Vertical Channel Patents (Class 438/138)
  • Patent number: 7871888
    Abstract: A p? RESURF region is formed as a surface layer in an n? semiconductor layer. Then, trenches, gate insulating films, and a thick insulating film, gate electrodes, and a gate polysilicon interconnection are formed in this order. Subsequently, a p-well region is formed using the gate polysilicon interconnection as a mask. Then n+ source regions are formed. Since the p? RESURF region is formed and the p-well region is formed after forming the gate electrodes and the gate polysilicon interconnection, the severeness of a high-temperature heat history is lowered and the diffusion depth of the p-well region is decreased. The formation of the p? RESURF region and the shallow p-well region makes it possible to reduce the on-resistance while increasing the breakdown voltage, as well as reducing the gate capacitance.
    Type: Grant
    Filed: October 23, 2008
    Date of Patent: January 18, 2011
    Assignee: Fuji Electric Systems Co., Ltd.
    Inventor: Takeyoshi Nishimura
  • Patent number: 7867855
    Abstract: A high-voltage field-effect device contains an extended drain or “drift” region having a plurality of JFET regions separated by portions of the drift region. Each of the JFET regions is filled with material of an opposite conductivity type to that of the drift region, and at least two sides of each JFET region is lined with an oxide layer. In one group of embodiments the JFET regions extend from the surface of an epitaxial layer to an interface between the epitaxial layer and an underlying substrate, and the walls of each JFET region are lined with an oxide layer. When the device is blocking a voltage in the off condition, the semiconductor material inside the JFET regions and in the drift region that separates the JFET regions is depleted. This improves the voltage-blocking ability of the device while conserving chip area. The oxide layer prevents dopant from the JFET regions from diffusing into the drift region and allowing the JFET regions to be accurately located in the drift region.
    Type: Grant
    Filed: September 29, 2009
    Date of Patent: January 11, 2011
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventor: Hamza Yilmaz
  • Publication number: 20100321840
    Abstract: A low voltage transient voltage suppressing (TVS) device supported on a semiconductor substrate supporting an epitaxial layer thereon. The TVS device further includes a bottom-source metal oxide semiconductor field effect transistor (BS-MOSFET) comprises a trench gate surrounded by a drain region encompassed in a body region disposed near a top surface of the semiconductor substrate wherein the drain region interfaces with the body region constituting a junction diode and the drain region encompassed in the body region on top of the epitaxial layer constituting a bipolar transistor with a top electrode disposed on the top surface of the semiconductor functioning as a drain/collector terminal and a bottom electrode disposed on a bottom surface of the semiconductor substrate functioning as a source/emitter electrode.
    Type: Application
    Filed: June 17, 2009
    Publication date: December 23, 2010
    Inventor: Madhur Bobde
  • Publication number: 20100317158
    Abstract: A method for forming a semiconductor device includes forming a nanotube region using a thin epitaxial layer formed on the sidewall of a trench in the semiconductor body. The thin epitaxial layer has uniform doping concentration. In another embodiment, a first thin epitaxial layer of the same conductivity type as the semiconductor body is formed on the sidewall of a trench in the semiconductor body and a second thin epitaxial layer of the opposite conductivity type is formed on the first epitaxial layer. The first and second epitaxial layers have uniform doping concentration. The thickness and doping concentrations of the first and second epitaxial layers and the semiconductor body are selected to achieve charge balance. In one embodiment, the semiconductor body is a lightly doped P-type substrate. A vertical trench MOSFET, an IGBT, a Schottky diode and a P-N junction diode can be formed using the same N-Epi/P-Epi nanotube structure.
    Type: Application
    Filed: June 12, 2009
    Publication date: December 16, 2010
    Applicant: ALPHA & OMEGA SEMICONDUCTOR, INC.
    Inventors: Hamza Yilmaz, Xiaobin Wang, Anup Bhalla, John Chen, Hong Chang
  • Patent number: 7846783
    Abstract: A process of fabricating an IC is disclosed in which a polysilicon resistor and a gate region of an MOS transistor are implanted concurrently. The concurrent implantation may be used to reduce steps in the fabrication sequence of the IC. The concurrent implantation may also be used to provide another species of transistor in the IC with enhanced performance. Narrow PMOS transistor gates may be implanted concurrently with p-type polysilicon resistors to increase on-state drive current. PMOS transistor gates over thick gate dielectrics may be implanted concurrently with p-type polysilicon resistors to reduce gate depletion. NMOS transistor gates may be implanted concurrently with n-type polysilicon resistors to reduce gate depletion, and may be implanted concurrently with p-type polysilicon resistors to provide high threshold NMOS transistors in the IC.
    Type: Grant
    Filed: November 5, 2008
    Date of Patent: December 7, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Manoj Mehrotra, Puneet Kohli
  • Patent number: 7846814
    Abstract: A method of forming a semiconductor structure includes providing a substrate and providing a detach region which is carried by the substrate. A device structure which includes a stack of crystalline semiconductor layers is provided, wherein the detach region is positioned between the device structure and substrate. The stack is processed to form a vertically oriented semiconductor device.
