Common Active Region Patents (Class 438/213)
  • Patent number: 10014396
    Abstract: A spin control electronic device operable at room temperature according to an embodiment of the present invention includes a transfer channel that includes a low-dimensional nanostructure, the nanostructure being located on a substrate, having an elongate shape in a first direction and having a cross section, cut along a second direction that is perpendicular to the first direction, in the shape of a triangle; a source electrode located on the substrate and intersecting the transfer channel, the source electrode covering part of the transfer channel; and a drain electrode spaced apart from the source electrode on the substrate, the drain electrode intersecting the transfer channel and covering part of the transfer channel.
    Type: Grant
    Filed: April 14, 2017
    Date of Patent: July 3, 2018
    Assignee: Korea Institute of Science and Technology
    Inventors: Joon Yeon Chang, Tae Eon Park, Byoung Chul Min, Hyun Cheol Koo, Suk Hee Han
  • Patent number: 9053934
    Abstract: A method of fabricating a fin field effect transistor (FinFET) comprises providing a substrate comprising a major surface, forming a first and second fin extending upward from the substrate major surface to a first height, forming an insulation layer comprising a top surface extending upward from the substrate major surface to a second height less than the first height, wherein a portion of the first and second fin extend beyond the top surface of the insulation layer. The method also includes selectively growing an epitaxial layer covering each fin, annealing the substrate to have each fin covered by a bulbous epitaxial layer defining an hourglass shaped cavity between adjacent fins, wherein the cavity comprises an upper and lower portion. The method includes forming a metal material over the bulbous epitaxial layer and annealing the substrate to convert the bulbous epitaxial layer bordering the lower portion of the cavity to silicide.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: June 9, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Donald Y. Chao, Hou-Yu Chen, Shyh-Horng Yang
  • Patent number: 9054192
    Abstract: A stack of a germanium-containing layer and a dielectric cap layer is formed on an insulator layer. The stack is patterned to form germanium-containing semiconductor fins and germanium-containing mandrel structures with dielectric cap structures thereupon. A dielectric masking layer is deposited and patterned to mask the germanium-containing semiconductor fins, while physically exposing sidewalls of the germanium-containing mandrel structures. A ring-shaped compound semiconductor fin is formed around each germanium-containing mandrel structure by selective epitaxy of a compound semiconductor material. A center portion of each germanium-containing mandrel can be removed to physically expose inner sidewalls of the ring-shaped compound semiconductor fin. A high-mobility compound semiconductor layer can be formed on physically exposed surfaces of the ring-shaped compound semiconductor fin.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: June 9, 2015
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Cheng-Wei Cheng, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Dae-Gyu Park, Devendra K. Sadana
  • Patent number: 9034705
    Abstract: A method of forming a semiconductor device is disclosed. At least one gate structure is provided on a substrate, wherein the gate structure includes a first spacer formed on a sidewall of a gate. A first disposable spacer material layer is deposited on the substrate covering the gate structure. The first disposable spacer material layer is etched to form a first disposable spacer on the first spacer. A second disposable spacer material layer is deposited on the substrate covering the gate structure. The second disposable spacer material layer is etched to form a second disposable spacer on the first disposable spacer. A portion of the substrate is removed, by using the first and second disposable spacers as a mask, so as to form two recesses in the substrate beside the gate structure. A stress-inducing layer is formed in the recesses.
    Type: Grant
    Filed: March 26, 2013
    Date of Patent: May 19, 2015
    Assignee: United Microelectronics Corp.
    Inventors: Tsai-Yu Wen, Tsuo-Wen Lu, Yu-Ren Wang, Chin-Cheng Chien, Tien-Wei Yu, Hsin-Kuo Hsu, Yu-Shu Lin, Szu-Hao Lai, Ming-Hua Chang
  • Patent number: 8981469
    Abstract: A problem associated with n-channel power MOSFETs and the like that the following is caused even by relatively slight fluctuation in various process parameters is solved: source-drain breakdown voltage is reduced by breakdown at an end of a p-type body region in proximity to a portion in the vicinity of an annular intermediate region between an active cell region and a chip peripheral portion, arising from electric field concentration in that area. To solve this problem, the following measure is taken in a power semiconductor device having a superjunction structure in the respective drift regions of a first conductivity type of an active cell region, a chip peripheral region, and an intermediate region located therebetween: the width of at least one of column regions of a second conductivity type comprising the superjunction structure in the intermediate region is made larger than the width of the other regions.
    Type: Grant
    Filed: September 25, 2013
    Date of Patent: March 17, 2015
    Assignee: Renesas Electronics Corporation
    Inventors: Tomohiro Tamaki, Yoshito Nakazawa
  • Publication number: 20140295629
    Abstract: A method of forming a semiconductor device is disclosed. At least one gate structure is provided on a substrate, wherein the gate structure includes a first spacer formed on a sidewall of a gate. A first disposable spacer material layer is deposited on the substrate covering the gate structure. The first disposable spacer material layer is etched to form a first disposable spacer on the first spacer. A second disposable spacer material layer is deposited on the substrate covering the gate structure. The second disposable spacer material layer is etched to form a second disposable spacer on the first disposable spacer. A portion of the substrate is removed, by using the first and second disposable spacers as a mask, so as to form two recesses in the substrate beside the gate structure. A stress-inducing layer is formed in the recesses.
    Type: Application
    Filed: March 26, 2013
    Publication date: October 2, 2014
    Applicant: United Microelectronics Corp.
    Inventors: Tsai-Yu Wen, Tsuo-Wen Lu, Yu-Ren Wang, Chin-Cheng Chien, Tien-Wei Yu, Hsin-Kuo Hsu, Yu-Shu Lin, Szu-Hao Lai, Ming-Hua Chang
  • Patent number: 8796089
    Abstract: An embodiment relates to a method of forming a semiconductor structure, comprising: forming a first semiconductor layer; forming a second semiconductor layer over the first semiconductor layer; forming a third semiconductor layer over the second semiconductor layer; forming an opening in the first, second and third semiconductor layers; forming a conductive region within the first, the and third semiconductor layer, the conductive region surrounding the opening, the conductive region being electrically coupled to the first semiconductor layer; forming a dielectric layer in the opening and over the conductive region; and forming a conductive layer over the dielectric layer in the opening.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: August 5, 2014
    Assignee: Infineon Technologies AG
    Inventors: Detlef Wilhelm, Guenter Pfeifer, Bernd Eisener, Dieter Claeys
  • Patent number: 8772862
    Abstract: A vertical channel transistor includes a pillar formed over a substrate, and a gate electrode formed on sidewalls of the pillar, wherein the pillar includes a source area, a vertical channel area over the source area, a drain area over the vertical channel area, and a leakage prevention area interposed between the vertical channel area and the drain area.
    Type: Grant
    Filed: December 12, 2012
    Date of Patent: July 8, 2014
    Assignee: SK Hynix Inc.
    Inventor: Heung-Jae Cho
  • Publication number: 20140170820
    Abstract: A method includes providing a semiconductor substrate having an active region and forming an isolation structure to isolate the active region. First and second gate structures are formed over the active region. First and second doped regions are formed within the active region of the substrate, the first doped region has a first conductivity type, the second doped region has the second conductivity type. The first and second gate structures are interposed between the first and second doped regions.
    Type: Application
    Filed: February 24, 2014
    Publication date: June 19, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming Zhu, Lee-Wee Teo, Harry Hak-Lay Chuang
  • Patent number: 8697514
    Abstract: A method for forming a field effect transistor device includes patterning an arrangement of fin portions on a substrate, patterning a gate stack portion over portions of the fin portions and the substrate, growing an epitaxial material from the fin portions that electrically connects portions of adjacent fin structures, and removing a portion of the gate stack portion to expose a portion of the substrate.
    Type: Grant
    Filed: November 10, 2011
    Date of Patent: April 15, 2014
    Assignee: International Business Machines Corporation
    Inventors: Shahid A. Butt, Robert C. Wong
  • Publication number: 20140099759
    Abstract: Embodiments of an apparatus and methods for providing three-dimensional complementary metal oxide semiconductor devices comprising modulation doped transistors are generally described herein. Other embodiments may be described and claimed.
    Type: Application
    Filed: December 12, 2013
    Publication date: April 10, 2014
    Inventors: Ravi Pillarisetty, Mantu Hudait, Marko Radosavljevic, Willy Rachmady, Gilbert Dewey, Jack Kavalieros
  • Patent number: 8659092
    Abstract: A fabricating method of CMOS transistor includes following steps. A first gate and a second gate are formed on a substrate. A gate insulator is formed on the substrate to cover the first and second gates. A first source, a first drain, a second source, and a second drain are formed on the gate insulator. The first source and the first drain are above the first gate. The second source and the second drain are above the second gate. A first channel layer and a mask layer are formed on the gate insulator. The mask layer is on the first channel layer. The first channel layer is above the first gate and contacts with the first source and the first drain. A second channel layer is formed on the gate insulator. The second channel layer is above the second gate and contacts with the second source and the second drain.
    Type: Grant
    Filed: November 10, 2010
    Date of Patent: February 25, 2014
    Assignee: Au Optronics Corporation
    Inventors: Chung-Tao Chen, Ta-Wei Chiu, Yu-Pu Lin, Yi-Wei Chen
  • Patent number: 8597994
    Abstract: A semiconductor device is provided that includes a first inverter having a first p-channel FinFET and a first n-channel FinFET each coupled to a first shared contact forming a first cell node and having a first common gate. A second inverter is included having a second p-channel FinFET and a second n-channel FINFET each coupled to a second shared contact forming a second cell node and having a second common gate aligned with the first shared contact of the first inverter forming a latch circuit. Additionally, a pair of FinFET passgates are included each having a drain contact respectively coupled the first and second cell nodes and a source contact connected to one of a complementary bit line. Finally, a word line is connected to a gate contact of each of the pair of FinFET passgates to provide a static random access memory cell.
    Type: Grant
    Filed: May 23, 2011
    Date of Patent: December 3, 2013
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventor: Randy W. Mann
  • Patent number: 8592872
    Abstract: A semiconductor device includes first and second p-type diffusion regions, and first and second n-type diffusion regions that are each electrically connected to a common node. Each of a number of conductive features within a gate electrode level region is fabricated from a respective originating rectangular-shaped layout feature, with a centerline of each originating rectangular-shaped layout feature aligned in a parallel manner. The conductive features respectively form gate electrodes of first and second PMOS transistor devices, and first and second NMOS transistor devices. Widths of the first and second p-type diffusion regions are substantially equal, such that the first and second PMOS transistor devices have substantially equal widths. Widths of the first and second n-type diffusion regions are substantially equal, such that the first and second NMOS transistor devices have substantially equal widths.
    Type: Grant
    Filed: August 17, 2012
    Date of Patent: November 26, 2013
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Jim Mali, Carole Lambert
  • Patent number: 8513739
    Abstract: Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V.
    Type: Grant
    Filed: May 9, 2011
    Date of Patent: August 20, 2013
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 8455313
    Abstract: A method is provided for fabricating a finFET device. Fin structures are formed over a BOX layer. The fin structures include a semiconductor layer and extend in a first direction. A gate stack is formed on the BOX layer over the fin structures and extending in a second direction. The gate stack includes a high-K dielectric layer and a metal gate. Gate spacers are formed on sidewalls of the gate stack, and an epi layer is deposited to merge the fin structures. Ions are implanted to form source and drain regions, and dummy spacers are formed on sidewalls of the gate spacers. The dummy spacers are used as a mask to recess or completely remove an exposed portion of the epi layer. Silicidation forms silicide regions that abut the source and drain regions and each include a vertical portion located on the vertical sidewall of the source or drain region.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: June 4, 2013
    Assignee: International Business Machines Corporation
    Inventors: Veeraraghavan S. Basker, Andres Bryant, Huiming Bu, Wilfried Haensch, Effendi Leobandung, Chung-Hsun Lin, Theodorus E. Standaert, Tenko Yamashita, Chun-chen Yeh
  • Patent number: 8426298
    Abstract: A semiconductor structure includes a semiconductor substrate, and an NMOS device at a surface of the semiconductor substrate, wherein the NMOS device comprises a Schottky source/drain extension region. The semiconductor structure further includes a PMOS device at the surface of the semiconductor substrate, wherein the PMOS device comprises a source/drain extension region comprising only non-metal materials. Schottky source/drain extension regions may be formed for both PMOS and NMOS devices, wherein the Schottky barrier height of the PMOS device is reduced by forming the PMOS device over a semiconductor layer having a low valence band.
    Type: Grant
    Filed: May 23, 2011
    Date of Patent: April 23, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hsin Ko, Hung-Wei Chen, Chung-Hu Ke, Wen-Chin Lee
  • Patent number: 8378392
    Abstract: A trench Metal Oxide Semiconductor Field Effect Transistor with improved body region structures is disclosed. By forming the inventive body region structures with concave-arc shape with respect to epitaxial layer, a wider interfaced area between the body region and the epitaxial layer is achieved, thus increasing capacitance between drain and source Cds. Moreover, the invention further comprises a Cds enhancement doped region interfaced with said body region having higher doping concentration than the epitaxial layer to further enhancing Cds without significantly impact breakdown voltage.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: February 19, 2013
    Assignee: Force Mos Technology Co., Ltd.
    Inventor: Fu-Yuan Hsieh
  • Publication number: 20120299106
    Abstract: A semiconductor device is provided that includes a first inverter having a first p-channel FinFET and a first n-channel FinFET each coupled to a first shared contact forming a first cell node and having a first common gate. A second inverter is included having a second p-channel FinFET and a second n-channel FINFET each coupled to a second shared contact forming a second cell node and having a second common gate aligned with the first shared contact of the first inverter forming a latch circuit. Additionally, a pair of FinFET passgates are included each having a drain contact respectively coupled the first and second cell nodes and a source contact connected to one of a complementary bit line. Finally, a word line is connected to a gate contact of each of the pair of FinFET passgates to provide a static random access memory cell.
    Type: Application
    Filed: May 23, 2011
    Publication date: November 29, 2012
    Applicant: GLOBALFOUNDRIES INC.
    Inventor: Randy W. MANN
  • Patent number: 8318523
    Abstract: A thin film transistor, a method of fabricating the same, and an OLED display device having the same. The thin film transistor includes a substrate, a semiconductor layer disposed on the substrate and having a channel region, source and drain regions, and a body contact region, a gate insulating layer disposed on the semiconductor layer to expose the body contact region, a silicon layer disposed on the gate insulating layer and contacting the body contact region exposed by the gate insulating layer, a gate electrode disposed on the silicon layer, an interlayer insulating layer disposed on the gate electrode, and source and drain electrodes disposed on the interlayer insulating layer and electrically connected with the source and drain regions, wherein the body contact region is formed in an edge region of the semiconductor layer.
    Type: Grant
    Filed: March 17, 2009
    Date of Patent: November 27, 2012
    Assignee: Samsung Display Co., Ltd.
    Inventors: Byoung-Keon Park, Jin-Wook Seo, Tae-Hoon Yang, Kil-Won Lee, Dong-Hyun Lee
  • Patent number: 8304306
    Abstract: A method for forming a semiconductor device includes forming a first field effect transistor (FET) and a second FET on a substrate, the first FET comprising a first interfacial oxide layer, and the second FET comprising a second interfacial oxide layer; encapsulating the first interfacial oxide layer of the first FET; and performing lateral oxidation of the second interfacial oxide layer of the second FET, wherein the lateral oxidation of the second interfacial oxide layer of the second FET converts a portion of the substrate located underneath the second FET into additional interfacial oxide.
    Type: Grant
    Filed: March 28, 2011
    Date of Patent: November 6, 2012
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Eduard A. Cartier, Martin M. Frank, Marwan H. Khater
  • Publication number: 20120238065
    Abstract: A method of fabricating a MOS device comprises steps as follows: An interfacial layer, a high-k dielectric layer and a cover layer on a substrate are sequentially formed. Then an in-situ wet etching step is performed by sequentially using a first etching solution to etch the cover layer and using a second etching solution to etch the high-k dielectric layer and the interfacial layer until the substrate is exposed, wherein the second etching solution is a mixed etching solution containing the first etching solution.
    Type: Application
    Filed: May 29, 2012
    Publication date: September 20, 2012
    Applicants: Lam Research Corporation, UNITED MICROELECTRONICS CORPORATION
    Inventors: Chiu-Hsien YEH, Chan-Lon YANG, Chin-Cheng CHIEN, Lien-Fa HUNG, Yun-Cheng KAO
  • Publication number: 20120063212
    Abstract: According to one embodiment, a semiconductor device includes a first transistor and a second transistor having a conductivity type which is different from a conductivity type of the first transistor, the first transistor and the second transistor being disposed on a semiconductor substrate such that a gate electrode of the first transistor and a gate electrode of the second transistor are connected to each other. The gate electrode of the first transistor includes first impurities and second impurities which suppress diffusion of the first impurities, and a concentration peak of the first impurities is formed at a shallower position than a concentration peak of the second impurities.
    Type: Application
    Filed: March 16, 2011
    Publication date: March 15, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Masahiko Kanda, Koji Miyamoto
  • Patent number: 8114741
    Abstract: An integrated circuit structure and a method of forming the same are provided. The method includes providing a surface; performing an ionized oxygen treatment to the surface; forming an initial layer comprising silicon oxide using first process gases comprising a first oxygen-containing gas and tetraethoxysilane (TEOS); and forming a silicate glass over the initial layer. The method may further include forming a buffer layer using second process gases comprising a second oxygen-containing gas and TEOS, wherein the first and the second process gases have different oxygen-to-TEOS ratio.
    Type: Grant
    Filed: May 13, 2010
    Date of Patent: February 14, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
    Inventors: Shiu-Ko JangJian, Wan-Ting Huang, Yu-Jen Chien, Phil Sun
  • Publication number: 20120025320
    Abstract: A fabricating method of CMOS transistor includes following steps. A first gate and a second gate are formed on a substrate. A gate insulator is formed on the substrate to cover the first and second gates. A first source, a first drain, a second source, and a second drain are formed on the gate insulator. The first source and the first drain are above the first gate. The second source and the second drain are above the second gate. A first channel layer and a mask layer are formed on the gate insulator. The mask layer is on the first channel layer. The first channel layer is above the first gate and contacts with the first source and the first drain. A second channel layer is formed on the gate insulator. The second channel layer is above the second gate and contacts with the second source and the second drain.
    Type: Application
    Filed: November 10, 2010
    Publication date: February 2, 2012
    Applicant: AU OPTRONICS CORPORATION
    Inventors: Chung-Tao Chen, Ta-Wei Chiu, Yu-Pu Lin, Yi-Wei Chen
  • Patent number: 8105892
    Abstract: A method is provided that includes providing a semiconductor substrate including at least a thin gate oxide pFET device region and a thick gate oxide pFET device region and forming a thin gate oxide pFET within the thin gate oxide pFET device region and a thick gate oxide pFET within the thick gate oxide pFET device region. The thin gate oxide pFET that is formed includes a layer of SiGe on an upper surface of the thin gate oxide pFET device region, a high k gate dielectric located on an upper surface of the layer of SiGe, a pFET threshold voltage adjusting layer located on an upper surface of the high k gate dielectric, and a gate conductor material atop the pFET threshold voltage adjusting layer. The thick gate oxide pFET that is formed includes a thermal oxide located on an upper surface of the thick gate oxide pFET device region, a silicon layer located on an upper surface of the thermal oxide and a gate conductor material located atop the silicon layer.
    Type: Grant
    Filed: August 18, 2009
    Date of Patent: January 31, 2012
    Assignee: International Business Machines Corporation
    Inventors: Byeong Y. Kim, Michael P. Chudzik
  • Patent number: 8093111
    Abstract: A method for fabricating a semiconductor device comprises forming a partial-insulated substrate comprising an insulating region located below both a channel region of a cell transistor and one of a storage node contact region and a bit line contact region, and forming a cell transistor comprising a fin region on the partial-insulated substrate.
    Type: Grant
    Filed: December 29, 2008
    Date of Patent: January 10, 2012
    Assignee: Hynix Semiconductor Inc.
    Inventor: Sang Don Lee
  • Publication number: 20110297916
    Abstract: A complementary metal oxide semiconductor (CMOS) device in which a single InxGa1-xSb quantum well serves as both an n-channel and a p-channel in the same device and a method for making the same. The InxGa1-xSb layer is part of a heterostructure that includes a Te-delta doped AlyGa1-ySb layer above the InxGa1-xSb layer on a portion of the structure. The portion of the structure without the Te-delta doped AlyGa1-ySb barrier layer can be fabricated into a p-FET by the use of appropriate source, gate, and drain terminals, and the portion of the structure retaining the Te-delta doped AlyGa1-ySb layer can be fabricated into an n-FET so that the structure forms a CMOS device, wherein the single InxGa1-xSb quantum well serves as the transport channel for both the n-FET portion and the p-FET portion of the heterostructure.
    Type: Application
    Filed: May 25, 2011
    Publication date: December 8, 2011
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Brian R. Bennett, John Bradley Boos, Mario Ancona, James G. Champlain, Nicolas A. Papanicolaou
  • Patent number: 8067280
    Abstract: An integrated circuit having high performance CMOS devices with good short channel effects may be made by forming a gate structure over a substrate; forming pocket implant regions and source/drain extensions in the substrate; forming spacers along sides of the gate structure; and thermal annealing the substrate when forming the spacers, the thermal annealing performed at an ultra-low temperature. An integrated circuit having high performance CMOS devices with low parasitic junction capacitance may be made by forming a gate structure over a substrate; forming pocket implant regions and source/drain extensions in the substrate; forming spacers along sides of the gate structure; performing a low dosage source/drain implant; and performing a high dosage source/drain implant.
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: November 29, 2011
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Hao Wang, Ta-Wei Wang, Chenming Hu
  • Publication number: 20110223727
    Abstract: A semiconductor structure includes a semiconductor substrate, and an NMOS device at a surface of the semiconductor substrate, wherein the NMOS device comprises a Schottky source/drain extension region. The semiconductor structure further includes a PMOS device at the surface of the semiconductor substrate, wherein the PMOS device comprises a source/drain extension region comprising only non-metal materials. Schottky source/drain extension regions may be formed for both PMOS and NMOS devices, wherein the Schottky barrier height of the PMOS device is reduced by forming the PMOS device over a semiconductor layer having a low valence band.
    Type: Application
    Filed: May 23, 2011
    Publication date: September 15, 2011
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hsin Ko, Hung-Wei Chen, Chung-Hu Ke, Wen-Chin Lee
  • Patent number: 7951678
    Abstract: Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V.
