Abstract: A source of photons or neutrons includes a housing that defines a discharge chamber, a first group of ion beam sources directed toward a plasma discharge region in the discharge chamber, the first group of ion beam sources including a first electrode and an inner shell, and a second electrode spaced from the plasma discharge region. The source of photons or neutrons further includes a first power supply for energizing the first group of ion beam sources to electrostatically accelerate toward the plasma discharge region ion beams which are at least partially neutralized before they enter the plasma discharge region, and a second power supply coupled between the first and second electrodes for delivering a heating current to the plasma discharge region. The ion beams and the heating current form a hot plasma that radiates photons or neutrons. The source of photons or neutrons may further include a second group of ion beam sources.

Abstract: A method for the elimination of high-energy ion in an EUV light-radiating device includes irradiating a first target with a first exciting laser to produce a laser-produced plasma EUV light source and causing a high-energy ion generated simultaneously with EUV light to collide against plasma produced by irradiating a second target with a second laser to separate the high-energy ion from the orbit of the EUV light. An apparatus for the elimination of a high-energy ion in an EUV light-radiating device includes a device for irradiating a first target with a first exciting laser to produce a plasma EUV light source and induce emission of EUV light, a device for irradiating a second target with a second laser to produce plasma, and a device for causing a high-energy ion generated simultaneously with the EUV light to be delayed by difference between an ion flight time and plasma expansion time for ion elimination and collide against the plasma to separate the high-energy ion from the orbit of the EUV light.

Abstract: A femtosecond laser-electron X-ray source. A high-brightness relativistic electron injector produces an electron beam pulse train. A system accelerates the electron beam pulse train. The femtosecond laser-electron X-ray source includes a high intra-cavity power, mode-locked laser and an x-ray optics system.

Abstract: An EUV radiation source that creates a stable solid filament target. The source includes a nozzle assembly having a condenser chamber for cryogenically cooling a gaseous target material into a liquid state. The liquid target material is filtered by a filter and sent to a holding chamber under pressure. The holding chamber allows entrained gas bubbles in the target material to be condensed into liquid prior to the filament target being emitted from the nozzle assembly. The target material is forced through a nozzle outlet tube to be emitted from the nozzle assembly as a liquid target stream. A thermal shield is provided around the outlet tube to maintain the liquid target material in the cryogenic state. The liquid target stream freezes and is vaporized by a laser beam from a laser source to generate the EUV radiation.

Abstract: A dense plasma focus radiation source for generating EUV radiation using Lithium vapor and including a coaxially disposed anode and cathode. The invention includes methods and apparatuses for enhancing the efficiency of EUV radiation production, for protecting, cooling and extending the life of the anode and cathode, for protecting and shielding collecting optics from debris and pressure disturbances in the discharge chamber, and for feeding Lithium into the discharge chamber.

Abstract: A minaturized tharapeutic radiation source includes a optically driven thermionic cathode having an electron-emissive surface, and a non-planar, x-ray emissive target. A fiber optic cable directs a beam of optical radiation, having a power level sufficient to heat at least a portion of the electron-emissive surface to an electron emitting temperature, from a laser source onto the cathode. An electron beam emitted from said cathode strikes the target, positioned in the electron beam path. The target includes a thin film of x-ray emissive material, adapted to emit therapeutic radiation in response to incident accelerated electrons from the electron beam, and a support structure made of x-ray transmissive material. The target has a non-planar configuration, such as a conical shape or a hemispherical shape, designed to produce a more uniform and intense radiation pattern around the target.

Abstract: A laser plasma X-ray generating apparatus that can promptly repair a cryo-target layer on a drum surface held at a very low temperature using a liquid nitrogen is provided, and a drum 122 is fixed to a lower end of a shaft 121, and the drum 122 is arranged so as to be able to be moved in its rotating direction and its axle direction at an inside of the cryo-forming cover 106. And a liquid nitrogen supplying pipe 131 is inserted into the shaft 121, and a conduit 144 for supplying the target gas is connected to the cryo-forming cover 106. Further, a jacket 171 is arranged at the periphery of the cryo-forming cover 106 and a pipe 185 is arranged at the periphery of the conduit 144, resulting in forming a heat exchanger.

