Heat Decomposition Of Applied Coating Or Base Material Patents (Class 427/226)
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Patent number: 5700517Abstract: A process for densifying a porous structure with boron nitride includes placing the porous structure in a borazene precursor of the formula RBNH wherein R is a halogen or hydrogen, heating by induction at a pressure of at least 1.2.times.10.sup.5 Pa and thereby decomposing the precursor to form boron nitride that is deposited within the pores of the porous structure.Type: GrantFiled: May 24, 1996Date of Patent: December 23, 1997Assignee: Commissariat a l'Energie AtomiqueInventors: Patrick David, Jean D. Benazet, Bruno Narcy
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Patent number: 5698258Abstract: A cathode ray tube includes a face plate on which are formed a first transparent layer which has a high refractive index and is conductive and a second transparent layer which has a low refractive index. Thereby, the reflectance of the outer surface of the face plate can be made low and, at the same time, an antistatic property can be obtained.Type: GrantFiled: May 24, 1995Date of Patent: December 16, 1997Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tomoki Takizawa, Hiroshi Okuda
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Patent number: 5698022Abstract: A precursor composition useful for vapor deposition formation of lanthanide metal/phosphorus oxide films, comprising a precursor compound selected from the group consisting of: (i) adducts of the formula MA.sub.3 (L).sub.x ; (ii) phosphido complexes of the formulae M(PR.sub.3).sub.3 or M(PR.sub.3).sub.3 L.sub.x ; and (iii) disubstituted phosphate complexes of the formulae A.sub.2 M(O.sub.2 P(OR).sub.2), AM(O.sub.2 P(OR).sub.2).sub.2, and M(O.sub.2 P(OR).sub.2).sub.3, wherein: x is from 1 to 5, A=Cp or .beta.-diketonate, Cp=cyclopentadienyl, methylcyclopentadienyl, or TMS-cyclopentadienyl, R=C.sub.1 -C.sub.8 alkyl, and L=a phosphorus-containing ligand selected from the group consisting of phosphine, phosphine oxide, phosphite, phosphate, and 1,2-bis(dimethoxyphosphoryl)benzene, subject to the provisos that: when x is 2 or greater, each L may be the same as or different from the other L; and when the precursor compound is a .beta.-diketonate compound of formula (i), L is not phosphate or phosphine oxide.Type: GrantFiled: August 14, 1996Date of Patent: December 16, 1997Assignee: Advanced Technology Materials, Inc.Inventors: Timothy E. Glassman, Paul V. Chayka
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Patent number: 5698496Abstract: In accordance with the invention, a high density z-direction interconnection medium is made by the steps of providing a non-conductive membrane having z-direction channels, filling the channels with liquid precursor of conductive material, converting the trapped precursor into conductive material within the channels, and, advantageously, forming solder bumps in contact with the conductive material in the channels. The method is particularly useful for forming hollow tubular or porous conductive pathways having enhanced resistance to thermal and mechanical stress.Type: GrantFiled: February 10, 1995Date of Patent: December 16, 1997Assignee: Lucent Technologies Inc.Inventors: Richard Alan Fastnacht, Sungho Jin, Wei Zhu
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Patent number: 5695815Abstract: A method of forming a metal-containing film on a substrate, such as a semiconductor wafer. The method involves depositing a Group VIII metal carboxylate complex on the substrate, wherein the Group VIII metal is selected from the group consisting of Ru, Os, Rh, Ir, Pd, and Pt, and thermally decomposing the Group VIII metal carboxylate complex to form the metal-containing film.Type: GrantFiled: May 29, 1996Date of Patent: December 9, 1997Assignee: Micron Technology, Inc.Inventor: Brian A. Vaartstra
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Patent number: 5695809Abstract: A method of manufacturing phosphor screens is disclosed. The method uses "sol-gel" for disposing a thin film of phosphor on a transparent substrate. The thin film of phosphor is applied in continuous form or in the form of an accurate dot pattern. The rastering of said dot pattern is performed either by screen printing before annealing the sol-gel, or by selective laser curing of a continuous thin film and washing off the non-cured portions. The phosphor screens are useful as monochrome or as full-color faceplates of field emission displays or cathode ray tubes.Type: GrantFiled: November 14, 1995Date of Patent: December 9, 1997Assignee: Micron Display Technology, Inc.Inventors: Surjit S. Chadha, James J. Alwan
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Patent number: 5693098Abstract: Methods for coating a prosthetic surface with anti-thrombogenic, or anti-coagulant, proteins are disclosed. The methods involve contacting a surface of a prosthetic material with a composition containing multimers of fibrin degradation products. These multimers, preferably D-dimers, have cross-linked D-domains. The methods of the invention are useful for providing an anti-thrombogenic coating on prosthetic implants which are exposed to a patient's blood after implantation, for example vascular grafts and artificial heart valves.Type: GrantFiled: November 7, 1996Date of Patent: December 2, 1997Assignees: McMaster University, ZymoGenetics, Inc.Inventors: Fraser D. Rubens, Paul D. Bishop
