incorporated into an outermost one of the piezoelectric cantilevers.
    Type: Application
    Filed: March 18, 2013
    Publication date: November 14, 2013
    Inventor: Takanori Aimono
  • Patent number: 8582191
    Abstract: Implementations of actuators and capacitor-based position sensors for monitoring and controlling positioning of the actuators are provided, including implementations of actuators that use flexures to provide support to actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. A positioning sensor, such as a capacitor sensor, is provided to measure and monitor positioning of the actuator and is coupled to a feedback circuit which uses the measured positioning of the actuator to control the actuator.
    Type: Grant
    Filed: September 25, 2012
    Date of Patent: November 12, 2013
    Assignee: Prysm, Inc.
    Inventors: Bruce Borchers, Robert Stark
  • Patent number: 8581979
    Abstract: A system for constructing high resolution images includes a beam splitter assembly, a light intensity modulator, an image capturing module and an image processing module. The beam splitter assembly is utilized to reflect a light beam generated from a light source generating device and generate a splitting beam. The light intensity modulator is utilized to modulate the intensity of the splitting beam to generate a modulating beam, which includes a predetermined noise. The modulating beam is emitted onto an object to generate a modulating image. The image capturing module is utilized to obtain a plurality of modulating images. The image processing module is utilized to analyze the modulating images to generate a high resolution image.
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: November 12, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Sen Yih Chou, Chia Hung Cho
  • Patent number: 8576468
    Abstract: A scanning projector includes a MEMS device with a scanning mirror that sweeps a beam in two dimensions. Actuating circuits receive scan angle information and provide signal stimulus to the MEMS device to control the amount of mirror deflection on two axes. The period of movement on one or both axes may be modified to effect changes in line density in a resultant display.
    Type: Grant
    Filed: September 22, 2010
    Date of Patent: November 5, 2013
    Assignee: Microvision, Inc.
    Inventors: Mark O. Freeman, Joshua O. Miller
  • Patent number: 8570633
    Abstract: Disclosed are several embodiments of a micro-electro-mechanical systems (MEMS) mirror and a mirror scanner employing the same. An optical scanning unit employing such mirror scanner and an image forming apparatus including the optical scanning unit are also disclosed. The MEMS mirror may include a movable unit, which may in turn include a mirror portion and a magnet frame portion. The mirror portion may have mirror surfaces on the face surface(s) thereof. The magnet frame portion may include an opening into which a magnet is received. The MEMS mirror may also include a first fixing end and a second fixing end, to which the moving unit may be elastically supported by one or more elastic members that allows oscillating or pivoting movement of the moving unit.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: October 29, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hee-Moon Jeong, Jin-Ho Lee, Jun-O Kim, Jong-Chul Choi
  • Patent number: 8570632
    Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: October 29, 2013
    Assignee: Nikon Corporation
    Inventors: Soichi Owa, Junji Suzuki
  • Patent number: 8559089
    Abstract: An optical scanner capable of preventing breakage of a shaft section due to stress concentration is provided. A mirror frame 13 is shaped so as to enclose a mirror 11, and holds the mirror 11, via torsion bars 121 and 122, so as to be vibratable. A unimorph 15 is constituted by four unimorphs 151, 152, 153, and 154 formed on upper left, lower left, upper right, and lower right sides, and holds the mirror frame 13, via a shaft section 14, so as to be vibratable. The shaft section 14 has a connection section 144. On the mirror frame 13, an adjustment member 16 for increasing a moment of inertia m1 of the mirror frame 13 is provided.
    Type: Grant
    Filed: September 24, 2009
    Date of Patent: October 15, 2013
    Assignee: Konica Minolta Opto, Inc.
    Inventors: Naoki Kubo, Masayuki Ueyama
  • Patent number: 8553304
    Abstract: A piezoelectric actuator corrects for imperfections in printed material caused by the vertical rotation of a photosensitive image forming surface, such as a photoconductive drum. The piezoelectric actuator may be mounted to the base of a reflective surface holder, such as a mirror holder, that holds a mirror. The reflective surface holder may be operable to horizontally rotate the mirror as the mirror reflects a laser onto the photosensitive image forming surface. A power supply in communication with the piezoelectric actuator applies a voltage to the piezoelectric actuator. The resulting voltage allows the piezoelectric actuator to tilt the mirror in a vertical direction. A memory storage device may store tilt adjustment data usable by a microprocessor or controller to control the amount of voltage the power supply supplies to the piezoelectric actuator.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: October 8, 2013
    Assignee: Marvell International Ltd.
