Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: A safety rearview mirror has flexible mirrors (1) that are flexed selectively with a flex-control switch (2) on a turn-signal lever (4) of a motor vehicle (6). The flex-control switch controls a flex actuator (7) that is in contact with a back side of the flexible mirror. The flexible mirror is flexed to a convexly flexed mode to provide wide-area rearview for eliminating rearview blind spots, for lane-changing, for turning, for backing up and for responding to rearward conditions and dangers. For non-widened rearview, the flexible mirror is flexed to a flat mode. The flex-control switch is adapted to be affixed to the turn-signal lever for actuating the flexed mode by turn-signaling with the turn-signal lever. Return steering after a turn or de-activating the turn signal deactivates the flexed mode.

Abstract: A variable shape mirror comprises a frame member having an opening, and a thin film having a first region including a reflecting plane and a second region of higher rigidity than the first region disposed in the outer periphery of the first region, being supported in the opening of the frame member. Other variable shape mirror comprises a frame member having a first opening and a second opening, a first thin film having a reflecting plane, forming an electrode, and supported in the first opening of the frame member, a second thin film forming an electrode electrically conducting with the electrode of the first thin film, and supported in the second opening of the frame member, and a substrate bonded to the frame member at a specified interval, and having an electrode at a position opposite to the electrode of the second thin film.

Abstract: A universally oriented liquid mirror. A liquid and a penetrable unit are operatively connected to provide a mirror that can be universally oriented.

Abstract: A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

Abstract: A method of constructing a thin film mirror, which method comprises: (i) providing a suction chamber (2) with edges (4) which lie on a required mirror surface; (ii) providing tensioning means which is forced into contact with film (8) adjacent to at least one of the edges of the suction chamber such that tension in the film parallel to the edge is increased; and (iii) providing holding means (12) for (a) holding the tensioning means (10); (b) locally adjusting holding pressure on the tensioning means (10); and (c) feeding the tensioning means (10) into position after the film (8) has been attached to the suction chamber (2).

Abstract: An optical quality, freestanding, compliant membrane mirror is cast with a concave parabolic shape, and includes a substrate and a reflective stress coating. The stress coating is in compression and applies a tensile shear stress to the substrate that opposes and offsets the intrinsic stress in the substrate that would otherwise decrease the concavity. The stress coating generates a force to restore the membrane mirror to its cast concave parabolic shape when an external force deforms the mirror.

Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.

Abstract: The present invention provides an optical pickup deformable mirror used for correcting a spherical aberration caused by a difference in thickness of a cover glass of a recording medium, wherein the optical pickup deformable mirror is deformed into a rotation-symmetrical surface obtained by rotating a curve represented by the following expression f(r): f(r)=ar2+g(r) where r is the distance from the axis of rotational symmetry, a is an actual number except for 0, and g(r) satisfies |g(r)|≦1 &mgr;m.

Abstract: A glass structure, such as a mirror facet, having a glass member, a composite structure and a support structure. The composite structure includes a rigid interlayer which is bonded to the glass member and exerts a compressive force thereon to place the glass member in compression. The support structure is used to mount the glass structure and prevents the glass member from collapsing due to the compressive force exerted by the rigid interlayer. The glass structure is particularly well adapted for use in forming heliostats, parabolic dishes, trough concentrators, or other like elements for use in solar power systems, and does not suffer from the limitations or prior forms of such devices.

Abstract: A radiation reflector may be used in space telecommunications, having spherical reflecting surfaces and/or rectangular reflecting surfaces which may be folded, as required. The radiation reflector has an arrangement of reflecting surfaces on foldable frames which may be in the form of interacting balls or rings mounted on pneumatic tubes or ropes.

Abstract: A variable shape mirror comprises a frame member having an opening, and a thin film having a first region including a reflecting plane and a second region of higher rigidity than the first region disposed in the outer periphery of the first region, being supported in the opening of the frame member. Other variable shape mirror comprises a frame member having a first opening and a second opening, a first thin film having a reflecting plane, forming an electrode, and supported in the first opening of the frame member, a second thin film forming an electrode electrically conducting with the electrode of the first thin film, and supported in the second opening of the frame member, and a substrate bonded to the frame member at a specified interval, and having an electrode at a position opposite to the electrode of the second thin film.

