Abstract: The invention is directed to a device (10, 10a-10d) comprising: a set of on-chip circuits (110-160, 170, 180), each of the circuits configured to generate a magnetic field (300) perpendicular to a planar surface of the set when energized; a ferrofluidic layer (40) interfaced to the planar surface; and a logic circuit (50) configured to selectively energize (200, 200a) one ore more circuits of the set such as to generate a magnetic field at the energized circuits and a deformation (41, 44, 45) of the ferrofluidic layer in response thereto and to modulate optical beams (IR1, IR2) directed to the ferrofluid layer. Preferably, an additional liquid layer (60) is interfaced to the ferrofluid layer, opposite to the on-chip circuits, which is not miscible with the ferrofluid layer. The invention can be applied to micro-display/projection devices, programmable optical reflecting lenses, or to micro-molding applications for surface replication.

Abstract: The present invention relates to a reconfigurable micro-mechanical light modulator including a two-dimensional array of modulating elements with redundant rows of modulating elements. In particular, it relates to extending the life of the modulator by shifting the set of elements used, without physically replacing the micro-mechanical light modulator. The modulating elements are adapted to modulate light impinging on the micro-mechanical light modulator. The array of modulating elements comprises a first and a second set of modulating elements. The second set is a redundant set of modulating elements that can be selected to substitute for the first set of modulating elements in modulating light impinging on the micro-mechanical light modulator, without physically replacing the micro-mechanical light modulator. Devices and methods are described.

Abstract: In one embodiment of the invention, a display is provided and includes a plurality of interferometric display elements. The display further includes at least one diffuser. Optical properties of the diffuser are selected to reduce color shift of the display when viewed from at least one angle.

Abstract: The present disclosure describes, among other things, a reduced speckle contrast microelectromechanical system. One exemplary embodiment includes micromechanical structures configured to form a uniform reflective surface on a substrate, an elastic substance coupled to the substrate, and an energy source that applies a voltage to the elastic substance to alter the shape of the surface of the substrate, for example, by about 10% to about 25% of a wavelength of light projected onto the substrate at a frequency of at least 60 Hz. Another exemplary embodiment includes micromechanical structures formed on a surface of a substrate, a reflective diaphragm connected to the substrate, an elastic substance coupled to the diaphragm, and an energy source that applies a voltage to the elastic substance to vibrate the diaphragm at a frequency of at least 60 Hz.

Abstract: A surfactant includes a hydrophobic functional group, a hydrophilic functional group and a linker disposed between the hydrophobic functional group and the hydrophilic functional group, and the linker is connected to the hydrophobic functional group and the hydrophilic functional group. The linker has a cleavable bond with a bond energy lower than a bond energy of a bond included in the hydrophilic functional group and a bond included in the hydrophobic functional group.

Abstract: An illumination device for illuminating a reticle surface as an illumination target surface with illumination light supplied from a light source is provided with a first polarization beam splitter for separating the illumination light into a first beam and a second beam with respective polarization directions orthogonal to each other; a deformable mirror which is arranged in an optical path of the second beam and a shape of a reflecting surface of which is variable for changing a phase difference distribution between the first beam and the second beam; and a second polarization beam splitter for combining the first beam and the second beam between which the phase difference distribution has been established. The illumination target surface can be illuminated with light having a distribution of various polarization states.

Abstract: According to the present invention there is provided a method of projecting an image, the method comprising the steps of, providing light signal which is configured such that it can be projected onto a display surface to display an image; oscillating a first reflective surface, to scan the light signal over the display surface, using an actuator which is in operable co-operation with the first reflective surface, by applying a first actuation signal to the first reflective surface, wherein a rise time or fall time of the first actuation signal is inversely proportional to a resonant frequency of oscillation of the first reflective surface.

Abstract: A system for modulating light using a micro-electro-mechanical structure includes a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements is comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: Micro-electro-mechanical system (MEMS) mirror devices and manufacturing methods thereof. The device comprising a hinge layer having orthogonal tilt and roll hinges connecting inner and outer platforms such that the inner platform has bi-directional rotation. An electrode layer connected beneath the hinge layer controls rotation of the platforms. A mirror layer above the hinge layer comprises a mirror connected to the inner platform via a pedestal and fixed membrane connected to the hinge layer but detached from the mirror. An anchor temporarily reduces movement of the outer platform during fabrication. In a fabrication state, the anchor anchors the outer platform to the mirror layer's fixed membrane. In a post-fabrication state, a gap releases the outer platform.

Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

Abstract: A system including spatial light modulators with multiple one-dimensional (1D) diffractor arrays and methods of operating the same are provided. In one embodiment, the system comprises a spatial light modulator (SLM) assembly including a plurality of one-dimensional (1D) diffractor arrays to modulate light from a light source, the plurality of 1D diffractor arrays integrally formed on a die; illumination optics disposed in a light path between the plurality of 1D diffractor arrays and the light source to illuminate a substantially linear portion of at least one of the plurality of 1D diffractor arrays; and imaging optics disposed in a light path between the SLM assembly and an image plane on a target-substrate, the imaging optics adapted to transmit modulated light from the SLM assembly to a substantially linear portion of the image plane. Other embodiments are also provided.

Abstract: The present invention provides a flip-chip package for MEMS device without time consuming wire-bonding. Bonding a silicon chip to a printed circuit board can be achieved by restricting the heat deformation of printed circuit board with adhered glass substrate which has similar heat expansion coefficient as silicon.

Abstract: This disclosure provides systems, methods and apparatus for increasing a range of stable travel positions of a movable layer within electromechanical systems (EMS) devices. In one aspect, an electrically isolated floating electrode can be disposed between a driving electrode within a movable layer and a fixed electrode in order to increase a stable travel range of the movable layer. By segmenting the electrically isolated floating electrode into multiple isolated electrode segments, unbalanced charge accumulation in response to tilting of the movable layer can be constrained to further increase the stable travel range of the movable layer.

Abstract: Featured is a spectral analysis method and a wide spectral range spectrometer including a source of electromagnetic radiation and an optical subsystem configured to disperse radiation into a plurality of wavelengths. A pixilated light modulator receives the radiation wavelengths and is configured to direct one or more selective wavelengths to a sample.

Abstract: An illumination system of a microlithographic projection exposure apparatus includes an optical raster element configured to produce a plurality of secondary light sources located in a system pupil surface. The optical raster element has a plurality of light entrance facets, each being associated with one of the secondary light sources. A beam deflecting device includes a beam deflection array of reflective or transparent beam deflecting elements, each being configured to illuminate a spot on one of the light entrance facets at a position that is variable by changing a deflection angle produced by the beam deflecting element. A control unit is configured to control the beam deflection elements such that variable light patterns assembled from the spots can be formed on at least one of the plurality of light entrance facets.

Abstract: In a multiple-axis free-space-coupled single-mode fiber-optic transmission system, such as an optical cross-connect switch, a method and apparatus are provided for the closed loop attenuation of optical beam power signals employed to align and cause dithering via MEMS mirrors which are manipulated to impose on the optical beam frequency modulation and, in particular, a time-varying set of induced mirror angles that yield a desired time history of optical power level that is modulated according to a digital code in the frequency modulation pattern.

Abstract: A method of determining a reference calibration setting for an adaptive optics system (1) comprising a detecting device (8) for detecting light from an object (5); and at least one controllable wavefront modifying device (9) arranged such that light from the object (5) passes via the wavefront modifying device (9) to the detecting device (8).

Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.

Abstract: An electronic component is provided that includes a spatial light modulator device, and a circuit board comprising a first major surface, at least one electrically conductive redistribution layer and a first cavity positioned in the first major surface. The spatial light modulator device is positioned within the cavity and is electrically connected to the redistribution layer.

Abstract: An illumination system of a microlithographic projection exposure apparatus comprises a light modulator which includes a modulator substrate and an array of mirrors that are supported by the modulator substrate. At least some adjacent mirrors partly overlap. The light modulator further comprises a plurality of actuators that are supported by the modulator substrate and are configured to tilt the mirrors individually.

