Clay, Silica, Or Silicate Patents (Class 51/308)
  • Publication number: 20140013674
    Abstract: A method for producing a high purity silica sol is provided. This method has enabled use of water glass for the starting material, and the resulting silica sol has a reduced metal impurity Cu and Ni content compared to conventional methods. The method comprises (1) ultrafiltration of an aqueous solution of an alkali silicate; (2) ion exchange process for removal of at least a part of cationic components in the purified aqueous solution of an alkali silicate; (3) another ion exchange process using a chelating ion exchange resin to obtain high purity silicate solution; and (4) adjustment of a part of the high purity silicate solution (seed solution) to alkaline pH and mixing of this solution with another part of the solution (feed solution) to produce a high purity silica sol having a Cu concentration and a Ni concentration (in relation to the dry silica) of up to 50 ppb.
    Type: Application
    Filed: December 27, 2012
    Publication date: January 16, 2014
    Applicant: JGC Catalysts and Chemicals Ltd.
    Inventor: JGC Catalysts and Chemicals Ltd.
  • Publication number: 20140007517
    Abstract: An abrasive article includes a bonded abrasive body having abrasive particles contained within a bond material. The bonded abrasive body may include an abrasive particle-to-bond material interfacial modulus of elasticity (MOE) of at least about 225 GPa. The bonded abrasive body may be configured to grind a workpiece comprising metal at a speed of less than about 60 m/s.
    Type: Application
    Filed: July 3, 2013
    Publication date: January 9, 2014
    Inventors: Nilanjan Sarangi, Sandhya Jayaraman Rukmani, Stephen E. Fox, Russell L. Krause
  • Publication number: 20140007516
    Abstract: An abrasive article including a bonded abrasive body having abrasive particles contained within a bond material, the bond material including a vitreous material formed from a mixture having aluminum oxide (Al2O3), bismuth oxide (Bi2O3), and boron oxide (B2O3), and wherein the mixture includes an amount (wt %) of aluminum oxide less than an amount (wt %) of bismuth oxide and the amount (wt %) of aluminum oxide is less than an amount (wt %) of boron oxide.
    Type: Application
    Filed: June 28, 2013
    Publication date: January 9, 2014
    Inventors: Sophie Papin, Cécile Jousseaume, Nilanjan Sarangi, Sandhya Jayaraman Rukmani
  • Patent number: 8622157
    Abstract: A polycrystalline diamond compact useful for wear, cutting, drilling, drawing and like applications is provided with a first diamond region remote from the working surface which has a metallic catalyzing material and a second diamond region adjacent to or including the working surface containing a non-metallic catalyst and the method of making such a compact is provided. This compact is particularly useful in high temperature operations, such as hard rock drilling because of the improved thermal stability at the working surface.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: January 7, 2014
    Assignee: US Synthetic Corporation
    Inventors: Kenneth E. Bertagnolli, Michael A. Vail
  • Patent number: 8616936
    Abstract: To polish polishing target surfaces of SiO2 insulating films or the like at a high rate without scratching the surface, the present invention provides an abrasive comprising a slurry comprising a medium and dispersed therein at least one of i) cerium oxide particles constituted of at least two crystallites and having crystal grain boundaries or having a bulk density of not higher than 6.5 g/cm3 and ii) abrasive grains having pores. Also provided are a method of polishing a target member and a process for producing a semiconductor which make use of this abrasive.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: December 31, 2013
    Assignee: Hitachi Chemical Company, Ltd.
    Inventors: Masato Yoshida, Toranosuke Ashizawa, Hiroki Terazaki, Yuuto Ootuki, Yasushi Kurata, Jun Matsuzawa, Kiyohito Tanno
  • Publication number: 20130344779
    Abstract: The present invention relates to a conditioner for a chemical-mechanical planarization (CMP) pad, which is used in a CMP process that is part of a semiconductor element manufacturing process, and more particularly, to a conditioner for a soft pad, and a method of manufacturing the same, wherein the conditioner can be used under CMP conditions using a slurry having a small amount of polishing particles, and/or a porous pad having comparatively low hardness and very high porosity.
    Type: Application
    Filed: March 7, 2012
    Publication date: December 26, 2013
    Applicant: EHWA DIAMOND INDUSTRIAL. CO., LTD.
    Inventors: Seh Kwang Lee, Youn Chul Kim, Joo Han Lee, Jong Jae Lee
  • Publication number: 20130333298
    Abstract: A method for producing abrasive agents includes: adding a silica to a manganese compound; heat-treating the manganese compound to which the silica has been added; forming abrasive grains by milling the manganese compound to which the silica has been added and which has been heat-treated; and adding a solvent to the abrasive grains.