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Patent number: 5683614Abstract: A method of forming a layered-perovskite bismuth-strontium-tantalum oxide (SBT) ferroelectric material is performed by dissolving a bismuth compound in a first solvent to form a first solution, mixing a strontium compound and a tantalum compound to form a binary mixture, dissolving the binary mixture in a second solvent to form a second solution, mixing the first solution with the second solution to form a SBT precursor solution, evaporating the first and second solvents to form a SBT precursor material and subsequently sintering said SBT precursor material in the presence of oxygen.Type: GrantFiled: August 16, 1996Date of Patent: November 4, 1997Assignee: Sandia CorporationInventor: Timothy J. Boyle
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Patent number: 5676745Abstract: Composites in the form of a three-dimensional framework or skeleton of ceic particles are formed by a low cost, low temperature sintering process which decomposes a pre-ceramic inorganic or organic precursor. Upon heating, preferably in air, the precursor decomposes to form a ceramic phase in the form of necks between the individual ceramic particles. The properties of the resulting porous ceramic bodies can be modified, such as toughened by impregnation with monomers, oligomers or polymers which are polymerized or cured in situ. Such composites find use as cosmetic products or protheses for humans and animals, such as dental restoratives and bone implants. Methods of fabrication are disclosed which include the use of a pre-ceramic polymer as a binder for the ceramic particles which forms the necks of material between the individual ceramic particles upon firing.Type: GrantFiled: June 7, 1995Date of Patent: October 14, 1997Assignee: The United States of America, as represented by the Secretary of CommerceInventors: John Robert Kelly, Joseph M. Antonucci
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Patent number: 5676997Abstract: A process for producing a high purity and dense calcium phosphate coating film with bioaffinity on a high strength base, such as a base for a substitute for a hard tissue in a living body, comprising (1) dissolving (a) a salt containing phosphorus, a salt containing calcium, and a chelating agent capable of coordinating to either one or both of the metallic ions of these salts or (b) a chelate compound containing at least one of phosphorus and calcium and a salt containing the other in a solvent to prepare a sediment-free coating solution, (2) coating a base with the coating solution, (3) drying the coated base, and (4) calcining the coated base.Type: GrantFiled: September 21, 1995Date of Patent: October 14, 1997Assignee: NGK Spark Plug Co., Ltd.Inventors: Masahiko Okuyama, Katsuya Yamagiwa
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Patent number: 5674293Abstract: An improved coated orthopaedic implant component is disclosed. The implant may be coated with platinum for improved characteristics. Ion beam coating orthopaedic parts by ion implanting the parts with zirconium ions while the parts are immersed in an oxygen-containing background gas is also disclosed. The adhesion of the graded interface zirconium oxide surface layer so formed is further improved by the initial removal of surface contamination using an ion bombardment and the deposition of an intermediate layer of platinum or silicon between the orthopaedic metal component and the zirconium oxide. Furnace heating results in atomic interdiffusion to enhance adhesion between the surfaces. The zirconium oxide provides a low friction, low wear articulating surface. The graded interface may be characterized by a blackish color and a transition between pure zirconium oxide and pure intermediate layer that extends over a thickness of hundreds of Angstroms.Type: GrantFiled: January 19, 1996Date of Patent: October 7, 1997Assignee: Implant Sciences Corp.Inventors: Anthony J. Armini, Stephen N. Bunker
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Patent number: 5674553Abstract: A full color three electrode surface discharge type plasma display device that has fine image elements and is large and has a bright display. The three primary color luminescent areas are arranged in the extending direction of the display electrode pairs in a successive manner and an image element is composed by the three unit luminescent areas defined by these three luminescent areas and address electrodes intersecting these three luminescent areas. Further, phosphors are coated not only on a substrate but also on the side walls of the barriers and on address electrodes. The manufacturing processes and operation methods of the above constructions are also disclosed.Type: GrantFiled: June 2, 1995Date of Patent: October 7, 1997Assignee: Fujitsu LimitedInventors: Tsutae Shinoda, Noriyuki Awaji, Shinji Kanagu, Tatsutoshi Kanae, Masayuki Wakitani, Toshiyuki Nanto, Mamaru Miyahara
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Patent number: 5672394Abstract: A method of preparing electrodes is now described, which electrodes have enhanced adhesion of subsequently applied coatings combined with excellent coating service life. In the method, a substrate metal, such as a valve metal as represented by titanium, is provided with a highly desirable rough surface characteristic for subsequent coating application. This can be achieved by various operations including etching to ensure a roughened surface morphology. In subsequent operations, a barrier layer is provided on the surface of enhanced morphology. This may be achieved by operations including heating, as well as including thermal decomposition of a layer precursor. Subsequent coatings provide enhanced lifetime even in the most rugged commercial environments.Type: GrantFiled: August 2, 1996Date of Patent: September 30, 1997Assignee: Eltech Systems CorporationInventors: Kenneth L. Hardee, Lynne M. Ernes, Richard C. Carlson
