Reflective Element Moved By Deformable Support Patents (Class 359/224.1)
  • Publication number: 20140268271
    Abstract: In an optical deflector including a mirror, a fixed frame surrounding the mirror, and first and second piezoelectric actuators of a meander-type provided opposite to each other with respect to the mirror, for rocking the mirror around an axis on a plane of the fixed frame, the first piezoelectric actuator includes a plurality of first piezoelectric cantilevers folded at first folded portions and coupled to the fixed frame, and the second piezoelectric actuator includes a plurality of second piezoelectric cantilevers folded at second folded portions and coupled to the fixed frame. The optical deflector further includes at least one first crossing bar coupled between one of the first folded portions and one of the second folded portions symmetrically located with respect to the mirror.
    Type: Application
    Filed: March 17, 2014
    Publication date: September 18, 2014
    Applicant: STANLEY ELECTRIC CO., LTD.
    Inventor: Masanao TANI
  • Patent number: 8830551
    Abstract: An actuator is configured of a frame element, a pair of beam elements, a movable element rotatably supported by the frame element via the beam elements, a driver configured to rotate the movable element relative to the frame element around the beam elements as a rotary shaft; and damper elements provided on the rotary axis of the beam elements.
    Type: Grant
    Filed: October 25, 2011
    Date of Patent: September 9, 2014
    Assignee: Ricoh Company, Ltd.
    Inventors: Tomofumi Kitazawa, Goichi Akanuma, Mitsumi Fujii
  • Patent number: 8827464
    Abstract: A projection display device includes: a light source unit including light sources emitting light in a plurality of colors, condenser lenses and a color combining optical element; a total reflection prism that totally reflects a combined light flux from the color combining optical element so as to be guided to an image forming unit; and a projection lens. At least one of; an entry surface of the color combining optical element through which substantially parallel light fluxes from the condenser lenses enter, an exit surface of the color combining optical element through which the combined light flux exists, and an entry surface of the total reflection prism through which the combined light flux enters, is formed as a free curved surface where a shape of a section of the combined light flux is altered so as to be matched with a shape of an outline of the display area.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: September 9, 2014
    Assignee: Nikon Corporation
    Inventor: Aiko Namikawa
  • Patent number: 8830550
    Abstract: A light deflector includes: a movable plate; an elastic support section having a first end coupled to the movable plate and adapted to support the movable plate rotatably around a predetermined axis; a support member coupled to a second end of the elastic support section; and a light absorbing section having a light absorbing property, wherein the elastic support section has an upper surface, a lower surface, and at least one side surfaces, each of the side surfaces being formed of one or more tilted surfaces existing outside either one of the upper surface and the lower surface, and the light absorbing section is disposed on the upper surface and the at least one side surfaces of the elastic support section.
    Type: Grant
    Filed: August 3, 2010
    Date of Patent: September 9, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Makiko Nakamura, Yasushi Mizoguchi, Osamu Kobayashi
  • Publication number: 20140240810
    Abstract: A drive apparatus and a beam-steering apparatus fabricated from a MEMS process. The apparatus has a first layer, a second layer and a plurality of fluid-filled volumes defined there between. A plurality of flexible structures such as bellows structures are defined on the first layer and are configured whereby a predetermined pressure in each of the volumes results in a predetermined displacement of the flexible structures. Pressurization means selectively changes the pressures in each of the volumes to define the predetermined displacement of the flexible structures. An electromagnetically reflective or mirror element and a plurality of drive beams are affixed to the reflective element and to one of the plurality of flexible structures whereby selected pressurization of the fluid in the volumes causes a predetermined displacement of the flexible structure to displace the reflective element about the plane of its surface.
    Type: Application
    Filed: October 31, 2013
    Publication date: August 28, 2014
    Inventor: Itzhak Sapir
  • Patent number: 8810881
    Abstract: A method for fabricating a micro-structure is provided, which can simply and easily fabricate the micro-structure by a batch process of directly forming a highly aligned nano-material array on a micro-structure to be used as an adhesive material during plastic deformation of the micro-structure without the use of existing complicated fabrication process.