Abstract: A gas curtain device is employed to deflect debris that is generated by an extreme ultraviolet and soft x-ray radiation discharge source such as an electric discharge plasma source. The gas curtain device projects a stream of gas over the path of the radiation to deflect debris particles into a direction that is different from that of the path of the radiation. The gas curtain can be employed to prevent debris accumulation on the optics used in photolithography.

Abstract: An x-ray tube window cooling assembly (11) for an x-ray tube (18) is provided. The cooling assembly (11) includes an electron collector body (110) coupled to an x-ray tube window (104) and having a first coolant circuit (112). The coolant circuit (112) includes a coolant inlet (114) and a coolant outlet (122). The coolant outlet (122) directs coolant at an x-ray tube window surface (152) to impinge upon and cool the x-ray tube window (104). The coolant is reflected off the reflection surface (146) as to impinge upon and cool the x-ray tube window (104). A method of operating the x-ray tube (18) is also provided.

Abstract: The generation of ultrabright, multikilovolt coherent tunable x-radiation resulting from amplification on hollow atom transition arrays is described. Amplification has been demonstrated by physical evidence including (a) the observation of selected spectral components of several Xeq+ hollow atom transition arrays (q=30, 31, 32, 34, 35, 36, 37) radiated axially from confined plasma channels, (b) the measurement of line narrowing that is spectrally correlated with the amplified transitions, (c) evidence for spectral hole-burning in the spontaneous emission, a manifestation of saturated amplification, that corresponds spectrally with the amplified lines, and (d) the detection of an intense narrow (&dgr;&thgr;x˜0.2 mr) directed beam of radiation in the far field of the source.

Abstract: In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature.

Abstract: The present invention concerns x-ray sources for mammography. A microfocused x-ray source of small size (30 &mgr;&mgr;m and smaller) with x-ray spectrum optimized for enhanced mammography is obtained with a method and system according to the invention. The proposed x-ray source is based on the use of plasmas created by the energy distribution of suprathermal electrons that are produced during the interaction of the laser beam with a solid target. These hot electrons penetrate the surface layer of cold plasma and interact with the solid core of the target. The method and system according to the present invention allows optimizing the x-ray source size, its spectral distribution, and the conversion efficiency in the 17.3-28 5 keV range (adapted to the breast thickness).

Abstract: A rotor assembly capable of augmented heat transfer within an x-ray tube is disclosed for preventing heat damage to sensitive tube components. The rotor assembly generally comprises a shaft assembly for supporting the anode, a bearing assembly including a bearing housing and bearing sets for enabling rotation of the shaft assembly, and a magnetic sleeve. The shaft assembly includes a rotor sleeve that receives heat emitted by the anode during tube operation. The rotor sleeve radiates the heat to the magnetic sleeve, which is concentrically disposed within the rotor sleeve. A coolant-filled gap is defined adjacent the inner surface of the magnetic sleeve to receive the heat absorbed by the magnetic sleeve. The inner periphery of the gap is defined by the outer surface of the bearing housing. Emissive and absorptive coatings are disposed on the various surfaces of the rotor sleeve and magnetic sleeve to enhance heat transfer therebetween.

Abstract: A bearing assembly for a rotating anode x-ray device. The bearing assembly includes a shaft having a flange at one end for attachment of the anode thereto. The shaft defines front and rear inner races and includes a plurality of extended surfaces. Front and rear outer race elements define front and rear outer races, respectively, corresponding to the front and rear inner races, respectively, defined by the shaft. The front and rear outer race elements cooperate with the shaft to confine front and rear ball sets which facilitate rotary motion of the shaft. A spacer including extended surfaces assists in the positioning of the front and rear outer race elements in a bearing housing. The extended surfaces of the shaft and spacer, in conjunction with emissive coatings provided on various portions of selected components of the bearing assembly, facilitate a relative improvement in heat transfer out of the bearing assembly.

