Abstract: This disclosure provides systems, methods and apparatus for controlling the states of a light modulator used in displays. A display apparatus includes pixel circuits coupled to the light modulators. Each pixel circuit can include an output node, a data capacitor, a charge transistor for charging the output node and a discharge transistor for selectively conducting a current between the output node and an update interconnect providing an update voltage. The display apparatus can include a controller for testing the pixel circuits to determine two or more update voltage levels, each update voltage level causing the discharge transistor to conduct current. The controller also can be configured to determine a logical high voltage level to be stored in the data capacitor based on the plurality of update voltage levels.

Abstract: Embodiments are directed to an apparatus for creating a scene comprising: a plurality of micro-mirrors configured to rotate between an off position and at least two on positions to generate a plurality of holograms, and a processor configured to select positions for the micro-mirrors based on an input specification of the scene.

Abstract: An electrooptical device includes a substrate, a mirror that is made up of a plurality of films which are arranged so as to be separated from the substrate on one plane of the substrate, and a supporting portion that is arranged between the substrate and the mirror, and has a portion which is connected to a portion of the mirror so as to support the mirror, in which the mirror includes a third mirror film which is a reflective metal film that is arranged on a side of the mirror which is opposite to the substrate, a second mirror film which is a high melting point metal film that is arranged between the reflective metal film and the substrate, and a first mirror film which is an antioxidative film that is arranged between the high melting point metal film and the substrate.

Abstract: A polymer substrate and back contact structure for a photovoltaic element, and a photovoltaic element include a CIGS photovoltaic structure, a polymer substrate having a device side at which the photovoltaic element can be located and a back side opposite the device side. A layer of dielectric is optionally formed at the back side of the polymer substrate. A metal structure is formed at the device side of the polymer substrate.

Abstract: Disclosed are packaging methods for the fabrication of analytical device packages and fabricated analytical device packages. The methods include providing a sensor wafer and mounting individual plates or a plate wafer on the sensor wafer. The sensor wafer includes sensor chips with aperture regions and is treated with selective depositions, either prior to or during the fabrication of the analytical device packages, to produce different surface characteristics at different portions of the aperture regions. Before dicing the sensor wafer, openings of the individual plates or the plate wafer are covered by a protective layer to protect surface characteristics at different portions of the aperture regions. A fabricated analytical device package includes a sensor chip with different surface characteristics, a plate, a packaging substrate and an optional cover.

Abstract: A method for simultaneously transmitting data bits and a clock signal includes converting the combination of the data bits and the clock signal to analog voltages by a digital-to-analog converter. The clock signal are the most significant bit of the digital-to-analog conversion and the data bits are the least significant bit of the digital-to-analog conversion.

Abstract: MQW devices, IC chips and methods may be used in semiconductor lithography patterning systems. An MQW device includes an array of pixels that have transmission elements and associated support circuits. The support circuits have preliminary memory cells and final memory cells. The final memory cells store transmittance values that control transmittances of the associated transmission elements. This way, exposure of a target with a lithography system for purposes of patterning the target may be performed through the transmission elements according to the controlled transmittances, while subsequent transmittance values are being received by the preliminary memory cells from memory banks. The exposure of the target therefore needs to pause for less time, in order to wait for the MQW device to be refreshed with the subsequent transmittance values. Accordingly the whole semiconductor lithography patterning system may operate faster and thus have more throughput.

Abstract: A display device including a top support plate having a first refractive index. A diffusion layer on a first surface of the top support plate includes a plurality of features. Each feature of the plurality of features has a second refractive index greater than the first refractive index. A transparent conductive polymer layer is applied over the diffusion layer. The transparent conductive polymer layer has a third refractive index equal to the first refractive index, and provides a common electrode.

Abstract: A microelectromechanical system (MEMS) is comprised of a micromirror device attached to a semiconductor device. A first spacer layer is formed and patterned to form hinge via openings. A hinge metal is deposited above the first spacer layer to form the hinge and the hinge vias. A capping layer is formed above the hinge metal and hinge vias. A second spacer layer is formed above the capping layer and patterned to form a mirror via. The capping layer protects the hinge metal from the developer solution used in the patterning step. The capping layer is removed from within the mirror via opening. Another metal layer is deposited above the second spacer layer to form the mirror and the mirror via.

