Abstract: A source of electrons (10) generates a beam of free electrons which are accelerated through a vacuum chamber and collide with a target (34). The target has multiple layers of a high Z material such as tungsten or tantalum or for producing x-ray radiation when bombarded with high energy electrons. The target layers are located in sequence such that electrons that are not terminated in the first layer will pass to the second layer, and so on. This provides more efficient use of the generated electrons. The target layers are sandwiched between layers of a thermally conductive, low Z metal substrate (40), such as aluminum or copper or other material with a high thermal conductivity. Hollow passages (42) are bored in the substrate (40) to allow water or some other coolant to flow within them. As electrons strike the target (34), unwanted heat is generated along with the x-rays. The water carries the heat away from the target.

Abstract: An apparatus provides in-situ radiation treating utilizing a miniature energy transducer to produce x-rays, wherein the energy transducer includes a Schottky cathode tip. More specifically, the energy transducer includes a transducer body, an anode provided at a first end of the transducer body, and a cathode provided at a second end of the transducer body opposite the anode. The energy transducer is coupled to an energy source by a flexible insertion device. The energy source provides electrical and/or light signals to the energy transducer via the flexible insertion device. Light transmitted from the energy source to the energy transducer by the flexible insertion device is focused on a Schottky cathode tip of the cathode by the optical fiber provided in the hollow core of the anode.

Abstract: Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form a point source EUV, XUV and x-ray source. Various types of liquid droplet targets include metallic solutions, and nano-sized particles in solutions having a melting temperature lower than the melting temperature of some or all of the constituent metals, used a laser point source target droplets. The solutions have no damaging debris and can produce plasma emissions in the X-rays, XUV, and EUV (extreme ultra violet) spectral ranges of approximately 0.1 nm to approximately 100 nm, approximately 11.7 nm and 13 nm, approximately 0.5 nm to approximately 1.5 nm, and approximately 2.3 nm to approximately 4.5 nm. The second type of target consists of various types of liquids which contain as a miscible fluid various nano-size particles of different types of metals and non-metal materials.

Abstract: A main laser beam is focused to irradiate a tip of a high-density spouting gas flow formed by heating and then vaporizing a target material by a light beam for preheating making it to the plasma. As the result, the generation of a fast debris in the target material can be suppressed. And a discharge of the fast debris from the target material is also suppressed and extinguished by heating and then vaporizing them by a light beam for transpiration which is emitted at an adjusted time after the generation of the plasma. Thus, the fast debris which still appears in the plasma formed after preheating can be almost perfectly vaporized and extinguished by the light beam for transpiration.

Abstract: A photon generator includes an electron gun for emitting an electron beam, a laser for emitting a laser beam, and an interaction ring wherein the laser beam repetitively collides with the electron beam for emitting a high energy photon beam therefrom in the exemplary form of x-rays. The interaction ring is a closed loop, sized and configured for circulating the electron beam with a period substantially equal to the period of the laser beam pulses for effecting repetitive collisions.

Abstract: An X-ray generator, an X-ray inspector and an X-ray generation method capable of automatically focusing an energy beam, such as an electron beam for generating an X-ray, on a target are provided. The generation, inspector and the method have been developed by turning an attention on the fact that convergence conditions of an electron beam has a close relationship with a temperature on a surface of an X-ray tube target. The method comprises the steps of measuring the temperature changes at real time by a temperature sensor 14 and automatically controlling a current value of a focusing coil 6.

Abstract: The present invention relates to a vacuum arc discharge power supply. The power supply may be a high frequency resonant AC supply or it may be rectified to give resonant DC. The power supply of the present invention may be used in x-ray production, vacuum arc deposition equipment, vacuum metal refining, ion implantation devices, or other applications that perform vacuum arc discharge.

Abstract: An improved efficiency x-ray source comprised of a fluorescent x-ray tube and resonant high voltage power supply. The fluorescent x-ray tube is an arc discharge tube filled with a low-pressure vapor, xenon for example, that is excited by high-frequency, high-voltage pulses to produce x-rays. The power supply passes arcs through the tube that produce significantly more radiation per unit energy than equivalent conventional vacuum x-ray tubes. The power supply may be a high frequency resonant AC supply or it may be rectified to give resonant DC. The fluorescent tube is driven in cold cathode mode, avoiding a fragile filament. The arc gap may also be large or very small in order to serve as a broad beam source or point source.