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Patent number: 5670206Abstract: A deodorizing lamp comprises a lamp unit and a titanium oxide film coating the glass surface of the lamp unit and optionally at least one metal selected from among iron, platinum, rhodium, ruthenium, palladium, silver, copper, zinc, and manganese deposited on the surface of the titanium oxide film. A method for the production of a deodorizing lamp comprises the steps of applying a titania sol or an aqueous hydrogen peroxide solution of titania gel to the glass surface of a lamp unit, drying the applied layer of titania sol or titania gel, firing the dried layer thereby forming a titanium oxide film on the glass surface, and optionally depositing at least one metal from among iron, platinum, rhodium, ruthenium, palladium, silver, copper, zinc, and manganese on the titanium oxide film.Type: GrantFiled: August 17, 1995Date of Patent: September 23, 1997Assignee: Agency of Industrial Science & Technology, Ministry of International Trade & IndustryInventors: Hiroshi Taoda, Eiji Watanabe
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Patent number: 5670209Abstract: High brightness durable retro-reflecting microspheres for retro-reflection and related uses (and a novel method of forming the same) is provided embodying a retro-reflective vitreous glass microsphere encapsulated in a hardened clear non-vitreous metal-oxide ceramic shell of substantially the same index of fraction as the microsphere.Type: GrantFiled: January 23, 1996Date of Patent: September 23, 1997Assignee: Brite-Line Technologies, Inc.Inventor: Charles W. Wyckoff
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Patent number: 5665682Abstract: An oxide superconductor capable of realizing a high critical current density and its manufacturing method requiring only a low temperature heat treatment. An oxide superconductor has a superconductive layer with a composition of RE.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-x, where RE stands for any one of rare earth elements including Y, Eu, Gd, Dy, Ho, Er, and Yb, which is formed on the substrate by RE.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-x phase and CuO phase resulting from a decomposition of RE.sub.1 Ba.sub.2 Cu.sub.4 O.sub.8 phase, in which the CuO phase and micro-defects caused by the decomposition function as pinning centers. This superconductive layer is formed by applying a solution containing organic compounds of a plurality of metallic elements for constituting the oxide superconductive layer; calcining the substrate applied with the solution to obtain a calcined body in which the organic compounds contained in the solution are thermally decomposed; heating the calcined body to produce RE.sub.1 Ba.sub.2 Cu.sub.Type: GrantFiled: August 14, 1995Date of Patent: September 9, 1997Assignees: International Superconductivity Technology Center, The Kansai Electric Power Co., Inc., Fujikura Ltd.Inventors: Osamu Okamura, Atsushi Kume, Yuh Shiohara
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Patent number: 5660876Abstract: A cathode ray tube which comprises a front panel coated with a nonglare film having a multi-layered structure. The multi-layered structure comprises at least a visible light absorbing layer containing a black dye, and an antistatic layer containing an inorganic metal compound as a conductive agent.Type: GrantFiled: June 6, 1995Date of Patent: August 26, 1997Assignee: Sony CorporationInventors: Kunio Kojima, Takashi Setsuda, Takumi Takamura, Kouichi Kaneko, Hideo Kusama
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Patent number: 5661092Abstract: Ultra thin organo-ceramic and metal oxide films are prepared under room temperature and atmospheric conditions by exposing .alpha.,.omega.-functional siloxane oligomers and fatty acid metal soaps, respectively, to a combination of ultraviolet light (UV) and ozone (O.sub.3). The process includes the steps of preparing ultra thin .alpha.,.omega.-functional polysiloxane and fatty acid metal soap films using, but not limited to, the Langmuir-Blodgett (LB) technique. The LB technique permits construction of molecular monolayer or multilayer films on a variety of substrates. By using carboxylic acid end groups on the siloxane oligomers, metal ions can be incorporated into the SiOx film after UV-ozone exposure. This technique can be used to make electronically, optically, and chemically important organo-ceramic and metal oxide films on temperature sensitive substrates.Type: GrantFiled: September 1, 1995Date of Patent: August 26, 1997Assignee: The University of ConnecticutInventors: Jeffrey T. Koberstein, Christopher L. Mirley
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Patent number: 5658333Abstract: A technique for producing a highly convoluted surface on a prosthetic device is achieved by applying a layer of aspherical metallic powder on the surface of the device. The metallic powder, which may be the same as or different from the material of the device, is applied in a thickness of up to approximately 200 microns and has a size range of approximately -80 to +635 mesh so as to result in a desirable surface roughness defined by a peak to valley variation of up to approximately 200 microns. A resulting device has an enhanced surface which provides, alternatively, an improved press fit into a receiving bone, or improved cement fixation, or improved reception of a ceramic coating.Type: GrantFiled: May 9, 1996Date of Patent: August 19, 1997Assignee: DePuy, Inc.Inventors: David C. Kelman, Todd S. Smith
