Abstract: This system collects light emitted by at least one light source (52) and focuses it onto at least one light detection device (54). Preferably, it comprises a first mirror (58) that collects light emitted by the source and focuses it on a second mirror (60) that focuses it in turn onto the device. The system is provided with a chamber that is opaque to all light, particularly ultraviolet radiation, and in which the light source, the light detection device and the mirrors are placed, and means of creating a vacuum in this chamber and filling it with a gas that is transparent to ultraviolet radiation.

Abstract: Optical relays having three or more reflector portions to allow efficient grazing angle reflections with a relatively high acceptance of light are described. Light collected by the relay can be delivered to a selected location for various applications, including semiconductor lithography. In some embodiments, the grazing angles are selected to utilize the high reflectivity of extreme ultraviolet light at low grazing angles. The three or more reflectors can be arranged with respect to a light source to provide such grazing angle reflections and high acceptance. Some collectors can have more than one shell to increase the acceptance. In some embodiments, some of the reflectors can be configured to shape the delivered light.

Abstract: A reflective-type projection optical system has 8 reflective mirrors that form a reduced image of a first surface on a second surface. A first reflective imaging optical system (G1) forms an intermediate image of the first surface, and a second reflective imaging optical system (G2) forms an image of the intermediate image on the second surface. The first reflective imaging optical system has, from the first surface side in order of light beam incidence, a first reflective mirror (M1), a second reflective mirror (M2), a third reflective mirror (M3), and a fourth reflective mirror (M4). The second reflective imaging optical system has, from the first surface side in order of light beam incidence, a fifth reflective mirror (M5), a sixth reflective mirror (M6), a seventh reflective mirror (M7), and an eighth reflective mirror (M8). At least one of the reflective surfaces of these 8 reflective mirrors is composed of a spherical surface.

Abstract: The invention relates to a multiple reflection optical system comprising a light beam input (E) and output (S) means, a first mirror (M1) having a curvature radius (R1) and arranged at a distance (d2) in front of a second mirror (M2) having a second curvature radius (R2) and arranged at a distance (d3) in front of a third mirror (M3) having a third curvature radius (R3), wherein the and second (M2) mirrors are arranged in such a way that formula (I) is satisfied and the first (M1) and third (M3) mirrors are arranged in such way that formula (II) is satisfied, the first (M1) second (M2) mirrors form a first optical cell having a first optical axis, the first (M1) and third (M3) mirrors form a second optical cell having a second optical axis, said first and second optical axes are different, the curvature radii (R1, R2, R3) and distances (d2, d3) are not simultaneously equal, said first and second optical cells are placed in such a way that the light beams are contained in the optical system between the input a

Abstract: An imaging system for imaging an off-axis object field arranged in an object surface of the imaging system onto an off-axis image field arranged in an image surface of the imaging system while creating at least one intermediate image has: an optical axis; an in-line mirror group having an object side mirror group entry, an image side mirror group exit and a mirror group plane aligned transversly to the optical axis and arranged geometrically between the mirror group entry and the mirror group exit, the mirror group including: a first mirror having a first mirror surface for receiving radiation coming from the object surface in a first reflecting area asymmetric to the optical axis; at least one second mirror having a second mirror surface facing the first mirror surface for receiving radiation coming from the first mirror in a second reflecting area asymmetric to the optical axis; at least one of the first and second mirrors being a concave mirror having a concave mirror surface defining a mirror axis on the

Abstract: A collector that includes a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light emitted from the source and traveling along the first optical path impinges upon. The collector also includes a second optical path from the source to another mirror. The other mirror is the first mirror that light emitted from the source and raveling along the second path impinges upon. The mirror and the other mirror are oriented relative to the source such that light from the source traveling along the first optical path travels in a direction opposite to light traveling from the source along the second optical path. A collector having a discharge extreme ultra violet (EUV) light source.

Abstract: A display optical system includes a light-source unit, a first optical unit which collects a light beam from the light-source unit, a scanning member which scans the light beam from the first optical unit, and a second optical unit which focuses the light beam scanned by the scanning member on about a scanning surface. An optical axis, defined by an optical path along which a light ray travels from the center of the scanning member to the center of the scanning surface via the second optical unit, intersects itself. In addition, the second optical unit includes two reflective mirrors having positive optical powers.

