Interrupted Or Composite Work Face (e.g., Cracked, Nonplanar, Etc.) Patents (Class 451/527)
  • Patent number: 8651921
    Abstract: A surface treatment device includes an enclosure which has an opening through which the leading edge of an aerofoil passes. A sealing element is provided on the enclosure to seal the device to the surfaces of the aerofoil. An abrasive is located within the enclosure and two fluid openings are also provided through which a chemical accelerant can be pumped. In operation the enclosure is oscillated relative to the component so that material is abraded. Whilst the enclosure is oscillated a chemical accelerant is simultaneously pumped through it. The device allows for the local application of a surface treatment on a component.
    Type: Grant
    Filed: February 3, 2010
    Date of Patent: February 18, 2014
    Assignee: Rolls-Royce PLC
    Inventors: Daniel Clark, Stephen John Tuppen
  • Publication number: 20140045413
    Abstract: An exchangeable abrasive mechanism or disc for use on abrasive-mechanism carriers having suction holes includes a plurality of through openings that each have a centroid. The through openings are differentiated into three groups that differ in the radial disposition of the centroids. A first group comprises at least one, but not more than four, through openings of a first cross section. At least two of the through openings of the first group are disposed on a first circumcircle diameter that is substantially identical to one of the hole-circle diameters such that, when the abrasive mechanism is correctly disposed on an abrasive-mechanism carrier, they are in direct alignment with and can overlap, two corresponding suction holes. A second group of through openings of a second, preferably smaller, cross section, comprises at least four through openings that are disposed on a second circumcircle diameter that differs from the first circumcircle diameter.
    Type: Application
    Filed: August 13, 2013
    Publication date: February 13, 2014
    Applicant: Robert Bosch GmbH
    Inventors: Josef Breitenmoser, Stephan Fritsch
  • Patent number: 8647178
    Abstract: A polishing pad of a polishing system is mountable to a polishing plate and has a predetermined channel pattern so as to allow a polishing liquid supplied from a polishing liquid supplier to move on a polishing surface. The channel pattern has at least two kinds of patterns.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: February 11, 2014
    Assignee: LG Chem, Ltd.
    Inventors: Kyoung-Hoon Min, Ye-Hoon Im, Dae-Yeon Lee, Jae-Ik Song, Su-Chan Park
  • Publication number: 20140038501
    Abstract: A polishing pad assembly for a chemical mechanical polishing apparatus includes a polishing pad having a polishing surface and a surface opposite the polishing surface for attachment to a platen, and a solid light-transmissive window formed in the polishing pad. The light-transmissive window is more transmissive to light than the polishing pad. The light-transmissive window has a light-diffusing bottom surface.
    Type: Application
    Filed: October 10, 2013
    Publication date: February 6, 2014
    Applicant: Applied Materials, Inc.
    Inventors: Manoocher Birang, Allan Gleason, William L. Guthrie
  • Publication number: 20140024296
    Abstract: A polishing pad, for polishing of a work piece having portions that are non-planar, the polishing pad comprising a first side and a second side of the polishing pad. The first side is substantially flat, and the second side is configured to polish the non-planar work piece. The polishing pad further comprises a concentric annular channel in the polishing pad, wherein the concentric annular channel comprises a channel surface, wherein the second side of the polishing pad comprises an inner surface, the channel surface, and an outer surface, and wherein the channel surface is recessed relative to the inner surface and outer surface. The polishing pad further comprises a plurality of islands located within the concentric annular channel, wherein the islands comprise an island surface that is raised relative to the channel surface.
    Type: Application
    Filed: June 10, 2013
    Publication date: January 23, 2014
    Inventors: Brent Muncy, James Anderson, Scott B. Daskiewich, George James Wasilczyk
  • Publication number: 20140017984
    Abstract: An abrasive article including a substrate having an elongated body, a tacking layer overlying the substrate, a first type of abrasive particle overlying the tacking layer, a second type of abrasive particle different than the first type of abrasive particles overlying the tacking layer, and a bonding layer overlying at least a portion of one of the first type of abrasive particle and the second type of abrasive particle and the tacking layer.
    Type: Application
    Filed: June 28, 2013
    Publication date: January 16, 2014
    Inventors: Paul W. Rehrig, Yinggang Tian, Wei Che, Arup K. Khaund, Thomas Puthanangady, Christopher Arcona, Srinivasan Ramanath
  • Patent number: 8628383
    Abstract: A coated abrasive product includes a particulate material containing green, unfired abrasive aggregates having a generally spheroidal or toroidal shape, the aggregates formed from a composition comprising abrasive grit particles and a nanoparticle binder. Free abrasive products, bonded abrasive products, and the particulate material also contain aggregates.
    Type: Grant
    Filed: July 17, 2009
    Date of Patent: January 14, 2014
    Assignees: Saint-Gobain Abrasives, Inc., Saint-Gobain Abrasifs
    Inventors: Shelly C. Starling, James Manning, Colleen Rafferty, Mark Sternberg, Anthony Gaeta
  • Publication number: 20140004780
    Abstract: A method of manufacturing a polishing pad mold for a polishing pad including a micro pattern ? having micro protrusions arranged therein includes steps of manufacturing a mother mold where a mother mold including a substrate, on one side of which a micro pattern ? having an inverted protrusion-depression shape with respect to the micro pattern ? is formed, is manufactured, manufacturing a positive daughter mold where a positive daughter mold having a micro pattern ? formed on a surface is manufactured by the mold, and manufacturing a negative daughter mold where a negative daughter mold having a micro pattern ? formed on a surface is manufactured by the mold, and an assembly step where the mold is configured by arranging and fixing the molds on a basis with the surfaces having the micro pattern ? faced up. Thereby, highly precise and efficient planarization is provided.
    Type: Application
    Filed: June 19, 2013
    Publication date: January 2, 2014
    Inventors: Yasunori Tashiro, Masato Takata, Toshiaki Atari, Masaaki Matsuo, Takahiro Ito, Keisuke Suzuki, Keiichi Kimura, Panart Khajornrungruang
  • Publication number: 20130324020
    Abstract: Polishing pads with a polishing surface layer having an aperture or opening above a transparent foundation layer are described. In an example, a polishing pad for polishing a substrate includes a foundation layer having a global top surface and a transparent region. A polishing surface layer is attached to the global top surface of the foundation layer. The polishing surface layer has a polishing surface and a back surface. An aperture is disposed in the polishing pad from the back surface through to the polishing surface of the polishing surface layer, and aligned with the transparent region of the foundation layer. The foundation layer provides an impermeable seal for the aperture at the back surface of the polishing surface layer. Methods of fabricating such polishing pads are also described.
    Type: Application
    Filed: June 4, 2012
    Publication date: December 5, 2013
    Inventors: Paul Andre Lefevre, William C. Allison, James P. LaCasse, Diane Scott, Alexander William Simpson, Ping Huang, Leslie M. Charns
  • Patent number: 8597087
    Abstract: A universal abrasive sheet is provided for a sanding or polishing machine and includes segments defined by weakened regions that allow portions of the universal abrasive sheet to be removed in order to adapt the abrasive sheet to alternative platent configurations. Each of the different configurations of the universal abrasive sheet can be provided with an individualized tip portion which can be separated from a body portion and either repositioned or replaced in order to change the working point of the tip portion when it becomes worn out.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: December 3, 2013
    Assignee: Black & Decker Inc.
    Inventors: Jason C. Shermer, Matthew J. Holland
  • Publication number: 20130316631
    Abstract: Methods and apparatus for forming a semi-spherical polishing pad for polishing semiconductor surfaces, provide for: placing a polishing pad pre-form on a dome-shaped forming surface, the polishing pad pre-form including a circular body having a center and an outer peripheral edge, and a plurality of slots extending from the outer peripheral edge towards the center; disposing a bladder opposite to the dome-shaped forming surface and the polishing pad pre-form; inflating the bladder with a fluid such that the dome-shaped forming surface of the bonnet form presses against the polishing pad pre-form from one side and the bladder presses against the polishing pad pre-form from an opposite side; and maintaining the pressing step for a predetermined period of time to achieve the semi-spherical polishing pad.
    Type: Application
    Filed: July 31, 2013
    Publication date: November 28, 2013
    Applicant: CORNING INCORPORATED
    Inventors: Raymond Charles Cady, Michael John Moore, Mark Alex Shalkey, Mark Andrew Stocker
  • Publication number: 20130309951
    Abstract: A polishing pad is described that has a polishing layer with a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The window has a top surface coplanar with the polishing surface and a bottom surface coplanar with a lower surface of the adhesive layer. A method of making a polishing pad includes forming an aperture through a polishing layer and an adhesive layer, securing a backing piece to the adhesive layer on a side opposite a polishing surface of the polishing layer, dispensing a liquid polymer into the aperture, and curing the liquid polymer to form a window.
    Type: Application
    Filed: July 23, 2013
    Publication date: November 21, 2013
    Applicant: Applied Materials, Inc.
    Inventors: Dominic J. Benvegnu, Jimin Zhang, Thomas H. Osterheld, Boguslaw A. Swedek
  • Publication number: 20130295826
    Abstract: A polishing pad has a polishing layer with a polishing surface and a back surface. A plurality of grooves are formed on the polishing surface, and an indentation is formed in the back surface of the polishing layer. A region on the polishing surface corresponding to the indentation in the back surface is free of grooves or has shallower grooves.
    Type: Application
    Filed: July 15, 2013
    Publication date: November 7, 2013
    Inventors: Boguslaw A. Swedek, Manoocher Birang
  • Patent number: 8574040
    Abstract: An abrasive disc includes a backing layer on a first major surface, a water-impermeable abrasive layer on a second major surface, and a water-absorbable, compressible, resilient, porous foam layer sandwiched in between the backing layer and the abrasive layer. The disc further includes a plurality of perforations. The disc is used to abrade a surface. Fluid is absorbed into the abrasive disc. The fluid is then released to the surface by compressing the abrasive disc against the surface in an abrading motion. The fluid is allowed to mix with and absorb surface swarf; and compression on the abrasive disc is released, reabsorbing the fluid and trapping swarf inside the disc.
    Type: Grant
    Filed: December 14, 2009
    Date of Patent: November 5, 2013
    Assignees: Saint-Gobain Abrasives, Inc., Saint-Gobain Abrasifs
    Inventors: Mervyn Chung-Fat, Biagio P. Pellegrino, Vivien Luttenschlager
  • Patent number: 8574039
    Abstract: A method and brush kit for cleaning and improving the roughness average of aluminum or aluminum coated valve cylinders and other open or blind bores in virtually any type of mechanical device by removing burrs and embedded particles within such cylinders and bores wherein the method provides a kit of a predetermined number of cylindrical brushes having metallic or nylon strands that are coated or impregnated with an aluminum oxide abrasive material. The method is particularly adapted for use by technicians in the automotive, marine, farm, aircraft and the like repair industries for treating transmission valve bores or cylinders and other open or blind bores and the like.
    Type: Grant
    Filed: July 21, 2009
    Date of Patent: November 5, 2013
    Inventors: Robert White, Jimmy Arledge, Russell Erickson, Dennis Erickson, Sr.
  • Patent number: 8562389
    Abstract: A polishing pad is described that has a polishing layer with a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The window has a top surface coplanar with the polishing surface and a bottom surface coplanar with a lower surface of the adhesive layer. A method of making a polishing pad includes forming an aperture through a polishing layer and an adhesive layer, securing a backing piece to the adhesive layer on a side opposite a polishing surface of the polishing layer, dispensing a liquid polymer into the aperture, and curing the liquid polymer to form a window.
    Type: Grant
    Filed: May 30, 2008
    Date of Patent: October 22, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Dominic J. Benvegnu, Jimin Zhang, Thomas H. Osterheld, Boguslaw A. Swedek
  • Patent number: 8556686
    Abstract: A sharpening device with an abrasive material, a polishing coat encapsulating the abrasive material and an instruction card coupled to the polishing coat. The abrasive material having a property of conforming to the shape of a pointed article penetrating the abrasive material and a property of applying resistance pressure to the pointed article. The sharpening pad may be used in the sharpening and polishing of conically and other shaped points as found on various articles such as machine and hand sewing needles, quilting needles, pins, darts, miscellaneous tools, barb-less fishhooks and the like, including various fine pointed articles.
    Type: Grant
    Filed: June 22, 2010
    Date of Patent: October 15, 2013
    Assignee: AFAB Innovations, Inc.
    Inventor: William S. Scott
  • Patent number: 8550878
    Abstract: Processing pads for mechanical and/or chemical-mechanical planarization or polishing of substrates in the fabrication of microelectronic devices, methods for making the pads, and methods, apparatus, and systems that utilize and incorporate the processing pads are provided. The processing pads include grooves or other openings in the abrading surface containing a solid or partially solid fill material that can be selectively removed as desired to maintain the fill at an about constant or set distance from the abrading surface of the pad and an about constant depth of the pad openings for multiple processing and conditioning applications over the life of the pad.
