Abstract: A method for evaluating a wafer configuration includes: obtaining plural wafer configuration profiles from a central wafer portion to an edge portion along the entire periphery at a prescribed angular space; providing a first region for calculating a reference line for each profile in the central side of the wafer; calculating the reference line in the first region; providing a second region in the peripheral side of the wafer outside the first region; extrapolating the reference line calculated in the first region to the second region; analyzing a value obtained by subtracting the reference line value in the second region from an actually measured value in the second region; calculating the maximum value among the values as a surface characteristic and the minimum value among the values as a surface characteristic; and, evaluating configuration uniformity in the peripheral portion of the wafer from plural surface characteristics and surface characteristics.

Abstract: A method of generating a part program for use in an image-measuring system and in an image-measuring instrument is provided. The method can be employed easily by an operator without complicated operations to efficiently generate a part program for a CNC image-measuring instrument. This method facilitates the operator to visually identify a work to be measured, through reading CAD data of the work; setting measurement conditions and a positioning coordinate system; calculating a size of the work when it is practically imaged; and displaying an image of the CAD data with the same size. Then, through setting tolerance information; and selecting an objective graphic to be measured, an edge detection tool is placed for a graphic element of the objective graphic selected.

Abstract: An apparatus, method, and system for determining the shape of a three dimensional object. In a preferred embodiment, the apparatus includes an array of sensors and elastic connections between the sensors within the array. When placed over a three dimensional object, the array of sensors deforms to conform to the surface topology of the three dimensional object. The sensors are connected to a data processor in which the data from the sensors is taken to construct a three-dimensional representation of the actual physical three dimensional object.

Abstract: The present invention relates to a method for calibrating a non-contact probe on a localizer. The present invention further relates to a method for the simultaneous calibration and qualification of a non-contact probe on a localizer. Both methods do not require user intervention, and use a single artifact.

Abstract: An adjustable lens is disclosed for use in an optical profilometer system. The adjustable lens includes a plurality of elements that are mutually spaced from another in a first position and provides a first focal point for an incident electromagnetic field having a first frequency incident at a first angle with respect to the plurality of elements. The adjustable lens also includes an actuation unit for changing the focal point of the plurality of elements to provide a second focal point for the incident electromagnetic field having the first frequency incident at the first angle with respect to the plurality of elements.

Abstract: Smooth contouring of geophysical data is generated by USGS smooth contouring and plotting system of geophysical data having less artifacts, based on Surfer compatible minimum curvature program. A system and a method are provided, which converts the gridded file generated by USGS package to an ASCII file and the headers of files are removed. Blanks in the gridded USGS files are substituted by value compatible to SURFER software and the headers of SURFER are incorporated. With these changes the contour plots are smooth and can be run from any available personal computer.

Abstract: A motion capture system includes a motion capture detecting device with sensor coils that are sequentially selected by a control section. Signals are communicated between respective input coils of input elements of an input device and the sensor coils by electromagnetic coupling. The signals received by each of the selected coils are detected by a detecting section. Three-dimensional coordinates and directions of each of the input elements are calculated by a control section so that the input elements become continuous, based on the detected signals by the detecting section.

Abstract: A system is provided for the collection of measurements for use by a surface profiling processing scheme. A movable platform is equipped to: (i) generate a measurement of inclination of a surface when the platform is and stationary thereon, (ii) generate measurements of surface curvature as the platform traverses the surface, (iii) monitor distance that the platform traverses during a measurement run, (iv) generate a signal each time the platform traverses a predetermined amount of distance during a measurement run where the signal is such that the user is alerted to stop the platform, (v) collect measurements of curvature while the platform traverses the surface, and (vi) collect measurements of inclination at the starting position, stopping position, and each time the platform is stopped during the measurement run.

Abstract: A system and method for measuring a three-dimensional object uses a number of elongate measuring members that can be displaced with respect to a base in response to a surface of the object. The displaced distances of the elongate measuring members due to the surface of the object are then determined. The displaced distances are measurements of the object surface.

