Abstract: This invention is directed towards finding, locating, and confirming threat items and substances. The inspection system is designed to detect objects that are made from, but not limited to, special nuclear materials (“SNM”) and/or high atomic number materials. The system employs advanced image processing techniques to analyze images of an object under inspection (“OUI”), which includes, but is not limited to baggage, parcels, vehicles and cargo, and fluorescence detection.

Abstract: A method of deriving a quantitative measure of a degree of calcification of a blood vessel such as an aorta by processing an image such as an X-ray image of at least a part of the blood vessel containing said calcification comprises: taking a starting set of digital data representative of an image of at least part of a blood vessel containing a calcification set against a background; estimating the boundary of the calcification; using inpainting to replace digital data in said starting set representing the calcification with data extrapolating the boundary of the background to extend over the area of calcification, and so generating an inpainted set of digital data; and computing the difference between the starting set of digital data and the inpainted set of digital data to obtain a quantitative measure of the degree of calcification of the blood vessel.

Abstract: An X-ray diffraction and X-ray fluorescence instrument for analyzing samples having no sample preparation includes a X-ray source configured to output a collimated X-ray beam comprising a continuum spectrum of X-rays to a predetermined coordinate and a photon-counting X-ray imaging spectrometer disposed to receive X-rays output from an unprepared sample disposed at the predetermined coordinate upon exposure of the unprepared sample to the collimated X-ray beam. The X-ray source and the photon-counting X-ray imaging spectrometer are arranged in a reflection geometry relative to the predetermined coordinate.

Abstract: A method, instrument, and computer program software product for characterizing a sample with respect to the presence of a specified element, either as a constituent of a surface layer or of the bulk of the sample. Intensities of fluorescent emission at two characteristic emission lines are compared to establish whether the specified element is disposed above the bulk of the sample. In the case where the specified element is disposed above the bulk of the sample, an areal density of the specified element is determined, whereas in the case where the specified element is disposed within the bulk of the sample, a volumetric concentration of the specified element within the sample is determined.

Abstract: The present disclosure is generally directed to a process for controlling the quality of manufactured absorbent articles, the process including incorporating into an absorbent article at least a portion of a wetness sensing system that is configured to detect the presence of a substance, the wetness sensing system comprising at least one metallic conductive element; and passing the absorbent article in proximity to a foreign material sensor employing x-ray technology, the foreign material sensor adapted to detect the presence of foreign material to confirm whether foreign material has been incorporated into the article.

Abstract: A beam collimator arrangement for scanned-slot x-ray imaging having one or several collimators in an x-ray apparatus is disclosed. The beam collimator arrangement includes an x-ray source; an x-ray image receiver positioned to receive x-rays from the x-ray source; a compressor or means for compressing a female breast to be examined where the compressor is positionable between the x-ray source and the x-ray image receiver; and the beam collimator is positioned between the x-ray source and the compressor. The beam collimator arrangement is arranged on a carrying structure to displace the beam collimator arrangement between a first position when no x-ray exposure is conducted and a second position before x-ray exposure is initiated.

Abstract: The press formability of a galvanized steel sheet including an oxide film, which has a thickness of 10 nm to 100 nm, as a surface layer is nondestructively speedily evaluated.

Abstract: Systems and methods are provided for accessing three dimensional representation of an anatomical surface and flattening the anatomical surface so as to produce a two dimensional representation of an anatomical surface. The two dimensional surface can be augmented with computed properties such as thickness, curvature, thickness and curvature, or user defined properties. The rendered two dimensional representation of an anatomical surface can be interacted by user so as to deriving quantitative measurements such as diameter, area, volume, and number of voxels.

Abstract: A method of producing an improved straightened reformat is presented in which cross sections are calculated perpendicular to an elongate subject described within an object data set, a reference direction is determined in each cross sectional slice and a new object data set is created by concatenating the cross sectional slices, each cross sectional slice orientated so that the reference directions in the cross sectional slices are aligned. Various methods are presented by which the reference direction is determined within each cross sectional slice, including propagation from an original reference direction and optimization using determined reference directions as boundary conditions.

