Abstract: An optical measuring device generates a plurality of measured optical data from inspection of a thin film stack. The measured optical data group naturally into several domains. In turn the thin film parameters associated with the data fall into two categories: local and global. Local “genes” represent parameters that are associated with only one domain, while global genes represent parameters that are associated with multiple domains. A processor evolves models for the data associated with each domain, which models are compared to the measured data, and a “best fit” solution is provided as the result. Each model of theoretical data is represented by an underlying “genotype” which is an ordered set of the genes. For each domain a “population” of genotypes is evolved through the use of a genetic algorithm. The global genes are allowed to “migrate” among multiple domains during the evolution process.

Abstract: A first signal and a second signal are provided as two continuous signals having an identical fundamental frequency. A first spectrum which is either one of a frequency spectrum or a frequency power spectrum of the first signal in a predetermined time period is obtained. A second spectrum which is either one of a frequency spectrum or a frequency power spectrum of the second signal in the predetermined time period is obtained. A normalized value which corresponds a ratio of a difference between the first spectrum and the second spectrum and a sum of the first spectrum and the second spectrum at the fundamental frequency is obtained. A ratio of an amplitude of a signal component of the first signal and an amplitude of a signal component of the second signal is obtained based on the normalized value.

Abstract: A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.

Abstract: A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.

Abstract: The present disclosure relates to an object inspection system. The object inspection system comprises an ultrasound source capable of exciting the object to be tested with a stimulus such that the object vibrates at an ultrasound frequency, at least one optical fiber optically connected to the ultrasound source and adapted to be positioned with its exit end in close proximity to a surface of the object to be tested to deliver the stimulus to the object, a vibration sensing device adapted to sense the ultrasonic vibration displacements created in the object by the ultrasound source, and a system controller which receives the ultrasonic vibration data from the vibration sensing device. In a preferred arrangement, the object inspection system comprises a solder joint inspection system for testing the integrity of solder joints used to connect a computer chip to a printed circuit board.

Abstract: The invention provides a crystal structure analysis method so as to analyze crystal structures in detail. The inventive method comprises incrementing the tilting angle &psgr; of the SBT thin film 1 by one degree in a range of 0 degree ≦y≦90 degrees, for each of the increments of the tilting angle &psgr; irradiating the X-ray onto the SBT thin film with the incident angle &thgr; being incremented by 0.025 degrees in a range of 0 degree ≦&thgr;≦90 degrees and detecting the X-rays diffracted from the SBT thin film 1 by the detector 3.

Abstract: Techniques to speed the manufacturing process of devices such as optical signal transmitters, transponders, or transceivers by utilizing automated extinction ratio adjustment.

Abstract: A wireless local area network (WLAN) radio-frequency identification (RFID) tag system provides location finding in a wireless local area network (WLAN), using a WLAN channel. Interference with the WLAN is prevented by either using a sniffer circuit to determine that no network transmission is in progress, using a modified coding sequence or preamble to cause standard WLAN receivers to ignore the RFID tag transmissions, or transmitting a message using a standard WLAN signal addressed to an address not corresponding to a unit within the WLAN. Location units (LUs) and a master unit (MU) within the WLAN receive the RFID tag transmissions and can determine the location of a tag by triangulation based on differences between the signals received at the location units from the tag. The master unit receives the signal information from the location units and computes the location of the tag. Time-difference-of-Arrival (TDOA), received signal strength indication (RSSI) or other triangulation techniques may be used.

Abstract: A system and method of for determining multiple uniformity metrics of a semiconductor wafer manufacturing process includes collecting a quantity across each one of a group of semiconductor wafers. The collected quantity data is scaled and a principal component analysis (PCA) is performed on the collected, scaled quantity data to produce a first set of metrics for the first group of semiconductor wafers. The first set of metrics including a first loads matrix and a first scores matrix.