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Patent number: 5656329Abstract: A method of depositing a thin film of a metal oxide by chemical vapor deposition is disclosed. This method is applicable to, e.g., forming thin films of perovskite-phase titanates, zirconates, and/or niobates of divalent metals such as Ba, Sr, and/or Ca. In one example, a first precursor comprises a divalent metal coordinated to carboxylate and polyether ligands, and a second precursor comprises a tetravalent metal coordinated to one or more alkoxide ligands. These precursors are delivered in a mixed stable vapor phase 12 to a preferably heated substrate 14, where a surface-mediated reaction between the two precursors releases a volatile ester and deposits an intermediate compound film 18 comprising the divalent metal, the tetravalent metal and oxygen on the substrate. The substrate may be subsequently annealed to drive off unreacted ligands and/or fully crystallize the intermediate compound film into a perovskite-phase film 20.Type: GrantFiled: March 13, 1995Date of Patent: August 12, 1997Assignee: Texas Instruments IncorporatedInventors: Mark Hampden-Smith, Toivo Kodas
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Patent number: 5656555Abstract: A modified hydrogen silsesquioxane (HSQ) precursor is disclosed, along with methods for depositing such a precursor on a semiconductor substrate and a semiconductor device having a dielectric thin film deposited from such a precursor. The method comprises coating a semiconductor substrate 10, which typically comprises conductors 12, with a film of a modified HSQ film precursor. The HSQ film precursor comprises a hydrogen silsesquioxane resin and a modifying agent, preferably selected from the group consisting of alkyl alkoxysilanes, fluorinated alkyl alkoxysilanes, and combinations thereof. The method further comprises curing film 14, wherein the inclusion of the modifying agent inhibits oxidation and/or water absorption by the film during and/or after curing. It is believed that the modifying agent modifies film surface 16 to produce this effect.Type: GrantFiled: February 17, 1995Date of Patent: August 12, 1997Assignee: Texas Instruments IncorporatedInventor: Chih-Chen Cho
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Patent number: 5652019Abstract: The invention is a method of forming a conductive coating on a structural substrate. The method involves depositing a relatively non-conductive precursor material in a solution state on the structural substrate using inkjet apparatus. The solution is dried to leave a film. Then, the dried film is heated to a level at which a chemical (pyrolysis) reaction is triggered to convert the dried precursor material to a conductive material. The precursor solution can be dried in a manner which does not result in its transformation to the conductive state, as for example through the use of microwave apparatus. The precursor material can be applied on the substrate in such a manner as to control the conductivity of the coating and to provide a coating which exhibits one of uniform characteristics, discrete patterns, or gradient characteristics.Type: GrantFiled: October 10, 1995Date of Patent: July 29, 1997Assignee: Rockwell International CorporationInventor: William P. Moran
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Patent number: 5652016Abstract: The invention provides (i) a process for preparing tetracalcium phosphate particles, the process comprising the steps of (1) sintering or fusing a powder mixture at a temperature of not lower than 1,400.degree. C., the mixture comprising a powder of calcium source and a powder of phosphorus source in a Ca/P molar ratio of 2/1, and about 0.005 to about 5 parts of an aluminum compound, calculated as Al.sub.2 O.sub.Type: GrantFiled: April 2, 1996Date of Patent: July 29, 1997Assignee: Osaka Cement Co., Ltd.Inventors: Akitoshi Imura, Toru Saito, Shiro Ikegami
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Patent number: 5648113Abstract: A process and apparatus for Al.sub.2 O.sub.3 CVD on silicon wafers using aluminum tri-isopropoxide in a high-volume production environment is presented. The conditions required to use ATI in a production environment and provide maximum utilization of ATI are first of all delivery of ATI via direct evaporation. The ATI source bottle is pumped out (bypassing substrates) until propene and isopropanol signals are reduced to 1% of process pressure before start of aluminum oxide deposition. Either IR spectroscopy or mass spectrometry can be used to provide a control signal to the microprocessor controller. Heating the supplied tetramer to 120.degree. C. for two hours assures complete conversion to trimer. The ATI is stored at 90.degree. C. to minimize decomposition during idle periods and allow recovery of trimer upon return to 120.degree. C. for two hours. During periods of demand, the ATI is held at 120.degree. C. to minimize decomposition.Type: GrantFiled: September 30, 1994Date of Patent: July 15, 1997Assignee: International Business Machines CorporationInventors: Steven George Barbee, Jonathan Daniel Chapple-Sokol, Richard Anthony Conti, Richard Hsiao, James Anthony O'Neill, Narayana V. Sarma, Donald Leslie Wilson, Justin Wai-Chow Wong, Steven Paul Zuhoski
