Having Specified Scribe Region Structure (e.g., Alignment Mark, Plural Grooves, Etc.) Patents (Class 438/462)
  • Patent number: 8946079
    Abstract: A semiconductor construct includes a semiconductor substrate and connection pads provided on the semiconductor substrate. Some of the connection pads are connected to a common wiring and at least one of the remaining of the connection pads are connected to a wiring. The construct also includes a first columnar electrode provided to be connected to the common wiring and a second columnar electrode provided to be connected to a connection pad portion of the wiring.
    Type: Grant
    Filed: May 6, 2014
    Date of Patent: February 3, 2015
    Assignee: Tera Probe, Inc.
    Inventors: Shinji Wakisaka, Takeshi Wakabayashi
  • Publication number: 20150031191
    Abstract: To enhance reliability in assembling a semiconductor device. There is provided a wiring substrate including a target mark, which is not provided on an extension line of a dicing region provided between a first semiconductor device region and a second semiconductor device region but is provided between the extension line of the dicing region and a first imaginary extension line of a first outermost peripheral land row and between the extension line of the dicing region and a second imaginary extension line of a second outermost peripheral land row. Furthermore, after mounting a semiconductor chip, wire bonding is performed, resin sealing is performed and a solder ball is mounted. After that, the dicing region is specified on the basis of the target mark, and the wiring substrate is cut along the dicing region.
    Type: Application
    Filed: July 26, 2014
    Publication date: January 29, 2015
    Inventors: Yoshinori Miyaki, Masaru Yamada
  • Patent number: 8940618
    Abstract: A method for cutting a semiconductor wafer into semiconductor chips that reduces defects at the semiconductor chip corners. The method includes a pre-cutting processing step of trimming the semiconductor chip corners so that mechanical stress is reduced at the corners. The method includes dicing channels on a semiconductor wafer thereby defining the geometrical shape of one of the semiconductor chips, modifying the corners of the one of the semiconductor chips, and cutting the semiconductor wafer to separate the one of the semiconductor chips from other semiconductor chips.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: January 27, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien Ling Hwang, Lin-Wei Wang, Chung-Shi Liu
  • Publication number: 20150021733
    Abstract: A semiconductor wafer includes circuit integration regions each incorporating an integrated circuit and guard rings disposed to surround the circuit integration regions, respectively. A scribe region disposed between every adjacent two of the guard rings. An element and a pad electrically connected to the element are disposed in the scribe region. A groove is disposed along a corresponding guard ring on a front surface of the semiconductor wafer between the pad and the corresponding guard ring. The distance between the groove and the pad is varied along the corresponding guard ring.
    Type: Application
    Filed: July 11, 2014
    Publication date: January 22, 2015
    Inventors: Hisao Nakamura, Yuichi Nakagomi, Yasuhiro Kumagai
  • Publication number: 20150024575
    Abstract: A method includes forming a molding compound molding a lower portion of an electrical connector of a wafer therein. The molding compound is at a front surface of the wafer. The molding compound covers a center region of the wafer, and leaves an edge ring of the wafer not covered. An opening is formed to extend from the front surface of the wafer into the wafer, wherein the opening is in the edge ring of the wafer. A backside grinding is performed on the wafer until the opening is revealed through a back surface of the wafer. The method further includes determining a position of a scribe line of the wafer using the opening as an alignment mark, and sawing the wafer from a backside of the wafer by sawing through the scribe line.
    Type: Application
    Filed: July 17, 2013
    Publication date: January 22, 2015
    Inventors: Yu-Hsiang Hu, Ming-Da Cheng, Chung-Shi Liu
  • Patent number: 8932939
    Abstract: Methods and systems for forming water soluble masks by dry film lamination are described. Also described are methods of wafer dicing, including formation of a water soluble mask by dry film lamination. In one embodiment, a method involves moisturizing an inner area of a water soluble dry film. The method involves stretching the water soluble dry film over a surface of the semiconductor wafer, and attaching the moistened inner area of the stretched film to the surface of the semiconductor wafer. A method of wafer dicing may further involve patterning the water soluble dry film, exposing regions of the semiconductor wafer between the ICs, and etching the semiconductor wafer through gaps in the patterned water soluble dry film.
    Type: Grant
    Filed: April 14, 2014
    Date of Patent: January 13, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Wei-Sheng Lei, James S. Papanu, Brad Eaton, Ajay Kumar
  • Publication number: 20150011074
    Abstract: A method of fabricating a semiconductor device includes providing a substrate having first areas and second areas, forming first metal wires on the first areas of the substrate, forming second metal wires on the second areas of the substrate, forming an interlayer insulation layer to cover the first and second metal wires, forming pad patterns on the first metal wires, forming a passivation layer to cover the pad patterns on the interlayer insulation layer, and forming a wrapping layer on the passivation layer. The wrapping layer includes first openings that are vertically aligned with the pad patterns, and second openings that are disposed on the second areas and that horizontally connect the first openings with each other.