Abstract: A radiation source of a radiation system of a lithographic projection apparatus comprises electrodes for creating a discharge in a space between them such that the discharge collapses into a pinch volume. The collapsing discharge creates a highly ionized, high temperature plasma in the pinch volume. A working fluid is ejected from a jet nozzle into the pinching volume and is thereby raised to a high temperature state and emits extreme ultraviolet radiation.

Abstract: An X-ray emission device having a microwave source and a resonant chamber. The resonant chamber contains a hermedically sealed volume of gas, a magnetic structure defining a geometrical electron-confinement zone in which electrons move at high speed. At least one target is placed in an electron path in order to emit X-rays. Each target is offset with respect to a mid-region of the geometrical conbinement zone.

Abstract: An x-ray tube having a cathode and an anode disposed within an evacuated housing is disclosed. The cathode is spaced apart from a target surface formed on the anode and the anode is placed at a positive voltage relative to the cathode so that electrons emitted from the cathode accelerate towards and strike the target surface at a focal spot. The resulting collision produces x-rays. The cathode assembly includes a cathode support base, upon which is mounted a filament for emitting electrons. A first focusing mechanism focuses the emitted electrons into an electron beam. In illustrated embodiments, a pair of deflector plates are also supported upon the cathode support base. Voltage potentials are applied to the deflector plates so as to create a deflection region which alters the trajectory of the electron beam and thereby reposition the focal spot on the anode target.

Abstract: An apparatus and method for in-situ x-ray radiation treatment utilizes different types of miniature energy transducers to emit x-rays. Each type of energy transducer includes a transducer body, a cathode provided at one end of the transducer body, and an anode provided at another end of the transducer body. The transducer body, cathode and anode define a cavity that communicates with an evacuation opening. A desired vacuum is achieved and maintained by a dynamic pumping mechanism that draws a vacuum in the cavity via the evacuation opening.

Abstract: A multi-region target that is configured to selectively generate two different energy distributions when exposed to an excitation electron beam is described. The multi-region target includes multiple regions with different x-ray generating characteristics. Thus, the interaction between an excitation electron beam and the target generates an x-ray beam with an energy distribution that depends upon which target region is exposed to the excitation electron beam. The different x-ray spectra may be used to produce an enhanced contrast x-ray image. A method of detecting the rotational position of the multi-region target based upon the contrast level of the resulting images also is described.

Abstract: The present invention intends to generate an electromagneticwave of wavelength in an EUV area repeatedly by irradiating laser beam in high frequency more than few kHz. For such purpose, a laser plasma EUV light source apparatus is comprised of a vacuum chamber, a target disposed in the vacuum chamber, a beam irradiate means for irradiating energy beam to the target, an input optical system for introducing energy beam to the target, an output optical system being communicated with the vacuum chamber for introducing electromagneticwave generated from the target, a shield device for protecting at least one of the input optical system and output optical system from spattering particle, and a wave length select device for selecting from electromagneticwave an electromagneticwave at wavelength in the EUV area. By such construction, generation of the debris can be restricted, and generated debris is shielded by the shield device 4.

Abstract: A source of photons includes a discharge chamber, a plurality of ion beam sources in the discharge chamber and a neutralizing mechanism. Each of the ion beam sources electrostatically accelerates a beam of ions of a working gas toward a plasma discharge region. The neutralizing mechanism at least partially neutralizes the ion beams before they enter the plasma discharge region. The neutralized beams enter the plasma discharge region and form a hot plasma that radiates photons. The photons may be in the soft X-ray or extreme ultraviolet wavelength range and, in one embodiment, have wavelengths in a range of about 10-15 nanometers.

Abstract: An insulating housing shell for a miniature x-ray emitter is provided. The housing shell is cut from a quartz monocrystal which is a suitable material for the insulating housing shell due to its resistivity and dielectric strength properties. The x-ray emitter can be inserted into a subject's body to deliver x-ray radiation. The emitter includes a cable, having a proximal and a distal portion. The insulating housing shell is coupled to the distal portion of the cable, and an anode and a cathode are disposed within the insulating housing shell. The cathode has a granular surface and is operative with the anode and the connector to produce the x-ray radiation. The cathode is composed of a material that also allows it to act as a getter.