Abstract: The object of the invention is to provide a method, a program and a device that can set accurately and easily the origin of the coordinate system of a workpiece based on the result obtained by a surface texture measuring machine scanning over a feature area on the surface of the workpiece. The device comprises a data inputter for inputting data obtained by scanning a feature area including at least a feature point area and a non-feature point area of the surface of a workpiece, a feature point selector for extracting the feature points of the data by statistically processing the data inputted into the data inputter and an origin setter for setting the origin of a workpiece coordinate system relative to an origin setting target point of the workpiece based on the coordinate values of the feature point obtained by the feature point selector.

Abstract: A lapping plate topography system includes a measuring apparatus for measuring the surface of a lapping plate, and an analysis apparatus for analyzing and presenting the data resulting from such measurements. The measurement apparatus has a non-contacting capacitive probe for measuring a height of the surface of the lapping plate, a rotary arm assembly for moving the probe in an arc over the surface of the lapping plate, and a spindle assembly for rotating the lapping plate about its center. The computer-based analysis apparatus is operable to input from the measurement apparatus the measured height at a plurality of data points on the surface of the lapping plate, calculate Fourier transform harmonic coefficients based on the plurality of measured heights, calculate surface ripple coefficients based on the calculated Fourier transform harmonic coefficients, and output the calculated surface ripple coefficients to an appropriate display device.

Abstract: A three-dimensional modeling system. The modeling system includes an antenna and a stylus. The stylus has at least one tag that communicates with the antenna to provide position signals of the tag, allowing the stylus to trace the surface of an object into a processor. The system may include more than one antenna, each producing an electromagnetic field within which the object to be modeled is positioned. The stylus may have two tags, which will allow derivation of orientation information from the position signals. The stylus may have a pressure-sensitive tip allowing the communication between the tag and the antenna to be controlled only when the stylus is in contact with the object to be modeled. The system may also have at least one tag attached to the object to provide more accurate information as to the position and orientation of the object relative to the points traced by the stylus. The stylus may also be used to trace an outline or other two-dimensional shape.

Abstract: A method for determining the position of a sensor element which is used to measure a magnetic alternating field emitted by at least one generator unit. The sensor element receives a signal. Interference fields, which are the fields arising due to eddy currents generated in electrically conductive objects, are calculated. The eddy currents are calculated based on the alternating field. The position can be corrected based on the signal received in the sensor element.

Abstract: A system and method for scanning for an object within a region using a conformal scanning scheme. The system may comprise a computer which includes a CPU and a memory medium which is operable to store one or more programs executable by the CPU to perform the method. The method may: 1) determine the characteristic geometry of the region; 2) generate a conformal scanning curve based on the characteristic geometry of the region by performing a conformal mapping between the characteristic geometry and a first scanning curve to generate the conformal scanning curve, i.e., mapping points of the first scanning curve to the characteristic geometry of the region; and 3) scan the region using the conformal scanning curve. These measurements of the region produce data indicative of one or more characteristics of the object. The method may also generate output indicating the one or more characteristics of the object.

Abstract: A method of characterizing a sample surface having a surface anomaly region includes the steps of profiling the sample surface to generate surface characteristic data, and generating a histogram based on the profiling step. Then, the method measures a surface anomaly in the surface anomaly region based on the generating step. The method further includes the step of selecting a zone of interest from the surface characterization data. The zone of interest preferably includes the surface anomaly region, wherein the surface anomaly region includes one of erosion and dishing. Preferably, the histogram includes a first peak corresponding to a generally planar portion of the sample surface, and a second peak corresponding to the surface anomaly. Moreover, the measuring step includes determining a distance between the first and second peaks, the distance being indicative of the depth of the surface anomaly.

Abstract: The present invention provides a method for evaluating a configuration of a wafer from a different viewpoint from the conventional SFQR or the like, a wafer with less troubles in an exposure system or the like, and a sorting method for a good quality wafer.

