Abstract: A method is provided for monitoring and controlling the deposition of multiple layer thin films using a broadband spectral monitor and a generalized model of the film. A design specification, including the number of layers and the material, refractive index, and thickness of each layer, is provided for the desired thin film. A target optical thickness is computed for the end point of each layer using correction factors based on the generalized model, preferably a single layer model, of the multilayer thin film. A monitor chip, such as a silicon substrate, is used for monitoring the multiple layers of film deposition. During deposition of the film, a broadband spectral monitor (BBSM) comprising a source of broadband light is directed onto the monitoring chip. Light reflected by the monitoring chip is received by a photosensor that provides a broadband reflectance spectrum to a computer.

Abstract: A method for regulating the thickness of an applied coating. The method includes passing a web through two members which define a gap between them. A sensor measures periodic variations in the thickness of the coating on the web. An automatic controller analyzes information from the sensor and converts the information into gap adjusting signals. Piezoelectric or magnetostrictive translators adjust the size of the gap to compensate for repeating variations in coating thickness.

Abstract: A process for depositing diamond on a substrate using a microwave plasma generator including providing carbon, hydrogen and oxygen in a desired ratio to the microwave plasma generator, and providing sufficient microwave power to the microwave plasma generator to produce a greenish-colored plasma with the C.sub.2 emission at 5165 Angstroms (.ANG.) at a level of from 0.5 to 50 times the atomic hydrogen alpha emission level at 6563 .ANG., for depositing high quality diamond at an extremely high rate on the substrate placed proximate or in the plasma.

Abstract: The method serves for the electroless deposition of a metal layer (7) from a metallization liquid on a top side of a flat article to be metallized, more in particular a flat disc, for example, a master disc (1) which is used for the reproduction of optical discs. According to the method the top side of the article is first made hydrophilic, if so necessary, after which, with the article supported in a horizontal position, a quantity of metallization liquid is provided on the top side which was previously made hydrophilic as a stable liquid layer (16) bounded by the edges of the article, after which the deposition of the metal from the liquid on the article takes place and the liquid layer is the removed entirely from the surface.

Abstract: A method for determining a termination time of the step of dispersing a coating composition for a photosensitive layer, containing a binder resin, a powdery charge generating material and a solvent, is disclosed, which comprises (i) providing coating (I) on a substrate by coating the coating composition, following by drying, (ii) providing coating (II) on a substrate by dispersing the coating composition using a dispersion medium to fine the powdery charge generating material, followed by drying, (iii) measuring absorbances of coating (I) at two wavelengths within a short wavelength region and a long wavelength region, respectively, of the spectral absorption wavelength of the charge generating material, (iv) measuring absorbances of coating (II) at the two wavelengthes within the short wavelength region and the long wavelength region, respectively, and (v) calculating spectral absorbance ratios of coatings (I) and (II), respectively, from the following equation: ##EQU1## wherein the dispersing of the coating

Abstract: The method and apparatus of the invention permit in situ determinations to be made of the temperature and optical constants of a substrate surface that is being treated, by measurements of radiance, reflectance and transmittance. These determinations in turn provide, at any given instant during processing, compositional and other information, thereby affording highly effective feedback control of the processing conditions. The apparatus comprises an integrated, small and relatively inexpensive instrument for process monitoring.

Abstract: A coating control system is provided enabling continuous operations, free of interruption for coating control purposes, while achieving desired coating weight and thickness profile for the various gages, widths and coating specifications encountered on a given continuous strip production line. In each of a pair of elongated pneumatic dies, a pressurized gas jet is controllably shaped and directed by flow-control means internally-mounted of each pneumatic die to impinge against its respective substrate coated surface with its major directional component of force being controlled to be perpendicularly transverse to the travel path of the coated strip across its full width. Adjustment of such internally-mounted means is coordinated with control of gas pressure supply and/or adjustment of die positioning means to maintain desired coating weight and coating profile across the width of the strip.

Abstract: A process for detecting any defect in a ceramic body, including the steps of forming an electrically conductive layer in any such defects including fine voids present in the ceramic body, and then detecting presence or absence of the defect by measuring electrical conductivity between two given points shorted by the electrically conductive layer. The electrically conductive layer may be formed by penetrating an electrically conductive liquid into the defect. Alternatively, the electrically conductive layer may be formed by penetrating a penetrable liquid capable of forming the electrically conductive layer by thermal treatment or chemical treatment and thermally or chemically treating same.

