Abstract: A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.

Abstract: The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.

Abstract: An extreme ultraviolet radiation generating device includes a source operable to generate a first and second entrance beam, and a beam unit operable to modify at least one of a direction and a beam divergence of the first and second entrance beam, in which the beam unit includes: a beam splitter to receive the first and second entrance beam, the beam splitter being configured to reflect the first entrance beam as a first exit beam and to transmit the second entrance beam; and a mirror in the beam path of the transmitted, second entrance beam to reflect the second entrance beam to form a second exit beam that is transmitted by the beam splitter and that is at least partially superposed on the first exit beam, in which the beam unit is configured to modify an angle and/or beam divergence between the first and second exit beam.

Abstract: A micromirror for a micromirror device includes: a mirror side; and a back side which is directed away from the mirror side, at least one central area of the back side having at least one surface which is plane parallel to the mirror side, the back side being shaped in such a way that on two opposite sides of the central area, a side area having at least one side surface of the back side in each case, which is curved and/or oriented inclined toward the mirror side borders on the central area of the back side, and a height of the micromirror continuously decreasing starting from the central area along a cross section of the micromirror, which runs through the central area and the two side areas.

Abstract: A MEMS sensor is disclosed. The MEMS sensor includes a MEMS structure and a substrate coupled to the MEMS structure. The substrate includes a layer of metal and a layer of dielectric material. The MEMS structure moves in response to an excitation. A first over-travel stop is formed on the substrate at a first distance from the MEMS structure. A second over-travel stop on the substrate at a second distance from the MEMS structure. At least one electrode on the substrate at a third distance from the MEMS structure. The first, second and third distances are all different.

Abstract: A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.

Abstract: A control method for a vibration generator is provided. The vibration generator includes a fixed part around which a coil is wound, a movable part having a magnet, a bridge part movably supporting the movable part, and a power supply unit which applies an alternating current of a predetermined frequency to the coil. The power supply unit starts at the time of startup by the alternating current with a starting frequency which differs from a resonance frequency of the movable part, and the power supply unit changes the frequency of the applied alternating current to the resonance frequency of the movable part when the amount of vibration at the starting frequency reaches a predetermined ratio with respect to a saturation vibration amount of the resonance frequency.

Abstract: A method and system for a device with a magnetic sensor includes a first permanent magnet and a second permanent magnet. The first permanent magnet and the second permanent magnet of the magnetic sensor have at least one alternating ferromagnetic (FM) layer and antiferromagnetic (AFM) layer. The first permanent magnet is magnetized in a first direction and the second permanent magnet is magnetized in a second direction which is substantially orthogonal to the first direction. The blocking temperature of the AFM layer of the first permanent magnet is higher than the blocking temperature of the AFM layer of the second permanent magnet.

Abstract: An optical deflector includes a mirror unit and a support member. The mirror unit includes a vibration mirror part extending in a main scanning direction and a torsion bar part extending in a direction crossing the main scanning direction and supporting the vibration mirror part. The support member supports the mirror unit. The support member has a pair of solid parts. The pair of solid parts are arranged adjacent to the circumferential side surfaces of both end portions of the vibration mirror part in the main scanning direction and suppress a vortex generated when the vibration mirror part vibrates. The optical deflector further includes a positioning mechanism which performs positioning of the mirror unit for the support member so that a clearance distance between each solid part and the circumferential side surfaces of both end portions of the vibration mirror part becomes a preset setting distance.

Abstract: A device projecting images by micro electro-mechanical system (MEMS) technology mirrors includes a base, a rotating seat, a substrate, a reflective mirror, a driver, and a controller. The rotating seat is rotably positioned on the base. The substrate is positioned on the rotating seat. The at least one MEMS reflective mirror is formed on the substrate and configured for rotating in two directions under control of the attached driver and controller to form two-dimensional images in a range.

