Abstract: A device for recognizing particles in milk comprising a measuring surface and a housing. The measuring surface is structured so as to cause the milk to spread on the measuring surface in that the measuring surface has a specific surface roughness.

Abstract: A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning over a storage medium. The probe comprises a spring cantilever being during operation of the probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex and an actuator for lateral positioning of the tip.

Abstract: A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively heats the probe tip to a preselected temperature that is sufficient to cause a portion of the substrate in contact with the probe tip to decompose.

Abstract: A measurement method of a scanning probe microscope including a first approach operation adjusting an operation position of a fine positioning unit to near a maximum extension amount and ending the approach by coarse positioning, a first measurement operation making the probe scan the surface for measurement in a close probe state based on the first approach operation to obtain relief information of the sample surface, a positioning operation positioning the probe at a recessed part based on the relief information obtained by the first measurement operation, a second approach operation making the probe again approach the surface at a position determined by the positioning operation, adjusting an operation position of the Z-axis fine positioning device to close to a maximum extension amount, and ending the repeated approach, and a second measurement operation making the probe scan the surface for measurement in a close probe state based on the second approach operation to obtain relief information of the sampl

Abstract: a digital system for controlling the quality factor in a resonant device. The resonant device can be any mechanically driven resonant device, but more particularly can be a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to avoid noise effect in the analog components. One of the controls can use a direct digital synthesizer implemented in a way that provides access to the output of the phase accumulator. That output is a number which usually drives eight lookup table to produce a cosine or sign output wave. The output wave is created, but the number is also adjusted to form a second number of the drives a second lookup table to create an adjustment factor. The adjustment factor is used to adjusts the output from the cosine table, to create an adjusted digital signal. The adjusted digital signal than drives a DA converter which produces an output drive for the cantilever.

Abstract: An apparatus and method for improving the precision of nanoscale force and/or displacement measurements using electro micro metrology (EMM).

Abstract: A system that includes an optical subsystem and an atomic force microscope probe is provided. The optical subsystem is configured to generate positional information about a location on a surface of the specimen. The system is configured to position the probe proximate the location based on the positional information. One method includes generating positional information about a location on a surface of a specimen with an optical subsystem. The method also includes positioning an atomic force microscopy probe proximate the location based on the positional information. Another system includes an optical subsystem configured to measure overlay of a wafer using scatterometry. The system also includes an atomic force microscope configured to measure a characteristic of a feature on the wafer. An additional method includes measuring overlay of a wafer using scatterometry. The method also includes measuring a characteristic of a feature on the wafer using atomic force microscopy.

Abstract: A scanning probe microscope provided with a cantilever 21 having a probe 20 facing a sample 12, a measurement unit 24 measuring a physical quantity occurring between the probe and sample, and movement mechanisms 11, 29 changing a positional relationship between the probe and sample to cause a scanning operation and making the probe scan the surface of the sample by the movement mechanism and measure the surface of the sample by the measurement unit.

Abstract: An apparatus for measuring surface texture causes a probe to trace a surface of a workpiece to detect contact between a tip provided on the tip of the probe and the surface of the workpiece and measures surface texture of the workpiece. The apparatus for measuring surface texture includes: a path division unit dividing a path along which the tip is moved into a plurality of sections between the starting point and the ending point of the path; a moving velocity calculation unit calculating a moving velocity of the tip in sequence from the starting point to the ending point for each of the plurality of sections, based on the path information for each of the plurality of sections; and a stylus movement control unit moving the tip in a section for which a moving velocity has been calculated at the moving velocity calculation unit.

Abstract: The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) to perform sample measurements using a survey scan that is less than five lines, and more preferably two lines, to accurately locate a field of features of a sample. This is accomplished by selecting a step distance between adjacent lines of the survey scan that does not equal the pitch of the features in a direction orthogonal to the direction the survey scan traverses, i.e., does not equal the pitch of the features in the scan direction, XPO. The aspect ratio of the scans can also be modified to further improve sample throughput.

Abstract: A phase feedback AFM (atomic force microscope) and method for the phase feedback AFM. A cantilever is driven to oscillate at a constant frequency close to the resonance frequency of the cantilever by a driving signal. The distance between the probe and the sample is controlled such that the phase difference between the driving signal and a cantilever deflection signal indicating deflections of the cantilever is kept constant. The phase feedback AFM has an amplifier-controller for receiving the cantilever deflection signal, the output from an oscillator for driving the cantilever into oscillation, and a signal representing a reference amplitude of oscillation of the cantilever. The phase feedback AFM further includes a feedback circuit which receives the output from the amplifier-controller which controls the cantilever deflection signal to a preset amplitude.