Abstract: A deformable mirror (10) with an at least quasi-continuously deformable optically effective surface (12) has a floatingly supported mirror plate (11) which is positioned along its edge by a portion of the adjusting members (14.1), whereas the other portion of the adjusting members (14.2) locally individually deforms the mirror plate (11) for the purposes of wave front correction. In that respect all adjusting members (14.1, 14.2) are fixed to the rear side (13) of the mirror plate (11), with a coupling portion (11) which is provided with a desired-flexion location (constriction (25)).

Abstract: The invention relates to a method of making a surface having a shape of an angular conic section for focusing optical beams. An angular conic section is understood to be a portion of a surface, which can be generated by rotating a generating line with the desired shape about an axis of rotation. It puts to practice the formation of a mirror or a mandrel of a truncated shape with a reference contour or reference contours (2, 4), and which is provided with a device (11, 13, . . . ) for deforming the reference contour or contours along at least one direction (F). The thus-produced mirror or mandrel can be common to a plurality of modules or rings of a WOLTER type telescope. The invention relates likewise to a mandrel or a mirror with a reference contour (2), characterized in that it is provided with a device (15, 16, . . . ) for adjusting the angle that is formed by the first and the second portion.

Abstract: In order to provide a noise-free reliable projection type display apparatus which has no movable portion and can display a high quality full-color image, the following arrangement is proposed. In a projection type display apparatus which has an optical modulation device for displaying an image by controlling the reflected state of light, an illumination unit for irradiating the optical modulation device with light, and a projecting optical system for projecting reflected light components of the light components with which the optical modulation device is irradiated, and projects and displays an image formed by the optical modulation device, as the optical modulation device, a mirror array device for modulating light by controlling the tilt amounts of mirrors that form pixels is used.

Abstract: The current invention is directed to optical MEM devices and methods for making the same. MEM devices, in accordance with the current invention, have one or more movable micro-structures which are preferably ribbon structures or cantilever structures configured for modulating light. The movable micro-structures are patterned from a device layer comprising a silicon nitride under-layer, a reflective metal top-layer and a ceramic compensating layer. The ceramic compensating layer is provided. to reduce stress in the micro-structures which can lead to curvature. In accordance with the embodiments of the invention, the device layer is formed on a silicon substrate that is preferably etched with trenches before forming the device layer. The device layer is then patterned using lithographic masking and etching techniques to release the patterned device layer and form the movable micro-structures. Portions of the device layer which are formed over the trenches provide support for the released patterned device layer.

Abstract: The present invention provides an ultra-lightweight and highly precise electromagnetic wave concentrator having a high rigidity and also flexibility, which is suitable as a solar ray concentrate device and for communications, this concentrator being produced by a molding process using the effect of stress relaxation in a thin-film material. An ultra-lightweight electromagnetic wave concentrator 10 having a high rigidity and also flexibility is obtained by conducting processing that increases the rigidity by forming a thin-film curved body comprising an electromagnetic wave reflective surface 11 that has the surface shape that is part of a paraboloid of revolution or of a curved surface modeling same by the effect of stress relaxation in a thin-film material, and also forming a structure of reinforcing grooves 13-15 in the reflective surface 11 for increasing the regidity.

Abstract: A flexible thin film is supported by a frame member through two end portions opposing each other. A reflection surface is provided on the flexible thin film to reflect light. A first electrode is provided integrally with the flexible thin film. A second electrode is substantially fixed to the frame member so as to oppose the first electrode on an opposite side of the reflection surface. A third electrode is substantially fixed to the frame member so as to oppose the first electrode on the same side as the reflection surface. An optical opening for introducing light into the reflection surface is provided on the side of the reflection surface. At least one of the second and third electrodes is divided in the direction connecting the two end portions. The configuration of the reflection surface is controlled to a desired configuration by applying a desired voltage selectively to between the first electrode and the divided second or third electrode.

Abstract: A multilayer micromirror structure that exhibits substantially no form change as a result of a given change in temperature is disclosed. A reflective layer is disposed on a substrate layer, and a counterbalancing structure is disposed on the structure in a way such that a neutral plane is located at a predetermined position relative to the substrate layer and the reflective layer. When forces are exerted at the neutral plane of such a structure, the structure attains a predetermined geometric form. A method of manufacture is disclosed wherein a substrate is etched to define a desired structure and a conformal layer of a masking material is deposited onto the etched substrate. Further etching exposes portions of the substrate and silicon is deposited to achieve another desired structure. Excess material is etched away to free the finished structure and a reflective layer is deposited onto the surface of the structure.