    Type: Application
    Filed: April 4, 2013
    Publication date: December 19, 2013
    Applicant: FUJITSU LIMITED
    Inventor: Sadahiro KISHII
  • Publication number: 20130333299
    Abstract: There is provided an abrasive recovery device and an abrasive recovery method capable of recovering a slurry which is condensed until a concentration of its abrasive becomes high while suppressing an increase in pressure loss and a great decrease in a recovery ratio ascribable to membrane clogging. The abrasive recovery device is a device 1 which recovers an abrasive from a used polishing slurry which has been used in a CMP process, the device including a separation membrane 41 having a cylindrical hole passage to which the used polishing slurry is led, wherein an effective filtration part of the hole passage of the separation membrane 41 has a 0.8 m length or less, and the abrasive recovery device 1 condenses the used polishing slurry until a concentration of the abrasive becomes 10 mass % or more.
    Type: Application
    Filed: August 21, 2013
    Publication date: December 19, 2013
    Applicant: NOMURA MICRO SCIENCE CO., LTD.
    Inventors: Keiichiro Ishii, Shoji Hioki
  • Publication number: 20130326963
    Abstract: A polycrystalline diamond material comprising a mass of diamond particles or grains exhibiting inter-granular bonding and a binder material comprises a non-metallic catalyst material for diamond, the non-metallic catalyst material for diamond comprising at least one nitrogen compound derived from an ammonium compound and/or at least one halide compound.
    Type: Application
    Filed: October 20, 2011
    Publication date: December 12, 2013
    Applicant: ELEMENT SIX ABRASIVES S.A.
    Inventors: Charles Stephan Montross, Kaveshini Naidoo
  • Patent number: 8591611
    Abstract: An aqueous slicing fluid comprising (A) 0.01-20 wt % of a modified silicone is combined with abrasive grains to form an aqueous slicing slurry which has advantages of dispersion stability of abrasive grains, viscosity stability, and a higher machining accuracy.
    Type: Grant
    Filed: June 9, 2010
    Date of Patent: November 26, 2013
    Assignee: Nissin Chemical Industry Co., Ltd.
    Inventors: Ichiro Tanii, Takayuki Hayashi, Toru Mizusaki, Takashi Kimura
  • Patent number: 8591613
    Abstract: An uncoated abrasive or superabrasive grain having at least one grain face including three or more features projecting from the grain face wherein the height (h) and the lateral length (l) of each feature is greater than about 0.1 micron.
    Type: Grant
    Filed: September 16, 2009
    Date of Patent: November 26, 2013
    Assignee: Diamond Innovations, Inc.
    Inventors: Kai Zhang, Rajeev Pakalapati, John William Lucek
  • Publication number: 20130305615
    Abstract: Provided are a method for producing an alumina sintered compact satisfying the following (1) and (2), which comprises mixing and sintering an ilmenite powder and an alumina powder; the alumina sintered compact obtained according to the production method; and an abrasive grain and a grain stone. (1) The total amount of the TiO2-equivalent content of the titanium compound, the Fe2O3-equivalent content of the iron compound and the alumina content is at least 98% by mass; (2) The total amount of the TiO2-equivalent content of the titanium compound and the Fe2O3-equivalent content of the iron compound is from 5 to 13% by mass.
    Type: Application
    Filed: October 18, 2011
    Publication date: November 21, 2013
    Applicant: SHOWA DENKO K.K.
    Inventors: Shinichiro Tomikawa, Hirokazu Miyazawa, Takeshi Iemura
  • Patent number: 8585791
    Abstract: In producing nodular silica sol, a polymerized silicic acid solution with viscosity of silicic acid from 0.9 to 100 mPa·s is prepared by aging a silicic acid solution with pH from 1.0 to 7.0 and silica concentration from 0.05 to 3.0% by weight at a temperature from 1 to 98° C. Then, a seed liquid is prepared by adding an alkali to the polymerized solution to adjust the pH from 10 to 12.5 and heating the resultant mixture solution at a temperature from 50 to 150° C. According to necessity, an alkali is added to the obtained seed liquid to adjust the pH in from 9 to 12.5. Finally, a silicic acid solution or a highly purified silicic acid solution is dropped to the seed liquid at a temperature from 20 to 98° C. continuously or intermittently for building up.
    Type: Grant
    Filed: September 1, 2011
    Date of Patent: November 19, 2013
    Assignee: JGC Catalysts and Chemicals Ltd.
