Abstract: In an optical deflector apparatus, an optical deflector chip includes a mirror, an actuator adapted to rock the mirror, and first pads on a front surface of the optical deflector chip and connected to the actuator. A first substrate includes second pads on a back surface of the first substrate, and an opening is formed in the first substrate. The front surface of the optical deflector chip is adhered to the back surface of the first substrate in such a way that the first pads of the optical deflector chip are in contact with respective ones of the second pads of the first substrate and the mirror opposes the opening. A back surface of said optical deflector chip is adhered to a front surface of a second substrate.

Abstract: Provided is a light-scanning device may be designed to have a high resonance frequency and a large scanning angle. A mirror unit vibrates by using an arbitrary straight line as a rotation axis. A pair of first beam portions are disposed on a straight line that is parallel to the rotation axis, and support the mirror unit. A pair of second beam portions are disposed so as to be line-symmetrical to the pair of the first beam portions about the rotation axis as an axis of symmetry, and support the mirror unit. A pair of first arm portions respectively support the pair of first beam portions. A pair of second arm portions respectively support the pair of second beam portions. A pair of third beam portions support the mirror unit between the first beam portions and the second beam portions.

Abstract: In a two-dimensional optical deflector apparatus comprising an optical deflector and a driver for driving the optical deflector, the optical deflector includes a mirror, a first piezoelectric actuator for rocking the mirror with respect to a first axis of the mirror, and a second piezoelectric actuator of a meander type for rocking the mirror with respect to a second axis of the mirror perpendicular to the first axis. The driver generates a curved-type saw-tooth drive voltage and applies the curved-type saw-tooth drive voltage to the second piezoelectric actuator.

Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable plate which includes the light reflecting section and can be displaced; four link sections connected to the movable plate; and a supporting section supporting the four link sections. The four link sections are provided on an outer circumference of the movable plate at 90-degree intervals along a circumferential direction of the movable plate in a plan view. Each link section includes a turnable drive section, and a shaft section which connects the movable plate and the drive section. The shaft section is bent and deformed in a thickness direction of the movable plate by turning the drive section.

Abstract: There is provided a vibrating mirror element capable of inhibiting flexural deformation of a support portion. This vibrating mirror element (100) includes a mirror portion (10), a deformable driving portion (41, 43, 45, 51, 53, 55), and a support portion (42, 44, 46, 52, 54, 56) connected with a first connecting portion (41c, 43d, 45d, 51c, 53d, 55d) of the driving portion on the side of a first end portion (42a, 44a, 46a, 52a, 54a, 56a), while the thickness of the support portion is larger than the thickness of the driving portion.

Abstract: An optical probe includes a laser light source that emits laser light, a collimator lens that converts the laser light into parallel light, a light shape changing section that converts the parallel light into linear laser light, an irradiating section to irradiate an object with a selected part of the linear laser light, an image pickup section that picks up an image of the object based on the laser light reflected from the object, and a controller that controls irradiation of the linear laser light. The linear laser light is composed of a plurality of parts including one end part and the other end part; and the irradiating section irradiates the object with the parts of the linear laser light sequentially from the one end part to the other end part.

Abstract: The underlying invention presents a device which connects a vibratably suspended optical element to at least two actuators mounted fixedly on one side via curved spring elements, wherein the actuators are implemented to cause the vibratably suspended optical element to vibrate via the curved spring elements. Both the actuators and the entire system may be implemented to be more robust and be operated more reliably due to the curved shaping of the spring elements.

Abstract: Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems.

Abstract: An optical scanning device of the present invention includes: an oscillating mirror that reflects incident light; a first beam unit that is coupled to one end of the oscillating mirror; a second beam unit that is coupled to another end of the oscillating mirror; a first driving unit that is coupled to the first beam unit, is disposed between the first beam unit and the first adjusting unit, and that causes the oscillating mirror to oscillate; and a first adjusting unit that is coupled to the first driving unit, and adjusts a modulus of elasticity of the first beam unit by elastically deforming the first beam unit.

Abstract: A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.

Abstract: This vibrating mirror element (100) includes a mirror portion (10), a first driving portion (41), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction and a first free end (41b) formed on a second side thereof, and linearly extending, a first mirror support portion (46) capable of supporting the mirror portion (10) in an inclined state, a second driving portion (51), being cantilevered, including a second fixed end (51a) formed on the second side of the first direction and a second free end (51b) formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion (56) being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.

