Abstract: A feeding device for feeding small parts to be identified and picked up and a part handling apparatus and sorting apparatus including the feeding device. The feeding device includes a picking platform, a dispenser arranged to dispense the parts to the picking platform, and a return member. The feeding device also includes a decelerator connected to the dispenser to reduce the speed of the part to be fed to the dispenser.

Abstract: An object taking-out apparatus for taking out objects randomly stacked in a container according to a condition of how each object is placed, which includes a robot hand having telescopic means and a coupling member whose one ends are connected to a robot arm end, and holding means coupled to their other ends. The telescopic means expands and contracts to cause the holding means to assume either a first orientation where a small angle is formed or a second orientation where a large angle is formed between a holding direction axis of the holding means and a rotary axis of the robot arm end, thereby taking out objects without causing interaction between the robot and the container.

Abstract: An automated assembly system for assembling a truss from a plurality of truss members and connection plates includes a plurality of rail assemblies, a plurality of trolleys, a plurality of press assemblies, and a control system. The rail assemblies include stationary rail assemblies and moveable rail assemblies. The trolleys are supported by the rail assemblies. The press assemblies are supported by the trolleys. The press assemblies are configured to embed the connection plates into the truss members. The control system is programmed to control the operation of the automated assembly system. An ejector system is configured to remove assembled trusses from the automated assembly system.

Abstract: A test handler is disclosed, which comprises a test tray, at least one opening unit, and a position changing apparatus. The test tray aligns a plurality of inserts on its side. Each insert loads at least one semiconductor device thereon. The opening unit opens inserts at one part of the one side of the test tray. The position changing apparatus moves at least one opening unit in such a way that the at least one opening units can be located at another part of the one side of the test tray, such that the at least one opening units can open inserts at said another part of the one side of the test tray. The present invention can reduce the number of replaced parts according to change in the semiconductor device size, production cost, and part replacement time. Also, the present invention can be easily applied to various types of testers.

Abstract: The invention relates to a robot, comprising a horizontal linear axis with a movable carriage and a joint arm, the one end of which is connected to one of the ends of the carriage by means of a rotating joint in the direction of travel thereof, characterized in that the joint arm may rotate in a plane at an angle ? in the range of 45° to 90° to the horizontal and at least two joint arm pieces which may rotate relative to each other in said plane and with an effector, provided at the free moving end of the outer joint arm.

Abstract: In a card processing apparatus a card tray and, a card-transporting device are provided. A device for sensing the position or detention of a card in the card tray and a holding device for a card that has stopped in an irregular manner in the card tray due to manipulation of the card-processing apparatus, are also included. The holding device is activated if a change in the position of the card is not detected even though a conveying signal has been issued to the card-conveying device.

Abstract: An application for an efficient storage system includes objects held in containers or on frames. The objects are moveably organized within a building and organized in positions within a grid of rows and columns, each position large enough to hold the one of the objects. At least one empty position within the grid for shifting one of the objects from one position to another. At least one access location is provided for loading and unloading the objects and a mechanism is provided for moving the containers within the grid.

Abstract: The invention relates to apparatuses for moving cargo. In one embodiment, such an apparatus may have a plurality of torque tubes. Each of the torque tubes may comprise a member in the shape of a continuous, closed loop defining a hole extending along the member. Rollers may be attached between torque tubes to move cargo disposed on the rollers. The apparatus may be used in the cargo hold of an aircraft.

Abstract: Regarding predetermined positioning criteria (M1, M2), ((G1, G2), (N1, or N2), (K1, K2)), there is provided image processing means (40B) for obtaining by image processing, measured values (CD1, CD2) ((GD1, GD2), (ND1, or ND2), (KD1, KD2)) and reference values (CR1, CR2) ((GR1, GR2), (NR1, or NR2), (KR1, KR2)), and for moving a work (W) in a manner that the measured values (CD1, CD2) ((GD1, GD2), (ND1, or ND2), (KD1, KD2)) and the reference values (CR1, CR2) ((GR1, GR2), (NR1, or NR2), (KR1, KR2)) coincide with each other, thereby positioning the work (W) at a predetermined position.