Abstract: In a process for manufacturing a semiconductor wafer, defect distribution state analysis is performed so as to facilitate identification of the defect cause including a device cause and a process cause by classifying the defect distribution state according to the defect position coordinates detected by the inspection device, into one of the distribution characteristic categories: repeated defects, clustered defects, arc-shaped regional defects, radial regional defects, line type regional defects, ring and blob type regional defects, and random defects.

Abstract: Method and system for performing very high speed software downloads concurrent with system testing in an automated production environment and for test-sequencing in multi-tasking environments with consolidated automation and interactive operations is described. In one embodiment, during diagnostics and software download, a multi-tasking OS is booted on a target computer system, thereby enabling diagnostics to be run at the same time the software download is performed. A visual step-sequencing engine provides the ability to sequentially execute steps, as well as to execute steps in parallel and to combine parallel and sequential steps into loops. The sequencing engine provides a visual representation of the current run status of the target system in a Main window.

Abstract: Method for the detection of an exceeding of a predetermined limiting value in a radioactivity measurement, with the following procedure steps:

Abstract: A system and method for tracking movement of a sports participant or a sports object associated with a sports activity, wherein in one example the system includes an article associated with the sports participant. The article provides a known spatial phase characteristic conveyed via electromagnetic energy. A receiver monitors the venue area within which the sports activity is occurring. Electromagnetic energy is received, wherein the received electromagnetic energy includes the electromagnetic energy from the article that conveys the spatial phase characteristic. The known spatial phase characteristic provided by said article is identified among the spatial phase characteristics of electromagnetic energy to locate the article. Physical movement of the sports participant is tracked by tracking the location of the article.

Abstract: The present invention provides systems and methods for non-destructively detecting material abnormalities beneath a coated surface, comprising a mid-infrared (MIR) detection unit for illuminating an area of the coated surface and detecting light reflected from the illuminated area of the coated surface, and a processing unit for producing an image from optical characteristics received from the MIR detection unit. In addition, the system may further comprise a scanning unit for moving the MIR detection unit to a next area.

Abstract: A pattern inspection system for inspecting a substrate surface on which a predetermined pattern is formed with radiation of an electron beam and an optical beam. the pattern inspection system includes a radiation and which radiates an electron beam to the substrate, a detection unit which detects a secondarily generated signal attributable to the radiation of the electron beam, a retrieval unit which retrieves an image from the signal detected by the detection unit, and an image processing unit which classifies the retrieved image depending on a type of the image.

Abstract: An optical contour digitizer including a radiation source for emitting radiation therefrom, a first mirror for folding the radiation emitted from the radiation source towards an object being measured, a second mirror for folding a reflection of the radiation from the object being measured and a sensor for sensing the reflected radiation folded by the second mirror, and a method of using the same.

Abstract: A three-dimensional density distribution of a log is reduced to a two-dimensional structure that provides a convenient image or visualization of defects like knots or voids in a log, to facilitate grading and/or optimization of a sawing strategy for the log. The two-dimensional data structure is based on cylindrical or modified cylindrical coordinates Z and &thgr;. To provide a more compact identification of defects, modified cylindrical coordinates use a Z-axis that follows the growth center in the log and determines data points by evaluating properties of the log along rays at an upward angle corresponding to limbs in a tree. A process for identifying the growth center at any distance Z along the length of the log examines or accumulates the gradient of density along lines through a cross-section of the log. Manual grading and sawing optimization can employ viewing of an image based on the two-dimensional data structure with superimposed marks indicating the boundaries of faces cut from the log.

Abstract: A method is described for the operation of an opto-electronic sensor array, in which a plurality of sequential operating light pulses are emitted into a monitored region; the operating light pulses reflected from an object arranged in the monitored region are received by a spatially resolving receiver unit with a plurality of light sensitive sensors; the light intensity of the respectively received reflected operating light pulses is detected and stored in each case during an activation interval synchronously with the emission of the operating light pulses for each sensor; and after each activation interval, in sequential transmission steps, the light intensities stored for the sensors are transmitted to a parallel processor having a plurality of parallel signal inputs for the parallel signal processing, with the transmission in each case taking place for a plurality of sensors simultaneously in each transmission step. Furthermore, a sensor array for the carrying out of the method is described.