    Type: Application
    Filed: June 5, 2014
    Publication date: January 8, 2015
    Inventors: Dong-Hyun HAN, Jin-Man CHANG
  • Publication number: 20150011073
    Abstract: In embodiments, a hybrid wafer or substrate dicing process involving an initial laser scribe and subsequent plasma etch is implemented for die singulation. The laser scribe process may be used to cleanly remove a mask layer, organic and inorganic dielectric layers, and device layers. The laser etch process may then be terminated upon exposure of, or partial etch of, the wafer or substrate. In embodiments, a hybrid plasma etching approach is employed to dice the wafers where an isotropic etch is employed to improve the die sidewall following an anisotropic etch with a plasma based on a combination of NF3 and CF4. The isotropic etch removes anisotropic etch byproducts, roughness, and/or scalloping from the anisotropically etched die sidewalls after die singulation.
    Type: Application
    Filed: June 2, 2014
    Publication date: January 8, 2015
    Inventors: Wei-Sheng Lei, Tong Liu, Madhava Rao Yalamanchili, Brad Eaton, Aparna Iyer, Ajay Kumar
  • Patent number: 8927394
    Abstract: An active device substrate includes a flexible substrate, an inorganic de-bonding layer, and at least one active device. The flexible substrate has a first surface and a second surface opposite to the first surface, wherein the first surface is a flat surface. The inorganic de-bonding layer covers the first surface of the flexible substrate, and the material of the inorganic de-bonding layer is metal, metal oxide or combination thereof. The active device is disposed on or above the second surface of the flexible substrate.
    Type: Grant
    Filed: October 1, 2013
    Date of Patent: January 6, 2015
    Assignee: AU Optronics Corporation
    Inventor: Tsung-Ying Ke
  • Patent number: 8927395
    Abstract: In a wafer processing method, a modified layer is formed inside a wafer along planned dividing lines by irradiating the wafer with a laser beam with such a wavelength as to be transmitted through the wafer from the back surface side of the wafer along the dividing lines. A first modified layer is formed near the back surface of the wafer by irradiating the wafer with the light focal point of the laser beam positioned near the back surface of the wafer. The wafer is then irradiated with the light focal point of the laser beam positioned on the front surface side. Then plural second modified layers are formed in a multi-layering manner with sequential movement of the light focal point toward an area leading to the first modified layer. The wafer is divided into individual devices along the dividing lines by applying an external force to the wafer.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: January 6, 2015
    Assignee: Disco Corporation
    Inventor: Masaru Nakamura
  • Patent number: 8927393
    Abstract: Methods and systems for dicing a semiconductor wafer including a plurality of integrated circuits (ICs) are described. In one embodiment, a method involves adhering an adhesive tape to a thin water soluble dry film. The method involves applying the thin water soluble dry film adhered to the adhesive tape over a surface of the semiconductor wafer. The method involves removing the adhesive tape from the thin water soluble dry film. The thin water soluble dry film is patterned with a laser scribing process, exposing regions of the semiconductor wafer between the ICs. The method involves etching the semiconductor wafer through gaps in the patterned thin water soluble dry film, and removing the thin water soluble dry film.
    Type: Grant
    Filed: January 29, 2014
    Date of Patent: January 6, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Wei-Sheng Lei, James S. Papanu, Prabhat Kumar, Brad Eaton, Ajay Kumar
  • Publication number: 20150004754
    Abstract: Semiconductor chips are provided. The semiconductor chip includes a semiconductor chip body having an arch-shaped groove in a backside thereof and a non-conductive material pattern filling the arch-shaped groove. Related methods are also provided.
    Type: Application
    Filed: September 17, 2014
    Publication date: January 1, 2015
    Inventor: Jong Hyun NAM
  • Publication number: 20150001683
    Abstract: A method including forming a plurality of dicing channels in a front side of a wafer; the plurality of dicing channels including a depth at least greater than a desired final thickness of the wafer, filling the plurality of dicing channels with a fill material and removing a portion of the wafer from a back side of the wafer until the desired final thickness is achieved, where a portion of the fill material within the plurality of dicing channel is exposed. The method further including depositing a metal layer on the back side of the wafer; removing the fill material from within the plurality of dicing channels to expose the metal layer at a bottom of the plurality of dicing channels, and removing a portion of the metal layer located at the bottom of the plurality of dicing channels.