Abstract: An optical device includes: an optical unit that is configured as a plate and includes a light incidence face on which light is incident; a support unit that includes a recessed arrangement portion in which the optical unit is arranged; and a first shaft portion and a second shaft portion that support the support unit in a manner which enables the support unit to oscillate, wherein a side face of the arrangement portion is separated from the optical unit between the optical unit and the first shaft portion and between the optical unit and the second shaft portion.

Abstract: A polymer substrate and back contact structure for a photovoltaic element, and a photovoltaic element include a CIGS photovoltaic structure, a polymer substrate having a device side at which the photovoltaic element can be located and a back side opposite the device side. A layer of dielectric is optionally formed at the back side of the polymer substrate. A metal structure is formed at the device side of the polymer substrate.

Abstract: An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.

Abstract: An etalon includes a fixed mirror disposed on a first substrate, a movable mirror disposed on a second substrate to face the fixed mirror with a gap interposed therebetween, a first electrode disposed on the surface of the first substrate facing the second substrate, a second electrode disposed on a first surface of the second substrate facing the first substrate and separated from the first electrode, and a warp preventing film disposed on a second surface of the second substrate so as to cover at least the movable mirror in a plan view. The direction of an internal stress acting in the in-plane direction of the warp preventing film is parallel to the direction of an internal stress acting in the in-plane direction of the movable mirror and the second electrode.

Abstract: A system and method for electrochemical force microscopy are provided. The system and method are based on a multidimensional detection scheme that is sensitive to forces experienced by a biased electrode in a solution. The multidimensional approach allows separation of fast processes, such as double layer charging, and charge relaxation, and slow processes, such as diffusion and faradaic reactions, as well as capturing the bias dependence of the response. The time-resolved and bias measurements can also allow probing both linear (small bias range) and non-linear (large bias range) electrochemical regimes and potentially the de-convolution of charge dynamics and diffusion processes from steric effects and electrochemical reactivity.

Abstract: An electronic holographic display device includes: a beam emitting device; a plurality of polarizing beam splitters; a plurality of spatial light modulators, each of which is disposed with prescribed distances therebetween and modulates a beam vertically made incident from the corresponding polarizing beam splitter; a magnifying optical system; and a reducing optical system. The magnifying optical system includes a first lens array and a second lens array. The reducing optical system includes a third lens array and a fourth lens array. A distance “a” between the spatial light modulator and the first lens is represented by a=(k+2)f0/(k+1), wherein a ratio “k” is a distance between two adjacent spatial light modulators, to a size of the spatial light modulator, and f0 is a focal point distance of the first lens.

Abstract: According to one embodiment, a projection type liquid crystal display device includes a liquid crystal display panel and a bezel. The liquid crystal display panel includes an array substrate, an opposed substrate, and a liquid crystal layer provided between the array substrate and the opposed substrate. The liquid crystal display panel has a first surface on one side of the array substrate and the opposed substrate, and a second surface on another side of the array substrate and the opposed substrate. The bezel covers a part of the liquid crystal panel. The bezel includes a first opening provided on a side of the first surface and a second opening provided on a side of the second surface. The second opening has a larger size than the first opening.

Abstract: A method of manufacturing a flexible display apparatus and a flexible display apparatus, the method including preparing a flexible substrate such that the flexible substrate includes a display area and a peripheral area at an outer portion of the display area; forming an inorganic layer portion on the display area and the peripheral area of the flexible substrate; forming a plurality of organic light emitting devices on the display area of the flexible substrate; detecting a crack of the inorganic layer portion formed on the peripheral area of the flexible substrate; and forming a crack guide hole around the crack.

Abstract: A semiconductor device, includes a semiconductor substrate (10) having a first (12a) and a second (12b) side. There is provided at least one via (15) extending through the substrate (10) having first (16a) and second (16b) end surfaces, the first end surface (16a) constituting a transducer electrode for interacting with a movable element (14) arranged at the first side (12a) of the substrate (10). A shield (17) is provided on and covers at least part of the first side (12a) of the substrate (10), the shield/mask (17) including a conductive layer (19a) and an insulating material layer (19b) provided between the substrate (10) and the conductive layer (19a). The mask has an opening (18) exposing only a part of the first surface (16a) of the via. Preferably the opening (18) in the mask is precisely aligned with the movable element, and the area of the opening is accurately defined.