    Inventor: Douglas G. Keithley
  • Patent number: 8553303
    Abstract: An optical scanner includes: a light reflecting section having a light reflecting surface; a supporting section supporting the light reflecting section; a movable section supporting the supporting section; at least a pair of movable beams extending from the movable section and disposed in such a way that the movable beams face each other; a displacement section connected to the movable beam; two drive beams each extending from the displacement section; and a supporting frame supporting the drive beams, wherein the movable beams each include a bending section which is bent and deformed in a thickness direction of the supporting frame, and an end on the side of the movable section of the supporting section is fixed in a position more distant from the light reflecting section than an end face on the side of the light reflecting section of the movable section.
    Type: Grant
    Filed: July 28, 2011
    Date of Patent: October 8, 2013
    Assignee: Seiko Epson Corporation
    Inventors: Yasushi Mizoguchi, Yukio Miyamoto
  • Patent number: 8553307
    Abstract: Disclosed is a double-projection apparatus. The double-projection apparatus includes a frame, a carrier, two eccentric axles, a mirror-twisting axle, two scanning mirrors and two piezoelectric actuators. The carrier is provided in the frame, and includes an opening defined therein. Each of the eccentric axles includes an end connected to the frame and another end connected to the carrier. The mirror-twisting axle is provided in the opening. The scanning mirrors are provided in the opening and connected to two sides of the mirror-twisting axle. The piezoelectric actuators are connected to two sides of the frame.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: October 8, 2013
    Assignee: Chung-Shan Institute of Science and Technology, Armaments, Bureau, Ministry of National Defense
    Inventors: Ta-Ching Li, Sheng-Chih Shen, Ming-Ting Shih
  • Patent number: 8553308
    Abstract: A method for monitoring movement of at least one moving mirror in a MEMS device comprising one or more moving mirrors, and wherein the monitoring is based upon capacitance changes over time in the MEMS device. The method comprises the steps of: if the at least one moving mirror is an in-plain mirror, then: a. providing DC voltage to the MEMS device in addition to a driving voltage required for the movement of that at least one moving mirror; b. measuring current proportional to capacitance changes associated with the movement of the at least one moving mirror; and c. monitoring the movement of the at least one moving mirror based on the measured current. If the at least one moving mirror is a staggered mirror, then: d. measuring a current associated with the movement of the at least one moving mirror; e. identifying a plurality of ripples associated with capacitance changes in the MEMS device over time, in the measured current; and f.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: October 8, 2013
    Assignee: STMicroelectronics International N.V.
    Inventors: Nir Goren, Ido Luft, Sason Sourani
  • Patent number: 8553306
    Abstract: An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: October 8, 2013
    Assignees: Ricoh Company, Ltd., Stanley Electric Co., Ltd.
    Inventors: Tetsurou Saitoh, Eiji Mochizuki, Yukito Sato, Yoshiaki Yasuda, Masahiro Akamatsu, Masanao Tani
  • Patent number: 8547619
    Abstract: A MEMS mirror is disclosed having thickness correlated with the intensity profile of an impinging optical beam, so as to reduce moment of inertia of the MEMS mirror while preserving optical quality of the reflected beam. It is the mirror edges that contribute the most to the moment of inertia, while it is generally the mirror center that contributes the most to a reduction of the quality of an optical beam reflected from the mirror. Accordingly, by providing a mirror having laterally varying thickness matched to the local variation of the intensity of the optical beam, the quality of the latter may be preserved while the moment of inertia of the mirror may be significantly reduced. The thickness of MEMS mirrors may be varied continuously or stepwise; in one direction or in two mutually orthogonal directions.
    Type: Grant
    Filed: December 6, 2010
    Date of Patent: October 1, 2013
    Assignee: JDS Uniphase Corporation
    Inventor: Abdul Jaleel K. Moidu
  • Patent number: 8537450
    Abstract: A two-dimensional scanning and reflecting device includes a vibration component and a scanning component. The vibration component has a free end. The scanning component includes a frame body, a mass block, and a mirror. The frame body is connected to the free end of the vibration component. A natural frequency of the mirror corresponds to a second frequency. The mass block is disposed on the frame body in an eccentric manner, and the mass block and the natural frequency of the mirror correspond to a first frequency. When the vibration component receives a multi-frequency signal having the first frequency and the second frequency, the mirror vibrates in an axial direction with the first frequency, and vibrates in another axial direction with the second frequency.