Abstract: An eye mirror in which a first defining ray 5 is reflected from a further defined mirror 2 and intersects a fixed defined unit 75 at a respective further point 8 within a circular cone 91 defined by the angular input aperture at that point. A second defining ray 6 is reflected from said further defined mirror 2 and intersects the fixed defined unit 75 at a respective further point 10 within a circular cone 92 defined by the angular input aperture at that point. There are two such defining rays for every point on the further defined mirror. The further defined mirror 2 lies outside the aperture described by the leading edge 147 of the first stage defining mirror 30 and is axially symmetric about the axis of symmetry 18.

Abstract: An infrared telescope utilizes two mirrors in an off-axis, eccentric-pupil, re-imaging configuration. To improve the image quality of traditional two mirror telescopes, the reflective surfaces of both the primary and secondary mirrors are ellipsoidal. The ellipsoidal surface of the primary mirror has a greater eccentricity than the ellipsoidal surface of the secondary mirror. The infrared light entering through the eccentric pupil strikes the ellipsoidal reflective surface of the primary mirror. The light is reflected from the primary mirror to the ellipsoidal reflective surface of the secondary mirror. An intermediate image of the object being viewed is formed between the primary and secondary mirrors. The light is reflected from the secondary mirror to an image plane. An aperture stop is located between the secondary mirror and the image plane. The image plane is typically located within a cold shield, to reduce the likelihood that stray light will reach the image plane.

Abstract: A solar concentrator may include a substantially planar surface, a curved primary mirror having a first perimeter, at least a portion of the first perimeter being in contact with the substantially planar surface, a secondary mirror disposed between the substantially planar surface and the curved primary mirror, the secondary mirror associated with a desired focal area, and a shield element disposed between the substantially planar surface and the curved primary mirror. The shield element is to prevent a portion of light reflected by the secondary mirror from reaching the primary mirror. In some aspects, a portion of the shield element may be disposed between the substantially planar surface and a plane which is substantially parallel to the substantially planar surface and which includes a portion of the desired focal area. The shield element may include a reflective surface to reflect light received from the secondary mirror toward the desired focal area.

Abstract: A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective includes eight mirrors. The light path is provided via the eight mirrors, and is free of obscuration.

Abstract: An illumination system is for providing a parallel illumination light beam. The illumination system includes two lamps, and each lamp includes a first lampshade, a burner and a reflector. The lampshade has a light outputting section. A first reflector is connected with the first lampshade, and a portion of the light outputting section is covered by the first reflector. A diverging light is provided by the burner. The diverging light is transformed into a parallel light beam by the lampshade and the first reflector, and the parallel light beam is outputted from a portion of the light outputting section without covering. The illumination system further includes at least one second reflector disposed between the lamps, on the optical path of at least one portion of the parallel light beam. The parallel light beams from the lamps are thereby combined into a parallel illumination beam by the second reflector.

Abstract: A projection optical system unit has a lower pedestal. The lower pedestal has first and second tubular portions opened to each other. An image formation device holding plate for a DMD is mounted on the first tubular portion at a side where one opening is formed. A mirror holder for a convex mirror is fixed on the second tubular portion at a side where the other opening is formed. A linear heat expansion coefficient in a specific direction of the lower pedestal component is set between 0.8×10?5 (1/K) and 3.0×10?5 (1/K).

Abstract: A beam focusing and scanning system using a micromirror array lens (optical system) includes a light source configured to emit light and a micromirror array lens, including at least one micromirror, optically coupled to the light source, configured to reflect the light onto a projection medium (projection plane). The optical system also includes at least one actuating component coupled to the at least one micromirror, configured to move the at least one micromirror to enable the at least one micromirror to focus the light on the projection medium. The advantages of the present invention include high speed variable focusing and scanning, large focal length variation, phase compensation, high reliability and optical efficiency, low power consumption and low cost.