Abstract: A method and apparatus for measuring sheet resistivity of a layer manufactured under the influence of a plasma, wherein a current is generated using two voltage or current sources in a circuit that is composed of a first current branch, a sheet resistivity, and a second current branch. The current includes the parasitic current I.sub.P injected into the layer by the plasma, this having a first and second part which are symmetrically supplied into the two current branches which respectively have an identical resistance overall. The currents I.sub.A and I.sub.B thus actually flowing in the first and second current branch are respectively directly measured, or measured on the basis of the voltage drop-off at known precision resistors. A measured current I.sub.M which is independent of the plasma influence is calculated therefrom by averaging, and the sheet resistivity is calculated from I.sub.M and by measuring the voltage drop-off at the sheet resistivity.

Abstract: A system and method is provided for measuring the electrical resistivity of a member without physically contacting the member. The system includes an electromagnetic energy transceiver having a transmitting and receiving antenna. The antenna is positioned in close proximity to the member being tested. Electromagnetic energy, such as microwave energy, is transmitted by the transceiver at the member being tested. Reflected electromagnetic energy is received at the antenna that has been reflected by the member hack to the antenna. The transceiver then generates an output that is proportional to the reflected electromagnetic energy and, thus, is proportional to the non-reflected electromagnetic energy absorbed by the member being tested. The output signal can thus be used to indicate resistivity of the member to electrical transmission.

Abstract: A process and apparatus for in situ measurement of the thickness of a thin ilm on a substrate using interference effects in the thin film. Thermal radiation of the substrate is utilized as a source of interfering bundles of electromagnetic radiation which intensity thereof is measured with a charge-coupled-device camera, and signal-processing electronics is utilized for determining in accordance with the Airy formula the thickness of the thin film on the substrate in the planar direction of the thin film and the index of refraction thereof. The low time constant for the measurement and evaluation enables the process for the recording of measurements be used for the control of coating or removal procedures.

Abstract: A method and apparatus for monitoring an electrical property of a conductive coating on an optical fiber, the method comprising capacitively coupling at least one alternating electrical signal into and out of the conductive coating and measuring an electrical property of the coating carrying the alternating electrical signal. The apparatus comprises generating means for generating an alternating electrical signal; capacitive coupling means for capacitively coupling the alternating electrical signal into and out of the conductive coating, the capacitive coupling means being electrically connected to the generating means; and measuring means for measuring an electrical property of the conductive coating carrying the alternating electrical signal, the measuring means being electrically connected to the capacitive coupling means. A method of manufacturing coated optical fiber which incorporates the method of monitoring an electrical property of a conductive coating is also disclosed.

Abstract: A method for controlling coating weight on a hot-dipped steel strip comprises the steps of positioning at least one pair of high-frequency (alternating) current conducting paths near one side of a steel strip and near another side of the steel strip drawn out of a coating bath, each of the high-frequency (alternating) current conducting paths being parallel with a surface of the steel strip above the coating bath, and flowing a-high-frequency (alternating) current strong enough to magnetically saturate the steel strip through the at least one pair of high-frequency (alternating) current conducting paths to induce a high-frequency (alternating) current of an opposite phase in the steel strip, a magnetic pressure acting on surfaces of the steel strip being generated by an interaction of the induced high-frequency (alternating) current with a high-frequency (alternating) current of the high-frequency (alternating) current conducting paths.

Abstract: Disclosed is a method of monitoring electroless plating solutions. The solutions are used to plate a light-transmitting medium. Measurements are made to determine the time it takes for light transmission through the medium to be reduced to a certain level. This measurement can be used to determine whether articles will be sufficiently plated by the solutions.

Abstract: Apparatus and method for non-contact temperature measurement of a film growing on a substrate which accounts for the change in emissivity due to the change in film thickness. The system employs an adaptively calibrated pyrometer wherein the substrate emittance is continuously computed so that the temperature measurement is accurate regardless of the emittance variation. The new system is easily constructed by adding data processing system software and hardware to conventional pyrometers.

Abstract: Described is a new method and apparatus for measuring the thickness of a thin conductive coating deposited on a moving elongated dielectric body. Of special use is an application of a carbon coating on an optical fiber. The thickness of the conductive coating is measured by establishing an electromagnetic field in a resonator including an elongated unshielded helix and a pair of coupling loops. The helix is suspended between the coupling loops out of contact with either one of them. An electromagnetic energy is coupled into one loop as an input signal from a source of electromagnetic energy and coupled out from the other loop as an output signal. The difference between the magnitude of energy of an empty helix or of a helix with an uncoated body, and the helix with a coated body, is used for controlling the coating process.