Abstract: A method of operating by pulse width modulation a micromirror device is disclosed. In one aspect, the method includes providing a micromirror device having a micromirror element electrostatically deflectable around a rotation axis between a first and second position. The micromirror element is controllable by applying voltage signals to a first and second electrode on one side of the rotation axis and a third and fourth electrode on the other side. The method includes associating an intermediate value of intensity to the micromirror element during a time frame, the intensity being between a first value corresponding to the first position and a second value corresponding to the second position. The method includes switching the micromirror element between the first and second position. The intermediate value corresponds to the ratio of periods in the time frame in which the micromirror element is in the first or second position.

Abstract: An apparatus comprises a first photonic crystal structure having a first photonic band gap distribution and configured to support a first electromagnetic signal, wherein the first photonic band gap distribution may vary according to a second electromagnetic signal.

Abstract: There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.

Abstract: A lighting device according to another embodiment of the invention for directing source light within a source wavelength range in a blue wavelength range in a desired output direction may comprise a MEMS device that may include a DMD that includes an array of MEMS cells, each MEMS cell including an operative surface to receive and redirect the source light towards the desired output direction. The array of MEMS cells may include first and second pluralities of MEMS cells including first and second conversion coatings applied to the operative surfaces thereof configured to convert source light into first and second wavelength ranges. Furthermore, the repositionable surface of each MEMS cell may be positionable between multiple angles to reflect the converted light. The lighting device may comprise a third plurality of MEMS cells where the operative surfaces thereof is devoid of a conversion coating, or, alternatively, comprises a third conversion coating.

Abstract: Systems, apparatuses and methods are provided for increasing the aperture ratio of a display by increasing the total travel distance of respective light modulating bodies in a display while maintaining fast switching speeds. Increasing the total travel distance allows for a larger aperture ratio in a display, which provides greater power savings and increased display brightness. The total travel distance of a light modulating body includes the distance the body travels from an open position to a closed position, and vice-versa. In one example, the travel distance of a light modulating body (e.g., any of the light modulators as described above) is asymmetric: from a neutral position, the body travels a greater distance in a first direction than in a second direction.

Abstract: The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

Abstract: A reflective color display is disclosed. A substrate supports a first conductor layer and pixel wells. A piezoelectric segment is formed in each pixel well over the first conductor layer. A second conductor layer overlies the piezoelectric segments, wherein an electric field created across any piezoelectric segment causes the piezoelectric segment to expand or contract under control of the electric field. A Bragg reflector segment overlies each piezoelectric segment and is compressible by expansion of the underlying piezoelectric segment. A white light LED layer overlies the Bragg reflector segments. By varying the electric field across each piezoelectric segment, the overlying Bragg reflector segment is controlled to reflect a selected wavelength for each pixel of the display. The walls of the pixel wells provide acoustic isolation between adjacent pixel wells. An acoustic membrane isolates the Bragg reflector segment from high frequency vibrations of the piezoelectric segment.

Abstract: Direct view color displays and design structures of direct view color displays. The direct view displays include micromirrors having un-tilted and tilted states and multiple color filters or color reflectors.

Abstract: Techniques and devices use cascaded optical polarization devices having modulated optical retardation to control optical polarization of light and can be configured for polarization scrambling. Uniform rate scrambling and quasi-uniform rate scrambling modes are provided in described devices and rate-additive designs based on multiple cascaded devices are also disclosed to achieve high-speed scrambling.

Abstract: A microelectromechanical (MEMS) device has a movable member supported in elevated position spaced by a sloped support structure above a substrate. The movable member may be a polished metallic plate such as a mirror of a digital micromirror device (DMD) supported by a flexible hinge above an integrated circuit wafer die region. The plate may supported centrally at a raised juncture of two upwardly oppositely directed and symmetrically converging hinge legs for pivoting about a parallel axis. The plate may also be supported at a top end of a hinge leg in cantilever fashion, for pivoting about a perpendicular axis. Optional spring tips are provided for limiting movement and recovering energy. In a described fabrication method, hinge material is deposited over a sacrificial layer that has been directly or indirectly patterned using a grayscale photoresist exposure to define sloped surfaces which provide a template for configuring the hinge and optional other components.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for calibrating display arrays. In one aspect, a method of calibrating a display array includes determining a particular drive response characteristic and updating a particular drive scheme voltage between updates of image data on the display array.