Abstract: A substrate transport apparatus includes a first substrate transport robot, a second substrate transport robot and a substrate transfer mechanism. The first substrate transport robot includes an upper hand and a lower hand vertically arranged. The second substrate transport robot includes an upper hand and a lower hand vertically arranged. The substrate transfer mechanism includes an upper hand and a lower hand vertically arranged and a hand driving mechanism adapted to perform hand opening and closing operations to vertically move the upper and lower hands.

Abstract: An actuator system for making a nanoscale movement of an object is provided. In the actuator system, a platform supports the object. A Z-axis actuator connects the platform to the object in a Z-axis direction, and moves the object in the Z-axis direction by Z-axis direction transformation. A frame supports the platform around the platform. An X-axis actuator connects the frame to the platform in an X-axis or Y-axis direction perpendicular to the Z-axis, and moves the object in the X-axis direction by transformation in the direction perpendicular to the Z-axis.

Abstract: The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

Abstract: A reciprocating forward-feed device for the clocked linear forward-feed of stacks of goods over a transport path has a double-arm rotatable forward-feed lever with two pushers which operate in a clocked manner. Forward-feed lever and pusher are driven in a controlled manner by means of a four-arbor arrangement with a linear arbor, rotational arbor and pivot arbor for the pushers linked via guide rods and a return swivel arbor.

Abstract: A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping a substrate placed on the pocket part of the hand when a hand returns to a groove position from a pickup position. The grip member may include a pusher and an elastic member. The pusher has a curved section contacting the edge of a substrate and is mounted on the base to move in the same direction as the at least one hand, and the elastic member supplies an elastic force for enabling the pusher to laterally press the edge of the substrate.

Abstract: A linear moving mechanism includes a guide member providing a horizontal straight transport path, a moving member movable along the transport path and a drive mechanism which drives the moving member. The drive mechanism includes a first link arm pivotable around a first vertical shaft, and a second link arm having a first end and a second end. The first vertical shaft is on the transport path or on a line parallel to the transport path. The first end is connected to the first link arm for pivotal movement of the second link arm in a horizontal plane, whereas the second end is connected to the moving member for pivotal movement of the second link arm in a horizontal plane.

Abstract: In a transfer arrangement and method for transferring a workpiece between first and second spaced locations along a guide rail with a carriage movably supported on the guide rail, a transfer arm is pivotally supported on the carriage and carries at its free end a workpiece holder which is accelerated by the carriage with the arm essentially stretched out in the movement direction out of, and decelerated into, the end positions, and, in an intermediate position, the carriage movement is slowed down or even reversed while the workpiece holder is moved along by a pivot movement of the arm.

Abstract: There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.

Abstract: A robotic arm for transporting products in a product storage and dispensing system is disclosed. The robotic arm broadly includes a base operable to couple the arm to the dispensing system; a sprocket coupled with the base; an extendible arm segment coupled with the base; and a chain coupled with the sprocket and the extendible arm segment such that rotation of the sprocket causes movement of the chain and extension of the extendible arm segment. The robotic arm provides a compact and effective retrieval tool that is compatible with closely spaced and densely packed product shelves.

Abstract: The invention relates to a device for the transport of work pieces with at least one transport device (T1, T2) which can be installed on a frame (14) of a processing device (P) and which has a transport bar (15) which is kept moveable in X- and Y-direction. To increase the rigidity of the device, it is suggested that the transport bar (15) be kept moveable with at least two parallelogram servo drives (PL1, PL2).

Abstract: A panel conveying apparatus for a press line comprises a shuttle feeder and at least one panel position regulating device. The shuttle feeder is configured to be movable between presses. The panel position regulating device is mounted on the shuttle feeder and includes a panel guide unit, a rotating screw axis unit, and a link unit. The panel guide unit is configured to guide the panel. The rotating screw axis unit comprises a rotating screw axis and an actuator rotating the rotating screw axis. The link unit connects the panel guide unit and the rotating screw axis unit such that a vertical position of the panel guide unit is regulated in response to a rotation of the rotating screw axis.

