Radiant Energy (e.g., X-ray, Infrared, Laser) Patents (Class 702/40)
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Patent number: 12181430Abstract: A system and a computer-implemented method, for detecting concrete using infrared thermography, allow to detect concrete in a region containing zones in which concrete exists and zones in which concrete does not exist. The system for detecting the concrete includes an infrared camera for obtaining a plurality of infrared thermography images in a time range from a region containing fresh concrete, an ambient temperature sensor for obtaining ambient temperature measurements, and a processor connected to the camera and to the ambient temperature sensor.Type: GrantFiled: August 8, 2019Date of Patent: December 31, 2024Assignee: SOLUCIONES DE INNOVACIÓN DIGITAL SPAInventor: Emiliano Andrés Pinto Gómez
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Patent number: 12085515Abstract: Methods and systems for selecting measurement locations on a wafer for subsequent detailed measurements employed to characterize the entire wafer are described herein. High throughput measurements are performed at a relatively large number of measurement sites on a wafer. The measurement signals are transformed to a new mathematical basis and reduced to a significantly smaller dimension in the new basis. A set of representative measurement sites is selected based on analyzing variation of the high throughput measurement signals. In some embodiments, the spectra are subdivided into a set of different groups. The spectra are grouped together to minimize variance within each group. Furthermore, a die location is selected that is representative of the variance exhibited by the die in each group. A spectrum of a measurement site and corresponding wafer location is selected to correspond most closely to the center point of each cluster.Type: GrantFiled: October 20, 2021Date of Patent: September 10, 2024Assignee: KLA CorporationInventors: Brian C. Lin, Jiqiang Li, Song Wu, Tianrong Zhan, Andrew Lagodzinski
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Patent number: 11668564Abstract: A laser leveling tool comprising: a laser source configured to emit a laser beam; and a digital laser beam projection system which transmits the laser beam emitted from the laser source and converts the laser beam into a projection pattern that is to be projected to a target surface; wherein the digital laser beam projection system comprises a pixel panel arranged to receive the laser beam emitted from the laser source and comprising pixel units which are selectively activated to reflect or transmit the laser beam, the reflected or transmitted laser beam conforming to a desired projection pattern to form a patterned laser beam.Type: GrantFiled: September 12, 2018Date of Patent: June 6, 2023Assignee: Robert Bosch GmbHInventors: Chi Fung Chan, Hopong Cheung, Yuenyu Wong, Ben-Hur Seneca
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Patent number: 11610296Abstract: A projection is determined in a semiconductor image, which can be an X projection and/or a Y projection. At least one threshold is applied to the projection thereby forming at least one segment within the region. A fine segment can be determined in the region using a distance value from the projection. Defect detection can be performed in one of the fine segments.Type: GrantFiled: December 16, 2020Date of Patent: March 21, 2023Assignee: KLA CORPORATIONInventors: Xuguang Jiang, Juhwan Rha
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Patent number: 11567190Abstract: A polarimetric radar system for object classification and road condition estimation includes a radar transmitter unit for transmitting radar waves of different polarizations, a radar receiving unit for receiving radar waves of different polarizations, a radar signal generating unit for generating and providing the radar waves to be transmitted, a signal processing circuitry for processing the generated and received radar waves, and a signal evaluation unit. The signal evaluation unit receives processed signals from the signal processing circuitry, estimates values for a set of predetermined object parameters on the basis of the received processed signals, and selects an object class from a plurality of predetermined object classes upon detecting a match of the estimated values with one out of a plurality of predetermined sets of object parameters. The signal evaluation unit is configured to provide information that is indicative of the at least one classified object.Type: GrantFiled: December 22, 2017Date of Patent: January 31, 2023Assignee: IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A.Inventors: Kais Ben Khadhra, Oscar Gomez, Jochen Landwehr
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Patent number: 11468552Abstract: The degree of concrete surface roughness contributes to the bond strength between two concrete surfaces for either new construction or repair and retrofitting of concrete structures. Provided are novel systems and methods with industrial application to quantify concrete surface roughness from images which may be obtained from basic cameras or smartphones. A digital image processing system and method with a new index for concrete surface roughness based on the aggregate area-to-total surface area is provided. A machine learning method applying a combination of advanced techniques, including data augmentation and transfer learning, is utilized to categorize images based on the classification given during the learning process. Both methods compared favorably to a well-established method of 3D laser scanning.Type: GrantFiled: July 12, 2021Date of Patent: October 11, 2022Assignee: THE FLORIDA INTERNATIONAL UNIVERSITY BOARD OF TRUSTEESInventors: Alireza Valikhani, Azadeh Jaberi Jahromi, Samira Pouyanfar, Islam Mohamed Mantawy, Atorod Azizinamini