    Type: Grant
    Filed: June 4, 2012
    Date of Patent: August 19, 2014
    Assignee: Industry-Academic Cooperation Foundation Yonsei University
    Inventors: Jongbaeg Kim, Youngkee Eun, Jae-Ik Lee, Jungwook Choi, Youngsup Song
  • Patent number: 8804223
    Abstract: An optical scanning device, having: a substrate main body; two cantilever beams protruded from the respective side portion of one side of the substrate main body; a mirror supported by torsion bars from the respective side, between the cantilever beams; a drive source to causes the substrate main body to vibrate; and a light source to project light onto the mirror, wherein a fixed end of the substrate main body is fixed to a supporting member, on the opposite side from the mirror side, and wherein the mirror resonantly vibrates according to vibration applied to the substrate by the drive source, thereby to change a direction of reflection light of the light projected onto the mirror from the light source according to the vibration of the mirror, characterized in that a Si mirror is attached to and fixed on the mirror.
    Type: Grant
    Filed: September 9, 2010
    Date of Patent: August 12, 2014
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Jaehyuk Park, Jun Akedo
  • Patent number: 8797629
    Abstract: A method of operating by pulse width modulation a micromirror device is disclosed. In one aspect, the method includes providing a micromirror device having a micromirror element electrostatically deflectable around a rotation axis between a first and second position. The micromirror element is controllable by applying voltage signals to a first and second electrode on one side of the rotation axis and a third and fourth electrode on the other side. The method includes associating an intermediate value of intensity to the micromirror element during a time frame, the intensity being between a first value corresponding to the first position and a second value corresponding to the second position. The method includes switching the micromirror element between the first and second position. The intermediate value corresponds to the ratio of periods in the time frame in which the micromirror element is in the first or second position.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: August 5, 2014
    Assignees: IMEC, Universiteit Gent
    Inventors: Herbert De Smet, Roel Beernaert
  • Patent number: 8797625
    Abstract: An actuator includes a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion, an insulating layer provided on a surface of the base, and a conductive portion having conductivity and provided on the insulating layer. In a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.
    Type: Grant
    Filed: January 26, 2012
    Date of Patent: August 5, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Yasushi Mizoguchi
  • Patent number: 8790936
    Abstract: A wafer-level optical deflector assembly is formed on a front surface side of a wafer. Then, the front surface side of the wafer is etched by using elements of the wafer-level optical deflector assembly, to form a front-side dicing street. Then, a transparent substrate with an inside cavity is adhered to the front surface side of the wafer. Then, a second etching mask is formed on a back surface side of the wafer. Then, the back surface side of the wafer is etched to create a back-side dicing street. Then, an adhesive sheet with a ring-shaped rim is adhered to the back surface side of the wafer. Then, the transparent substrate is removed. Finally, the ring-shaped rim is expanded to widen the front-side dicing street and the back-side dicing street to pick up optical deflectors one by one from the wafer.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: July 29, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Yoshiaki Yasuda
  • Patent number: 8792153
    Abstract: A micromechanical component having a displaceable part connected to a residual substrate by at least one spring, and including first and second subunits, between which an insulating intermediate layer and at least one semiconductor boundary layer is formed; an inner region of the first subunit, which inner region is aligned with the second subunit, being patterned out of a substrate using at least one cavity etched in a first etching direction; an outer region of the first subunit of the displaceable part, which outer region faces away from the second subunit, being patterned out of the substrate using at least one hollowed-out section etched in a second etching direction; the second subunit being patterned out of a semiconductor layer deposited onto the insulating intermediate layer and/or on the at least one semiconductor boundary layer using at least one continuous separating trench. Also described is a related manufacturing method.
    Type: Grant
    Filed: August 15, 2012
    Date of Patent: July 29, 2014
    Assignee: Robert Bosch GmbH
    Inventor: Jochen Reinmuth
  • Patent number: 8792152
    Abstract: An actuator includes a movable section swinging around a predetermined swing axis, a connecting section extending from the movable section, and being torsionally deformed in accordance with swing of the movable section, a support section supporting the connecting section, a magnet being disposed on a plate surface of the movable section, and a coil generating a magnetic field acting on the magnet to thereby swing the movable section, and the movable section has a cross shape in a plan view.