Abstract: Acoustic and electro-magnetic (pulse or modulated radar and X-ray) data acquisition frequently requires the use of detectors arranged in an array. In this way, the data acquired by each detector in the array can be integrated to improve the quality and accuracy of data retrieved. The present invention provides a system and method for the calibration of detectors for quality assurance. Preferably, the system and method are suitable for field application immediately prior to and post data acquisition.

Abstract: Signal propagation times TA1, TA2, TA3 . . . of respective pin selection paths of a pin selection device that selectively connects output pins of a semiconductor device testing apparatus to a timing measurement device are measured in advance, and the measured values are memorized. At the time of timing calibration, calibration pulses are transmitted to a timing calibrators via respective test pattern signal transmission paths and respective pin selection paths to measure delay time values T1, T2, T3, - - - of respective channels. The known values TA1, TA2, TA3, - - - are subtracted from the measured values T1, T2, T3, - - - , respectively. A timing calibration is performed by adjusting delay time values of the timing calibrators of the respective test pattern signal transmission paths such that each of the respective differences between the TA1, TA2, TA3, - - - and the measured values T1, T2, T3, - - - become a constant value TC.

Abstract: Apparatus and methods for determining a linear position of a moveable member having a code disposed thereupon. The code includes a succession of data fields having at least n characters and including a frame-synch symbol at predetermined intervals in the code. A sensor reads the code on a predetermined portion of the moveable member. The predetermined portion of the member includes code having at least one frame-synch symbol and n characters. The sensor transmits a data signal as a function of the read code. A processing device is coupled with the sensor to receive the data signal. The processing device transmits a position signal as a function of the data signal, with the position signal being indicative of the linear position of the moveable member.

Abstract: A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.

Abstract: An apparatus for measuring particles in an exhaust gas of a vehicle. A transmitter is adapted to provide a source of ultraviolet radiation. The radiation travels through the gas and impinges upon the particles in the gas generating a backscattered radiation. The transmitter also generates a timing signal. A receiver is located in proximity of the transmitter. The receiver is adapted to receive the backscattered radiation and to generate a backscattered signal indicative of the quantity of particles entrained in the gas. A data system is connected to the receiver, the data system is adapted to receive the timing signal and the backscattered signal as an input and to calculate a quantity of particles in the gas at a location from the transmitter.

Abstract: Measurement system and process for measuring a cross-direction profile of specific properties of at least one of a material web and a coating on the material web. The system includes at least one stationary cross-direction profile measurement device having at least one radiation source adapted to irradiate the at least one of the material web and the coating on the material web in a plurality of defined and different wavelength ranges, and at least one sensor adapted to measure the intensity of radiation affected by the at least one of the material web and the coating on the material web. The system also includes at least one measurement and/or evaluation electronics system. Each sensor detects only one of the defined different wavelength ranges of the radiation at a specific point in time.

Abstract: A method and system for remotely inspecting the integrity of a structure. This can be performed by a method creating a vibratory response in the structure from a remote location and then measuring the vibratory response of the structure remotely. Alternatively, this can be performed by a system for remotely measuring the integrity of a structure using a vehicle and an artificial neural network, where the vehicle is equipped with a vibratory response device. The vibratory response can be produced by infrasonic and audio frequencies that can be produced by at least a vehicle, motor, or sound recording. The vibratory response can be measured with a laser vibrometer or an audio recording device.

Abstract: A machine monitoring method includes obtaining signals indicative of machine conditions, machine rotational speed, direction, and load conditions over a segment of time, transforming the obtained signal indicative of machine conditions into a frequency spectrum, identifying low level features of the frequency spectrum, and processing the low level features to obtain an indicator value representative of the machine conditions.