Abstract: A Micro Electro Mechanical Systems (MEMS) device comprising: a rotor, comprising a first plurality of rotor teeth and a second plurality of rotor teeth, formed in at least two layers of silicon-on-insulator (SOI) substrate, wherein each rotor tooth belonging to the first plurality of rotor teeth is formed in a first layer and each rotor tooth of the second plurality of rotor teeth is formed in a second layer; and a stator comprising a first plurality of stator teeth and a second plurality of stator teeth, formed in at least two layers of SOI substrate, wherein each stator tooth belonging to the first plurality of stator teeth is formed in a first layer, and each stator tooth of the second plurality of stator teeth is formed in a second layer.

Abstract: A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the fast-scan axis is controlled by a fast-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. A fast-scan drive signal is generated that causes the scanning mirror to oscillate at a resonant frequency with a varying amplitude.

Abstract: The present disclosure describes, among other things, a reduced speckle contrast microelectromechanical system. One exemplary embodiment includes micromechanical structures configured to form a uniform reflective surface on a substrate, an elastic substance coupled to the substrate, and an energy source that applies a voltage to the elastic substance to alter the shape of the surface of the substrate, for example, by about 10% to about 25% of a wavelength of light projected onto the substrate at a frequency of at least 60 Hz. Another exemplary embodiment includes micromechanical structures formed on a surface of a substrate, a reflective diaphragm connected to the substrate, an elastic substance coupled to the diaphragm, and an energy source that applies a voltage to the elastic substance to vibrate the diaphragm at a frequency of at least 60 Hz.

Abstract: A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion.

Abstract: A method for improving the alignment of the bi-directional scan lines of a resonant mirror imaging system is disclosed. The method includes sensing the position of the mirror and selecting a portion of each scan line, such as the exact middle 50% and the start points of the scan lines in both directions for displaying the image. Determine the specific number of pixels used to modulate the scan lines and the clocking rate at which the pixels are inserted on the light beam so that the pixels completely fill the selected portion of the scan lines. The clock rate is then adjusted to the determined rate.

Abstract: In an optical deflector including a mirror, a fixed frame surrounding the mirror, and first and second piezoelectric actuators of a meander-type provided opposite to each other with respect to the mirror, for rocking the mirror around an axis on a plane of the fixed frame, the first piezoelectric actuator includes a plurality of first piezoelectric cantilevers folded at first folded portions and coupled to the fixed frame, and the second piezoelectric actuator includes a plurality of second piezoelectric cantilevers folded at second folded portions and coupled to the fixed frame. The optical deflector further includes at least one first crossing bar coupled between one of the first folded portions and one of the second folded portions symmetrically located with respect to the mirror.

Abstract: A projection display device includes: a light source unit including light sources emitting light in a plurality of colors, condenser lenses and a color combining optical element; a total reflection prism that totally reflects a combined light flux from the color combining optical element so as to be guided to an image forming unit; and a projection lens. At least one of; an entry surface of the color combining optical element through which substantially parallel light fluxes from the condenser lenses enter, an exit surface of the color combining optical element through which the combined light flux exists, and an entry surface of the total reflection prism through which the combined light flux enters, is formed as a free curved surface where a shape of a section of the combined light flux is altered so as to be matched with a shape of an outline of the display area.

Abstract: An actuator is configured of a frame element, a pair of beam elements, a movable element rotatably supported by the frame element via the beam elements, a driver configured to rotate the movable element relative to the frame element around the beam elements as a rotary shaft; and damper elements provided on the rotary axis of the beam elements.

Abstract: A light deflector includes: a movable plate; an elastic support section having a first end coupled to the movable plate and adapted to support the movable plate rotatably around a predetermined axis; a support member coupled to a second end of the elastic support section; and a light absorbing section having a light absorbing property, wherein the elastic support section has an upper surface, a lower surface, and at least one side surfaces, each of the side surfaces being formed of one or more tilted surfaces existing outside either one of the upper surface and the lower surface, and the light absorbing section is disposed on the upper surface and the at least one side surfaces of the elastic support section.

Abstract: A drive apparatus and a beam-steering apparatus fabricated from a MEMS process. The apparatus has a first layer, a second layer and a plurality of fluid-filled volumes defined there between. A plurality of flexible structures such as bellows structures are defined on the first layer and are configured whereby a predetermined pressure in each of the volumes results in a predetermined displacement of the flexible structures. Pressurization means selectively changes the pressures in each of the volumes to define the predetermined displacement of the flexible structures. An electromagnetically reflective or mirror element and a plurality of drive beams are affixed to the reflective element and to one of the plurality of flexible structures whereby selected pressurization of the fluid in the volumes causes a predetermined displacement of the flexible structure to displace the reflective element about the plane of its surface.