    Type: Grant
    Filed: May 10, 2011
    Date of Patent: September 17, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Pin Chang, Chung-De Chen, Chien-Shien Yeh, Hung-Chung Li
  • Patent number: 8531759
    Abstract: Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems.
    Type: Grant
    Filed: December 28, 2008
    Date of Patent: September 10, 2013
    Assignee: Texas Instruments Incorporated
    Inventor: Larry Joseph Hombeck
  • Patent number: 8508826
    Abstract: A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
    Type: Grant
    Filed: April 23, 2009
    Date of Patent: August 13, 2013
    Assignee: Panasonic Corporation
    Inventors: Jirou Terada, Shinsuke Nakazono, Kazuki Komaki, Kiyomi Furukawa
  • Patent number: 8508098
    Abstract: A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF.
    Type: Grant
    Filed: April 10, 2007
    Date of Patent: August 13, 2013
    Assignee: Maradin Technologies Ltd.
    Inventor: Yoram Lubianiker
  • Patent number: 8508827
    Abstract: A vibration-actuated micro mirror device comprises a substrate, a swinging frame, a reflection mirror, and a vibration part. The swinging frame is rotatably arranged within a first accommodating space formed on the substrate. The reflection mirror is rotatably arranged within a second accommodating space formed on the swinging frame. The vibration part further comprises a plate coupled to the substrate, and a first and a second vibration structures. The first and the second vibration structures are coupled to the plate and are spaced a distance away from each other, wherein the first vibration structure receives a first driving signal having a first frequency and the second vibration structure receives a second driving signal having a second frequency smaller than the first frequency, thereby enabling the swinging frame to rotate about the first axis while enabling the reflection mirror to rotate about the second axis.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: August 13, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Jen Wang, Chien-Shien Yeh, Chung-De Chen, Hung-Chung Li
  • Patent number: 8498037
    Abstract: A method for processing workpieces includes performing a laser processing operation in which a laser beam is directed at a first mirror face and at a second mirror face of a redirecting mirror. The second mirror face is at least partially surrounded by the first mirror face. During the laser processing operation, the second mirror face performs a pendulum movement relative to the first mirror face.
    Type: Grant
    Filed: October 28, 2010
    Date of Patent: July 30, 2013
    Assignee: Trumpf Laser—und Systemtechnik GmbH
    Inventors: Wolfgang Andreasch, Stefan Boeckmann
  • Patent number: 8488224
    Abstract: Briefly, in accordance with one or more embodiments, an electric comb drive scanner comprises a scanning body comprising a mirror supported by one or more flexures along a first axis and one or more support structures coupled to the one or more flexures. One or more drive combs are disposed on the one or more support structures, wherein the drive combs cause the mirror to rotate about the first axis in response to a drive signal applied to the drive combs. The one or more support structures are tuned to reduce non-uniformity of warping of the support structures to reduce variation in disengagement of the drive combs along a length of the drive combs.
    Type: Grant
    Filed: September 10, 2010
    Date of Patent: July 16, 2013
    Assignee: Microvision, Inc.
    Inventor: Dean R. Brown
  • Publication number: 20130176607
    Abstract: An optical scanning device of the invention includes: a substrate; torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, and the direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and a spring constant in a longitudinal direction of the torsion bar portion supporting the mirror portion is distributed along the longitudinal direction of the torsion bar portion.
    Type: Application
    Filed: February 28, 2013
    Publication date: July 11, 2013
    Inventors: Jun AKEDO, Jaehyuk PARK
  • Publication number: 20130176608
    Abstract: An actuator comprises an electroactive polymer layer (402) and stretchable electrode structures (410, 411) that are disposed on each side of the electroactive polymer layer (402). A softer passive layer (401) is secured to one of the stretchable electrode structures (410, 411). When compressed transversally by the stretchable electrode structures (410, 411), the electroactive polymer layer (402) will expand tangentially and the actuator will relax into a shape wherein the interior of the electroded region is substantially parallel to the plane of the device, while a substantial portion of the area increase is absorbed by out-of-plane bends arising at the electrode boundary (duck mode). The invention can be embodied as optically reflective or refractive devices with variable geometry.
    Type: Application
    Filed: September 2, 2011
    Publication date: July 11, 2013
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.
    Inventors: Dirk Brokken, Floris Maria Hermansz Crompvoets, Hendrik De Koning, Wendy Mireille Martam, Franciscus Jacobus Vossen, Coen Theodorus Hubertus Fransiscus Liedenbaum
  • Patent number: 8482832
    Abstract: This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.