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: May 31, 2011
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Publication number: 20110089497
    Abstract: A method for manufacturing a semiconductor device includes: forming an isolation region for defining a plurality of active regions in a silicon substrate; doping p-type impurities in at least one of the plurality of active regions to form a p-type well; forming an NMOS gate electrode traversing the p-type well via a gate insulating film; implanting n-type impurity ions into the p-type well on both sides of the NMOS gate electrode to form n-type extension regions; forming an NMOS gate side wall spacer on side walls of the NMOS gate electrode; implanting n-type impurity ions into the p-type well outside the NMOS gate side wall spacers to form n-type source/drain regions; forming a nickel silicide layer in surface regions of the n-type source/drain regions; and implanting Al ions the said n-type source/drain regions to dope Al in the nickel silicide layer surface regions.
    Type: Application
    Filed: December 9, 2010
    Publication date: April 21, 2011
    Applicant: FUJITSU SEMICONDUCTOR LIMITED
    Inventor: Hidenobu Fukutome
  • Patent number: 7919377
    Abstract: A method for forming a contactless flash memory cell array is disclosed. According to an embodiment of the invention, a plurality of active regions is formed on a substrate. An insulating layer is then deposited over the active regions, and a portion of the insulating layer is removed to form a one-dimensional slot and to provide access to the active regions. A bit line is then formed in the slot in contact with the active regions.
    Type: Grant
    Filed: February 22, 2008
    Date of Patent: April 5, 2011
    Assignee: Intel Corporation
    Inventor: Everett B. Lee
  • Publication number: 20110059583
    Abstract: A 3-D (Three Dimensional) inverter having a single gate electrode. The single gate electrode has a first gate dielectric between the gate electrode and a body of a first FET (Field Effect transistor) of a first doping type, the first FET having first source/drain regions in a semiconductor substrate, or in a well in the semiconductor substrate. The single gate electrode has a second gate dielectric between the gate electrode and a body of a second FET of opposite doping to the first FET. Second source/drain regions of the second FET are formed from epitaxial layers grown over the first source/drain regions.
    Type: Application
    Filed: November 10, 2010
    Publication date: March 10, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Phil Christopher Felice Paone, David P. Paulsen, John E. Sheets, II, Kelly L. Williams
  • Patent number: 7871879
    Abstract: A method of manufacturing a semiconductor memory device includes forming a device separation film on a semiconductor substrate using a mask pattern for defining an entire source line region as an active region to separate a device separation region from an active region; forming a stack gate structure on the semiconductor substrate; forming a common source line by implanting impurity ions into the semiconductor substrate in the source line region; and performing an impurity ion implantation process on the semiconductor substrate to form a drain region.
    Type: Grant
    Filed: May 21, 2008
    Date of Patent: January 18, 2011
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: Young-Sun Ko
  • Patent number: 7851790
    Abstract: The present invention describes a method of and an apparatus for providing a wafer, the wafer including Silicon; etching trenches in the wafer to form Silicon fins; filling Silicon Oxide in the trenches; planarizing the Silicon Oxide; recessing the Silicon Oxide to a first thickness to form exposed Silicon pedestals from the Silicon fins; depositing SiGe over the exposed Silicon pedestal; recessing the Silicon Oxide to a second thickness; undercutting the exposed Silicon pedestals to form necked-in Silicon pedestals; oxidizing thermally and annealing the SiGe; and forming Germanium nanowires.
    Type: Grant
    Filed: December 30, 2008
    Date of Patent: December 14, 2010
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Been-Yih Jin, Ravi Pillarisetty, Robert Chau
  • Patent number: 7803684
    Abstract: In a semiconductor device, and a method of fabricating the same, the semiconductor device includes a protrusion extending from a substrate and a selective epitaxial growth (SEG) layer surrounding an upper portion of the protrusion, the SEG layer exposing sidewalls of a channel region of the protrusion.
    Type: Grant
    Filed: September 18, 2009
    Date of Patent: September 28, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Se-myeong Jang, Woun-suck Yang, Jae-man Yoon, Hyun-ju Sung
  • Patent number: 7718481
    Abstract: A structure comprises a deep subcollector buried in a first region of a dual epitaxial layer and a reachthrough structure in contact with the deep subcollector to provide a low-resistive shunt which prevents CMOS latch-up for a first device. The structure may additionally include a near subcollector formed in a higher region than the deep subcollector and under another device. At least one reachthrough electrically connects the deep subcollector and the near subcollector. The method includes forming a merged triple well double epitaxy/double subcollector.