    Inventors: Kazuhiro Nakayama, Akira Nakashima, Hiroyasu Nishida, Yoshinori Wakamiya
  • Publication number: 20130291444
    Abstract: The CMP slurry regeneration apparatus 200 for regenerating the CMP slurry used for a CMP process patterning metal conductive elements on a semiconductor circuit comprises a gravity separator 205 for precipitating solids in a diluted waste slurry used in the CMP process by gravity sedimentation; a concentrated slurry container 207 for reserving the solid through the gravity sedimentation in the gravity separator 205 as concentrated slurry 206; a solid-liquid separator 209 for catching components contained in the waste slurry as rinsed components through rinsing the waste slurry by remaining hydroxide corresponding to small amount metal ion while removing soluble and solid components formed by the CMP process; and a regenerated slurry container 211 for regenerating the small amount metal ion from the rinsed components.
    Type: Application
    Filed: April 8, 2013
    Publication date: November 7, 2013
    Inventors: Takashi Matsuo, Yukinari Sato, Takashi Mizuta
  • Publication number: 20130283704
    Abstract: Provided is a method for producing a polishing composition capable of reducing scratches and particles of an object to be polished, after polishing. It is a method for producing a polishing composition including a step of filtering with a filtration filter a silica particle dispersion containing colloidal silica whose primary particles have an average particle diameter in a range of 1 to 100 nm, wherein the filtration filter includes diatomite cationized by use of a polyvalent amine compound having 9 to 200 cationic groups in the molecule.
    Type: Application
    Filed: December 21, 2011
    Publication date: October 31, 2013
    Applicant: KAO CORPORATION
    Inventors: Yasuhiro Yoneda, Kanji Sato
  • Publication number: 20130288574
    Abstract: A ceramic abrasive grain product of a ceramic material composition, said ceramic abrasive grain product comprising at least fifty percent of abrasive grains having a uniform grain thickness of from 0.002 to 0.016 inches and a length such that the grain is self dressing when oriented such that the thickness of the grain is exposed to a workpiece, abrasive products made therefrom and method for manufacturing and using same.
    Type: Application
    Filed: June 26, 2013
    Publication date: October 31, 2013
    Inventors: Robert Seider, Angelo R. Angelone
  • Publication number: 20130283703
    Abstract: TiO2 based scrubbing granules, and methods of making and using such TiO2 based scrubbing granules are described. TiO2-based scrubbing granules include granulated TiO2 and about 0.5% to about 20% dry weight inorganic salt binder. Other TiO2 based scrubbing granules include unsintered granulated TiO2 and about 0.5% to about 20% dry weight inorganic salt binder. Inorganic salt binder include sodium aluminate. Methods of making TiO2 based scrubbing granules include i) combining TiO2 particles with inorganic salt binder to form TiO2-binder mixture comprising from about 0.5% to about 20% dry weight binder; ii) granulating the TiO2-binder mixture; and drying the granulated TiO2-binder mixture to form TiO2-based scrubbing granules.
    Type: Application
    Filed: April 26, 2013
    Publication date: October 31, 2013
    Applicant: CRISTAL USA Inc.
    Inventors: Venkata Ramana Reddy SAMA, Kit Stacey EREMCHUK, Mark D. POMPONI, Gabor FEHER, Alexandre Jean FINES
  • Patent number: 8557006
    Abstract: A chemical mechanical polishing slurry for polishing a copper layer without excessively or destructively polishing a barrier layer beneath the copper layer is disclosed and includes an acid, a surfactant, and a silica sol having silica polishing particles that are surface modified with a surface charge modifier and that have potassium ions attached thereto. A method for preparing the chemical mechanical polishing slurry and a chemical mechanical polishing method using the chemical mechanical polishing slurry are also disclosed.
    Type: Grant
    Filed: April 26, 2012
    Date of Patent: October 15, 2013
    Assignee: Epoch Material Co., Ltd.
    Inventors: Hui-Fang Hou, Wen-Cheng Liu, Yen-Liang Chen, Jui-Ching Chen
  • Publication number: 20130263524
    Abstract: Producing and using very low packing density ceramic abrasive grits comprising various fused aluminum oxide materials with or without other oxide additives, fused aluminum oxide-zirconium oxide co-fusions with or without other oxide additives, or sintered sol gel aluminum oxide materials with or without other oxide additives where the ceramic abrasive grains are preferably made by crushing bubbles of the material.