Abstract: A variable-profile optical device includes a light-transmission elastic member in which an elasticity of a first surface is set to be higher than that of a second surface disposed opposite to the first surface, wherein a pressure is applied to the second surface of the elastic member, so that the second surface of the elastic member is selectively deformed, and a focus distance may be varied.

Abstract: A deformable mirror arrangement has a plurality of constraint mechanisms contacting a deformable mirror at specified contact positions. At least three of these constraint mechanisms are rigid body servo control mechanisms such as high-bandwidth servo control mechanisms, each including a force actuator contacting the mirror at a corresponding one of the contact positions, a position sensor assisting to measure position of the mirror and a servo control unit for controlling the force actuator.

Abstract: A flexible thin film is supported by a frame member through two end portions opposing each other. A reflection surface is provided on the flexible thin film to reflect light. A first electrode is provided integrally with the flexible thin film. A second electrode is substantially fixed to the frame member so as to oppose the first electrode on an opposite side of the reflection surface. A third electrode is substantially fixed to the frame member so as to oppose the first electrode on the same side as the reflection surface. An optical opening for introducing light into the reflection surface is provided on the side of the reflection surface. At least one of the second and third electrodes is divided in the direction connecting the two end portions. The configuration of the reflection surface is controlled to a desired configuration by applying a desired voltage selectively to between the first electrode and the divided second or third electrode.

Abstract: An infrared beam is directed to the surface of a Mylar mirror, and the mirror reflects that beam. The reflected beam is detected, and data gleaned from the reflected beam is used to determine whether the optics of the mirror must be adjusted. The optics of the mirror are adjusted by varying voltage applied to electrostatic actuators on the frame of the mirror, or varying the pressure in chambers formed by the mirror frame and mirror surface.

Abstract: Space telescope including at least a membranous mirror and a device to fold said mirror, this device allowing transport and orbiting, without residual deformation, of the said mirror, and being constituted by a circular thin disc comprising concentric circular undulations, and able to be rolled up.

Abstract: The present invention is an optical mirror assembly comprising; a mirror disc tapered on its a rear surface to a reduced thickness at the outer perimeter, a puller attached to the central region of the rear surface, a tensioner applying axial tension to the puller, and a perimeter support engaging the perimeter of the disc and reacting the axial tension into an axial compression force on the perimeter of the mirror disc and flexing it into a desired shape.

Abstract: A variable-profile optical device includes a light-transmission elastic member in which an elasticity of a first surface is set to be higher than that of a second surface disposed opposite to the first surface, wherein a pressure is applied to the second surface of the elastic member, so that the second surface of the elastic member is selectively deformed, and a focus distance may be varied.

Abstract: An infrared beam is directed to the surface of a Mylar mirror, and the mirror reflects that beam. The reflected beam is detected, and data gleaned from the reflected beam is used to determine whether the optics of the mirror must be adjusted. The optics of the mirror are adjusted by varying voltage applied to electrostatic actuators on the frame of the mirror, or varying the pressure in chambers formed by the mirror frame and mirror surface.

Abstract: An optical signal, which is to become the subject of dispersion compensation, is split by optical combining/splitting unit 2, and each frequency component of the optical signal that is split is reflected by each reflective surface of reflective mirror 40 of reflective means 4 to apply a predetermined phase shift to the respective frequency components. Each reflected frequency component is then combined using optical combining/splitting unit 2, to give dispersion compensated optical signal. Furthermore, in regards to reflective means 4, which is used to apply phase shift to each frequency component of an optical signal, reflective mirror 40 is made a variable movable mirror by reflection position at each reflective surface, which reflects the frequency components, deforming the entire reflective surface. This allows dispersion that is created in an optical signal to be compensated with favorable controllability and high accuracy.

Abstract: A method for fabricating an optical quality, free-standing, compliant parabolic membrane mirror is described using an inverted parabolic mandrel created by rotating a liquid confined to a cylindrical container, forming a membrane substrate by pouring into the mandrel a fast curing liquid polymer and applying a reflective optical stress coating once the substrate has hardened.

Abstract: A focusing-device for the radiation from a light source, in particular a laser plasma source, has a collector mirror which collects the light from the light source at a second focus in virtual or real terms, in particular for micro-lithography using EUV radiation, and a routing unit and downstream beam formation in an illuminating system. The collector mirror can be displaced in the z-direction (optical axis) and is designed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.

Abstract: An object of the present invention is to provide a variable mirror that is readily formable and can be readily and precisely changed into various configurations as desired. A variable mirror 20 according to this invention is a variable mirror having a mirror body 26 formed of an elastic or flexible material and having one surface 26b functioning as a reflecting surface. The mirror body 26 is capable of changing the reflecting surface configuration. The variable mirror is characterized in that the rigidity of the mirror body 26 varies in a direction parallel to the one surface.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: One embodiment of the present invention provides a spatial light phase modulator, which can perform piecewise linear phase modulation of a light beam. This spatial light phase modulator includes an array of movable micromirrors and an array of actuators. Each actuator of the array of actuators is movably coupled to one micromirror of the array of movable micromirrors and can move the micromirror both vertically and rotationally. Additionally, the present invention provides an optical function generator that is a femtosecond pulse shaper. This optical function generator includes a diffraction grating that disperses an input pulse into a dispersed spectrum, a lens assembly to focus the dispersed spectrum onto a micromirror array, and the micromirror array to provide spatial filtering to the dispersed spectrum to provide the filtered spectrum.

Abstract: The focal distance (f) of a laser (1) beam (2) is adjusted by projecting the beam (2) onto the center of a mirror (3) of variable curvature and controlled by a depression circuit or by electrostatic forces. Thus the focus (4) can be displaced in a direction which is inaccessible to the usual means such as turning but rigid mirrors.

Abstract: An adaptive optics system whereby at least one mirror in the system is manipulated using electrostatic force to attract and/or a restoring force to repel a portion of the mirror to a particular electrode. The attraction force is created by placing a voltage across an electrode in an array of electrodes positioned near that mirror. The restoring force is created by attaching or mechanically coupling a fluid-filled cavity to a mirror. It is thus possible to attract portions of the mirror in one instant by passing a voltage over individual electrodes associated with those portions of mirror and then, by reducing the voltage placed across those electrodes, to repel those same portions in the next instant. The spatial frequency of the deformation of a membrane mirror is thus increased, which allows the correction of more complex wave front distortion.

Abstract: Methods and apparatus are disclosed for peripherally supporting X-ray-reflective mirrors such as used in X-ray microlithography systems and other X-ray optical systems. The methods provide effective physical support while reducing certain deformations in the reflective surface of the mirror. An embodiment of the method or mirror-support apparatus utilizes multiple “pushing” and “pushing” devices that apply a compressive stress and tensile stress, respectively, to respective locations on the peripheral-side surface of the mirror. One or more pushing devices and one or more pulling devices can be used as required. For example, at time of mirror fabrication, respective pushing devices can be placed adjacent concave-deviation regions and respective pulling devices can be placed adjacent convex-deviation regions on the reflective surface of the mirror.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: A deformable curvature mirror capable of controlled deformation by applying unipolar electrical voltages to electrode segments on the back of the mirror. Two plates of an electro-restrictive material, such as PZT or PMN, are jointed together. One plate has a pattern of a plurality of electrode segments on the outer surface with each electrode segment having a separate electrical terminal for applying a variable unipolar electrical voltage thereto for causing variable expansion of the plate and thereby selectively deforming that plate and, in turn, the deformable curvature mirror.

Abstract: The camera apparatus includes a camera main body and a convex mirror. A picture reflected by the convex mirror is taken by the camera main body. Even if the angle of view of a camera lens is set small and the camera main body is made compact, a picture having a wide angle of view can be taken through the convex mirror.

Abstract: The present invention provides an optical pickup deformable mirror used for correcting a spherical aberration caused by a difference in thickness of a cover glass of a recording medium, wherein the optical pickup deformable mirror is deformed into a rotation-symmetrical surface obtained by rotating a curve represented by the following expression f(r):

Abstract: A video projection device includes a cabinet having front and rear sections and a projection tube for projecting a video image. The video projection device also includes a screen located in the front section of the cabinet. The screen has a first surface onto which the video image is projected and a second surface for displaying the video image so that it is observable by a viewer. A mirror is arranged in the cabinet for reflecting light to the first surface of the screen. The mirror is a composite laminate mirror that includes a rigid substrate and a reflective sheet laminated to the rigid substrate. The rigid substrate may be a glass substrate and the reflective sheet may be a flexible plastic sheet. The reflective sheet may have a multilayer construction that includes a metallic film. The reflective sheet may alternatively include a second substrate and at least one thin film layer deposited on the substrate.