    Type: Grant
    Filed: May 11, 2012
    Date of Patent: October 8, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Naga Chandrasekaran, Arun Vishwanathan
  • Publication number: 20130260657
    Abstract: A method for making a polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a polymer precursor. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer precursor has cured. The rotating of the cylinder may be continued until the polymer has cured. The method may include forming at least two distinct layers in the polishing pad by casting and curing sequentially at least two different polymer precursors. A system for manufacturing a polishing pad includes a centrifugal caster adapted to rotate. A polishing pad made by a method is provided.
    Type: Application
    Filed: April 1, 2013
    Publication date: October 3, 2013
    Inventors: Thomas West, Peter McKeever, Kevin Song, Donald Dietz, Long Nguyen, Matt Richardson
  • Publication number: 20130260656
    Abstract: An abrasive article having a plurality of apertures arranged in a non-uniform distribution pattern, wherein the pattern is spiral or phyllotactic, and in particular those patterns described by the Vogel equation. Also, provided is a back-up pad having a spiral or phyllotactic patterns of air flow paths, such as in the form of open channels. The back-up pad can be specifically adapted to correspond with an abrasive article having a non-uniform distribution pattern. Alternatively, the back-up pad can be used in conjunction with conventional perforated coated abrasives. The abrasive articles having a non-uniform distribution pattern of apertures and the back-up pads can be used together as an abrasive system.
    Type: Application
    Filed: December 31, 2012
    Publication date: October 3, 2013
    Inventors: Anuj Seth, Julie M. Dinh-Ngoc, Vivek Cheruvari Kottieth Raman, Paul A. Krupa, James M. Garrah
  • Patent number: 8545583
    Abstract: Flexible abrasive sheet articles having precision thickness flat-topped raised island structures that are coated with a monolayer of equal sized abrasive agglomerate are described. Methods of producing high quality equal-sized spherical shaped composite abrasive agglomerate beads containing small diamond abrasive particles are described. Beads are produced by level-filling fine mesh screens or perforated sheets with a water based metal oxide slurry containing abrasive particles and then using a fluid jet to eject the abrasive slurry lumps from the individual screen cells into a dehydrating environment. Surface tension forces form the ejected liquid lumps into spheres that are solidified and then heated in a furnace to form ceramic beads. These porous ceramic abrasive beads can be bonded directly onto the flat planar surface of a flexible backing material or they can be bonded onto raised island surfaces to form rectangular or disk abrasive sheet articles.
    Type: Grant
    Filed: January 5, 2005
    Date of Patent: October 1, 2013
    Inventor: Wayne O. Duescher
  • Publication number: 20130252516
    Abstract: According to one embodiment, there is provided a polishing pad having a surface for the polishing processing of a polishing workpiece. Here, the polishing pad is made of a plate-shaped thermal shrinking material, and it has a half-cut portion cut to a particular depth from one principal surface.
    Type: Application
    Filed: March 11, 2013
    Publication date: September 26, 2013
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Shiro MISHIMA, Satoshi MURAKAMI
  • Publication number: 20130237136
    Abstract: The invention provides a polishing pad comprising an optically transmissive region, wherein the polishing pad comprises a polishing pad body comprising an opaque first region and an optically transmissive second region, wherein the second region has at least one recess formed therein of at least one part of the polishrag pad body, and at least one translucent window insert is integrated into the at least one recessed area. The polishing pad body and the at least one translucent window insert comprise different porous. materials.
    Type: Application
    Filed: November 18, 2011
    Publication date: September 12, 2013
    Applicant: Cabot Microelectronics Corporation
    Inventors: Kelly Newell, Abaneshwar Prasad
  • Publication number: 20130231032
    Abstract: A method of forming a polishing pad with a polishing layer having a polishing surface and a back surface. A plurality of grooves are formed on the polishing surface, and an indentation is formed in the back surface of the polishing layer. A region on the polishing surface corresponding to the indentation in the back surface is free of grooves or has shallower grooves.