    Type: Application
    Filed: June 5, 2013
    Publication date: October 10, 2013
    Inventors: Robert Seider, Angelo R. Angelone
  • Publication number: 20130263523
    Abstract: The present invention relates to a fused ceramic particle having the following chemical composition, as weight percentages based on the oxides, and for a total of 100%: ZrO2+HfO2: balance to 100%; 5.0%<SiO2<32.0%; 2.0%<La2O3<15.0%; 2.5%<Y2O3<11.0%; 0.5%<Al2O3<8.0%; and less than 1.0% of other oxides. Use in particular as a grinding agent, an agent for dispersion in a wet medium, a supporting agent, a heat-exchange agent, or for the treatment of surfaces.
    Type: Application
    Filed: October 28, 2011
    Publication date: October 10, 2013
    Applicant: SAINT-GOBAIN CENTRE DE RECHERCHES ET D'ETUDES EUROPEEN
    Inventors: Samuel Marlin, Michela Valentini
  • Patent number: 8546260
    Abstract: A chemical-mechanical planarization pad for semiconductor manufacturing is provided. The pad comprises synthetic fibers that are non-crimped fibers which are present in an amount of 1.0% by weight to 98.0% by weight in the mat and wherein the non-crimped fibers have a length of 0.1 cm to 127 cm and a diameter of 1.0 to 1000 micrometers.
    Type: Grant
    Filed: September 3, 2009
    Date of Patent: October 1, 2013
    Assignee: Innopad, Inc.
    Inventors: Oscar K. Hsu, Paul Lefevre
  • Patent number: 8529651
    Abstract: Process for the production of an aqueous dispersion of pyrogenically produced metal oxide and metalloid oxide powders with a BET surface area of between 5 and 600 m2/g, with a metal oxide or metalloid oxide content in the dispersion of between 5 and 25 wt. %, comprising the following steps: water, which is optionally adjusted to pH values of between 2 and 4 by adding acids, is circulated from a receiving vessel via a rotor/stator machine, and metal oxide or metalloid oxide powder is introduced, using a feed device, into the shear zone between the slots in the rotor teeth and the stator slots, continuously or discontinuously and with the rotor/stator machine running, in a quantity such that a predispersion with a solids content of between 20 and 40 wt.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: September 10, 2013
    Assignee: Evonik Degussa GmbH
    Inventors: Wolfgang Lortz, Christoph Batz-Sohn, Gabriele Perlet, Werner Will, Gerrit Schneider
  • Patent number: 8529680
    Abstract: The invention provides a composition for chemical-mechanical polishing. The composition comprises an abrasive, a first metal rate polishing modifier agent, a second metal rate polishing modifier agent, and a liquid carrier. In one embodiment, the first metal rate polishing modifier agent has a standard reduction potential less than 0.34 V relative to a standard hydrogen electrode, and the second metal rate polishing modifier agent has a standard reduction potential greater than 0.34 V relative to a standard hydrogen electrode. In other embodiments, the first and second metal rate polishing modifier agents are different oxidizing agents.
    Type: Grant
    Filed: August 11, 2010
    Date of Patent: September 10, 2013
    Assignee: Cabot Microelectronics Corporation
    Inventors: Francesco De Rege Thesauro, Steven Grumbine, Phillip Carter, Shoutian Li, Jian Zhang, David Schroeder, Ming-Shih Tsai
  • Patent number: 8523968
    Abstract: A bonded abrasive article including a plurality of abrasive grains and an organic bond material, and a method for making said bonded abrasive article, are described herein. The abrasive article has a non-reinforced yield strength of at least about 28 MPa. An abrasive mix is also described herein, including abrasive grains, a bond material and an agglomeration inhibitor. The abrasive mix has a loose bond content that is less than approximately 9.9 %.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: September 3, 2013
    Assignees: Saint-Gobain Abrasives, Inc., Saint-Gobain Abrasifs
    Inventors: Konstantin S. Zuyev, Joel Alan Fife
  • Publication number: 20130219800
    Abstract: Methods are provided for forming an abrasive coating on a surface of a backing. An abrasive slurry includes a continuous phase, a first discontinuous phase of abrasive particles dispersed in the continuous liquid phase, and a second discontinuous phase of binder precursor particles dispersed in the continuous liquid phase, so that the continuous liquid phase carries the first and second discontinuous phases. A coated abrasive article is formed by coating the abrasive slurry onto the surface of the backing, and then removing the continuous phase.
