Abstract: A movable mirror device comprises a deformable mirror; and a drive section for deforming the mirror into a concave shape and into a convex shape.

Abstract: The invention provides an optical apparatus enabling diopter adjustment, etc. to be achieved using, for instance, a reflection type variable-optical property optical element or a variable-optical property mirror but without recourse to any mechanical moving part. The variable-optical property mirror 9 comprises an aluminum-coated thin film 9a and a plurality of electrodes 9b. Via variable resistors 11 and a power source switch 13 a power source 12 is connected between the thin film 9a and the electrodes 9b, so that the resistance values of the variable resistors 11 can be controlled by an operating unit 14. The shape of the thin film 9a as a reflecting surface is controlled by changing the resistance value of each variable resistor 11 in response to a signal from the operating unit 14 in such a manner that the imaging capability of the variable mirror is optimized.

Abstract: An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element, and forcing member that applies a force to the at least one optical element in a non-contact manner.

Abstract: A micromirror array lens consists of many micromirrors with two degrees of freedom rotation and actuating components. As a reflective variable focal length lens, the array of micromirrors makes all lights scattered from one point of an object converge at one point of image plane. As operational methods for the lens, the actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. Independent control of each micromirror is possible by known semiconductor microelectronics technologies. The micromirror array can form a lens with arbitrary shape and/or size, as desired.

Abstract: A retainer for holding an optical element includes a detector for detecting a deformation amount of the optical element, and an adjustment unit for adjusting the deformation of the optical element based on the deformation amount.

Abstract: A variable mirror that is readily formable and can be readily and precisely changed into various configurations as desired. The variable mirror includes a mirror body formed of an elastic or flexible material and having one surface functioning as a reflecting surface. The mirror body is capable of changing the reflecting surface configuration. The rigidity of the mirror body varies in a direction parallel to the one surface.

Abstract: A deformable mirror for an adaptive optics system includes a number of electrodes for causing deformation of the mirror. An insulating layer and a layer of conductive traces over the electrodes allow the connection points for the electrodes to be moved to a perimeter region of the mirror, which facilitates connecting the mirror to a circuit board or other equipment. In one implementation, the deformable mirror is coupled to a circuit board by a strip connector (e.g., a zebra strip connector), which is maintained in a compressed state by a retaining plate.

Abstract: A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.

Abstract: A multiplexer (MUX) driver system controls a deformable mirror, in part, by enabling and disabling individual or multiple actuators, mechanically coupled to the deformable mirror, through use of switches (e.g., solid-state switches) electrically coupled between the actuators and a reference node. In operation, the driver system enables actuator(s) by closing respective switch(es) and driving the enabled actuator(s) to deform respective portions of the deformable mirror in a controlled manner. The driver system disables the actuator(s) by opening the respective switch(es) to decouple the actuator(s) from the reference node. The switches, in the open state, prevent respective actuators from discharging, thereby allowing a desired surface figure of the deformable mirror to be maintained for long periods of time without having to refresh the actuators.

Abstract: An apparatus and method of maintaining a time-constant heat load on a lithography mirror. The mirror includes a resistive layer formed on a substrate, contacts for coupling a power supply to the resistive layer, an insulating sublayer formed on the resistive layer, a polished layer formed on the insulating layer, and a reflective layer formed on the polished layer. The time-constant heat load on the lithography mirror is maintained by placing an additional electrical heat load on the mirror according to the actinic heat load transmitted by the mask. Maintaining the time-constant heat load can reduce or eliminate variation in image distortion that occurs as a result of changes in actinic heat load on the lithography mirror. Independent temperature control can be used to mitigate “cold-edge effect.

Abstract: A variable-shape mirror comprises a flexible film having a plurality of electrodes and a reflective surface whose shape varies when electrostatic forces are applied to the electrodes. The electrodes are divided in a circumferential direction and in a radial direction of the flexible film. The flexible film having a greater number of circumferential-directional divisions in a peripheral portion thereof then in a central portion thereof.

Abstract: Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.