Abstract: Implementations of the present invention relate to a scanning probe microscope, which includes a base frame to which a probe holder with a probe as well as a probe support are, or can be fixed. The probe and the sample mount can be moved relative to one another in order to obtain information about the surface of the sample by scanning a sample which is arranged on the sample mount. Furthermore, a reaction chamber can be attached to the base frame of the scanning probe microscope, with the sample mount arranged therein. The reaction chamber has an opening on its side facing the probe, through which the probe can enter the reaction chamber. The reaction chamber can enable treatment of the sample's surface by the specific influence of fluids within the reaction chamber when the reaction chamber is closed.

Abstract: The invention concerns a microscopic system with atomic force, comprising a probe tip placed on one end of a lever arm (2), oscillating means (1) a to oscillate said probe tip substantially based on the fundamental frequency of said lever arm, said system including control means (7) for controlling said oscillating mean to vary the oscillation frequency of said tip based on a plurality of harmonics of said lever arm. The invention is characterized in that said control means comprise an input receiving a parameter representing an operating threshold of said system, to vary the oscillation frequency of said tip based on at least one harmonic of said lever arm when said signal corresponds to a state of said system higher than said operating threshold.

Abstract: A scanning probe apparatus includes a measurement probe tip and an auxiliary probe tip that is movably positionable with respect to the measurement probe tip. The measurement probe tip and the auxiliary probe tip may be positioned juxtaposed, so that an electrical discharge may be effected between the measurement probe tip and auxiliary probe tip to remove a contaminant from the measurement probe tip. The auxiliary probe tip may be integral with a sample support plate within the scanning probe apparatus.

Abstract: An atomic force microscope and a method for detecting interactions between a probe and at least one sensed agent on a scanned surface is provided. The microscope has a scanning probe with a tip that is sensitive to a property of said scanned surface; a nucleic acid aptamer tethered to the tip of the probe; and a device for simultaneously recording the displacement of said probe tip as a function of time, topographic images, and the spatial location of interactions between said probe and the at least one sensed agent on said surface.

Abstract: The present invention provides a method of using an accurate three-dimensional shape without damaging a sample by making a probe contact the sample only at a measuring point, lifting and retracting the probe when moving to the next measuring point and making the probe approach the sample after moving to the next measuring point, wherein high frequency/minute amplitude cantilever excitation and vibration detection are performed and further horizontal direction excitation or vertical/horizontal double direction excitation are performed to improve the sensitivity of contacting force detection on a slope of steep inclination. The method uses unit for inclining the probe in accordance with the inclination of a measurement target and a structure capable of absorbing or adjusting the orientation of the light detecting the condition of contact between the probe and sample after reflection on the cantilever, which varies a great deal depending on the inclination of the probe.

Abstract: A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 ?m.

Abstract: A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution.

Abstract: An interfacial force microscope includes a differential-capacitance displacement sensor having a tip mounted on an oscillating member. The sensor generates displacement signals in response to oscillations of the member. A scanner is adjacent the sensor and supports a sample to be imaged. The scanner is actuable to move the sample relative to the sensor to bring the tip into intermittent contact with said sample as the member oscillates. A controller is in communication with the sensor and the scanner. The controller includes a sensor feedback circuit receiving the displacement signals and an AC setpoint signal. The AC setpoint signal has a frequency generally equal to the frequency at the peak of the displacement versus frequency curve of the sensor. The output of the sensor feedback circuit is applied to the sensor to oscillate the member. The controller also provides output to the scanner in response to the displacement signals to control the separation distance between the sensor and the sample.

Abstract: Probe tips comprising tips and coatings are described. The tips and coatings may be selected to provide various probe-tip features, including, but not limited to, high reproducibility, high reliability, low cost, ultra-sharpness, high conductivity and/or simultaneous critical dimension imaging and sidewall roughness analysis.

Abstract: In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a microelectromechanical system (MEMS) actuator may be determined in-situ using a frequency resonance method.

Abstract: In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a characteristic of the beam.

Abstract: An atomic force microscope and a method for detecting interactions between a probe and two or more sensed agents on a scanned surface and determining the relative location of two or more sensed agents is provided. The microscope has a scanning probe with a tip that is sensitive to two or more sensed agents on said scanned surface; two or more sensing agents tethered to the tip of the probe; and a device for recording the displacement of said probe tip as a function of time, topographic images, and the spatial location of interactions between said probe and the two or more sensed agents on said surface.

