Abstract: A method includes depositing a passivation layer on a substrate; depositing and patterning a first polysilicon layer on the passivation layer; depositing and patterning a first oxide layer on the first polysilicon layer forming a patterned first oxide layer; depositing and patterning a second polysilicon layer on the patterned first oxide layer. A portion of the second polysilicon layer directly contacts a portion of the first polysilicon layer. A portion of the patterned second polysilicon layer corresponds to a bottom electrode. A second oxide layer is deposited on the patterned second polysilicon layer and on an exposed portion of the patterned first oxide layer. A portion of the second oxide layer corresponding to a sensing cavity is etched, exposing the bottom electrode. Another substrate is bonded to the second oxide layer enclosing the sensing cavity. A top electrode is disposed within the another substrate and positioned over the bottom electrode.

Abstract: A pressure sensor comprises a polysilicon sensing membrane. The pressure sensor further includes one or more polysilicon electrodes disposed over a silicon substrate. The sensor also includes one or more polysilicon routing layers that electrically connects electrodes of the one or more polysilicon electrodes to one another, wherein the polysilicon sensing membrane deforms responsive to a stimuli and changes a capacitance between the polysilicon sensing membrane and the one or more polysilicon electrodes. The sensor also includes one or more vacuum cavities positioned between the polysilicon sensing membrane and the one or more polysilicon electrodes.

Abstract: Aspects of the subject technology relate to a sensor device including a first cavity and a second cavity separated from the first cavity by a diaphragm. A first plate of the first cavity forms a first electrode of a capacitance. The diaphragm forms a second plate of the first cavity, which is the second electrode of the capacitance. The diaphragm is flexible and can deflect in response to an applied pressure.

Abstract: A micromechanical component for a capacitive pressure sensor device, including a diaphragm that is stretched with the aid of a frame structure in such a way that a cantilevered area of the diaphragm spans a framed partial surface, and including a reinforcement structure that is formed at the cantilevered area. A first spatial direction oriented in parallel to the framed partial surface is definable in which the cantilevered area has a minimal extension, and a second spatial direction oriented in parallel to the framed partial surface and oriented perpendicularly with respect to the first spatial direction is definable in which the cantilevered area has a greater extension. The reinforcement structure is present at a first distance from the frame structure in the first spatial direction, and at a second distance in the second spatial direction, the second distance being greater than the first distance.

Abstract: Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

Abstract: A micromechanical sensor unit, including: a substrate and an edge layer, which is situated on the substrate and laterally frames an inner area above the substrate; at least one diaphragm, which spans the inner area and forms a covered cavity above the substrate; at least one support point, which is situated between the substrate and the diaphragm inside the cavity and attaches the diaphragm to the edge layer and/or to the at least one support point. The support point separates the diaphragm into at least one measuring area that is movable through force action and at least one reference area that is not movable through force action. The substrate and the diaphragm, inside the cavity, include electrodes, which face one another in the measuring area and the reference area.

Abstract: Disclosed is an implant and method of making an implant. The implant having a housing that defines a cavity. The housing includes a sensor comprising a base attached to a diaphragm wherein said base may be positioned within said cavity. The sensor may be a capacitive pressure sensor. The diaphragm may be connected to the housing to hermetically seal said housing. The sensor may include electrical contacts positioned on the diaphragm. The attachment between the base and the diaphragm may define a capacitive gap and at least one discontinuity configured to enhance at least one performance parameter of said implant.

Abstract: Disclosed herein are various techniques and devices for detecting a level of fluid within a fluid collection receptacle. These techniques and devices may further determine a flow rate of fluid entering the fluid collection receptacle or a volume of fluid collected within the fluid collection receptacle. Sensors, including pressure sensors, may be installed in, on, or within the fluid collection receptacle to detect information about the liquid within the receptacle including fluid level, flow rate, and volume.