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Patent number: 5645634Abstract: A composition comprising Ba and Sr salts of carboxylic acids represented by the formula: C.sub.n H.sub.2n+1 COOH wherein 3.ltoreq.n.ltoreq.7, and having structures represented by the following formula (I): ##STR1## wherein R.sup.1, R.sup.2, R.sup.3, R.sup.4, R.sup.5 and R.sup.6 each represent a hydrogen atom, a methyl group or an ethyl group, and M represents Ba or Sr, can be used to form thin films of Ba.sub.1-x Sr.sub.x Ti.sub.y O.sub.3. A composition comprising a barium carboxylate, a strontium carboxylate and a titanium alkoxide in a mixed solvent of a carboxylic acid and an ester, can also be used to form Ba.sub.1-x Sr.sub.x Ti.sub.y O.sub.3 thin films. The proportion of the mixed solvent is 2-11 molar times as much as the Ti. A composition comprising salts of carboxylic acids represented by R.sup.a COOH wherein R.sup.a is a linear or branched alkyl group having 3-7 carbon atoms, as the Ba and Sr sources, and Ti(OR.sup.b).sub.4 wherein R.sup.Type: GrantFiled: June 10, 1996Date of Patent: July 8, 1997Assignee: Mitsubishi Materials CorporationInventors: Katumi Ogi, Tadashi Yonezawa, Tsutomu Atsuki, Keiko Endo
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Patent number: 5639511Abstract: In a transfer printing apparatus having a blade-form ink extender and an ink extension member for extending an ink thereon in association with the ink extender, there is provided a means for removing an excess of the ink from the ink extender and/or and the ink extension member. The transfer printing apparatus is suitably used for forming a film of an organic polymer or an inorganic oxide in a process for production of a liquid crystal device.Type: GrantFiled: May 15, 1995Date of Patent: June 17, 1997Assignee: Canon Kabushiki KaishaInventors: Yasuyuki Watanabe, Toshifumi Yoshioka, Keishi Danjo
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Patent number: 5639517Abstract: A method is provided for fabricating thin films having various optical properties is provided. The disclosed method includes preparing a colloidal suspension and depositing the suspension on a substrate using a coating cylinder. The disclosed method finds particular utility in the area of manufacturing dielectric mirrors and non-reflecting films.Type: GrantFiled: January 9, 1995Date of Patent: June 17, 1997Assignee: Commissariat a l'Energie AtomiqueInventors: Herve Floch, Philippe Belleville
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Patent number: 5635249Abstract: The present invention relates to a method of forming luminescent coatings on substrates and the substrates coated thereby. The method comprises applying a coating comprising hydrogen silsesquioxane resin and a phosphor filler on a substrate and heating the coated substrate at a temperature sufficient to convert the hydrogen silsesquioxane resin to a ceramic coating.Type: GrantFiled: November 30, 1994Date of Patent: June 3, 1997Assignee: Dow Corning CorporationInventors: Loren A. Haluska, Keith W. Michael, Udo C. Pernisz
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Patent number: 5633035Abstract: A thin-film resistor comprising a mixture of rhodium (Rh) oxide as a resistive material, and at least one element M selected from the group consisting of silicon (Si), lead (Pb), bismuth (Bi), zirconium (Zr), barium (Ba), aluminium (Al), boron (B), tin (Sn), and titanium (Ti), wherein M/Rh, or the ratio of the number of element M atoms to that of rhodium (Rh) atoms is in the range of 0.3 to 3.0. Thin-film resistor is formed from the process of preparing a solution of an organometallic material, coating the material on a substrate, drying and then firing the material at a peak temperature not less than 500.degree. C.Type: GrantFiled: April 25, 1995Date of Patent: May 27, 1997Assignee: Fuji Xerox Co., Ltd.Inventors: Kazuo Baba, Yoshiyuki Shiratsuki, Kumiko Takahashi
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Patent number: 5624707Abstract: A method for fabricating an integrated circuit capacitor having a dielectric layer comprising BST with excess B-site material, such as titanium, added. A polyoxyalkyated metal liquid precursor solution is prepared comprising a stock solution of BST of greater then 99.999% purity blended with excess B-site material such as titanium such that the titanium is in the range of 0-100 mol %. A xylene exchange is then performed to adjust the viscosiy of the solution for spin-on application to a substrate. The precursor is spun on a first electrode, dried at 400.degree. C. for 2 minutes, then annealed at 650.degree. C. to 800.degree. C. for about an hour to form a layer of BST with excess titanium. A second electrode is deposited, patterned, and annealed at between 650.degree. C. to 800.degree. C. for about 30 minutes. The resultant capacitor exhibits an enlarged dielectric constant with only a small increase in leakage current.Type: GrantFiled: July 5, 1994Date of Patent: April 29, 1997Assignees: Symetrix Corporation, Matsushita Electronics CorporationInventors: Masamichi Azuma, Carlos A. Paz De Araujo, Michael C. Scott
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Patent number: 5622750Abstract: A new method for the manufacture of glass films on substrates involves the flame reaction of an aerosol comprised of droplets of a solution containing all the precursors for the glass. A solution containing the precursors for all oxide components is atomized, and the resulting droplets are reacted in a flame to form spherical glass particles which are deposited on a heated substrate. By moving the substrate through the flame, a homogeneous deposit is achieved. Subsequent heat treatment in a furnace sinters the porous particle layer into a clear glass. The method has been successfully employed for the formation of sodium borosilicate glass films on silicon substrates and rare earth-doped multicomponent glass films for active devices.Type: GrantFiled: October 31, 1994Date of Patent: April 22, 1997Assignee: Lucent Technologies Inc.Inventors: Arnd H. Kilian, John B. MacChesney, Theodore F. Morse