    Type: Application
    Filed: June 27, 2013
    Publication date: January 1, 2015
    Inventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Charles F. Musante, Christopher D. Muzzy, Wolfgang Sauter, Timothy D. Sullivan
  • Publication number: 20150001684
    Abstract: Structures and methods provide a dielectric bridge for use in electroplating. A method comprises: providing a semiconductor wafer with a plurality of die, wherein a first die is adjacent to a second die, and the first die and second die are separated by a dicing street area; forming a patterned dielectric layer overlying the semiconductor wafer, the dielectric layer including a dielectric bridge that crosses the dicing street area; forming a conductive layer (e.g., a metal seed layer) overlying the dielectric layer, wherein a portion of the conductive layer is overlying the dielectric bridge to provide a current pathway from the first die to the second die; and electroplating targeted areas of the conductive layer by providing current to the second die using the current pathway. Other such bridges formed from the dielectric layer provide current pathways to other die on the wafer.
    Type: Application
    Filed: September 27, 2013
    Publication date: January 1, 2015
    Applicant: FlipChip International, LLC
    Inventors: Eugene A. Stout, Douglas M. Scott, Anthony P. Curtis, Theodore G. Tessier, Guy F. Burgess
  • Patent number: 8921136
    Abstract: The present disclosure relates to methods of forming a self-aligned contact and related apparatus. In some embodiments, the method forms a plurality of gate lines interspersed between a plurality of dielectric lines, wherein the gate lines and the dielectric lines extend in a first direction over an active area. One or more of the plurality of gate lines are into a plurality of gate line sections aligned in the first direction. One or more of the plurality of dielectric lines are cut into a plurality of dielectric lines sections aligned in the first direction. A dummy isolation material is deposited between adjacent dielectric sections in the first direction and between adjacent gate line sections in the first direction. One or more self-aligned metal contacts are then formed by replacing a part of one or more of the plurality of dielectric lines over the active area with a contact metal.
    Type: Grant
    Filed: January 17, 2013
    Date of Patent: December 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Neng-Kuo Chen, Shao-Ming Yu, Gin-Chen Huang, Chia-Jung Hsu, Sey-Ping Sun, Clement Hsingjen Wann
  • Patent number: 8921981
    Abstract: A semiconductor device includes wiring layers formed over a semiconductor wafer, a via-layer between the wiring layers, conductive films in the wiring layers, and a via-plug in the via-layer connecting the conductive films of the wiring layers above and below, a scribe region at an outer periphery of a chip region along an edge of the semiconductor substrate and including a pad region in the vicinity of the edge, the pad region overlapping the conductive films of the plurality of wiring layers in the plan view, the plurality of wiring layers including first second wiring layers, the conductive film of the first wiring layer includes a first conductive pattern formed over an entire surface of said pad region in a plan view, and the conductive film of the second wiring layer includes a second conductive pattern formed in a part of the pad region in a plan view.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: December 30, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Kazutaka Yoshizawa, Taiji Ema, Takuya Moriki
  • Publication number: 20140377937
    Abstract: Methods of using a hybrid mask composed of a first water soluble film layer and a second water-soluble layer for wafer dicing using laser scribing and plasma etch described. In an example, a method of dicing a semiconductor wafer having a plurality of integrated circuits involves forming a hybrid mask above the semiconductor wafer. The hybrid mask is composed of a first water-soluble layer disposed on the integrated circuits, and a second water-soluble layer disposed on the first water-soluble layer. The method also involves patterning the hybrid mask with a laser scribing process to provide a patterned hybrid mask with gaps, exposing regions of the semiconductor wafer between the integrated circuits. The method also involves etching the semiconductor wafer through the gaps in the patterned hybrid mask to singulate the integrated circuits.
    Type: Application
    Filed: September 5, 2014
    Publication date: December 25, 2014
    Inventors: Wei-Sheng Lei, Brad Eaton, Aparna Iyer, Todd Egan, Madhava Rao Yalamanchili, Ajay Kumar
  • Patent number: 8912077
    Abstract: Methods of dicing semiconductor wafers, each wafer having a plurality of integrated circuits, are described. A method includes forming a mask above the semiconductor wafer, the mask composed of a layer covering and protecting the integrated circuits. The semiconductor wafer is supported by a substrate carrier. The mask is then patterned with a laser scribing process to provide a patterned mask with gaps, exposing regions of the semiconductor wafer between the integrated circuits. The semiconductor wafer is then etched through the gaps in the patterned mask to singulate the integrated circuits while supported by the substrate carrier.