Abstract: An improved diaphragm vacuum gauge including a sensor chip that includes a first electrode provided on a base and a second electrode provided on a diaphragm so as to face the first electrode, the diaphragm and the base being disposed with a gap therebetween, and in which a distance between the first electrode and the second electrode changes in accordance with displacement of the diaphragm caused by pressure of a measurement target medium. The diaphragm vacuum gauge further includes an operational amplifier that converts a current output from the first electrode to a voltage and amplifies the voltage, and a coaxial cable that connects the first electrode and the operational amplifier with each other. Further, the first electrode is connected to a virtual ground of the operational amplifier by a core wire of the coaxial cable.

Abstract: The invention relates to a transducer apparatus to provide audio sensing with high noise immunity in an acoustically-noisy environment. The invention replaces the prior-art acoustic microphone with a non-acoustic sensor to sense free-field and/or surface vibrations or movement that resemble or arising from the voice of the user. The non-acoustic sensor includes an accelerometer, shock sensor, gyroscope, vibration microphone, or vibration sensor. There are several adaptions and embodiments of the invention including improving the polar directivity of the non-acoustic sensors and application of a multiplicity of non-acoustic sensors and acoustic microphones.

Abstract: Disclosed is an implant and method of making an implant. The implant having a housing that defines a cavity. The housing includes a sensor comprising a base attached to a diaphragm wherein said base may be positioned within said cavity. The sensor may be a capacitive pressure sensor. The diaphragm may be connected to the housing to hermetically seal said housing. The sensor may include electrical contacts positioned on the diaphragm. The attachment between the base and the diaphragm may define a capacitive gap and at least one discontinuity configured to enhance at least one performance parameter of said implant.

Abstract: A pressure detector includes a first board with a first pressure inlet, a first groove, and a first board electrode; a second board with a second pressure inlet, a second groove, and a second board electrode; and a sensing unit arranged therebetween with a diaphragm. The first groove is in communication with the first pressure inlet so as to prevent the formation of a closed space between the first board and the diaphragm when they contact with each other. The second groove is in communication with the second pressure inlet so as to prevent the formation of a closed space between the second board and the diaphragm when they contact each other.

Abstract: A method of fabricating a capacitive micromechanical electrical system (MEMS) pressure sensor includes the steps of forming a backing wafer, forming a diaphragm wafer that includes a diaphragm configured to deflect from an applied force and a pressure cavity configured to produce on the diaphragm the applied force which is indicative of a system pressure; fusing the diaphragm wafer to the backing wafer thereby forming a base wafer, forming a top wafer, joining the top wafer to the base wafer, thereby forming a detector wafer. The diaphragm defines a first capacitor surface and the top wafer defines a second capacitor surface. A void separates the second capacitor surface from the first capacitor surface by a separation distance which is a capacitor gap. A capacitive MEMS pressure sensor is also disclosed.

Abstract: A sensor apparatus having a crimped housing and a method of assembling a sensor apparatus having a crimped housing are disclosed. The sensor apparatus comprises a sensor port, a tubular thin-walled housing coupled to the sensor port and comprising a crimping portion, a base portion, and a step feature that is formed in the housing, the step feature partitioning the crimping portion from the base portion, sensor components disposed within the interior of the base portion of the housing, and an electrical connector coupled the housing and comprising leads electrically coupled to the sensor components and a connector flange, wherein a rim of the crimping portion of the housing is crimped onto the connector flange such that the electrical connector is retained in the housing. Dimples, created by protrusions on the crimp dye, on both housing rim and connector flange assure the housing rim hold the connector in rotation direction.

Abstract: A physical quantity sensor includes a substrate, and a moving member facing the substrate in a third direction via a gap and becoming displaced in the third direction in relation to the substrate. The moving member has a first part and a second part, and a plurality of penetration holes arranged at the first part and the second part and penetrating the moving member in the third direction. In at least one of a first area overlapping the first part and a second area overlapping the second part, as viewed in a plan view from the third direction, C?1.5×Cmin is satisfied, where C is a damping and Cmin is a minimum value of the damping.