Abstract: A method for fabricating a micro-structure is provided, which can simply and easily fabricate the micro-structure by a batch process of directly forming a highly aligned nano-material array on a micro-structure to be used as an adhesive material during plastic deformation of the micro-structure without the use of existing complicated fabrication process.

Abstract: An optical scanning device, having: a substrate main body; two cantilever beams protruded from the respective side portion of one side of the substrate main body; a mirror supported by torsion bars from the respective side, between the cantilever beams; a drive source to causes the substrate main body to vibrate; and a light source to project light onto the mirror, wherein a fixed end of the substrate main body is fixed to a supporting member, on the opposite side from the mirror side, and wherein the mirror resonantly vibrates according to vibration applied to the substrate by the drive source, thereby to change a direction of reflection light of the light projected onto the mirror from the light source according to the vibration of the mirror, characterized in that a Si mirror is attached to and fixed on the mirror.

Abstract: An actuator includes a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion, an insulating layer provided on a surface of the base, and a conductive portion having conductivity and provided on the insulating layer. In a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.

Abstract: A method of operating by pulse width modulation a micromirror device is disclosed. In one aspect, the method includes providing a micromirror device having a micromirror element electrostatically deflectable around a rotation axis between a first and second position. The micromirror element is controllable by applying voltage signals to a first and second electrode on one side of the rotation axis and a third and fourth electrode on the other side. The method includes associating an intermediate value of intensity to the micromirror element during a time frame, the intensity being between a first value corresponding to the first position and a second value corresponding to the second position. The method includes switching the micromirror element between the first and second position. The intermediate value corresponds to the ratio of periods in the time frame in which the micromirror element is in the first or second position.

Abstract: An actuator includes a movable section swinging around a predetermined swing axis, a connecting section extending from the movable section, and being torsionally deformed in accordance with swing of the movable section, a support section supporting the connecting section, a magnet being disposed on a plate surface of the movable section, and a coil generating a magnetic field acting on the magnet to thereby swing the movable section, and the movable section has a cross shape in a plan view.

Abstract: A micromechanical component having a displaceable part connected to a residual substrate by at least one spring, and including first and second subunits, between which an insulating intermediate layer and at least one semiconductor boundary layer is formed; an inner region of the first subunit, which inner region is aligned with the second subunit, being patterned out of a substrate using at least one cavity etched in a first etching direction; an outer region of the first subunit of the displaceable part, which outer region faces away from the second subunit, being patterned out of the substrate using at least one hollowed-out section etched in a second etching direction; the second subunit being patterned out of a semiconductor layer deposited onto the insulating intermediate layer and/or on the at least one semiconductor boundary layer using at least one continuous separating trench. Also described is a related manufacturing method.

Abstract: A wafer-level optical deflector assembly is formed on a front surface side of a wafer. Then, the front surface side of the wafer is etched by using elements of the wafer-level optical deflector assembly, to form a front-side dicing street. Then, a transparent substrate with an inside cavity is adhered to the front surface side of the wafer. Then, a second etching mask is formed on a back surface side of the wafer. Then, the back surface side of the wafer is etched to create a back-side dicing street. Then, an adhesive sheet with a ring-shaped rim is adhered to the back surface side of the wafer. Then, the transparent substrate is removed. Finally, the ring-shaped rim is expanded to widen the front-side dicing street and the back-side dicing street to pick up optical deflectors one by one from the wafer.

Abstract: A vibrating mirror element includes a mirror part that reflects light and is tiltable around a rotation axis, a first deformable coupling beam and a second deformable coupling beam connected respectively to a first mirror end portion and a second mirror end portion of the mirror part positioned on an intersection line that intersects the rotation axis, and a first drive part and a second drive part that each include a piezoelectric element that deforms by voltage application, the first drive part and a second drive part connected respectively to the first deformable coupling beam and the second deformable coupling beam.

Abstract: An optical scanning device of the invention includes: a substrate; torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, and the direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and a spring constant in a longitudinal direction of the torsion bar portion supporting the mirror portion is distributed along the longitudinal direction of the torsion bar portion.