    Type: Grant
    Filed: June 15, 2011
    Date of Patent: December 16, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Saravjeet Singh, Brad Eaton, Ajay Kumar, Wei-Sheng Lei, James M. Holden, Madhava Rao Yalamanchili, Todd J. Egan
  • Patent number: 8912076
    Abstract: An integrated circuit containing a crack deflecting scribe seal which separates an interior region of the integrated circuit from a scribeline immediately outside the integrated circuit and a method of forming the same. The crack deflecting scribe seal includes continuous metal layers and continuous contacts and continuous vias between the continuous metal layers. The continuous metal layers do not extend past the continuous contacts and continuous vias. The continuous contacts and continuous vias are recessed from edges of the underlying continuous metal layers on the scribeline side of the scribe seal, providing an angled outer surface on the scribe seal which may desirably terminate crack propagation or deflect crack propagation upward to a top surface of the scribeline or the crack deflecting scribe seal.
    Type: Grant
    Filed: November 5, 2009
    Date of Patent: December 16, 2014
    Assignee: Texas Instruments Incorporated
    Inventors: Jeffrey Alan West, Thomas D. Bonifield, Basab Chatterjee
  • Patent number: 8912078
    Abstract: Approaches for hybrid laser scribe and plasma etch dicing process for a wafer having backside solder bumps are described. For example, a method of dicing a semiconductor wafer having integrated circuits on a front side thereof and corresponding arrays of metal bumps on a backside thereof involves applying a dicing tape to the backside of the semiconductor wafer, the dicing tape covering the arrays of metal bumps. The method also involves, subsequently, forming a mask on the front side of the semiconductor wafer, the mask covering the integrated circuits. The method also involves forming scribe lines on the front side of the semiconductor wafer with a laser scribing process, the scribe lines formed in the mask and between the integrated circuits. The method also involves plasma etching the semiconductor wafer through the scribe lines to singulate the integrated circuits, the mask protecting the integrated circuits during the plasma etching.
    Type: Grant
    Filed: April 16, 2014
    Date of Patent: December 16, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Wei-Sheng Lei, James S. Papanu, Aparna Iyer, Brad Eaton, Ajay Kumar
  • Patent number: 8911518
    Abstract: The present disclosure relates generally to semiconductor techniques. More specifically, embodiments of the present disclosure provide methods for efficiently dicing substrates containing gallium and nitrogen material. Additionally, the present disclosure provides techniques resulting in an optical device comprising a substrate having a dislocation bundle center being used as a conductive region for a contact.
    Type: Grant
    Filed: June 7, 2012
    Date of Patent: December 16, 2014
    Assignee: Soraa, Inc.
    Inventors: Arpan Chakraborty, Michael R. Krames, Tal Margalith, Rafael Aldaz
  • Publication number: 20140363952
    Abstract: Front side laser scribing and plasma etch are performed followed by back side grind to singulate integrated circuit chips (ICs). A mask is formed covering ICs formed on the wafer, as well as any bumps providing an interface to the ICs. The mask is patterned by laser scribing to provide a patterned mask with gaps. The patterning exposes regions of the semiconductor wafer, below thin film layers from which the ICs are formed. The semiconductor wafer is then etched through the gaps in the patterned mask to advance a front of an etched trench partially through the semiconductor wafer thickness. The front side mask is removed, a backside grind tape applied to the front side, and a back side grind performed to reach the etched trench, thereby singulating the ICs.
    Type: Application
    Filed: August 22, 2014
    Publication date: December 11, 2014
    Inventors: Wei-Sheng Lei, Brad Eaton, Madhava Rao Yalamanchili, Saravjeet Singh, Ajay Kumar
  • Patent number: 8906745
    Abstract: A method of dividing a semiconductor wafer in which a sheet of deformable material engaging the metal layer side of the wafer has pressurized fluid applied thereto to cause the metal layer to break at the locations of wafer scribe streets.
    Type: Grant
    Filed: May 9, 2014
    Date of Patent: December 9, 2014
    Assignee: Micro Processing Technology, Inc.
    Inventors: Paul C. Lindsey, Jr., Darrell Foote
  • Patent number: 8906782
    Abstract: A method for separating semiconductor die includes forming a porous region on a semiconductor wafer and separating the die at the porous region using mechanical or other means.
    Type: Grant
    Filed: January 27, 2012
    Date of Patent: December 9, 2014
    Assignee: Infineon Technologies AG
    Inventors: Manfred Engelhardt, Petra Fischer
  • Patent number: 8906783
    Abstract: A method for cutting brittle sheet-shaped structure is disclosed. A brittle sheet-shaped structure having a cutting surface including a first cutting line on the cutting surface of the brittle sheet-shaped structure is formed. The cutting surface is divided into a first section and a second section, wherein the first section has a predetermined shape. At least one second cutting line is formed on the second section along part of the first cutting line or a tangent line of the first cutting line. A number of third cutting lines are formed on the second section by taking the first cutting line as endpoints. A brittle sheet-shaped structure having the predetermined shape is finally obtained by splitting the brittle sheet-shaped structure along the first cutting line, the at least one second cutting line, and the third cutting lines.