Abstract: Heat resistant sensors equipped with any of a variety of transducers for measuring any of a variety of properties of fluids are constructed with components comprising materials that can withstand very high temperatures. Some embodiments of the sensors include a first pressure sensitive element and a second pressure sensitive element with respective first and second membranes positioned in juxtaposed relation to each other to form a capacitor. Some embodiments include a pusher that extends from the membrane toward a first electrode. Some embodiments have a housing comprising a ceramic substrate with a sensor element mounted on an inside surface of the substrate. Other embodiments have direction sensing capabilities including a heater positioned in a core material and at least three temperature sensors located at or near the peripheral surface of the core material and spaced apart angularly in relation to each other.

Abstract: A pressure sensing device comprising a body assembly, a connector assembly, an electronic circuit, and a pressure sensor is provided. The pressure sensing device is a compact device allowing for improved assembly. Moreover, the pressure sensing device allows for a leakage test and an electronic circuit control test to be performed before the assembly of the device thereby improving reliability and precision.

Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of a sensed property, such as regional contact forces, ambient conditions and/or environmental composition. The resonant MEMS sensors generate signals that oscillate at respective frequencies corresponding to the sensed property, increasing or decreasing in frequency in response to an increase or decrease in that property to effect a frequency-modulated digital output.

Abstract: An implantable medical device is described. In an example, the implantable medical device includes an electromechanical substrate and sensor, such as a pressure sensor, disposed on the substrate. At least a portion of the sensor is packaged via a liquid encapsulation. The packaging includes a shaped flexible outer membrane that surrounds at least the portion of the sensor. The packaging also includes a hydrophobic liquid disposed between at least the portion of the pressure sensor and the flexible outer membrane. The implantable medical device can be a part of a medical system used for monitoring medical conditions or performing medical operations based on the implantable medical device. Additionally, manufacturing methods are described for packaging the sensor in a liquid encapsulation.

Abstract: A metallic base member includes a holding section and a first flange. A sensor chip on which sensor element is arranged is provided on the holding section. An insulating adjusting member is provided on the holding section around the sensor chip and a circumference thereof is positioned between a circumference of the holding section and a circumference of the first flange. A metallic housing includes an opening section and a second flange, an inner surface of the opening section is brought into contact with the circumference of the adjusting member, and the second flange is joined to the first flange.

Abstract: The invention relates to a modular field device, which is simply and safely assemblable. For this, the field device comprises: a housing having an electrical plug contact arranged in a housing interior, a mechanical securement, which is embodied to secure a first electronic component in the housing interior, a second electronic component, which is arrangeable in the housing interior and which is electrically contactable with the plug contact, and an elastic connection, which is embodied to connect the first electronic component elastically with the second electronic component. A division of tasks between two electronic components enables a modular design of the field device with universally applicable electronic components. In addition, the elastic connection provides a simple, mechanical securement of the first electronic component in the housing with simultaneous, safe, electrical connection of the second electronic component with the plug contact.

Abstract: An industrial process differential pressure sensing device includes a housing having first and second isolation cavities that are respectively sealed by first and second diaphragms, a differential pressure sensor, a static pressure sensor, an eddy current displacement sensor, and a controller. The static pressure sensor is configured to output a static pressure signal that is based on a pressure of fill fluid in the first isolation cavity. The differential pressure sensor is configured to output a differential pressure signal that is indicative a pressure difference between the first and second isolation cavities. The eddy current displacement sensor is configured to output a position signal that is indicative of a position of the first isolation diaphragm relative to the housing. The controller is configured to detect a loss of a seal of the isolation cavity based on the position signal, the static pressure signal and the differential pressure signal.

Abstract: The disclosure relates to a method for monitoring the operation of a pressure measuring cell of a capacitive pressure sensor, wherein the pressure measuring cell comprises a pressure-dependent measuring capacitor and a pressure-dependent reference capacitor and the pressure measuring value is obtained as a measuring signal from the capacitance values of the measuring capacitor and the reference capacitor, wherein the measuring signal is supplied to an evaluation unit in the form of an alternating square-wave signal, the pulse height of the signal depending on quotients of the capacitance values of the reference capacitor and the measuring capacitor and the period of the signal being determined by the capacitance value of the measuring capacitor such that, in the nominal pressure range of the pressure sensor, there is a fixed correlation between the pulse height and the period, wherein the pairs of values of pulse height and period (h1, d1), . . .