    Type: Application
    Filed: April 15, 2013
    Publication date: August 29, 2013
    Inventor: Olivier L. Guiselin
  • Patent number: 8518135
    Abstract: The invention provides a polishing composition that contains (a) an abrasive comprising (i) first alpha alumina particles that have an average aspect ratio of 0.8:1 to 1.2:1, (ii) second alpha alumina that have an average aspect ratio of greater than 1.2:1, (iii) fumed alumina particles, and (iv) wet-process silica particles, and (b) water. The invention also provides a method of polishing a substrate, especially a nickel-phosphorous substrate, with the polishing composition.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: August 27, 2013
    Assignee: Cabot Microelectronics Corporation
    Inventors: Rujee Lorpitthaya, Selvaraj Palanisamy Chinnathambi, Haresh Siriwardane
  • Patent number: 8512593
    Abstract: Provided herein are chemical mechanical polishing (CMP) slurries and methods for producing the same. Embodiments of the invention include CMP slurries that include (a) a metal oxide; (b) a pH-adjusting agent; (c) a fluorinated surfactant; and (d) a quaternary ammonium surfactant. In some embodiments, the fluorinated surfactant is a non-ionic perfluoroalkyl sulfonyl compound. Also provided herein are methods of polishing a polycrystalline silicon surface, including providing a slurry composition according to an embodiment of the invention to a polycrystalline silicon surface and performing a CMP process to polish the polycrystalline silicon surface.
    Type: Grant
    Filed: November 22, 2006
    Date of Patent: August 20, 2013
    Assignee: Cheil Industries, Inc.
    Inventors: Jae Hoon Choung, In Kyung Lee
  • Publication number: 20130205682
    Abstract: A polishing composition contains colloidal silica. The colloidal silica satisfies the expression A×D×E×F?350,000 where “A” denotes the average aspect ratio (dimensionless) of the colloidal silica, “D” denotes the average particle diameter (units: nm) of the colloidal silica, “E” denotes the standard deviation of the particle size (units: nm) of the colloidal silica, and “F” denotes the volume fraction (units: %) of particles having a diameter of 1 to 300 nm in the colloidal silica. The volume fraction of particles having a diameter of 1 to 300 nm in the colloidal silica is 90% or greater.
    Type: Application
    Filed: August 25, 2011
    Publication date: August 15, 2013
    Inventors: Keiji Ashitaka, Hitoshi Morinaga, Muneaki Tahara
  • Patent number: 8506661
    Abstract: A slurry for use in a chemical mechanical planarization process for a wafer comprises a chemical portion and a mechanical portion. The chemical portion comprises a surfactant that forms a layer over a metallic layer of the wafer to decreasing dishing to less than an average of 843 ? reduce the static etch rate of the metallic layer. The mechanical portion comprises an abrasive agent to assist in the planarization of the metallic layer of the wafer. In another embodiment, a slurry for polishing a copper layer formed over a first layer is disclosed. The slurry comprises an abrasive agent; and a surfactant comprising at least one non-ionic surfactant to reduce the static etch rate of the copper layer. The shelf life of the slurry exceeds 90 days.
    Type: Grant
    Filed: October 24, 2008
    Date of Patent: August 13, 2013
    Assignee: Air Products & Chemicals, Inc.
    Inventors: Rebecca A. Sawayda, Bentley J. Palmer
  • Publication number: 20130199106
    Abstract: A polishing composition contains colloidal silica particles having protrusions on the surfaces thereof. The average of values respectively obtained by dividing the height of a protrusion on the surface of each particle belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles by the width of a base portion of the same protrusion is no less than 0.245. Preferably, the part of the colloidal silica particles that has larger particle diameter than the volume average particle diameter of the colloidal silica particles has an average aspect ratio of no less than 1.15. Preferably, the protrusions on the surfaces of particles belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles have an average height of no less than 3.5 nm.
    Type: Application
    Filed: October 6, 2011
    Publication date: August 8, 2013
    Inventors: Keiji Ashitaka, Hitoshi Morinaga, Akihito Yasui
  • Patent number: 8491682
    Abstract: Disclosed are abrasive particles, a method for manufacturing the abrasive particles, and a method for manufacturing a Chemical Mechanical Polishing (CMP) slurry. The method for manufacturing abrasive particles for the CMP slurry includes preparing a raw material precursor, drying the raw material precursor, and calcining the dried raw material precursor using a calcination furnace where a gas atmosphere having relatively less oxygen in comparison with an air atmosphere is created.
    Type: Grant
    Filed: December 27, 2008
    Date of Patent: July 23, 2013
    Assignee: K.C. Tech Co., Ltd.
    Inventors: Suk Min Hong, Myung Won Suh, Yong Kuk Kim, Joon Ha Hwang, Jeong Yun Kim, Dong Hyun Kim
  • Publication number: 20130183889
    Abstract: Provided is a process for producing a polishing liquid composition with which it is possible to give a polished work that has a reduced surface roughness and a reduced amount of particles. The process for producing a polishing liquid composition involves a step in which a raw silica dispersion containing colloidal silica having an average primary-particle diameter of 1-100 nm is filtered through a filter including a filter aid, the filter aid having an average pore diameter, as measured by the mercury intrusion method, of 0.1-3.5 ?m.