    Type: Grant
    Filed: February 4, 2013
    Date of Patent: December 9, 2014
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Chen Feng, Li Qian, Yu-Quan Wang, Xue-Wei Guo
  • Publication number: 20140357055
    Abstract: A method for processing a semiconductor workpiece is provided, which may include: providing a semiconductor workpiece including a metallization layer stack disposed at a side of the semiconductor workpiece, the metallization layer stack including at least a first layer and a second layer disposed over the first layer, wherein the first layer contains a first material and the second layer contains a second material that is different from the first material; patterning the metallization layer stack, wherein patterning the metallization layer stack includes wet etching the first layer and the second layer by means of an etching solution that has at least substantially the same etching rate for the first material and the second material.
    Type: Application
    Filed: May 28, 2013
    Publication date: December 4, 2014
    Applicant: Infineon Technologies AG
    Inventors: Anja Gissibl, Hermann Wendt, Thomas Fischer, Bernhard Weidgans, Gudrun Stranzl, Tobias Schmidt, Dietrich Bonart
  • Patent number: 8900925
    Abstract: In a method for manufacturing a diode, a semiconductor crystal wafer is used to produce a p-n or n-p junction, which extends in planar fashion across the top side of a semiconductor crystal wafer. Separation edges form perpendicularly to the top side of the semiconductor crystal wafer, which edges extend across the p-n or n-p junction. The separation of the semiconductor crystal wafer is achieved in that, starting from a disturbance, a fissure is propagated by local heating and local cooling of the semiconductor crystal wafer. The separation fissure thus formed extends along crystal planes of the semiconductor crystal, which avoids the formation of defects in the area of the p-n or n-p junction.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: December 2, 2014
    Assignee: Robert Bosch GmbH
    Inventors: Richard Spitz, Alfred Goerlach, Robert Kolb
  • Publication number: 20140346641
    Abstract: Methods of dicing semiconductor wafers, each wafer having a plurality of integrated circuits, are described. In an example, approaches for wafer dicing with wide kerf by using a laser scribing and plasma etching hybrid approach are described. For example, a method of dicing a semiconductor wafer including a plurality of integrated circuits separated by dicing streets involves forming a mask above the semiconductor wafer, the mask having a layer covering and protecting the integrated circuits. The method also involves patterning the mask with a laser scribing process to provide a patterned mask having a pair of parallel gaps for each dicing street, exposing regions of the semiconductor wafer between the integrated circuits. Each gap of each pair of parallel gaps is separated by a distance. The method also involves etching the semiconductor wafer through the gaps in the patterned mask to singulate the integrated circuits.
    Type: Application
    Filed: July 22, 2013
    Publication date: November 27, 2014
    Inventors: Wei-Sheng Lei, Brad Eaton, Aparna Iyer, Madhava Rao Yalamanchili, Ajay Kumar
  • Publication number: 20140346669
    Abstract: A semiconductor package includes a passivation layer overlying a semiconductor substrate, a pillar bump overlying the passivation layer, and a molding compound layer overlying the passivation layer and covering a lower portion of the bump. A sidewall of the passivation layer is covered by the molding compound layer.
    Type: Application
    Filed: August 5, 2014
    Publication date: November 27, 2014
    Inventors: Tsung-Ding WANG, Jung Wei CHENG, Bo-I LEE
  • Patent number: 8896137
    Abstract: A solid-state image pickup device includes: a silicon layer; a pixel portion formed in the silicon layer for processing and outputting signal charges obtained by carrying out photoelectric conversion for incident lights; an alignment mark formed in a periphery of the pixel portion and in the silicon layer; and a contact portion through which a first electrode within a wiring layer formed on a first surface of the silicon layer, and a second electrode formed on a second surface opposite to the first surface of the silicon layer through an insulating film are connected, wherein the alignment mark and the contact portion are formed from conductive layers made of the same conductive material and formed within respective holes each extending completely through the silicon layer through respective insulating layers made of the same material.
    Type: Grant
    Filed: August 20, 2012
    Date of Patent: November 25, 2014
    Assignee: Sony Corporation
    Inventors: Keiichi Nakazawa, Takayuki Enomoto
  • Patent number: 8896136
    Abstract: In accordance with an embodiment, a structure comprises a substrate having a first area and a second area; a through substrate via (TSV) in the substrate penetrating the first area of the substrate; an isolation layer over the second area of the substrate, the isolation layer having a recess; and a conductive material in the recess of the isolation layer, the isolation layer being disposed between the conductive material and the substrate in the recess.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: November 25, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Shih-Hui Wang, Chien-Ming Chiu, Chia-Ho Chen, Fang Wen Tsai, Weng-Jin Wu, Jing-Cheng Lin, Wen-Chih Chiou, Shin-Puu Jeng, Chen-Hua Yu
  • Patent number: 8895345
    Abstract: The present invention provides a dicing method that achieves excellent dicing properties at low costs by removing a metal film through a metal processing operation with a diamond tool and then performing pulse laser beam irradiation. The dicing method is a method of dicing a substrate to be processed, devices being formed in the substrate to be processed, a metal film being formed on one surface of the substrate to be processed.