Abstract: The present invention relates to a high numerical aperture exposure system having a wafer. The exposure system in the present invention includes a beam-splitter, a reticle, a reticle optical group, where the reticle optical group is placed between the reticle and the beam-splitter, a concave mirror, a concave mirror optical group, where the concave mirror optical group is placed between the concave mirror and the beam-splitter, a fold mirror, where the fold mirror is placed between the beam-splitter and the wafer, and a wafer optical group, where the wafer optical group is placed between the beam-splitter and the wafer. In the present invention, a beam of light is directed through the reticle and the reticle optical group to the beam-splitter, then it is reflected by the beam-splitter onto the concave mirror. Concave mirror reflects the light onto the fold mirror through the beam-splitter. Fold mirror reflects the light onto the wafer through the wafer optical group.

Abstract: In a laser processing machine for processing workpieces using a laser beam (2), a telescope (1) for widening the laser beam (2) comprises an ellipsoidal mirror (3) and a paraboloidal mirror (4) whose axes of rotation (6) extend parallel, in particular collinear, to each other. This orientation permits precise production of the reflecting surfaces of the two mirrors through one single clamping (e.g. through diamond lathe) such that later adjustment is not required.

Abstract: A catoptric reduction projection optical system that uses light of light with a wavelength of 200 nm or less includes six light-reflecting mirrors arranged from an object side to an image side such that said mirrors basically form a coaxial system, wherein a third mirror in said six mirrors is located at a pupil position of said optical system.

Abstract: A reflecting surface design system (50) has (1) first rendering means (54) for displaying a free-form surface (20) on which a plurality of segments (24), each of which is defined by a plurality of vertices (251 to 254), are formed, (2) reflection information specifying means (56) for specifying the vertex position and light reflecting direction for each of the plurality of vertices (251 to 254) that define one of the plurality of segments (24), and (3) surface calculation means (58) for calculating a surface (S) to be assigned to the one segment (24) on the basis of the vertex positions and light reflecting directions specified for the plurality of vertices (251 to 254) that define one segment (24), and the light source position, which is specified in advance.

Abstract: According to one aspect of the present invention, an apparatus for optically combining light beams is disclosed. The apparatus includes a set of prism shaped doorways configured to receive output beams from at least one optical device. Each of the plurality of doorways has a common refractive index. The apparatus also includes a set of spherical mirrors disposed substantially parallel to the plurality of doorways. Each mirror is associated with one of the plurality of doorways. The apparatus further includes a boundary layer disposed between the set of doorways and the set of mirrors. The boundary layer has a refractive index greater than the common refractive index of the plurality of doorways. The common refractive index of the set of doorways and the refractive index of the boundary layer are configured to change the angle of each of the received output beams to combine the set of received output beams into a single output beam.

Abstract: In accordance with the present invention, a projection exposure apparatus includes an illuminating system to illuminate a drivable micromirror array and an objective which projects the drivable micromirror array onto the photosensitive substrate. The objective includes mirrors which are arranged coaxial with respect to a common optical axis. The objective can be a catoptric objective and can have a numerical aperture at the substrate greater than 0.1 and can have an imaging scale ratio of greater than 20:1. The objective can also include at least two partial objectives with an intermediate image plane between the at least two partial objectives and can consist of mirrors that are coated with reflecting layers which are adapted to reflect two mutually separated operating wavelengths.

Abstract: There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective surfaces, through which light incident upon said catoptric projection optical system passes, is the same gap between a pair of reflective surfaces, through which light exited from the catoptric projection optical system passes.

Abstract: The present invention provides a reflector having a light-diffusing property which suppresses inter-object reflection over a wide angle, and giving particularly high reflectance in an intended range of viewing angle; and to provide a reflection type liquid crystal display device using the same. The reflector includes a plurality of light-reflective concave portions. Each of the concave portions is formed so that an inclination angle (an angle between a plane tangential to a point on a concave surface and the surface of the base material) is maximum on a side portion of the curved surface, and so that the direction of the side portion having the maximum inclination angle is on a far side from a view point of an observer.

Abstract: In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.

Abstract: A projection optical system is disclosed with which undistorted images can be obtained at any image position within a specification range, and whose projection angle can be changed. The projection optical system includes a plurality of optical elements and a first optical system constituted by at least one of the plurality of optical elements having the ability to form an image with light onto a predetermined surface different from the projection surface. A projection image of the original image can be moved by rotating a first optical element of the plurality of optical elements substantially around a center of an exit pupil position of the first optical system as the rotation center.