Abstract: A method of designing a product for use on a body used to develop a preferred product configuration using a computer-based virtual product development and testing system. A virtual wearer sub-model is created of the body and a virtual product sub-model is created of a product for use on the body. An environment sub-model is generated so that environmental factors affecting the product or the body are also used in designing or evaluating the product. Instructions defining how the wearer sub-model, the product sub-model and the environment sub-model interact are introduced in an interaction model. The sub-models and the interaction defined by the interaction model are then combined to create a virtual use model simulating the use of the virtual product sub-model by the virtual wearer sub-model. The use model determines the forces, deformations and stresses caused by movement and interaction between the virtual wearer sub-model and the virtual product sub-model using numerical method analysis.

Abstract: A method of extracting the shape of a probe tip of a probe-based instrument from data obtained by the instrument is provided. The method generates an image using the data wherein the data is indicative of a characteristic of a surface of a sample. The method then calculates a slope of the image at a particular region and determines, using the slope, a probe contact point between the tip and the sample at that region. In addition, the method further includes the steps of translating the image point based on the probe contact point and repeating the above steps for at least two points in the image data so as to generate a corrected image plot.

Abstract: This invention provides an inspection method and device which can efficiently measure the surface uniformity of a semiconductor device which is chemically and mechanically polished based on measured data at several points on the surface of the chip.

Abstract: The invention provides a method of manufacturing and analyzing a building made from Expanded PolyStyrene (EPS) which is coated on the inside and outside with Glass Fiber Reinforced Concrete (GFRC). The building is designed in a CAD program. Then, the building is divided up into small volumes in the CAD program or in a Finite Element Analysis program. Plates are added to the inner and outer surfaces of the volumes. Appropriate characteristics of the EPS and GFRC are assigned to the volumes and plates. A FEA analysis can then be run.

Abstract: An apparatus and method of measuring an article is provided. The method includes providing an article having a feature to be measured, the article having a surface; measuring the surface of the article with a measuring instrument to obtain article surface data; and analyzing the article surface feature data such that data on the feature to be measured is developed. Measuring the surface of the article can include scanning the measuring instrument over the article surface. Analyzing the article surface feature data can include associating portions of the article surface data with individual features thereby producing associated feature surface data; and analyzing the associated feature surface data. The measuring instrument can be, for example, a contact measuring instrument or an interference measuring instrument. A computer storage medium having instructions stored therein for causing a computer to perform the method described above is also provided.

Abstract: The number and weight of wires interconnecting a host and/or controller with a precision measurement assembly is reduced using a common or shared bus. The bus may be entirely electrical or may include optical fibers to reduce EMI susceptibillty. A custom bus or a known serial network bus such as CAN or SIRCOS may be used.

Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, critical dimension and a presence of defects. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.

Abstract: Methods for operating a laser scanning system are disclosed. The laser scanning system can be used in construction projects to generate a field survey. An architect or engineer can use the field survey to create construction drawings. In addition, relevant points from the construction drawings can be identified at the construction site with the scanning system. Further, earth moving equipment can be controlled using the same information. The laser scanning system can also be used to determine if two parts can be mated together by scanning and comparing the parts that are to be mated. The laser scanning system can further be used to determine if an object can be moved through an opening in a structure by comparing scan points of the structure with scan points from the object. The laser scanning system can additionally be used to identifying objects within the site, to build databases that have relevant information about the objects, and to guide reproducing machines.

Abstract: A method and an device for estimating the configuration of an optical element for an optical writing device are disclosed. The optical characteristics of the optical element are estimated on the basis of configuration data derived from actual measurement. The estimated optical characteristics are used to estimate the performance of the optical element. The optical element has a sufficiently small curve on the image surface of the writing device ascribable to the shift of focal point.

Abstract: The object of the invention is to provide a method, a program and a device that can set accurately and easily the origin of the coordinate system of a workpiece based on the result obtained by a surface texture measuring machine scanning over a feature area on the surface of the workpiece. The device comprises a data inputter for inputting data obtained by scanning a feature area including at least a feature point area and a non-feature point area of the surface of a workpiece, a feature point selector for extracting the feature points of the data by statistically processing the data inputted into the data inputter and an origin setter for setting the origin of a workpiece coordinate system relative to an origin setting target point of the workpiece based on the coordinate values of the feature point obtained by the feature point selector.