Abstract: An apparatus having a variable angle light source characterized by a pivot point, a variable response optical receiver, and a first optical system is disclosed. The variable response optical receiver receives light generated by the light source on a receiving surface, the receiver generating a signal indicative of an intensity of light that impinges on a receiving surface. The first optical system images the pivot point to a fixed point relative to the receiver surface. In one aspect of the invention the first optical system is chosen such that light from the variable angle light source covers more& than half the receiving surface. The variable angle light source can include a gain chip in a semiconductor laser having a pivot point located substantially on a facet of the gain chip.

Abstract: A demultiplexer includes an input optical link to receive an input signal. A grating receives the input signal from the input optical link and generates individual optical wavelength signals. A mirror array operative as a beam steering engine receives the individual optical wavelength signals and redirects them to the grating. Output optical links receive the individual optical wavelength signals from the grating.

Abstract: Semiconductor devices and fabrication methods are provided. In a semiconductor device, a semiconductor substrate includes a first electrode layer having a top surface coplanar with a top surface of the semiconductor substrate. A sacrificial layer is formed on the semiconductor substrate and the first electrode layer. A first mask layer made of a conductive material is formed on the sacrificial layer. The first mask layer and the sacrificial layer are etched until a surface of the first electrode layer is exposed to form openings through the first mask layer and the sacrificial layer. A cleaning process is performed to remove etch byproducts adhered to a surface of the first mask layer and adhered to sidewalls and bottom surfaces of the openings. Conductive plugs are formed in the openings after the cleaning process.

Abstract: An optical scanning device includes a mirror that oscillates to scan incident visible light. The mirror includes a substrate, a metal film formed on the substrate, and an reflection enhancing film stacked on the metal film.

Abstract: In one embodiment, micro-electro-mechanical-system (MEMS) mirror structure includes an electrode plate including a first deflection electrode and a second deflection electrode, where the second deflection electrode is opposite the first deflection electrode, where the first deflection electrode is configured to receive a first drive voltage, and where the second deflection electrode is configured to receive a second drive voltage. The MEMS mirror structure also includes a mirror support pillar disposed on the electrode plate, where the mirror support pillar has a bearing surface and a mirror disposed above the bearing surface of the support pillar, where the mirror has a deflection angle, and where the first voltage is nonzero when the deflection angle is zero.

Abstract: An optical scanner includes: a movable plate which includes a light reflection unit; a first torsion bar which oscillatably supports the movable plate around a first axis; a first displacement member which is connected to the first torsion bar; a second torsion bar which oscillatably supports the first displacement member around a second axis; a second displacement member which is connected to the second torsion bar; and an actuator which is installed on the second displacement member and applies a displacement to the second displacement member so as to apply torsional deformation and bending deformation to the second torsion bar, in which the first displacement member includes a frame member surrounding the movable plate, and a damper which has a smaller thickness than that of the frame member and extends in a direction intersecting with a direction in which the second torsion bar extends from the frame member.

Abstract: An electronic device may be provided with a display mounted in a housing. The display may have an array of display pixels that provide light to a user. The array of display pixels may form active display structures with a rectangular shape. The rectangular active display structures may be surrounded by an inactive border region. Reflector structures may be used to reflect light that is emitted from peripheral portions of the active display structures to a portion of the display overlapping the inactive border region, thereby providing the display with an effective active area that is larger than the area of the active display structures. The reflector structures may include rotatable reflectors. Control circuitry may use a rotatable positioner to rotate rotatable reflector structures in synchronization with controlling which pixel data is displayed by the display pixels in the peripheral portions of the active display structures.

Abstract: An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate.

Abstract: An actuator includes a light reflection part having light reflectivity, a movable part having the light reflection part and being rotatable around a rotation center axis, a pair of connection parts connected to the movable part, and a support part that supports the pair of connection parts, and each of the connection parts includes a pair of beam members, a distance between the pair of beam members gradually increases from a first surface side toward a second surface side of the movable part when seen from a direction in parallel to the rotation center axis of the movable part, and given that a distance between ends at the first surface side of the pair of beam members is W1 and a thickness of the pair of beam members in a thickness direction of the movable part is t, the following expression (1) is satisfied. w 1 < t tan ? ? 54.