    Type: Grant
    Filed: June 30, 2008
    Date of Patent: December 7, 2010
    Inventor: Sang-Yun Lee
  • Patent number: 7824969
    Abstract: Disclosed herein is a tunneling fin field effect transistor comprising a fin disposed on a box layer disposed in a wafer; the wafer comprising a silicon substrate and a buried oxide layer. The fin comprises a silicide body that comprises a first silicide region and a second silicide region and forms a short between N and P doped regions. The silicide body is disposed on a surface of the buried oxide layer. A tunneling device disposed between the first silicide region and the second silicide region; the tunneling device comprising a first P-N junction. A gate electrode is further disposed around the fin; the gate electrode comprising a second P-N junction, and a third silicide region; the third silicide region forming a short between N and P doped regions in the gate electrode.
    Type: Grant
    Filed: January 23, 2008
    Date of Patent: November 2, 2010
    Assignee: International Business Machines Corporation
    Inventor: Huilong Zhu
  • Patent number: 7820494
    Abstract: A method for forming a component of TMBS type having its periphery formed of a trench with insulated walls filled with a conductor, including the steps of depositing on a semiconductor substrate a thick layer of a first insulating material and a thin layer of a second material; simultaneously digging a peripheral trench and the trenches of the component; isotropically etching the first material so that a cap overhanging a recess remains; forming a thin insulating layer; and filling the trenches and said recess with a conductive material.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: October 26, 2010
    Assignee: STMicroelectronics S.A.
    Inventor: Patrick Poveda
  • Publication number: 20100267209
    Abstract: A manufacturing method is provided for a power semiconductor device that enables reducing its on-state voltage and power loss. The semiconductor device includes a set of L-shaped trench gates 3 each formed, from the top-side surface of a p base layer 2, perpendicularly with respect to a first main surface of an n? layer 1, to reach into a location of the n? layer 1. At the lower ends of each of the trench gates 3, bottom portions 3d are provided to unilaterally extend a predetermined length in one direction parallel to the first main surface of the n? layer 1. In addition, the extending end of one of the bottom portions 3d opposes that of the other bottom portion, on the extending side of the bottom portions 3d, and the interspace between each pair of adjacent bottom portions 3d is set narrower than any other interspace between the trench-gate parts that are perpendicularly formed with respect to the first main surface of the n? layer 1.
    Type: Application
    Filed: June 29, 2010
    Publication date: October 21, 2010
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Hirofumi OOKI
  • Publication number: 20100224909
    Abstract: A first well region of a second conductivity type is formed in the portion of the semiconductor layer of the first conductivity type located in an element portion in which a vertical element is disposed, while a second well region of the second conductivity type is formed in the portion of the semiconductor layer located in a peripheral portion surrounding the element portion. A field insulating film is formed on the portion of the semiconductor layer located in a field portion interposed between the element portion and the peripheral portion. A depletion stop region of the first conductivity type having an impurity concentration higher than that of the semiconductor layer is formed in a surface portion of the semiconductor layer located under at least the portion of the field insulating film adjacent to the peripheral portion.
    Type: Application
    Filed: May 19, 2010
    Publication date: September 9, 2010
    Applicant: PANASONIC CORPORATION
    Inventors: Kanji OOHARA, Takashi Miura
  • Publication number: 20100219785
    Abstract: An inverter for driving a motor includes a plurality of power semiconductor devices. The plurality of power semiconductor devices include a resistance electrically connected between a collector and an emitter of an IGBT element. Each of the power semiconductor devices forms any one of a U-phase arm, a V-phase arm and a W-phase arm of the inverter. As a result, a discharge resistance is built in the inverter, and therefore, it is not required to prepare the discharge resistance separately. Thus, the number of components required for a motor drive apparatus can be decreased and the number of operation steps can be reduced.
    Type: Application
    Filed: June 11, 2008
    Publication date: September 2, 2010
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Satoshi Hirose, Daigo Kikuta
  • Publication number: 20100213505
    Abstract: A semiconductor device has a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type complementary to the first conductivity type arranged in or on the first semiconductor layer. The semiconductor device has a region of the first conductivity type arranged in the second semiconductor layer. A first electrode contacts the region of the first conductivity type and the second semiconductor layer. A trench extends into the first semiconductor layer, and a voltage dependent short circuit diverter structure has a highly-doped diverter region of the second conductivity type. This diverter region is arranged via an end of a channel region and coupled to a diode arranged in the trench.