Abstract: The thickness of a layer of material deposited by chemical vapor deposition, especially a diamond layer, is monitored by providing at least one substrate on which the material is deposited, with at least one perforation of a predetermined size therein. The relationship between the thickness of the layer formed in said perforation and the thickness of the layer formed on the substrate surface is determined, so that the thickness of the surface layer can be determined from the thickness of the layer formed in the perforation.

Abstract: A method of manufacturing a thin film electroluminescent (EL) device in which an electron beam is directed to a pellet of a substance containing an additive agent, and the substance is evaporated and deposited on a substrate and a change per unit time of the growing deposit is monitored by a sensor, comprising the steps of (1) controlling energy of the electron beam in accordance with an output of the sensor during a first time interval for adjusting an evaporation rate of the substance to a specified rate, (2) maintaining the controlled energy of the electron beam constant during a second time interval, larger than the first time interval and alternatively repeating steps (1) and (2).

Abstract: Spin coating of resist on a semiconductor wafer is done in a controlled chamber, starting with introducing a resist solvent vapor into the chamber from a nozzle, applying the resist by spraying a very thin layer of the resist material, monitoring and adjusting the resist thickness during spinning in vapor, and then removing solvent from the chamber. The result is a saving in resist material and enhanced coating uniformity.

Abstract: Arrays of microfabricated hotplates have been used as substrate arrays for materials processing on a microscopic scale. Properties of individual elements (pixels) of the array, such as temperature and voltage bias, are controlled by addressing a given pixel with appropriate signals. Materials are deposited onto pixels with individually controlled deposition conditions (pixel temperature, bias). Pixels are also addressed to control properties during post-deposition processing steps such as heating in vacuum or various gases to alter stoichiometry of a single material, or to alloy multiple composition materials. The addressable heating characteristics may also be used for a maskless lithography on pixel elements. The result is an array of separately, but simultaneously, processed films. Properties of film elements may be measured using electrical contact pads.

Abstract: The invention describes a real-time in situ ellipsometric monitoring and control system using an ellipsometer to control the averaged refractive index of the deposited film during the AR coating of semiconductor laser diode facets for laser amplifiers and superluminescent LED. The input and output window birefringences are taken into account and calibrated the windows mounted on the vacuum chamber to include the effects of the pressure and mounting stress. In addition to the conventional four-medium model which gives an averaged refractive index, an adaptive multilayer model which takes into account an increasing number of layers as the evaporation proceeded is developed to monitor the instantaneous changes of the refractive index. Each ellipsometric measurement lasts only 0.5s and provides two sets of refractive index and thickness data as derived by the two multilayer models. Both measured data are used for the refractive index control to achieve a good feedback response.

Abstract: This invention relates to a composite vapor deposition film composed of a plurality of elements and a method for manufacturing the same. A composite vapor deposition film is produced by having a composite of multi-component particles turned into a vapor to instantaneously evaporate the multi-component particles to an energy active vapor phase state. The composite vapor phase substance is solidified on a deposition substrate to form the vapor deposition film.

Abstract: A method of monitoring and/or controlling the motion of a moving coating material dispensing pattern or fiber is provided with a monitor that senses a medium such as sound, light or other form of energy near the space between the dispensing device nozzle and a substrate, and a monitoring signal is generated. Information relating to the pattern motion is extracted, and an output signal is generated representative of characteristics of the motion of the pattern in the space. One or more transducers are used to extract the information, which is analyzed, preferably by comparison of a frequency spectrum of the signal with a spectrum of standard signal, to detect deviations in the system operation from desired criteria. Optionally, the output signal is used to control parameters of the system. In another embodiment, plural spaced transducers detect the phase or orientation of the moving pattern and remove background noise, by inverting, summing, multiplying, and otherwise combining the signals.

Abstract: Process and apparatus for examining the porosity of coated objects, and in particular of enamelled, electrically conductive strip and profiled material or objects, and in particular of hollow bodies such as beverage cans, in which electrical contact is made with the strip and profiled material or the hollow body to form one pole for an applied test voltage, an electrically conductive connection is made to a coated surface of the strip and profiled material or to the hollow body by means of a continuous stream or curtain of electrolytic fluid emanating from a nozzle, to form the opposite pole for the applied test voltage and wherein the current flowing from the one pole through a stream or curtain of liquid and the coating to the other pole is measured as a measure of the porosity of the coating.