Abstract: A variable focal length lens comprising micromirrors with one degree of freedom rotation is invented. The lens consists of many micromirrors and actuating components. The array of micromirrors with one degree of freedom rotation makes all lights scattered from one point of an object converge at one point of image plane by using rotation of micromirror. The micromirror has the same function as a mirror. Therefore, the reflective surface of the micromirror is made of metal, metal compound, multi-layered dielectric material, or other materials with high reflectivity. The actuating components control the rotational displacements of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known CMOS technologies can remove the loss in effective reflective area due to electrode pads and wires.

Abstract: A folding full length mirror and carry apparatus includes a foldable reflective surface support assembly which includes support panels connected together with panel-interconnection hinges. A non-folded reflective surface assembly is supported by the foldable reflective surface support assembly. Preferably, a handle is connected to the foldable reflective surface support assembly. A shoulder strap can be connected to the foldable reflective surface support assembly. Preferably, a folded condition locking assembly is connected to the foldable reflective surface support assembly for retaining the apparatus in a folded up, carrying condition. With one embodiment of the invention, the non-folded reflective surface assembly includes panel-mounted non-folded reflective surfaces mounted one side of each of the respective support panels.

Abstract: A mirror, in particular an adaptive mirror configured as a laser beam guidance component. The mirror comprises a housing, to which a mirror element that is optionally deformable is allocated. The aim of the invention is to construct the mirror element with an oval, in particular elliptical shape.

Abstract: A lightweight active mirror. A first layer has a front side and a backside. A second layer has a front side and a backside. The backside of the second layer faces the front side of the first layer. A reflective surface is on the front side of the second layer. The reflective surface is operable to reflect desired wavelengths of electromagnetic radiation. A plurality of electroactive actuator strips arranged between the first layer and the second layer are operable to alter a curvature of the mirror. Electrical connectors are operable to cause the electroactive strips to alter the curvature of the mirror. A plurality of stiffening elements interconnected with at least one of the first layer and the second layer are operable to stiffen the mirror. A plurality of shape retaining elements attached to at least one of the first layer and the second layer are operable to deploy the mirror and to bias the mirror in a desired position.

Abstract: A deformable mirror according to the invention comprises a substrate, a reflector which is supported by said substrate and the shape of whose reflecting areas is variable, and a plurality of drive units for independently driving a plurality of regions of the reflector and thereby controlling the distances between said plurality of regions and said substrate. Each of the plurality of drive units comprises a plurality of electrodes disposed over said substrate, a tilt member which is rotated round the axis of tilt by being attracted by the selected one of the plurality of electrodes, and an action member for varying the distance between a specific region of the reflector and said substrate following the motion of the tilt member.

Abstract: The invention relates to a new type of reflective optical element made of a reflective metallic layer comprising reflecting nanoparticles deposited on a liquid surface. Metallic or non-metallic nanometer-sized particles are coated with a ligand. The coated particles are concentrated and deposited on the surface of a liquid where they self-assemble to give optical-quality high-reflectivity optical surfaces. Coating liquid surfaces with reflective layers allows one to make inexpensive and versatile high-quality mirrors. The surfaces of liquids can be shaped by a variety of techniques.

Abstract: A mirror arrangement for reflecting electromagnetic radiation has a mirror body with a mirror side disposed towards the radiation to be reflected and at least one extension sensor located at the mirror body for detecting a deformation state of the mirror body. The mirror body includes semiconductor layer where the at least one extension sensor is located.

Abstract: This invention relates to a new type of reflective optical element made of a fluid that responds to a force if subjected to a magnetic field. As a consequence, one can impose any shape one wants to the reflecting surface by generating an appropriate magnetic field geometry with permanent magnets, electromagnets or a combination of permanent magnets and electromagnets, or the like. A preferred embodiment uses a ferromagnetic fluid made of water containing ferromagnetic nanoparticles. Liquid ferromagnetic surfaces thus obtained were successfully shaped using magnetic fields. In another preferred embodiment, to modify the reflectivity of the optical element, a reflective layer, such as a nano-engineered silver reflecting surface, is deposited on the surface of the magnetically sensitive fluid. The surface of the reflecting layer can therefore be warped by applying a magnetic field to the fluid.