Abstract: An apparatus for transferring semiconductor devices in a semiconductor device handler is provided which simplifies set up procedures when a species of device to be tested, and the associated change kit, is changed. A reference picker and three variable pickers are positioned within the framing structure of the handler, with the motion of the third variable picker synchronized relative to the motion of the first and second variable pickers. A plurality of sensors determine an initial position of the variable pickers, and then motion of the variable pickers is monitored by respective scanning heads and linear scales until a new setup position which corresponds to the new device species is attained. In this manner, the procedure and structure for varying position and pitch of the various pickers can be simplified, thus reducing processing time and cost.

Abstract: A bar stock loader for an elongate member and a method for use is includes a support apparatus with a support surface for supporting the elongate member and a translation apparatus proximate to the support apparatus. The translation apparatus is moveable and has an arm and a lifting mechanism for raising and lowering the arm. The translation apparatus is moveable between a first and second position whereby, when the translation apparatus is in the first position, the arm is positioned overlapping the support surface for receiving the elongate member, and when in the second position the arm is horizontally displaced from the support surface.

Abstract: A transfer line for transporting workpieces from a first workstation to an adjacent second workstation comprises a frame with a depositing place for at least one workpiece. It further comprises a transporting beam, each end area of which having respective work supports. The transporting beam is supported for height adjustment between two positions of lifting such that the work supports are located above or below the depositing place. The transporting beam is further designed for longitudinal displacement between positions of transfer for the work supports to coincide horizontally with the depositing place.

Abstract: An apparatus for mounting semiconductors contains a bonding station, whereby the bonding station comprises a wafer table for presenting the semiconductor chips, a substrate table and a pick and place system with a bondhead with a chip gripper. Part of the wafer table is located underneath the substrate table. The pick and place system has a first linear motor that comprises a rigidly arranged stator and a shuttle that can be moved in a first direction guided by first guide elements, and a second linear motor that comprises a rigidly arranged stator and a shuttle that can be moved in a second direction. The shuttle of the first linear motor has second guide elements that guide the shuttle of the second linear motor. The bondhead with the chip gripper is arranged on the shuttle of the second linear motor.

Abstract: The present invention provides a carrier elevating apparatus suitable for a low floor type conveying apparatus with carriers. A cam rail 36 extends along a horizontal running track, along which a carriage runs. The carriage includes a deck 1, on which an erectable cross-linking mechanism 3 is mounted. The cross-linking mechanism 3 supports and vertically moves a carrier 2A. The cross-linking mechanism 3 includes a link 14a and a link 14b. The link 14a is supported at its lower end pivotably by the deck 1 through a fixed horizontal pivot shaft 16. The links 14a and 14b are connected together at their middle points by a fulcrum shaft 15, which is parallel with the pivot shaft 16. The link 14a is fitted with a driven member 25 between the shafts 15 and 16. An elevator 27 is supported vertically movably by the deck 1. The elevator 27 includes a bearing member 32 fixed to its top and a cam follower 34 supported by its bottom.

Abstract: Apparatus for a dual powered actuator system. The system comprises a support member supporting an article in movement along a first direction and a second direction. A precision actuator is coupled with the support member and responsive to an input signal to selectively move the support member. A fluid actuator is also coupled with the support member to selectively move the support member. An active fluid regulator provides a first pressure to the fluid actuator in the first direction of the support member and a second pressure to the fluid actuator in the second direction of the support member, wherein the first and second pressures are different. A controller activates the active fluid regulator and the precision actuator.

Abstract: The machine according to the invention comprises: a lower frame fitted with a linear guide system (21), a mobile carriage (23) comprising a front half-carriage (24) and a back half-carriage (25), each half-carriage including: a rigid bridge installed free to slide on the linear guide systems (21), a motorised device (37) for driving at least one belt in rotation, at least a first return device (41) for at least one belt, at least one endless driving belt (38) installed between the motorised drive device (37) and the return device (41) and delimiting a receptacle gripping and movement path, and a system (61) for moving one half-carriage away from or towards the other half-carriage.

Abstract: A transfer system provided, in particular, for multi-stage presses for large components is distinguished by a favorable design with a low moving mass and allows large transporting steps. By the regulation of 2 stationary drives both in the direction of rotation in relation to one another and in the rotational speed, it is possible to realize all desired traveling curves in one plane. A straightforward construction makes possible a cost-effective, modular solution for a highly dynamic transfer system.