Abstract: Techniques of monitoring and controlling removal or forming of layers of material, such as employed in the manufacture of flat panel displays and integrated circuit wafers. Examples of material removal include the development of a photoresist layer and etching of layers of other material according to a pattern across the surface of the layer. The material removal process is terminated in response to detecting when breakthrough occurs in a preselected number of individual regions across the surface of the layer. A measure of uniformity of processing across the layer surface is obtained from monitoring removal of material in such individual surface regions, and can be used to control the process to improve such uniformity.

Abstract: A method and apparatus for coating a fastener with head and shank portions is disclosed. The invention includes the steps of and apparatus for transferring the fasteners from a feed mechanism such that the fasteners are positioned for coating. The fasteners are then conveyed through a plurality of operating stations, beginning with a heating station where the shank portions of the fasteners are heated. Subsequently, at a material applying station, a coating material is applied to the heated shank portions. A preferred embodiment of the method and apparatus of the present invention includes using a magnetic holder to carry the fasteners horizontally by their head portions, where fasteners are centered by a rotating wheel, heating the shank portion to a temperature above the melting point of the applied material and applying the material to the heated shank portion to form a coating thereon. The magnetic holders are part of an endless traveling belt that rotates continually.

Abstract: A contact-free, optical measurement system for determining the precision with which an article rotates. A reflective surface is secured to a rotating surface and a light source, such as a laser, is disposed thereabove. A target is likewise secured in association with the light source to receive the reflected light from the spinning surface. In this manner, any dynamic angular misalignment, or wobble, in the spinning surface will be manifested in movement of the reflected light upon the target. The degree of wobble of the spinning surface may then be readily ascertained.

Abstract: A method and apparatus for painting traffic marking lines over old paint markings on road pavement is disclosed. The apparatus, normally installed on a marking vehicle having a paint gun and a paint supply, includes a detector which illuminates the pavement and utilizes a spectroscope to analyze the return inspection for the presence of one or more known preselected constituents of the old paint marking to control actuation of the valve on the paint gun and also track the old pavement marking. The apparatus also provides a paint gun delay function to account for the lead distance between detector and paint gun and enables the application of new paint markings directly over the old markings at a relatively high rate of vehicle speed.

Abstract: In the two-sided coating of a web by feeding the web through the nip of a pair of pressing rolls onto which the coating substance is metered, the amount of the coating substance applied to each pressing roll is measured by infrared absorption and the relative coating quantities RW.sub.o onto the upper side and RW.sub.u to the underside are calculated by the relationsRW.sub.o =M2.sub.o /(M2.sub.o +M2.sub.u) andRW.sub.u =M2.sub.u /(M2.sub.o +M2.sub.u); andwhere M2.sub.o represents an infrared absorption measurement of the coating on the roll applying the coating to the upper side and M2u represents the absorption measurement of the coating on the roll applying the substance to the underside of the web.

Abstract: A technique for observing optical second harmonic generation effect at a surface of a material during processing thereof, particularly in the presence of a plasma, for controlling the processing of the material. A preferred form of the apparatus and method includes a combination of spectral, spatial, polarization and temporal filtering to allow observation of optical second harmonic generation and control of processing of the material with processes such as reactive ion etching to a high degree of resolution.

Abstract: A sealing gun (31) of a sealant application unit, which controls the flow of the sealant in accordance with the value of an input signal, is attached to the end of a robot arm. The value of a signal applied to the sealant application unit (30) is controlled in association with acceleration/deceleration control of the moving speed of the sealing gun. The moving speed (TSA) of the sealing gun and the flow (SC) of the sealant discharged from the sealing gun are in direct proportion; therefore, the bead width becomes uniform independently of the moving speed (TSA) of the sealing gun.

Abstract: An apparatus and method for controlling yarn coatings such as sizing are provided which includes nuclear radiation detectors which measure the attenuated radiation through processed yarn. Before and after radiation measurements are signaled to a computer which is programmed to generate a signal which controls squeeze rollers that adjust, according to specific size requirements. A second embodiment of the invention is provided for processing tire cord webs and utilizes digital line scan cameras in conjunction with the radiation detector sensors. Line scan cameras provide an opacity measure to determine yarn count and maintain an accurate density measurement even as lateral shifts in the web during processing occur.