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Patent number: 11250522Abstract: An aircraft component is manufactured from a plurality of separate materials comprising a first material. The first material is physically associated with a tracking device comprising a first storage medium featuring line-of-sight accessible information and a second storage medium featuring non-line-of-sight accessible information. The line-of-sight accessible information and the non-line-of-sight accessible information each comprise information regarding the first material physically associated with the tracking device.Type: GrantFiled: December 3, 2019Date of Patent: February 15, 2022Assignee: Textron Innovations Inc.Inventors: James Corrigan, Pier-Alexandre Pelletier
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Patent number: 11035969Abstract: A seabed object detection system is provided. The system can include a receiver array. The receiver array can include a plurality of receivers disposed on a plurality of streamers. The plurality of streamers can include a central port side streamer, a central starboard side streamer, an auxiliary port side streamer and an auxiliary starboard side streamer. The system can include a source array. The source array can include a plurality of sources. The plurality of sources can include a central port side source, a central starboard side source, an auxiliary port side source, and an auxiliary port side streamer.Type: GrantFiled: June 19, 2019Date of Patent: June 15, 2021Assignee: Magseis FF LLCInventor: Graham Gillott
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Patent number: 11022568Abstract: A method of determining the displacement of a component within a device during operation of the device, the method comprising the steps of: obtaining a first x-ray image of the device while the device is in a first operation state; obtaining a second x-ray image of the device while the device is in a second operation state different to the first operation state; processing each of the first and the second image, wherein the processing comprises applying a filter obtained based on the noise of the image and a frequency characteristic of the image; superimposing the first and the second images to align a predetermined point in each of the first and the second images; and measuring the displacement of an edge associated with the component between the first and the second image to obtain the displacement of the component within the device during operation of the device.Type: GrantFiled: January 13, 2020Date of Patent: June 1, 2021Assignee: Rolls-Royce plcInventors: Akin Keskin, Luca Miller, Simon Cross
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Patent number: 10979678Abstract: The present disclosure describes structural inspection devices, methods, and systems. One inspection device includes a pole, a sensor coupled to an end of the pole and configured to capture a multispectral image of a roof, and a number of attachments coupled to the pole and configured to stabilize the pole.Type: GrantFiled: October 10, 2019Date of Patent: April 13, 2021Assignee: United Services Automobile Association (USAA)Inventors: James P. Hillman, Cynthia D. Blasing, Damien J. Brunet, Dan D. Cable, Adolfo J. Fernandez, Jeffrey A. Kreth, Shane C. Osborne, Robert A. Pacheco, Renee A. Sokolowski
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Patent number: 10942130Abstract: An information processing device according to an aspect of the present invention includes a damage information acquisition unit that acquires damage information on damage of a structure, a damage vector generation unit that vectorizes the acquired damage information to generate a damage vector, and a hierarchical structure information generation unit that generates hierarchical structure information that is information hierarchically representing a connection relationship between the damage vectors on the basis of the generated damage vector. Since the hierarchical structure information that is information hierarchically representing the connection relationship between damage vectors is generated, it is possible to easily recognize the connection relationship between the damage vectors and to easily perform analysis and/or search of the damage vector through the hierarchical structure information.Type: GrantFiled: June 15, 2018Date of Patent: March 9, 2021Assignee: FUJIFILM CorporationInventor: Mikihiko Karube
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Patent number: 10916076Abstract: A system includes a processor configured to receive a track-creation request. The processor is also configured to initiate track recording, responsive to the request and record GPS points corresponding to vehicle movement. Further, the processor is configured to receive a track-completion instruction and store the recorded GPS points, and a line connecting the points, as representing a recorded track.Type: GrantFiled: April 25, 2017Date of Patent: February 9, 2021Assignee: Ford Global Technologies, LLCInventors: John Jeffrey Pfeiffer, Michael Lambert, Surya Sagiraju, John Michael Fischer, Harold Bernard Samuels, Adam Pagryzinski
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Patent number: 10788320Abstract: A defect detecting device 10 includes an overall displacement measurement unit 11 that measures, based on observation data output from an observation device that observes a target object, a displacement of an overall movement of the target object relative to an observation point at set time intervals, as an overall displacement; a specific period detection unit 12 that detects a specific period in which the measured overall displacement is in a specific state within a period in which observation is performed; a partial displacement measurement unit 13 that measures, displacements at a plurality of points set on the target object in the detected specific period, as partial displacements; and a defect detection unit 14 that detects a defect in the target object, based on the acquired at least one of the temporal changes and the spatial distributions of the partial displacements.Type: GrantFiled: August 23, 2017Date of Patent: September 29, 2020Assignee: NEC CORPORATIONInventor: Jun Takada
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Patent number: 10782229Abstract: A sheet material measurement system includes an optical system for identifying at least a first area of a moving sheet material suspected of including at least one defect. A terahertz (THz) system includes a THz generator for generating a THz beam and a THz detector and a scanner including a scanner head for positioning the THz system over the first area. A computing device is coupled to receive signals sensed by the THz detector after interacting with the first area. The computing device determines whether the first area is a metal-contaminated area including metal particles.Type: GrantFiled: March 14, 2019Date of Patent: September 22, 2020Assignee: Honeywell International Inc.Inventors: Tobias Nebel, Michael Kon Yew Hughes
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Patent number: 10704900Abstract: A detection device includes: a crack detection unit to detect a deformation on a surface of a structure from image information on the structure; a step detection unit to detect a step on the surface of the structure from three-dimensional point group information on the structure measured with a laser; and a determination unit to determine a state of the deformation using information on the deformation generated by the crack detection unit and information on the step generated by the step detection unit.Type: GrantFiled: August 10, 2016Date of Patent: July 7, 2020Assignee: MITSUBISHI ELECTRIC CORPORATIONInventor: Megumi Irie
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Patent number: 9869064Abstract: The present invention is capable of inspecting with high accuracy the shape of a road travel surface when travelling at a low speed, and even when acceleration, deceleration, or stoppages occur frequently, and generates a highly reproducible road surface longitudinal profile. A photograph is taken along the longitudinal direction of a travel path by a photography means in a light section method via a travel surface photography means (21). Corrected image information, in which a tilt in photographic image information has been corrected using inclination information, is generated on the basis of the photographic image information, the inclination information, and movement information via a road surface profile generation means (7), and thereafter the corrected image information is arranged using the movement information. Vertical motion information pertaining to the travel surface photography means is specified from image contents of overlapped regions.Type: GrantFiled: April 18, 2013Date of Patent: January 16, 2018Assignee: WEST NIPPON EXPRESSWAY ENGINEERING SHIKOKU COMPANY LIMITEDInventors: Yukio Akashi, Kazuaki Hashimoto, Shogo Hayashi
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Patent number: 9840118Abstract: A road classification system for determining a road surface condition includes a model having as an input changes in the measured axle vertical acceleration of the vehicle. The model further uses a sensor-measured tire inflation pressure and a tire construction type ascertained from a tire-based identification tag.Type: GrantFiled: December 9, 2015Date of Patent: December 12, 2017Assignee: The Goodyear Tire & Rubber CompanyInventor: Kanwar Bharat Singh
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Patent number: 9734423Abstract: An image-based structural health monitoring system and method are disclosed herein. The image-based structural health monitoring system includes a marker image acquisition unit, a marker coordinate calculation unit, a shape function determination unit, and a structural health evaluation unit. The marker image acquisition unit acquires marker images of markers attached onto the surface of a structure. The marker coordinate calculation unit calculates the coordinates of the markers in the marker images. The shape function determination unit determines a shape function by performing spline interpolation based on the calculated marker coordinates. The structural health evaluation unit evaluates the structural health of the structure by calculating the strain or stress of the structure based on the radius of curvature calculated at each location on the determined shape function.Type: GrantFiled: August 17, 2015Date of Patent: August 15, 2017Assignee: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITYInventors: Hyo Seon Park, Jun Su Park, Byung Kwan Oh, You Sok Kim
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Patent number: 9646379Abstract: Methods and systems for detection of selected defects in relatively noisy inspection data are provided. One method includes applying a spatial filter algorithm to inspection data acquired across an area on a substrate to determine a first portion of the inspection data that has a higher probability of being a selected type of defect than a second portion of the inspection data. The selected type of defect includes a non-point defect. The inspection data is generated by combining two or more raw inspection data corresponding to substantially the same locations on the substrate. The method also includes generating a two-dimensional map illustrating the first portion of the inspection data. The method further includes searching the two-dimensional map for an event that has spatial characteristics that approximately match spatial characteristics of the selected type of defect and determining if the event corresponds to a defect having the selected type.Type: GrantFiled: April 26, 2016Date of Patent: May 9, 2017Assignee: KLA-Tencor Corp.Inventors: Haiguang Chen, Michael D. Kirk, Stephen Biellak, Jaydeep Sinha
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Patent number: 9355319Abstract: A system for identifying road surface conditions includes a road surface measurement sensor attached to a vehicle and configured to generate a measurement signal for a road surface condition, and a controller. The controller is configured to digitalize the measurement signal received from the road surface measurement sensor, calculate a curvature pattern for the road surface condition based on the digitalized measurement signal, and compare the calculated curvature pattern with a pre-stored curvature pattern to identify the road surface condition.Type: GrantFiled: September 4, 2013Date of Patent: May 31, 2016Assignee: HYUNDAI MOTOR COMPANYInventors: Yoon Ho Jang, Kyoung Moo Min, Eun Jin Choi, Jin Hak Kim
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Patent number: 9250478Abstract: The present invention discloses a sealant coating equipment of a liquid crystal panel which comprises a nozzle, the nozzle is used for sealant coating of substrates required to be sealant-coated, the equipment further comprises a monitoring and detecting device. When the nozzle is performing sealant coating, the monitoring and detecting device is used for instantaneously acquiring images after the sealant coating is performed by the nozzle, determining if there are defects of sealant coating according to the acquired images, and recording location data of defective sealant coatings when determining that there are the defective sealant coatings. When the nozzle finishes the sealant coating, the monitoring and detecting device is further used for displaying images of the defective sealant coatings and locations data of the defective sealant coatings. The present invention further discloses a sealant coating method of a liquid crystal panel.Type: GrantFiled: October 26, 2011Date of Patent: February 2, 2016Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTDInventor: Chien-pang Lee
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Publication number: 20150134274Abstract: A method for managing an airplane fleet is described. The method includes: (i) developing a gold body database for an airplane model for each non-destructive inspection system implemented to detect defects; (ii) inspecting, over a period of time, a plurality of candidate airplanes of the airplane model, using different types of non-destructive inspection systems and the gold body database associated with each of the different types of non-destructive inspection systems, to identify defects present on the plurality of candidate airplanes; (iii) repairing or monitoring defects detected on the plurality of candidate airplanes; (iv) conducting a trend analysis by analyzing collective defect data obtained from inspecting of plurality of candidate airplanes; and (v) maintaining the airplane fleet, which includes plurality of candidate airplanes, by performing predictive analysis using results of trend analysis.Type: ApplicationFiled: December 16, 2014Publication date: May 14, 2015Inventors: Douglas Allen Froom, William T. Manak
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Patent number: 9004753Abstract: A method and an apparatus for detecting defects in the composite materials of a wind turbine blade or similar type of structure using an infrared (IR) camera. The temperature of the wind turbine blade is changed in such a way as to produce IR intensity changes in the region of the defect that can be visually detected or detected using a computer and signal processing algorithms. The same approach will work on other composite structures such as those found on aircraft.Type: GrantFiled: October 3, 2011Date of Patent: April 14, 2015Assignee: Kurion, Inc.Inventors: Joseph W. Maresca, Jr., Wesley L. Bratton, Wilhelmina C. Leuschen, David A. Rohrig
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Patent number: 8983781Abstract: Aspects of the disclosure relate generally to detecting road weather conditions. Vehicle sensors including a laser, precipitation sensors, and/or camera may be used to detect information such as the brightness of the road, variations in the brightness of the road, brightness of the world, current precipitation, as well as the detected height of the road. Information received from other sources such as networked based weather information (forecasts, radar, precipitation reports, etc.) may also be considered. The combination of the received and detected information may be used to estimate the probability of precipitation such as water, snow or ice in the roadway. This information may then be used to maneuver an autonomous vehicle (for steering, accelerating, or braking) or identify dangerous situations.Type: GrantFiled: September 20, 2012Date of Patent: March 17, 2015Assignee: Google, Inc.Inventors: Christopher Paul Urmson, Michael Steven Montemerlo, Jiajun Zhu
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Publication number: 20150057952Abstract: An inspection system for inspecting a target object is disclosed. The inspection system includes an inspection module. The inspection module includes a housing, a sensor adapted to provide sensor data relating to the target object, an inspection module processor adapted to receive the sensor data from the sensor and to provide corresponding packaged data, and an inspection module interface adapted to output the packaged data from the inspection module processor. The inspection system also includes a handset adapted to selectively mechanically engage with the inspection module. The handset includes a handset processor, a handset interface adapted to receive the packaged data from the inspection module interface and to provide the packaged data to the handset processor, and a user output interface responsive to the handset processor to output information about the target object to a user based on the packaged data.Type: ApplicationFiled: August 26, 2013Publication date: February 26, 2015Applicant: General Electric CompanyInventors: Kevin Andrew Coombs, Joshua Lynn Scott
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Patent number: 8949043Abstract: While an illumination optical system is irradiating the surface of a contaminated standard wafer with illumination light, this illumination light is scanned over the surface of the contaminated standard wafer, then detectors of a detection optical system each detect the light scattered from the surface of the contaminated standard wafer, next a predefined reference value in addition to detection results on the scattered light is used to calculate a compensation parameter “Comp” for detection sensitivity correction of photomultiplier tubes of the detectors, and the compensation parameter “Comp” is separated into a time-varying deterioration parameter “P”, an optical characteristics parameter “Opt”, and a sensor characteristics parameter “Lr”, and correspondingly managed. This makes is easy to calibrate the detection sensitivity.Type: GrantFiled: February 2, 2010Date of Patent: February 3, 2015Assignee: Hitachi High-Technologies CorporationInventors: Kenji Oka, Kenji Mitomo, Kenichiro Komeda
