Abstract: A linear handling unit is provided with a first body (11), which carries opposite linear bearings (16) in the front and a fluid-type linear actuator (19). A second body carries, longitudinally, two lateral studs (29) for guiding and for coupling with the linear bearings for the movements of one body on the other. The linear actuator is connected to the second body. The studs (29) are arranged in two parallel, flexible-expandable flanges (26) integral with the second body carrying the studs. An adjusting bar (31) is arranged between the studs.

Abstract: An apparatus comprising a frame, a mobile platform and first and second linearly-actuated slides supported on a base connected to the frame. The first and second slides are movable along a line defining a first axis. The apparatus may include a first driving connector movably coupled to the first slide and to the mobile platform, and a second driving connector movably coupled to the second slide and to the mobile platform, such that the mobile platform is displaceable within at least two degrees of freedom defined by linear motions along the first axis and a second axis, the second axis being coplanar and orthogonal to the first axis. An end effector may be also coupled to the mobile platform, the end effector having an axis aligned in a direction defined by the second axis. The end effector may comprise, for example, a tool or a gripper.

Abstract: A tape feeder for feeding electronic components by advancing a tape intermittently, the tape feeder comprises a motor controller for controlling a motor, which rotatively drives a sprocket to advance the tape, and a communication unit for receiving a control signal from a control unit of an electronic component mounting apparatus and transmitting a control parameter such as a rotating speed, an amount of rotation, and acceleration and deceleration pattern to the motor controller. This makes the tape feeder of such a structure that a tape advancing speed and an amount of tape advancement are easily changeable according to a type of the electronic components by changing the control parameter of the rotating speed and the amount of rotation of the motor.

Abstract: A coating method for a hollow substrate including: (a) forming a seamed extended substrate unit composed of a substrate extension device and the substrate, and employing a chuck assembly to internally grip the substrate; (b) dip coating the extended substrate unit while the chuck assembly internally grips the substrate to deposit a layer first on the substrate extension device and then on the substrate; and (c) separating, subsequent to the dip coating the extended substrate unit, the substrate extension device from the substrate.

Abstract: A wafer transferring robot capable of restraining the vibration of wafers during the transfer. The robot comprises a rotating base (2) rotatable on a base (1), two horizontally extensible robot arms (3A, 3B) arranged laterally symmetrically to each other on the rotating base (2) and comprising first arms (32A, 32B), second arms (33A, 33B), and third arms (34A, 34B), respectively, and chucks (4A, 4B), fixed to the third arms (34A, 34B), respectively; wherein the lower surface of the second arm (33B) of one robot arm (3B) is higher than the upper surface of the wafer (WA) held over the third arm (34A) of the other robot arm (3A) via the chuck. Accordingly, the rigidity of transferring parts can be so enhanced that the vibration of wafers (WA, WB) can be prevented.

Abstract: The invention concerns an arrangement for wafer inspection, having a device (3) for transporting the wafers (S) from a transfer station (5) to at least one inspection station (7, 9). For transportation of the wafers (S), the device (3) comprises a feeder (4), rotatable about a rotation axis (Z), having at least one wafer support (14) whose position is pivotable, with the rotation of the feeder (4), between the transfer station (5) and inspection station (7, 9); and a drive device (18) that is coupled to the feeder (4) and with the activation of which the feeder (4) is caused to rotate through a predefined reference rotation angle.

Abstract: A method and apparatus are provided for substrate handling. In a first aspect, a temperature adjustment plate is located below a substrate carriage and is configured such that a substrate may be transferred between the temperature adjustment plate and the substrate carriage by lifting and lowering the substrate carriage above and below the top surface of the temperature adjustment plate. The temperature adjustment plate may be configured to heat and/or cool a substrate positioned thereon. In a second aspect, the substrate carriage is magnetically coupled so as to rotate and/or lift and lower magnetically, thereby reducing particle generation via contact between moving parts (and potential chamber contamination therefrom). In a third aspect, a substrate handler positioned below the substrate carriage is both magnetically coupled and magnetically levitated, providing further particle reduction.