    Type: Grant
    Filed: November 9, 2009
    Date of Patent: July 9, 2013
    Assignee: Funai Electric Co., Ltd.
    Inventors: Hidetoshi Kotera, Isaku Kanno, Manabu Murayama, Naoki Inoue
  • Patent number: 8482833
    Abstract: The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.
    Type: Grant
    Filed: December 5, 2011
    Date of Patent: July 9, 2013
    Assignee: Sercalo Microtechnology Ltd.
    Inventors: Cornel Marxer, Peter Herbst
  • Publication number: 20130163061
    Abstract: A vibrating mirror element including a detection electrode to detect driving and capable of being easily manufactured is provided. This vibrating mirror element includes a mirror portion and a driving portion driving the mirror portion, and the driving portion has a drive electrode to deform the driving portion by application of a voltage to drive the driving portion and a detection electrode to detect the amount of deformation of the driving portion, both arranged therein.
    Type: Application
    Filed: August 19, 2011
    Publication date: June 27, 2013
    Applicant: Funai Electric Co., Ltd.
    Inventors: Isaku Kanno, Naoki Inoue, Manabu Murayama
  • Patent number: 8472098
    Abstract: A wafer-level manufacturing method produces stress compensated x-y gimbaled comb-driven MEMS mirror arrays using two SOI wafers and a single carrier wafer. MEMS structures such as comb drives, springs, and optical surfaces are formed by processing front substrate layer surfaces of the SOI wafers, bonding together the processed surfaces, and removing the unprocessed SOI layers to expose second surfaces of the front substrate layers for further wafer-level processing. The bonded SOI wafers are mounted to a surface of the carrier wafer that has been separately processed. Processing wafer surfaces may include formation of a stress compensation layer to counteract physical effects of MEMS mirrors. The method may form multi-layered conductive spring structures for the mirrors, each spring having a first conducting layer for energizing a comb drive, a second conducting layer imparting a restoring force, and an insulating layer between the first and second conducting layers.
    Type: Grant
    Filed: September 7, 2010
    Date of Patent: June 25, 2013
    Assignee: Teledyne Scientific & Imaging, LLC
    Inventors: Chialun Tsai, Jeffrey F. DeNatale
  • Patent number: 8472105
    Abstract: A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: June 25, 2013
    Inventor: Tiansheng Zhou
  • Patent number: 8472100
    Abstract: A deformable element for use in microelectromechanical systems comprises a core layer and a protective layer. The protective layer is capable of deterring combinations of undesired chemical components in operational environments with the core layer of the deformable element.
    Type: Grant
    Filed: March 12, 2008
    Date of Patent: June 25, 2013
    Assignee: Texas Instruments Incorporated
    Inventors: Patrick Ian Oden, Larry Joseph Hornbeck, Simon Joshua Jacobs
  • Patent number: 8472096
    Abstract: A method of manufacturing an oscillator device having first and second oscillators being driven at first and second driving resonance frequencies gf1 and gf2, the method including a first step for processing the two oscillators, wherein, when the two oscillators are going to be processed as oscillators having first and second resonance frequencies different from the two driving resonance frequencies with a certain dispersion range, the two oscillators are so processed that the first and second resonance frequencies different from the two driving resonance frequencies become equal to first and second resonance frequencies f1 and f2, respectively, which are included in adjustable resonance frequency ranges, respectively, and a second step for adjusting the first and second resonance frequencies f1 and f2 so that they become equal to the first and second driving resonance frequencies gf1 and gf2, respectively.
    Type: Grant
    Filed: November 13, 2008
    Date of Patent: June 25, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazunari Fujii, Takahisa Kato, Yoshio Hotta, Suguru Miyagawa, Takahiro Akiyama
  • Patent number: 8462415
    Abstract: A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis.
    Type: Grant
    Filed: May 12, 2011
    Date of Patent: June 11, 2013
    Assignee: Robert Bosch GmbH
    Inventors: Stefan Pinter, Andreas Duell, Joerg Muchow, Zoltan Lestyan
  • Patent number: 8462414
    Abstract: A micromechanical component includes: a mirror element with a reflective surface on a first outer side of the mirror element, which is designed in such a way that a first potential is applied to a first electrode surface on a second outer side of the mirror element opposite from the first outer side; a counterelectrode situated adjacent to the second outer side of the mirror element and which is designed in such a way that a second potential is applied to a second electrode surface of the counterelectrode; and a voltage control unit configured to apply a temporally varying voltage signal between the first electrode surface and the second electrode surface.