    Type: Application
    Filed: September 21, 2011
    Publication date: July 18, 2013
    Applicant: KAO CORPORATION
    Inventors: Yasuhiro Yoneda, Koji Taira, Kanji Sato, Yoshiaki Oshima
  • Publication number: 20130167448
    Abstract: A method of forming an abrasive article includes providing a green body having abrasive particles including microcrystalline alumina, and heating the green body via microwave radiation to form a bonded abrasive body including the abrasive particles and a bond material comprising a vitreous phase.
    Type: Application
    Filed: December 31, 2012
    Publication date: July 4, 2013
    Inventors: Nilanjan SARANGI, Sandhya Jayaraman RUKMANI
  • Publication number: 20130143043
    Abstract: Silica composite particles include silicon oxide and titanium in an amount of from 0.001% by weight to 10% by weight, wherein the silica composite particles have an average particle diameter of from 30 nm to 500 nm, a particle size distribution index of from 1.1 to 1.5, and an average degree of circularity of primary particles of from 0.5 to 0.85.
    Type: Application
    Filed: November 6, 2012
    Publication date: June 6, 2013
    Applicant: FUJI XEROX CO., LTD.
    Inventor: FUJI XEROX CO., LTD.
  • Publication number: 20130130595
    Abstract: The present invention relates to a polishing agent for polishing a surface to be polished of an object to be polished, the polishing agent including: first silicon oxide fine particles having an average primary particle size of 5 to 20 nm; second silicon oxide fine particles having an average primary particle size of 40 to 110 nm; and water, in which a ratio of the first silicon oxide fine particles to a total amount of the first silicon oxide fine particles and the second silicon oxide fine particles is from 0.7 to 30% by mass.
    Type: Application
    Filed: January 9, 2013
    Publication date: May 23, 2013
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventor: ASAHI GLASS COMPANY, LIMITED
  • Patent number: 8444728
    Abstract: A chemical mechanical polishing composition, comprising, as initial components: water; 0.1 to 20 wt % abrasive having an average particle size of 5 to 50 nm; and, 0.001 to 1 wt % of an adamantyl substance according to formula (II): wherein A is selected from N and P; wherein each R8 is independently selected from hydrogen, a saturated or unsaturated C1-15 alkyl group, C6-15 aryl group, C6-15 aralkyl group, C6-15 alkaryl group; and, wherein the anion in formula (II) can be any anion that balances the positive charge on the cation in formula (II).
    Type: Grant
    Filed: June 12, 2012
    Date of Patent: May 21, 2013
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Yi Guo, Zhendong Liu, Kancharla-Arun Kumar Reddy, Guangyun Zhang
  • Patent number: 8435896
    Abstract: A chemical mechanical polishing composition useful for chemical mechanical polishing a semiconductor wafer containing an interconnect metal is provided, comprising, as initial components: water; an azole inhibitor; an alkali metal organic surfactant; a hydrotrope; a phosphorus containing agent; a water soluble cellulose; optionally, a non-saccharide water soluble polymer; optionally, a water soluble acid compound of formula I, wherein R is selected from a hydrogen and a C1-5 alkyl group, and wherein x is 1 or 2; optionally, a complexing agent; optionally, an oxidizer; optionally, an organic solvent; and, optionally, an abrasive.
    Type: Grant
    Filed: March 3, 2011
    Date of Patent: May 7, 2013
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Hamed Lakrout, Jinjie Shi, Joseph Letizia, Xu Li, Thomas H. Kalantar, Francis Kelley, J. Keith Harris, Christopher J. Tucker
  • Patent number: 8435316
    Abstract: A method of forming an abrasive article includes forming a mixture comprising a liquid carrier and a glass precursor material, wherein the glass precursor material comprises a material selected from the group of materials consisting of a hydrated metal compound, an organic silicate compound, or a combination thereof. The method further includes providing abrasive grains within the mixture, forming the mixture into a green ceramic body, and heating the green ceramic body to form a bonded abrasive article comprising the abrasive grains contained within a bond matrix, wherein the bond matrix comprises an amorphous phase formed from the glass precursor material.