    Type: Grant
    Filed: April 17, 2006
    Date of Patent: May 18, 2010
    Assignee: International Business Machines Corporation
    Inventors: Xuefeng Liu, Robert M. Rassel, Steven H. Voldman
  • Patent number: 7704837
    Abstract: A unit cell for an integrated circuit includes a first conductive type active region and a second conductive type active region which extend in a first direction. Each of the active regions has first and second ends. The first end of the second conductive type active region opposes the second end of the first conductive type active region. A poly-silicon pattern extends in the first direction across the first conductive type active region and second conductive type active region. A first contact region is adjacent the first end of the first conductive type active region in the first direction. A second contact region is adjacent the second end of the second conductive type active region in the first direction.
    Type: Grant
    Filed: August 7, 2008
    Date of Patent: April 27, 2010
    Assignee: Oki Semiconductor Co., Ltd.
    Inventors: Hirohisa Masuda, Hirokazu Ishikawa
  • Patent number: 7675103
    Abstract: A spin transistor comprises a semiconductor substrate part having a lower cladding layer, a channel layer and an upper cladding layer sequentially stacked therein, a ferromagnetic source and drain on the substrate part, and a gate on the substrate part to control spins of electrons passing through the channel layer. The lower cladding layer comprises a first lower cladding layer and a second lower cladding layer having a higher band gap than that of the first lower cladding layer. The upper cladding layer comprises a first upper cladding layer and a second upper cladding layer having a higher band gap than that of the first upper cladding layer. The source and the drain are buried in an upper surface of the substrate part and extend downwardly to or under the first upper cladding layer.
    Type: Grant
    Filed: October 30, 2006
    Date of Patent: March 9, 2010
    Assignee: Korea Institute of Science and Technology
    Inventors: Hyun-Cheol Koo, Suk-Hee Han, Jong-Hwa Eom, Joon-Yeon Chang, Hyung-Jun Kim, Hyun-Jung Yi
  • Publication number: 20100052069
    Abstract: A static RAM cell may be formed on the basis of two double channel transistors and a select transistor, wherein a body contact may be positioned laterally between the two double channel transistors in the form of a dummy gate electrode structure, while a further rectangular contact may connect the gate electrodes, the source regions and the body contact, thereby establishing a conductive path to the body regions of the transistors. Hence, compared to conventional body contacts, a very space-efficient configuration may be established so that bit density in static RAM cells may be significantly increased.
    Type: Application
    Filed: July 23, 2009
    Publication date: March 4, 2010
    Inventor: Frank Wirbeleit
  • Patent number: 7659157
    Abstract: A first high-k gate dielectric layer and a first metal gate layer are formed on first and second semiconductor fins. A first metal gate ring is formed on the first semiconductor fin. In one embodiment, the first high-k gate dielectric layer remains on the second semiconductor fin. A second metal gate layer and a silicon containing layer are deposited and patterned to form gate electrodes. In another embodiment, a second high-k dielectric layer replaces the first high-k dielectric layer over the second semiconductor fin, followed by formation of a second metal gate layer. A first electrode comprising a first gate dielectric and a first metal gate is formed on the first semiconductor fin, while a second electrode comprising a second gate dielectric and a second metal gate is formed on the second semiconductor fin. Absence of high-k gate dielectric materials on a gate wiring prevents increase in parasitic resistance.
    Type: Grant
    Filed: September 25, 2007
    Date of Patent: February 9, 2010
    Assignee: International Business Machines Corporation
    Inventors: Brian J. Greene, Mahender Kumar
  • Patent number: 7605447
    Abstract: The present invention relates to a semiconductor device structure that includes at least one SRAM cell formed in a substrate. Such SRAM cell comprises two pull-up transistors, two pull-down transistors, and two pass-gate transistors. The pull-down transistors and the pass-gate transistors are substantially similar in channel widths and have substantially similar source-drain doping concentrations, while the SRAM cell has a beta ratio of at least 1.5. The substrate preferably comprises a hybrid substrate with at two isolated sets of regions, while carrier mobility in these two sets of regions differentiates by a factor of at least about 1.5. More preferably, the pull-down transistors of the SRAM cell are formed in one set of regions, and the pass-gate transistors are formed in the other set of regions, so that current flow in the pull-down transistors is larger than that in the pass-gate transistors.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: October 20, 2009
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Gregory Costrini, Oleg Gluschenkov, Meikei Ieong, Nakgeuon Seong
  • Patent number: 7537980
    Abstract: In a method of manufacturing a stacked semiconductor device, a seed layer including impurity regions may be prepared. A first insulation interlayer pattern having a first opening may be formed on the seed layer. A first SEG process may be carried out to form a first plug partially filling the first opening. A second SEG process may be performed to form a second plug filling the first opening. A third SEG process may be carried out to form a first channel layer on the first insulation interlayer pattern. A second insulation interlayer may be formed on the first channel layer. The second insulation interlayer, the first channel layer and the second plug arranged on the first plug may be removed to expose the first plug. The first plug may be removed to form a serial opening. The serial opening may be filled with a metal wiring.