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Publication number: 20140379281Abstract: An optimized measurement model is determined based a model of parameter variations across a semiconductor wafer. A global, cross-wafer model characterizes a structural parameter as a function of location on the wafer. A measurement model is optimized by constraining the measurement model with the cross-wafer model of process variations. In some examples, the cross-wafer model is itself a parameterized model. However, the cross-wafer model characterizes the values of a structural parameter at any location on the wafer with far fewer parameters than a measurement model that treats the structural parameter as unknown at every location. In some examples, the cross-wafer model gives rise to constraints among unknown structural parameter values based on location on the wafer. In one example, the cross-wafer model relates the values of structural parameters associated with groups of measurement sites based on their location on the wafer.Type: ApplicationFiled: September 5, 2014Publication date: December 25, 2014Inventor: Stilian Ivanov Pandev
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Patent number: 8901485Abstract: A method of determining the concentration of an element of interest in a solid of interest based on the ratio of the measured relative abundances of two isotopes in the solid of interest, one isotope of the element of interest and the second isotope from an element represented in the chemical formula of the solid of interest, and comparing this ratio to the ratio of the measured relative abundances of the same two isotopes for a reference solid for which the concentration of the element of interest is known. A method of calculating the concentration of the element of interest in the solid of interest. A method of executing a computer software program with instructions for calculating the concentration of the element of interest in the solid of interest.Type: GrantFiled: June 5, 2013Date of Patent: December 2, 2014Inventors: Raymond Allen Donelick, Margaret Burke Donelick
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Patent number: 8892400Abstract: With the different methods of fluorescence correlation spectroscopy, physical and biological transport processes in or between cells in the microscopic range, for example diffusion processes, can be analyzed. For this purpose, correlations of the fluorescence measurement data are determined for different sample regions and mathematical transport models are adapted thereto. Erroneous fluorescence correlation analyses were previously identified on the basis of the properties of the adapted model function parameters and were discarded. The a-priori knowledge necessary for the identification had to be obtained in time-consuming series of tests. With the invention, sample properties can be determined in a simpler, quicker and more exact way from fluorescence correlations.Type: GrantFiled: March 29, 2011Date of Patent: November 18, 2014Assignee: Carl Zeiss Microscopy GmbHInventors: Stephan Wagner-Conrad, Yauheni Novikau, Klaus Weisshart
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Patent number: 8873031Abstract: A disk surface inspection method for detecting a circle scratch defect, separately from sporadically existing scratch defects. In the method, the sample is irradiated with light, regular reflection light reflected from the sample is detected, scattered light in the vicinity of the regular reflection light is detected separately from the regular reflection light, scattered light, scattered in a high angle direction greater than the direction of the regular reflection light is detected, and the defects on the surface of the sample are detected by processing a regular reflection light detection signal, a low-angle scattered light detection signal and a high-angle scattered light detection signal to extract defect candidates, and regarding the extracted defect candidates, a circumferential defect is extracted based on the ratio of defect candidates in a circumferential direction within a predetermined width in a radial direction from the center of the sample.Type: GrantFiled: February 4, 2013Date of Patent: October 28, 2014Assignee: Hitachi High-Technologies CorporationInventors: Yu Yanaka, Kiyotaka Horie, Fariz bin Abdulrashid
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Patent number: 8874385Abstract: The present invention provides, at low cost, a multilayer radiation detector whose position relative to a beam axis can be verified. The radiation detector includes a plurality of sensors that react to radiation and are stacked in parallel inlayers in a traveling direction of the radiation. The sensors are each sectioned into a central region including the center of the sensor and another region surrounding the central region. The radiation detector independently measures signals measured by the central regions and signals measured by the other regions. Thus, the position of the radiation detector can be verified.Type: GrantFiled: January 25, 2011Date of Patent: October 28, 2014Assignee: Hitachi, Ltd.Inventors: Taisuke Takayanagi, Hideaki Nihongi, Yusuke Fujii, Hiroshi Akiyama, Masahiro Tadokoro, Rintaro Fujimoto
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Patent number: 8868291Abstract: A solution for evaluating an object using infrared data is provided. In particular, infrared data corresponding to the object is processed to enhance a set of signal features. The infrared data is analyzed to determine whether one or more anomalies are present.Type: GrantFiled: January 22, 2014Date of Patent: October 21, 2014Assignee: International Electronics Machines Corp.Inventors: Zahid F. Mian, Robert W. Foss