Abstract: A display apparatus incorporating electromechanical light modulators and a layer of material including apertures corresponding to the electromechanical light modulators that results in the display apparatus having lower power-consumption.

Abstract: A system and related methods for near-eye display of an image are provided. In one example, a near-eye display system includes a light source comprising a surface and a plurality of pixels having a pixel pitch of 5 microns or less. An aperture array is located between 2 mm and 5 mm from the surface of the light source. The aperture array comprises non-overlapping apertures that are each centered on a vertex of an equilateral triangle within a grid of equilateral triangles. The center of each aperture is spaced from the center of each adjacent aperture by an aperture spacing of between 1 mm and 9 mm. The aperture array selectively passes the light emitted from the pixels to display the image without a double image condition.

Abstract: Provided are a complex spatial light modulator and a three-dimensional image display device including the same. The complex spatial light modulator includes: a spatial light modulator for modulating a phase of light; a prism array disposed next to the spatial light modulator; and a polarization-independent diffractive element for diffracting light that has passed through the prism array. The complex spatial light modulator may modulate both phase and amplitude of light.

Abstract: A tunable interference filter includes: a first substrate; a second substrate; a first drive electrode provided on the first substrate; a second drive electrode provided on the second substrate; a first detection electrode provided on the first substrate; a second detection electrode provided on the second substrate, wherein the first drive electrode includes a first partial drive electrode and a second partial drive electrode, a first lead drive electrode extending from the first partial drive electrode and a second lead drive electrode extending from the second partial drive electrode are provided on the first substrate, the first detection electrode includes a first partial detection electrode and a second partial detection electrode provided along a virtual circle, a first lead detection electrode extending from the first partial detection electrode and a second lead detection electrode extending from the second partial detection electrode are provided on the first substrate.

Abstract: A flexible display device is disclosed. In one aspect, the device includes: a bracket formed in the shape of a plate and forming curved portions in lateral sides, a flexible display panel disposed in an outer side of the bracket and attached to the curved portions and a cover window disposed in an outer side of the flexible display panel. The device further includes a polarizing plate disposed between the flexible display panel and the cover window and thus attached to the curved portions from an outer edge of the flexible display panel. According to some embodiments, the display device can firmly maintain a cover window, a polarizing plate, and a flexible display panel in a bent state.

Abstract: A display apparatus includes an electrowetting display device having at least one picture element with a display area. The display area has an active area and a different, inactive area and a display controller controls a display effect of the picture element in a range between a dark state and a light state, with a three-phase line between a first fluid, a second fluid and a first support plate of the picture element being completely in the inactive area for a first applied voltage corresponding to the dark state.

Abstract: An optical scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.

Abstract: In a method for fabricating a self-aligned vertical comb drive structure, a multi-layer structure is first formed. The multi-layer structure includes inter-digitated first and second comb structures formed via etching using a first mask layer as a mask. The first comb structure includes a plurality of first comb fingers, each having a first finger portion formed in a first device layer and a second finger portion formed in a second device layer and separated from the first finger portion by a self-aligned pattern on a stop layer. The second comb structure includes a plurality of second comb fingers formed solely in the second device layer. The second finger portions of the first comb fingers are subsequently removed.

Abstract: A wavelength selective switch and a wavelength selection method are provided. The wavelength selective switch comprises a plurality of input ports, via which a plurality of light beams are input respectively, each light beam including at least one optical signal of a predetermined wavelength; at least one output port; and a wavelength separation apparatus including a wavelength separation device and a micro-mirror group, the wavelength separation device being configured to separate at least one optical signal from a light beam input via a predetermined one of the plurality of input ports, and the micro-mirror group being configured to adjust a propagation direction of the at least one optical signal, so that the at least one optical signal is output via a predetermined one of the at least one output port.

Abstract: The present invention relates to means, system and method for measurement of stress strain and fatigue forecasting by the means of Integral Strain Gauges (ISGs) capable of recording information from a surface of a tested object, mathematical processor for analysis of the information recorded on the surface of such gauges. Integral Strain Gauges produced from a custom made reaction sensitive materials.