Abstract: An apparatus and method for the generation of ultrabright multikilovolt x-rays from saturated amplification on noble gas transition arrays from hollow atom states is described. Conditions for x-ray amplification in this spectral region combine the production of cold, high-Z matter, with the direct, selective multiphoton excitation of hollow atoms from clusters using ultraviolet radiation and a nonlinear mode of confined, self-channeled propagation in plasmas. Data obtained is consistent with the presence of saturated amplification on several transition arrays of the hollow atom Xe(L) spectrum (&lgr;˜2.9 Å). An estimate of the peak brightness achieved is ˜1029 &ggr;·s−1·mm−2·mr−2 (0.1% Bandwidth)−1, that is ˜105-fold higher than presently available synchotron technology.

Abstract: Apparatus and methods are disclosed for producing a flux of X-rays, from a plasma, wherein the flux remains rotationally symmetrical about a propagation axis over a period of use, even if the plasma produce flying debris. The plasma can be generated by a laser-plasma source or a discharge-plasma source, for example. The X-rays produced by the plasma are directed by an optical element to a downstream location. To such end, the optical element is located where it is subject to deposition and accumulation of flying debris from the plasma. The optical element has an axis of rotational symmetry. A rotational actuator is situated relative to the optical element and is configured to rotate the optical element about the axis of rotational symmetry during use. Hence, if deposits of flying debris form on the optical element, the deposits will be rotationally symmetrical and thus have an identical affect on the X-ray flux at any angle about the axis of rotational symmetry.

Abstract: A sleeve or cover for preventing the production of secondary x-ray signal contamination from an analytical x-ray tube is disclosed. The x-ray tube includes an evacuated enclosure in which is disposed a cathode and anode. The sleeve or cover is useful in applications such as x-ray fluorescence spectroscopy for improving the spectral purity of the primary stream of x-rays produced by electron bombardment of the anode target surface by the cathode. In one embodiment, the sleeve is disposed about a portion of the anode substrate, and is comprised of beryllium. Electrons back-scattered from the target surface are attracted to the anode substrate and impact the beryllium sleeve, producing secondary x-rays that are not detected by spectroscopic detectors and are therefore not contaminating to the primary x-ray stream.

Abstract: A system for generating tunable pulsed monochromatic X-rays includes a tabletop laser emitting a light beam that is counter-propagated against an electron beam produced by a linear accelerator. X-ray photon pulses are generated by inverse Compton scattering that occurs as a consequence of the “collision” that occurs between the electron beam and IR photons generated by the laser. The system uses a novel pulse structure comprising, for example, a single micropulse. In this way, pulses of very short X-rays are generated that are controllable on an individual basis with respect to their frequency, energy level, “direction,” and duration.

Abstract: A miniaturized X-ray source is disclosed. It comprises an anode structure (43) and a cathode structure (41), each having an essentially pointed portion (44, 42), wherein at least the pointed portions being directed towards each other and enclosed in a vacuum cavity (49). The anode structure has an essentially dome shaped structure having a first essentially flat part (46) surrounded by a second essentially flat part (48), connected by a wall section (47), such that said first and second parts are located at different levels. The pointed portion is provided on said first flat portion and having an extension such that the apex of said pointed portion does not extend beyond the level of said second essentially flat part. A method of making an X-ray source is also disclosed.

Abstract: A method of imaging an object by generating laser pulses with a short-pulse, high-power laser. When the laser pulse strikes a conductive target, bremsstrahlung radiation is generated such that hard ballistic high-energy electrons are formed to penetrate an object. A detector on the opposite side of the object detects these electrons. Since laser pulses are used to form the hard x-rays, multiple pulses can be used to image an object in motion, such as an exploding or compressing object, by using time gated detectors. Furthermore, the laser pulses can be directed down different tubes using mirrors and filters so that each laser pulse will image a different portion of the object.

