Abstract: The present invention provides a flip-chip package for MEMS device without time consuming wire-bonding. Bonding a silicon chip to a printed circuit board can be achieved by restricting the heat deformation of printed circuit board with adhered glass substrate which has similar heat expansion coefficient as silicon.

Abstract: An illumination system of a microlithographic projection exposure apparatus includes an optical raster element configured to produce a plurality of secondary light sources located in a system pupil surface. The optical raster element has a plurality of light entrance facets, each being associated with one of the secondary light sources. A beam deflecting device includes a beam deflection array of reflective or transparent beam deflecting elements, each being configured to illuminate a spot on one of the light entrance facets at a position that is variable by changing a deflection angle produced by the beam deflecting element. A control unit is configured to control the beam deflection elements such that variable light patterns assembled from the spots can be formed on at least one of the plurality of light entrance facets.

Abstract: In a multiple-axis free-space-coupled single-mode fiber-optic transmission system, such as an optical cross-connect switch, a method and apparatus are provided for the closed loop attenuation of optical beam power signals employed to align and cause dithering via MEMS mirrors which are manipulated to impose on the optical beam frequency modulation and, in particular, a time-varying set of induced mirror angles that yield a desired time history of optical power level that is modulated according to a digital code in the frequency modulation pattern.

Abstract: An electronic component is provided that includes a spatial light modulator device, and a circuit board comprising a first major surface, at least one electrically conductive redistribution layer and a first cavity positioned in the first major surface. The spatial light modulator device is positioned within the cavity and is electrically connected to the redistribution layer.

Abstract: A method of determining a reference calibration setting for an adaptive optics system (1) comprising a detecting device (8) for detecting light from an object (5); and at least one controllable wavefront modifying device (9) arranged such that light from the object (5) passes via the wavefront modifying device (9) to the detecting device (8).

Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.

Abstract: An illumination system of a microlithographic projection exposure apparatus comprises a light modulator which includes a modulator substrate and an array of mirrors that are supported by the modulator substrate. At least some adjacent mirrors partly overlap. The light modulator further comprises a plurality of actuators that are supported by the modulator substrate and are configured to tilt the mirrors individually.

Abstract: A method of operating by pulse width modulation a micromirror device is disclosed. In one aspect, the method includes providing a micromirror device having a micromirror element electrostatically deflectable around a rotation axis between a first and second position. The micromirror element is controllable by applying voltage signals to a first and second electrode on one side of the rotation axis and a third and fourth electrode on the other side. The method includes associating an intermediate value of intensity to the micromirror element during a time frame, the intensity being between a first value corresponding to the first position and a second value corresponding to the second position. The method includes switching the micromirror element between the first and second position. The intermediate value corresponds to the ratio of periods in the time frame in which the micromirror element is in the first or second position.

Abstract: An apparatus comprises a first photonic crystal structure having a first photonic band gap distribution and configured to support a first electromagnetic signal, wherein the first photonic band gap distribution may vary according to a second electromagnetic signal.

Abstract: A lighting device according to another embodiment of the invention for directing source light within a source wavelength range in a blue wavelength range in a desired output direction may comprise a MEMS device that may include a DMD that includes an array of MEMS cells, each MEMS cell including an operative surface to receive and redirect the source light towards the desired output direction. The array of MEMS cells may include first and second pluralities of MEMS cells including first and second conversion coatings applied to the operative surfaces thereof configured to convert source light into first and second wavelength ranges. Furthermore, the repositionable surface of each MEMS cell may be positionable between multiple angles to reflect the converted light. The lighting device may comprise a third plurality of MEMS cells where the operative surfaces thereof is devoid of a conversion coating, or, alternatively, comprises a third conversion coating.

Abstract: There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.

Abstract: Systems, apparatuses and methods are provided for increasing the aperture ratio of a display by increasing the total travel distance of respective light modulating bodies in a display while maintaining fast switching speeds. Increasing the total travel distance allows for a larger aperture ratio in a display, which provides greater power savings and increased display brightness. The total travel distance of a light modulating body includes the distance the body travels from an open position to a closed position, and vice-versa. In one example, the travel distance of a light modulating body (e.g., any of the light modulators as described above) is asymmetric: from a neutral position, the body travels a greater distance in a first direction than in a second direction.

Abstract: The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

Abstract: A reflective color display is disclosed. A substrate supports a first conductor layer and pixel wells. A piezoelectric segment is formed in each pixel well over the first conductor layer. A second conductor layer overlies the piezoelectric segments, wherein an electric field created across any piezoelectric segment causes the piezoelectric segment to expand or contract under control of the electric field. A Bragg reflector segment overlies each piezoelectric segment and is compressible by expansion of the underlying piezoelectric segment. A white light LED layer overlies the Bragg reflector segments. By varying the electric field across each piezoelectric segment, the overlying Bragg reflector segment is controlled to reflect a selected wavelength for each pixel of the display. The walls of the pixel wells provide acoustic isolation between adjacent pixel wells. An acoustic membrane isolates the Bragg reflector segment from high frequency vibrations of the piezoelectric segment.