Abstract: The invention relates to a pressure meter for fluid circuits which has a pressure-sensitive cell that is arranged connected to an electronic circuit, connected to which, in turn, are terminals of a connector for connecting the meter in the application thereof, wherein the pressure-sensitive cell is housed in a metal body, wherein it rests by means of a seal, while a plastic disc is arranged resting against the surface of the upper face of the pressure-sensitive cell, whereon an electronic circuit is incorporated.

Abstract: A transducer modulus, comprising: a substrate; a cap on the substrate, defining a chamber; and a sensor modulus in the chamber, integrating a first MEMS transducer facing the chamber, and a second MEMS transducer facing the supporting substrate. The cap has a first opening that forms a path for access of the first environmental quantity exclusively towards a sensitive element of the first transducer, and the supporting substrate has a second opening that forms a path for access of the second environmental quantity exclusively towards a sensitive element of the second transducer.

Abstract: A sensor body cell for use in a pressure sensor includes a metal housing and an insulating cell. The metal housing has a first cavity with a first conical inner surface. A portion of the first conical inner surface is concave. The insulating cell includes a first seal portion within the first cavity and forms a seal with the first conical inner surface.

Abstract: A pressure sensor is provided that comprises an upper wafer formed from a dielectric material, the upper wafer having channels. The upper wafer includes a first capacitor plate and a second capacitor plate formed on a lower surface of the upper wafer. An inductor is contained within the channels in the upper wafer in fixed relation to the first and second capacitor plates. A lower wafer is formed from the dielectric material. A third capacitor plate is formed on an inner surface of the lower wafer. The upper and lower wafers are fused together to form a monolithic housing such that the first and second capacitor plates are arranged in parallel, spaced-apart relation from the third capacitor plate. The lower wafer comprising a pressure sensitive deflective region underlying the third capacitor plate. The deflective region deflects in response to changes in ambient pressure in the medium.

Abstract: A system includes a housing, a capacitive sensor, and an electronics module. The housing has an interior and is configured to be maintained at a first pressure that is lower than a pressure external of the housing the interior under a vacuum pressure. The capacitive sensor is disposed within the housing and includes a plurality of layers of a dielectric material. The electronics module is coupled to the capacitive sensor and includes a processor configured to receive a raw capacitance value from the capacitive sensor and to output a signal identifying a pressure exerted on the capacitive sensor.

Abstract: A pressure sensor device includes a pressure sensor having a housing positioned on a center axis extending vertically, a sensing hole provided in a lower part of the housing, and an electrode unit provided in an upper part of the housing; and a connecting member having a contact spring that is pressed against the electrode unit of the pressure sensor. The electrode unit includes a first frame-shaped electrode having a frame-like shape that is rotationally symmetrical with respect to the center axis; and an annular first-surface portion on which the first frame-shaped electrode is placed.

Abstract: A pressure sensor of the present disclosure includes a laminated piezoelectric device including a stacked body in which piezoelectric layers and internal electrodes are alternately laminated; and a case which encloses the laminated piezoelectric device, the case including a case main body and a first projection protruding inwardly from the case main body, the first projection including an end face which abuts on an end face in a stacking direction of the stacked body, and is located inside an outer periphery of the end face of the stacked body.

Abstract: A MEMS pressure sensor includes a first plate with a hole on a diaphragm bonded to the first plate around its rim with the diaphragm positioned over the hole. An isolation frame is bonded to the diaphragm and a second plate with a pillar is bonded to the isolation frame around its rim to form a cavity such that the end of the pillar in the cavity is proximate a surface of the diaphragm. The diaphragm and second plate form a capacitive sensor which changes output upon deflection of the diaphragm relative to the second plate.

Abstract: The present disclosure provides a display module and a method for manufacturing the same, a display device and a wearable device. The display module includes a display screen, at least one pressure sensing electrode, and a touch screen. The display screen includes a first and a second electrode on opposite sides of a display layer, and an encapsulation layer on the second electrode. The at least one pressure sensing electrode is disposed on the encapsulation layer and opposite to the second electrode. The touch screen is disposed on the at least one pressure sensing electrode and is insulated from the at least one pressure sensing electrode.