Abstract: A method and apparatus for resonant rotational oscillator have been disclosed. In one version a moving coil is mounted on a rotating member. By using a magnetic assembly and the moving coil the rotating member is made to rotate.

Abstract: A method for varying a radius of curvature of a concave mirror includes coupling a concave mirror to a mirror frame, coupling the mirror frame to a vertical slide, coupling the vertical slide to a horizontal slide, coupling the horizontal slide to a fixed support, coupling an end of the mirror frame to an actuator, coupling a first proximity sensor to the mirror frame, coupling a second proximity sensor to the horizontal slide, and coupling a third proximity sensor to the vertical slide. The method also includes translating the mirror frame along the vertical slide and translating the vertical slide along the horizontal slide to facilitate aligning a pole of the concave mirror with a center of an object, and varying the radius of curvature of the concave mirror to magnify an image of an object in the concave mirror for optimum clarity.

Abstract: The disclosure relates to optical arrangements in a microlithographic projection exposure apparatus. In accordance with one aspect, an optical arrangement has at least one mirror segment arrangement including a plurality of separate mirror segments. The mirror segments are connected to a carrying structure of the projection exposure apparatus via mounting elements. At least one of the mounting elements, which is assigned to a first one of the mirror segments, extends, on the opposite side to the optically active surface of the mirror segment arrangement, at least partly into the region of a second mirror segment of the mirror segment arrangement. The second mirror segment is adjacent to the first mirror segment.

Abstract: This disclosure provides systems, methods and apparatus for actuating an electromechanical systems (EMS)-based light modulator. An actuator for an EMS-based light modulator can be formed from the combination of a drive electrode, an anchored shutter electrode, and a suspended shutter electrode. A parallel plate portion of the drive electrode along with the suspended shutter electrode form a parallel plate portion of the actuator. A zipper portion of the drive electrode and the anchored shutter electrode form a zipper portion of the actuator.

Abstract: This invention optimizes the settings of refrigeration components to achieve a power efficient state. First, the compressor is run at a level that achieves a desired temperature. Next, the invention searches for the most energy efficient settings (claimed as operation manipulation amounts) for the fans and indoor expansion valves. The search algorithm tries adjusting the settings of each component by a predetermined amount, adopting the setting that is the most energy efficient for the refrigeration cycle. The algorithm then increases or decreases the predetermined amount, as appropriate, and repeats the search. This allows the invention to quickly and accurately converge on the most energy efficient setting for each component.

Abstract: A method of measuring aberrations in a null-lens including assembly and alignment aberrations. The null-lens may be used for measuring aberrations in an aspheric optic with the null-lens. Light propagates from the aspheric optic location through the null-lens, while sweeping a detector through the null-lens focal plane. Image data being is collected at locations about said focal plane. Light is simulated propagating to the collection locations for each collected image. Null-lens aberrations may extracted, e.g., applying image-based wavefront-sensing to collected images and simulation results. The null-lens aberrations improve accuracy in measuring aspheric optic aberrations.

Abstract: A terahertz (THz) imaging device includes a tunable filter and a focal plane array (FPA) for receiving selected optical wavelengths of light. The tunable filter includes: (a) a first mirror comprised of a thick silicon substrate and a thin silicon membrane, in which the thin silicon membrane is separated from the thick silicon substrate by a gridded cell structure, (b) a second mirror comprised of a thick silicon substrate and a thin silicon membrane, in which the thin silicon membrane is separated from the thick silicon substrate by another gridded cell structure, and (c) a variable gap disposed between the first and second mirrors. The gridded cell structure may have a hexagonal shape, a square shape, a rectangular shape, a triangular shape or a rhombus-like shape.