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Patent number: 5620739Abstract: A silicon nitride barrier layer is deposited on a gallium arsenide substrate to prevent evaporation of the substrate in subsequent heating steps. A silicon dioxide stress reduction layer is deposited on the barrier layer. A first electrode is formed on the stress reduction layer, then a liquid precursor is spun on the first electrode, dried at about 400.degree. C., and annealed at between 600.degree. C. and 850.degree. C. to form a BST capacitor dielectric. A second electrode is deposited on the dielectric and annealed.Type: GrantFiled: March 17, 1994Date of Patent: April 15, 1997Assignees: Symetrix Corporation, Matsushita Electronics CorporationInventors: Masamichi Azuma, Carlos A. Paz De Araujo, Michael C. Scott, Toshiyuki Ueda
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Patent number: 5618761Abstract: Disclosed is a method of manufacturing a semiconductor device, comprising the step of forming a dielectric thin film on a semiconductor layer, the dielectric thin film being made of a compound represented by the general formula (1) given below:ABO.sub.3 (1)where "A" is at least one element selected from the group consisting of Ca, Ba, Sr, Pb and La, and "B" is at least one element selected from the group consisting of Zr and Ti,The dielectric thin film being formed by a chemical vapor deposition under a pressure of 400 Torr or less and a temperature of 1,000.degree. C. or less by using a raw material gas containing a complex compound of element A with a .beta.-diketone, a complex compound of element B with a .beta.-diketone, and an oxidizing agent.Type: GrantFiled: September 11, 1995Date of Patent: April 8, 1997Assignee: Kabushiki Kaisha ToshibaInventors: Kazuhiro Eguchi, Masahiro Kiyotoshi, Keitaro Imai
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Patent number: 5618372Abstract: A process for the production of a firmly adhering, moisture-proof coating of plastic on a substrate of metal, ceramic, glass, or polymer by the application of a liquid preparation containing water, solvent, a (meth)acrylate, and a reactive polymer and by solidifying this coating by heating it to a temperature above 100.degree. C. is described. A first preparation is applied to the substrate and at least partially dried; a second preparation is then applied to the partially dried first preparation and at least partially dried. Then the coating is heated to a temperature in the range of 150.degree.-400.degree. C. to solidify it.The first preparation contains:5-25 wt. % of an aqueous copolymer suspension, the copolymer consisting of a mixture of 40-80 wt. % of acrylonitrile and 60-20 wt. % of butyl acrylate;5-20 wt. % of water;35-75 wt. % of a polar solvent; and3-15 wt. % of a (meth)acrylate which is nonvolatile at temperatures of up to 250.degree. C.Type: GrantFiled: November 15, 1995Date of Patent: April 8, 1997Assignee: Heraeus Kulzer GmbHInventors: Albert Erdrich, Sonja Fremdt, Steffen Oppawsky
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Patent number: 5614247Abstract: An apparatus in a chemical vapor deposition (CVD) system monitors the actual wafer/substrate temperature during the deposition process. The apparatus makes possible the production of high quality aluminum oxide films with real-time wafer/substrate control. An infrared (IR) temperature monitoring device is used to control the actual wafer temperature to the process temperature setpoint. This eliminates all atmospheric temperature probing. The need for test runs and monitor waters as well as the resources required to perform the operations is eliminated and operating cost are reduced. High quality, uniform films of aluminum oxide can be deposited on a silicon substrates with no need for additional photolithographic steps to simulate conformality that are present in a sputtered (PVD) type application. The result is a reduction in required process steps with subsequent anticipated savings in equipment, cycle time, chemicals, reduce handling, and increased yield of devices on the substrate.Type: GrantFiled: September 30, 1994Date of Patent: March 25, 1997Assignee: International Business Machines CorporationInventors: Steven G. Barbee, Richard A. Conti, Alexander Kostenko, Narayana V. Sarma, Donald L. Wilson, Justin W. Wong, Steven P. Zuhoski
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Patent number: 5612087Abstract: A fibrous electrically-conductive filler herein provided comprises fibrous aluminum borate as a core material provided thereon with, in order, an optional titanium oxide intermediate layer and an antimony-free tin oxide layer. The fibrous electrically-conductive filler can be prepared by a method which comprises the steps of optionally forming an intermediate layer of titanium oxide by depositing titanium oxide hydrate on the surface of the core material and then calcining the titanium oxide hydrate layer; then forming a coating layer of tin oxide hydrate on the surface of the titanium oxide-coated fibrous aluminum borate or the fibrous aluminum borate as a core material and then calcining the coating layer at a temperature ranging from 150.degree. to 600.degree. C. in an inert gas atmosphere or a reducing atmosphere to form an antimony-free tin oxide layer.Type: GrantFiled: November 30, 1995Date of Patent: March 18, 1997Assignee: Mitsui Mining & Smelting Co., Ltd.Inventors: Takao Hayashi, Nobuyoshi Kasahara, Norihiro Sato, Kouichi Kawaratani