Abstract: A debris containment shutter useable in a photolithography system comprises one or more moving members that sweep and/or deflect debris that is associated with plasma generated from a target away from the structures to be protected from the debris. The members may be configured as a structure that moves across the plasma space in which the debris populates, such as a rotating or reciprocating structure. For controlling debris associated with pulsed radiation, the movement of the members is synchronized with the pulses of plasma emitted radiation. In one aspect of the present invention, the shutter comprises a plate rotatable about an axis of rotation, the plate defining at least one opening therethrough and at least one member (e.g., in the form of baffles or vanes) extending from a surface of the plate. The members may extend radially outward from a hub or inward from a perimeter.

Abstract: An x-ray tube assembly is provided, including a multiple row x-ray tube bearing assembly including an inner bearing member, an outer bearing member, and a free rotational intermediate race member positioned between the inner bearing member and the outer bearing member such that the inner bearing member and the outer bearing member may rotate independently of each other.

Abstract: Disclosed is an X-ray tube for generating X-rays linearly focused in a vertical or horizontal direction in accordance with the orientation of a filament used. The X-ray tube includes a linear filament arranged at a cathode included in the X-ray tube, the linear filament serving to allow an anode included in the X-ray tube to generate line-focused X-rays. The X-ray tube according to the present invention can be applied to a calibration for X-ray spectroscopes, or various applications requiring line-focused X-rays.

Abstract: A Z-pinch plasma X-ray source includes a chamber having an insulating wall and defining a pinch region, a pinch anode and a pinch cathode positioned at opposite ends of the pinch region, a first conductor defining an edge in close proximity to or contacting an inside surface of the insulating wall and a second conductor disposed around an outside surface of the insulating wall. A surface discharge is produced on the inside surface of the insulating wall in response to application of a voltage to the first and second conductors. The surface discharge causes the gas to ionize and to form a plasma shell near the inside surface of the insulating wall. The pinch anode and the pinch cathode produce a current through the plasma shell in an axial direction and produce an azimuthal magnetic field in the pinch region in response to application of a high energy electric pulse to the pinch anode and the pinch cathode.

Abstract: An improved x-ray tube cooling system is disclosed. The system utilizes a shield structure that is connected between a cathode cylinder and an x-ray tube housing and is disposed between the electron source and the target anode. The shield a plurality of cooling fins to improve overall cooling of the x-ray tube and the shield so as to extend the life of the x-ray tube and related components. When immersed in a reservoir of coolant fluid, the fins facilitate improved heat transfer by convection from the shield to the to the coolant fluid. The cooling effect achieved with the cooling fins is further augmented by a convective cooling system provided by a plurality of passageways formed within the shield, which are used to provide a fluid path to the coolant. In particular, a cooling unit takes fluid from the reservoir, cools the fluid, then circulates the cooled fluid through cooling passages. The coolant is then output from the passageway and directed over the cooling fins.

Abstract: An illumination system includes several discharge sources that are multiplexed together to reduce the amount of debris generated.

Abstract: The present invention relates to an x-ray tube that utilizes a stationary anode assembly. The stationary anode assembly includes an anode target portion that is disposed on the target end of an anode substrate. The anode target includes an overhang portion, that functions to prevent rebounding electrons from striking the underlying anode substrate that would otherwise result in the production of errant x-rays, and that also functions to block errant x-rays produced at the substrate from exiting the x-ray tube. Embodiments also include an anode target having a target surface that is formed with a contoured shape that functions to direct any rebounding electrons towards the center of the anode target surface, and away from the underlying anode substrate. The present invention is particularly useful in preventing a secondary electron stream from emitting errant x-rays that would compromise the particular quality of the x-ray that the x-ray device is designed to generate.

Abstract: A system for generating tunable pulsed monochromatic X-rays includes a tabletop laser emitting a light beam that is counter-propagated against an electron beam produced by a linear accelerator. X-ray photon pulses are generated by inverse Compton scattering that occurs as a consequence of the “collision” that occurs between the electron beam and IR photons generated by the laser. The system uses a novel pulse structure comprising, for example, a single micropulse. In this way, pulses of very short X-rays are generated that are controllable on an individual basis with respect to their frequency, energy level, “direction,” and duration.