    Type: Grant
    Filed: July 30, 2012
    Date of Patent: July 29, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Makiko Hino, Yasushi Mizoguchi
  • Publication number: 20140198260
    Abstract: A vibrating mirror element includes a mirror part that reflects light and is tiltable around a rotation axis, a first deformable coupling beam and a second deformable coupling beam connected respectively to a first mirror end portion and a second mirror end portion of the mirror part positioned on an intersection line that intersects the rotation axis, and a first drive part and a second drive part that each include a piezoelectric element that deforms by voltage application, the first drive part and a second drive part connected respectively to the first deformable coupling beam and the second deformable coupling beam.
    Type: Application
    Filed: December 17, 2013
    Publication date: July 17, 2014
    Applicant: FUNAI ELECTRIC CO., LTD.
    Inventor: Manabu Murayama
  • Patent number: 8755102
    Abstract: An optical scanning device of the invention includes: a substrate; torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, and the direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and a spring constant in a longitudinal direction of the torsion bar portion supporting the mirror portion is distributed along the longitudinal direction of the torsion bar portion.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: June 17, 2014
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Jun Akedo, Jaehyuk Park
  • Patent number: 8743449
    Abstract: Embodiments of the subject invention relate to micromirror devices and methods of fabricating a micromirror/micromirror array. According to an embodiment, micromirrors can be fabricated from a semiconductor substrate where after forming actuators and bonding pads on a front side of the semiconductor substrate, the device is flipped over to have a portion of the back side of the substrate removed and formed to become the mirror plate surface. The subject micromirrors can allow further miniaturization of endoscopes and other optical applications without sacrificing the optical aperture through their surface mounting capabilities.
    Type: Grant
    Filed: June 1, 2010
    Date of Patent: June 3, 2014
    Inventors: Huikai Xie, Kemiao Jia
  • Patent number: 8736934
    Abstract: A component having a mounting support, a displaceable part, which is joined to the mounting support by at least one flexible joining component, and an actuator device. The actuator device is configured to set at least one subunit of the displaceable part and/or of the at least one flexible joining component into a first oscillatory motion along a first axis in such a manner, that the displaceable part may be set into an angular oscillatory motion about a first rotational axis. The actuator device is additionally configured to set the same and/or another subunit into a second oscillatory motion having a motion component along a second axis at an inclination to the first axis, in such a manner, that, in addition to the angular oscillatory motion, the displaceable part is displaceable about a second rotational axis.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: May 27, 2014
    Assignee: Robert Bosch GmbH
    Inventor: Stefan Pinter
  • Patent number: 8730549
    Abstract: In a two-dimensional optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator connected between the movable frame and the mirror and adapted to rock the mirror with respect to a first axis of the mirror, a support body supporting the movable frame, and a second piezoelectric actuator connected between the support body and the movable frame and adapted to rock the mirror through the movable frame with respect to a second axis of the mirror, at least one piezoelectric sensor is provided on the movable frame and adapted to sense rocking vibrations of the mirror caused by the first and second piezoelectric actuators.
    Type: Grant
    Filed: May 31, 2012
    Date of Patent: May 20, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Takanori Aimono
  • Patent number: 8724200
    Abstract: MEMS hierarchically-dimensioned optical mirrors, each comprising a substrate, a plurality of spacers disposed on the substrate, a plurality of piezoelectric/electrostrictive cantilever microactuators disposed on the plurality of spacers, and a monolithic deformable mirror or a segmented mirror array disposed on the plurality of the cantilever assemblies, having significantly improved overall device performances owing to the use of the cantilever microactuators based on relaxor ferroelectric single crystal materials and/or other piezoelectric/electrostrictive materials, are disclosed along with methods of manufacturing such devices.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: May 13, 2014
    Inventor: Xingtao Wu
  • Publication number: 20140126034
    Abstract: In the method of manufacturing a micro structure including a membrane in a first substrate, a movable portion, a movable comb electrode, a suppressing unit, a support portion, and a fixed comb electrode are formed, and the movable portion of the first substrate and a second substrate are bonded. Then, the bonded second substrate is processed to form a membrane such as a reflecting portion. The movable comb electrode is supported by the movable portion and extends in a direction parallel to the membrane surface. The suppressing unit suppresses displacement of the movable comb electrode and the movable portion in a direction other than a direction normal to the membrane surface. The fixed comb electrode is supported by the support portion and extends in the direction parallel to the membrane surface. The fixed comb electrode is alternately arranged with respect to the movable comb electrode with a gap therebetween.