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Patent number: 5612082Abstract: Metals are reacted in a first solvent, such as 2-methoxyethanol, to form an initial precursor comprising metal-oxide compounds dissolved in the first solvent. A second solvent, such as xylene, that does not react with the metal is added to the solution and the solution heated to distill away the first solvent and form a final precursor. The final precursor is spin-coated on an integrated circuit substrate then dried and annealed to form a thin film of a metal oxide. For metal oxides including bismuth, the bismuth precursor is added to a cold initial precursor and the final precursor is not heated after the bismuth precursor is added. The second solvent wets the substrate better than the first solvent and has a better viscosity for spin-coating, thus resulting in a denser thin film with fewer imperfections.Type: GrantFiled: July 26, 1994Date of Patent: March 18, 1997Assignees: Symetrix Corporation, Matsushita Electronics CorporationInventors: Masamichi Azuma, Michael C. Scott, Carlos A. Paz de Araujo, Larry D. McMillan
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Patent number: 5609631Abstract: Methods for coating a prosthetic surface with anti-thrombogenic, or anti-coagulant, proteins are disclosed. The methods involve contacting a surface of a prosthetic material with a composition containing multimers of fibrin degradation products. These multimers, preferably D-dimers, have cross-linked D-domains. The methods of the invention are useful for providing an anti-thrombogenic coating on prosthetic implants which are exposed to a patient's blood after implantation, for example vascular grafts and artificial heart valves.Type: GrantFiled: April 28, 1995Date of Patent: March 11, 1997Inventors: Fraser D. Rubens, Paul D. Bishop
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Patent number: 5605723Abstract: A pattern of a non-volatile high-performance ferroelectric thin film memory is formed by applying a composition containing hydrolytic metal compounds, and a photosensitizer which generates water when irradiated with active rays onto a substrate. The resultant film is exposed to active rays in compliance with a prescribed pattern to form an image and developed with a solvent to remove non-exposed portions, and then the remaining exposed portions are subjected to a heat treatment to convert the exposed portions into a dielectric substance comprising a metal oxide as expressed by the following formula (I):(Bi.sub.2 O.sub.2).sup.2+ (A.sub.m-1 B.sub.m O.sub.3m+1).sup.2-(I)where A is one or more elements selected from the group consisting of Ba, Sr, Pb and Bi; B is one or more elements selected from the group consisting of Ti, Nb and Ta; and m is an integer of from 2 to 5.Type: GrantFiled: May 2, 1995Date of Patent: February 25, 1997Assignee: Mitsubishi Materials CorporationInventors: Katsumi Ogi, Tsutomu Atsuki, Hiroto Uchida, Tadashi Yonezawa, Nobuyuki Soyama
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Patent number: 5603988Abstract: Titanium and/or tantalum nitrides or nitride silicides are deposited onto a substrate by chemical vapor deposition of a titanium and/or tantalum silylamido complex.Type: GrantFiled: June 2, 1995Date of Patent: February 18, 1997Assignees: Morton International, Inc., International Business Machines CorporationInventors: Michael Shapiro, Ravi Kanjolia, Ben C. Hui, Paul F. Seidler, Karen Holloway, Richard Conti, Jonathan Chapple-Sokol
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Patent number: 5601874Abstract: A method for making a moisture-resistant aluminum nitride-containing powder which includes (a) coating a layer of silicate onto aluminum nitride-containing powder having aluminum nitride on at least a portion of its surface and (b) heat-treating the coated aluminum nitride-containing powder at a temperature of from 350.degree. to 1000.degree. C. for a period of time sufficient to cause the silicate to react with the surface aluminum nitride thereby forming a layer of Si--Al--O--N bonded to the surface aluminum nitride. The silicate has alkyl or alkoxyalkyl radicals attached thereto. The method yields a moisture-resistant aluminum nitride-containing powder having a layer of Si--Al--O--N reaction-bonded to the surface aluminum nitride.Type: GrantFiled: December 27, 1995Date of Patent: February 11, 1997Assignee: The Dow Chemical CompanyInventors: Kevin E. Howard, Daniel F. Carroll, Scott J. Biskupski
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Patent number: 5601869Abstract: A liquid precursor solution for use according to a method of manufacturing metal oxide electronic components includes a polyoxyalkylated metal complex dispersed in an alkane solvent. The alkane solvent is preferably n-octane.Type: GrantFiled: June 7, 1995Date of Patent: February 11, 1997Assignee: Symetrix CorporationInventors: Michael C. Scott, Carlos A. Paz de Araujo
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Patent number: 5599579Abstract: A cathode-ray tube has a faceplate on which is formed an anti-reflective coating with at least two layers. The first layer is formed on the outer surface of the faceplate by spin-coating an alcohol solution of an organometallic compound, leaving a porous metal oxide layer. The second layer is formed on the first layer by spin-coating an alcohol solution of silicon alkoxide, leaving a porous silica layer. Both layers are baked, and the first layer is baked or cured before the second layer is applied. The first layer has a higher index of refraction than the second layer.Type: GrantFiled: January 5, 1995Date of Patent: February 4, 1997Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Yasuo Iwasaki