Abstract: An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective collimating-and-imaging module that receives the objective module output as an objective-end input and produces a collimating-end output, wherein the collimating-and-imaging module comprises a reflective triplet. A dispersive element receives the collimating-end output and produces a dispersive-end input into the collimating-and-imaging module that is reflected through the collimating-and-imaging module to produce a spectral-image-end output. An imaging detector receives the spectral-image-end output of the collimating-and-imaging module. The objective module may be a three-mirror anastigmat having an integral corrector mirror therein, or an all-reflective, relayed optical system comprising a set of five powered mirrors whose powers sum to substantially zero.

Abstract: A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of ?0.14 or smaller.

Abstract: An illumination system is provided with at least a first arc lamp positioned on the first axis of a first reflecting device. An aspherical corrector plate is positioned to receive the light rays produced by the arc lamp. The aspherical corrector plate is shaped so that it provides a substantially constant magnification of the arc as a function of the range of reflection angles of light rays off of the reflecting device.

Abstract: A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a source to illuminate in a second hemisphere of the source; and a second surface shaped to reflect radiation in the second hemisphere of the source to an output plane.

Abstract: The present invention discloses an image-forming optical system provided with a plurality of curved mirrors whereby two points at different distances are made to have an optically conjugate relationship, sequentially starting with a first conjugate point which is nearer when an optical path is traced from the first conjugate point to a second conjugate point which is farther, comprises, a first mirror which reflects luminous flux from the first conjugate point to transform the luminous flux into substantially parallel luminous flux, and a second mirror which reflects the luminous flux reflected by the first mirror while keeping the luminous flux substantially parallel.

Abstract: A projection optical system having a plurality of reflecting surfaces is disclosed in which a sufficiently large angle is provided between an incident side reference axis and an emerging side reference axis while tilt angles of the respective reflecting surfaces can remain small. The projection optical system projects luminous flux from an image forming element which forms an original image onto a projection surface. The incident side reference axis and the emerging side reference axis of the projection optical system are oblique to each other. The projection optical system has a plurality of reflecting surfaces each having a curvature. The reflecting surfaces are arranged such that the reference axis has at least one intersection in the projection optical system.

Abstract: A projection optical system which can project a bright image with less distortion and a small projection distance without causing aberration or an increase in size of reflective surfaces is disclosed. The projection optical system projects luminous flux from an original image onto a projection surface which is oblique to a central principal ray which is a principal ray of luminous flux traveling from the center of the original image to the center of a projected image. The projection optical system comprises a refractive optical system which includes a plurality of refractive optical elements through which the luminous flux from the original image passes through, and a reflective optical system which includes a plurality of reflective surfaces each having an optical power and guides the luminous flux emerging from the refractive optical system to the projection surface.

Abstract: According to one aspect of the present invention, an apparatus for optically combining light beams is disclosed. The apparatus includes a set of prism shaped doorways configured to receive output beams from at least one optical device. Each of the plurality of doorways has a common refractive index. The apparatus also includes a set of spherical mirrors disposed substantially parallel to the plurality of doorways. Each mirror is associated with one of the plurality of doorways. The apparatus further includes a boundary layer disposed between the set of doorways and the set of mirrors. The boundary layer has a refractive index greater than the common refractive index of the plurality of doorways. The common refractive index of the set of doorways and the refractive index of the boundary layer are configured to change the angle of each of the received output beams to combine the set of received output beams into a single output beam.

Abstract: A projector having a plurality of retro-reflectors. In one embodiment of the present invention, a projector includes a light source, an image forming device, a concave reflector, and a plurality of retro-reflectors. The concave reflector is positioned adjacent to the light source to reflect light emitted by the light source toward the image forming device. The plurality of retro-reflectors is configured to reflect light emitted from the light source toward the concave reflector and is positioned as sets at different respective distances from the light source.

Abstract: Reflection surfaces (2, 3) and a diaphragm (1) for limiting light fluxes disposed between an object and the reflection surface (2) that is located closest to the object are provided. At least one surface of the plural reflection surfaces (2, 3) has an anamorphic shape. The reflection surfaces (2, 3) are disposed eccentrically. There is provided a light shielding member (6) for blocking light fluxes passing through the diaphragm (1) and reaches the range to be imaged on an image surface (4) without being reflected by the reflection surfaces (2, 3). Since the shielding member (6) is disposed, unnecessary light fluxes do not reach the image surface directly. Since there is no refractive transmission plane, also unnecessary light reflected by the transmission plane does not reach the image surface.

Abstract: A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image between the object surface and image surface, includes six or more mirrors, wherein a position of an exit pupil with respect to the intermediate image is located between the object surface and image surface, and wherein the largest angle between principal rays and an optical axis for angles of view at the position of the exit pupil is sin?1NA or smaller, where NA is a numerical aperture at the side of the image surface.

Abstract: A high concentration central receiver system and method provides improved reflectors and a unique heat removal system. The central receiver has a plurality of interconnected reflectors coupled to a tower structure at a predetermined height above ground for reflecting solar radiation. A plurality of concentrators are disposed between the reflectors and the ground such that the concentrators receive reflective solar radiation from the reflectors. The central receiver system further includes a heat removal system for removing heat from the reflectors and an area immediately adjacent the concentrators. Each reflector includes a mirror, a facet, and an adhesive compound. The adhesive compound is disposed between the mirror and the facet such that the mirror is fixed to the facet under a compressive stress.

Abstract: Two reflection surfaces that are a first reflection surface (2) and a second reflection surface (3), each in a non-axisymmetric form, are disposed in the stated order in a direction in which light fluxes travel, and bring light fluxes from an object into focus on an image surface (4). The first reflection surface (2) and the second reflection surface (3) are provided eccentrically, and each of the first reflection surface (2) and the second refection surface (3) is concave in a cross-sectional shape taken along a plane containing a center of the image surface (4) and vertices of the reflection surfaces (2, 3). This ensures that light fluxes are guided to the image surface without being blocked, whereby an excellent image can be formed. Thus, a reflective optical device with a wider angle and improved performance can be provided.

Abstract: A method for manufacturing an apparatus and the apparatus being configured to convert a first distribution of an input radiation to a second distribution of output radiation. The method consists of the steps of generating a two-dimensional representation of at least three active optical surfaces of an optical device including calculating a segment of a first surface based on edge ray sets as a first generalized Cartesian oval, calculating a segment of an entry surface based on the edge ray set as a second generalized Cartesian oval, calculating a segment of a second surface based on the edge ray set as a third generalized Cartesian oval, and successively repeating the steps of calculating the segment of the first surface and calculating the segment of the second surface in a direction towards a source, and rotationally sweeping the two-dimensional representation about a central axis providing a three-dimensional representation of the optical device.

Abstract: Two reflection surfaces that are a first reflection surface (2) and a second reflection surface (3), each in a non-axisymmetric form, are disposed in the stated order in a direction in which light fluxes travel, and bring light fluxes from an object into focus on an image surface (4). The first reflection surface (2) and the second reflection surface (3) are provided eccentrically, and each of the first reflection surface (2) and the second refection surface (3) is concave in a cross-sectional shape taken along a plane containing a center of the image surface (4) and vertices of the reflection surfaces (2, 3). This ensures that light fluxes are guided to the image surface without being blocked, whereby an excellent image can be formed. Thus, a reflective optical device with a wider angle and improved performance can be provided.

Abstract: A conformed all-reflective beam-steering (CARBS) device is provided which is a hybrid of a mirror and one-axis gimbal assembly mounted on a rotating carriage. The CARBS device functions as a coarse-steering element in an electro-optical tracking system. The one-axis gimbal only has to steer over 0-45° elevation (El), rather than the more typical +/?45° El. To provide a full field of regard (FOR), the present invention relies on a rotating carriage to rotate 360°. The present invention facilitates the full FOR by positioning a mirror and one-axis gimbal assembly close to the exit pupil window. Further, the present invention takes advantage of decentration and off-axis parabolic reflectors to maintain a small footprint. This compact design allows for lower system inertia, which reduces power draw, and further provides a system which may be package to meet upcoming military modular packaging requirements.