Abstract: Provided are an X-ray tube and an X-ray analysis apparatus, which can be further reduced in size as well as in weight and more efficiently detect a fluorescent X-ray and the like to increase sensitivity.

Abstract: A method for nondestructively obtaining measurement information of a region within one or more ultra-hard polycrystalline constructions comprises conducing a first measurement using x-ray fluorescence by directing x-rays onto a surface of the diamond body, receiving x-ray fluorescence from the diamond body, and deriving measurement information regarding the region therefrom. A second method can be used on the same or other ultra-hard polycrystalline constructions to obtain measurement information regarding the region in a manner that is relatively more time efficient than the first method to facilitate use of the measurement method on a large number of constructions. The second measurement can be selected from the group including beta backscatter, x-ray radioscopy, eddy current, magnetic induction, and microresistance. In an example embodiment, the method is used to determine the thickness of a region within the diamond body that comprises less catalyst material than another region within the body.

Abstract: A method of identifying a material using an x-ray emission characteristic is provided. X-ray data representing a monitored x-ray emission characteristic is obtained from a specimen in response to an incident energy beam. A dataset is also obtained, this comprising composition data of a plurality of materials. The material of the specimen is contained within the dataset. Predicted x-ray data are calculated for each of the materials in the dataset using the composition data. The obtained and the predicted x-ray data are compared and the likely identity of the material of the specimen is determined, based upon the comparison.

Abstract: An electron probe X-ray analyzer capable of automatically setting appropriate analytical conditions if there are unknown compounds by performing analysis under the analytical conditions adapted for analysis points having different compositions in a case where the numerous analysis points having the plural compositions are analyzed by WDS (wavelength-dispersive X-ray spectrometer). At each analysis point, the analyzer performs quantitative analysis using EDS (energy-dispersive X-ray spectrometer) permitting easy and quick analysis. Based on the results, chemical compounds are identified. If the results indicate that there is any new compound, analytical conditions adapted for the new compound are selected. If the new compound is already registered in a database, the analytical conditions are read from the database. Then, quantitative analysis is performed using WDS.

Abstract: Method and apparatus for performing sample analysis using both the WDS and an energy-dispersive X-ray spectrometer (EDS). The analysis starts with irradiating the sample with an electron beam. Characteristic X-rays emanating from the sample are spectrally dispersed and detected by the WDS. The intensities of the characteristic X-rays at positions where the characteristic X-ray peaks are detected are measured. At this time, the background intensities of the characteristic X-rays at the positions where the characteristic X-ray peaks are detected are found based on a mean atomic number calculated using values which are derived by quantitative analysis based on the characteristic X-ray intensities measured by the EDS at the corresponding analysis positions on the sample. The background intensities are subtracted from the peak intensities at the positions where the characteristic X-ray peaks are detected by the WDS. Thus, the net characteristic X-ray intensities are found.

Abstract: A system and methods for identifying contents of an enclosure such as an air cargo container. A three-dimensional image indicative of at least one of the CT number and the density of contents of the enclosure is obtained using penetrating radiation such as x-rays. If one or more suspect regions are identified among contents of the enclosure, a collimated neutron beam is activated to traverse each suspect region and fluorescent emission from the suspect region is detected, allowing material within the suspect region to be characterized based at least on the detected fluorescent emission. Additionally, the collimated neutron beam may be employed for neutron imaging of the contents of the enclosure.

Abstract: One aspect relates to inducing at least one induced X-ray fluorescing photon within an at least some matter of an at least a portion of an at least one individual responsive to a substantial single input energy event based at least partially on an at least some input energy being applied to the at least some matter of the at least the portion of the at least one individual; and detecting the at least one induced X-ray fluorescing photon; and X-ray fluorescence visualizing, imaging, or information providing within the at least some matter of the at least the portion of the at least one individual responsive to the detecting the at least one induced X-ray fluorescing photon.

Abstract: A method for analyzing a sample includes directing one or more beams of X-rays to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed. Secondary X-ray radiation from the area is detected responsively to the one or more beams. A distribution of the nano-particles on the surface is characterized based on the detected radiation.

Abstract: In some embodiments, techniques are described for combining an X-ray detector (e.g., for providing EPMA) and an electron detector (e.g., for providing AES) to provide a tool for determining film compositions and thicknesses on a specimen, such as a semiconductor structure or wafer. In one embodiment, a system includes a beam generator configurable to direct a beam towards a specimen. The electron beam may generate Auger electrons and X-rays. The system may also include at least one electron detector disposed adjacent to (e.g., above) the specimen to detect electrons and measure their energies emanating from a top layer of the specimen. One or more X-ray detectors may be disposed adjacent to the specimen to detect X-rays.

Abstract: A method of deriving a quantitative measure of a degree of calcification of a blood vessel such as an aorta by processing an image such as an X-ray image of at least a part of the blood vessel containing said calcification comprises: taking a starting set of digital data representative of an image of at least part of a blood vessel containing a calcification set against a background; estimating the boundary of the calcification; using inpainting to replace digital data in said starting set representing the calcification with data extrapolating the boundary of the background to extend over the area of calcification, and so generating an inpainted set of digital data; and computing the difference between the starting set of digital data and the inpainted set of digital data to obtain a quantitative measure of the degree of calcification of the blood vessel.

Abstract: Systems, methods and apparatus are provided through which in one aspect, a three-dimensional (3D) image of an object is constructed from a plurality of two-dimensional (2D) images of the object using a specialized filter. In some embodiments, the specialized filter implements a linear ramp function, a windowing function, and/or a polynomial function. In some embodiments, the 3D image is back-projected from the filtered two-dimensional images, yielding a 3D image that has improved visual distinction of overlapping anatomic structures and reduced blurring.

Abstract: An ionising particle analyser comprises a source of ionising particles, a charged particle detector, and an ionisable gas located between the source and the detector. The analyser further comprises a charged particle impeding device located between the source and the detector. The charged particle impeding device is arranged to be maintained in a first configuration at a potential to impede the passage of charged particles and pass uncharged particles.

Abstract: There is provided a fluorescent X-ray analysis apparatus in which a detection lower limit has been improved by reducing an X-ray generating subsidiarily and detected. The fluorescent X-ray analysis apparatus is one which possesses an X-ray source irradiating a primary X-ray, and a detector in which a collimator having a through-hole in its center part has been placed in a front face, and in which, by the detector, there is detected a primary fluorescent X-ray which generates from a sample by irradiating the primary X-ray to a sample, and passes through the through-hole of the collimator.

Abstract: An analytical instrument is disclosed having both XRF and spark emission spectroscopy capabilities. In a particularly advantageous embodiment, a field portable XRF device is removably coupled to the instrument by means of a docking station. A first surface of the sample is irradiated with an X-ray beam, and the X-ray radiation fluorescently emitted from the sample is detected and analyzed to acquire elemental composition data. The instrument is further provided with a spark source located proximal a second surface of the sample and a detector for sensing the radiation emitted from the spark-excited material. The combined instrument enables the acquisition of complementary elemental composition data by XRF and spark emission spectroscopy without having to transport a sample between separate instruments.

Abstract: According to one embodiment, the present technique provides a phantom for testing imaging device. The exemplary phantom includes a first portion having groups of vessels, which are filled with a radiographically opaque substance (i.e., a contrast agent). The each group of vessels may extend from a central region of the first portion to the periphery of the central portion. The phantom may also include a second portion having a testing region. By way of example, the testing region may comprise a series of rings, each ring being configured to attenuate X-ray radiation differently. Adventurously, each ring may comprise materials configured to emulate different types and amounts of human tissue. For example, the exemplary phantom may include a ring, which emulates bone tissue, and a second ring, which emulates soft tissue. Moreover, each ring may be configured to emulate different amounts of tissue.

Abstract: A method and device to accurately obtain very small quantity of wear of the order of nanometers of a protective film on the surface of a sliding member. A quantity of wear on the surface of a measurement sample including a base and a coating layer is measured by making a spectrum of the surface elements in a reference sample using a surface-element analysis device which analyzes elements on the surface of a substance from an energy spectrum of charged particles obtained by applying excited ionization radiation on the reference sample equivalent to the measurement and by measuring charged particles generated from the surface of the substance. A step of obtaining signal intensity ratios of plural elements from the spectrum is repeated a plurality of times while the surface of the reference sample is being etched and calibration curves which indicate a distribution of the signal intensity ratios of the plural elements in the reference sample are made.

Abstract: This invention is directed towards finding, locating, and confirming threat items and substances. The inspection system is designed to detect objects that are made from, but not limited to, special nuclear materials (“SNM”) and/or high atomic number materials. The system employs advanced image processing techniques to analyze images of an object under inspection (“OUI”), which includes, but is not limited to baggage, parcels, vehicles and cargo, and fluorescence detection.

Abstract: An optic device, system and method for imaging are described. The optic device includes a first solid phase layer having a first index of refraction with a first photon transmission property and a second solid phase layer having a second index of refraction with a second photon transmission property, the solid phase layers being situated between an output face and a non-flat input face. The first and second layers are conformal to each other. The imaging system includes a source of electrons and a target, with an array of the optic devices coupled thereto to form limited cone beams of X-ray radiation.

Abstract: The material composition of a thin film formed on a substrate or covered by a cap layer that shares one or more elements with the thin film can be determined by combining characteristic material data, such as characteristic x-ray data, from a material composition analysis tool, such as an electron probe-based x-ray metrology (EPMA) operation, with thickness data and (optionally) possible material phases for the thin film. The thickness data and/or the material phase options can be used to determine, for example, the penetration depth of a probe e-beam of the EPMA tool. Based on the penetration depth and the thin film thickness, the characteristic x-ray data from the EPMA operation can be analyzed to determine the composition (e.g., phase or elemental composition) of the thin film. An EPMA tool can include ellipsometry capabilities for all-in-one thickness and composition determination.

Abstract: A specific macromolecule crystal evaluating device according to the present invention is equipped with a sample detecting stage for detecting a protein crystal in a sample container, an X-ray measuring stage that is spaced from the sample detecting stage and carries out X-ray diffraction measurement of the protein crystal, a feeding unit for feeding the sample container from the sample detecting stage to the X-ray measuring stage, and a central processing unit for recognizing the position of the protein crystal on the basis of the information achieved in the sample detecting stage and controlling the feeding unit on the basis of the position information to position the protein crystal to a sample disposing portion of the X-ray measuring stage.

Abstract: A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.

Abstract: Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein.

Abstract: Systems, methods and apparatus are provided through which in one aspect, a three-dimensional (3D) image of an object is constructed from a plurality of two-dimensional (2D) images of the object using a specialized filter. The specialized filter implements a linear ramp function, a windowing function, and/or a polynomial function. The 3D image is back-projected from the filtered two-dimensional images, yielding a 3D image that has improved visual distinction of overlapping anatomic structures and reduced blurring.

Abstract: The change in the sample size and a change in background intensity due to the coexisting element are measured in real time to thereby automatically change a measurement time, the detection lower limit is kept constant, so that a fluorescent X-ray apparatus is provided that is capable of measuring every time in the same detection lower limit even in a case where there have existed a change in size of a sample, a change in sensitivity due to a difference in main ingredient, and a change of a magnitude in background due to an influence of a coexisting element.

Abstract: An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.

Abstract: In various embodiments, techniques are described for combining an X-ray detector (e.g., for providing EPMA) and an electron detector (e.g., for providing AES) to provide a tool for determining film compositions and thicknesses on a specimen, such as a semiconductor structure or wafer. In one embodiment, a system includes a beam generator configurable to direct an electron beam towards a specimen. The electron beam may generate Auger electrons and X-rays. The system may also include at least one electron detector disposed adjacent to (e.g., above) the specimen to detect electrons and measure their energies emanating from a top layer of the specimen. One or more X-ray detectors may be disposed adjacent to the specimen to detect X-rays.

Abstract: A calculating device 10 for calculating the concentration of elements contained in a sample 13 based on the FP method is provided. The calculating device 10 is operable to assume a concentration of unmeasured elements as far as unmeasured elements, of which fluorescent X-rays are not measured, are concerned, and, also, to utilize, in place of the secondary X-rays emanating from the unmeasured elements contained in the sample, scattered X-rays of the primary X-rays at least equal in number to the number of the unmeasured elements, of which concentrations are assumed, and including scattered X-rays of different wavelengths before they are scattered from the sample.