    Type: Grant
    Filed: August 28, 2006
    Date of Patent: May 26, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yong-Hoon Son, Yu-Gyun Shin, Jong-Wook Lee
  • Publication number: 20090065853
    Abstract: Methods, devices and systems for a FinFET are provided. One method embodiment includes forming a FinFET by forming a relaxed silicon germanium (Si1-XGeX) body region for a fully depleted Fin field effect transistor (FinFET) having a body thickness of at least 10 nanometers (nm) for a process design rule of less than 25 nm. The method also includes forming a source and a drain on opposing ends of the body region, wherein the source and the drain are formed with halo ion implantation and forming a gate opposing the body region and separated therefrom by a gate dielectric.
    Type: Application
    Filed: September 7, 2007
    Publication date: March 12, 2009
    Applicant: Micron Technology, Inc.
    Inventor: Hussein I. Hanafi
  • Patent number: 7498253
    Abstract: A local interconnection wiring structure method for forming the same reduces the likelihood of a short between a local interconnection layer of gate electrodes and an active region by forming a common aperture so as to have a determined aperture between the local interconnection layer and the active region on an insulation film of a semiconductor substrate. Methods of forming the local interconnection wire can include forming a first etching mask pattern that has a size longer than a length between inner ends of adjacent gate electrodes formed on a semiconductor substrate and covered with an insulation film. The etching mask simultaneously has a length the same as or shorter than the length between outer ends of the gate electrodes. The insulation film exposed in the first etching mask pattern is subsequently etched so that the insulation film remains higher than a highest height of the gate electrodes, so as to form a recess pattern.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: March 3, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-Un Kwon, Yong-Sun Ko
  • Patent number: 7462532
    Abstract: A high voltage metal oxide semiconductor device comprising a substrate, an N-type epitaxial layer, an isolation structure, a gate dielectric layer, a gate, an N-type drain region, a P-type well, an N-type source region, a first N-type well and a buried N-doped region is provided. The first N-type well is disposed in the N-type epitaxial layer under the isolation structure and on one side of the gate. The first N-type well overlaps with the N-type drain region. The buried N-doped region is disposed in the substrate under the N-type epitaxial layer and connected to the first N-type well.
    Type: Grant
    Filed: October 11, 2007
    Date of Patent: December 9, 2008
    Assignee: United Microelectronics Corp.
    Inventors: Chih-Hua Lee, Ming-I Chen
  • Patent number: 7422945
    Abstract: In a unit cell, a first conductive type active region and a second conductive type active region are provided. Those two active regions extend in a first direction. Each of the active regions have first and second ends thereof. The first end of the second conductive type active region opposes the second end of the first conductive type active region. A conductive pattern is provided to extend in the first direction across the first conductive type active region and the second conductive type active region. A first contact region is arranged adjacent the first end of the first conductive type active region in the first direction. A second contact region is arranged adjacent the second end of the second conductive type active region in the first direction.
    Type: Grant
    Filed: March 8, 2005
    Date of Patent: September 9, 2008
    Assignee: Oki Electric Industry Co., Ltd.
    Inventors: Hirohisa Masuda, Hirokazu Ishikawa
  • Publication number: 20080157205
    Abstract: A gate structure of a semiconductor device includes an intermediate structure, wherein the intermediate structure includes a titanium layer and a tungsten silicide layer. A method for forming a gate structure of a semiconductor device includes forming a polysilicon-based electrode. An intermediate structure, which includes a titanium layer and a tungsten silicide layer, is formed over the polysilicon-based electrode. A metal electrode is formed over the intermediate structure.
    Type: Application
    Filed: June 20, 2007
    Publication date: July 3, 2008
    Applicant: Hynix Semiconductor Inc.
    Inventors: Min-Gyu SUNG, Hong-Seon Yang, Heung-Jae Cho, Yong-Soo Kim, Kwan-Yong Lim
  • Patent number: RE41477
    Abstract: An N type buried layer is formed, in one embodiment, by a non selective implant on the surface of a wafer and later diffusion. Subsequently, the wafer is masked and a selective P type buried layer is formed by implant and diffusion. The coefficient of diffusion of the P type buried layer dopant is greater than the N type buried layer dopant so that connections can be made to the P type buried layer by P wells which have a lower dopant concentration than the N buried layer.
    Type: Grant
    Filed: October 5, 2004
    Date of Patent: August 10, 2010
    Inventor: James D. Beasom