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Patent number: 5597614Abstract: A particle dispersed glassy material includes ultrafine metal particles that are present in a high concentration. The particles are surrounded by a fixation component and, optionally, can be surrounded by a skeleton forming component. The glassy material is produced by firing a substrate having a film thereon that includes a polymer composite having the ultrafine particles uniformly dispersed therein, a fixation reagent and, optionally, a skeleton forming reagent under relatively mild conditions that do not damage the substrate. A method of making the glassy material includes the steps of making a film-forming composition that includes the polymer composite, the fixation reagent and, optionally, the skeleton forming reagent, applying the composition to a substrate, drying the applied composition to produce a film and firing the film to produce the glassy material.Type: GrantFiled: June 7, 1995Date of Patent: January 28, 1997Assignee: Mitsuboshi Belting Ltd.Inventors: Toru Noguchi, Kazuo Goto, Sigehiko Hayashi, Masahito Kawahara, Susumu Murakami, Yoshio Yamaguchi, Shigehito Deki
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Patent number: 5593726Abstract: A method of producing a wear or corrosion resistant coating by forming a coating of grains of hard metallic alloys bonded with an organic binder. The coating is applied to a substrate, heated so that the binder decomposes and then isostatically hot pressed. No liquid phase is formed in the coating during the process.Type: GrantFiled: May 6, 1994Date of Patent: January 14, 1997Assignee: APV Corporation LimitedInventors: John R. Nicholls, David J. Stephenson, Geoffrey F. Archer
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Patent number: 5593719Abstract: The present invention provides methods for modifying surfaces made from metal alloy and/or UHMWPE, preferably surfaces which are frictionally engaged, e.g., in an orthopaedic implant. The methods of the present invention reduce the coefficient of friction of the metal alloy component, reduce the shearing of fibrils from the UHMWPE component, and reduce sub-surface fatigue in the UHMWPE component. The method involves solvent immersion of the UHMWPE component to remove short chains of polyethylene at or near the surface of the component, and to swell and toughen the subsurface of the component. The method also involves firmly coating the surface of the metal alloy component with an adherent layer of diamond-like carbon ("DLC") by creating a metal-silicide interface at the surface of the metal alloy to permit firmer adhesion of DLC.Type: GrantFiled: March 29, 1994Date of Patent: January 14, 1997Assignee: Southwest Research InstituteInventors: Geoffrey Dearnaley, James Lankford, Jr.
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Patent number: 5589222Abstract: This invention relates to hydrophobic free-flowing pellets having an average particle size of 5 to 150 .mu.m, which consist of one or preferably more hydrophilic inorganic powders having a particle size of >0 to 30 .mu.m and contain one or more hydrophobic polyorganosiloxanes in a quantity of 0.03 to 15% by weight, to a process for their production and to their use.Type: GrantFiled: February 1, 1996Date of Patent: December 31, 1996Assignee: Ferro (Italia) S.r.l.Inventors: Peter Thometzek, Heinrich Christ
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Patent number: 5587201Abstract: A method for manufacturing a screen having high luminance is provided including the steps of forming a phosphor layer on a black matrix adhered to a panel, forming a filming layer by coating and drying a filming composition containing a decomposable organic polymer and a reducing agent on the phosphor layer, forming a metal layer on the filming layer, and heating the phosphor layer, filming layer and metal layer to a temperature sufficient to decompose the filming layer.Type: GrantFiled: March 30, 1995Date of Patent: December 24, 1996Assignee: Samsung Display Devices Co., Ltd.Inventors: Hwan-chul Rho, Hong-gyu Choi, Jae-myung Kim
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Patent number: 5576067Abstract: A CO gas detecting sensor for detecting the existence or absence of CO gas and a manufacturing process therefor are disclosed. The CO gas detecting sensor includes: a sintered zinc oxide body; a copper oxide coating layer formed on a side of the sintered zinc oxide body; a positive metal electrode layer (a first electrode layer) electrically connected to the copper oxide coating layer; and a negative metal electrode layer (a second electrode layer) formed on the other side of the sintered zinc oxide body. The CO gas detecting sensor according to the present invention is superior in the preference for CO gas, and has an improved measuring repeatability, as well as a superior sensitivity.Type: GrantFiled: March 1, 1995Date of Patent: November 19, 1996Assignees: Pohang Iron & Steel Co., Ltd., Research Institute of Industrial Science & TechnologyInventors: Masaru Miyayama, Byoung C. Shin
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Patent number: RE35484Abstract: A method of effecting the coloration of a restoration to be mounted on a tooth including the steps of forming a mixture of powdered dental porcelain and a photonucleable silicate glass and shaping the mixture into a dental restoration. The dental restoration is heated in an oven to its fusing temperature and allowed to cool. Selected areas of the restoration are exposed to ultra-violet light. The dental restoration is reexposed to high energy while the color of the selected areas changes.Type: GrantFiled: November 10, 1994Date of Patent: March 25, 1997Inventor: Gerald G. McLaughlin