Abstract: Embodiments of the subject invention relate to micromirror devices and methods of fabricating a micromirror/micromirror array. According to an embodiment, micromirrors can be fabricated from a semiconductor substrate where after forming actuators and bonding pads on a front side of the semiconductor substrate, the device is flipped over to have a portion of the back side of the substrate removed and formed to become the mirror plate surface. The subject micromirrors can allow further miniaturization of endoscopes and other optical applications without sacrificing the optical aperture through their surface mounting capabilities.

Abstract: A component having a mounting support, a displaceable part, which is joined to the mounting support by at least one flexible joining component, and an actuator device. The actuator device is configured to set at least one subunit of the displaceable part and/or of the at least one flexible joining component into a first oscillatory motion along a first axis in such a manner, that the displaceable part may be set into an angular oscillatory motion about a first rotational axis. The actuator device is additionally configured to set the same and/or another subunit into a second oscillatory motion having a motion component along a second axis at an inclination to the first axis, in such a manner, that, in addition to the angular oscillatory motion, the displaceable part is displaceable about a second rotational axis.

Abstract: In a two-dimensional optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator connected between the movable frame and the mirror and adapted to rock the mirror with respect to a first axis of the mirror, a support body supporting the movable frame, and a second piezoelectric actuator connected between the support body and the movable frame and adapted to rock the mirror through the movable frame with respect to a second axis of the mirror, at least one piezoelectric sensor is provided on the movable frame and adapted to sense rocking vibrations of the mirror caused by the first and second piezoelectric actuators.

Abstract: MEMS hierarchically-dimensioned optical mirrors, each comprising a substrate, a plurality of spacers disposed on the substrate, a plurality of piezoelectric/electrostrictive cantilever microactuators disposed on the plurality of spacers, and a monolithic deformable mirror or a segmented mirror array disposed on the plurality of the cantilever assemblies, having significantly improved overall device performances owing to the use of the cantilever microactuators based on relaxor ferroelectric single crystal materials and/or other piezoelectric/electrostrictive materials, are disclosed along with methods of manufacturing such devices.

Abstract: In the method of manufacturing a micro structure including a membrane in a first substrate, a movable portion, a movable comb electrode, a suppressing unit, a support portion, and a fixed comb electrode are formed, and the movable portion of the first substrate and a second substrate are bonded. Then, the bonded second substrate is processed to form a membrane such as a reflecting portion. The movable comb electrode is supported by the movable portion and extends in a direction parallel to the membrane surface. The suppressing unit suppresses displacement of the movable comb electrode and the movable portion in a direction other than a direction normal to the membrane surface. The fixed comb electrode is supported by the support portion and extends in the direction parallel to the membrane surface. The fixed comb electrode is alternately arranged with respect to the movable comb electrode with a gap therebetween.

Abstract: A light scanner includes a light reflection part having light reflectivity, a movable part having the light reflection part and being rotatable around a first rotation center axis and a second rotation center axis, a pair of movable beams extending from the movable part, a displacement part connected to the movable beams and rotating the movable part around the first rotation center axis, a first drive part that drives the displacement part, a pair of drive beams extending from the displacement part in parallel to the light reflection surface and orthogonal to an extension direction of the movable beams, a support frame that supports the drive beams, and a second drive part that rotates the movable part around the second rotation center axis, and the movable beam has a bending part that bendingly deforms due to displacement of the displacement part.

Abstract: In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.

Abstract: A passive suspension for a bimorph or other self-deforming mirror includes elements, e.g., of herringbone shape, extending between an edge of the mirror substrate and a support structure. The elements have portions directed transversely (e.g. obliquely) relative to a direction of relative movement between the mirror edge and the support structure, so as to accommodate the movement by bending.

Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable plate which includes the light reflecting section and can be displaced; four link sections connected to the movable plate; and a supporting section supporting the four link sections. The four link sections are provided on an outer circumference of the movable plate at 90-degree intervals along a circumferential direction of the movable plate in a plan view. Each link section includes a turnable drive section, and a shaft section which connects the movable plate and the drive section. The shaft section is bent and deformed in a thickness direction of the movable plate by turning the drive section.

Abstract: A display apparatus includes a first insulating substrate including a display area in which a first opening is formed, as well as a non-display area. A second insulating substrate faces the first insulating substrate. The second insulating substrate includes a shutter part having a second opening corresponding to the first opening. The shutter part moves between two different positions to transmit or block light according to an overlap between the first opening and the second opening.