Abstract: Method and apparatus are provided for determining a superstrate on or near a sensor, e.g., for detecting the presence of an ice superstrate on an airplane wing or a road. In one preferred embodiment, multiple measurement cells are disposed along a transmission line. While the present invention is operable with different types of transmission lines, construction details for a presently preferred coplanar waveguide and a microstrip waveguide are disclosed. A computer simulation is provided as part of the invention for predicting results of a simulated superstrate detector system. The measurement cells may be physically partitioned, non-physically partitioned with software or firmware, or include a combination of different types of partitions. In one embodiment, a plurality of transmission lines are utilized wherein each transmission line includes a plurality of measurement cells.

Abstract: A system for determining the position, orientation and deformation in 3 dimensional space of a moving object in real-time is provided having a plurality of activatable markers which are mounted onto the object and a sensor section comprising a plurality of individual sensors as shown diagrammatically in FIG. 1. Individual markers are activated in sequence with only one marker energised at any time. Energy emitted by each activated marker is detected by the plurality of sensors positioned remotely. Since only one marker is activated at any time individual determination of the position of the particular energised marker is simplified. Individual sensors are arranged such that each sensor receives a different energy level from an energised marker depending on the relative position of the marker to the sensor. A control unit analyses the energy distribution range to determine the actual marker position. The system compensates for ambient energy and sensor saturation.

Abstract: The invention is related to a method and apparatus for modifying the irradiation distribution of a radiation source. In accordance with the method the radiation source (1) is used to direct radiation to an essentially planar target surface (6). In accordance with the invention between the radiation source (1) and the target surface (6), several plates (4), which are essentially transparent to the radiation and have spaces between them, are placed close to the radiation source (1), in order to use the reflection and absorption of the transparent plates (4) to attenuate the radiation to desired areas.

Abstract: A method is provided, the method comprising measuring at least one parameter characteristic of rapid thermal processing performed on a workpiece in a rapid thermal processing step, and modeling the at least one characteristic parameter measured using a first-principles radiation model. The method also comprises applying the first-principles radiation model to modify the rapid thermal processing performed in the rapid thermal processing step.

Abstract: A method and mobile unit facility is provided for testing the packaging of material during the transport of the material from one location to another location. The method includes instrumenting a unit of packaged material for measuring deflection and acceleration of the packaged material during the transport, loading the unit of packaged material into a bed of the mobile unit facility and filling the remainder of the bed with weighted material which is weighted and sized to simulate other units of the actual packaged material, and then driving the mobile unit facility from the one known location to the other location while recording deflection and acceleration data of the unit of packaged material.

Abstract: The invention provides a crystal structure analysis method so as to analyze crystal structures in detail.

Abstract: A method for determing the potential in a three-dimensional domain containing a source domain of source particles and a target domain of target particles involves assigning the source particles into source particle clusters and the target particles into target particle clusters, assigning a collection point to each of the clusters, and determing the inverse distance from each particle to the collection point of its respective cluster. A pseudo-particle representative of each particle within the cluster is defined at the collection point of each cluster in accordance with the determined inverse distances and the charge-like measure of each of the particles. The potential, and/or its gradient, at any of the target particles is then determined from the position and the charge-like measure of the associated pseudo-particle.

Abstract: A machine vision inspection system for industrial parts such as plastic molded caps or the like can reliably detect defects at very high inspection rates on the order of 1600 per minute of a variety of cap colors and liners including previously difficult to inspect combinations. Advantageously, the system includes an inclined inspection ramp which provides separation between the caps which are processed through an inspection station to provide accurate imaging of each individual cap without interference from adjacent caps. Further, the inspection station includes a light source which is provided on the back side of the cap in the form of an infrared LED strobe light which provides accurate and reliable lighting for appropriate imaging of caps of any color to detect and identify defects therein.

Abstract: A computer implemented software device for estimating background tilt and offset is disclosed to preferably be adaptable to an optical measurement instrument wherein the estimated parameters are resolved to generate a reference plane to be subtracted from a height map of a phase profile. A set of histograms of heights is used to develop a merit function. A two-dimensional high speed iterative search is used to optimize the merit function to generate a reference plane coincident with the spatial tilt of the phase profile. The invention enables real-time measurement of substrate height for preferred use in high-speed image processing operations relating to circuit-board production lines.