Abstract: An image reading imaging optical system for imaging image information on a line sensor and reading the image information has an imaging optical element including a plurality of off-axial reflecting surfaces differing in the direction of incidence and the direction of emergence of a reference axis ray from one another and having curvatures.

Abstract: An optical element formed from a transparent optical material includes two refraction surfaces, a first reflection surface group having a plurality of internal reflection surfaces arrayed in a predetermined direction, a second reflection surface group opposing the first reflection surface group and having at least one internal reflection surface and two side surfaces opposing each other in parallel to the predetermined direction. Light incident from one of the refraction surfaces is alternately reflected by the internal reflection surfaces of the first reflection surface group and the internal reflection surface of the second reflection surface group and guided to the other refraction surface.

Abstract: An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective collimating-and-imaging module that receives the objective module output as an objective-end input and produces a collimating-end output, wherein the collimating-and-imaging module comprises a reflective triplet. A dispersive element receives the collimating-end output and produces a dispersive-end input into the collimating-and-imaging module that is reflected through the collimating-and-imaging module to produce a spectral-image-end output. An imaging detector receives the spectral-image-end output of the collimating-and-imaging module. The objective module may be a three-mirror anastigmat having an integral corrector mirror therein, or an all-reflective, relayed optical system comprising a set of five powered mirrors whose powers sum to substantially zero.

Abstract: Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section has an internal shape defined by a first curve and a second curve, the first curve extending from one point on the peripheral edge of the concave portion to the deepest point of the concave portion, and the second curve extending continuously from the first curve and from the deepest point of the concave portion to another point on the peripheral edge of the concave portion. The average of the absolute value of an inclination angle of the first curve is larger than that of the second curve relative to the substrate surface. The second vertical section has an internal shape defined by a shallow curve and deep curves formed at both sides of the shallow curve.

Abstract: The invention comprises an afocal lens and mirror assembly comprising an objective lens which gathers light from an object and a field lens which transmits light to a driver's eye to provide an image having sufficient brightness, clarity, and accuracy. The light passing between the objective lens and the field lens is conditioned through an assembly of lenses and reflective elements to produce the image.

Abstract: There is provided an illumination system for microlithography with wavelengths?193 nm that includes a primary light source, a first optical component, a second optical component, an image plane, and an exit pupil. The first optical component transforms the primary light source into a plurality of secondary light sources that are imaged by the second optical component in the exit pupil. The first optical element and the second optical element are reflective. The first optical component includes a first optical element having a plurality of first raster elements that are imaged into the image plane, producing a plurality of images being superimposed, at least partially, on a field in the image plane. The first optical component includes a collector unit and a second optical element having a plurality of second raster elements.

Abstract: Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.

Abstract: The invention relates to optical elements whose optical properties can be repeatedly adjusted over time. Through the use of modifying compositions capable of stimulus induced polymerization coupled with a blend of stimulus absorbers and initiators, it is possible to repeatedly adjust the optical properties of the element by exposing the lens to a stimulus which exceeds the absorption capacity of the stimulus absorber.

Abstract: There is provided a multi-mirror system for an illumination system with wavelengths ?193 nm. The multi-mirror system includes (a) an imaging system having a first mirror and a second mirror, (b) an object plane, (c) an image plane in which the imaging system forms an image of an object, and (d) an arc-shaped field in the image plane, where a radial direction in a middle of the arc-shaped field defines a scanning direction. The first and second mirrors are arranged such that an edge sharpness of the arc-shaped field is smaller than 5 mm in the scanning direction. Rays traveling from the object plane to the image plane impinge a used area of the first and second mirrors with incidence angles relative to a surface normal of the mirrors ?30° or ?60°.

Abstract: A multimedia projector (100) includes a single-path frame-sequential color optical system in which light rays emitted by a light source (14) propagate through a color wheel (102) and an optical integrator (16, 120, 122), and are directed toward a transflective polarizing beam splitter (40) that separates them into P-polarized components (76) and S-polarized components (78). The P-polarized components are transmitted toward a reflective LCD (26) in which pixels in a dark state reflect the light rays without a polarization change and return them through the transflective polarizing beam splitter, whereas pixels in a bright state reflect the light rays with a 90° polarization change as S-polarized light rays (112), which are reflected by the transflective polarizing beam splitter toward a projection lens (27).