Abstract: An electroless plating deposition speed measuring apparatus is provided with a sensor having an electrode couple whose pair of electrodes are opposed to each other and a sensor drive circuit that cyclically applies voltage to the electrode couple to measure a polarization resistance between the pair of electrodes of the electrode couple. Measuring data from the sensor drive circuit are supplied to a processing circuit. The processing circuit computes and processes the measuring data to find the plating deposition speed. Data of the plating deposition speed from the processing circuit are supplied to a display circuit to display the data of the plating deposition speed. In a preferred embodiment, each of the pair of electrodes of the electrode couple has a conductor and a non-conductor, wherein the surfaces of the conductors and the non-conductors of the respective electrodes are arranged in facing and opposite relation to each other.

Abstract: A device for detecting contaminants on a surface of a conductive test sample includes first and second probes for engaging contaminants on a test sample surface. The first and second probes are connectable to a device for measuring voltage drop and are dimensioned and configured for measuring voltage drop across contaminants on the test sample surface at a predetermined contact force. The predetermined contact force is selected to prevent the first and second probes from piercing the contaminants. The device also includes a device for biasing the probes against the contaminants on the test sample surface with the predetermined contact force. The device for biasing the probes against the contaminants on the test sample surface include a moveable probe arm and a counterweight on the moveable probe arm which permits the predetermined contact force between the first and second probes to be selected. The moveable probe arm is adapted for both horizontal and vertical movement.

Abstract: Apparatus and method for increasing the time that a quartz crystal can sense the rate at which evaporated material is broadcast onto a substrate wherein a chopper employing a disk with a slot is disposed between the source of the evaporated material and the crystal to reduce the exposure of the crystal to evaporated material to a fraction of the time that the substrate is exposed wherein the chopper frequency is not in tune with the dither frequency of the material evaporator. Barrier means prevents the chopper slot from significantly changing dimensions due to the build up of material on its defining edges, while shield means prevents the a crystal from being exposed to evaporated material from a source that it does not control.

Abstract: A resist film coating apparatus comprises a resist receiving plate secured to a rotatable support plate carrying a wafer so as to be disposed along the outer periphery of the wafer, an interference type film thickness meter for measuring the thickness of a resist film spun out to the resist receiving plate, and modifying means for changing the revolution number of the support plate on the basis of a result of measurement by the film thickness meter such that a desired resist film thickness can be obtained.

Abstract: Provided is a method and apparatus for in-situ measuring filament temperature and the thickness of a film deposited on a substrate disposed within a hot-filament chemical vapor deposition reactor. In accordance with the invention, white light which is emitted directly from the filament and that reflects from the top and bottom surfaces of a deposited film are collected and converted to monochromatic light through the use of simple narrow-banned interference filters operative over specific, yet different, optical banned widths. This information is thereafter used to mathematically calculate the filament temperature, film thickness and growth rate of the deposited film.

Abstract: A polymeric minus filter for an incident electromagnetic spectral band comprises at least one polymeric interference stack tuned to a predetermined design wavelength centered around .lambda..sub.0, wherein .lambda..sub.0 is in the range of 300 nm to 2000 nm, said filter comprises an optically transparent substrate and having deposited thereon at ambient temperatures (20.degree. to 23.degree. C.) a multiplicity of pairs of polymeric thin interference layers plus one final polymeric layer having index of refraction n.sub.2, each pair of interference layers having a total optical thickness equal to 1/2 wavelength of .lambda..sub.0, the members of each pair having refractive indices n.sub.1 and n.sub.2, respectively, wherein the layer having refractive index n.sub.2 is directly superimposed upon said substrate having refractive index n.sub.s and wherein n.sub.s is approximately equal to n.sub.1, and wherein n.sub.2 <n.sub.1.

Abstract: The apparatus for measuring and controlling the eccentricity of a colored coating layer of an optical fiber allows continuous on-line measurement of the eccentricity of the colored layer and high-speed control of the devices envisaged for its deposition in order to make corrections possible. The measurement is carried out by launching into the fiber a monochromatic light beam with a wavelength in the near infrared and by analyzing the interference patterns obtained by a TV camera sensitive to such a wavelength.

Abstract: A process of radiation-induced formation of a uniform metal or metal oxide region suitable for device application or for repairing transparent defects in pattern metal films of lithographic masks has been found. The process requires that the heat evolved during the radiation-induced reactions be carefully limited to produce the desired uniformity.

Abstract: A direct method of analyzing brighteners and levelers used in metal electroplating baths. The method is based on the differential adsorption of these additives on a working electrode during a sequence of steps prior to and during metal plating. The sensitivity of the method allows for the determination of both brightener and leveler in the same sample without cyclic processing.