Abstract: Direct view color displays and design structures of direct view color displays. The direct view displays include micromirrors having un-tilted and tilted states and multiple color filters or color reflectors.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for calibrating display arrays. In one aspect, a method of calibrating a display array includes determining a particular drive response characteristic and updating a particular drive scheme voltage between updates of image data on the display array.

Abstract: A microelectromechanical (MEMS) device has a movable member supported in elevated position spaced by a sloped support structure above a substrate. The movable member may be a polished metallic plate such as a mirror of a digital micromirror device (DMD) supported by a flexible hinge above an integrated circuit wafer die region. The plate may supported centrally at a raised juncture of two upwardly oppositely directed and symmetrically converging hinge legs for pivoting about a parallel axis. The plate may also be supported at a top end of a hinge leg in cantilever fashion, for pivoting about a perpendicular axis. Optional spring tips are provided for limiting movement and recovering energy. In a described fabrication method, hinge material is deposited over a sacrificial layer that has been directly or indirectly patterned using a grayscale photoresist exposure to define sloped surfaces which provide a template for configuring the hinge and optional other components.

Abstract: Techniques and devices use cascaded optical polarization devices having modulated optical retardation to control optical polarization of light and can be configured for polarization scrambling. Uniform rate scrambling and quasi-uniform rate scrambling modes are provided in described devices and rate-additive designs based on multiple cascaded devices are also disclosed to achieve high-speed scrambling.

Abstract: A system for modulating light using a micro-electro-mechanical structure includes a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements are comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: Systems, methods and apparatus are provided for controlling launch effects of movable layers in electromechanical systems (EMS) devices. First and second EMS devices with first and second step creating layers are positioned over a substrate and spaced, by different gaps, from the movable layers of the EMS devices. The movable layers of the first and second EMS devices include steps having different heights and/or different edge spacing from the center of an anchoring region of each EMS device. The different steps can provide different launch effects for different EMS devices, and if the same thickness of sacrificial material is used for the different devices, the different launch effects can be responsible for different gap heights in the unbiased conditions.

Abstract: A method for modulating light using a micro-electro-mechanical structure includes providing a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements are comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: A microelectromechanical (MEMS) device has a movable member supported in elevated position spaced by a sloped support structure above a substrate. The movable member may be a polished metallic plate such as a mirror of a digital micromirror device (DMD) supported by a flexible hinge above an integrated circuit wafer die region. The plate may supported centrally at a raised juncture of two upwardly oppositely directed and symmetrically converging hinge legs for pivoting about a parallel axis. The plate may also be supported at a top end of a hinge leg in cantilever fashion, for pivoting about a perpendicular axis. Optional spring tips are provided for limiting movement and recovering energy. In a described fabrication method, hinge material is deposited over a sacrificial layer that has been directly or indirectly patterned using a grayscale photoresist exposure to define sloped surfaces which provide a template for configuring the hinge and optional other components.

Abstract: An image forming apparatus includes an image forming unit that forms an image to be formed on a recording medium. The image formed by the image forming unit has a size larger than a size of the recording medium that is transported, the image forming unit causing the image to adhere to the entire area of the recording medium. A width of the image in a direction substantially orthogonal to a transporting direction of the recording medium increases from a front end toward a rear end of the recording medium in the transporting direction of the recording medium.

Abstract: An imaging (e.g., lithographic) apparatus for generating an elongated concentrated scan image on an imaging surface of a scan structure (e.g., a drum cylinder) that moves in a process (cross-scan) direction. The apparatus includes a spatial light modulator having a two-dimensional array of light modulating elements for modulating a two-dimensional light field in response to predetermined scan image data, and an anamorphic optical system is used to anamorphically image and concentrate the modulated light onto an elongated imaging region defined on the imaging surface. To avoid smearing, movement of the imaging surface is synchronized by an image position controller with the modulated states of the light modulating elements such that image features of the scan image are scrolled (moved in the cross-scan direction) at the same rate as the cross-scan movement of the imaging surface, whereby the features remain coincident with the same portion of the imaging surface.

Abstract: On/off digital drive signals are used to create arbitrary spatial and temporal ribbon movement patterns in MEMS ribbon arrays.

Abstract: Provided is a spatial light modulation element comprising a substrate; a flat portion that is movable relative to the substrate; a flat board attached to the flat portion; and a dielectric film that is formed on a surface of the flat board opposite the surface on which the flat portion is attached, and reflects incident light. In the spatial light modulation element the dielectric film may include two or more types of dielectric layers that are repeatedly layered in an alternating manner, such that adjacent layers have different refractive indexes from each other. Furthermore, the dielectric film may be formed by alternately layering an Al2O3 film and a SiO2 film.