Abstract: A system for capturing aerial images, the system comprising at least one steerable camera module, the steerable camera module comprising a camera and a beam-steering mechanism in the optical path of the camera module whereby the pointing direction of the camera is time-multiplexed to provide a wider effective field of view, the beam-steering mechanism comprising a steerable mirror tilted with respect to an optical axis of the camera module, the steerable mirror adapted to spin about the optical axis to effect beam steering.

Abstract: An optical scanning device includes movable mirror (21) reflecting a light beam applied thereto, first beam (22) joined to an end of movable mirror (21), second beam (23) joined to another end of movable mirror (21), first piezoelectric element (11) generating stress or swinging movable mirror (21) through first beam (22), and second piezoelectric element (12) generating stress for swinging movable mirror (21) through first beam (22). First and second piezoelectric elements (11, 12) have respective patterns whose longitudinal directions are aligned with a longitudinal direction of first beam (11). First and second piezoelectric elements (11, 12) are disposed on a support plate (3) which is joined to the first and second beams (22 23) and with an insulative distance being present between first and second piezoelectric elements (11, 12).

Abstract: Provided is technique for a semiconductor device including a substrate and a tilting plate which is tiltable relatively to the substrate, the technique being capable of effectively suppressing warpage of the tilting plate. The semiconductor device of the present specification includes a substrate and a tilting plate which is tiltable relatively to the substrate. In the semiconductor device, a rib formed of wavelike portions where a plate thickness is substantially uniform is formed on the tilting plate.

Abstract: A vibrating mirror element includes a drive control portion configured to control the driving of a correction drive portion to keep the turning angle velocity of a mirror portion substantially constant by oscillating the mirror portion about an axis at a non-resonance frequency in a direction opposite to a direction in which a resonant drive portion oscillates the mirror portion.

Abstract: In an optical deflector including a mirror, a movable ring-shaped frame surrounding the mirror, a pair of torsion bars connected between the mirror and the movable ring-shaped frame and oppositely arranged along a rocking direction of the mirror, a support body surrounding the movable ring-shaped frame, and piezoelectric actuators for rocking the mirror through the torsion bars along the rocking direction, first, second, third and fourth coupling bars are connected between the support body and the movable ring-shaped frame. The first and third coupling bars are oppositely arranged along a first direction obtained by inclining the rocking direction by a first predetermined angle between +30° and +45°, and the second and fourth coupling bars are oppositely arranged along a second direction obtained by inclining the rocking direction by a second predetermined angle between ?30° and ?60°.

Abstract: An optical reflecting device includes a mirror, a frame connected to the mirror, and a driver beam configured to vibrate to rotate the mirror about a rotation axis. Rigidity of the frame is higher than rigidity of the mirror. The rotation axis is perpendicular to a line that connects a first connecting part to a second connecting part. This optical reflecting device can suppress a dynamic warp of the mirror.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for accurately positioning a movable conductive layer of a reflective display element. In one aspect, an initial position of the movable conductive layer with respect to at least one or more fixed conductive layers is sensed. A charging voltage may be determined based at least in part on the initial position. The charging voltage may be applied to the movable conductive layer.

Abstract: An optical reflecting device includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The first oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.

Abstract: The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as minor, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.

Abstract: Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.

Abstract: An electrostatic display employing MEMS (Micro-Electro-Mechanical System) technology is disclosed. The transition from white to black pixel color occurs as two cantilevers covering the pixel area are electrostatically turned from their position parallel to the substrate plane to the position normal to the substrate plane. Four electrode pixel control circuits are used to form row and column matrix. This matrix employs a bi-stability effect resulting from the difference in voltages needed to move the cantilever into an upright position and hold the cantilever in this position.

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: The present invention provides an optical apparatus for deforming a reflecting surface of a mirror, comprising a base plate, a plurality of first actuators each configured to apply a force to the surface opposite to the reflecting surface, a plurality of second actuators each having rigidity lower than that of the first actuator, and configured to apply a force to the surface opposite to the reflecting surface, a sensor configured to detect information indicating a driving status of each of the plurality of first actuators, and a control unit configured to control, based on an output of the sensor, driving of each of the plurality of first actuators and driving of each of the plurality of second actuators so that a shape of the reflecting surface is changed to a target shape.