Abstract: A method and apparatus for providing a miniaturized, flexible high voltage upconverter. Aspects of the invention are particularly useful in providing an apparatus comprising a plurality of up-converting modules while also allowing the apparatus to maintain a desired degree of flexibility. However, certain aspects of the invention may be equally applicable in other scenarios as well.

Abstract: A method and apparatus are disclosed for reducing variation in a spot size of an electron beam at a target due to multipole aberrations in an electron beam tomography (EBT) scanner. A magnitude of a DC voltage applied to a positive ion electrode (PIE) within the EBT scanner is adjusted and an orientation of a non-circular aperture of the PIE is aligned with respect to the electron beam. A profile of the spot size is monitored while adjusting the magnitude of the DC voltage and while aligning the orientation of the non-circular aperture of the PIE until the variation in the spot size is sufficiently reduced.

Abstract: A mobile, miniature x-ray source includes a low-power consumption cathode element for mobility, and an anode optic creating a field free region to prolong the life of the cathode element. An electric field is applied to an anode and a cathode that are disposed on opposite sides of an evacuated tube. The anode includes a target material to produce x-rays in response to impact of electrons. The cathode includes a cathode element to produce electrons that are accelerated towards the anode in response to the electric field between the anode and the cathode. The tube can have a length less than approximately 3 inches, and a diameter or width less than approximately 1 inch. The cathode element can include a low-power consumption cathode element with a low power consumption less than approximately 1 watt. The power source can include a battery power source. A field-free region can be positioned at the anode to resist positive ion acceleration back towards the cathode element.

Abstract: The present invention provides a catheter having an x-ray generator unit at its tip which generates x-ray radiation having a wavelength in a range effective for treating biological tissue. In one embodiment, the x-ray generator unit includes a miniature x-ray generator and a miniature transformer that form, in combination, a monolithic device. The transformer includes a primary winding that receives an input voltage in a range of 100 V to 4 kV from a power source, via a flexible cable that runs from the proximal end of the catheter body to its distal end. The transformer further includes a secondary winding that up-converts the input voltage to generate an output voltage in a range of 10 kV to 40 kV to be applied to a cathode of the x-ray generator. The cathode emits electrons in response to the applied voltage, and an extraction electrode guides the emitted electrons to an anode, which is preferably formed of a high-Z refractory metal.

Abstract: A laser-plasma, EUV radiation source (10) that controls the target droplet delivery rate so that successive target droplets (66, 72) are not affected by the ionization of a preceding target droplet. A source nozzle (50) of the source (10) has an orifice (56) of a predetermined size that allows the droplets (54) to be emitted at a rate set by the target materials natural Rayleigh instability break-up frequency as generated by a piezoelectric transducer (58). The rate of the droplet generation is determined by these factors in connection with the pulse frequency of the excitation laser (14) so that buffer droplets (70) are delivered between the target droplets (66, 72). The buffer droplets (70) act to absorb radiation generated from the ionized target droplet (66) so that the next target droplet (72) is not affected.

Abstract: Devices and methods are disclosed that provide effective utilization of light beams produced from multiple EUV-light sources, especially such sources that have been bundled. An embodiment of an EUV-source device comprises multiple individual EUV-light sources each providing a respective point-light source of EUV radiation propagating as a respective beam from each point-light source. A reflective focusing-optical system is situated downstream of the EUV-light sources, and is configured to focus the beams from the point-light sources at a focus point. A variable-angle mirror is situated downstream of the focusing-optical system and is configured to reflect light of the respective beams from the point-light sources that has been reflected by the focusing-optical system. A mirror-tilting mechanism is coupled to the variable-angle mirror. The mechanism, when activated, tilts the mirror by a respective angle corresponding to the particular beam from one of the point-light sources that is incident on the mirror.