Abstract: Miniature X-ray source comprising a support structure provided with a through-going hole, an anode is arranged at one end and a cathode (8,24) at the other end of the hole, thereby defining a cavity, the anode and cathode are adapted to be energised in order to generate X-ray radiation. The support structure has a cross-sectional shape that is determined such that a desired radiation distribution of the radiation generated by the X-ray source is achieved. Also a method of manufacturing miniature X-ray sources is disclosed.

Abstract: An apparatus for in-situ measurement of residual surface stresses comprises a compact x-ray tube and a detector. X-rays emitted by the x-ray tube are diffracted from a specimen surface and intercepted by the detector. The intercepted x-rays are converted into light and transferred by a first fiber optic bundle and a second fiber optic bundle to light detection devices. Intensities of the received light are digitized by the light detection devices to generate a first ring and a second ring with common centers. The residual stress in the specimen surface is calculated based on a difference between the radii of the first ring and the second ring.

Abstract: A laser produced extreme ultraviolet (EUV) source based on a water droplet target has been implemented an auxiliary electrode system between the source and the first collector mirror. The auxiliary electrode system creates a repeller electric field, possibly a dc voltage imposed on the mirror that slows down and reverses the trajectories of ions from the source before they impact the collection mirror. The source modified according to the invention was evaluated with respect to the demands of EUV lithography and found to have much extended operational lifetimes. The spectral distribution of the generated radiation as well as the conversion efficiency into line radiation at 13 nm was determined. Long time measurements of the reflectivity of silicon/molybdenum multilayer mirrors for up to from 107 to 109 shots show the useful influence of the treatment of ions emitted from the source. Several methods of debris reduction were tested and discussed.

Abstract: A method and an apparatus is designed to produce X-ray or EUV radiation for use in lithography, microscopy, materials science, or medical diagnostics. The radiation is produced by urging a substance through an outlet (6) to generate a microscopic jet (2) in a direction from the outlet (6), and by directing at least one energy beam (1′) onto the jet (2), wherein the energy beam (1′) interacts with the jet (2) to produce the X-ray or EUV radiation. The temperature of the outlet (6) is controlled to increase the directional stability of the jet (2). The thus-achieved directional stability of the jet (2) provides for reduced pulse-to-pulse fluctuations of the produced radiation, improved spatial stability of the radiation source, as well as high average power since the energy beam (1′) can be tightly focused on the jet (2), even at a comparatively large distance from the jet-generating outlet (6).

Abstract: An extreme ultraviolet and soft x-ray radiation electric capillary discharge source that includes a boron nitride housing defining a capillary bore that is positioned between two electrodes one of which is connected to a source of electric potential can generate a high EUV and soft x-ray radiation flux from the capillary bore outlet with minimal debris. The electrode that is positioned adjacent the capillary bore outlet is typically grounded. Pyrolytic boron nitride, highly oriented pyrolytic boron nitride, and cubic boron nitride are particularly suited. The boron nitride capillary bore can be configured as an insert that is encased in an exterior housing that is constructed of a thermally conductive material. Positioning the ground electrode sufficiently close to the capillary bore outlet also reduces bore erosion.

Abstract: A miniature x-ray source capable of producing broad spectrum x-ray emission over a wide range of x-ray energies. The miniature x-ray source comprises a compact vacuum tube assembly containing a cathode, an anode, a high voltage feedthru for delivering high voltage to the anode, a getter for maintaining high vacuum, a connection for an initial vacuum pump down and crimp-off, and a high voltage connection for attaching a compact high voltage cable to the high voltage feedthru. At least a portion of the vacuum tube wall is highly x-ray transparent and made, for example, from boron nitride. The compact size and potential for remote operation allows the x-ray source, for example, to be placed adjacent to a material sample undergoing analysis or in proximity to the region to be treated for medical applications.