Abstract: Embodiments of the disclosure generally provide a method of forming a reduced dimension pattern in a hardmask that is optically matched to an overlying photoresist layer. The method generally comprises of application of a dimension shrinking conformal carbon layer over the field region, sidewalls, and bottom portion of the patterned photoresist and the underlying hardmask at temperatures below the decomposition temperature of the photoresist. The methods and embodiments herein further involve removal of the conformal carbon layer from the bottom portion of the patterned photoresist and the hardmask by an etch process to expose the hardmask, etching the exposed hardmask substrate at the bottom portion, followed by the simultaneous removal of the conformal carbon layer, the photoresist, and other carbonaceous components. A hardmask with reduced dimension features for further pattern transfer is thus yielded.

Abstract: A microelectromechanical (MEMS) device has a movable member supported above a substrate on a via support. The member and via support are fabricated integrally from first and second member forming layers. A first member forming layer forms a lower part of the member and supporting structure for the via support. First and second fill layers are deposited and patterned to form a plug that fills an inner cavity opening in the via structure. The plug is planarized to a planar part of the first member forming layer, and a second member forming layer is deposited over the first member forming layer and the planarized plug to form an upper part of the member. The via support may have a cavity filled by BARC layers.

Abstract: An apparatus and a method are provided. The apparatus comprises: a display panel; a film extending across the display panel and beyond a periphery of the display panel; and a curved support configured to support the film outside the periphery of the display panel.

Abstract: The device is configured from: a reflective surface shape controllable mirror in which a band-shaped X-ray reflective surface 2 is formed on a central portion of a front surface of a substrate 1, reference planes 3 are formed along both sides of the X-ray reflective surface, and a plurality of piezoelectric elements 4 are attached to at least one of front and back surfaces of the substrate so as to be arranged in the longitudinal direction of the X-ray reflective surface on both side portions of the substrate, and a multichannel control system for applying a voltage to each of the piezoelectric elements.

Abstract: An illumination system of a microlithographic projection exposure apparatus comprises a light modulator which includes a modulator substrate and an array of mirrors that are supported by the modulator substrate. At least some adjacent mirrors partly overlap. The light modulator further comprises a plurality of actuators that are supported by the modulator substrate and are configured to tilt the mirrors individually.

Abstract: A micromechanical component is described as having a mounting support, an actuator plate having a coil, situated on and/or in the actuator plate, which is connected to the mounting support via at least one supply line spring. A mirror element and/or filter element is connected to the mounting support via the actuator plate and the at least one supply line spring. A spacer has a first end that contacts an inner side of the mirror element and/or the filter element that is directed away from an incident light surface of the mirror element and/or the filter element. The spacer has a second end that contacts a carrier side of the actuator plate that is aligned towards the mirror element and/or the filter element. Also described is a method for producing a micromechanical component.

Abstract: Disclosed herein are MEMS resonator device designs and fabrication techniques that provide protection against electrostatic charge imbalances. In one aspect, a MEMS resonator device includes a substrate, an electrode including a first microstructure supported by the substrate, a resonant element including a second microstructure spaced from the first microstructure by a gap for resonant displacement of the second microstructure within the gap during operation, and a disabled shunt coupled to the electrode or the resonant element. The disabled shunt is disabled to enable the resonant displacement but otherwise configured to protect against damage from an electrostatic charge imbalance before the operation of the MEMS resonator device.

Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

Abstract: In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators and a first minor array optically coupled to the first plurality of collimators, where the first minor array includes a first plurality of minors, and where a first minor of the first plurality of minors includes a first plurality of photodiodes integrated on the first mirror.

Abstract: A built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens is described. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles to provide a capacitance-reference angle relationship. From the capacitance values, an interpolation step is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured. For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use.

Abstract: An actuator includes a movable member which rotates around a rotation axis, a plurality of connecting members which extend from the movable member through a shaft and are disposed in the vicinity of the outer circumference of the movable member at equal intervals in the plan view as viewed in a thickness direction of the movable member, and a support unit which supports each of the plurality of connecting members. Each of the plurality of connecting members has a driving portion rotatably connected with the support unit, and the shaft connecting the movable member and the driving portion. A first connecting portion that connects the movable member with the shaft and that is disposed opposite to a corresponding second connecting portion that connects the driving portion with the shaft through the movable member so that the movable member is interposed between the first connecting portion and the second connecting portion.

Abstract: A thermal carrier and method control a temperature of an LCOS display panel. The temperature of the LCOS display panel is determined. Electrical power to a heating element within a thermal carrier carrying the LCOS display panel is increased when the temperature of the LCOS display panel is below a first temperature threshold and electrical power to the heating element is decreased when the temperature of the LCOS display panel is above a second temperature threshold.

Abstract: A micro-optical element includes a resonator substrate, at least one microresonator includes a rotationally symmetrical body mounted on the resonator substrate, and a light-reflecting element including a ring-shaped mirror that surrounds the rotationally symmetrical body.

Abstract: A composite structure of graphene and polymer and a method of manufacturing the complex. The composite structure of graphene and polymer includes: at least one polymer structure having a three-dimensional shape; and a graphene layer formed on the at least one polymer structure.

Abstract: The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.

Abstract: A display includes an array of light modulators each having a first actuator and a second actuator. A control matrix includes a circuit having a first state inverter having an output coupled to an input of a second state inverter. A data store capacitor is coupled to an input of the first inverter and configured to store a data voltage corresponding to a future pixel state of the pixel. A first update interconnect is coupled to the first state inverter and configured such that altering a voltage applied to the first update interconnect causes the first actuator to respond to the stored data voltage. A second update interconnect is coupled to the second state inverter and configured such that altering a voltage applied to the second update interconnect causes the second actuator to respond to a voltage state of the first inverter.

Abstract: Apparatus (10) for use as a motor or generator, comprising: a capacitor assembly (20) comprising: a first conductor part (36) defining a first conductor region (38) and a second conductor part (37) defining a second conductor region (39), the first and second conductor parts (36, 37) being spaced apart to define opposed sides of a passageway (40) extending between the first and second conductor regions (38, 39); and an inner part (50) moveable relative to at least one of the conductor parts along the passageway (40) extending between the first and second conductor regions (38, 39).

Abstract: An optical system, an optical module and a method of manufacture thereof are provided. The optical module includes a top membrane and a bottom electrode. The top membrane includes a supporting layer, a first metal layer and an isolating layer with an opening. The first metal layer is disposed on lower surface of the supporting layer. The isolating layer is disposed on lower surface of the first metal layer. The bottom electrode, disposed below the top membrane, includes a second metal layer and a plurality of pillars. The pillars are disposed on upper surface of the second metal layer and below the isolating layer, wherein some of the pillars support the isolating layer. Wherein the pillars are used for preventing the top membrane from being pulled down to touch the second metal layer through the opening when a voltage is applied between the first and the second metal layers.

Abstract: An electrowetting element comprising: a first fluid and a second fluid immiscible with the first fluid; and a surface. The first and second fluids are switchable to a first configuration by application of a voltage, the first fluid adjoining a first area of the surface and the second fluid adjoining a second area of the surface in the first configuration. The electrowetting element includes at least one reconfiguration reducer for reducing a reconfiguration of the first and second fluids from the first configuration to a second configuration. The second configuration has the first fluid adjoining the second area and the second fluid adjoining the first area, there being a tendency for said reconfiguration to occur when maintaining said applied voltage.

Abstract: An optical read/write device in accordance with an embodiment of the present invention includes a lens portion configured to irradiate light emitted from a light source to an optical recording medium, and the lens portion includes: a flexible shape-variable lens; and an electrode portion provided on the shape-variable lens. The shape of the shape-variable lens can be changed when voltage is applied to the electrode.

Abstract: A plurality of movable units is arranged in a matrix. First and second electrodes are used in common in the movable units arranged in a column. A plurality of third electrodes, which commonly connects tabular members of the movable units arranged in a row, is formed for each row. The drive circuit selects, in order and one by one, the third electrodes. Subsequently, the drive circuit swings the tabular member by applying a bias voltage to the selected third electrode and applying an approach voltage or a separating voltage to a plurality of the first electrodes and second electrodes. During a predetermined period of maintaining a swinging posture, the voltage applied to the third electrodes is maintained as the bias voltage. The tabular member is returned to a non-swinging state by changing the voltage applied to the third electrodes to a reset voltage after the lapse of the predetermined period.

Abstract: On/off digital drive signals are used to create arbitrary spatial and temporal ribbon movement patterns in MEMS ribbon arrays.