Abstract: A method and apparatus for determining a profile of a pavement. The method and apparatus includes determining a slope of a mobile machine as the mobile machine traverses the pavement, and determining a change in elevation of the pavement as a function of the slope and a distance from a first ground engaging member on the mobile machine to a second ground engaging member on the mobile machine, the change in elevation being indicative of a profile of the pavement.

Abstract: A system and method for analyzing and processing data on an object. The system includes: an automatic scanning and measuring subsystem (100) for obtaining point cloud data on the object by scanning the object, and generating measurement data on the object by processing the point cloud data; a graphic file receiving apparatus (150) for receiving a graphic file of the object; a dimension capturing subsystem (160) for retrieving design dimensions from the graphic file; a report generating subsystem (170) for generating a dimension report by combining the measurement data and the design dimensions; and a measurement data outputting subsystem (180) for outputting the measurement data to the graphic file.

Abstract: The disclosed invention is an improvement on the traditional Measuring Wheel. When the odometry information is combined with two direction sensors and an on-board computer, the instrument is able to perform useful measurements to allow the calculation of an area or the description of a non-linear contour, as well as the traditional distance measurements.

Abstract: An arrangement for the production of made to order clothing (18), comprising a controller (14) operatively connected (12) to an input means (10), said input means (10) being adapted to provide to said controller (14) input variables A, W, H, C personal to a particular customer and said controller (14) being adapted to process said input variables A, W, H, C to predict a set of at least estimated body measurements, each of which body measurements is derived from one or more of said input variables A, W, H, C and is used to derive clothing pattern data, one said input variable being representative of the age A of said customer.

Abstract: The present invention is directed to a method for custom fitting an article to a human being having the steps of defining a first set of human body dimensions to be reported by the human being, defining a second set of human body dimensions to be inferred from said first set of human body dimensions, providing a first mathematical model relating said second set of human body dimensions to said first set of human body dimensions, wherein said mathematical model has been generated by statistical analysis of a human anthropometric database, obtaining a first set of values of said first set of body dimensions by report of the human being, computing a second set of values of said second set of human body dimensions from said first set of values of said first set of human body dimensions by using said first mathematical model, defining a set of article dimensions, providing a second mathematical model relating said article dimensions to said first set of human body dimensions and said second set of human body dimen

Abstract: The invention relates to a method for detecting measurement data on coordinate measuring and digitalizing machines. When the measuring times of the coordinate measuring machine and the sensor are determined by an electric signal (trigger), the equality thereof can be guaranteed and the influence of signal propagation delays can be excluded. The nth sensor information always corresponds to the nth machine information. Allocation is made easier when each value detected at a measuring time obtains an identifier. In one embodiment, surface points of a free forming surface can be detected during movement of the sensor on the coordinate measuring machine and by means of a measuring sensor. The measuring times are determined by an electric signal that is produced by the sensor and is transmitted to the coordinate measuring machine. The signal triggers distance measuring of the sensor as well as the output of the current machine position.

Abstract: The present invention relates to the smooth contouring of geophysical data generated by USGS smooth contouring and plotting system of geophysical data having less artifacts, based on Surfer compatible minimum curvature program.

Abstract: An integrated system is described in which digital image data of a patient, obtained from a variety of image sources, including CT scanner, X-Ray, 2D or 3D scanners and color photographs, are combined into a common coordinate system to create a virtual three-dimensional patient model. Software tools are provided for manipulating the virtual patient model to simulation changes in position or orientation of craniofacial structures (e.g., jaw or teeth) and simulate their affect on the appearance of the patient. The simulation (which may be pure simulations or may be so-called “morphing” type simulations) enables a comprehensive approach to planning treatment for the patient. In one embodiment, the treatment may encompass orthodontic treatment. Similarly, surgical treatment plans can be created. Data is extracted from the virtual patient model or simulations thereof for purposes of manufacture of customized therapeutic devices for any component of the craniofacial structures, e.g.