Abstract: An emitted energy system for use in photolithography may include a holder assembly operable to precisely align a diffuser and a nozzle. In accordance with one embodiment of the present invention, a holder assembly (30) may comprise a nozzle mounting system (414) coupled to a housing assembly (400) to secure a nozzle (22). A diffuser mounting system (430) may be coupled to the housing assembly (400) to secure a diffuser (28). An alignment system (450) may operate to align the nozzle (22) and the diffuser (28) in a spatial relationship with each other to optimize operation of the diffuser (28) in relation to the nozzle (22).

Abstract: X-ray emission device comprising a casing opened by a window and an X-ray tube placed in the casing, the tube comprising an anode assembly equipped with an anode, a cathode assembly equipped with a cathode and an envelope containing the anode and the cathode, the anode assembly including a means of longitudinal positioning of the tube in the casing and a means of angular positioning of the tube in the casing on a longitudinal axis.

Abstract: In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature.

Abstract: An X-ray exposure apparatus has a laser light source and a copper tape serving as a target. The position at which a plasma is produced on the target is changed by changing the angle of a mirror that is for irradiating the target with laser light. Alternatively, a plurality of lasers are provided and it is so arranged that different positions on the target are irradiated with different lasers. The position at which a plasma is produced on the target is thus changed to generate a plasma at each of a plurality of positions during one exposure operation. By thus irradiating a plurality of locations in an irradiation area on a target with laser light, the amount of defocusing of X-rays on a wafer is controlled so that a mask pattern is transferred to the wafer in reliable fashion.

Abstract: A rotation monitoring system (70) detects the rotational speed of an anode (10) of an x-ray tube during use. The system (70) includes a detector (72), which detects a pulse of secondary x-rays generated by the interaction of a stream (C) of electrons with a known defect (83) on a surface (84) of the anode. The detector may be position inside or outside a vacuum envelope (14) of the x-ray tube. The stream of electrons is supplied by a secondary source (80), separate from a main source (18) of electrons used to generate the primary or working x-ray beam (B) of the x-ray tube. A single pulse is detected with each rotation of the anode, providing a simple method of calculation of the anode rotation speed. Preferably, a feed back loop is used to correct the rotational speed of the anode so that overheating of the anode is avoided and the useful life of the x-ray tube is extended.

Abstract: A high-pressure krypton gas is supplied to the interior of a vessel from a gas introduction pipe. Light emitted from an optical fiber group formed by bundling together optical fibers constituting the output ends of fiber amplifiers or fiber lasers passes through a lens and exciting laser light introduction window, and is focused on the krypton gas jetting from the tip end of the nozzle. As a result, the krypton gas is excited as a plasma and soft X-rays are generated. The soft X-rays are reflected by a rotating multi-layer coat parabolic mirror and are emitted to the outside as a parallel beam of soft X-rays. Since light from fiber amplifiers is used as exciting light, and since numerous optical fibers are bundled together to form a light source, a large quantity of soft X-rays can easily be obtained.

Abstract: The present invention relates to structures within an x-ray device including an x-ray can, an x-ray can window frame insert, a rotor sleeve, and a bearing support assembly for a rotor structure. The various structures are fabricated from a chromium alloy of copper that is essentially oxygen free copper having a minor amount of chromium, the combination of which imparts desirable qualities to the x-ray device structures, including efficient heat sink and emissivity qualities that are beneficial in an x-ray device environment. In one preferred embodiment of the present invention, oxygen free high conductivity (OFHC) copper is melted in an RF furnace in the presence of a minor amount of chromium and is either ingot cast or powder metallurgically cast into a desired article and further fabricated into a finished article.

Abstract: Apparatus and methods are disclosed for producing a flux of X-rays, from a plasma, wherein the flux remains rotationally symmetrical about a propagation axis over a period of use, even if the plasma produce flying debris. The plasma can be generated by a laser-plasma source or a discharge-plasma source, for example. The X-rays produced by the plasma are directed by an optical element to a downstream location. To such end, the optical element is located where it is subject to deposition and accumulation of flying debris from the plasma. The optical element has an axis of rotational symmetry. A rotational actuator is situated relative to the optical element and is configured to rotate the optical element about the axis of rotational symmetry during use. Hence, if deposits of flying debris form on the optical element, the deposits will be rotationally symmetrical and thus have an identical affect on the X-ray flux at any angle about the axis of rotational symmetry.