    Type: Grant
    Filed: June 13, 2011
    Date of Patent: November 25, 2014
    Assignee: Toshiba Kikai Kabushiki Kaisha
    Inventor: Takanobu Akiyama
  • Patent number: 8883614
    Abstract: Methods of dicing semiconductor wafers, each wafer having a plurality of integrated circuits, are described. In an example, approaches for wafer dicing with wide kerf by using a laser scribing and plasma etching hybrid approach are described. For example, a method of dicing a semiconductor wafer including a plurality of integrated circuits separated by dicing streets involves forming a mask above the semiconductor wafer, the mask having a layer covering and protecting the integrated circuits. The method also involves patterning the mask with a laser scribing process to provide a patterned mask having a pair of parallel gaps for each dicing street, exposing regions of the semiconductor wafer between the integrated circuits. Each gap of each pair of parallel gaps is separated by a distance. The method also involves etching the semiconductor wafer through the gaps in the patterned mask to singulate the integrated circuits.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: November 11, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Wei-Sheng Lei, Brad Eaton, Apama Iyer, Madhava Rao Yalamanchili, Ajay Kumar
  • Patent number: 8884403
    Abstract: According to the invention, die shift is reduced or substantially eliminated, by cutting the wafer in two stages. In some embodiments a first wafer cutting procedure is carried out prior to thinning the wafer to the prescribed die thickness; and in other embodiments the wafer is thinned to the prescribed die thickness prior to carrying out a first wafer cutting procedure. The first wafer cutting procedure includes cutting along a first set of streets to a depth greater than the prescribed die thickness and optionally along a second set of streets to a depth less than the die thickness. The result of the first cutting procedure is an array of strips or blocks of die, each including a plurality of connected die, that are less subject to shift than are individual singulated die. In a second wafer cutting procedure the die are singulated by cutting through along the second set of streets.
    Type: Grant
    Filed: December 30, 2010
    Date of Patent: November 11, 2014
    Assignee: Iinvensas Corporation
    Inventors: Reynaldo Co, DeAnn Eileen Melcher, Weiping Pan, Grant Villavicencio
  • Patent number: 8883615
    Abstract: Approaches for cleaning a wafer during hybrid laser scribing and plasma etching wafer dicing processes are described. In an example, a method of dicing a semiconductor wafer having a front surface having a plurality of integrated circuits thereon involves forming an underfill material layer between and covering metal pillar/solder bump pairs of the integrated circuits. The method also involves forming a mask layer on the underfill material layer. The method also involves laser scribing mask layer and the underfill material layer to provide scribe lines exposing portions of the semiconductor wafer between the integrated circuits. The method also involves removing the mask layer. The method also involves, subsequent to removing the mask layer, plasma etching the semiconductor wafer through the scribe lines to singulate the integrated circuits, wherein the second insulating layer protects the integrated circuits during at least a portion of the plasma etching.
    Type: Grant
    Filed: August 8, 2014
    Date of Patent: November 11, 2014
    Assignee: Applied Materials, Inc.
    Inventors: James Matthew Holden, Wei-Sheng Lei, James S. Papanu, Ajay Kumar
  • Patent number: 8877613
    Abstract: A semiconductor device manufacturing method comprising the steps of providing a matrix substrate having a main surface with plural device areas formed thereon, fixing plural semiconductor chips to the plural device areas respectively, then sealing the plural semiconductor chips all together with resin to form a block sealing member, dividing the block sealing member and the matrix substrate for each of the device areas by dicing, thereafter rubbing a surface of each of the diced sealing member portions with a brush, then storing semiconductor devices formed by the dicing once into pockets respectively of a tray, and conveying the semiconductor devices each individually from the tray. Since the substrate dividing work after block molding is performed by dicing while vacuum-chucking the surface of the block sealing member, the substrate division can be done without imposing any stress on an external terminal mounting surface of the matrix substrate.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: November 4, 2014
    Assignees: Renesas Electronics Corporation, Renesas Northern Japan Semiconductor, Inc.