Abstract: An analytical method for determining crystallographic phases of a measuring sample comprises the steps of acquiring a diffraction pattern of the measuring sample and qualitative phase analysis of the measured diffraction pattern, acquiring an element spectrum of the measuring sample and determining concentrations of chemical elements in the measuring sample from the acquired element spectrum, and carrying out a quantitative phase analysis of the measuring sample on the basis of the measured intensities of the acquired diffraction pattern thereby taking into consideration determined element concentrations as a boundary condition, wherein differences between calculated and measured intensities of the diffraction pattern and between calculated and determined element concentrations are simultaneously minimized in an iterative process. The inventive method permits quantitative phase determination with high reliability.

Abstract: An x-ray metrology system includes an e-beam generator to cause a test sample to emit x-rays, x-ray optics for focusing the x-rays, and an x-ray imager to generate an image of the test sample from the focused x-rays. Because the x-ray imager provides a direct representation of the x-ray emission characteristics of the test sample, the resolution of a measurement taken using such a sensor is limited only by the resolution of the sensor (and any focusing optics), rather than by the amount of e-beam spread in the thin film. The x-ray imaging can be performed for object planes at the test sample that are not parallel to the test sample, thereby allowing vertical dimension data to be accurately generated by the x-ray imaging system.

Abstract: This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to generate x-ray emission. This microprobe can be combined with energy-resolved detector or a fluorescence imaging system for material analysis applications.

Abstract: A method of reducing atom ejection from a sample during electron beam bombardment. An electron beam is directed through a low pressure environment toward a surface of the sample. The electron beam thereby impinges on the sample at a target location, and thereby causes characteristic x-ray emission from the target location of the sample. A capping precursor is introduced into the low pressure environment, where the capping precursor forms a capping layer on the surface of the sample at the target location when contacted by the electron beam. The capping layer thereby reduces atom ejection from the sample at the target location, while not appreciably impeding and confounding the characteristic x-ray emission from the target location of the sample.

Abstract: The invention provides method, system and device for determining trabecular bone structure and strength by digital topological analysis, and offers, for the first time, a demonstration of superior associations between vertebral deformity and a number of architectural indices measured in the distal radius, thus permitting reliable and noninvasive detection and determination of the pathogenesis of osteoporosis. A preferred embodiment provides imaging in three dimension of a region of trabecular bone, after which the 3D image is converted into a skeletonized surface representation. Digital topological analysis is applied to the converted image, and each image voxel is identified and classified as a curve, a surface, or a junction; and then associated with microarchitectural indices of trabecular bone to quantitatively characterize the trabecular bone network. The invention is applicable in vivo, particularly on human subjects, or ex vivo.

Abstract: An apparatus determines the thickness and composition of a multi-layered sample comprised of at least a copper layer and a tin-copper alloy plating layer disposed on the copper layer. The sample is irradiated with primary X-rays and an energy-dispersive X-ray detector detects fluorescent X-rays and diffracted X-rays emitted from the sample. An X-ray spectrum of the detected fluorescent X-rays and diffracted X-rays is generated. The concentration of copper in the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the diffracted X-rays in the X-ray spectrum. The thickness of the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the fluorescent X-rays in the X-ray spectrum and the determined copper concentration.

Abstract: The method for screening binding between a target binder and potential pharmaceutical chemicals involves sending a solution (preferably an aqueous solution) of the target binder through a conduit to a size exclusion filter, the target binder being too large to pass through the size exclusion filter, and then sending a solution of one or more potential pharmaceutical chemicals (preferably an aqueous solution) through the same conduit to the size exclusion filter after target binder has collected on the filter. The potential pharmaceutical chemicals are small enough to pass through the filter. Afterwards, x-rays are sent from an x-ray source to the size exclusion filter, and if the potential pharmaceutical chemicals form a complex with the target binder, the complex produces an x-ray fluorescence signal having an intensity that indicates that a complex has formed.

Abstract: A system for surgical imaging and display of tissue structures of a patient, including a display and an image processor for displaying such images in coordination with a tool image to facilitate manipulation of the tool during the surgical procedure. The system is configured for use with a fluoroscope such that at least one image in the display is derived from the fluoroscope at the time of surgery. A fixture is affixed to an imaging side of the fluoroscope for providing patterns of an of array markers that are imaged in each fluoroscope image. A tracking assembly having a plurality of tracking elements is operative to determine positions of said fixture and the patient. One of the tracking elements is secured against motion with respect to the fixture so that determining a position of the tracking element determines a position of all the markers in a single measurement.

Abstract: A method for surgical imaging and display including (i.) positioning a defined set of markers disposed in a pattern so as to be imaged in each pose or view of an imaging assembly, the set of markers being fixed in pre-determined positions in a rigid carrier, (ii.) securing a first tracking element against motion with respect to the rigid carrier so that determining a position of the first tracking element in a single measurement determines positions of all the markers of the set, and (iii.) identifying images of at least a subset of the markers in a first view.

Abstract: In order to provide a single, small apparatus capable of elemental and structural analysis of inorganic matter by utilizing X-rays having non-obstructive and non-contact characteristics there is provided a small, energy distribution type X-ray detector for detecting X-ray fluorescence and subjecting the X-ray fluorescence to elemental and quantative analysis, and a CCD line sensor for performing structural analysis. An X-ray tube target structure that is a Cu layer on an Mo layer is adopted. When excitation is performed using a low accelerating voltage, this is made monochromatic by using a Cu filter to filter the Cu—K lines and the continuous X-rays generated, with the radiation quality (Cu—K lines) thus generated then being utilized in X-ray diffraction.

Abstract: An x-ray fluorescence analyzer and method. The analyzer and method use a single radio-active source, such as, 241Am to determine the composition of a metal alloy or precious metal. The method compensates for Rayleigh scattering by first determining a scaling factor using a particular energy line in the spectrum of the test material and comparing that line to the same energy line for a pure metal. Based on the scaling factor the energy spectrum for the pure is compensated and then subtracted from the energy spectrum of the test material at discrete points.

Abstract: The present invention relates to the calibration and alignment of an X-ray reflectometry (“XRR”) system for measuring thin films. An aspect of the present invention describes a method for accurately determining C0 for each sample placement and for finding the incident X-ray intensity corresponding to each pixel of a detector array and thus permitting an amplitude calibration of the reflectometer system. Another aspect of the present invention relates to a method for aligning an angle-resolved X-ray reflectometer that uses a focusing optic, which may preferably be a Johansson crystal. Another aspect of the present invention is to validate the focusing optic. Another aspect of the present invention relates to the alignment of the focusing optic with the X-ray source. Another aspect of the present invention concerns the correction of measurements errors caused by the tilt or slope of the sample.

Abstract: Methods and apparatus are disclosed for detecting a thickness of a surficial layer (e.g., metal or insulating layer) on a workpiece (e.g., semiconductor wafer) during a process for planarizing the layer, so as to stop the process when a suitable process endpoint is reached. Layer thickness is detected based on a spectral-characteristic signal of reflected or transmitted signal light, obtained by directing a probe light onto the surface of the workpiece. Example spectral characteristics are local maxima and minima of signal-light waveform, differences or quotients of the same, a dispersion of the signal-light waveform, a component of a Fourier transform of the signal waveform, a cross-correlation function of the signal waveform. Alternatively, the zeroth order of signal light is selected for measurement, or a spatial coherence length of the probe light is compared with the degree of fineness of the pattern on the surface illuminated with the probe light.

Abstract: Samples such as semiconductor wafers may be subjected to an elementary analysis by irradiation by means of electrons and measurement of the X-rays 30 generated in the sample. In order to achieve a high spatial resolution, two adjacent holes 6, 8 are formed in the sample surface, leaving a very thin separating wall 10 between said holes and hence limiting the dimension of the interaction volume 24. However, electrons pass through the wall, thus generating disturbing X-rays in the walls of the hole 8 behind the wall. According to the invention the hole 8 behind the separating wall 10 is provided with a stopping material 12 of an elementary composition which deviates from that of the wall 10. If the wall to be analyzed contains silicon, the stopping material 12 should preferably be platinum or carbon.