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Patent number: 8812252Abstract: The present invention is a method, a system and a software arrangement that can be used to determine the interaction between electromagnetic radiation and a material. The invention simplifies the process of determining the interaction by separating the complex process into a plurality of simple transition modules. Each transition module is associated with at least one parameter and represents an electronic transition in the material.Type: GrantFiled: April 21, 2009Date of Patent: August 19, 2014Assignee: Simphotek, Inc.Inventors: Evgueni Parilov, Mary J. Potasek, Karl W. Beeson
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Publication number: 20140200832Abstract: An apparatus comprises an inspection vehicle, a sensor system, a positioning system, a controller, and a support system. The inspection vehicle is configured to move on a surface of an object. The sensor system is associated with the inspection vehicle and is configured to generate information about the object when the inspection vehicle is on the surface of the object. The positioning system is configured to determine a location of the inspection vehicle on the object. The controller is configured to control movement of the inspection vehicle using the positioning system and control operation of the sensor system. The support system is connected to the inspection vehicle and is configured to support the inspection vehicle in response to an undesired release of the inspection vehicle from the surface of the object.Type: ApplicationFiled: January 8, 2014Publication date: July 17, 2014Applicant: The Boeing CompanyInventors: James J. Troy, Gary Ernest Georgeson, Karl Edward Nelson, Scott Wesley Lea
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Patent number: 8781758Abstract: The present invention provides an optical inspection method capable of detecting a finer defect in the surface of a substrate, including the steps of: irradiating a surface of a sample which is rotating and continuously moving in one direction with illumination light which is incident in a direction obliquely to the sample surface; detecting an image of light formed by a forward scattering light around an optical axis of regular-reflection light while excluding the regular-reflection light from the sample surface irradiated with the illumination light; condensing and detecting lateral scattering light which scatters laterally from the sample surface with respect to an incidence direction of the illumination light; and processing a signal obtained by detecting the image of light formed by the forward scattering light and a signal obtained by condensing and detecting the lateral scattering light to extract a defect including a scratch defect.Type: GrantFiled: August 15, 2011Date of Patent: July 15, 2014Assignee: Hitachi High-Technologies CorporationInventors: Shigeru Serikawa, Bin Abdulrashid Fariz, Keiji Kato
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Patent number: 8775101Abstract: Methods and systems for detecting defects on a wafer are provided.Type: GrantFiled: August 2, 2011Date of Patent: July 8, 2014Assignee: KLA-Tencor Corp.Inventors: Junqing Huang, Yong Zhang, Stephanie Chen, Tao Luo, Lisheng Gao, Richard Wallingford
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Publication number: 20140142868Abstract: A track inspection vehicle includes a track inspection platform with a propulsion system and a vehicle control system, at least one track inspection device, and a track inspection controller. The track inspection platform is to be positioned on a railroad. The propulsion system and vehicle control system selectively and adjustably operate and control the track inspection platform to traverse the railroad in a self-propelled manner. Each track inspection device produces electronic inspection data relating to a condition of the railroad in conjunction with operation of the track inspection platform to perform a railroad inspection task. The track inspection controller controls one or more track inspection device to selectively or continuously produce the corresponding electronic inspection data in conjunction with performance of the railroad inspection task. The track inspection vehicle may also include a remote control unit. Various methods for inspecting track in a railroad are also provided.Type: ApplicationFiled: February 26, 2013Publication date: May 22, 2014Applicant: Andian Technologies Ltd.Inventor: Andre C. Bidaud
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Publication number: 20140142869Abstract: A method and system are presented for use in characterizing properties of an article having a structure comprising a multiplicity of sites comprising different periodic patterns, where method includes providing a theoretical model of prediction indicative of optical properties of different stacks defined by geometrical and material parameters of corresponding sites, said sites being common in at least one of geometrical parameter and material parameter; performing optical measurements on at least two different stacks of the article and generating optical measured data indicative of the geometrical parameters and material composition parameters for each of the measured stacks; processing the optical measured data, said processing comprising simultaneously fitting said optical measured data for the multiple measured stacks with said theoretical model and extracting said at least one common parameter, thereby enabling to characterize the properties of the multi-layer structure within the single article.Type: ApplicationFiled: December 24, 2013Publication date: May 22, 2014Applicant: NOVA MEASURING INSTRUMENTS LTD.Inventors: Yoel COHEN, Boaz BRILL