    Type: Application
    Filed: October 29, 2013
    Publication date: May 8, 2014
    Applicant: Canon Kabushiki Kaisha
    Inventors: Hiroyuki Ozaki, Yasuhiro Shimada, Koichiro Nakanishi, Akira Shimazu, Kenji Tamamori
  • Patent number: 8717653
    Abstract: A light scanner includes a light reflection part having light reflectivity, a movable part having the light reflection part and being rotatable around a first rotation center axis and a second rotation center axis, a pair of movable beams extending from the movable part, a displacement part connected to the movable beams and rotating the movable part around the first rotation center axis, a first drive part that drives the displacement part, a pair of drive beams extending from the displacement part in parallel to the light reflection surface and orthogonal to an extension direction of the movable beams, a support frame that supports the drive beams, and a second drive part that rotates the movable part around the second rotation center axis, and the movable beam has a bending part that bendingly deforms due to displacement of the displacement part.
    Type: Grant
    Filed: July 29, 2011
    Date of Patent: May 6, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Emi Watanabe, Yasushi Mizoguchi
  • Patent number: 8711460
    Abstract: In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.
    Type: Grant
    Filed: June 24, 2009
    Date of Patent: April 29, 2014
    Assignee: Panasonic Corporation
    Inventors: Hideki Ueda, Hiroshi Noge, Kiyohiko Kawano, Hiroaki Tachibana
  • Patent number: 8699113
    Abstract: A passive suspension for a bimorph or other self-deforming mirror includes elements, e.g., of herringbone shape, extending between an edge of the mirror substrate and a support structure. The elements have portions directed transversely (e.g. obliquely) relative to a direction of relative movement between the mirror edge and the support structure, so as to accommodate the movement by bending.
    Type: Grant
    Filed: November 17, 2009
    Date of Patent: April 15, 2014
    Assignee: BAE SYSTEMS plc
    Inventors: Michael Stewart Griffith, Leslie Charles Laycock, Nicholas John Archer
  • Patent number: 8698170
    Abstract: A display apparatus includes a first insulating substrate including a display area in which a first opening is formed, as well as a non-display area. A second insulating substrate faces the first insulating substrate. The second insulating substrate includes a shutter part having a second opening corresponding to the first opening. The shutter part moves between two different positions to transmit or block light according to an overlap between the first opening and the second opening.
    Type: Grant
    Filed: August 10, 2011
    Date of Patent: April 15, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventors: Yu-Kwan Kim, Junghan Shin, Jae Byung Park
  • Patent number: 8699112
    Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable plate which includes the light reflecting section and can be displaced; four link sections connected to the movable plate; and a supporting section supporting the four link sections. The four link sections are provided on an outer circumference of the movable plate at 90-degree intervals along a circumferential direction of the movable plate in a plan view. Each link section includes a turnable drive section, and a shaft section which connects the movable plate and the drive section. The shaft section is bent and deformed in a thickness direction of the movable plate by turning the drive section.