Abstract: Example aspects of an over-pressure protection system and a method for using an over-pressure protection system are disclosed.

Abstract: The present invention generally relates to the measuring and monitoring of blood pressure. More specifically, embodiments may apply the theory of applanation tonometry for the measurement of blood pressure. Some embodiments provide a method for measuring mean arterial pressure. Some embodiments provide a device that may be worn by a user that may non-invasively measure and monitor blood pressure of a user. In some embodiments, the invention generally relates to sensor arrays for use with a wrist-worn device to measure blood pressure. Embodiments of the sensor array designs described may be configured to improve resolution by decoupling nodes of the sensor array.

Abstract: A force sensor according to the present invention is configured to detect at least one component among components of a force in each axis direction in an XYZ three-dimensional coordinate system and a moment around each axis, and includes: a support body arranged on an XY plane; a deformation body joined to the support body; and a detection circuit that outputs an electric signal indicating a force applied on the deformation body.

Abstract: According to embodiments of the present invention, a sensor patch for detecting extravasation is provided. The sensor patch includes an elastic film, and at least one sensing electrode disposed on the elastic film, wherein an electrical resistance of the at least one sensing electrode is changeable in response to a force acting on the at least one sensing electrode. According to further embodiments of the present invention, a sensing device is also provided.

Abstract: A hinged structure includes a hinge that is actuatable using a hydraulic cylinder. A method of monitoring a load applied to the hinged structure involves leaking the hydraulic fluid from the hydraulic cylinder in a way that compensates for expansion of the hydraulic fluid caused by variations in temperature of the hydraulic fluid. The method further involves measuring the pressure of the hydraulic fluid in the hydraulic cylinder. The hydraulic cylinder may be part of a coiled tubing injector. The load applied to the hydraulic cylinder may be used to indicate an overload of the tubing guide.

Abstract: A pressure measuring device, comprising: a pressure measuring cell having a measuring membrane, at least one platform and a pressure chamber formed therebetween. An electrical transducer for transducing a deflection of the measuring membrane into a pressure dependent, primary signal; a cylindrical housing having a measuring cell chamber, in which the pressure measuring cell is arranged, and an end face pressure receipt opening in communication with the pressure duct; and an electronic circuit in the housing for operating the electrical transducer, and for processing the primary signal, and for outputting a measurement signal. The cylinder axis of the pressure measuring cell forms with the cylinder axis of the housing an angle, which amounts to not less than 80°, and which is especially preferably a right angle.

Abstract: A pressure difference sensor includes first and second counterelectrodes, a conductive disk between the counterelectrodes, a first insulating layer connecting an outer edge of the disk with an outer edge of the first counterelectrode forming a first pressure chamber, a second insulating layer connecting an outer edge of the disk with an outer edge of the second counterelectrode forming a second pressure chamber, an opening in the first counterelectrode, via which the first pressure chamber is contactable with a first pressure, and an opening in the second counterelectrode, via which the second pressure chamber is contactable with a second pressure. The disk is divided into inner and outer regions, the inner region includes a measuring membrane arranged between the two pressure chambers and an edge region, the inner region forms with each of the counterelectrodes a capacitor having a capacitance dependent on a pressure difference acting on the measuring membrane.

Abstract: A sensor includes a port body which defines an axial passage for receiving fluid. An electrical connector extends through an opening in the port body near a crimp portion opposite the axial passage and forms an upper seal with the port body. Within the interior of the port body, a support ring and base cover form a cavity which retains a sensing element. The sensing element is exposed to the fluid within the axial passage and determines the pressure. An annular seal is retained by the base cover. The crimp portion of the port body is crimped to provide an upper seal and apply a force on the components within the interior, pinching the annular seal between the sensing element and the base of the port body to create a lower seal.