Abstract: Sources are disclosed for producing short-wavelength electromagnetic radiation (EMR) such as extreme ultraviolet (“EUV” or “soft X-ray”) radiation useful in microlithography. The sources collect a greater amount of the EMR produced by a plasma than conventional sources and form the collected EMR into an illumination EMR flux having higher intensity than conventionally. The EMR flux desirably has a rotationally symmetrical intensity distribution. The plasma is produced by two electrodes contained in a vacuum chamber. A high-voltage pulsed power supply applies a plasma-creating potential across the electrodes. EMR produced by the plasma is collected, typically by a reflective element configured to form a collimated beam of EMR. The electrodes are configured and oriented such that, as the collimated beam passes by the electrodes, the electrodes exhibit minimal blocking of the EMR flux.

Abstract: A technology for generating femtosecond time regime x-ray pulses for application to the study of the structure and reactions of biological molecules, photosynthesis reactions, semiconductor device fabrication, structural determination and dynamic performance, and other chemical, biological and physical processes taking place on sub-picosecond time scales. Electrons are accelerated to hundreds of keV to tens of MeV energies using high energy, femtoseconds duration laser pulses, and are then converted to x-rays by one of several physical processes. Because the laser accelerated electrons have the pulse width of the laser driver, extremely short (less than 100 femtoseconds) x-ray pulses can be produced from these electrons. The x-ray energy and emittance can be controlled by electron beam production and beam transport techniques and/or collimators or x-ray optical systems.

Abstract: A system for generating tunable pulsed monochromatic X-rays comprises a tabletop terawatt laser delivering 10 Joules of energy in 10 ps at a wavelength of 1.1 microns. The light beam from the laser is counter-propagated against an electron beam produced by a linear accelerator. X-ray photons are generated by inverse Compton scattering that occurs as a consequence of the “collision” that occurs between the electron beam and IR photons generated by the laser. The system uses a novel pulse structure comprising, in a preferred embodiment, a single micropulse. The LINAC is configured to generate an electron beam having 1 nanocoulomb of charge in a microbunch having a pulse length of about 5 picoseconds or less (or an electron beam brightness of 1012 A/m2−radian2@ 500 A).

Abstract: An X-ray generator, an X-ray inspector and an X-ray generation method capable of automatically focusing an energy beam, such as an electron beam for generating an X-ray, on a target are provided. The generation, inspector and the method have been developed by turning an attention on the fact that convergence conditions of an electron beam has a close relationship with a temperature on a surface of an X-ray tube target. The method comprises the steps of measuring the temperature changes at real time by a temperature sensor 14 and automatically controlling a current value of a focusing coil 6.

Abstract: An improved endoscopic device which is introduced into the intestinal tract of a living organism and which operates autonomously therein, adapted to obtain and store or transmit one or more types of data such as visual image data, laser autofluorescensce data, or ultrasonic waveform data. In another aspect of the invention, an improved endoscopic device useful for implanting the aforementioned endoscopic smart probe is disclosed. In another aspect of the invention, apparatus for delivering agents including nanostructures, radionuclides, medication, and ligands is disclosed. In another aspect of the invention, apparatus for obtaining a biopsy of intestinal tissue is disclosed. In another aspect of the invention, apparatus for detecting the presence of one or more molecular species within the intestine is disclosed. Methods for inspecting and/or treating the interior regions of the intestinal tract using the aforementioned apparatus is also disclosed.

Abstract: A small, low cost, low power, and portable x-ray source that produces an x-ray flux that is sufficient to produce high quality x-ray images on suitable x-ray sensitive films. The source includes a vacuumated chamber that is filled with a heavy atomic weight gas at low pressure and an x-ray emitter. The chamber is in a magnetic field and an oscillating electric field and generates an Electron Cyclotron Resonance (ECR) plasma having a ring of energetic electrons inside the chamber. The electrons bombard the x-ray emitter which in turn produces x-ray radiation in a given direction. A pair of magnetic members generate an axisymmetric magnetic mirror trap inside the chamber. The chamber may be nested within a microwave resonant cavity and between the magnets, or the chamber and microwave cavity may be a single composite structure. The source is useful to make x-ray photographs virtually anywhere and may be battery powered.