Abstract: For indirect determination of point positions and/or of surface orientations in point positions a laser tracker (1) adapted for relative and absolute distance measurement is used. A measuring device is utilised, the device including a target point (retro-reflector 3) for the laser beam of the tracker, the target point being movable along a trajectory path (A). The position and orientation of the trajectory path (A) of the target point is precisely defined relative to a reference point (R) of the device (2) and the device (2) is positionable in the region of a point position (P) to be determined such that the position of the reference point (R) relative to the point position (P) to be determined is precisely defined. For determining the point position (P), the device (2) is positioned in the region of the point position (P) to be determined, the target point is positioned in a starting position (3.1) and is detected by the tracker (1) by direction determination and absolute distance measurement.

Abstract: The surface shape measuring apparatus comprises a polar coordinate conversion portion for converting the orthogonal coordinate data representing the surface shape of a measurement object into the polar coordinate data, an approximate expression calculating portion for calculating an approximate expression on the basis of the polar coordinate data employing the Zernike's polynomial, an angle calculating portion for calculating angles representing the generating line and principal directions, a first approximate sectional shape calculating portion for calculating approximate sectional shapes in the generating line and principal line directions based on the calculated angles, a second approximate sectional shape calculating portion for calculating the center coordinates and the radiuses of curvature for the approximate sectional shapes, and a sectional shape data calculating portion for calculating the numerical data of approximate sectional shapes in the generating line and principal line directions on the

Abstract: A system and method for analyzing and processing data on an object. The system includes: an automatic scanning and measuring subsystem (100) for obtaining point cloud data on the object by scanning the object, and generating measurement data on the object by processing the point cloud data; a graphic file receiving apparatus (150) for receiving a graphic file of the object; a dimension capturing subsystem (160) for retrieving design dimensions from the graphic file; a report generating subsystem (170) for generating a dimension report by combining the measurement data and the design dimensions; and a measurement data outputting subsystem (180) for outputting the measurement data to the graphic file.

Abstract: An apparatus, method, and system for determining the shape of a three dimensional object. In a preferred embodiment, the apparatus includes an array of sensors and elastic connections between the sensors within the array. When placed over a three dimensional object, the array of sensors deforms to conform to the surface topology of the three dimensional object. The sensors are connected to a data processor in which the data from the sensors is taken to construct a three-dimensional representation of the actual physical three dimensional object.

Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, critical dimension and a thin film characteristic. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.

Abstract: The present invention provides a system and method for performing three-dimensional surface measurements of a path length along a surface. The method for determining the path length along the surface of a three-dimensional object includes the step of first selecting a first and second point on the three-dimensional surface. A plane is then defined which contains both the first and second points. A determination is then made to find the shortest path curve between the first point and second point which is defined by the intersection of the three-dimensional object with the plane. This path length is recorded for future comparison. A series of subsequent planes is defined that contains the first and second point, wherein these planes are rotated at an angle to each other. A determination is then made for the shortest path length associated with each subsequent plane. The overall shortest path length is the minimum of these recorded path lengths.

Abstract: The invention concerns a method for identifying a person among a population by sensing the fingerprints of at least one finger of his hand and comparing said fingerprints with fingerprint data of all the persons of the population previously stored in a file (1); it consists in sensing in the first place the shape of at least one hand of all the persons and in storing hand shape data in the file (1) in correlation with respective fingerprint data; then during the process identifying a person, in detecting (in 3) the shape of his hand and (in 2) the fingerprints of at least one finger; comparing (5) the data concerning the shape of his hand with the data concerning the hand shapes stored in the file (1) for the whole population; selecting (6) in the file a group consisting of hand shapes substantially identical with the sensed shape of the hand of the person to be identified; and comparing (8) the sensed fingerprints of the person to be identified with the data stored in the file in correlation with respectivel