Abstract: A semiconductor wafer transfer apparatus includes a wafer supporting block to support a semiconductor wafer, a casing which is formed along a moving path of the wafer supporting block and having a guiding slot through which a part of the wafer supporting block passes, a driving part which is accommodated in the casing and moves the wafer supporting block, a connection part which connects the driving part with the wafer supporting block, and a shield part which shields the driving part from the guide slot. Accordingly, dust and particles generated inside the casing is effectively prevented from leaking out through the guide slot.

Abstract: There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer apparatus 4 comprising a transfer arm 17 which comprises: two rotating shafts 5 and 6 arranged coaxially or in parallel; a pair of first arms 7 and 8, one end portions of which are fixed to the rotating shafts 5 and 6, respectively; a pair of second arms 10 and 11, one end portions of which are connected to the other end portions of the pair of first arms 7 and 8 by means of pins, respectively; and a holding portion 14 for holding an object w to be processed, the holding portion 14 being connected to each of the other end portions of the pair of second arms 10 and 11 by means of pins, wherein the second arms 10 and 11 cross each other.

Abstract: A production line (1) is constituted of a sliding path (10) as a moving path provided along nine working step positions from a first step position (P1) to a ninth step position (P9), nine skids (20) as support-receipt plates slidably mounted on the sliding path (10) every predetermined interval so as to correspond to the step positions (P1) to (P9), and driving mechanisms (30), that is, (31A), (30B) and (30C) as moving and driving mechanisms for moving and driving the skids (20).

Abstract: A polar coordinate stage that may be used in a chamber includes a rotating chuck that moves in a linear direction and has the motors that drive the motion of the chuck outside the chamber. The stage can include a linkage of arms to support and drive the linear motion of the chuck. The chuck is coupled to a horizontal rail such that rotational motion of a first arm is translated into precise linear motion of the chuck along the horizontal rail through a second arm. In addition, a system of pulleys within the arms translates rotational (or linear) motion through the arms and rotates the chuck. Vertical motion may be provided by an actuator between the second arm and the chuck or by a motor under the stage. Because of the compact nature of the stage, it can be easily placed within a chamber.

Abstract: A position control apparatus of a feeder stage is disclosed, at which a tape reel for feeding parts to be mounted on a PCB is mounted in a surface mount device (SMD). The position control apparatus includes a feeder stage disposed inside a base frame of a SMD, a height/rotation power transmission device for controlling a height (Z) and a rotation angle (?) of the feeder stage, a first power transmission device for controlling the X-axis position of the feeder stage, and a second power transmission device for controlling the Y-axis position of the feeder stage. Therefore, the apparatus can be easily controlled the mounting position of the tape reel by controlling the position of the feeder stage at which the tape reel is mounted in the SMD.

Abstract: A manufacturing system is provided for automatic assembly, testing and/or packaging of a variety of products. The system is based on utilization of one or more robotic modules, each having a programmable servo-driven linear actuator of a rod type, combined with slides, and standardized extrusions that form guide rails and a frame to support the actuators. The standardized extrusions include a plurality of faces, with a groove formed in at least one of the faces. Each slide fits in one of the grooves and is attached to the actuator rod, which moves the slide along the guide rails. The guide rails provide structural support to the slides in every direction that a load is attached to the slides, and include grooves to direct the motion of the slides. Two or more such robotic modules, each being positioned in a Cartesian coordinate relationship to one another, complete a system. Each module houses a dedicated controller that operates its respective actuator.

Abstract: A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process chamber. The transfer apparatus has a pair of generally parallel and spaced-apart transfer bodies and a workpiece holder connected to the transfer bodies for supporting the workpiece. A feeding mechanism feeds the transfer bodies in a longitudinal direction thereof to position the workpiece holder and the workpiece in the process chamber.

Abstract: There is provided a pick and place apparatus including a cam apparatus which comprises an input shaft (5); a first output shaft (7); rotational motion converting cam mechanism (21); a slider member (9); a relative rotation regulating cam mechanism (31); a cam link mechanism (41); a second output shaft (11); and a motion converting cam mechanism (51) engaged with and between the second output shaft and the slider member; an arm member (66) fixed on the first output shaft which is telescopic in the radial direction of the first output shaft; and a telescopic driving means (69) that converts the relative rotation generated between the first output shaft and second output shaft into an expansion or contraction of the arm member.