Abstract: Some preferred embodiments include a microphone system for receiving sound waves, the microphone including a back plate, a radiation plate, first and second electrodes, first and second insulator layers, a power source and a microphone controller. The radiation plate is clamped to the back plate so that there is a hermetically sealed circular gap between the radiation plate and the back plate. The first electrode is fixedly attached to a side of the back plate proximate to the gap. The second electrode is fixedly attached to a side of the radiation plate. The insulator layers are attached to the back plate and/or the radiation plate, on respective gap sides thereof, so that the insulator layers are between the electrodes. The microphone controller is configured to use the power source to drive the microphone at a selected operating point comprising normalized static mechanical force, bias voltage, and relative bias voltage level.

Abstract: A monitoring system that is configured to monitor a property is described. The monitoring system includes a sensor that includes a battery and that is configured to generate sensor data based on activity in a portion of the property that is within a field of view of the sensor. The monitoring system further includes a monitor control unit that is configured to: after replacement of a battery of the sensor, receive and analyze the sensor data, based on analyzing the sensor data, determine a status of the portion of the property without recalibrating the field of view of the sensor, and provide, for output, a notification that includes data describing the status of the portion of the property.

Abstract: A DC driven ionization apparatus is provided for ionizing a local atmosphere in which a corporeal surgical or cosmetic procedure is to be performed, the ionization apparatus including a safety circuit comprising detector means for detecting when a hazard condition exists, such as a short circuit or high charge level condition, a circuit controller for actuating switch means to turn the DC supply off and thereafter to cyclically reconnect and disconnect the DC supply until the hazard condition has been rectified, and re-set means for thereafter re-setting a continuous DC supply to the circuit until the next occurrence of a hazard condition or until the procedure is complete.

Abstract: An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.

Abstract: Provided is a differential pressure sensor which includes: a housing including a body and a cover, the housing having a first chamber and a second chamber defined in the housing and separated from each other; a first pressure channel communicating with the first chamber; a second pressure channel communicating with the second chamber; and a substrate on which an electronic component is mounted and in which a terminal is formed, the substrate including a first surface facing the first chamber and a second surface extending parallel to the first surface and facing the second chamber, the substrate configured to cover the second chamber.

Abstract: The invention relates to a method for determining a pressure measurement signal in a capacitive pressure measurement cell which comprises a main body and a measurement membrane that is arranged on the front of said main body. Electrodes are arranged on said main body and measurement membrane and form a measurement capacitance in a region of the measurement membrane which has a high degree of pressure sensitivity, and form a reference capacitance in a region of the measurement membrane which has a lower degree of pressure sensitivity, said measurement capacitance and reference capacitance being determined independently of one another, the pressure measurement signal being determined in a first measurement range from the measurement capacitance and the reference capacitance, in accordance with the first evaluation, and said pressure measurement signal being determined in a second measurement range from the reference capacitance in accordance with a second evaluation.

Abstract: A capacitive pressure sensor for an internal combustion engine is provided having a housing having a bottom surface, variable capacitor and circuitry. The variable capacitor is formed by a stationary electrode and an elastically bendable electrode. Pressure exerted on the bottom surface acts to bend the elastically bendable electrode. This bending alters the capacitance of the variable capacitor. The circuitry is configured to generate a signal based on the variable capacitance of the variable capacitor. This capacitance is representative of the pressure exerted on the bottom surface.

Abstract: Methods and apparatus for reduction of non-linearity errors in automotive pressure sensors. A pressure sensor includes a pressure sensing element including a pair of parallel electrodes, a pair of ceramic plates, rigid glass seals and a connection between the pair of parallel electrodes and an integrated circuit (IC). The IC executes a linear mapping function of a 1/CX value after a CX value is captured from the pressure sensing element, C representing a capacitance, the linear mapping function reducing a non-linearity error to enable two point calibration of a relationship between pressure and capacitance.

Abstract: The present invention relates to a display device including a panel which includes a plurality of electrodes which are arranged in parallel to each other, and a bending sensing unit that senses a bending of the panel by using a change in a capacitance between at least two electrodes among the plurality of electrodes.

Abstract: A microfabricated pressure transducer is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied.