Abstract: System for establishing a surface shape. The system includes a compliant substrate including the surface and having a reverse side, and a plurality of discrete actuators engaging the reverse side and arranged in a selected pattern to control the surface shape as individual discrete activators are activated. It is preferred that the actuators have multiple discrete stable states of elongation. A particularly preferred embodiment uses actuators that are binary with two stable states of elongation.

Abstract: A display system and method are provided for displaying an object utilizing at least one mirror. In use, a first angular dimension, a second angular dimension, and a curvature of the mirror are controlled for manipulating the display of the object. By this design, a variety of applications may be provided.

Abstract: A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.

Abstract: A curve correction mechanism for correcting a direction and degree of curvature of a reflecting mirror that reflects a light beam includes an adjuster to contact and move a pressing member between a first position, where a first pressing portion of the pressing member presses against an outboard portion of the reflecting mirror provided outboard from a support that supports the reflecting mirror in a longitudinal direction of the reflecting mirror while a second pressing portion of the pressing member is isolated from the reflecting mirror, and a second position, where the second pressing portion of the pressing member presses against an inboard portion of the reflecting mirror provided inboard from the support while the first pressing portion of the pressing member is isolated from the reflecting mirror.

Abstract: The invention relates to space engineering, and can be used for space radio, television and telephone communications, as well as illuminating ground objects at night from space. The inventive unfolding film-type radiation reflector comprises a framework consisting of pneumatic tubes and cells, a film reflecting surface connected to the framework along the perimeter thereof and a gimbal assembly mountable on a space vehicle. The internal and external frames of the gimbal assembly are made from internal and external wheel-shaped pneumatic tubes. The internal wheel-shaped pneumatic tube is embodied in such a way that it is mountable on the space vehicle, while the external wheel-shaped pneumatic tube is embodied in the form of a framework element and is connected to the film reflecting surface. Said invention makes it possible to reduce the mass and overall dimensions of mechanisms for packing and unfolding the film-type radiation reflector.

Abstract: Described herein are buckled structures useful for forming specific and precise optical shapes. For example, buckled structures are disclosed which have parabolic, near-parabolic, cylindrical, near cylindrical, conic section shapes, arcs and other non-sinusoidal optical curves. Also described herein are buckled structures including one or more restraints for forcing the structures to adopt or maintain specific optical shapes upon or after buckling. In another aspect, provided herein are methods for forming optical structures.

Abstract: A strobe reflector that includes a reflective material and a support structure is provided. The support structure may be adjusted or moved into at least two distinct positions to provide two distinct shapes for the reflective material. The first position of the support structure shapes the reflective material in a first configuration (such as a half-hemisphere) and a second position of the support structure shapes the reflective material in a second configuration (such as a full hemisphere). The different shapes of the reflective material may be used for different mountings of the strobe device, such as for a ceiling mount or a wall mount. In this way, a single strobe reflector may be configured for different installations (whether to the wall or ceiling).

Abstract: A mirror assembly includes a reflective surface disposed within a housing, and an actuator in operative communication with at least a portion of the housing, wherein the actuator and/or housing comprises an active material element configured to cause or selectively enable the housing and surface to be manipulated.

Abstract: A passive suspension for a bimorph or other self-deforming mirror includes elements, e.g., of herringbone shape, extending between an edge of the mirror substrate and a support structure. The elements have portions directed transversely (e.g. obliquely) relative to a direction of relative movement between the mirror edge and the support structure, so as to accommodate the movement by bending.

Abstract: Optical components and systems are disclosed that include an optical element and a base member. Multiple wells correspond to respective locations on a surface of the optical element. Liquid metal in the wells is coupled to the respective locations to apply respective hydrostatic pressures to the locations. At least one displacement device is coupled to at least one well to selectively change the respective hydrostatic pressure applied, relative to the base member, by the liquid metal in the well to the respective location. The “liquid metal” is any of several formulations of metal that are liquid under actual-use conditions (e.g., a liquid alloy of gallium). The liquid metal can be displaced through conduits to change the hydrostatic pressure being applied to the respective locations. The displacement, and hence the hydrostatic pressure, can be feedback controlled.

Abstract: A method of manufacturing a multi-layer panel having a curved reflective and/or transmitting facing layer, the method comprising the steps of: increasing and/or decreasing the pressure on a side of the thin membrane to form a pressure differential across a thin membrane to cause the thin membrane to deform to a required shape; and applying a first layer of material to an outer surface of the thin membrane whilst the thin membrane is maintained in the required shape by the increase and/or decrease in pressure, and allowing the first layer of material to cure for a pre-determined time.

Abstract: A deformable mirror for an adaptive optical system employs a thin membrane stretched over a plurality of electrostatic electrodes providing local controlled deformation to the membrane.

Abstract: The invention includes a deformable mirror for use in adaptive and active optical systems and in optical technology laser communication directed energy systems. The invention utilizes pockets formed in the back of the mirrors substrate. The pockets house actuators that are bonded to the substrate and may adjustably deform the mirror surface depending on the voltage supplied to the actuators. A plurality of mirrors may be combined to form a scalable array or positioned to overcome issues related to the uncontrollable portions of separate individual mirrors.

Abstract: An optical arrangement, in particular a projection system, illumination system or beam shaping system for EUV lithography, including at least one optical element that is arranged in a beam path of the optical arrangement and that reflects radiation in the soft X-ray- or EUV wavelength range, wherein at least during operation of the optical arrangement at least one of, preferably each of, the reflective optical elements in the beam path, at least at the optical surface, has an operating temperature of approximately 30° C. or more, preferably of approximately 100° C. or more, particularly preferably of approximately 150° C. or more, and even more preferably of approximately 250° C. or more, and wherein the optical design of the at least one reflective optical element is selected such that its optical characteristics are optimised for operation at the operating temperature. Also presented is a method for providing a reflective optical element with such an optical design.

Abstract: A method and apparatus for correcting optical aberrations in an optical device using a deformable mirror. An actuator is provided which applies a deforming force to the deformable mirror. By selecting particular thickness profiles of the deformable mirror and force configurations of the actuator, the optical device can be configured to correct for different optical aberrations. The actuator may be configured to apply the deforming force peripherally, centrally, non-centrally or homogenously across the surface of the deformable mirror. The deformable mirror may be a flat disk mirror, a convex mirror, or a concave mirror, and may include a membrane having a variable flexibility. The optical device may be a wide-field microscope, an optical read/write device, laser tweezers, or any other optical device in which correction of optical aberrations is desirable.

Abstract: An optical mirror comprising: a mirror body having a reflective surface; a waffle structure that is connected to a surface opposite to the reflective surface of the mirror body, the waffle structure comprising partition walls, wherein at least one of the partition walls includes a heat generation part; and a power supply part configured to supply power to the heat generation part, wherein the partition walls and the mirror body are made of a same material.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: A curved surface forming apparatus includes a first member to be curved; a second member which is placed with a distance from the first member and holds the first member; and a pressurizing mechanism which pressurizes the first member and the second member to curve at least a part of the first member toward at least the second member.

Abstract: System and method for estimating and correcting an aberration of an optical system. The method includes capturing a first plurality of images on a first plurality of planes. The first plurality of images is formed by at least the optical system. Additionally, the method includes processing at least information associated with the first plurality of images, and determining a first auxiliary function based upon at least the information associated with the first plurality of images. The first auxiliary function represents a first aberration of the optical system. Moreover, the method includes adjusting the optical system based upon at least information associated with the first auxiliary function.

Abstract: Provided is an adaptive device for shaping a laser beam. The adaptive device includes a variable optical configuration. The variable optical configuration includes: an optical element and a temperature element in contact with the optical element. The adaptive device further includes a controller operatively coupled to the temperature element to apply at least one of heating and cooling to the optical element so as to alter a temperature profile of the optical element, thereby causing an optical property change thereof.

Abstract: A deformable mirror device includes: a flexible member having a mirror surface on a front surface and a convex cross-sectional shape pattern on a rear surface, the cross-sectional shape pattern having a protrusion at a pressing reference point and having the largest cross-sectional thickness, the flexible member further having a convex frame on the rear surface but outside a deformable region where the cross-sectional shape pattern is formed; a housing having a guide hole in a front surface of the housing, and an internal hole communicating with the guide hole, the frame of the flexible member positioned such that the center of the opening coincides with the pressing reference point and fixed to the front surface; a driving force transmitter having a column having a spherical tip, the column inserted into the guide hole so that the spherical tip comes into contact with the protrusion at the pressing reference point; and a driving force generator provided in the internal hole, one end of which bonded to an end

Abstract: A new blind spot mirror comprising a bifurcated mirror, allows one portion of a mirror to remain in the normal driving mode while concurrently allowing a blind spot portion to be transitioned to a position where the blind spot area can be viewed. The transition from regular viewing to blind spot viewing can be triggered by manual and/or automatic means. An alternate embodiment of the present invention comprises a mirror assembly with one mirror face affixed back-to-back with another mirror face. One face is used for normal driving mode and the other face is angled to capture the blind spot area. Transition (rotation) of the blind spot mirror face into viewing position may be triggered by manual or automatic means. In another embodiment of the invention, a flexible mirror face is included over the mirror portion and the blind spot portion to disguise the parting between the two portions.

Abstract: There is described a microvalve system having a first body portion having a fluid channel defined in a face, an electrode disposed in the fluid channel and electrically connectable to a power source, a channel membrane disposed over the fluid channel and aligned with the electrode, and a second body portion disposed on the first body portion, the first body portion comprising a liquid receiving cavity aligned with the membrane. The liquid receiving cavity is adapted to receive an electrical conducting liquid that is electrically connectable to the power source. The channel membrane is displaceable towards the electrode upon application of an electrical potential difference between the electrode and the electrical conducting liquid in order to at least partially obstruct the fluid channel.

Abstract: The present disclosure relates to a deformable mirror including a deformable membrane with a reflecting face and an opposite face, a stiff plate and a structure of at least one actuator at least a part of which is fixed to the stiff plate and able to locally deform the membrane, wherein the deformable mirror also includes a not necessarily uniform adhesive layer against the opposite surface of the membrane, and a structure of at least one flexible coupling including a mechanical connection and upper and lower linking means coupling respectively the upper and lower ends of the mechanical connection to the adhesive layer and to the stiff plate. The disclosure also relates to a tool and a method making it possible to produce such a mirror.

Abstract: A deformable mirror device compensates the spherical aberration caused by the difference of thickness of the cover layers covering recording layers of an optical disc. Circular projections are concentrically arranged on a flexible member (2) where a mirror surface (3) is formed to produce a strength distribution pattern (2a). Attractive force is generated as electrostatic force between an upper electrode (8) and a lower electrode (9) according to the voltage applied from a drive circuit (10) so as to contract the second space (7) and accordingly expand the first space (5) in order to deform the mirror surface. At this time, the profile of the mirror surface is deformed to show a desired profile that can compensate the spherical aberration by the pattern formed on the flexible member (2) as strength distribution pattern (2a). With this arrangement, only a single drive actuator (10) is needed to deform the mirror surface to simplify the configuration and the control operation.

Abstract: An optics element, such as an optical, IR, or X-ray mirror or mirror segment, is made by a combination of replication and lamination by depositing a first metallic layer on a replicating surface of a master or mandrel, depositing a light weight backing layer that adheres on the first metallic layer, and depositing a cover layer that adheres on the backing layer whereby the optics element comprises an in-situ deposited composite lamination of the first metallic layer, the backing layer, and the cover layer.

Abstract: A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1?) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1?) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

Abstract: At least one exemplary embodiment is directed to a stage apparatus which comprises a movable stage, a mirror for reflecting light from an interferometer to measure the position of the stage, a heating-and cooling unit for heating or cooling the mirror, and a calculator for calculating the shape of the mirror. The shape of the mirror can be changed by controlling the heating-and-cooling unit according to the shape of the mirror obtained from the calculator.

Abstract: An optical module adjusts an output of a laser of a laser processing machine. The optical module consists essentially of includes an adaptive spherical mirror configured to receive a laser beam from the laser, and a spherical mirror configured to receive a laser beam reflected from the adaptive mirror. Both the adaptive mirror and the spherical mirror have a phase-shifting coating such that the laser beam reflected from the spherical mirror has a circular polarization.

Abstract: An optical component bowing device includes a bending moment generating structure. In a particular embodiment, the bending moment generating structure can have extension members that extend in a direction substantially orthogonal to a longitudinal direction of an optical component. The extension members can be positioned adjacent longitudinal end portions of the optical component. The bending moment generating structure can also have loading members that load the extension members in a direction that is parallel to a longitudinal direction of the optical component, whereby displacement of the extension members can generate a bending moment in a supported portion of the optical component that reflects or shapes a light beam. The bending moment generating structure can also include a reflective surface. Extension members on at least one end of the optical component can be T-shaped when seen in plan view in a direction orthogonal to the reflective surface.

Abstract: A deformable mirror device includes a flexible member formed so as to be deformable and having a mirror surface formed on its front surface, and a pressure generating section configured so that a direction of generation of a pressure to be applied to the flexible member is variable.

Abstract: A method and apparatus is configured for reflecting a beam of light incident at a primary mirror by rotating a first mirror segment to align a selected facet of the mirror segment to be generally orthogonal to the principal axis. The first mirror segment is translated in a motion parallel to the principal axis to a first position such that the mirrored segment at a facet comprising a mirror is brought into alignment with at least one second mirrored segment to form at a facet a first parabolic mirror. The incident beam of light is then reflected by collimating the first parabolic mirror by rotation and translation of the first mirror segment to strike a first secondary element.

Abstract: An optical device includes an optical component that reflects or shapes a light beam. In a particular embodiment, the optical device can include a bending moment generating structure that generates a bending moment in a supported portion of the optical component. The optical device can also include an adjusting mechanism that adjusts the bowing amount of the optical component by adjusting the bending moment of the bending moment generating structure.

Abstract: This invention relates to improvements in thermal management in deformable mirrors. In particular, this invention relates to a deformable mirror comprising a heat spreader used to distribute thermal energy evenly across the mirror. Diamond material 104, on account of its extremely high thermal conductivity, is a preferred choice of heat spreader which permits build up of thermal energy in the mirror 100 to be quickly and evenly distributed across the entire mirror surface, increasing the working life of the mirror.

Abstract: There is provided a process for the preparation of a suspension of magnetic particles in a polar carrier liquid. The process includes the step of: coating the surface of the magnetic particles with an organic ligand having a hydrophilic chain prior to the suspension. For preparing a magnetically deformable mirror, the suspension of magnetic particles in a polar carrier liquid is coated with a reflective surface layer. A ferrofluid includes a suspension of magnetic particles coated with an organic ligand having a hydrophilic chain in a polar carrier liquid.

Abstract: A variable shape mirror system includes a deformation section on which a reflection surface and first electrode are formed, a fixing section on which a second electrode is formed, and which is configured to fix the deformation section, and a drive unit, at least one of the first electrode and second electrode is formed into divided electrodes constituted of a plurality of pairs of electrodes, and in the divided electrodes, a division boundary between the electrodes includes a circular shape. One drive voltage indicating signal is subjected to operation processing on the basis of a desired mirror shape for each of the divided electrodes, whereby a drive voltage is generated for each of the electrodes, the variable shape mirror is deformed into a desired shape, and an optimum aspheric component corresponding to the curvature of the reflection surface is realized.

Abstract: A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images includes a plurality of radiation source images which are offset to each other in two dimensions (x, y) in a direction perpendicular to the beam direction of the transformed radiation bundle and are arranged relative to each other in a non-rotationally symmetric manner relative to the beam direction of the transformed radiation bundle. The transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle. The result is a collector in which the radiation bundle shape generated by the collector.

Abstract: A wavefront aberration compensating apparatus includes: a deformable mirror which compensates a wavefront aberration of a light flux entered, the deformable mirror including a plurality of electrodes, and a thin-film mirror which changes a configuration thereof in accordance with a voltage value applied to each of the electrodes; an optical system provided with the deformable mirror, and including an object subjected to aberration compensation; a wavefront sensor which receives the light flux traveled through the object and the deformable mirror, and which measures the wavefront aberration of the light flux; and a controller configured to calculate the voltage value applied to each of the electrodes, on the basis of differences, from a signal outputted from the wavefront sensor, between application points on the thin-film mirror and target points both corresponding to the electrodes, respectively, and to repeat compensation of the configuration of the thin-film mirror of the deformable mirror on the basis of

Abstract: There is provided a collector system. The collector system includes a first collector mirror and a second collector mirror. The first collector mirror receives EUV light from a light source at a first aperture angle via a first beam path, and reflects the EUV light at a second aperture angle along a second beam path. The first aperture angle is larger than or substantially equal to the second aperture angle. The second mirror receives the EUV light from the first mirror at the second aperture angle. The collector is an oblique mirror type normal incidence mirror collector system.

Abstract: A light-weight mirror blank assembly, having at least one sheet of corrugated material; and at least one face sheet in intimate contact with a surface of the sheet of corrugated material forming the light-weight mirror blank assembly. The light-weight mirror blank assembly has an areal density less than an equivalent blank assembly having a solid support structure for supporting a mirrored surface.

Abstract: A device for light processing includes a first housing having a reflective bottom surface and walls defining a first cavity. A first fluid or gel has a meniscus disposed within the first cavity. A control means is coupled with the first fluid or gel for adjusting the curvature of the meniscus. The bottom surface is configured to reflect an incident light beam through the first fluid or gel and toward the meniscus.

Abstract: A device for correcting optical defects of a telescope mirror, compatible with use in a space environment, is provided, where the criteria of weight, reliability, service life, cost and resistance to extreme temperatures are fundamental. The device comprises at least one controllable-length element, means for controlling the length of this element, this element being connected to the mirror by its ends in zones that are diametrically or diagonally opposed and close to the periphery of this mirror, the connection between the controllable-length element and the mirror comprising attachments that are rigid on the axis joining these two attachment zones and flexible in the other degrees of freedom.

Abstract: A mirror for concentrating solar power devices, associable with a curved supporting panel, which comprises a flat and thin mirror-finished plate which is flexible, as a consequence of a tempering treatment, for complementary shaping, by inflection, with respect to the panel, which is adapted to support and keep the plate inflexed.

Abstract: A radius of curvature controlled mirror for controlling precisely the focal point of a laser beam or other light beam. The radius of curvature controlled mirror provides nearly spherical distortion of the mirror in response to differential expansion between the front and rear surfaces of the mirror. The radius of curvature controlled mirror compensates for changes in other optical components due to heating or other physical changes. The radius of curvature controlled mirror includes an arrangement for adjusting the temperature of the front surface and separately adjusting the temperature of the rear surface to control the radius of curvature. The temperature adjustment arrangements can include cooling channels within the mirror body or convection of a gas upon the surface of the mirror. A control system controls the differential expansion between the front and rear surfaces to achieve the desired radius of curvature.

Abstract: The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.

Abstract: This relates to an optical device comprising at least one deformable membrane (2), a support (1.5), actuating means (50, 51) for loading the membrane (2) to deform it, the membrane (2) being provided with a zone (2.3) for anchoring to the support (1.5) and a substantially central zone (2.1) suitable for deforming reversibly surrounded by an anchoring zone (2.3), the support (1.5) and the membrane (2) contributing to imprison a constant volume located at least in the interior of the anchoring zone (2.3) of a fluid (4.1) called first fluid, in contact with one of the faces of the membrane (2). The actuating means (50, 51) of the membrane (2) comprise main actuating means (50) which load the membrane in a peripheral zone (2.2) lying between the central zone (2.1) and the anchoring zone (2.3) in order to move it in a direction and to move the first fluid (4.1) towards the central zone (2.1) and supplementary actuating means (51) anchored at least to the membrane which load the membrane (2) in the central zone (2.

Abstract: This invention concerns improvements relating to a deformable-mirror holder for holding a mirror in a desired position, to within accepted tolerances, even whilst the mirror is deforming or in a deformed state. More particularly but not exclusively, this invention relates to a holder for a bimorph mirror. A deformable mirror holder (31) is provided comprising a body with a receiving portion for receiving a deformable mirror (30), and wherein the receiving portion is defined by a passive flexible support structure (41) such that, in use, to the support structure provides a supporting surface to the mirror. This invention extends to a deformable mirror and a deformable mirror holder as described above.

Abstract: A deforming method for a deformable mirror having plural electrodes and a reflective membrane which are distorted by static voltages. The Zernike voltage template used to deform a deformable mirror is adapted for aberration correction by calibrating each component template according to the specificity of the mirror. The voltages applied to the electrodes to form a surface profile of the reflective membrane are measured based on the reflection light from the membrane. A certain number of voltage-by-electrode patterns each of which corresponds to a different reference profile of the reflective membrane and specifies each set of a voltage and an electrode to which the voltage is to be applied are stored preliminarily. The reflective membrane is deformed to a desired profile by superposing preliminarily stored voltage-by-electrode patterns. The deformation of the mirror is corrected by calibrating each template according to the operational environment.

Abstract: An aspect of the embodiment, a MEMS device includes a rotating unit, a first hinge, a first frame and an actuator. The actuator has a plurality of electrodes for rotating the rotating unit. The first frame has one of the electrodes. A portion of silicon layer by the electrode of the frame is chamfered.

Abstract: The invention relates to a reflective surface substantially perpendicular to a vector field described by the equation: and a computer program for forming the reflective surface. The reflective surface is capable of providing a substantially undistorted wide-angle field of view. It is particularly useful as a diver's side mirror of a vehicle to provide an enlarged, substantially undistorted field of view which may be used to reduce or eliminate blind spots.