Abstract: A workpiece transfer device for machine tools that easily achieves positional adjustment of the rack while suppressing increases in cost and therefore preventing occurrences of vibrations and noise is disclosed. The workpiece transfer device includes a frame member having a rectangular cross-section. The device extends from a workpiece machining position to a workpiece loading/unloading position. A support member is hung on the frame member so as to be movable via a linear guide and which has a workpiece holding mechanism mounted thereon. A drive mechanism for rotationally driving a pinion gear engaged with a rack is provided on the frame member so as to be parallel to the linear guide so that the support member is moved between the two positions. The linear guide is disposed on one wall of the frame member and the rack is disposed on another wall surface so as to have its position adjustable.

Abstract: A manipulator device for the repositioning of parts having at least one pivot arm able to be driven to perform an oscillating pivotal movement about a pivot axis, such pivot arm so acting during the pivotal movement on a gripper carrier serving for carrying a gripper that the gripper carrier is shifted in position without changing its alignment in space along a predetermined manipulation path. The gripper carrier is connected with a cam follower, engaging a path cam defining the desired course of the manipulation path and extending some distance about the pivot axis. Furthermore, in order to move along a manipulation path at least partially departing from a circular path, the gripper carrier is movably arranged in relation to the pivot axis in a direction which is radial with respect to such radial direction so that it may perform a radial movement combined with the orbital movement about the pivot axis.

Abstract: The invention relates to a device for conveying electrodes, used in the electrolytic refining or electrowinning of metals, from one station to another, particularly when the electrodes are conveyed in an essentially perpendicular direction with respect to the line connecting the electrode support points. According to the invention, in order to convey an electrode, the device is provided with mutually separate members, at least one lift member for a vertical motion of the electrode and at least one conveyor member for the horizontal motion of the electrode.

Abstract: In a method for automated sorting of objects and combining the objects to assortments according to a selectable sorting specification, the objects are removed from a supply and an object sorting position for the objects is determined, respectively, by a control unit according to a sorting specification. The objects are placed onto a belt conveyor in an intermediate position in proximity to the object sorting position by at least one first manipulating device acting as a feeding device. The objects placed onto the belt conveyor are continuously conveyed into a working area of controllable second manipulation devices acting as placing devices arranged downstream of the feeding device. The objects are gripped by the placing device and positioned in the object sorting position determined for the objects.

Abstract: A work transferring and transporting apparatus has a plurality of transportation tables. A plurality of work holders for holding works are formed on the respective peripheral edge portions of the transportation tables. Each work is transferred between each pair of adjacent transportation tables and transported. A work transfer section is provided between the adjacent transportation tables. The adjacent transportation tables continuously rotate in synchronism with each other. In the work transfer section, the work having so far been held in one of the work holders of the one transportation table is transferred to one of the work holders of the other transportation table.

Abstract: A micro device product system is provided which includes a feeder/programming/loader system. The feeder/programming/loader system has a flexible feeder mechanism for receiving unprogrammed devices in a number of different manners, a programming mechanism for performing a programming operation on the unprogrammed devices at a high rate of speed, and a loader mechanism for receiving and storing the programmed devices for use in subsequent assembly operation.

Abstract: A method for programming a multi-axis actuator system to perform palletizing uses an intuitive user interface having a data entry screen for palletizing data, which requires only a simple setting of minimal parameters including the number of rows and columns in a pallet and the pitch spacing between pallet positions. Actuator positions necessary for palletizing movements are calculated in real time by an algorithm executed in a digital signal processor of the actuator controllers. Palletizing data entries are stored in a motion profile table in a range of consecutively paired indexes which is separated from the index range dedicated to regular single-step or torque moves.