    Type: Grant
    Filed: July 21, 2010
    Date of Patent: June 11, 2013
    Assignee: Robert Bosch GmbH
    Inventors: Reinhold Fiess, Joerg Muchow
  • Publication number: 20130141769
    Abstract: A method for fabricating a micro-structure is provided, which can simply and easily fabricate the micro-structure by a batch process of directly forming a highly aligned nano-material array on a micro-structure to be used as an adhesive material during plastic deformation of the micro-structure without the use of existing complicated fabrication process.
    Type: Application
    Filed: June 4, 2012
    Publication date: June 6, 2013
    Applicant: INDUSTRY-ACADEMIC COOPERATION FOUNDATION YONSEI UNIVERSITY
    Inventors: Jongbaeg KIM, Youngkee EUN, Jae-Ik LEE, Jungwook CHOI, Youngsup SONG
  • Patent number: 8456727
    Abstract: An actuator device for optical deflector includes a base for mounting an optical deflector deflecting a light beam from a light source, at least one piezoelectric actuator translating and vibrating said base; and a supporting body supporting said piezoelectric actuator.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: June 4, 2013
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Yoshiaki Yasuda
  • Patent number: 8451524
    Abstract: A laser beam is periodically deflected before being directed into a sample volume. The beam is deflected at a frequency such that the beam makes one or more passes through the sample volume while data are collected from the sample volume. The amplitude of motion of the beam, the dwell time of the beam at any given point, and the Gaussian intensity profile of the beam cooperate to produce an effective flat topped illumination profile for the light that is incident on specimens in the sample volume. The total photon exposure at any given point in the sample volume is a function of both the beam intensity and the dwell time at that location. Therefore, a longer dwell time and lower intensity at the edge of the profile are in balance with a shorter dwell time and higher intensity at the center of the profile.
    Type: Grant
    Filed: September 20, 2010
    Date of Patent: May 28, 2013
    Assignee: Amnis Corporation
    Inventors: William Ortyn, David Perry, Tom Montague
  • Publication number: 20130120819
    Abstract: A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the fast-scan axis is controlled by a fast-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. A fast-scan drive signal is generated that causes the scanning mirror to oscillate at a resonant frequency with a varying amplitude.
    Type: Application
    Filed: November 14, 2011
    Publication date: May 16, 2013
    Applicant: Microvision, Inc.
    Inventors: Bruce C. Rothaar, Joel Sandgathe
  • Patent number: 8441706
    Abstract: An optical module includes a mirror which reflects input light and which outputs output light; and a mirror control section which is opposite to the mirror and which controls, at the time of the input light being reflected from a reflecting surface of the mirror, the reflecting surface by distorting the reflecting surface according to voltage applied to the mirror so as to output the output light an optical coupling characteristic of which changes. By using this optical module, the optical coupling characteristic of the output light changes.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: May 14, 2013
    Assignees: Fujitsu Limited, The University of Tokyo
    Inventors: Shinji Yamashita, Tsuyoshi Yamamoto, Masaaki Kawai, Hiroyuki Fujita
  • Patent number: 8437063
    Abstract: A method of scanning a light beam is disclosed. The method comprises scanning the light beam along a first axis and scanning the light beam along a second axis, such that a functional dependence of the scanning along the first axis is substantially a step-wave, and a functional dependence of the scanning along the second axis is other than a step-wave.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: May 7, 2013
    Assignee: Scaneva Ltd.
    Inventors: Yizhar Weiss, Mordekhai Velger, Sivan Natan-Knaz, Raviv Erlich, Alexander Sromin
  • Patent number: 8437065
    Abstract: Briefly, in accordance with one or more embodiments, a scanning platform to scan a beam as a projected image comprises a frame and a scanning mirror supported by a flexure coupled to the frame of the scanning platform. The flexure has an asymmetric structure comprising a longer flexure arm and a shorter flexure arm to locate the scanning mirror at a position offset from a center of the frame. The resonant frequency of oscillation of the scanning mirror may be maintained or otherwise determined by selecting an appropriate cross-sectional area of the longer flexure arm or the shorter flexure arm, or combinations thereof.
    Type: Grant
    Filed: October 18, 2010
    Date of Patent: May 7, 2013
    Assignee: Microvision, Inc.