Abstract: A parts mounter including a unit for supplying a part, circuit board supporting means for fastening a circuit board when mounting a part, parts mounting means including a mechanism loaded with a suction nozzle and for vertically moving the suction nozzle when sucking and holding a part, and for positioning the suction nozzle at any position, and nozzle exchanging means including a mechanism for removing and installing a requested suction nozzle from and to the parts mounting means. The parts mounting means further includes a nozzle existence checking sensor for performing detection of conditions of a suction nozzle loaded to the parts mounting means.

Abstract: A vacuum apparatus used for a semiconductor manufacturing process or the like is provided, which is space-saving and provided at low cost. A work-piece is transferred to a transfer chamber from the outside under an atmospheric pressure and disposed on a work-piece holder hand inside the transfer chamber, and the transfer chamber is blocked from the outside and the inside of the chamber is made to be in a vacuum. Thereafter, a gate valve provided between the transfer chamber and the process chamber is opened and a pair of tapes made of an elastic material of the transfer apparatus set inside the transfer chamber is extended to the inside of the process chamber. The work-piece disposed on the work-piece holder hand, which is provided in the tip end portion of the tape, is set in the process chamber, or the work-piece having finished processing is disposed on the work-piece holder hand, thereby returning the object to the transfer chamber by returning the tape.

Abstract: An easily installed inter-row transfer unit is disclosed employing a movable cartridge bin assembly suspended via linkage from a pair of bearing blocks, wherein the resulting bin assembly carriage travels horizontally along a support housing extending between front-to-back arrangements of rows of library systems, to enable expansion of the library systems into very large mass storage systems. The pair of bearing blocks of the bin assembly carriage are spread or closed to respectively raise or lower the bin assembly from or into a respective library system. Thus, vertical as well as horizontal motions of the bearing blocks are controlled by a motor/cable drum drive device secured to the support housing. In a preferred embodiment, a trapdoor mechanism and a cooperating roller support mechanism are used to enable reversing the direction of horizontal translation of the bin assembly carriage with a single motor/cable drum drive device. Various other embodiments and modifications are illustrated.

Abstract: A workstation has a transfer device with a gripper which is suitable for gripping sample tubes by a gripper clamp and for moving them from a sample tube rack to a sample tube bucket, for example for centrifuging. The transfer device has a receiving device (23) which can be gripped on a cylindrical upper handling part (25) by the gripper and removed from a holder (24) in which it has been placed in a defined position. It has an intermediate part (33) with, on its lower end, four hooks (37) which are arranged at the apices of a rectangle and can engage eyes in the sample tube buckets. After use, the receiving device (23) is replaced in the holder (24).

Abstract: A workpiece support and an apparatus including such a workpiece support are set forth. The workpiece support includes a set of grooved members for supporting a series of workpieces. The workpieces may be similarly shaped, e.g. circular or rectangular, and similarly sized, each having a front face and a back face. An outer perimeter of each workpiece may be beveled at both faces, beveled at one face, unbeveled, convex, or concave. Each grooved member has a series of similar grooves. Being adapted to receive such a workpiece, each groove has a bearing wall and a wedging wall shaped and oriented so that a line normal to the wedging wall intersects but is not normal to the bearing wall. For many applications, two grooved members are employed, which are parallel to one another, spaced from one another, and oriented so that the grooves of the grooved members are generally aligned.

Abstract: A workpiece loader/unloader system for an industrial machine, such as a hemmer, is disclosed. The system includes a single pocket shuttle movable between an extended position in which the shuttle overlies a work station on the industrial machine, and a retracted position in which the shuttle is laterally spaced from the work station. A gripper on the shuttle selectively engages and supports the workpiece after the workpiece has been machined at the work station. A loader manipulator is movable between a preload position in which the loader supports an unmachined workpiece at a position laterally spaced from the work station, and a load position in which the loader manipulator overlies the work station. An actuator moves the loader manipulator between the preload and load position.

Abstract: A substrate processing apparatus comprises a processing section for performing processing for a substrate, a substrate carrier transfer section into/out of which a substrate carrier holding a plurality of substrates is carried, and a substrate transfer mechanism for taking an unprocessed substrate out of the substrate carrier carried into the substrate carrier transfer section to deliver it to the processing section and for receiving a processed substrate from the processing section to deliver it into the substrate carrier placed on the substrate carrier transfer section. The substrate carrier transfer section shifts the position of the substrate carrier between a first position at which the substrate carrier is carried to/from the outside and a second position at which the substrate in the substrate carrier is delivered to/from the substrate transfer mechanism.