Abstract: An industrial X-ray/electron beam source includes an accelerator having a) a coaxial cavity b) an electron gun for emitting an electron beam to be accelerated, c) at least one deflection magnet positioned outside of the cavity, and d) a radio frequency power supply means for supplying power of a radio frequency to the cavity to induce TM010 mode as an accelerating mode in the cavity; and a beam irradiator having a two-dimensional scanning magnet which deflects accelerated beam by the accelerator, an extracting window for extracting the deflected electron beam to be irradiated to an object, and means for guiding the deflected beam toward a center of the extracting window in a radial direction. The source is advantageous in that the electron beams do not intersect inside the cavity, which can reduce beam loss, and that beams or X-rays are irradiated to the object spatially uniformly.

Abstract: A laser-plasma EUV radiation source (50) that generates larger liquid droplets (72) for the plasma target material. The EUV source (50) forces a liquid (58), preferably Xenon, through a nozzle (64), instead of forcing a gas through the nozzle. The geometry of the nozzle (64) and the pressure of the liquid (58) through the nozzle (64) atomizes the liquid (58) to form a dense spray (70) of droplets (72). Because the droplets (72) are formed from a liquid, they are larger in size, and are more conducive to generating EUV radiation. A condenser (60) is used to convert gaseous Xenon (54) to the liquid (58) prior to being forced through the nozzle (64).

Abstract: An x-ray irradiation apparatus and x-ray exposure apparatus provide improved x-ray generation. The x-ray irradiation apparatus includes a target material feed-out device to provide a target material in a feed-out direction to a specified target position and a laser to provide laser light to the specified target position to cause the target material to emit x-rays. In some configurations, an x-ray generation position control device may be used to determine and control a position of x-ray generation, a rotary mechanism may be operatively connected to the target material feed-out device to axially rotate the target material feed-out device about the feed-out direction, and/or a target feed-out control device may be used to detect and control the position of the target material feed-out device.

Abstract: An X-ray exposure apparatus has a plasma X-ray source for generating X-rays by producing a plasma, and a collimator for converging X-rays that diverge from the X-ray source and reducing a global divergence angle to irradiate a mask with the X-rays. A local convergence angle as seen from one point on the mask is changed by moving the position or angle of the collimator in a direction perpendicular or parallel to the axis of the collimator. The pattern on the mask is transferred to a wafer using X-rays having a convergence angle thus controlled. As a result, controllable parameters are increased and a more suitable resist pattern can be obtained. In addition, process tolerance in terms of exposing finer patterns is improved.

Abstract: In a method and an apparatus for continuously generating laser plasma X-rays, pulsed X-rays are continuously generated at a stable output level for a long period of time from plasma produced by converging and irradiating a repetitive-shot pulsed main laser beam having high peak power onto a target formed on a cryogenic target layer. The basic structure comprises a rotary element having a cylindrical surface excellent in heat conductivity and rotatable within a vacuum chamber. A cooling device supplies the rotary element with a cryogenic fluid to cool. A cryogenic material supply mechanism supplies a chemically inert cryogenic material having a gaseous phase at temperature. From the cryogenic material, a cryogenic target layer of a predetermined thickness is formed on the surface of the rotary element. A main pulsed laser irradiating device continuously generates the pulsed X-rays from the plasma generated by the main laser beam generator.

Abstract: A dosimeter for an x-ray brachytherapy system permits in situ monitoring and control of radiation treatment via a miniaturized energy transducer within a human body. The dosimeter comprises a scintillating optical fiber having a distal end which is placed at the treatment site and a proximal end which is coupled to a dosimeter measurement unit. Utilizing energy supplied by an energy source, the miniaturized transducer generates x-ray photons. The scintillating optical fiber absorbs x-ray photons, converts the x-ray photons into light photons, and conveys the light photons to a dosimeter measurement unit. The light photons are converted into an electrical current which is representative of the intensity of the x-ray photons. The dosimeter measurement unit utilizes the electrical current to calculate and display the instantaneous and accumulated radiation dose, and radiation dose parameters are utilized to adjust energy levels, which are sent to the miniature energy transducer.