    Inventors: Tadashi Munakata, Shingo Oosaka, Mitsuru Kinoshita, Yoshihiko Yamaguchi, Noriyuki Takahashi
  • Patent number: 8876312
    Abstract: In one embodiment, a light-emitting device having a substrate, a casing, a plurality of light source dies, a plurality of spectral converters and a plurality of optical structures is disclosed. The spectral converters may be configured to spectrally adjust a portion of the light output of the light source die into a first and second converted spectral output that is substantially different from one another. In another embodiment, a system for illumination having a plurality of lighting assemblies has been disclosed. Each of the lighting assemblies comprises a light source die and a spectral converter. The spectral converter is configured to spectrally adjust the light output of the light source die so that the plurality of lighting assemblies are configured to emit substantially different spectral output. In yet another embodiment, a lighting apparatus having a primary spectral converter and a secondary spectral converter is disclosed.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: November 4, 2014
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventors: Kheng Leng Tan, Ju Chin Poh, Keat Chuan Ng, Chuan Hoe Chan, Kwok Yuen Ng, Kum Soon Wong
  • Patent number: 8878183
    Abstract: A semiconductor chip for process monitoring of semiconductor fabrication, has a plurality of arrays with a plurality of diodes, each diode being formed in the chip, each diode being associated with a stack with at least one horizontal interconnect, the stack and the diode connected in series to form a diode stack combination, wherein the horizontal interconnect has a salicided polysilicon interconnect comprising complementary doped polysilicon sections to form a reverse biased diode.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: November 4, 2014
    Assignee: Microchip Technology Incorporated
    Inventor: Randy Yach
  • Patent number: 8871613
    Abstract: In one embodiment, semiconductor die are singulated from a semiconductor wafer by forming trenches along singulation lines and initiating a cracks from within the trenches, which propagate through the semiconductor wafer in a more controlled manner.
    Type: Grant
    Filed: June 18, 2012
    Date of Patent: October 28, 2014
    Assignee: Semiconductor Components Industries, LLC
    Inventor: Michael J. Seddon
  • Patent number: 8871570
    Abstract: A method for fabricating an optical interconnect includes producing a semiconductor wafer that includes multiple first dies. Each first die includes circuitry disposed over a surface of the wafer and connected to conductive vias arranged in rows. The multiple first dies are diced by cutting the wafer across the rows of the vias, such that, in each first die, the cut vias form respective contact pads on a side face of the first die that is perpendicular to the surface. A second semiconductor die including one or more optoelectronic transducers is attached to the contact pads, so as to connect the transducers to the circuitry.
    Type: Grant
    Filed: March 14, 2012
    Date of Patent: October 28, 2014
    Assignee: Mellanox Technologies Ltd.
    Inventors: Shmuel Levy, Shai Rephaeli
  • Patent number: 8871612
    Abstract: Embodiments disclose a method including forming at least one compound semiconductor layer on a top r-face of a substrate, forming a line for cleavage on a bottom r-face of the substrate along a length of a guide line, wherein the guide line extends in a (11-22)-plane direction of the substrate, wherein the guide line extends from one portion of an edge to another portion of the edge, and wherein the edge is disposed between the top r-face and the bottom r-face of the substrate, and applying a force to the bottom r-face of the substrate to cleave the substrate along the line for cleavage in the (11-22)-plane direction and to form a cleaved facet along a c-plane of the at least one compound semiconductor.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: October 28, 2014
    Assignee: LG Innotek Co., Ltd.
    Inventors: Young Hun Han, Dong Han Yoo
  • Publication number: 20140315372
    Abstract: A wafer processing method including a wafer supporting step of attaching a front side of a dicing tape formed of synthetic resin to a back side of a wafer and supporting a peripheral portion of the dicing tape to an annular frame, a dicing tape heating step of heating a back side of the dicing tape attached to the wafer to soften the dicing tape, thereby flattening the back side of the dicing tape, and a modified layer forming step of applying a laser beam having a transmission wavelength to the wafer through the dicing tape from the back side thereof along the division lines in the condition where the focal point of the laser beam is set inside the wafer, thereby forming a modified layer inside the wafer along each division line.
    Type: Application
    Filed: April 21, 2014
    Publication date: October 23, 2014
    Applicant: DISCO CORPORATION
    Inventor: Masaru Nakamura
  • Patent number: 8865568
    Abstract: Fractures (17a, 17b) are generated from modified regions (7a, 7b) to front and rear faces (12a, 12b) of a object to be processed (1), respectively, while an unmodified region (2) is interposed between the modified regions (7a, 7b). This can prevent fractures from continuously advancing in the thickness direction of a silicon substrate (12) when forming a plurality of rows of modified regions (7). By generating a stress in the object (1), the fractures (17a, 17b) are connected to each other in the unmodified region (2), so as to cut the object (1). This can prevent fractures from meandering in the rear face (12b) of the object (1) and so forth, whereby the object (1) can be cut accurately along a line to cut the object (5).