Abstract: An improved tool mount structure allows the infinite placement of a tool along a generally elongate cylindrical member at an infinite number of locations. The elongate cylindrical member is fixed at each axial end to a generally rigid moving member such as a robotic arm boom or transfer bar. The cylindrical member is fixed in a bracket at one axial end, and into a quick-release mount at an opposed axial end. The cylindrical member may be quickly release from the moving member such that the tool may be easily changed. At the same time, by fixing the cylindrical member at each axial end, a secure rigid connection is provided.

Abstract: A precision positioning unit composed of a table on which an article is to be placed, a linearly movable rod which is connected with the table at one end and further connected with a rod actuating device at another end, in which the rod actuating device is capable of linearly moving the rod forward and backward, has the following characteristics:

Abstract: A manufacturing system is provided for automatic assembly, testing and/or packaging of a variety of products. The system is based on utilization of one or more robotic modules, each having a programmable servo-driven linear actuator of a rod type, combined with slides, and standardized extrusions that form guide rails and a frame to support the actuators. The standardized extrusions include a plurality of faces, with a groove formed in at least one of the faces. Each slide fits in one of the grooves and is attached to the actuator rod, which moves the slide along the guide rails. The guide rails provide structural support to the slides in every direction that a load is attached to the slides, and include grooves to direct the motion of the slides. Two or more such robotic modules, each being positioned in a Cartesian coordinate relationship to one another, complete a system. Each module houses a dedicated controller that operates its respective actuator.

Abstract: A position control apparatus of a feeder stage is disclosed, at which a tape reel for feeding parts to be mounted on a PCB is mounted in a surface mount device(SMD). The position control apparatus includes a feeder stage disposed inside a base frame of a SMD, a height/rotation power transmission device for controlling a height (Z) and a rotation angle (&thgr;) of the feeder stage, a first power transmission device for controlling the X-axis position of the feeder stage, and a second power transmission device for controlling the Y-axis position of the feeder stage. Therefore, the apparatus can be easily controlled the mounting position of the tape reel by controlling the position of the feeder stage at which the tape reel is mounted in the SMD.

Abstract: An improved pitch and roll mechanism is disclosed herein which provides for increased flexibility, stability, and accuracy of motion in positioning a miniaturized electronic component in a flip chip bonding system. The pitch and roll mechanism generally includes a pitch axis assembly comprising a plurality of bearing surfaces, each possessing a circular curvature, and at least one roller bearing in operative contact with at least one of the aforementioned pitch axis bearing surfaces. In addition, a roll axis assembly, mounted at a right angle, or perpendicularly, to the pitch axis assembly, is provided. The roll axis assembly typically includes a plurality of bearing surfaces, each possessing a circular curvature, and at least one roller bearing in operative contact with at least one of the aforementioned roll axis bearing surfaces. The curvatures of the pitch and roll axis bearing surfaces are such that a single, coincident center of rotation for both the pitch and roll axis assemblies is created.

Abstract: A workpiece support and an apparatus including such a workpiece support are set forth. The workpiece support includes a set of grooved members for supporting a series of workpieces. The workpieces may be similarly shaped, e.g. circular or rectangular, and similarly sized, each having a front face and a back face. An outer perimeter of each workpiece may be beveled at both faces, beveled at one face, unbeveled, convex, or concave. Each grooved member has a series of similar grooves. Being adapted to receive such a workpiece, each groove has a bearing wall and a wedging wall shaped and oriented so that a line normal to the wedging wall intersects but is not normal to the bearing wall. For many applications, two grooved members are employed, which are parallel to one another, spaced from one another, and oriented so that the grooves of the grooved members are generally aligned.

Abstract: The disclosure relates to a device for handling objects to package the same. The handling device comprises a lifting head (17) placed in an extension arm (16) having multiple levers (59, 60, 61), with ends (62, 67) placed on linear drives (63, 68) that can be independently controlled and are flexibly interconnected to the opposite ends (65, 69). The displacement of the linear drives (63, 68) makes it possible to move back and forth the ends (62, 67) of the levers (59, 60, 61) that are flexibly connected to the linear drives (63, 68), thereby enabling the ends (62, 65, 67, 69) of the levers (59, 60, 61) to pivot. These pivotal movements allow the lifting head (17) that is placed on the extension arm (16) to move up and down in a vertical direction and back and forth in a horizontal direction.