    Type: Grant
    Filed: December 15, 2009
    Date of Patent: May 7, 2013
    Assignees: Saint-Gobain Abrasives, Inc., Saint-Gobain Abrasifs
    Inventors: Jianhui Wu, Srinivasan Ramanath, Richard W. J. Hall, Gilles Querel
  • Publication number: 20130097942
    Abstract: A process for control melting a mixture of coal ash, electric arc furnace dust, recycled glass and additives to create a feedstock. The feedstock is quenched or air dried in a mold to create useful products, such as fracking compounds, abrasives, construction products, building materials, landscaping materials, and the like.
    Type: Application
    Filed: June 21, 2011
    Publication date: April 25, 2013
    Inventors: James Morano, John Buddemeyer
  • Patent number: 8425640
    Abstract: An abrasive article comprising an elongated body, a bonding layer overlying a surface of the elongated body, and abrasive grains contained within the bonding layer at an average abrasive grain concentration within a range between about 0.02 ct/m and about 0.30 ct/m.
    Type: Grant
    Filed: August 16, 2010
    Date of Patent: April 23, 2013
    Assignees: Saint-Gobain Abrasives, Inc., Saint-Gobain Abrasifs
    Inventors: Susanne Liebelt, Vincent Tesi, Theodor von Bennigsen-Mackiewicz
  • Patent number: 8409990
    Abstract: The present invention provides an aqueous CMP slurry composition that includes abrasive particles and from about 0.01% to the limit of solubility in water of a compound according to Formula (I): wherein only one of R1, R2, R3, R4 and R5 is a hydroxyl group (—OH), only one of R1, R2, R3, R4 and R5 is a methoxy group (—OCH3), and the three of R1, R2, R3, R4 and R5 that are not either a hydroxyl group (—OH) or a methoxy group (—OCH3) are hydrogen atoms (—H).
    Type: Grant
    Filed: August 25, 2009
    Date of Patent: April 2, 2013
    Assignee: Ferro Corporation
    Inventor: Bradley M. Kraft
  • Patent number: 8404009
    Abstract: A polishing composition for a hard disk substrate includes alumina particles, silica particles, and water. The volume median diameter of secondary particles of the alumina particles measured by a laser beam diffraction method is 0.1 to 0.8 ?m. The volume median diameter of primary particles of the silica particles measured by transmission electron microscope observation is 40 to 150 nm. The standard deviation in number-basis particle size of the primary particles of the silica particles measured by the transmission electron microscope observation is 11 to 35 nm. The polishing composition for a hard disk substrate can preferably reduce the embedding of alumina abrasive grains into the substrate without impairing the productivity.
    Type: Grant
    Filed: October 28, 2008
    Date of Patent: March 26, 2013
    Assignee: Kao Corporation
    Inventors: Masahiko Suzuki, Kenichi Suenaga, Makoto Suzuki
  • Publication number: 20130067998
    Abstract: A method of forming a colloidal dispersion includes providing a first continuous material flow, providing a second continuous material flow, combining the first and second continuous material flows, and moving a continuous flow of a colloidal dispersion in a direction downstream of the first and second continuous flows. The first continuous material flow includes one or more of a diluent (e.g., deionized water), a base, and an acid, and the second continuous material flow includes an abrasive particle solution. The first and second material flows are combined with a Reynolds number greater than about 4400 and less than about 25000 (e.g., about 7400 to about 25000). The colloidal dispersion includes the diluent, the base, the acid, and abrasive particles from the abrasive particle solution.
    Type: Application
    Filed: September 14, 2012
    Publication date: March 21, 2013
    Applicant: Planar Solutions, LLC
    Inventors: Saeed H. Mohseni, Elizabeth K. Gramm, Deepak Mahulikar
  • Publication number: 20130055646
    Abstract: To provide a method for producing an alkali silicate aqueous solution containing a reduced amount of foreign substance of plate-like fine particles and a method for producing a silica sol containing a reduced amount of foreign substance of plate-like fine particles. A method for producing an alkali silicate aqueous solution fulfilling the following condition: the existing amount of plate-like fine particles having a length of one side of 0.2 to 4.0 ?m and a thickness of 1 to 100 nm is determined to be 0 to 30%. The method for producing an alkali silicate aqueous solution includes the steps of adjusting a silica concentration of an alkali silicate aqueous solution to 0.5 to 10.0% by mass and filtering the alkali silicate aqueous solution through a filter having a removal rate of particles with a primary particle size of 1.0 ?m of 50% or more.
    Type: Application
    Filed: September 5, 2012
    Publication date: March 7, 2013
    Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
    Inventors: Kiyomi EMA, Noriyuki TAKAKUMA, Tohru NISHIMURA, Naoki KAWASHITA, Kouji YAMAGUCHI
  • Patent number: 8382868
    Abstract: A method of making polycrystalline CBN compacts, high in CBN content, is provided. The method includes making a powdered composition by subjecting a mixture of CBN, present in an amount of at least 80 volume percent of the mixture, and a powdered binder phase to attrition milling. This powdered mixture is subjected to conditions of elevated temperature and pressure suitable to produce CBN compacts.