Abstract: A system and method for analyzing a surface. The system includes a computer including a CPU and a memory medium operable to store programs executable by the CPU to perform the method. The method may include: 1) receiving data describing an n-dimensional surface defined in a bounded n-dimensional space, where the surface is embedded in an m-dimensional real space via embedding function x( ), and where m>n; 2) determining a diffeomorphism f of the n-dimensional space; 3) computing the inverse transform f−1 of the diffeomorphism f; 4) selecting points, e.g., a Low Discrepancy Sequence, in the n-dimensional space; 5) mapping the points onto the surface using x(f−1), thereby generating mapped points on the surface; 6) sampling the surface using at least a subset of the mapped points to generate samples of the surface; and 7) analyzing the samples of the surface to determine characteristics of the surface.

Abstract: (A) The surface shape of an object (1) is measured by varying the position and/or direction of measurement, and a plurality of sets of partially measured data (2) including the common parts (2a) are acquired, (B) for all the partially measured data (2), the overlapped ranges (3a) of the adjacent common parts (2a) are determined within the measurement error ranges (3), (C) when there are no superposition ranges (3a), it is decided that a combination is not possible, and (D) when there are overlapped ranges (3a), the common parts of each set of partially measured data are combined within the ranges. Thus, combined data can be created at a high accuracy from a plurality of sets of partially measured data based on a small number of repeated calculations.

Abstract: A method and an device for estimating the configuration of an optical element for an optical writing device are disclosed. The optical characteristics of the optical element are estimated on the basis of configuration data derived from actual measurement. The estimated optical characteristics are used to estimate the performance of the optical element. The optical element has a sufficiently small curve on the image surface of the writing device ascribable to the shift of focal point.

Abstract: A method and apparatus for determining a profile of a pavement. The method and apparatus includes determining a slope of a mobile machine as the mobile machine traverses the pavement, and determining a change in elevation of the pavement as a function of the slope and a distance from a first ground engaging member on the mobile machine to a second ground engaging member on the mobile machine, the change in elevation being indicative of a profile of the pavement.

Abstract: In a size inspection method and a size inspection apparatus, even when a measurement object has a contour having sizes not to be easily measured and having a contour not to be easily determined, the contour and the sizes can be determined. A contour of the inspection or measurement object is detected, and positions detected are registered to constitute a group of registered positions. At measurement or inspection, a comparison is conducted with the group of registered positions in a measurement direction to extract correlation data within a measurement range. A position having highest correlation with the group of registered positions is set as a position on one side of a size measurement location. Resultantly, sizes are measured and a contour is inspected.

Abstract: Annular grooves are formed on both end surfaces of a recording drum to be rotated, and two balance weights are disposed inside each of the annular grooves. The balance weight is composed of a magnet, and is attracted to the end surface of the recording drum by its magnetic force. The two balance weights are arranged at a predetermined attaching angle such that an unbalance force caused by centrifugal forces developed by a plate, a movable clamp, and so forth is canceled. Every time the size and the mass of the plate are changed, the positions of the two balance weights are adjusted, so that forced vibration in the recording drum is restrained.

Abstract: Disclosed is a method for measuring a door sealing gap of a vehicle in which a coordinate system is generated using reflectors and laser beams, and wherein 3D CAD data is trace-rotated using the coordinate system to measure a sealing gap for weather-stripping between a door panel and a side-out panel, in order to optimally facilitate weather-stripping design and placement to properly seal a door to a vehicle body when it is closed.

Abstract: A method for enabling a customer to virtually try on a selected garment is disclosed. First, a mathematical model of the customer's body and a garment model for the selected garment are retrieved. The garment model includes a plurality of fit factors. Next, a size of the garment that will best fit the customer is determined by comparing the fit factors of the garment model to the mathematical model of the customer's body.

Abstract: A method for estimating the configuration of an optical element for an optical writing device is disclosed. The optical characteristics of the optical element are estimated on the basis of configuration data derived from actual measurement. The estimated optical characteristics are used to estimate the performance of the optical element. The optical element has a sufficiently small curve on the image surface of the writing device ascribable to the shift of focal point.