    Type: Grant
    Filed: April 18, 2014
    Date of Patent: October 21, 2014
    Assignee: Hamamatsu Photonics K.K
    Inventors: Takeshi Sakamoto, Aiko Nakagawa
  • Patent number: 8865567
    Abstract: Ineffective chips are formed in the circumference of a semiconductor wafer and effective chips are formed in a region surrounded by the ineffective chips. Dicing lines partition the effective chips and the ineffective chips. Polyimide is formed on an outer circumferential portion of the semiconductor wafer with a predetermined width from an outer circumferential end of the semiconductor wafer such that the polyimide continuously covers the ineffective chips from the outer circumferential end of the semiconductor wafer to the inside and continuously covers a portion which is a predetermined distance away from the outer circumferential end of the semiconductor wafer to the effective chip in the dicing line interposed between the ineffective chips. A metal film is formed on the front electrode formed on the effective chips by plating. The semiconductor wafer is cut into semiconductor chips along the dicing lines by a blade.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: October 21, 2014
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Akira Tamenori
  • Patent number: 8859397
    Abstract: Methods of using a hybrid mask composed of a first water soluble film layer and a second water-soluble layer for wafer dicing using laser scribing and plasma etch described. In an example, a method of dicing a semiconductor wafer having a plurality of integrated circuits involves forming a hybrid mask above the semiconductor wafer. The hybrid mask is composed of a first water-soluble layer disposed on the integrated circuits, and a second water-soluble layer disposed on the first water-soluble layer. The method also involves patterning the hybrid mask with a laser scribing process to provide a patterned hybrid mask with gaps, exposing regions of the semiconductor wafer between the integrated circuits. The method also involves etching the semiconductor wafer through the gaps in the patterned hybrid mask to singulate the integrated circuits.
    Type: Grant
    Filed: June 13, 2013
    Date of Patent: October 14, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Wei-Sheng Lei, Brad Eaton, Aparna Iyer, Todd Egan, Madhava Rao Yalamanchili, Ajay Kumar
  • Patent number: 8859396
    Abstract: In one embodiment, a method of singulating semiconductor die from a semiconductor wafer includes forming a material on a surface of a semiconductor wafer and reducing a thickness of portions of the material. Preferably, the thickness of the material is reduced near where singulation openings are to be formed in the semiconductor wafer.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: October 14, 2014
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Gordon M. Grivna, John M. Parsey, Jr.
  • Publication number: 20140295643
    Abstract: In a wafer processing method, a modified layer is formed inside a wafer along planned dividing lines by irradiating the wafer with a laser beam with such a wavelength as to be transmitted through the wafer from the back surface side of the wafer along the dividing lines. A first modified layer is formed near the back surface of the wafer by irradiating the wafer with the light focal point of the laser beam positioned near the back surface of the wafer. The wafer is then irradiated with the light focal point of the laser beam positioned on the front surface side. Then plural second modified layers are formed in a multi-layering manner with sequential movement of the light focal point toward an area leading to the first modified layer. The wafer is divided into individual devices along the dividing lines by applying an external force to the wafer.
    Type: Application
    Filed: March 12, 2014
    Publication date: October 2, 2014
    Applicant: DISCO CORPORATION
    Inventor: Masaru Nakamura
  • Publication number: 20140291814
    Abstract: An insulating substrate includes: a transparent insulating layer; a first metal layer that is provided on a first face of the transparent insulating layer; and a second metal layer that is provided on a second face of the transparent insulating layer that is opposite from the first face. The first face of the transparent insulating layer is formed with an exposed section that is an area not provided with the first metal layer. The second metal layer includes an area that is overlapped with the exposed section when seen in an orthogonal direction to the first face.
    Type: Application
    Filed: March 13, 2014
    Publication date: October 2, 2014
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventor: Hiromasa HAYASHI
  • Patent number: 8846172
    Abstract: Disclosed herein are a laminated composite and process for making the same. The laminated composite includes at least one wavelength-converting layer and at least one non-emissive layer, wherein a vertical relief gap pattern defines the composite into a plurality of discrete separable portions, and the discrete separable portions are breakably joined by a non-emissive layer. Separation along the relief gap pattern reduces color variation amongst the discrete portions and processes.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: September 30, 2014
    Assignee: Nitto Denko Corporation
    Inventors: Toshitaka Nakamura, Hironaka Fujii, Amane Mochizuki
  • Patent number: 8847416
    Abstract: A wafer includes an active region and a kerf region surrounding at least a portion of the active region. The wafer also includes a target region having a rectangular shape with a width and length greater than the width, the target region including one or more target patterns, at least one of the target patterns being formed by two sub-patterns disposed at opposing corners of target rectangle disposable within the target region.
    Type: Grant
    Filed: November 26, 2012
    Date of Patent: September 30, 2014
    Assignee: International Business Machines Corporation
    Inventors: Christopher P. Ausschnitt, Nelson M. Felix, Allen H. Gabor