    Inventors: Dean R. Brown, Wyatt O. Davis
  • Patent number: 8437062
    Abstract: The present invention provides an improved electrostatic micro actuator array system comprising a plurality of electrostatic micro actuators, each of the micro actuators further comprising at least one hold-down electrode and at least two pull-down electrodes positioned to actuate the micro actuator. A hold-down signal line is then coupled to each of the hold-down electrodes of each of the plurality of micro actuators and a plurality of first pull-down signal lines coupled to one of the at least two pull-down electrodes of each micro actuator and a plurality of second pull-down signal lines coupled to another of the at least two pull-down electrodes of each micro actuator, the first pull-down signal lines and the second pull-down signal lines configured in a cross-point matrix such that a unique pair of first pull-down signal lines and second pull-down signal lines is associated with each of the plurality of micro actuators.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: May 7, 2013
    Assignee: University of South Florida
    Inventors: Scott Samson, Sunny Kedia, Vandana Upadhyay, Rahul Agarwal
  • Patent number: 8432597
    Abstract: According to one embodiment of the present invention a digital micro-mirror device is taught that includes a pixel occupying an area of the device and a hinge coupled to the pixel and positioned such that at least a portion of the hinge falls outside the area of the pixel.
    Type: Grant
    Filed: May 8, 2006
    Date of Patent: April 30, 2013
    Assignee: Texas Instruments Incorporated
    Inventor: Richard L. Knipe
  • Patent number: 8432592
    Abstract: A micro-structure produced by utilizing a MEMS technology or the like includes: a frame including a portion having a first layer and a portion having a second layer on the lower side of the first layer; a movable body including a portion having the first layer and a portion having the second layer; and at least one swing supporting portion which is having the first layer, and connects the portion having the first layer in the frame and the portion having the first layer in the movable body, to support the movable body to be capable of swinging. A frame side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the frame, and a movable body side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the movable body.
    Type: Grant
    Filed: January 18, 2010
    Date of Patent: April 30, 2013
    Assignee: Fujitsu Limited
    Inventor: Yoshihiro Mizuno
  • Patent number: 8432596
    Abstract: This vibrating mirror element includes a mirror portion swingable on a first axis, a driving portion, including a free end and a fixed end, for swinging the mirror portion by deformation and a shaft portion provided between the mirror portion and the driving portion to extend along the first axis. The free end of the driving portion is connected to the shaft portion, while the fixed end of the driving portion is fixed on a side of the driving portion closer to the mirror portion and in the vicinity of the shaft portion.
    Type: Grant
    Filed: July 21, 2011
    Date of Patent: April 30, 2013
    Assignee: Funai Electric Co., Ltd.
    Inventors: Manabu Murayama, Naoki Inoue
  • Publication number: 20130100515
    Abstract: Provided is technique for a semiconductor device including a substrate and a tilting plate which is tiltable relatively to the substrate, the technique being capable of effectively suppressing warpage of the tilting plate. The semiconductor device of the present specification includes a substrate and a tilting plate which is tiltable relatively to the substrate. In the semiconductor device, a rib formed of wavelike portions where a plate thickness is substantially uniform is formed on the tilting plate.
    Type: Application
    Filed: September 25, 2012
    Publication date: April 25, 2013
    Applicant: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
    Inventor: Kabushiki Kaisha Toyota Chuo Kenkyusho
  • Patent number: 8427728
    Abstract: A pair of substrate portions each being tabular-shaped has side portions located closer to a mirror portion and connected, at both ends thereof in the oscillation axis direction, by a pair of supporting beam portions, and also has outer side portions fixed to a fixing member. An excitation device is formed on at least one substrate portion. The pair of substrate portions is disposed symmetrically in the direction perpendicular to the oscillation axis. A pair of torsion beam portions extends outward from two opposite sides of the mirror portion on the oscillation axis, and each is connected to the center of each supporting beam portion in a longitudinal direction. An edge of the piezoelectric element on an outer side thereof in the direction perpendicular to the oscillation axis is spaced from an outer side portion of the at least one substrate portion in a direction closer to the mirror portion.
    Type: Grant
    Filed: August 5, 2010
    Date of Patent: April 23, 2013
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Hitoshi Takeda
  • Patent number: 8427727
    Abstract: An apparatus includes a substrate and a mirror. The mirror is attached to the substrate via a spring. An electro-mechanical driver is operable to cause the mirror to rotationally oscillate about first and second non-collinear axes at different first and second frequencies.
    Type: Grant
    Filed: January 22, 2009
    Date of Patent: April 23, 2013
    Assignee: Alcatel Lucent
    Inventors: Gang Chen, Roland Ryf, Maria Elina Simon