    Type: Grant
    Filed: October 27, 2006
    Date of Patent: February 26, 2013
    Inventors: Iain Patrick Goudemond, Nedret Can, Stig Ake Andersin
  • Patent number: 8377158
    Abstract: Provided is an abrasive article comprising (a) a metallic foil having a first and second surfaces and voids therebetween, (b) a plurality of abrasive particles substantially in the voids, and (c) an alloy at least partially between the abrasive particles and the foil in the voids, wherein the alloy comprises a second component and a portion of the metallic foil near the voids. Also provided are methods of making and using such abrasive articles.
    Type: Grant
    Filed: August 13, 2007
    Date of Patent: February 19, 2013
    Assignee: 3M Innovative Properties Company
    Inventors: Gary M. Palmgren, Jay B. Preston, Brian D. Goers
  • Publication number: 20130029563
    Abstract: A system including at least one means for mechanical processing of surfaces, in particular steel or cast iron beads using a blasting agent (5). An additive (6) for degreasing and cleaning of the surface to be blasted (2) and/or of the blasting agent is provided with the blasting agent (5), and comprising a granular material (6), which exhibits a lower breaking strength under the mechanical stresses that the blasting agent (5) is subject to during the blasting procedure than the at least one means for mechanical processing of the surfaces themselves. As the granular material (6) breaks down, additional additive (6) is added into the blasting agent (5) such that the proportion of the additive (6) in the blasting agent mixture blend (5) remains largely generally constant even at a prolonged operation of the device.
    Type: Application
    Filed: April 15, 2010
    Publication date: January 31, 2013
    Applicant: Kompoferm GmbH
    Inventor: Jörg Halstenberg
  • Patent number: 8361176
    Abstract: A surface-modified abrasive grain includes an abrasive grain as a substrate, and a film on the abrasive grain that includes a relatively hydrophilic silane component and a relatively hydrophobic silane component. The film can be a single film layer or multiple film layers, wherein a film layer most proximal to the abrasive grain has a predominately hydrophilic silane component, and a film layer more distal to the abrasive grain includes predominately a relatively hydrophobic silane component. Coated abrasive products and bonded abrasive products include the surface-modified abrasive grains.
    Type: Grant
    Filed: September 19, 2011
    Date of Patent: January 29, 2013
    Assignees: Saint-Gobain Abrasives, Inc., Saint-Gobain Abrasifs
    Inventors: Anuj Seth, Ying Cai
  • Patent number: 8357446
    Abstract: The invention provides a plurality of polymeric particles embedded with silicate that include gas-filled polymeric microelements. The gas-filled polymeric microelements have a shell and a density of 5 g/liter to 200 g/liter. The shell having an outer surface and a diameter of 5 ?m to 200 ?m with silicate particles embedded in the polymer. The silicate particles have an average particle size of 0.01 to 3 ?m. The silicate-containing regions are spaced to coat less than 50 percent of the outer surface of the polymeric microelements; and less than 0.1 weight percent total of the polymeric microelements is associated with i) silicate particles having a particle size of greater than 5 ?m; ii) silicate-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric micro elements agglomerated with silicate particles to an average cluster size of greater than 120 ?m.
    Type: Grant
    Filed: November 12, 2010
    Date of Patent: January 22, 2013
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Andrew R. Wank, Donna M. Alden, Mark E. Gazze, Robert Gargione, Joseph K. So, David Drop, Mai Tieu Banh, Shawn Riley
  • Publication number: 20130008422
    Abstract: An outer blade cutting wheel comprising an annular thin disc base of cemented carbide and a blade section of metal or alloy-bonded abrasive grains on the outer periphery of the base is provided. The abrasive grains are diamond and/or cBN grains having an average grain size of 45-310 ?m and a TI of at least 150. The blade section includes overlays having a thickness tolerance (T3max?T3min) of 0.001 mm to 0.1×T2 mm. The blade section has a roundness (ODmax/2?ODmin/2) of 0.001 mm to 0.01×ODmax mm.
    Type: Application
    Filed: July 3, 2012
    Publication date: January 10, 2013
    Applicant: SHIN-ETSU CHEMICAL CO., LTD
    Inventors: Masaki Kasashima, Takehisa Minowa, Harukazu Maegawa, Yoshifumi Nagasaki