Abstract: This disclosure provides systems, methods and apparatus for providing multiple dielectric coatings for a shutter assembly. The multiple dielectric coatings include an outer dielectric coating and one or more inner dielectric coatings. The outer dielectric coating has an electrical trap density that is lower than electrical trap densities of the one or more inner dielectric coatings. The lower electrical trap density reduces the amount of charge buildup over various surfaces of the shutter assembly. This reduction in charge buildup also reduces electrostatic forces that may cause incorrect operation of the shutter assembly.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for selecting an operational mode of a reflective display device from a plurality of operational modes that include at least one field-sequential color mode. The operational mode may be selected based, at least in part, on ambient light data. The ambient light data may include ambient light intensity data, ambient light spectrum data and/or ambient light direction data. The operational mode may be selected based, at least in part, on other criteria, such as display application type and/or battery state data.

Abstract: A flexure assembly can have a stage that is deployed to a desired position by attachment of the flexure assembly to a housing. For example, a frame can be configured to be held in position by one portion of the housing and a deployment pad can be configured to be held in position by another portion of the housing. A deployment flexure can be configured to facilitate positioning of the frame and the deployment pad out-of-plane with respect to one another. The deployment flexure and a motion control flexure can facilitate movement of the stage with respect to the housing. In this manner, the position of the stage and the preload of the stage are determined by the housing.

Abstract: The color reflected by an interferometric modulator may vary as a function of the angle of view. A range of colors are thus viewable by rotating the interferometric modulator relative to an observer. By placing a textured layer between an observer and an interferometric modulator, a pattern which includes the range of colors may be viewed by the observer, and the range of colors may thus be viewable from a single viewing angle.

Abstract: A pixel structure for a display device is provided. The pixel structure utilizes light entering from the ambient environment of the display as a light source. The pixel structure comprises a first substrate, a light obstructing layer, an active element and an adjustable light shielding layer. The light obstructing layer is disposed on the first substrate and has a transparent area and an opaque area. The active element is disposed on the opaque area of the light obstructing layer and has a first state and a second state. The adjustable light shielding layer is disposed on the light obstructing layer and the active element. When the active element is in the first state, the adjustable light shielding layer is adapted to cover the transparent area to shield the light from emitting out from the first substrate.

Abstract: This disclosure provides systems, methods and apparatus for an electromechanical systems reflective display device. In one aspect, an electromechanical systems display device includes a reflective layer and an absorber layer. The absorber layer is spaced apart from the reflective layer to define a cavity between the absorber layer and the reflective layer. The absorber layer is capable of transmitting light into the cavity, absorbing light, and reflecting light, and includes a metal layer. A plurality of matching layers are on a surface of the absorber layer facing away from the cavity, the plurality of matching layers including a first matching layer disposed on the absorber layer and a second matching layer disposed on the first matching layer.

Abstract: Signals employed to align and cause dithering via MEMS mirrors in an optical cross connect switch are manipulated to impose, on the optical beam (steered via the MEMS mirrors) amplitude modulation and in particular a time-varying set of induced mirror angles that yield a desired time history of optical power level that is modulated according to a digital code in the amplitude modulation pattern. The controlled time sequence expressed as a time-varying optical power level can be used for in-band signaling along the same optical channels available for conventional optical data. The amplitude modulated signal is conveyed through the cross connect switch and is useful for example in control and command of the cross connect switch.

Abstract: A lighting device is described for receiving source light within a source wavelength range, converting the source light into a converted light, and reflecting the converted light to a desired output direction. The lighting device may use a micro electromechanical system (MEMS) device to receive and redirect the source light to the desired output direction. A conversion coating may be applied to the operative surface of the MEMS device to convert the source light into a converted light.

Abstract: A tunable photonic crystal device comprising: alternating layers of a first material and a second material, the alternating layers comprising a responsive material, the responsive material being responsive to an external stimulus, the alternating layers having a periodic difference in refractive indices giving rise to a first reflected wavelength; wherein, in response to the external stimulus, a change in the responsive material results in a reflected wavelength of the device shifting from the first reflected wavelength to a second reflected wavelength.

Abstract: This disclosure provides systems, methods and apparatus for enhancing the brightness and/or contrast ratio of display devices. In one aspect, the display devices can include an annular diffuser that is configured to scatter light into a ring shaped region. The annular diffuser can include a plurality of axicon lenses or holographic features. The reflective display can include an annular diffuser to shift the direction along which most of the modulated light is scattered away from the direction along which light is specularly reflected by the display devices to reduce specular glare and enhance brightness and/or contrast ratio.