Abstract: Apparatus (2) for constructing a thin film mirror, which apparatus (2) comprises a suction chamber (4), first attachment means (6) positioned at a first side (8) of the suction chamber (4) and for attaching the thin film (10) to the first side (8) of the suction chamber (4), and second attachment means (12) positioned at a second and opposite side (14) of the suction chamber (4) and for attaching the thin film (10) to the second side (14) of the suction chamber (4), the first and second attachment means (6, 12) being such that they secure the thin film (10) against movement when tension is applied in a first direction extending between the first and second attachment means (6, 12), and the first and second attachment means (6, 12) being such that they allow the thin film (10) to move and stretch in a second direction which is at right angles to the first direction and which allows the thin film (10) to be distorted to a desired geometric shape for forming the thin film mirror.

Abstract: An optically controlled device includes a transparent electrode, a conductivity variable portion, a driving electrode, a movable unit, and a support portion. A method of controlling the optically controlled device includes inputting a control light into the transparent electrode, applying a voltage modulated according to an input signal between the transparent electrode and the movable unit, and moving the movable unit to a predetermined position by generating a force corresponding to the voltage between the driving electrode and the movable unit base on a charge of electrical conductivity of the conductivity variable portion.

Abstract: A system for shaping a single curvature parabolic membrane. The system includes a shaping rail and a bending rail. At least two rollers operably connect the shaping rail and the bending rail. The rollers are operable to alter a position of the shaping rail relative to the bending rail. A compression adjustment bar is operably connected to ends of the shaping rail to apply a load to the shaping rail. A bending adjustment bar is operably connected to ends of the bending rail to apply a moment to the shaping rail through the at least two rollers.

Abstract: An adaptive optic mirror has a cyanate faceplate supported by a backplate which permits a plurality of actuators to be connected directly to the faceplate. Each actuator is connected via a low impedance circuit to a master control which sets each actuator independently of the others to produce a contoured mirror surface.

Abstract: A method and tool to smooth surface contours uses a fixed back plate mounted at a known distance to an actuator holding plate. Each of the actuators is mounted in said actuation holding plate by a support collar threaded into said actuator holding plate. Threaded with said support collar is an actuator holder with rigidly holds an actuator. A differential threaded adjustment device is then inserted through said fixed back plate and connected to say support collar and actuator holder so that each can be moved independently of the other. The actuator is made of two piezoelectric plates connected in parallel and separated by a silicon rubber o-ring.

Abstract: A variable shape mirror comprises a frame member having an opening, and a thin film having a first region including a reflecting plane and a second region of higher rigidity than the first region disposed in the outer periphery of the first region, being supported in the opening of the frame member. Other variable shape mirror comprises a frame member having a first opening and a second opening, a first thin film having a reflecting plane, forming an electrode, and supported in the first opening of the frame member, a second thin film forming an electrode electrically conducting with the electrode of the first thin film, and supported in the second opening of the frame member, and a substrate bonded to the frame member at a specified interval, and having an electrode at a position opposite to the electrode of the second thin film.

Abstract: A deformable curvature mirror capable of controlled deformation by applying unipolar electrical voltages to electrode segments on the back of the mirror. Two plates of an electro-restrictive material, such as PZT or PMN, are jointed together. One plate has a pattern of a plurality of electrode segments on the outer surface with each electrode segment having a separate electrical terminal for applying a variable unipolar electrical voltage thereto for causing variable expansion of the plate and thereby selectively deforming that plate and, in turn, the deformable curvature mirror.

Abstract: A variable-profile optical device includes a light-transmission elastic member in which an elasticity of a first surface is set to be higher than that of a second surface disposed opposite to the first surface, wherein a pressure is applied to the second surface of the elastic member, so that the second surface of the elastic member is selectively deformed, and a focus distance may be varied.

Abstract: An optical apparatus includes a variable optical-property element to change its optical properties by applying an electric or magnetic field or temperature to a liquid crystal. In this way, the optical apparatus is reduced in thickness, and can be used in a cam era, a microscope, etc.