Abstract: An image forming apparatus has a light output unit, a light scanner that has a light reflection part reflecting the light from the light output unit, rotates the light reflection part around two axes, and scans with the light reflected by the light reflection part, and a scanner rotating unit the rotates the light scanner around a predetermined axis line while keeping a relative positional relation between an intersection of the two rotation axes and the light output unit constant, and the light scanner has a movable unit including the light reflection part, four connection parts provided at intervals of 90 degrees in an outer circumference of the movable unit, each of the connection parts has a shaft part that connects the movable unit and the drive unit and independently and bendingly deforms each of the shaft parts, and thereby, the movable unit rotates around the two axes.

Abstract: A method for manufacturing a micromechanical component is described, including the steps of: forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts; forming a first electrode-material layer on the first etch stop layer; forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern; forming a second electrode-material layer on the second etch stop layer; forming a patterned mask on the second electrode-material layer; and carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction in order to etch at least one first electrode unit out of the first electrode-material layer and to etch at least one second electrode unit out of the second electrode-material layer.

Abstract: An optical filter comprising a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, and a second mirror formed on the concave portion and facing the first mirror, wherein the first substrate includes a first portion located on the first mirror, a second portion located around the first portion, a third portion located around the second portion, and a fourth portion located around the third portion, wherein both a thickness of the second portion and a thickness of the fourth portion are equal to or smaller than a thickness of the first portion.

Abstract: An optical system with optical image stabilization of the present invention compensates the movement of the optical system occurring during imaging process using a Micro-Electro Mechanical System (MEMS) unit having an MEMS mirror to stabilize an image of an object formed on an image plane. A micro-actuator with the in-plane translation makes the MEMS mirror have a required rotation to change optical paths of light from the object to the image plane for optical image stabilization. The optical system with optical image stabilization or the present invention provides fast speed, light weight, simple operation, and high image quality image stabilization for the optical system.

Abstract: There is provided an optical scanner, and an image forming apparatus and an image display apparatus which have the optical scanner. The optical scanner includes a mirror portion having a base plate portion, and a reflective portion which is adhered to a surface of the base plate portion; and a torsion beam portion which is connected to the mirror portion, made of a same material as the base plate portion and integrally formed with the base plate portion, and which is configured to be torsionally vibrated. The reflective portion includes a reinforcement portion and a reflective surface. The reinforcement portion is made of material having a density lower than that of the base plate portion and a Young's modulus greater than that of the base plate portion. The reflective surface is formed on a surface of the reinforcement portion and is configured to reflect the incident light.

Abstract: In an optical deflector including a mirror, a rib formed at an outer circumference of the mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror and coupled between the support frame and the mirror, and a pair of actuators arranged between the support frame and the torsion bar, a recess opposing the torsion bar is formed within the rib.

Abstract: The present disclosure provides methods, systems, and apparatus for directing incident light toward central regions of interferometric modulator displays. In one aspect, a display includes an array of microlenses embedded in a substrate adjacent a first surface of the substrate. An array of light modulators can be disposed over the first surface of the substrate. A light modulator can be disposed over a corresponding microlens. The microlenses can converge or concentrate incident light onto central regions of the corresponding light modulators. The microlenses may include single-element lenses, compound lenses, and/or graded-index lenses. Various methods of manufacturing such displays are also disclosed.

Abstract: The present invention is directed to a two-dimensional scanning arrangement for a laser vein-illumination device that includes a base and a frame connected to the base using at least one flexible hinge. The hinge allows the frame to move angularly with respect to the base in a first direction. The invention further includes a means for exciting angular oscillations of the frame at or near said frame's resonant frequency. An elastic torsional element having a proximal end rigidly attached to said frame and a distal end rigidly attached to a mirror is also included. The torsional element allows the mirror to move angularly with respect to the frame in a second direction, generally perpendicular to the first direction. There may also be a means for exciting the angular oscillations of the mirror. The invention also includes a device for optically inspecting confined spaces having one or more small access orifices.

Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.

Abstract: An actuator, includes: a movable plate; a supporter to support the movable plate; a pair of linking portions to link the movable plate and the supporter so as to allow the movable plate to rotate relative to the supporter; and a piezoelectric element to rotate the movable plate. The piezoelectric element elongated and contracted by an energization twists the pair of linking portions to rotate the movable plate, and each of the pair of the linking portions includes an axial member extending from the movable plate and a returned portion that links the axial member and the supporter and is formed so as to return to a side adjacent to the movable plate.