Abstract: Systems, methods and apparatus are provided for controlling launch effects of movable layers in electromechanical systems (EMS) devices. First and second EMS devices with first and second step creating layers are positioned over a substrate and spaced, by different gaps, from the movable layers of the EMS devices. The movable layers of the first and second EMS devices include steps having different heights and/or different edge spacing from the center of an anchoring region of each EMS device. The different steps can provide different launch effects for different EMS devices, and if the same thickness of sacrificial material is used for the different devices, the different launch effects can be responsible for different gap heights in the unbiased conditions.

Abstract: A microelectromechanical (MEMS) device has a movable member supported in elevated position spaced by a sloped support structure above a substrate. The movable member may be a polished metallic plate such as a mirror of a digital micromirror device (DMD) supported by a flexible hinge above an integrated circuit wafer die region. The plate may supported centrally at a raised juncture of two upwardly oppositely directed and symmetrically converging hinge legs for pivoting about a parallel axis. The plate may also be supported at a top end of a hinge leg in cantilever fashion, for pivoting about a perpendicular axis. Optional spring tips are provided for limiting movement and recovering energy. In a described fabrication method, hinge material is deposited over a sacrificial layer that has been directly or indirectly patterned using a grayscale photoresist exposure to define sloped surfaces which provide a template for configuring the hinge and optional other components.

Abstract: A system for modulating light using a micro-electro-mechanical structure includes a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements are comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: A method for modulating light using a micro-electro-mechanical structure includes providing a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements are comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: An image forming apparatus includes an image forming unit that forms an image to be formed on a recording medium. The image formed by the image forming unit has a size larger than a size of the recording medium that is transported, the image forming unit causing the image to adhere to the entire area of the recording medium. A width of the image in a direction substantially orthogonal to a transporting direction of the recording medium increases from a front end toward a rear end of the recording medium in the transporting direction of the recording medium.

Abstract: An imaging (e.g., lithographic) apparatus for generating an elongated concentrated scan image on an imaging surface of a scan structure (e.g., a drum cylinder) that moves in a process (cross-scan) direction. The apparatus includes a spatial light modulator having a two-dimensional array of light modulating elements for modulating a two-dimensional light field in response to predetermined scan image data, and an anamorphic optical system is used to anamorphically image and concentrate the modulated light onto an elongated imaging region defined on the imaging surface. To avoid smearing, movement of the imaging surface is synchronized by an image position controller with the modulated states of the light modulating elements such that image features of the scan image are scrolled (moved in the cross-scan direction) at the same rate as the cross-scan movement of the imaging surface, whereby the features remain coincident with the same portion of the imaging surface.

Abstract: On/off digital drive signals are used to create arbitrary spatial and temporal ribbon movement patterns in MEMS ribbon arrays.

Abstract: Provided is a spatial light modulation element comprising a substrate; a flat portion that is movable relative to the substrate; a flat board attached to the flat portion; and a dielectric film that is formed on a surface of the flat board opposite the surface on which the flat portion is attached, and reflects incident light. In the spatial light modulation element the dielectric film may include two or more types of dielectric layers that are repeatedly layered in an alternating manner, such that adjacent layers have different refractive indexes from each other. Furthermore, the dielectric film may be formed by alternately layering an Al2O3 film and a SiO2 film.

Abstract: This disclosure provides systems, methods and apparatus for providing multiple dielectric coatings for a shutter assembly. The multiple dielectric coatings include an outer dielectric coating and one or more inner dielectric coatings. The outer dielectric coating has an electrical trap density that is lower than electrical trap densities of the one or more inner dielectric coatings. The lower electrical trap density reduces the amount of charge buildup over various surfaces of the shutter assembly. This reduction in charge buildup also reduces electrostatic forces that may cause incorrect operation of the shutter assembly.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for selecting an operational mode of a reflective display device from a plurality of operational modes that include at least one field-sequential color mode. The operational mode may be selected based, at least in part, on ambient light data. The ambient light data may include ambient light intensity data, ambient light spectrum data and/or ambient light direction data. The operational mode may be selected based, at least in part, on other criteria, such as display application type and/or battery state data.