    Type: Grant
    Filed: February 22, 2011
    Date of Patent: April 15, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Yasushi Mizoguchi
  • Patent number: 8693076
    Abstract: An image forming apparatus has a light output unit, a light scanner that has a light reflection part reflecting the light from the light output unit, rotates the light reflection part around two axes, and scans with the light reflected by the light reflection part, and a scanner rotating unit the rotates the light scanner around a predetermined axis line while keeping a relative positional relation between an intersection of the two rotation axes and the light output unit constant, and the light scanner has a movable unit including the light reflection part, four connection parts provided at intervals of 90 degrees in an outer circumference of the movable unit, each of the connection parts has a shaft part that connects the movable unit and the drive unit and independently and bendingly deforms each of the shaft parts, and thereby, the movable unit rotates around the two axes.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: April 8, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Yasushi Mizoguchi
  • Patent number: 8687276
    Abstract: An optical system with optical image stabilization of the present invention compensates the movement of the optical system occurring during imaging process using a Micro-Electro Mechanical System (MEMS) unit having an MEMS mirror to stabilize an image of an object formed on an image plane. A micro-actuator with the in-plane translation makes the MEMS mirror have a required rotation to change optical paths of light from the object to the image plane for optical image stabilization. The optical system with optical image stabilization or the present invention provides fast speed, light weight, simple operation, and high image quality image stabilization for the optical system.
    Type: Grant
    Filed: January 22, 2010
    Date of Patent: April 1, 2014
    Assignees: Stereo Display, Inc, Angstrom, Inc
    Inventors: Gyoung Il Cho, Hye Young Kim, Cheong Soo Seo
  • Patent number: 8687255
    Abstract: A method for manufacturing a micromechanical component is described, including the steps of: forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts; forming a first electrode-material layer on the first etch stop layer; forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern; forming a second electrode-material layer on the second etch stop layer; forming a patterned mask on the second electrode-material layer; and carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction in order to etch at least one first electrode unit out of the first electrode-material layer and to etch at least one second electrode unit out of the second electrode-material layer.
    Type: Grant
    Filed: July 6, 2009
    Date of Patent: April 1, 2014
    Assignee: Robert Bosch GmbH
    Inventors: Stefan Finkbeiner, Tjalf Pirk, Christoph Friese
  • Patent number: 8687254
    Abstract: An optical filter comprising a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, and a second mirror formed on the concave portion and facing the first mirror, wherein the first substrate includes a first portion located on the first mirror, a second portion located around the first portion, a third portion located around the second portion, and a fourth portion located around the third portion, wherein both a thickness of the second portion and a thickness of the fourth portion are equal to or smaller than a thickness of the first portion.
    Type: Grant
    Filed: December 1, 2009
    Date of Patent: April 1, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Yuki Hanamura, Takeo Funakawa, Tsukasa Funasaka
  • Patent number: 8681410
    Abstract: There is provided an optical scanner, and an image forming apparatus and an image display apparatus which have the optical scanner. The optical scanner includes a mirror portion having a base plate portion, and a reflective portion which is adhered to a surface of the base plate portion; and a torsion beam portion which is connected to the mirror portion, made of a same material as the base plate portion and integrally formed with the base plate portion, and which is configured to be torsionally vibrated. The reflective portion includes a reinforcement portion and a reflective surface. The reinforcement portion is made of material having a density lower than that of the base plate portion and a Young's modulus greater than that of the base plate portion. The reflective surface is formed on a surface of the reinforcement portion and is configured to reflect the incident light.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: March 25, 2014
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Hitoshi Takeda
  • Publication number: 20140071512
    Abstract: In an optical deflector including a mirror, a rib formed at an outer circumference of the mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror and coupled between the support frame and the mirror, and a pair of actuators arranged between the support frame and the torsion bar, a recess opposing the torsion bar is formed within the rib.
    Type: Application
    Filed: September 10, 2013
    Publication date: March 13, 2014
    Applicant: STANLEY ELECTRIC CO., LTD.
    Inventor: Keiichi IKEGAMI
  • Patent number: 8670171
    Abstract: The present disclosure provides methods, systems, and apparatus for directing incident light toward central regions of interferometric modulator displays. In one aspect, a display includes an array of microlenses embedded in a substrate adjacent a first surface of the substrate. An array of light modulators can be disposed over the first surface of the substrate. A light modulator can be disposed over a corresponding microlens. The microlenses can converge or concentrate incident light onto central regions of the corresponding light modulators. The microlenses may include single-element lenses, compound lenses, and/or graded-index lenses. Various methods of manufacturing such displays are also disclosed.