Abstract: An apparatus and method for inserting and removing a wafer into and from a plating apparatus, includes an elongated primary arm having a wafer seat for supporting the wafer, an elongated secondary arm for supporting the primary arm, and a mounting surface for supporting the secondary arm. The apparatus further includes a drive band mechanically coupled to the primary arm for causing the movement thereof. The drive band includes a portion wound around a drum that is driven by a motor. The motor, in rotating the drum, causes the drive band to move the primary arm along an axis between a retracted position wherein the primary arm, the secondary arm, and the mounting surface are in a stacked relationship, and an extended position wherein the secondary arm protrudes from the mounting surface along the axis, and the primary arm protrudes from the secondary arm along the axis.

Abstract: The harness accommodating device (1) of the present invention is equipped with a transfer section (10) which is installed on the discharge side of the harness discharge groove (67) of the harness manufacturing apparatus (60) and which temporarily holds the harnesses (80), a chuck (20) which grips and conveys the harnesses (80) held by the transfer section (10), and a bundle receiver (30) which accommodates the harnesses (80) conveyed by the chuck (20).

Abstract: A substrate processing apparatus comprises a substrate processing chamber, a transfer chamber, a substrate mounting body having a through hole formed in a vertical direction and being provided in the substrate processing chamber, a substrate lifting member capable of vertically moving in the through hole, a first arm, capable of extending from the transfer chamber into the substrate processing chamber, for transferring the substrate in a horizontal direction, a second arm capable of extending from the transfer chamber into the substrate processing chamber, capable of moving in a vertical direction and separating the substrate upward from the substrate mounting body by moving the substrate lifting member upward, and a driving mechanism provided in the transfer chamber for extending the first and second arms from the transfer chamber into the substrate processing chamber and for moving the first arm in the horizontal direction and moving the second arm in the vertical direction.

Abstract: A linear handling unit is provided with a first body (11), which carries opposite linear bearings (16) in the front and a fluid-type linear actuator (19). A second body carries, longitudinally, two lateral studs (29) for guiding and for coupling with the linear bearings for the movements of one body on the other. The linear actuator is connected to the second body. The studs (29) are arranged in two parallel, flexible-expandable flanges (26) integral with the second body carrying the studs. An adjusting bar (31) is arranged between the studs.

Abstract: A transfer system provided, in particular, for multi-stage presses for large components is distinguished by a favorable design with a low moving mass and allows large transporting steps. By the regulation of 2 stationary drives both in the direction of rotation in relation to one another and in the rotational speed, it is possible to realize all desired traveling curves in one plane. A straightforward construction makes possible a cost-effective, modular solution for a highly dynamic transfer system.

Abstract: A workpiece transfer apparatus includes a support member and first and second control shafts. The control shafts are rotatably supported by the support member in a spaced-apart configuration. A workpiece support is operably connected to the first and second control shafts. The workpiece support is shaped to support a workpiece during transfer. Rotation of the first control shaft shifts the workpiece support in a first direction, and rotation of the second control shaft shifts the workpiece support in a second direction. A lead screw is disposed parallel to the control shaft, and shifts the workpiece support along the lead screw upon rotation of the same.

Abstract: Wafers from cassettes placed in a cassette holder at a loading station are transferred by a loader to a conveyor and through a wafer processing stage. From the conveyer, the wafers are delivered to an unloader at an unloading station. The unloader transfers the wafers to cassettes held in a cassette holder at the unloading station. The cassettes may be loaded into the rear of the loading station and removed from the rear of the unloading station. The cassette holders support plural stacks of at least two cassettes which are independently indexed upwardly and downwardly. The stacks of cassettes are also carried by a cassette positioner which is transversely shiftable to position a first stack in a wafer transfer zone while a second stack is in a cassette transfer zone spaced from the wafer transfer zone and vice versa. The loader may include an arm which is linearly translated and is rotated about its longitudinal axis to invert the wafer for delivery to a destination location.