Abstract: An EUV radiation source (12) that generates a sheet (36) of a liquid target material that has a width that matches the desired laser spot size (28) for good conversion efficiency and a thickness that matches the laser beam/target interaction depth. The EUV source (12) includes a reservoir (10) containing a pressurized cryogenic liquid target material, such as liquid Xenon. The reservoir (10) also includes an array (14) of closely spaced orifices (16). The liquid target material is forced through the orifices (16) into a vacuum chamber as separated liquid stream filaments (20) of the target material that define the sheet (36). The liquid streams freeze to form an array of frozen target filaments (20). A laser beam (24) is directed to a target area (28) in the vacuum chamber where it irradiates the stream of filaments (20) to create a plasma (30) that emits EUV radiation (32).

Abstract: An EUV radiation source (50) that employs a steering device (74) for steering a stream (66) of droplets (68) generated by a droplet generator (52) so that the droplet (68) are directed towards a target location (76) to be vaporized by a laser beam (78). The direction of the stream (66) of droplets (68) is sensed by a sensing device (84). The sensing device (84) sends a signal to an actuator (88) that controls the orientation of the steering device (74) so that the droplets (68) are directed to the target location (76).

Abstract: A miniature X-ray source includes a support structure provided with a through hole, an anode arranged at one end of the hole and a cathode at the other end of the hole, thereby defining a cavity, wherein the anode and cathode are adapted to be energized to generate X-ray radiation. The support structure has a cross-sectional shape that is determined such that a desired radiation distribution of the radiation generated by the X-ray source is achieved. Also a method of manufacturing miniature X-ray sources is disclosed.

Abstract: A miniaturized, optically driven, therapeutic radiation source is disclosed in which the voltage gradient between a high electron accelerating voltage and the ground potential can be controlled. The electron source and the target element are disposed within a capsule which defines a substantially evacuated region extending along an electron beam axis. The inner surface of the capsule is coated with a weakly conductive or semiconductive coating, so that a substantially uniform voltage gradient is maintained within the evacuated capsule. In this way, the chances of electric flashover or breakdown are reduced. Also, secondary emissions of electrons striking the inner wall of the capsule are reduced. X-ray production efficiency is optimized by maximizing the percentage of electrons propagated directly to the target.

Abstract: Debris generation from an EUV electric discharge plasma source device can be significantly reduced or essentially eliminated by encasing the electrodes with dielectric or electrically insulating material so that the electrodes are shielded from the plasma, and additionally by providing a path for the radiation to exit wherein the electrodes are not exposed to the area where the radiation is collected.

Abstract: Medical system comprising a hollow catheter 14, for insertion into a human or animal body, and an elongated x-ray tube unit 12 provided with an x-ray tube 16 at its distal end and adapted to be inserted into the catheter. A distal pole 8 of the x-ray tube is connectable to a connection means 22 in said catheter, wherein the x-ray tube is energised via a single electrical conductor 18 in said x-ray tube unit connected to the proximal pole and via said connection means.

Abstract: The present invention provides a catheter having an x-ray generator unit at its tip which generates x-ray radiation having a wavelength in a range effective for treating biological tissue. In one embodiment, the x-ray generator unit includes a miniature x-ray generator and a miniature transformer that form, in combination, a monolithic device. The transformer includes a primary winding that receives an input voltage in a range of 100 V to 4 kV from a power source, via a flexible cable that runs from the proximal end of the catheter body to its distal end. The transformer further includes a secondary winding that up-converts the input voltage to generate an output voltage in a range of 10 kV to 40 kV to be applied to a cathode of the x-ray generator. The cathode emits electrons in response to the applied voltage, and an extraction electrode guides the emitted electrons to an anode, which is preferably formed of a high-Z refractory metal.

Abstract: Process and device for the generation of a fog of micrometric and submicrometric droplets, which may find application to the generation of light in the extreme ultraviolet range, particularly for lithography. According to the process and device, a pressurized liquid is injected into a very small diameter nozzle opening up into a vacuum. Light is generated by focusing laser radiation onto the fog.

Abstract: The invention relates to an arrangement for generating X-rays upon incidence of electrons (4), which arrangement includes a liquid metal zone (7) in which a liquid metal (9) is provided as an X-ray target in such a manner that it can flow past a zone of electron incidence (8). In order to allow a pump of reduced capacity to be employed in such a device in order to provide the movement of the liquid metal, in accordance with the invention it is proposed to realize a pressure zone (10) which is separate from the liquid metal zone (7) and is provided with a pressure medium (11) in such a manner that the pressure medium (11) can exert a pressure on the liquid metal (9) present in the liquid metal zone (7) in order to force the liquid metal (9) past the zone of electron incidence (8), the pressure zone (10) being provided with a pressure accumulator (R3) which can be replenished in order to apply the pressure.

Abstract: An imaging tube (51) is provided including a cathode (58) and an anode (60). The cathode (58) includes an emission surface (99), which emits a plurality of electrons along an emission axis (56). The anode (60) includes a body (76) having a track (58) on a peripheral section (78) of the body (76). The plurality of electrons are directed to impinge on the track (58) at an impingement angle &agr; approximately equal to or between 15° and 25° relative to the emission axis (56) and are converted into x-rays. A method of generating x-rays within the imaging tube is also provided.

Abstract: For eliminating a high-tension cable in order to improve the handling, the open type X-ray generating apparatus (1) in accordance with the present invention employs a mold power unit in which a high-voltage generating part, a grid connecting line, and a filament connecting line which attain a high voltage are molded with a resin, whereas the mold power unit is secured to the proximal end side of a tubular portion (2), whereby an apparatus of a type integrated with a power supply is realized. Since the high-voltage generating part, grid connecting line, and filament connecting line are confined within the resin mold as such, the degree of freedom in structure of the high-voltage generating part and the degree of freedom in bending the lines improve remarkably.

Abstract: In laser-plasma generation, a fluid of target material is jet out to form a jet tube target 21 having a diameter &phgr; and a wall thickness &tgr; with a shell and a hollow space within the shell by using a core-column. A plurality of pulse-like laser beams 30 are directed to the jet tube target radially and equiangularly-spaced directions and are simultaneously focused and irradiated onto the jet tube target to generate the plasma.

Abstract: An EUV source (82) that delivers a laser beam (94, 96) asymmetrical relative to first collection optics (88). The first collection optics (88) has an opening (90, 92) for the laser beam (94, 96) that is positioned so that the laser beam (94, 96) is directed towards the plasma off-axis relative to the collection optics (88). Thus, the strongest EUV radiation (98, 100) is not blocked by the target production hardware (84).

Abstract: The invention is directed to an arrangement for the suppression of particle emission in the generation of radiation based on hot plasma in x-ray radiation sources, particularly EUV radiation sources.

Abstract: A radiation source assembly and a connector press used in producing such assemblies. In the radiation source assembly, each of the cap connector and the female connector is provided with internal round threads on its pigtail fitting hole, thus engaging with the large-diameter coil of the pigtail at the internal round threads through a thread engagement prior to a compression process of the press. The assembly also allows a person to know whether both ends of the pigtail fully reach desired points within the two connectors, thus securing a precise compressing target portion during a compression process of the press. The inserted lengths of the pigtail relative to the two connectors are maximize accomplishing a desired linearity of the assembly. In the assembly, a target biasing spring is provided on the capsule lid and allows the disc targets within the source capsule to effectively maintain a desired condition as point sources regardless of the number of targets.

Abstract: The present invention provides apparatus and method for providing a stabilized x-ray output from a field emission x-ray apparatus by monitoring the operating current and adjusting the gap between the anode and cathode to stabilize the output.

Abstract: A compact X-ray source is disclosed, improving controllability an insulation from unwanted high voltage effects. In one aspect, an active variable conductance device (130, 330) connected in series with the cathode is used in a closed loop, feedback arrangement to control the cathode beam current; the current flowing through the device to the cathode being directly sensed and compared with a desired current level. The result of the comparison is used to control the conductance of the device, thereby directly influencing the cathode current. A second aspect provides an extension of a Faraday cage, whereby the secondary winding of a transformer used to supply power to components within the cage is shielded within a coaxial, tubular member connected to the cage and extending outwardly from it.