Abstract: A zoom optical system includes a deformable element having a focusing function and two lens groups movable in a magnification change and having a magnification varying function or a compensating function for compensating for a shift of an image surface. Alternatively, a zoom optical system includes, in order from the object side, a first group having a negative power and being fixed in a magnification change, a second group having a positive power and being movable in a magnification change, and a third group movable in a magnification change. The first group has a deformable element having a focusing function. An imaging apparatus is provided with either zoom optical system. Whereby, a high-performance zoom optical system with small fluctuation of aberrations in spite of use of a deformable element and a photographing apparatus using the same zoom optical system are provided.

Abstract: A radiation reflector may be used in space telecommunications, having spherical reflecting surfaces and/or rectangular reflecting surfaces which may be folded, as required. The radiation reflector has an arrangement of reflecting surfaces on foldable frames which may be in the form of interacting balls or rings mounted on pneumatic tubes or ropes.

Abstract: A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a map of current temperatures. The map of current temperatures may be corrected according to baseline values, and then is used to compensate for temperature differences.

Abstract: An miniature integrating sphere has a spherical volume with walls of a material for reflecting light, a light inlet and a light outlet. The light inlet is offset from a diameter axis of the spherical volume and the light inlet and light outlet are offset at non-perpendicular and non-parallel relation to each other. The light inlet is molded or milled to a shape conforming to the shape of the cone of light provided by a fiber optic device as an input to the integrating sphere. A number of miniature integrating spheres may be used respectively in plural channels of an optical measurement instrument.

Abstract: A multilayer micromirror structure that exhibits substantially no form change as a result of a given change in temperature is disclosed. A reflective layer is disposed on a substrate layer, and a counterbalancing structure is disposed on the structure in a way such that a neutral plane is located at a predetermined position relative to the substrate layer and the reflective layer. When forces are exerted at the neutral plane of such a structure, the structure attains a predetermined geometric form. A method of manufacture is disclosed wherein a substrate is etched to define a desired structure and a conformal layer of a masking material is deposited onto the etched substrate. Further etching exposes portions of the substrate and silicon is deposited to achieve another desired structure. Excess material is etched away to free the finished structure and a reflective layer is deposited onto the surface of the structure.

Abstract: In a system for specific deformation of optical elements in an imaging device, in particular in a projection exposure machine having a projection lens for micro-lithography, for the purpose of eliminating image errors or for active adjustment, piezoelectric elements are applied as actuators in the form of thin plates, films or layers to surfaces to be deformed, or integrated into them. In conjunction with an adaptronic servo loop having sensors, forces and/or moments are exerted on the optical elements for their specific deformation by means of a controlled activation of the piezoelectric elements as actuators.

Abstract: Methods and apparatus are disclosed for peripherally supporting X-ray-reflective mirrors such as used in X-ray microlithography systems and other X-ray optical systems. The methods provide effective physical support while reducing certain deformations in the reflective surface of the mirror. An embodiment of the method or mirror-support apparatus utilizes multiple “pushing” and “pushing” devices that apply a compressive stress and tensile stress, respectively, to respective locations on the peripheral-side surface of the mirror. One or more pushing devices and one or more pulling devices can be used as required. For example, at time of mirror fabrication, respective pushing devices can be placed adjacent concave-deviation regions and respective pulling devices can be placed adjacent convex-deviation regions on the reflective surface of the mirror.

Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.

Abstract: A combination of active and passive force actuators provide adjustments to the shape of an optical element to reduce or compensate for aberrations in an optical system. Passive actuators at a high spatial frequency are capable of correcting higher order steady state components of shape error while dynamic corrections of higher frequency, operationally dependent is provided allowing the number of active actuators and the power supplied to each active actuator to be reduced; reducing heating of the optical element by the active actuators and increasing stability of the system. Compound actuators including a combination of an active actuator portion with a passive actuator portion (which provides a mechanical force bias to the active actuator portion) allows increased spatial flexibility of application of forces to the optical element and other advantages.

Abstract: Disclosed herein is an optical apparatus including: a variable configuration mirror unit having a reflecting surface for reflecting incident light and capable of causing change in the configuration of the reflecting surface upon turning on electricity; and a lens for bringing the incident light into an internal part, a mirror holding section for holding the variable configuration mirror unit being formed on the lens.

Abstract: A method for correcting a surface shape includes the steps of scraping a multilayer film formed on the substrate's surface of an optical element, and correcting the surface shape of the optical element by detecting the amount of scraping.