Abstract: A method of analyzing and classifying defects on semiconductor wafers during a semiconductor manufacturing process using a comparator die selector system wherein an automatic defect classification review tool compares defects on a die location with an identical location on an identical die. The automatic defect classification review tool locates identical die with information from the comparator die selector system.

Abstract: The present invention provides a system and method to reduce motion-induced noise in the detection of ultrasonic signals in a moving sheet or body of material. An ultrasonic signal is generated in a sheet of material and a detection laser beam is moved along the surface of the material. By moving the detection laser in the same direction as the direction of movement of the sheet of material the amount of noise induced in the detection of the ultrasonic signal is reduced. The scanner is moved at approximately the same speed as the moving material. The system and method may be used for many applications, such in a paper making process or steel making process. The detection laser may be directed by a scanner. The movement of the scanner is synchronized with the anticipated arrival of the ultrasonic signal under the scanner.

Abstract: A methodology for testing a floppy disk unit having a large storage capacity, the floppy disk unit being connected to a notebook computer, involves giving corresponding commands to a multi-purpose connector for the disk unit in order to confirm that the disk unit has been properly connected, testing the operation capabilities of the disk unit for various types of diskettes while having the disk head proceed to read-out, write-in, and seek on each track of the diskettes in various movement modes, and having the disk unit perform eject and format functions to ensure normal operation of each function by the disk unit.

Abstract: A method for determining crook potential of wood is described. One embodiment comprises nondestructively obtaining lengthwise shrinkage rates (from a third party or by direct measurement) of wood and then determining crook potential of the wood based on the lengthwise shrinkage rates. Where the wood comprises lumber, lengthwise shrinkage rate measurements typically are made on at least one major planar surface of the lumber. The method typically comprises determining lengthwise shrinkage rates two or more measuring points separated by a predetermined distance, such as at substantially one-foot intervals along the lumber. Particular embodiments of the present invention determine lengthwise shrinkage rates using infrared radiation, microwave radiation, electricity, ultrasound energy, and combinations thereof Working embodiments of the method use ultrasound energy to determine lengthwise shrinkage rates.

Abstract: A method for determining warp potential of wood. One embodiment comprises nondestructively obtaining lengthwise shrinkage rates and grain angles of wood—such as trees, logs, or lumber—then determining warp potential of the wood based on the lengthwise shrinkage rates and grain angles. The method typically comprises measuring plural lengthwise shrinkage rates and plural grain angles to determine warp potential. Where the wood comprises lumber, lengthwise shrinkage rate and grain angle measurements typically are made on at least one major planar surface of the lumber at at least two measuring points separated by a predetermined distance, such as at substantially one-foot intervals along the lumber. Particular embodiments of the present invention determine lengthwise shrinkage rates using electromagnetic energy, acoustic energy, and combinations thereof. Working embodiments of the method use ultrasound energy to determine lengthwise shrinkage rates and grain angles.

Abstract: A system and method for generating a desired acoustic frequency content in a laser-generated ultrasonic wave emitted from a target in response to a laser pulse. The method includes generating a generation laser pulse using a laser source. An optimal wavelength &lgr;0 for the generation laser pulse is determined using a computer. The optimal wavelength data is determined from material-specific, empirically calculated data stored in a storage device that is accessible to the computer. An optimal laser pulse is generated by shifting the generation laser pulse to the optimal wavelength &lgr;0. The optimal laser pulse is directed to the target to generate the laser-generated ultrasonic wave with the desired frequency content.

Abstract: The present method of processing spectral data calculates the first to fourth derivative spectra of an original spectrum with respect to the wavenumber and creates a two-dimensional representation by plotting coordinates consisting of the derivative values of some order as their abscissas and the original spectral values or derivative values of another order different from that order as their ordinates. In this two-dimensional plotting, maximal points, minimal points, maximal slope points (inflection points) and the like are clearly represented, so that a great amount of accurate feature information about the analyzed object can be easily obtained.