    Type: Application
    Filed: February 26, 2009
    Publication date: August 26, 2010
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Franz Hirler, Frank Dieter Pfirsch
  • Patent number: 7781815
    Abstract: Pixel auxiliary capacitors (10) and pixel TFTs, which are thin-film elements, are formed on a substrate a lower electrode (Si) (3), insulating film, and an upper electrode (GE) (5) in this order. Each upper electrode (GE) (5) opposing to the corresponding lower electrode (Si) (3) is entirely enclosed within the outline of the lower electrode (Si) (3) in a plane view. Thus, it is possible to provide thin-film elements, which are not affected by edges of the lower electrode (Si) (3), a display device and a memory cell using the thin-film elements, and their fabrication methods.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: August 24, 2010
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Hiroyuki Moriwaki
  • Publication number: 20100193835
    Abstract: A trench insulation gate bipolar transistor (IGBT) power device includes a plurality of trench gates surrounded by emitter regions of a first conductivity type near a top surface of a semiconductor substrate encompassed in base regions of a second conductivity type and a collector layer disposed at a bottom surface of the semiconductor substrate. The trench IGBT power device further includes an insulation layer covering over the top surface over the trench gate and the emitter regions having emitter-base contact trenches opened therethrough between the trench gates and extending to the base regions and an emitter-base contact dopant region disposed in the base region of the second conductivity type surrounding a lower region of the contact trenches. The emitter-base contact dopant region is disposed at a distance away from a channel near the trench gates for reducing an emitter-base resistance without increasing a gate-emitter threshold voltage.
    Type: Application
    Filed: February 5, 2009
    Publication date: August 5, 2010
    Inventor: Fwu-Iuan Hshieh
  • Publication number: 20100159649
    Abstract: In one embodiment, a method comprises forming an epitaxial layer over a substrate of an opposite conductivity type, the epitaxial layer being separated by a buffer layer having a doping concentration that is substantially constant in a vertical direction down to the buffer layer. A pair of spaced-apart trenches is formed in the epitaxial layer from a top surface of the epitaxial layer down at least into the buffer layer. A dielectric material is formed in the trenches over the first and second sidewall portions. Source/collector and body regions of are formed at the top of the epitaxial layer, the body region separating the source/collector region of the pillar from a drift region of the epitaxial layer that extends from the body region to the buffer layer. An insulated gate member is then formed in each of the trenches adjacent to and insulated from the body region.
    Type: Application
    Filed: December 20, 2008
    Publication date: June 24, 2010
    Applicant: Power Integrations, Inc.
    Inventors: Vijay Parthasarathy, Sujit Banerjee
  • Publication number: 20100140657
    Abstract: A semiconductor device according to the invention includes n-type semiconductor substrate 1; trenches 15 formed in the surface portion of semiconductor substrate 1; a protruding semiconductor region between trenches 15; p-type base layer 2 in the protruding semiconductor region, p-type base layer 2 being positioned as deep as or shallower than trench 15; an n++-type emitter region or a source region in the surface portion of p-type base layer 2; gate insulator film 4a on the first side wall of the protruding semiconductor region; and gate electrode 6 on gate insulator film 4a. Trench 15 is from 0.5 ?m to 3.0 ?m deep and the short side of trench 15 is 1.0 ?m or longer. The short side of the protruding semiconductor region is from 0.5 ?m to 3.0 ?m long. Gate electrode 6 contains electrically conductive polycrystalline silicon as its main component. Gate electrode 6 is from 0.2 ?m to 1.0 ?m thick.
    Type: Application
    Filed: November 12, 2009
    Publication date: June 10, 2010
    Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.
    Inventor: Manabu TAKEI
  • Patent number: 7732876
    Abstract: A power transistor includes a first semiconductor region of a first conductivity type extending over and in contact with a second semiconductor region of the first conductivity type. Gate trenches extend into the first semiconductor region. Well regions of a second conductivity type extend over the first semiconductor region and between adjacent gate trenches. A sinker trench extends through the first semiconductor region and terminates within the second semiconductor region, and is laterally spaced from an outer one of the gate trenches with no well regions abutting sidewalls of the sinker trench. Source regions of the first conductivity type extend over the well regions. A conductive material in the sinker trench makes electrical contact with the second semiconductor region along the bottom of the sinker trench and with a drain interconnect layer extending along the top of the sinker trench.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: June 8, 2010
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Thomas E. Grebs, Gary M. Dolny
  • Publication number: 20100127306
    Abstract: Provided is a technology capable of improving a production yield of a semiconductor device having, for example, IGBG as a semiconductor element. After formation of an interconnect on the surface side of a semiconductor substrate, a supporting substrate covering the interconnect is bonded onto the interconnect. Then, a BG tape is overlapped and bonded onto the supporting substrate and the semiconductor substrate is ground from the backside. The BG tape is then peeled off and an impurity is introduced into the backside of the semiconductor substrate by ion implantation. Then, the supporting substrate is peeled off, followed by heat treatment of the semiconductor substrate.
    Type: Application
    Filed: December 22, 2009
    Publication date: May 27, 2010
    Applicant: RENESAS TECHNOLOGY CORP.
    Inventors: Hidekazu Okuda, Haruo Amada, Taizo Hashimoto
  • Publication number: 20100117117
    Abstract: According to one embodiment, a power semiconductor device comprises a semiconductor substrate. A transistor gate structure is arranged in a trench formed in the semiconductor substrate. A body region of a first conductivity type is arranged adjacent the transistor gate structure and a first highly-doped region of a second conductivity type is arranged in an upper portion of the body region. A drift zone of the second conductivity type is arranged below the body region and a second highly-doped region of the second conductivity type is arranged below the drift zone. An end-of-range irradiation region is arranged adjacent the transistor gate structure and has a plurality of vacancies. In some embodiments, at least some of the vacancies are occupied by metals.
    Type: Application
    Filed: November 10, 2008
    Publication date: May 13, 2010
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Holger Ruething, Hans-Joachim Schulze, Frank Hille, Frank Pfirsch
  • Patent number: 7700422
    Abstract: A memory array having a plurality of resistance variable memory units and method for forming the same are provided. Each memory unit includes a first electrode, a resistance variable material over the first electrode, and a first second-electrode over the resistance variable material. The first second-electrode is associated with the first electrode to define a first memory element. Each memory unit further includes a second second-electrode over the resistance variable material. The second-second electrode is associated with the first electrode to define a second memory element.
    Type: Grant
    Filed: October 25, 2006
    Date of Patent: April 20, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Jon Daley
  • Patent number: 7687825
    Abstract: Insulated gate bipolar conduction transistors (IBCTs) are provided. The IBCT includes a drift layer having a first conductivity type. An emitter well region is provided in the drift layer and has a second conductivity type opposite the first conductivity type. A well region is provided in the drift layer and has the second conductivity type. The well region is spaced apart from the emitter well region. A space between the emitter well region and the well region defines a JFET region of the IBCT. An emitter region is provided in the well region and has the first conductivity type and a buried channel layer is provided on the emitter well region, the well region and the JFET region and has the first conductivity type. Related methods of fabrication are also provided.
    Type: Grant
    Filed: September 18, 2007
    Date of Patent: March 30, 2010
    Assignee: Cree, Inc.
    Inventor: Qingchun Zhang
  • Publication number: 20100051963
    Abstract: A power transistor. One embodiment provides a power transistor having a first terminal, a second terminal and a control terminal. A support layer is formed of a first material having a first bandgap. An active region is formed of a second material having a second bandgap wider than the first bandgap, and is disposed on the support layer. The active region is arranged to form part of a current path between the first and second terminal in a forward mode of operation. The active region includes at least one pn-junction.
    Type: Application
    Filed: August 28, 2008
    Publication date: March 4, 2010
    Applicant: INFINEON TECHNOLOGIES AG
    Inventor: Ralf Otremba
  • Publication number: 20100038675
    Abstract: A power semiconductor device that realizes high-speed turnoff and soft switching at the same time has an n-type main semiconductor layer that includes lightly doped n-type semiconductor layers and extremely lightly doped n-type semiconductor layers arranged alternately and repeatedly between a p-type channel layer and an n+-type field stop layer, in a direction parallel to the first major surface of the n-type main semiconductor layer. A substrate used for manufacturing the semiconductor device is fabricated by forming trenches in an n-type main semiconductor layer 1 and performing ion implantation and subsequent heat treatment to form an n+-type field stop layer in the bottom of the trenches. The trenches are then filled with a semiconductor doped more lightly than the n-type main semiconductor layer for forming extremely lightly doped n-type semiconductor layers. The manufacturing method is applicable with variations to various power semiconductor devices such as IGBT's, MOSFET's and PIN diodes.
    Type: Application
    Filed: August 11, 2009
    Publication date: February 18, 2010
    Applicant: Fuji Electric Device Technology Co., Ltd.
    Inventor: Koh Yoshikawa
  • Publication number: 20100025725
    Abstract: A semiconductor device has a drift region (20) (third semiconductor region) of an n-type (first conductivity type); a body region (50) (second semiconductor region) of a p-type (second conductivity type) provided on the drift region (20); an emitter region (60) (first semiconductor region) of the n-type formed in the top surface of the body region (50) and separated from the drift region (20) by the body region (50); a trench (14) extending from the top surface of the emitter region (60) through the body region (50) into the drift region (20); a trench gate electrode (13) filled in the trench (14); and a semiconductor region (70) (fourth semiconductor region) of the p-type formed in contact with side faces of the trench protruding into the drift region (20). Therefore, the semiconductor device can suppress a surge voltage at turn-off, and can be produced easily.
    Type: Application
    Filed: November 13, 2007
    Publication date: February 4, 2010
    Inventor: Hiroaki Tanaka
  • Patent number: 7642139
    Abstract: A production method for a semiconductor device, including the steps of: forming a semiconductor layer of the first conductivity on the semiconductor substrate; forming a trench in the semiconductor layer, the trench penetrating through the semiconductor layer to reach the semiconductor substrate; filling a filling material in a predetermined bottom portion of the trench, so that a filling material portion is provided in the bottom portion of the trench up to a predetermined upper surface position which is shallower than an interface between the semiconductor substrate and the semiconductor layer; and, after the filling step, introducing an impurity of the second conductivity into a portion of the semiconductor layer exposed to an interior side wall of the trench.
    Type: Grant
    Filed: December 24, 2004
    Date of Patent: January 5, 2010
    Assignee: Rohm Co., Ltd.
    Inventor: Masaru Takaishi
  • Publication number: 20090315071
    Abstract: A manufacturing method of a semiconductor device 10 includes forming a plurality of second conductive second semiconductor regions at specific intervals on one main surface of a first conductive first semiconductor region, the plurality of second conductive second semiconductor regions being opposite to the first conductive first semiconductor region, forming a plurality of the first conductive third semiconductor regions on a main surface of the second semiconductor region, the plurality of the first conductive third regions being separated from each other, forming a plurality of holes at specific intervals on an another main surface which faces the one main surface of the first semiconductor region, the plurality of holes being separated from each other, forming a pair of adjacent second conductive fourth semiconductor regions which are alternately connected at a bottom part of the hole within the first semiconductor region, and burying an electrode within the hole.
    Type: Application
    Filed: June 10, 2009
    Publication date: December 24, 2009
    Applicant: Sanken Electric Co., Ltd.
    Inventors: Akio IWABUCHI, Shuichi KANEKO
  • Patent number: 7635892
    Abstract: A semiconductor device has a semiconductor substrate having a first main surface, a second main surface opposite to the first main surface, and a recess defined in the second main surface by side surfaces and a bottom surface, a semiconductor region provided in the bottom surface of the recess of the semiconductor substrate, semiconductor regions provided in the surface of a peripheral region on the second main surface side, and insulating films provided on the side surfaces of the recess to electrically insulate the semiconductor regions.
    Type: Grant
    Filed: November 20, 2006
    Date of Patent: December 22, 2009
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Norifumi Tokuda, Shigeru Kusunoki
  • Publication number: 20090309131
    Abstract: An IGBT transistor includes a drift region, at least one body region housed in the drift region and having a first type of conductivity, and a conduction region, which crosses the body region in a direction perpendicular to a surface of the drift region and has the first type of conductivity and a lower resistance than the body region. The conduction region includes a plurality of implant region, arranged at respective depths from the surface of the drift region.
    Type: Application
    Filed: May 11, 2006
    Publication date: December 17, 2009
    Applicant: STMicroelectronics S.r.l.
    Inventors: Davide Giuseppe Patti, Guiditta Settanni
  • Publication number: 20090289278
    Abstract: A semiconductor device includes: a collector layer of a first conductivity type; a semiconductor area of a second conductivity type formed on the collector layer; a base layer of the first conductivity type formed on the semiconductor area; an emitter layer of the second conductivity type formed in an island shape on the base layer; an insulation film formed on the semiconductor area, the base layer and the emitter layer; a gate electrode formed on the insulation film; an emitter electrode formed on the base layer and the emitter layer; a collector electrode formed on the collector layer; and a crystal defect area of the first conductivity type locally formed in the collector layer. A position of a defect concentration peak of the crystal defect area is in the collector layer. An edge of the crystal defect area adjoins the semiconductor area or is located in the semiconductor area.
    Type: Application
    Filed: May 22, 2009
    Publication date: November 26, 2009
    Applicant: SANKEN ELECTRIC CO., LTD.
    Inventor: Katsuyuki TORII
  • Publication number: 20090283799
    Abstract: According to one embodiment, a semiconductor device comprises a body of a first conductivity type having a source region and a channel, the body being in contact with a top contact layer. The device also comprises a gate arranged adjacent the channel and a drift zone of a second conductivity type arranged between the body and a bottom contact layer. An integrated diode is formed partially by a first zone of the first conductivity type within the body and being in contact with the top contact layer and a second zone of the second conductivity type being in contact with the bottom contact layer. A reduced charge carrier concentration region is formed in the drift zone having a continuously increasing charge carrier lifetime in the vertical direction so that the charge carrier lifetime is lowest near the body and highest near the bottom contact layer.
    Type: Application
    Filed: May 13, 2008
    Publication date: November 19, 2009
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Holger Ruething, Hans-Joachim Schulze, Frank Hille, Frank Pfirsch
  • Publication number: 20090267112
    Abstract: A semiconductor device arrangement comprises a semiconductor device and an injector device. The semiconductor device comprises a first current electrode region of a first conductivity type, a second current electrode region of the first conductivity type, a drift region between the first and the second current electrode regions, and at least one floating region of a second conductivity type formed in the drift region. The injector device is arranged to receive an activation signal when the semiconductor device is turned on and to inject charge carriers of the second conductivity type into the drift region and the at least one floating region in response to receiving the activation signal.
    Type: Application
    Filed: September 22, 2006
    Publication date: October 29, 2009
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Jean-Michel Reynes, Philippe Lance, Stefanov Evgieniy, Yann Weber
  • Publication number: 20090268357
    Abstract: A circuit for protecting a semiconductor from electrostatic discharge events includes a Zener diode (21) in series with a resistor (22) between a power line HV VDD and a ground fine HV VSS. A gate of a DMOS device (23) is connected to a node between the diode and the resistor. The drain and source of the DMOS are connected between the power lines. During an ESD event, the gate voltage of the DMOS increases and the ESD current will be discharged through the DMOS to ground. When the current exceeds the capacity of the channel of the DMOS, a parasitic bipolar transistor or transistors associated with the DMOS device acts in a controlled snapback to discharge the current to ground. The use of a vertical DMOS (VDMOS) instead of a lateral DMOS (LDMOS), can reduce the area of the device and improve the protection.
    Type: Application
    Filed: January 7, 2005
    Publication date: October 29, 2009
    Inventors: Koen Reynders, Peter Moens
  • Publication number: 20090212321
    Abstract: A trench PT IGBT (or NPT IGBT) having clamp diodes for ESD protection and prevention of shortage among gate, emitter and collector. The clamp diodes comprise multiple back-to-back Zener Diode composed of doped regions in a polysilicon layer doped with dopant ions of a first conductivity type next to a second conductivity type disposed on an insulation layer above said semiconductor power device. Trench gates are formed underneath the contact areas of the clamp diodes as the buffer layer for prevention of shortage.
    Type: Application
    Filed: April 15, 2009
    Publication date: August 27, 2009
    Applicant: FORCE MOS TECHNOLOGY CO. LTD.
    Inventor: FU-YUAN HSIEH
  • Publication number: 20090206364
    Abstract: According to embodiments, an insulated gate bipolar transistor (IGBT) may include a first conductive type collector ion implantation area, formed within a substrate, second conductive type first buffer layers, formed over the collector ion implantation area and each including a first segment buffer layer and a second segment buffer layer, a first conductive type poly layer formed from a surface of the substrate to the collector ion implantation area, the first conductive type poly layer having a contact structure, a second buffer layer of the second conductive type, formed in the substrate area next to the first conductive type poly layer. According to embodiments, a segment buffer layer may have different concentrations according areas. Accordingly, amounts of hole currents injected through the buffer layers may differ according to areas.
    Type: Application
    Filed: December 26, 2008
    Publication date: August 20, 2009
    Inventor: Sang-Yong Lee
  • Patent number: 7569431
    Abstract: A semiconductor device and method of manufacturing the same includes an n?-single crystal silicon substrate, with an oxide film selectively formed thereon. On the oxide film, gate polysilicon is formed. The surface of the gate polysilicon is covered with a gate oxide film whose surface is covered with a cathode film doped in an n-type with an impurity concentration higher than that of the substrate as an n?-drift layer. In the cathode film, a section in contact with the substrate becomes an n+-buffer region with a high impurity concentration, next to which a p-base region is formed. Next to the p-base region, an n+-source region is formed. On the cathode film, an interlayer insulator film is selectively formed on which an emitter electrode is formed. A semiconductor device such as an IGBT is obtained with a high rate of acceptable products, an excellent on-voltage to turn-off loss tradeoff and an excellent on-voltage to breakdown voltage tradeoff.
    Type: Grant
    Filed: February 4, 2008
    Date of Patent: August 4, 2009
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventor: Manabu Takei
  • Patent number: 7566619
    Abstract: A method of forming an integrated circuit device includes forming a non-planar field-effect transistor in a cell array portion of a semiconductor substrate and forming a planar field-effect transistor in a peripheral circuit portion of the semiconductor substrate. The non-planar field-effect transistor may be selected from the group of a FinFET and a recessed gate FET. Dopants may be implanted into a channel region of the non-planar field-effect transistor, and a cell protection layer may be formed on the non-planar field-effect transistor. Then, dopants may be selectively implanted into a channel region of the planar field-effect transistor using the cell protection layer as a mask to block implanting of the dopants into the channel region of the non-planar field-effect transistor.
    Type: Grant
    Filed: April 20, 2005
    Date of Patent: July 28, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-Joon Ahn, Dong-Gun Park, Choong-Ho Lee, Hee-Soo Kang
  • Patent number: 7563653
    Abstract: An electrostatic discharge (ESD) protection device includes a diode located in a substrate and an N-type metal oxide semiconductor (NMOS) device located in the substrate adjacent the diode, wherein both the diode and the NMOS are coupled to an input device, and at least a portion of the diode and at least a portion of the NMOS device collectively form an ESD protection device.
    Type: Grant
    Filed: May 1, 2008
    Date of Patent: July 21, 2009
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Jian-Hsing Lee, Deng-Shun Chang
  • Publication number: 20090159927
    Abstract: An integrated circuit device includes a semiconductor body fitted with a first electrode and a second electrode on opposite surfaces. A control electrode on an insulating layer controls channel regions of body zones for a current flow between the two electrodes. A drift section adjoining the channel regions comprises drift zones and charge compensation zones. A part of the charge compensation zones includes conductively connected charge compensation zones electrically connected to the first electrode. Another part includes nearly-floating charge compensation zones, so that an increased control electrode surface has a monolithically integrated additional capacitance CZGD in a cell region of the semiconductor device.
    Type: Application
    Filed: December 21, 2007
    Publication date: June 25, 2009
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Winfried Kaindl, Carolin Tolksdorf, Michael Rueb
  • Patent number: 7510924
    Abstract: The invention is directed to a memory cell on a substrate having a plurality of shallow trench isolations form therein, wherein top surfaces of the shallow trench isolations are lower than a top surface of the substrate and the shallow trench isolations together define a vertical fin structure of the substrate. The memory comprises a straddle gate, a carrier trapping layer and at least two source/drain regions. The straddle gate is located on the substrate and straddles over the vertical fin structure. The carrier trapping layer is located between the straddle gate and the substrate. The source/drain regions are located in a portion of the vertical fin structure of the substrate exposed by the straddle gate.
    Type: Grant
    Filed: August 9, 2007
    Date of Patent: March 31, 2009
    Assignee: Macronix International Co., Ltd.
    Inventors: Tzu-Hsuan Hsu, Erh-Kun Lai, Hang-Ting Lue, Chia-Hua Ho
  • Patent number: 7507608
    Abstract: The collector or anode of a non-punch through IGBT formed in a float zone silicon wafer is formed by a P doped amorphous silicon layer deposited on the back surface of an ultra thin wafer. A DMOS structure is formed on the top surface of the wafer before the bottom structure is formed. A back contact is formed over the amorphous silicon layer. No alloy step is needed to activate the anode defined by the P type amorphous silicon.
    Type: Grant
    Filed: December 8, 2005
    Date of Patent: March 24, 2009
    Assignee: International Rectifier Corporation
    Inventors: Richard Francis, Chiu Ng, Hamilton Lu, Ranadeep Dutta
  • Publication number: 20090072242
    Abstract: Insulated gate bipolar conduction transistors (IBCTs) are provided. The IBCT includes a drift layer having a first conductivity type. An emitter well region is provided in the drift layer and has a second conductivity type opposite the first conductivity type. A well region is provided in the drift layer and has the second conductivity type. The well region is spaced apart from the emitter well region. A space between the emitter well region and the well region defines a JFET region of the IBCT. An emitter region is provided in the well region and has the first conductivity type and a buried channel layer is provided on the emitter well region, the well region and the JFET region and has the first conductivity type. Related methods of fabrication are also provided.
    Type: Application
    Filed: September 18, 2007
    Publication date: March 19, 2009
    Inventor: Qingchun Zhang
  • Publication number: 20090075433
    Abstract: A semiconductor device including a drift layer of a first conductivity type formed on a surface of a semiconductor substrate. A surface of the drift layer has a second area positioned on an outer periphery of a first area. A cell portion formed in the first area includes a first base layer of a second conductivity type, a source layer and a control electrode formed in the first base layer and the source layer. The device also includes a terminating portion formed in the drift layer including a second base layer of a second conductivity type, an impurity diffused layer of a second conductivity type, and a metallic compound whose end surface on the terminating portion side is positioned on the cell portion side away from the end surface of the impurity diffused layer on the terminal portion side.
    Type: Application
    Filed: November 14, 2008
    Publication date: March 19, 2009
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Satoshi Aida, Shigeo Kouzuki, Masaru Izumisawa, Hironori Yoshioka
  • Patent number: 7498619
    Abstract: A power electronic device is integrated on a semiconductor substrate of a first type of conductivity. The device includes a plurality of elemental units, and each elemental unit includes a body region of a second type of conductivity which is realized on a semiconductor layer of the first type of conductivity formed on the semiconductor substrate, and a column region of the first type of conductivity which is realized in said semiconductor layer below the body region. The semiconductor layer includes multiple semiconductor layers which overlap each other. The resistivity of each layer is different from that of the other layers. The column region includes a plurality of doped sub-regions, each realized in one of the semiconductor layers. The amount of charge of each doped sub-region balances the amount of charge of the corresponding semiconductor layer in which each doped sub-region is realized.
    Type: Grant
    Filed: February 23, 2006
    Date of Patent: March 3, 2009
    Assignee: STMicroelectronics S.r.l.
    Inventors: Mario G. Saggio, Ferruccio Frisina
  • Publication number: 20090050932
    Abstract: To provide a semiconductor device that exhibits a high breakdown voltage, excellent thermal properties, a high latch-up withstanding capability and low on-resistance. The semiconductor device according to the invention, which includes a buried insulator region 5 disposed between an n?-type drift layer 3 and a first n-type region 7 above n?-type drift layer 3, facilitates limiting the emitter hole current, preventing latch-up from occurring, raising neither on-resistance nor on-voltage. The semiconductor device according to the invention, which includes a p-type region 4 disposed between the buried insulator region 5 and n?-type drift layer 3, facilitates depleting n?-type drift layer 3 in the OFF-state of the device.
    Type: Application
    Filed: February 28, 2006
    Publication date: February 26, 2009
    Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.
    Inventors: Hong-fei Lu, Shinichi Jimbo
  • Patent number: 7482205
    Abstract: A starting wafer for high voltage semiconductor devices is formed by implanting arsenic into the top surface of a p type silicon substrate wafer to a depth of about 0.1 micron. A N type non-graded epitaxial layer is then grown atop the substrate without any diffusion step so that the arsenic is not intentionally driven. Device junction are then diffused into the epitaxially grown layer.
    Type: Grant
    Filed: December 11, 2006
    Date of Patent: January 27, 2009
    Assignee: International Rectifier Corporation
    Inventor: Thomas Herman
  • Patent number: 7476598
    Abstract: A photodiode and a method of manufacturing the photodiode are provided. The method includes forming a diode junction structure including a light receiving unit and an electrode unit on a semiconductor substrate, forming a buffer oxide layer and an etching blocking layer on the junction structure, forming an interlayer insulating layer and an intermetal insulating layer and an interconnecting structure, exposing the etching blocking layer by etching the intermetal insulating layer and the interlayer insulating layer, removing a portion of the etching blocking layer and the buffer oxide layer of the light-receiving unit by dry etching, and exposing a semiconductor surface of the light-receiving unit by wet etching.
    Type: Grant
    Filed: February 2, 2007
    Date of Patent: January 13, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ho-Sung Son, Sung-Ryoul Bae, Dong-Kyun Nam
  • Publication number: 20090008674
    Abstract: Double gate IGBT having both gates referred to a cathode in which a second gate is for controlling flow of hole current. In on-state, hole current can be largely suppressed. While during switching, hole current is allowed to flow through a second channel. Incorporating a depletion-mode p-channel MOSFET having a pre-formed hole channel that is turned ON when 0V or positive voltages below a specified threshold voltage are applied between second gate and cathode, negative voltages to the gate of p-channel are not used. Providing active control of holes amount that is collected in on-state by lowering base transport factor through increasing doping and width of n well or by reducing injection efficiency through decreasing doping of deep p well. Device includes at least anode, cathode, semiconductor substrate, n? drift region, first & second gates, n+ cathode region; p+ cathode short, deep p well, n well, and pre-formed hole channel.
    Type: Application
    Filed: September 27, 2007
    Publication date: January 8, 2009
    Inventor: Florin Udrea
  • Patent number: 7470598
    Abstract: A method of forming a circuit includes providing a first substrate; positioning an interconnect region on a surface of the first substrate; providing a second substrate; positioning a device structure on a surface of the second substrate, the device structure including a stack of at least three doped semiconductor material layers; and bonding the device structure to the interconnect region.
    Type: Grant
    Filed: March 29, 2005
    Date of Patent: December 30, 2008
    Inventor: Sang-Yun Lee
  • Publication number: 20080315249
    Abstract: A semiconductor substrate has a trench in a first main surface. An insulated gate field effect part includes a gate electrode formed in the first main surface. A potential fixing electrode fills the trench and has an expanding part expanding on the first main surface so that a width thereof is larger than the width of the trench. An emitter electrode is formed on the first main surface and insulated from the gate electrode electrically and connected to a whole upper surface of the expanding part of the potential fixing electrode. Thus, a semiconductor device capable of enhancing reliability in order to prevent an aluminum spike from generating and a manufacturing method thereof can be provided.
    Type: Application
    Filed: December 14, 2007
    Publication date: December 25, 2008
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Tadaharu Minato, Kazutoyo Takano
  • Publication number: 20080315250
    Abstract: A trench-type insulated-gate semiconductor device is disclosed that includes unit cells having a trench gate structure that are scattered uniformly throughout the active region of the device. The impurity concentration in the portion of a p-type base region, sandwiched between an n+-type emitter region and an n-type drift layer and in contact with a gate electrode formed in the trench via a gate insulator film, is the lowest in the portion thereof sandwiched between the bottom plane of n+-type emitter regions and the bottom plane of p-type base region and parallel to the major surface of a silicon substrate. The trench-type insulate-gate semiconductor device according to the invention minimizes the variation of the gate threshold voltage.
    Type: Application
    Filed: May 16, 2008
    Publication date: December 25, 2008
    Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.
    Inventor: Yuichi ONOZAWA