Abstract: An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.

Abstract: A scanning probe microscope (SPM) based measuring technique for measuring surface features of a sample fits a curve to a family of feature edge points acquired as a result of an SPM scan of the surface feature. If two curves are fit on opposed edges of the feature of interest, the maximum or minimum distance between those curves can be determined to ascertain a dimension of interest such as a maximum via width, a minimum line width, etc. The scan is preferably a relatively low-resolution scan in the Y direction, typically having 8-12 scan profiles passing through the feature of interest low-resolution, which is about half that typically used by prior techniques. The low-resolution scan can be performed relatively rapidly and with high repeatability. Repeatability is also higher than with prior techniques, and the level of repeatability is relatively insensitive to the resolution in the Y direction.

Abstract: A lapping system for lapping portions of a workpiece. The lapping system includes, a lap that is defined by a surface. Portions of the surface are a lapping surface. The lapping surface has a coating that enhances material removal from a workpiece in a lapping process. The lapping system further includes, a scanning probe microscope having a tip and a substrate. The scanning probe microscope controls lapping motion of the lap and workpiece.

Abstract: The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures.

Abstract: The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips of different geometries or orientations to scan a feature, such as a semiconductor line or trench, and to display the scan data such that tip artifacts from each tip can be omitted from the measurement by data from the other tips.

Abstract: A cryogenic variable temperature scanning tunneling microscope of novel design and component configuration, for use in conjunction with a variety of low temperature methodologies.

Abstract: A focused ultrasound transducer includes a first ultrasonic emitter and at least one metallic ultrasonic lens acoustically coupled thereto. The emitter generates ultrasonic energy that propagates along a beam path projecting therefrom. The at least one metallic ultrasonic lens is positioned at least partially in the beam path so that it can direct (e.g., focus, defocus, and/or collimate) in at least one direction (or along at least one plane) at least some of the ultrasonic energy propagating from the emitter. The metallic lens may be formed by extrusion, by molding (e.g., diecast molding or thermoforming), or by sintering (e.g., powder metallurgy). The metallic lens also advantageously functions as a heat sink, improving thermal performance of the ultrasound transducer.

Abstract: Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.

Abstract: A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.

Abstract: An improved nanomanipulation system is provided for performing nanomanipulation operations in relation to a sample surface. The system includes: an atomic force microscope having a probe for performing nanomanipulation operations on the sample surface, where the probe includes a cantilever having a layer of piezoelectric material; a position detector configured to ascertain deformation of the cantilever during a nanomanipulation operation; and an adaptable end effector controller adapted to receive data indicative of the deformation from the position detector and implements a control scheme based on the deformation data. The control scheme produces a control signal that is applied to the piezoelectric material of the cantilever, thereby maintaining the straight shape of the cantilever during the nanomanipulation operation.

Abstract: A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.

Abstract: An object of the present invention is to suppress measurement errors caused by the fact that the shrink amount due to scan of an electron beam differs pattern by pattern. To accomplish this object, according to the invention, functions indicative of a process of change of pattern dimension when the electron beam is irradiated on a sample are prepared in respect of the kinds of sample patterns, and dimension values of a particular pattern measured by scanning the electron beam on the particular pattern are fitted to a function prepared for the particular pattern to calculate a dimension of the particular pattern before it changes.

Abstract: A template (10) for assisting cover design has a decorative surface (12). The decorative surface includes a curved portion (121) and an essentially flat portion (122) around the curved portion. The flat portion has a plurality of slots (124) formed therein and is divided into several sections by the slots. Each section has been processed to have a characteristic texture. Each texture within a given section is different from that of any other one of the sections.

Abstract: A scanning probe microscope has a self-detection type probe structure including a cantilever having an electrically conductive probe at a distal end thereof, a supporting part, and a piezoresistance element whose resistance value changes depending on the deflection of the cantilever. A detector applies a predetermined voltage to the piezoresistance element and detects the value of the current passing through the piezoresistance element to detect deflection of the cantilever. A sample table mounts a sample such that a surface of the sample confronts a tip of the probe, and a moving mechanism relatively moves the sample table and the probe tip in X, Y and Z directions. A controller controls the moving mechanism to maintain a fixed distance between the probe tip and the sample surface and measures the surface shape of the sample on the basis of the detection result of the detector.