    Type: Application
    Filed: January 23, 2013
    Publication date: September 5, 2013
    Inventors: Boguslaw A. Swedek, Manoocher Birang
  • Patent number: 8512100
    Abstract: There are provided an abrasive tape capable of suppressing contamination of a magnetic disk due to shattered abrasive particles and smoothing the surface of the magnetic disk; a method for producing an abrasive tape; and a varnishing process. An abrasive tape 1 produced according to the method for producing an abrasive tape of the invention is used in a process for varnishing a magnetic disk and produced according to a process for preparing a slurry by kneading and dispersing abrasive particles 5 and a binding agent 6; a process for forming a coating film by applying the slurry on a support 2; a process for forming an abrasive particle layer 3 by hardening the coating film; and a process for forming a coating layer 4 on the surface of the abrasive particle layer 3.
    Type: Grant
    Filed: June 19, 2009
    Date of Patent: August 20, 2013
    Assignee: Showa Denko K.K.
    Inventors: Ryuji Sakaguchi, Kazuya Niwa
  • Patent number: 8496512
    Abstract: A polishing pad, a polishing method and a method of forming a polishing pad are provided. The polishing pad includes a polishing layer and a plurality of arc grooves. The arc grooves are disposed in the polishing layer. Each of the arc grooves has two ends, and at least one end thereof has an inclined wall. The angle between the inclined wall of each groove and the surface plane of the polishing layer is less than 90 degree.
    Type: Grant
    Filed: October 10, 2012
    Date of Patent: July 30, 2013
    Assignee: IV Technologies Co., Ltd.
    Inventor: Yu-Piao Wang
  • Publication number: 20130189907
    Abstract: A chemical mechanical polishing pad includes a polishing layer, a recess being formed in a polishing surface of the polishing layer, the polishing layer including a surface layer that forms at least an inner side of the recess, and a ratio (D1/D2) of an average opening ratio D1(%) to an average opening ratio D2(%) being 0.01 to 0.5, the average opening ratio D1 being an average opening ratio of the inner side of the recess when the polishing layer has been immersed in water at 23° C. for 1 hour, and the average opening ratio D2 being an average opening ratio of a cross section of the polishing layer that does not intersect the surface layer when the cross section has been immersed in water at 23° C. for 1 hour.
    Type: Application
    Filed: June 13, 2011
    Publication date: July 25, 2013
    Applicant: JSR CORPORATION
    Inventors: Kotaro Kubo, Yukio Hosaka, Takahiro Okamoto
  • Patent number: 8485862
    Abstract: A polishing pad has a polishing layer with a polishing surface and a back surface. A plurality of grooves are formed on the polishing surface, and an indentation is formed in the back surface of the polishing layer. A region on the polishing surface corresponding to the indentation in the back surface is free of grooves or has shallower grooves.
    Type: Grant
    Filed: May 23, 2003
    Date of Patent: July 16, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Boguslaw A. Swedek, Manoocher Birang
  • Patent number: 8485869
    Abstract: The present invention relates to a polishing material having polishing particles and a method for making the same. The polishing material having polishing particles includes a base material, a plurality of polishing particles and a polymer elastic body. The base material has a plurality of fibers for defining a plurality of grid-spaces. The polishing particles are distributed in the grid-spaces. The polymer elastic body covers the base material and the polishing particles. Whereby, the polishing particles are uniformly distributed on a surface of a polishing workpiece during the polishing process. Furthermore, the base material prevents the polishing particles from contacting the polishing workpiece so as to avoid the scratch of the polishing workpiece. Also, the base material provides effects for sweeping the small grinded pieces.
    Type: Grant
    Filed: September 24, 2010
    Date of Patent: July 16, 2013
    Assignee: San Fang Chemical Industry Co., Ltd.
    Inventors: Chung-Chih Feng, I-Peng Yao, Lyang-Gung Wang, Yung-Chang Hung, Chao-Yuan Tsai
  • Patent number: 8475238
    Abstract: A polishing pad may include a base and a plurality of polishing protrusions on a surface of the base. Each polishing protrusion may include a sidewall defining an opening in a surface of the polishing protrusion opposite the base. In addition, portions of the sidewall opposite the base may define a contact surface.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: July 2, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae-Kwang Choi, Bo-Un Yoon, Myung-Ki Hong
  • Publication number: 20130148079
    Abstract: Systems and methods for polishing a lens having a freeform design cut into a surface of the lens are provided. The system may include a lap blank having a substantial inverse of the freeform design cut into a surface of the lap blank, or a conformable lap blank having an inverse of the freeform design molded into a surface of the lap blank. The system also includes a deformable pad mounted on the surface of the lap blank. The surface of the lens is separated from the surface of the lap blank by the deformable pad, and the lens and the lap blank are arranged such that the freeform design of the surface of the lens is substantially aligned with the substantial inverse of the freeform design of the surface of the lap blank.