Abstract: A computer implemented software device for estimating background tilt and offset is disclosed to preferably be adaptable to an optical measurement instrument wherein the estimated parameters are resolved to generate a reference plane to be subtracted from a height map of a phase profile. A set of histograms of heights is used to develop a merit function. A two-dimensional high speed iterative search is used to optimize the merit function to generate a reference plane coincident with the spatial tilt of the phase profile. The invention enables real-time measurement of substrate height for preferred use in high-speed image processing operations relating to circuit-board production lines.

Abstract: An electroconductive roller which is to be installed in an image forming apparatus is provided with a core, a roller body which includes an elastic member having conductivity, and is provided on the outer circumference of said core, and an electroconductive coating layer covering an outer circumferential surface of said roller body. When glossiness of said coating layer is measured, a difference between common logarithms of a maximum value and a minimum value of measurement values is less than 0.1.

Abstract: A material to be cut has a face to be cut with a cutting tool, and a cutout which temporarily brings the cutting tool into a noncontact state. Images of the cutting tool during the period when it attains an exposed state by passing over the cutout are captured with a camera mechanism at an interval of a predetermined delay time .tau.. A plurality of image information items obtained by these capturing operations include temperature change information of each location as the cutting tool gradually passes from the point of instant when it enters the cutout. Therefore, the image information items are arranged in relation to the exposure time from the point of instant, and a two-dimensional temperature distribution of the cutting tool at the point of instance is computed according to the tendency of change in image information.

Abstract: The present invention relates to a laser irradiating device and a target device, and particularly to a laser irradiating device capable of performing remote control without using a radio remote controller. A plurality of reflective pattern members are prepared wherein combination reflective members respectively composed of reflective portions A for storing the direction of polarization and reflecting it, and polarizing-direction conversion reflective portions C for converting the direction of polarization and reflecting it are arranged. The combination reflective members of the individual reflective pattern members are respectively made different in arrangement from one another. Further, the reflective pattern member corresponding to a command to be transferred to the laser irradiating device reflects identification reflected light corresponding to the command onto the laser irradiating device, whereby the laser irradiating device can be remote-controlled.

Abstract: A screening device (3) for screening exterior light (2) which illuminates a room (1), is controlled such that in the room on the one hand, user comfort with regard to freedom from dazzling and room temperature is optimal and, on the other hand, energy consumption for artificial lighting within the room or for heating and cooling the room is minimized.

Abstract: A solder joint inspection process and system includes using a correlation values to classify the shape of the solder joint. The solder joint is illuminated by a multiple colors, and the image of the solder joint is captured. This multiple color image is then converted into a plurality of one-dimensional vectors. Each one-dimensional vectors sequence is for one color of the multi-color illumination and for a one-dimensional spatial extent. Correlation values among all combinations of the one-dimensional vector sequences are computed and used for training an automatic solder joint shape classifier.

Abstract: A sensor detects the presence or the absence of an obstacle by radiating a laser beam to the outside of a casing through a light projecting mirror and by letting the reflected light from an obstacle enter a light receiving element through a light receiving mirror. A light projecting window with a light projecting mirror positioned and a light receiving window with a light receiving mirror are positioned in the casing with a space therebetween to prevent reflected light from directly entering the light projecting window. The mirrors are attached to a rotation shaft of a motor, or rotation shafts of motors, synchronously rotatable provided between both mirrors. The optical axis of light radiated to the outside of the casing is set to face in a higher direction than horizontal to radiate in a cone-shaped form.

Abstract: A pattern data processor system is disclosed that comprises a pattern storage device for storing pattern data, a Redundant Array of Independent Disks (RAID) pattern memory buffer for receiving and temporarily holding the pattern data from the pattern storage device, a shape processor for processing and decoding the pattern data, a shape divider, and a shape generator for generating a shape from the decoded pattern data. The shape processor comprises a programmable gate array device (FPGA) that dynamically decodes different pattern data formats with different decoding schemes, allowing for high speed processing. A Previous Output Shape (POS) Register is also disclosed, which uses information from previous shapes to decompress new shapes, thus allowing for variable length macro and pattern data, and conserving disk space.