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Publication number: 20140092234Abstract: A data acquisition system for determining the state of a tubular while the tubular rotates about its cylindrical axis. The tubular remains otherwise substantially stationary. Sensors travel up and down the length of the rotating tubular, interrogating the inside and outside of the tubular for data regarding the tubular's state. Sensors may take samples which may be associated with rotational reference information tying the sample to its absolute position on the internal or external surface of the tubular. A data processor processes the samples and other sensor data to produce a wide array of output, including data signatures of the tubular, maps of contour data regarding the internal or external surface of the tubular, and dimensional data regarding the tubular. Data acquisition is advantageously done in real time, and may further be done concurrently with internal or external cleaning operations.Type: ApplicationFiled: September 27, 2013Publication date: April 3, 2014Applicant: Extreme Hydro Solutions, L.L.C.Inventors: William C. Thomas, William J. Thomas, III, Perry J. DeCuir, JR., Jeffrey R. Wheeler, Stuart J. Ford
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Patent number: 8675188Abstract: Determination of one or more optical characteristics of a structure of a semiconductor wafer includes measuring one or more optical signals from one or more structures of a sample, determining a background optical field associated with a reference structure having a selected set of nominal characteristics based on the one or more structures, determining a correction optical field suitable for at least partially correcting the background field, wherein a difference between the measured one or more optical signals and a signal associated with a sum of the correction optical field and the background optical field is below a selected tolerance level, and extracting one or more characteristics associated with the one or more structures utilizing the correction optical field.Type: GrantFiled: January 4, 2013Date of Patent: March 18, 2014Assignee: KLA-Tencor CorporationInventors: Xuefeng Liu, Yung-Ho Alex Chuang, John Fielden
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Patent number: 8650001Abstract: A method for identifying a piece of wood amongst a plurality or for determining its rotation includes the operating steps of: acquiring at least one piece of real X-ray information about the piece of wood; calculating, based on a tomographic reconstruction, a piece of virtual X-ray information in the same way as in the acquisition of the real X-ray information; comparing the real and virtual X-ray information to verify whether they match; and repeating the calculation and comparison steps up to obtaining the matching, and/or, for identification method only, selecting a different tomographic reconstruction and reiterating the calculation and comparison steps and, if necessary, the repetition and/or selection steps.Type: GrantFiled: July 19, 2011Date of Patent: February 11, 2014Assignee: Microtec S.R.L.Inventors: Frederico Giudiceandrea, Enrico Vicario
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Patent number: 8649932Abstract: A solution for evaluating a vehicle using infrared data is provided. In particular, evaluation data for the vehicle is obtained, which includes infrared data for a plurality of sides of the vehicle as well as vehicle identification data for distinguishing the vehicle from another vehicle. The infrared data is processed to enhance a set of signal features. Additional non-infrared based data also can be obtained for evaluating the vehicle. The evaluation data is analyzed to determine whether one or more anomalies are present. The anomaly(ies) can be correlated with a possible problem with a component of the vehicle. Data on the anomaly, problem, and/or vehicle identification can be provided for use on another system, such as a remote inspection station, maintenance system, and/or the like.Type: GrantFiled: June 6, 2013Date of Patent: February 11, 2014Assignee: International Electronic Machines Corp.Inventors: Zahid F. Mian, Robert W. Foss
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Patent number: 8639475Abstract: A system and method of signal detection from a given point, in which a radiative aperture, such as a sonar sensor, radar antenna, acoustic sensor, or the like, receives radiation from the point at more than one range. At each range, the signal incident on each point within the aperture is weighted by the cosine of the angle between a surface normal at the point on the aperture, and a vector from the point on the aperture to the given point. The physical size and shape of the aperture may also be changed to cause the aperture to subtend the same solid angle having the given point as the vertex, at each range. In this manner, the signal from the given point becomes aperture shape independent, facilitating object recognition and imaging.Type: GrantFiled: May 18, 2009Date of Patent: January 28, 2014Assignee: The United States of America as represented by the Secretary of the NavyInventor: Richard Rikoski
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Patent number: 8618497Abstract: The present invention provides a drawing apparatus including a plurality of drawing units each of which is configured to perform drawing on a substrate with a charged particle beam, a plurality of first processors configured to be selectively connectable to each of the plurality of drawing units, an information processor configured to determine, from the plurality of first processors, a first processor to be connected to a first drawing unit among the plurality of drawing units, based on drawing data, and a connection unit configured to connect the determined first processor to the first drawing unit.Type: GrantFiled: January 4, 2013Date of Patent: December 31, 2013Assignee: Canon Kabushiki KaishaInventors: Shinji Ohishi, Tomoyuki Morita