    Type: Application
    Filed: March 16, 2011
    Publication date: June 13, 2013
    Applicant: Coburn Technologies, Inc.
    Inventors: Matthew John Brown, Steven Glenn Bedford
  • Patent number: 8449357
    Abstract: Polishing tools and their methods of manufacture and use are disclosed. In one aspect, a polishing device is provided, including a plurality of polymeric fibers longitudinally arranged and embedded in a polymeric binder, the polymeric binder having a stiffness that is less than a stiffness of the polymeric fibers, and a working end of the plurality of polymeric fibers configured such that tips of the polymeric fibers are oriented to contact a work piece.
    Type: Grant
    Filed: October 6, 2008
    Date of Patent: May 28, 2013
    Inventor: Chien-Min Sung
  • Patent number: 8444457
    Abstract: A universal abrasive sheet is provided for a sanding or polishing machine and includes segments defined by weakened regions that allow portions of the universal abrasive sheet to be removed in order to adapt the abrasive sheet to alternative platent configurations. Each of the different configurations of the universal abrasive sheet can be provided with an individualized tip portion which can be separated from a body portion and either repositioned or replaced in order to change the working point of the tip portion when it becomes worn out.
    Type: Grant
    Filed: April 5, 2005
    Date of Patent: May 21, 2013
    Assignee: Black & Decker Inc.
    Inventors: Jason C Shermer, Matthew J Holland
  • Patent number: 8431489
    Abstract: A chemical mechanical polishing pad having a polishing layer with an integral window and a polishing surface adapted for polishing a substrate selected from a magnetic substrate, an optical substrate and a semiconductor substrate, wherein the formulation of the integral window provides improved defectivity performance during polishing. Also provided is a method of polishing a substrate using the chemical mechanical polishing pad.
    Type: Grant
    Filed: July 31, 2012
    Date of Patent: April 30, 2013
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Mary Jo Kulp, Shannon H Williams
  • Publication number: 20130102231
    Abstract: Polishing pads including organic particulates in a continuous polymer phase, and methods of making and using such pads in a polishing process. In one exemplary embodiment, the polishing pads include a multiplicity of polishing elements integrally formed in a sheet. In another exemplary embodiment, the polishing elements are bonded to a support layer, for example by thermal bonding. In certain embodiments, the polishing pad may additionally include a compliant layer affixed to the support layer, and optionally, a polishing composition distribution layer.
    Type: Application
    Filed: December 28, 2010
    Publication date: April 25, 2013
    Applicant: 3M Innovative Properties Company
    Inventors: William D. Joseph, Brian D. Goers
  • Patent number: 8408977
    Abstract: The polishing pad is useful for polishing at least one of magnetic, optical and semiconductor substrates. A porous polishing layer includes a dual porosity structure within a polyurethane matrix. The dual porosity structure has a primary set of pores having pore walls with a thickness of 15 to 55 ?m and a storage modulus of 10 to 60 MPa measured at 25° C. In addition, pore walls contain a secondary set of pores having an average pore size of 5 to 30 ?m. The porous polishing layer is either fixed to a polymeric film or sheet substrate or formed into a woven or non-woven structure to form the polishing pad.
    Type: Grant
    Filed: March 16, 2012
    Date of Patent: April 2, 2013
    Assignee: Rohm and Haas Electronic Materials CMP Inc.
    Inventors: David B. James, Henry Sanford-Crane
  • Publication number: 20130072097
    Abstract: The contouring sanding pad works to sand irregular surfaces, including but not limited to automobile surfaces. It is made using thin flat flexible material such as stainless steel and a pressure dispersal system. The pressure dispersal system is attached superiorly to a pressure source, which can include, but is not limited to a handle; and inferiorly, to said flexible material, where pressure is evenly distributed throughout the pad, simultaneously conforming to all surface types and shapes. This technology is superior to existing sanders in that it doesn't require mental concentration or physical adjustments to sand rounded, irregular, or uneven surfaces simultaneously, maximizing productivity. The contouring sanding pad is versatile in its various forms, shapes, sizes, and adaptability. Its components can be reconfigured in terms of materials and structure. The contouring sanding pad can be used manually or attached to power tools. It automatically conforms and continually self-adjusts to surfaces.