Abstract: X-ray generators are disclosed that produce X-ray radiation from a plasma and that exhibit reduced heating of certain components caused by proximity to the plasma. An embodiment of such an X-ray generator is encased in a vacuum chamber that exhibits reduced reflection and scattering of electromagnetic radiation from the inner walls thereof to components contained in the chamber. Since less reflected radiation reaches the components, the components experience less temperature increase during use. For example, the inner walls can be coated with a film of carbon black that absorbs incident radiation from infrared to ultraviolet.

Abstract: A radiation source comprising:

Abstract: An x-ray generating device includes a field emission cathode formed at least partially from a nanostructure-containing material having an emitted electron current density of at least 4 A/cm2. High energy conversion efficiency and compact design are achieved due to easy focusing of cold cathode emitted electrons and dramatic reduction of heating at the anode. In addition, by pulsing the field between the cathode and the gate or anode and focusing the electron beams at different anode materials, pulsed x-ray radiation with varying energy can be generated from a single device.

Abstract: The invention relates to a device (1) for generating X-rays (57). The device comprises a source (7) for emitting electrons (53) and a liquid metal for emitting X-rays as a result of the incidence of electrons. The device further comprises a displacing member (11) for displacing the liquid metal through an impingement position (55) where the electrons emitted by the source impinge upon the liquid metal. As a result of the flow of liquid metal through the impingement position the heat, which is generated in the impingement position as a result of the incidence of the electrons upon the liquid metal, is transported away from the impingement position.

Abstract: An emitter for a miniature X-ray apparatus comprises an insulating shell, an anode, and a cathode. The insulating shell includes a conical brazing surface, brazed to a conical brazing surface on the anode. The braze consists of a pure titanium layer and a pure tin layer. During brazing, the pure metals react and bond to the insulating shell and create a titanium-tin alloy between the pure layers. Pure tin is sputtered from tin sputter target onto the exposed brazing surfaces of the cathode cap and the anode. The insulating shell is placed in a vacuum chamber of deposition applicator, which deposits an active metal onto the shell brazing surface. In a brazing oven, the anode is placed within insulating shell such that the anode conical brazing surface and the shell conical brazing surface are contacting and aligned with each other. During brazing, the cathode is brought into contact with the insulating shell. The sealed emitters are placed in a sputtering machine's vacuum chamber.

Abstract: Laser light emitted from a high output laser light source is condensed by a condenser lens to form a condensed point. Xenon (Xe) gas or the like as a target is injected from a nozzle to the condensed point to generate Extreme Ultra Violate (EUV) light, and then the generated EUV light is condensed by a condenser mirror. A transmission filter having a predetermined transmittance with respect to the EUV light is disposed between the condenser mirror and a reflecting mirror, and scattering particles mixed in the EUV light are adsorbed by the transmission filter. The EUV light passing through the transmission filter is deviated by the reflecting mirror, a illuminance distribution of the EUV light is uniformalized by fly eye mirrors, thereafter the EUV light is condensed by another condenser mirror, and then exposure is effected using the condensed EUV light as an exposure beam.

Abstract: These methods describe a collimated x-ray beam, used for in vivo phase-contrast x-ray imaging of the interior architecture of carbon-based objects, such as the intact human soft-tissue anatomy, for mapping the decrements of refraction experienced by the incident x-ray beam. These methods utilize a microscopically-thin laser-produced plasma x-ray spatial line-source, specified in the target plane as 50 microns or less in width and orthogonally, greater than one centimeter in length, requiring an optically-reflective mirror to line-focus cylindrically-shaped femptosecond pulses of infrared laser photons onto a heavy metal target. Bragg-diffractive multilayer x-ray mirrors collect a wide solid-angle of characteristic hard x-rays in the 15 KeV-to-100 KeV range from the spatial line-source, yielding a microscopically-thin x-ray fanbeam or x-ray slicebeam, specified in the object plane as 50 microns or less in width and orthogonally, greater than seven centimeters in length.