    Type: Grant
    Filed: October 18, 2010
    Date of Patent: March 11, 2014
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Russel Allyn Martin, Koorosh Aflatooni
  • Patent number: 8665507
    Abstract: The present invention is directed to a two-dimensional scanning arrangement for a laser vein-illumination device that includes a base and a frame connected to the base using at least one flexible hinge. The hinge allows the frame to move angularly with respect to the base in a first direction. The invention further includes a means for exciting angular oscillations of the frame at or near said frame's resonant frequency. An elastic torsional element having a proximal end rigidly attached to said frame and a distal end rigidly attached to a mirror is also included. The torsional element allows the mirror to move angularly with respect to the frame in a second direction, generally perpendicular to the first direction. There may also be a means for exciting the angular oscillations of the mirror. The invention also includes a device for optically inspecting confined spaces having one or more small access orifices.
    Type: Grant
    Filed: October 28, 2010
    Date of Patent: March 4, 2014
    Inventors: Vincent Luciano, Ron Goldman, Fred Wood
  • Patent number: 8659811
    Abstract: An actuator, includes: a movable plate; a supporter to support the movable plate; a pair of linking portions to link the movable plate and the supporter so as to allow the movable plate to rotate relative to the supporter; and a piezoelectric element to rotate the movable plate. The piezoelectric element elongated and contracted by an energization twists the pair of linking portions to rotate the movable plate, and each of the pair of the linking portions includes an axial member extending from the movable plate and a returned portion that links the axial member and the supporter and is formed so as to return to a side adjacent to the movable plate.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: February 25, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Tomoaki Nakamura, Yasushi Mizoguchi
  • Patent number: 8659816
    Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.
    Type: Grant
    Filed: April 25, 2011
    Date of Patent: February 25, 2014
    Assignee: Qualcomm Mems Technologies, Inc.
    Inventors: Yi Tao, Hojin Lee, Fan Zhong
  • Patent number: 8654434
    Abstract: An optical device compensates for decreased transmission of light caused by gaps between mirrors of a MEMS array. The optical device employs MEMS mirrors having non-reflecting regions on them disposed such that reflecting regions of the MEMS mirrors have substantially the same optical throughput, or an additional optical element having increased transmission at those spatial positions where light impinging on the gaps passes through. Alternatively, the optical device may employ a filter having spectral transmission characteristic with increased transmission at those wavelengths of dispersed light that impinge on the gaps.
    Type: Grant
    Filed: July 20, 2011
    Date of Patent: February 18, 2014
    Assignee: Oclaro (New Jersey), Inc.
    Inventors: Gil Cohen, Yossi Corem, Roey Harel
  • Patent number: 8654423
    Abstract: A taut-band resonant scanner is disclosed that includes an elongated band and a sub-assembly. The elongated band has a length in an elongated direction, a width in a width direction that is orthogonal to the elongated direction, and a thickness in a thickness direction that is orthogonal to both the width direction and the elongated direction, wherein the thickness is substantially smaller than the width and wherein the width direction and elongated direction define a band width/length plane. The sub-assembly is attached to a portion of the band, and includes at least one mounting structure.
    Type: Grant
    Filed: January 20, 2011
    Date of Patent: February 18, 2014
    Assignee: Cambridge Technology, Inc.
    Inventor: David C. Brown
  • Patent number: 8649080
    Abstract: In a two-dimensional optical deflector having a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: February 11, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Masanao Tani
  • Patent number: 8649078
    Abstract: A driver for driving an optical deflector includes a mirror, a movable frame for supporting the mirror, a support body surrounding the movable frame, and a first group of piezoelectric actuators and a second group of piezoelectric actuators alternating with the first group of piezoelectric actuators. A first drive voltage for the first group of piezoelectric actuators has first repeated waves each with a first rising period. A second drive voltage for the second group of piezoelectric actuators has second repeated waves each with a second falling period corresponding to the first rising period of the first drive voltage and a second rising period corresponding to the first falling period of the first drive voltage. Frequencies of the first and second repeated waves exclude natural frequencies of a mechanically-vibrating system of the mirror with respect to the axis thereof depending upon the piezoelectric actuators.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: February 11, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventors: Takanori Aimono, Yoshiaki Yasuda
  • Patent number: 8649079
    Abstract: A mirror driving device of an aspect can include: a mirror part; a pair of inner actuator parts; a pair of outer actuator parts; fixing and supporting parts; an inner actuator driving voltage supply part; and an outer actuator driving voltage supply part. A driving voltage with a frequency inducing oscillation of the mirror part in a rotating direction of the mirror part associated with resonance drive of the corresponding actuator parts can be supplied from one driving voltage supply part of the inner actuator driving voltage supply part and the outer actuator driving voltage supply part to the inner actuator parts or the outer actuator parts corresponding to the one driving voltage supply part. Simultaneously with the resonance drive, a driving voltage for inclining the mirror part without exciting resonance drive can be supplied from the other driving voltage supply part to corresponding actuator parts.
    Type: Grant
    Filed: March 29, 2012
    Date of Patent: February 11, 2014
    Assignee: FUJIFILM Corporation
    Inventor: Takayuki Naono
  • Patent number: 8648433
    Abstract: A method for producing oblique surfaces in a substrate, comprising a formation of recesses on both surfaces of the substrate, until the recesses are so deep that the substrate is perforated by the two recesses. One recess is produced going out from a first main surface in the region of a first surface, and the other recess is produced going out from the second main surface in the region of a second surface, so that the first surface and the second surface do not coincide along a surface normal of the main surfaces of the substrate. Subsequently, flexible diaphragms are attached over the recesses on each of the main surfaces. If a vacuum pressure is then produced inside the recesses, the flexible diaphragms each curve in the direction of the recesses until their surfaces facing the substrate come into contact with one another, generally in the center of the recesses.
    Type: Grant
    Filed: November 16, 2011
    Date of Patent: February 11, 2014
    Assignee: Robert Bosch GmbH
    Inventor: Stefan Pinter
  • Patent number: 8643937
    Abstract: A DND device is disclosed. In one aspect, the device includes a nano-mirror (21), and an actuating module configured to move the nano-mirror in an upward and/or downward position. The actuating module has a cantilever mounted to a fixed structure, and at least one first electrode for moving the cantilever in an upward and/or downward position. Such DND devices may be arranged in a 2D array.
    Type: Grant
    Filed: November 15, 2011
    Date of Patent: February 4, 2014
    Assignee: IMEC
    Inventors: Luc Haspeslagh, Xavier Rottenberg, Veronique Rochus
  • Patent number: 8643927
    Abstract: A protrusion formation hole is provided so as to pierce a support substrate. A polysilicon film as an electrical conducting material is embedded in the protrusion formation hole through an oxide silicon film. The polysilicon film partially bulges out of the protrusion formation hole toward a movable section to form a protruding section. In other words, the polysilicon film bulges out of the protrusion formation hole toward the movable section to form the protruding section. Thereby, a movable section included in MEMS can be prevented from sticking to other members.
    Type: Grant
    Filed: July 7, 2011
    Date of Patent: February 4, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Chisaki Takubo, Heewon Jeong
  • Patent number: 8643926
    Abstract: There is provided an image forming apparatus that is configured so as to continuously display a plurality of images in a drawing area by scanning light for the drawing area formed on a display surface. The image forming apparatus includes a light emitting unit that emits the light, an optical scanning unit that two-dimensionally scans the light emitted from the light emitting unit for the drawing area, and a driving control unit that controls driving of the optical scanning unit such that the number of the images displayed in the drawing area in a unit of time is changed by changing a range in which the light is scanned on the drawing area at the time of displaying the images based on a shape and a size of each of the images, which are displayed in the drawing area, on the drawing area.
    Type: Grant
    Filed: May 11, 2011
    Date of Patent: February 4, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Shuichi Wakabayashi
  • Publication number: 20140016171
    Abstract: Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems.
    Type: Application
    Filed: September 10, 2013
    Publication date: January 16, 2014
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Larry J. Hornbeck
  • Patent number: 8626468
    Abstract: A MEMS apparatus is provided for scanning an optical beam which comprises: a. at least one mirror operative to perform am oscillation motion to a pre-defined rotation angle around a mirror rotation axis; b. a sound sensing means; and c. a conversion means operative to convert sound vibrations detected by the sound sensing means into one or more electrical signals, and wherein the sound sensing means is located at the vicinity of the at least one mirror whereby the movement of the at least one mirror is sensed by the sound sensing means and converted by the conversion means into the one or more electrical signals characterizing the oscillating motion of the at least one mirror.