Abstract: The invention is a method and a master machine of carrying out the method, for balancing and correct a workpiece at a single station. The correction apparatus is a material applicator and ultraviolet light source which is controlled by a microprocessor to supply metered amounts of viscous material to a workpiece at a desired location to cure an unbalance. The ultraviolet light source cures the viscous material into a solid deposit.

Abstract: This invention embodies the process and apparatus for applying a fluorocarbon coating or film to a metal or other material surface of a substrate, and particularly for applying such coating to the hull of a ship, or to other objects to be submerged in fresh or saltwater, to protect their surfaces from corrosion, and/or from fouling by marine organisms, and to improve the aqueous slip of a vessel during the period the object will be exposed to either aqueous, atmospheric, or other environments; and to protect virtually any substrate surface from virtually any environmental or man-made hazard. This process utilizes a laser that generates an infrared laser beam, such as, but not limited to a carbon derived gas type laser, to assist in the preparation for and attachment of a film or coating to a prepared substrate surface.

Abstract: A vacuum coating apparatus for coating films on the surfaces of objects to be deposited under vacuum is provided with a vacuum deposition chamber, a carrier accommodated in the vacuum deposition chamber for carrying the objects, a rotary mechanism extending through the vacuum deposition chamber and being rotatable with respect to the carrier, and a container mounted on the rotary mechanism and accommodated in the vacuum deposition chamber. The container accommodates a material to be evaporated and is rotated by the rotary mechanism during a deposition operation while the objects are maintained stationary.

Abstract: A method and apparatus for coating a surface of a continuously moving substrate with a continuously flowing curtain of coating composition comprises transmitting a sound or light wave toward the curtain and detecting the sound or light wave after the transmitting of the sound or light wave. The presence of the curtain is confirmed by either a positive receiving of a reflected sound or light on the smae side of the curtain as the transmitting of the sound or light wave, or a negative receiving of the transmitted sound or light wave on the other side of the curtain. The position of a continuously flowing curtain of coating composition is determined by measuring a time lapse between the time a sound or light wave is transmitted and the time a sound or light wave after reflection from the curtain is received. If the time lapse is outside a predetermined range of a control time period, a signal is generated to indicate that the curtain is defective.

Abstract: The concentration of a plating solution in which a workpiece is plated is automatically controlled within a permissible range of replenishing a consumable ingredient to the plating solution in an amount corresponding to the amount of consumption estimated from the surface area of the workpiece for a given plating solution composition under given plating conditions. By measuring the concentration of the consumable ingredient in the plating solution, the replenishment of consumable ingredient is interrupted for a predetermined time or the amount of the consumable ingredient replenished is reduced when the measured concentration is above the permissible range, or the amount of consumable ingredient replenished is increased or a necessary amount of the consumable ingredient is additionally supplied to the plating solution separately from the normal replenishment of consumable ingredient when the measured concentration is below the permissible range.

Abstract: Measurement of temperature - internal stress characteristics of an Al thin film formed on an Si substrate is performed. The amount of an impurity or impurities mixed in the thin f ilm can be obtained in accordance with the measured characteristics. A migration start temperature of Al atoms in the thin film in the characteristics obtained when the temperature is increased is fed back as information to the thin film formation step, thereby controlling an impurity amount in an atmosphere for forming the thin film.

Abstract: Method and apparatus for improving the surface quality of a resin molding by treating it with a plasma gas, measuring and integrating ion density and stopping the treatment when the integration reaches a predetermined value.

Abstract: A method is provided for measuring and regulating the quantity of coating in surface sizing or pigmenting of paper or board, wherein the coating agent is spread by means of a coating device in the form of a film onto the face of a roll in a size press. The film is transferred from the roll face onto the paper or board in the size press nip. A fluorescent marker agent is mixed into the roll coating or into the coating agent and the measurement of the coating quantity is carried out by means of X-ray fluorescence technique from the face of the size press roll before the film of coating agent is transferred onto the web.

Abstract: An LB film forming device according to the present invention having a packing control device by which a barrier is moved under the control of the packing control device to compress a sample until the sample spreading over the surface of a subphase liquid provides a predetermined set surface pressure, the absorbance of the thus compressed sample is measured, and thereafter the barrier is moved under the control of the absorbance as desired so as to provide a predetermined set value of the absorbance. Such an LB film forming device may stably provide a film having predetermined film characteristics.