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Publication number: 20130316071Abstract: Implementations described and claimed herein provide systems and methods for adding a chosen functional coating on an optical surface of a spectacle lens. In one implementation, it is determined if identified features of the optical surface of the spectacle lens are compatible with the chosen functional coating according to a first set of rules. The features of the optical surface are identified based on an analysis of a quality of the optical surface. Manufacturing information for the chosen functional coating is generated based on the determined compatibility. The manufacturing information includes information for depositing the chosen functional coating on the optical surface where the identified features are compatible with the chosen functional coating and on a modified optical surface where the identified features are not compatible with the chosen functional coating.Type: ApplicationFiled: May 24, 2013Publication date: November 28, 2013Applicant: Essilor International (Compagnie Generale d'Optique)Inventors: Frederic Arrouy, Philip Miller
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Patent number: 8587777Abstract: A change in surface state can be dealt with by setting threshold values different for respective regions of an object to be examined in accordance with a magnitude of noises, thereby improving a detection sensitivity. A function for setting an examination threshold value every region is installed. A function for setting examination threshold values every plurality of detectors spatially independent of each other is installed. The magnitude of noises from the object to be examined differs depending on a spatial direction even in the same region. Therefore, the detection sensitivity is maximized by maximizing an S/N ratio of a detection signal by an optimum signal arithmetic operating process according to the magnitude of noises from the object to be examined every detector and every region of the object to be examined and by setting the optimum threshold values.Type: GrantFiled: November 19, 2009Date of Patent: November 19, 2013Assignee: Hitachi High-Technologies CorporationInventors: Takahiro Jingu, Kazuo Takahashi
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Publication number: 20130304399Abstract: Systems and methods for providing micro defect inspection capabilities for optical systems such as wafer metrology tools and interferometer systems are disclosed. The systems and methods in accordance with the present disclosure may detect, classify and quantify wafer surface features, wherein the detected defects are classified and the important defect metrology information of height/depth, area and volume is reported. The systems and methods in accordance with the present disclosure therefore provide more values for quantifying the negative effect of these defects on the wafer quality.Type: ApplicationFiled: May 11, 2012Publication date: November 14, 2013Applicant: KLA-Tencor CorporationInventors: Haiguang Chen, Jaydeep K. Sinha, Sergey Kamensky
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Publication number: 20130297232Abstract: A method and device for performing the method of inspecting an object for the purpose of detecting defective surface regions of the object, comprising the steps of using a scanning device to survey a surface of the object to be inspected and generating two-dimensional image data and a measured surface profile in at least one cross-sectional plane through the object in each case; using a computer device to evaluate the two-dimensional image data in order to localize a potentially defective surface region; using the computer device to generate a calculated surface profile within the potentially defective surface region in the cross-sectional plane on the basis of the measured surface pro-file outside of the potentially defective surface region of the cross-sectional plane; using the computer device to compare the calculated and measured surface profiles within the potentially defective surface region, the localized surface region being assessed as actually defective if defined differentiating features are preseType: ApplicationFiled: January 16, 2012Publication date: November 7, 2013Inventors: Helmuth Euler, Frank Forster, Christian Homma, Claudio Laloni
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Patent number: 8559001Abstract: Inspection guided overlay metrology may include performing a pattern search in order to identify a predetermined pattern on a semiconductor wafer, generating a care area for all instances of the predetermined pattern on the semiconductor wafer, identifying defects within generated care areas by performing an inspection scan of each of the generated care areas, wherein the inspection scan includes a low-threshold or a high sensitivity inspection scan, identifying overlay sites of the predetermined pattern of the semiconductor wafer having a measured overlay error larger than a selected overlay specification utilizing a defect inspection technique, comparing location data of the identified defects of a generated care area to location data of the identified overlay sites within the generated care area in order to identify one or more locations wherein the defects are proximate to the identified overlay sites, and generating a metrology sampling plan based on the identified locations.Type: GrantFiled: January 5, 2011Date of Patent: October 15, 2013Assignee: KLA-Tencor CorporationInventors: Ellis Chang, Amir Widmann, Allen Park
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Publication number: 20130261989Abstract: A method and system for inspecting an object is provided. In accordance with embodiments of the method, a thermal excitation pulse is applied to an object undergoing evaluation. A transient thermal signal from the object is detected in response to the thermal excitation pulse. Two or more orthogonal functions are applied to the transient thermal signal based on a defined time interval to generate two or more orthogonal components. The object is assessed for defects at different depths using the two or more orthogonal components.Type: ApplicationFiled: March 29, 2012Publication date: October 3, 2013Applicant: General Electric CompanyInventors: Yuri Alexeyevich Plotnikov, Harry Israel Ringermacher