    Type: Application
    Filed: September 16, 2011
    Publication date: March 21, 2013
    Inventors: John Wesley King, Shelley Kay Haynes
  • Patent number: 8398462
    Abstract: A method of creating pores in a CMP pad in-situ includes impregnating a first material with a second material to form a CMP pad. The second material can have a resistance to frictional erosion that is less than that of the first material. The CMP pad thus has two materials with differing frictional erosion resistances. The working surface of the CMP pad can be contacted to a wafer to be polished wherein the second material can be frictionally eroded during polishing.
    Type: Grant
    Filed: February 20, 2009
    Date of Patent: March 19, 2013
    Inventor: Chien-Min Sung
  • Patent number: 8398461
    Abstract: A polishing method, a polishing pad and a polishing system are provided. In the invention, the polishing pad is used to polish a polishing article. The polishing pad includes a polishing layer and a surface pattern disposed in the polishing layer. The polishing layer includes a polishing surface, a rotating central region, and a peripheral region. The surface pattern includes many grooves distributed from near the rotating central region and extending outward to near the peripheral region. The grooves include many groove cross sections along a circumferential direction of a same radius. Each of the groove cross sections has a left sidewall and a right sidewall. An included angle is formed by the polishing surface and one of a group of the left sidewalls and a group of the right sidewalls. The included angle is an obtuse angle.
    Type: Grant
    Filed: January 21, 2010
    Date of Patent: March 19, 2013
    Assignee: IV Technologies Co., Ltd.
    Inventor: Yu-Piao Wang
  • Patent number: 8393941
    Abstract: The present invention relates to an abrasive tool, of the type suitable to be mounted on a machine tool, comprising at least a bearing structure with abrasive material, the said bearing structure being provided with at least a grid (6) with abrasive material, the grid (6) partially protruding or emerging from a body (7) without abrasive material.
    Type: Grant
    Filed: January 28, 2008
    Date of Patent: March 12, 2013
    Assignee: Serafino Ghonelli
    Inventor: Serafino Ghinelli
  • Patent number: 8393940
    Abstract: A polishing pad includes a polishing layer having a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The solid light-transmitting window has an upper portion with a first lateral dimension and a lower portion with a second lateral dimension that is smaller than the first lateral dimension. A top surface of the solid light-transmitting window coplanar with the polishing surface and a bottom surface of the solid light-transmitting window coplanar with a lower surface of the adhesive layer.
    Type: Grant
    Filed: April 16, 2010
    Date of Patent: March 12, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Boguslaw A Swedek, Doyle E Bennett, Dominic J Benvegnu
  • Publication number: 20130059509
    Abstract: Methods for producing in-situ grooves in CMP pads are provided. In general, the methods for producing in-situ grooves comprise the steps of patterning a silicone lining, placing the silicone lining in, or on, a mold, adding CMP pad material to the silicone lining, and allowing the CMP pad to solidify. CMP pads comprising novel groove designs are also described. For example, described here are CMP pads comprising concentric circular grooves and axially curved grooves, reverse logarithmic grooves, overlapping circular grooves, lassajous groves, double spiral grooves, and multiply overlapping axially curved grooves. The CMP pads may be made from polyurethane, and the grooves produced therein may be made by a method from the group consisting of silicone lining, laser writing, water jet cutting, 3-D printing, thermoforming, vacuum forming, micro-contact printing, hot stamping, and mixtures thereof.
    Type: Application
    Filed: September 12, 2012
    Publication date: March 7, 2013
    Inventors: Manish Deopura, Hem M. Vaidya, Pradip K. Roy
  • Publication number: 20130048017
    Abstract: An abrasive or cleaning pad includes a composite resin as a wear layer. A cleaning pad system for motorized floor cleaning or polishing applications includes a pad having a combination of two grades of melamine resin-based foam. A method of cleaning a floor surface is also provided.
    Type: Application
    Filed: May 31, 2012
    Publication date: February 28, 2013
    Applicant: CHARLOTT PRODUKTE DR. RAUWALD GMBH
    Inventor: WOLFGANG RAUWALD
  • Publication number: 20130040543
    Abstract: The present invention relates to a polishing pad and method for making the same. In the invention, a liquid-state polymer material is directly formed on the surface of a base material, and then the liquid-state polymer material is solidified to form a flat grinding layer. Whereby, the polishing pad has high unity and flatness. The grinding layer has attenuated structures and a plurality of holes, thus increasing the storage ability of polishing particles distributed in a polishing liquid. In addition, the polishing pad has high compression ratio, so the polishing pad can compactly contact a polishing workpiece, and will not scratch the surface of the polishing workpiece scratched. Therefore, the polishing effect and quality will be improved.
    Type: Application
    Filed: October 18, 2012
    Publication date: February 14, 2013
    Applicant: SAN FANG CHEMICAL INDUSTRY CO., LTD.
    Inventor: San Fang Chemical Industry Co., Ltd.
  • Publication number: 20130040539
    Abstract: A polishing pad, a polishing method and a method of forming a polishing pad are provided. The polishing pad includes a polishing layer and a plurality of arc grooves. The arc grooves are disposed in the polishing layer. Each of the arc grooves has two ends, and at least one end thereof has an inclined wall. The angle between the inclined wall of each groove and the surface plane of the polishing layer is less than 90 degree.
    Type: Application
    Filed: October 10, 2012
    Publication date: February 14, 2013
    Applicant: IV Technologies Co., Ltd.
    Inventor: Yu-Piao WANG
  • Publication number: 20130035021
    Abstract: A polishing pad having a polishing layer comprising a thermoset polyurethane foam, wherein the thermoset polyurethane foam contains, as raw material components, an isocyanate component, and active-hydrogen-containing compounds, and the active-hydrogen-containing compounds comprise one or more polyol compounds (each) having two or more functional groups, and a monool compound having one functional group.
    Type: Application
    Filed: March 17, 2011
    Publication date: February 7, 2013
    Applicant: TOYO TIRE & RUBBER CO., LTD.
    Inventors: Masato Doura, Nobuyoshi Ishizaka
  • Patent number: 8357027
    Abstract: The present invention relates to a method of manufacturing a polishing pad with embedded polymeric capsules useful for planarizing a substrate in a CMP process using a polishing composition. The method reduces non-uniformity of the polishing pad due to capsule floating, differential heating and capsule expansion by the use of novel capsule materials. The method also increases the efficiency of the manufacturing process by reducing the number of defective products and reducing waste.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: January 22, 2013
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventor: Alan H. Saikin
  • Publication number: 20130017764
    Abstract: Polishing pads with apertures are described. Methods of fabricating polishing pads with apertures are also described.
    Type: Application
    Filed: July 15, 2011
    Publication date: January 17, 2013
    Inventors: William C. Allison, Diane Scott, Rajeev Bajaj
  • Publication number: 20130017766
    Abstract: A polishing pad used in conjunction with a carrier ring to polish a substrate and has a motion direction when polishing is provided. The carrier ring has at least one carrier groove, and the substrate has a substrate radius. The polishing pad has a polishing layer and a surface pattern. The surface pattern has traversing grooves, and an angle between the tangent line of each traversing groove and the tangent line of the motion direction is not equal to 0 degree. Each traversing groove respectively has a traversing groove trajectory corresponding to the motion direction, and the traversing groove trajectory of the traversing groove has a trajectory width smaller than the substrate radius. At leading region of the carrier ring corresponding to the motion direction, the traversing grooves have at least one carrier compatible groove which aligns with the at least one carrier groove of the carrier ring.
    Type: Application
    Filed: May 16, 2012
    Publication date: January 17, 2013
    Applicant: IV TECHNOLOGIES CO., LTD.
    Inventor: Yu-Piao Wang
  • Patent number: 8348723
    Abstract: A structured abrasive article includes a backing having a structured abrasive layer disposed on and secured thereto. The structured abrasive layer includes shaped abrasive composites that comprise abrasive particles and nonionic polyether surfactant dispersed in a crosslinked polymeric binder. The abrasive particles have a mean particle size of less than 10 micrometers. The nonionic polyether surfactant is not covalently bound to the crosslinked polymeric binder and is present in an amount of from 2.5 to 3.2 percent by weight based on a total weight of the shaped abrasive composites. The structured abrasive articles are useful for abrading a workpiece.
    Type: Grant
    Filed: September 16, 2009
    Date of Patent: January 8, 2013
    Assignee: 3M Innovative Properties Company
    Inventors: Edward J. Woo, Jimmie R. Baran, Jr., Scott R. Culler, Paul D. Graham