Abstract: An atomic force microscope based apparatus for examining a sample includes a cantilever having a cantilever arm and a probe tip where the probe tip is offset laterally from a longitudinal axis of torsion of the cantilever arm, an oscillator that drives the cantilever into oscillation in a flexural mode to cause the probe tip to repeatedly interact with the sample where the tip-sample interaction of the laterally offset probe tip excites torsional motion of the cantilever, and a detection system that detects torsional motion of the cantilever in response to the tip-sample interaction.

Abstract: A method and apparatus for analysis of a sample. The method includes an accessing operation for accessing a region of the sample via a tip of at least one probe mounted on a cantilever. A removing operation removes a sample material from the region that is accessed by the tip of the at least one probe mounted on the cantilever. A sensing operation senses a parameter associated to the removal of the sample material in the removing operation. The accessing, removing, and sensing operations are repeated to facilitate removal of at least one layer of the sample.

Abstract: A substitute reference signal input is incorporated into a state space controller for a scanning probe microscope to improve tracking efficiency.

Abstract: An atomic force microscope sensing structure includes a substrate, a flexible membrane and an actuating element. The flexible membrane has a first end that is clamped to the substrate and an opposite second end that is clamped to the substrate. A central portion of the membrane and the substrate define a first gap width therebetween. A peripheral portion of the membrane and the substrate define a second gap width therebetween. The first gap width is different from the second gap width. The actuating element is disposed at least adjacent to the first end and the second end and is configured to displace the membrane relative to the substrate.

Abstract: A magnetic resonance force microscope (MRFM) generator for producing an RF magnetic field uniformly over the whole of a sample. A cantilever with magnetic probe tip is self-excited. Under this condition, spins in the sample are controlled to produce a magnetic resonance force. A frequency demodulator measures the resonant frequency of the cantilever from the output detection signal from a cantilever displacement-measuring instrument based on the magnetic resonance force.

Abstract: Method for determining a specific property of a rotating body, including measuring using a measuring method in which the signal obtained is composed of N properties, the property to be determined being contained therein, measuring using at least one other measuring method, in which the signal obtained or the signals obtained is or are composed of only some of the N properties, and determining the specific property from the measured signals obtained.

Abstract: A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the outside, thus allowing the tip end to be used as a probe needle end for detecting signals. A coating film is formed to cover all or part of the surface of this base end portion, and the nanotube is thus firmly fastened to the cantilever. Since the base end portion adheres tightly to the palladium covering film, both of them are electrically continuous. This palladium covering film allows, as an electrode film, the application of a voltage to the nanotube or the passage of an electric current through the nanotube, showing also good adhesion to the nanotube and cantilever.

Abstract: In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance over a selected portion of the gap, the change in distance at the selected portion orienting a probe tip of the force sensor for multi-directional measurement.

Abstract: In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ by application of a force to the scanning probe microscope cantilever.

Abstract: A method and system for identifying a defect or contamination on a surface of a sample. The system operates by detecting changes in work function across a surface via both vCPD and nvCPD. It utilizes a non-vibrating contact potential difference (nvCPD) sensor for imaging work function variations over an entire sample. The data is differential in that it represents changes in the work function (or geometry or surface voltage) across the surface of a sample. A vCPD probe is used to determine absolute CPD data for specific points on the surface of the sample. The combination of vibrating and non-vibrating CPD measurement modes allows the rapid imaging of whole-sample uniformity, and the ability to detect the absolute work function at one or more points.

Abstract: A surface scan measuring device, a surface scan measuring method, a surface scan measuring program and a recording medium storing such a program which can appropriately adjust the scanning speed, the sampling pitch and other measurement parameters according to the surface condition of a workpiece are provided. The surface scan measuring device includes a radius of curvature computing section (543) for computing the radius of curvature of the scanning point from the measurement data acquired during the ongoing scanning operation, a moving speed deciding section (544) for deciding the moving speed of the scanning probe according to the computed radius of curvature and a sampling pitch deciding section (546) for deciding the sampling pitch according to the computed radius of curvature.

Abstract: A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning over a storage medium. The probe comprises a spring cantilever being during operation of the probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex and an actuator for lateral positioning of the tip.

Abstract: Systems and methods for detecting presence of a coating on an item such as a magnetic head. Points on a surface of the item are contacted with an electrically conductive object. A determination may be made as to whether an electrical connection is made between the electrically conductive object and one or more of the points on the surface of the item, an extent of an electrical connection made between the electrically conductive object and any of the points on the surface of the item, etc.