Abstract: An optical deflecting mirror device includes a circular or elliptical mirror with a reflective front surface, and a figure “8”-shaped reinforcement rib provided on a rear surface of the mirror symmetrically along a rocking axis of the mirror. The figure “8”-shaped reinforcement rib includes two ring-shaped reinforcement ribs coupled to each other along the rocking axis.

Abstract: A controller for actuating a micromechanical actuator, including a first signal input which is designed to receive a reference signal, a second signal input which is designed to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal, a first controller element which is designed to filter and/or to attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered and/or attenuated reference signal, a second controller element which is designed to modify the received measuring signal in order to minimize the quality of the first mode of the received measuring signal and to output a modified measuring signal, a third controller element which is designed to minimize the deviation between the filtered and/or attenuated reference signal and the received measuring signal and to output a minimized reference signal, a fourth controller element which is designed to modify the bandwidth of the re

Abstract: An optical deflection device includes a mirror having a reflection face for deflecting light that enters the reflection face; and a support member to support the mirror including a torsion bar having one end being continuously connected to the mirror; a beam being continuously connected to another end of the torsion bar; and a plurality of piezoelectric elements disposed on the beam including a first piezoelectric element and a second piezoelectric element.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: An optical probe includes a laser light source that emits laser light, a collimator lens that converts the laser light into parallel light, a light shape changing section that converts the parallel light into linear laser light, an irradiating section to irradiate an object with a selected part of the linear laser light, an image pickup section that picks up an image of the object based on the laser light reflected from the object, and a controller that controls irradiation of the linear laser light. The linear laser light is composed of a plurality of parts including one end part and the other end part; and the irradiating section irradiates the object with the parts of the linear laser light sequentially from the one end part to the other end part.

Abstract: An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.

Abstract: A micromirror including a first layer having a first main extension plane, and a second layer having a second main extension plane, the first main extension plane and the second main extension plane being situated parallel to one another, the first layer and the second layer being sectionally connected to one another via at least one connection area, at least one spring element being implemented in the first layer, a movably suspended mirror plate being implemented in the second layer, the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element, a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate. A two-mirror system having such a micromirror is also provided.

Abstract: An optical deflector is provided which can effectively suppress occurrence of a ringing phenomenon when a piezoelectric actuator is driven with a voltage signal of a sawtooth waveform. An optical deflector A1 includes a control circuit 20 that detects a mechanical natural frequency relevant to swinging about a second axis X2 of a movable part 9. The control circuit 20 applies a voltage signal of a sawtooth waveform from which the natural frequency and a harmonic component thereof are removed to outside piezoelectric actuators 10a and 10b. The control circuit 20 removes a frequency component, which is equal to or greater than a second threshold value G2 within a predetermined frequency range out of frequency components of a voltage signal output from a detecting piezoelectric body 62, from a drive voltage.

Abstract: An optical scanning device includes a mirror part including a mirror reflecting surface to reflect incident light, a pair of torsion bars configured to support the mirror part from both sides and configured to forma first axis around which to swing the mirror part by a torsional motion thereof so as to deflect the reflected light, and at least one stress alleviation area configured to alleviate a stress generated by the torsional motion of the torsion bars. The alleviation area is provided between an intersection of a second axis perpendicular to the first axis and passing through the center of the mirror reflecting surface and an edge of the mirror reflecting surface, and at least one of the torsion bars.

Abstract: An illuminator includes: a light source section including a laser light source; an optical element through which a laser beam from the laser light source passes; a driving section oscillating the optical element; and a control section controlling, in a driving operation performed by the driving section, the driving operation to allow an oscillating amplitude value of the optical element in a startup period of the optical element to be equal to or less than the oscillating amplitude value of a steady-state operation period of the optical element that is subsequent to the startup period.