Abstract: A pixel structure for a display device is provided. The pixel structure utilizes light entering from the ambient environment of the display as a light source. The pixel structure comprises a first substrate, a light obstructing layer, an active element and an adjustable light shielding layer. The light obstructing layer is disposed on the first substrate and has a transparent area and an opaque area. The active element is disposed on the opaque area of the light obstructing layer and has a first state and a second state. The adjustable light shielding layer is disposed on the light obstructing layer and the active element. When the active element is in the first state, the adjustable light shielding layer is adapted to cover the transparent area to shield the light from emitting out from the first substrate.

Abstract: A flexure assembly can have a stage that is deployed to a desired position by attachment of the flexure assembly to a housing. For example, a frame can be configured to be held in position by one portion of the housing and a deployment pad can be configured to be held in position by another portion of the housing. A deployment flexure can be configured to facilitate positioning of the frame and the deployment pad out-of-plane with respect to one another. The deployment flexure and a motion control flexure can facilitate movement of the stage with respect to the housing. In this manner, the position of the stage and the preload of the stage are determined by the housing.

Abstract: This disclosure provides systems, methods and apparatus for an electromechanical systems reflective display device. In one aspect, an electromechanical systems display device includes a reflective layer and an absorber layer. The absorber layer is spaced apart from the reflective layer to define a cavity between the absorber layer and the reflective layer. The absorber layer is capable of transmitting light into the cavity, absorbing light, and reflecting light, and includes a metal layer. A plurality of matching layers are on a surface of the absorber layer facing away from the cavity, the plurality of matching layers including a first matching layer disposed on the absorber layer and a second matching layer disposed on the first matching layer.

Abstract: The color reflected by an interferometric modulator may vary as a function of the angle of view. A range of colors are thus viewable by rotating the interferometric modulator relative to an observer. By placing a textured layer between an observer and an interferometric modulator, a pattern which includes the range of colors may be viewed by the observer, and the range of colors may thus be viewable from a single viewing angle.

Abstract: Signals employed to align and cause dithering via MEMS mirrors in an optical cross connect switch are manipulated to impose, on the optical beam (steered via the MEMS mirrors) amplitude modulation and in particular a time-varying set of induced mirror angles that yield a desired time history of optical power level that is modulated according to a digital code in the amplitude modulation pattern. The controlled time sequence expressed as a time-varying optical power level can be used for in-band signaling along the same optical channels available for conventional optical data. The amplitude modulated signal is conveyed through the cross connect switch and is useful for example in control and command of the cross connect switch.

Abstract: A lighting device is described for receiving source light within a source wavelength range, converting the source light into a converted light, and reflecting the converted light to a desired output direction. The lighting device may use a micro electromechanical system (MEMS) device to receive and redirect the source light to the desired output direction. A conversion coating may be applied to the operative surface of the MEMS device to convert the source light into a converted light.

Abstract: A tunable photonic crystal device comprising: alternating layers of a first material and a second material, the alternating layers comprising a responsive material, the responsive material being responsive to an external stimulus, the alternating layers having a periodic difference in refractive indices giving rise to a first reflected wavelength; wherein, in response to the external stimulus, a change in the responsive material results in a reflected wavelength of the device shifting from the first reflected wavelength to a second reflected wavelength.

Abstract: This disclosure provides systems, methods and apparatus for enhancing the brightness and/or contrast ratio of display devices. In one aspect, the display devices can include an annular diffuser that is configured to scatter light into a ring shaped region. The annular diffuser can include a plurality of axicon lenses or holographic features. The reflective display can include an annular diffuser to shift the direction along which most of the modulated light is scattered away from the direction along which light is specularly reflected by the display devices to reduce specular glare and enhance brightness and/or contrast ratio.

Abstract: A tunable metamaterial comprising a membrane on which is arranged a two-dimensional array of elements to form a metamaterial, wherein the array is subdivided into blocks of multiple elements, each block being separated from adjacent blocks by a gap to allow each block to be moveable relative to its adjacent blocks. The lattice of the metamaterial and hence its properties are tuned by inducing adjacent blocks to move away from each other or towards each other either in-plane or out-of-plane in a controllable manner in response to an electrical, thermal or optical control signal.