Abstract: The invention relates to an optical system or apparatus such as a lens system capable of focus control and a variable-focus lens, which has reduced power consumptions, ensures noiseless operation and fast response and contributes to cost reductions for the reason of simplified structure. Specifically, the invention provides an optical apparatus comprising an element 409 having variable optical properties and an image plane 612. To correct the optical apparatus for movement of the image-formation surface of an optical system 614 in association with a change in the element 409 having variable optical properties, the image plane 612 is placed in the range of movement of the image-formation surface in association with the change in the element having variable optical properties.

Abstract: To provide a form variable mirror element and a form variable mirror unit which are extremely thin with a simple structure and large in an amount of deformation even under low applied voltage, a form variable mirror element comprising: a form variable part including a piezoelectric film, a first electrode film and a second electrode film for supplying voltage to the piezoelectric film and a reflection mirror film provided in the piezoelectric film; and a base for supporting the form variable part. The form variable part is provided with an elastic unit forgiving elasticity to the form variable part. Thus, the films are laminated on the thin base by a thin film forming technique. Accordingly, the extremely thin form variable mirror element can be formed with a simple structure, so that a large amount of deformation can be effectively obtained even when low voltage is applied.

Abstract: The electromagnetic wave focusing device has a mirror group consisting of a focal-line type primary reflective mirror and secondary reflective mirror which have a unique parabolic cross-sectional shape. Incident light rays are primarily reflected by the primary reflective mirror and are then secondarily reflected by the secondary reflective mirror, so that solar rays are focused at one point. The electromagnetic wave focusing device can be made extremely thin and light-weight, and can be folded without causing great loss of precision or great increase in mass. Consequently, the mirror bodies can be folded into a compact form and loaded inside the restricted space of a rocket or the like; thus, the device can be transported into aerospace, and a sunlight focusing device having high focusing performance can be reproduced on-site with a high precision.

Abstract: An imaging optical system includes, in order from the object side, a negative lens, a first deformable mirror, an aperture stop, a positive lens unit, and a second deformable mirror. When a horizontal half angle of view of a ray of light incident on the optical system is represented by &ohgr;, the first and second deformable mirrors satisfying a condition, 50°<2&ohgr;<175°, are used to perform focusing. Whereby, the imaging optical system which allows focusing to be performed, irrespective of its small diameter and size, can be provided.

Abstract: An optical unit (10) comprising a plurality of optical elements, a receiving structure (12) with a plurality of element supports (40, 41) for receiving the optical elements. The element supports (40, 41) are in the form of a plate or shell or tube, whose dimensions are greater than the dimensions of the optical elements to be received, and is connected to another element support. At least one element support (40, 41) comprises temperature elements (43-49) that can be heated and/or cooled. The optical unit (10) furthermore comprises a control unit for driving the temperature elements (43-49) in order to locally change the temperature of the at least one element support (40, 41) so as to influence in a controlled manner the shape of the at least one element support (40, 41).

Abstract: An optical apparatus includes a variable optical-property element to change its optical properties by applying an electric or magnetic field or temperature to a liquid crystal. In this way, the optical apparatus is reduced in thickness, and can be used in a cam era, a microscope, etc.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other and a plurality of actuators embedded in the support structure, spaced from and generally parallel to the mirror surface for applying bending moments to the mirror surface for controllably altering the shape of the mirror surface.

Abstract: A method and apparatus for fabricating a MEMS apparatus having a device layer with an optical surface that is supported by a pedestal on a planar support layer that is suspended for movement with respect to a base support by hinge elements disposed in a different plane from the planar support layer. The surface area of the optical surface is maximized with respect to the base support to optimized the fill factor of the optical surface and afford a high passband. The height of the pedestal is selected to position the device layer sufficiently above the base support to afford an unobstructed predetermined angular rotation about each axis. The hinges may be made of thin-film material, fabricated by way of surface micromachining techniques. The hinges are disposed underneath the device layer enabling the optical surface to be maximized so that the entire surface becomes usable (e.g., for optical beam manipulation). MEMS devices afford an array of MEMS mirrors with a high optical fill factor and high passband.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.