Abstract: Pick-up and placement apparatus including an arm that executes pick-up and placement motions and an arm drive mechanism. The drive mechanism comprising a driven rotating member having an appointed range of rotation, a swiveling member slidably attached to the rotating member and swiveling in an appointed range of rotation by normal and reverse rotations of the rotating member, a connection portion directly or indirectly linked with the arm, a retaining member applying a retaining force to retain the swiveling member at an appointed position in a radial direction with respect to the rotating member while slidably retaining the swiveling member, and an apparatus regulating and guiding said connection portion to linearly move the connection portion by directly or indirectly regulating the swiveling member in the vicinity of both ends of in the range of rotation.

Abstract: An improved conveyor system (20) for transporting a microelectronic workpiece (w) within a processing tool (14, 16) is set forth. The conveyor system (20) includes a transport unit (30, 32) slidably guided on a conveyor rail (26) for transporting and manipulating the workpiece (w). The transport unit (30, 32) includes a vertical member (220) which is connected to a base end of a two section robot arm (100). The robot arm (100) includes an end effector (108) at a distal end thereof which is actuated to grip a surrounding edge of a workpiece (w). A first rotary actuator (200) is arranged to rotate the vertical member (220) about its axis to rotate the entire robot arm (100). A second rotary actuator (240) is positioned to rotate the second section (114) of the robot arm (100), via a belt, with respect to the first section (110) of the robot arm (100). A third rotary actuator (302) is arranged to rotate the end effector (108) about its horizontal axis.

Abstract: A two axis, two drive mechanism, two belt design Cartesian robot wherein each axis is independently controlled and all applied forces are along the centerline of the robot structure. This unique design allows for the use of a low cost control system since a so-called “multi-axis motion controller” is not required. Co-location of the drive systems allows support of the robot from one end. Centering of forces acting on a carriage assembly allows for the reduction of the weight of the robot for a given payload.

Abstract: A workpiece transfer device for machine tools that easily achieves positional adjustment of the rack while suppressing increases in cost and therefore preventing occurrences of vibrations and noise is disclosed. The workpiece transfer device includes a frame member having a rectangular cross-section. The device extends from a workpiece machining position to a workpiece loading/unloading position. A support member is hung on the frame member so as to be movable via a linear guide and which has a workpiece holding mechanism mounted thereon. A drive mechanism for rotationally driving a pinion gear engaged with a rack is provided on the frame member so as to be parallel to the linear guide so that the support member is moved between the two positions. The linear guide is disposed on one wall of the frame member and the rack is disposed on another wall surface so as to have its position adjustable.

Abstract: In order to provide a method of carrying out working steps in at least one work station on miniaturized modules which are held by a module carrier provided with a holding device, whereby the method enables a plurality of processing steps to be carried out on a module, it is proposed that the module be moved by one of the module carriers to a plurality of work stations for carrying out the working steps and that it be precisely positioned for carrying out one of the working steps by means of a relative movement between the module carrier and the currently relevant one of the plurality of workstations, and in that the positioning of the module relative to the module carrier be maintained for carrying out the working steps.

Abstract: A surface mounting device is provided on which work can be performed more efficiently and correctly by providing one or more moving means movable together or independently to a predetermined portion of a X-Y gantry. The surface mounting device includes one or more X frames configured to be driven in a predetermined direction together or independently; main driving means for driving the one or more X frames; one or more moving means disposed on a selected portion of the X frames and having one or more manipulators movable in a predetermined direction together or independently; sub driving means configured to drive the one or more manipulators together or independently; one or more head and vision portions disposed on the one or more moving means; and a component supplying portion configured to supply a component to the head.

Abstract: Disclosed is an apparatus for transferring semiconductor devices in a semiconductor device enabling to simplify the structure for varying pickers for picking up semiconductor devices as well as accomplish fast and precise variation, of the pickers, and includes rectangular frames installed movably on a handler body, stators of two linear motors installed on inner sides of two of the frames adjacent, respectively, movers of the two linear motors installed to move along the stators, respectively, a reference pickup member fixed to an inner corner between the frames to pick up the semiconductor device, first and second pickup members coupled with the movers of the linear motors to move along the frames, respectively, a first guide member fixed to the first pickup member to be in parallel with the frame, a second guide member fixed to the second pickup member to be vertical the first guide member, and a third pickup member coupled with both of the first and second guide members to move along the second and first