    Type: Grant
    Filed: June 21, 2009
    Date of Patent: January 7, 2014
    Assignee: STMicroelectronics International N.V.
    Inventors: Ido Luft, Nir Goren
  • Patent number: 8610986
    Abstract: Micromirrors and micromirror arrays described herein are useful, for example in maskless photolithography systems and methods and projection display devices and methods. According to one aspect, the micromirrors comprise a polymer structural layer and a reflective dielectric multilayer for selective reflection and/or redirection of incoming electromagnetic radiation. According to another aspect, incorporation of a reflective dielectric multilayer allows for use of polymer structural materials in micromirrors and prevents damage to such polymer materials due to excessive heating from absorption of electromagnetic radiation, as the reflective dielectric multilayers are highly reflective and minimize heating of the micromirror components. According to yet a further aspect, top down fabrication methods are described herein for making a micromirror comprising a polymer structural layer and a reflective dielectric multilayer.
    Type: Grant
    Filed: April 6, 2009
    Date of Patent: December 17, 2013
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Kanti Jain, Junghun Chae, Kevin Lin, Hyunjong Jin
  • Patent number: 8610987
    Abstract: An optical device includes: an axis member including a plate-shaped attachment portion and an elastic support portion that swingably supports the attachment portion around a predetermined axis; a rigid member attached to one side of the attachment portion; and a light reflecting member attached to the other side of the attachment portion and having an area larger than that of the attachment portion.
    Type: Grant
    Filed: January 28, 2010
    Date of Patent: December 17, 2013
    Assignee: Seiko Epson Corporation
    Inventors: Makiko Nakamura, Yasushi Mizoguchi
  • Patent number: 8610983
    Abstract: An actuator which tilts and drives an object to be driven around an axis of rotation includes: a pair of supporting beams arranged to support the object to be driven from both sides thereof in a direction parallel to the axis of rotation; a pair of movable beams arranged to sandwich the object to be driven and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a drive source arranged to apply bending vibration to the movable frames; and a pair of connection parts arranged to connect the movable frames and end portions of the supporting beams by a multiple-beam structure, convert the bending vibration into torsional vibration, and transmit the torsional vibration to the supporting beams.
    Type: Grant
    Filed: April 21, 2010
    Date of Patent: December 17, 2013
    Assignee: Mitsumi Electric Co., Ltd.
    Inventors: Tsukasa Yamada, Masato Ehara
  • Patent number: 8610997
    Abstract: As for the method that modulates optical path length by the position of reflection plane of light, the movement of the position-movable plate in micrometer-size electromechanical device can be restricted by the stopping plates placed above and below the edge of the position-movable plate, the distance between the stopping plates may be set depending on the desired amount in modulating the optical path length. The voltage differential in the device is operable to create electrostatic attraction, to perform transition movement of the position-movable plate between the stopping plates, the light reflector connected to the position-movable plate takes at least two states in positioning, enabling to modulate the optical path length of reflected light by the light reflector with high reproducibility and high accuracy.
    Type: Grant
    Filed: October 22, 2011
    Date of Patent: December 17, 2013
    Inventor: Toshiyuki Kaeriyama
  • Patent number: 8598891
    Abstract: Detecting and/or mitigating the presence of particle contaminants in a MEMS device involves converting benign areas in which particles might become trapped undetectably by electric fields during test to field-free regions by extending otherwise non-functional conductive shield and gate layers and placing the same electrical potential on the conductive shield and gate layers. Particle contaminants can then be moved into detection locations remote from the potential trap areas and having particle detection structures by providing some mechanical disturbance.
    Type: Grant
    Filed: February 25, 2013
    Date of Patent: December 3, 2013
    Assignee: Analog Devices, Inc.
    Inventors: Vineet Kumar, William A. Clark, John A. Geen, Edward Wolfe, Steven Sherman