Abstract: A tunable metamaterial comprising a membrane on which is arranged a two-dimensional array of elements to form a metamaterial, wherein the array is subdivided into blocks of multiple elements, each block being separated from adjacent blocks by a gap to allow each block to be moveable relative to its adjacent blocks. The lattice of the metamaterial and hence its properties are tuned by inducing adjacent blocks to move away from each other or towards each other either in-plane or out-of-plane in a controllable manner in response to an electrical, thermal or optical control signal.

Abstract: The present invention relates to a lighting device having a planer optical fiber and at least one light source device for illuminating a controllable spatial light modulator, wherein the optical fiber comprises a light-conducting core and a cover coating, and the light modulator comprises a pixel matrix, the light source device is disposed on the side of the optical fiber, and the light emitted by at least one light source of the light source device propagates laminarly in the optical fiber. The lighting unit according to the invention is characterized in that the planar optical fiber comprises a deflecting coating having a selective polarization function for laminarly decoupling and deflecting the evanescent wave field of the light propagating in the optical fiber, wherein the thickness of the cover coating reduces in the direction of light propagation.

Abstract: A microactuator includes a base member, a plate-shaped member which is deflectively deformable, and a driving force applying device. A driving objective is connected to a predetermined portion of a deflectively deformable area of the plate-shaped member. The driving force applying device deflectively deforms the deflectively deformable area to change an inclination of the predetermined portion of the plate-shaped member between a first inclination and a second inclination; and a part of the plate-shaped member or a part of a member fixed to the plate-shaped member is brought into abutment against a member when the inclination is the first inclination, and the part of the plate-shaped member or the part of the member fixed to the plate-shaped member is brought into abutment against the base member when the inclination is the second inclination.

Abstract: A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

Abstract: A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.

Abstract: A method comprising providing a first substrate and forming a first sacrificial layer over the first substrate, the first sacrificial layer comprising a curved surface portion, and forming a curved micromirror by depositing a reflective material over at the curved surface portion.

Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

Abstract: An electronic device may be provided with a display mounted in a housing. The display may have an array of display pixels that provide light to a user. The array of display pixels may form active display structures with a rectangular shape. The rectangular active display structures may be surrounded by an inactive border region. Reflector structures may be used to reflect light that is emitted from peripheral portions of the active display structures to a portion of the display overlapping the inactive border region, thereby providing the display with an effective active area that is larger than the area of the active display structures. The reflector structures may include rotatable reflectors. Control circuitry may use a rotatable positioner to rotate rotatable reflector structures in synchronization with controlling which pixel data is displayed by the display pixels in the peripheral portions of the active display structures.

Abstract: The present invention relates to an electric-field drive display device. According to one embodiment of the present invention, the electric-field drive display device comprises: a first substrate; a first electrode which is formed on the first substrate; a second electrode which is formed on the first substrate and is disposed in parallel with the first electrode; a drive partition wall which is formed on the first electrode and the second electrode and has a plurality of opening and closing holes; and a plurality of drive bodies which are disposed inside each of the opening and closing holes. Consequently, the electric-field drive display device according to one embodiment of the present invention can adjust the amount of light transmitted and so display the desired image by adjusting the positions of the drive bodies in the horizontal direction through the use of electrical force.

Abstract: An optical device suitable for forming a pixel in a video display. The optical device includes a first layer having a first refractive index; a second layer over the first layer, the second layer having a second refractive index less than the first refractive index; and a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index; and a fourth layer that is at least partially optically absorptive, wherein the optical stack and the fourth layer are a first distance from one another when the device is in a first state and are a second distance from one another when the device is in a second state, the first distance different from the second distance.

Abstract: An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.

Abstract: Pixels that include display elements that are configured with different structural dimensions corresponding to the color of light they provide are disclosed. In one implementation, a display device includes an array having a plurality of electromechanical pixels disposed on a substrate, each pixel including at least a first display element and a second display element. Each of the first and second display elements interferometrically modulating light by moving a reflective element between a relaxed position spaced apart from the substrate to an actuated position further away from the substrate than the relaxed position by applying a voltage across the reflective element and a stationary electrode. The stationary electrode of each display element is sized to provide actuation of the movable reflective element using the same actuation voltage even though the electrical gap through which the reflective element moves is different within a pixel.

Abstract: This disclosure provides systems, methods and apparatus for enabling a display to have a faster switching rate and an increased aperture ratio by using vertically oriented electrical interconnects with a reduced footprint. In one aspect, a display apparatus includes an array of display elements and an electrical interconnect connected to at least one display element in the array of display elements. A cross sectional aspect ratio of the electrical interconnect can be up to 1:1 or greater than 1:1.

Abstract: This disclosure provides systems, methods and apparatus for writing a display image to a display having an array of pixels according to a selected driving sequence. In one aspect, display elements in a row are driven using a tall and narrow voltage pulse. This allows display elements of a row to be driven in a shorter line time.