Abstract: An infra-red imaging system has two variable focal length optical components (6, 7) whose positions are fixed relative to one another. The system also comprises an image detector (8). Control means (13) is provided such that the focal length of one of the variable focal length optical components (7) can be varied in relation to the focal length of the other variable focal length optical component (6). The system can be used to produce an image of variable magnification while maintaining an in-focus image at the detector (8). The control means (13) may comprise a mechanical linkage, an electronic circuit, or a computer program. In an alternative embodiment the optical system is a beam expander. Controlling a focusing mirror can achieve a dither effect. Controlling a focusing mirror can also de-focus the image, giving a mean scene temperature evaluation.

Abstract: A flexible thin film is supported by a frame member through two end portions opposing each other. A reflection surface is provided on the flexible thin film to reflect light. A first electrode is provided integrally with the flexible thin film. A second electrode is substantially fixed to the frame member so as to oppose the first electrode on an opposite side of the reflection surface. A third electrode is substantially fixed to the frame member so as to oppose the first electrode on the same side as the reflection surface. An optical opening for introducing light into the reflection surface is provided on the side of the reflection surface. At least one of the second and third electrodes is divided in the direction connecting the two end portions. The configuration of the reflection surface is controlled to a desired configuration by applying a desired voltage selectively to between the first electrode and the divided second or third electrode.

Abstract: A method for fabricating an optical quality, free-standing, compliant parabolic membrane mirror using an inverted parabolic mandrel created by rotating a liquid confined to a cylindrical polymer and applying a reflective optical stress coating once the substrate has hardened. The stress coating applies a tensile force to the substrate that offsets the stress in the substrate that would otherwise decrease the convexity, and also generates a force to restore the membrane mirror to its original convex parabolic shape when the mirror is deformed by an external force.

Abstract: A mirror arrangement (1) for reflecting electromagnetic radiation (13) is proposed which comprises a mirror body (5) with a mirror side (11) disposed towards the radiation to be reflected and at least one extension sensor (37) provided at the mirror body (5) for detecting a deformation state of the mirror body (5). The mirror arrangement is distinguished in that the mirror body (5) comprises a semiconductor layer (5, 61) at which the at least one extension sensor (37) is provided.

Abstract: A lightweight parabolic mirror includes an open container with a piece of mirror film sealing the open container such that a sealed chamber is defined. A pressure control system coupled to the sealed chamber maintains a predetermined pressure differential between a pressure inside the sealed chamber and a pressure outside of the sealed chamber. The pressure differential causes the mirror film to deflect parabolically in one of a concave or convex fashion thereby defining the mirror's shape.

Abstract: The focal distance (f) of a laser (1) beam (2) is adjusted by projecting the beam (2) onto the centre of a mirror (3) of variable curvature and controlled by a depression circuit or by electrostatic forces. Thus the focus (4) can be displaced in a direction which is inaccessible to the usual means such as turning but rigid mirrors.

Abstract: A mirror assembly including an active lens and a reflective surface. The mirror assembly may change its refractive index when a voltage is applied to the active lens, thereby changing the field of view in the lens. Exemplary applications include a blind spot system in a motor vehicle, in which, upon sensing another vehicle in a driver's blind spot, the mirror assembly changes the driver's field of view to include the blind spot. Additional applications include a magnifying mirror for shaving or applying cosmetics.

Abstract: A matrix solar dish concentrator with flexed glass mirrors is patterned from orthogonal planes parallel to the axis of symmetry of a paraboloid and intersecting the paraboloid, this pattern making all parabolic trusses uniform. Parabolic trusses are made by flexing linear truss members with lateral forces creating accurate parabolic member curves, restraining the flexed members with rigid webbing to form an orthogonal paraboloid frame. Parabolic glass mirrors are made by flexing slender flat glass mirrors with lateral forces creating accurate parabolic mirror curves, restraining the flexed mirrors with tension buttons connected to the orthogonal paraboloid frame to form a solar dish. Glass mirror structural substrates are not used. The solar dish tracks the solar azimuth with a bicycle wheel and tracks the solar zenith with a television satellite dish actuator. A solar receiver is supported with a low shade structure outside a cone of concentrated sunlight.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.