Abstract: A probe device comprises a cantilever comprising a probe allocated to be opposed to a surface of a sample, means for feeding back a vibration amplitude value of the cantilever, thereby self-exciting and vibrating the cantilever at a predetermined frequency, means for applying a bias to the sample or the probe, and means for measuring a frequency shift caused by a charge-transfer force which acts between the cantilever and the sample.

Abstract: Disclosed is a novel scanning-probe type atomic force microscope wherein false deflection of the probe is reduced. The probe of the scanning-probe type atomic force microscope moves in both the horizontal direction and the vertical direction during the scanning, while the sample is kept in order to reduce the false deflection brought to the probe due to the scanning motion, two approaches are adopted. The first is to have a focused laser spot tracking an invariant point on the probe's cantilever, which moves three-dimensionally during the scanning. The second approach is to have the laser beam, which is reflected from the moving cantilever, hitting an invariant point of the PSD, when the sample is distanced from the probe and induces no deflection.

Abstract: A surface analysis apparatus and a method for compensating for mechanical vibrations and drifts in a surface analysis instrument are disclosed. A probe that is sensitive to the distance between the probe and a sample surface provides a probe signal. The probe signal contains information about the surface properties and noise due to changes in the probe-surface distance. A sensor measures a displacement between a probe and the sample surface. The sensor is substantially insensitive to the surface properties measured by the probe. The displacement measurement can be used to compensate for the noise in the probe signal.

Abstract: An atomic force microscope probe provides an indentation testing function in a direction along an axis. The probe has a tip and an arm structure holding the tip. The arm structure has one end mounted on a fixed stage, the other end coupled to the AFM tip, and a hollow frame having a shape symmetric with respect to a plane including an axis on which the two ends are positioned.

Abstract: Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanisms are fixed to the base and the motion stage, respectively. Each of the first to third feeding mechanisms has a piezo actuator and two elastic hinges provided at both sides of the piezo actuator. Each of the fourth to sixth feeding mechanisms has a piezo actuator, three hinge members, and a lever member with a notch hinge which operatively cooperates with the hinge members.

Abstract: A rough road detection system includes a collection module, a statistical module, and a comparison module. The collection module collects samples from a vibration sensitive signal. The statistical module removes a periodic anomaly from the samples and removes a random anomaly from the samples with a filter having a filter coefficient based on an engine speed signal. In addition, the statistical module calculates a statistical signal based on the samples. The rough road detection system also includes a derivative module that calculates a first and second derivative based on a rate or time. The derivative module removes negative derivatives when the derivatives are calculated with respect to the rate and positive derivatives when the derivatives are calculated with respect to time. The comparison module determines whether a rough road condition exists based on the statistical signal or the first and second derivatives.

Abstract: A laser device includes a target position, an optical component separated a distance J from the target position, and a laser energy source separated a distance H from the optical component, distance H being greater than distance J. A laser source manipulation mechanism exhibits a mechanical resolution of positioning the laser source. The mechanical resolution is less than a spatial resolution of laser energy at the target position as directed through the optical component. A vertical and a lateral index that intersect at an origin can be defined for the optical component. The manipulation mechanism can auto align laser aim through the origin during laser source motion. The laser source manipulation mechanism can include a mechanical index. The mechanical index can include a pivot point for laser source lateral motion and a reference point for laser source vertical motion.

Abstract: There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.

Abstract: A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe 21 is vibrated while moved to the vicinity of an atomic force region on a specimen surface. The position of the probe is measured when a specified atomic force is detected in the atomic force region. The probe is then moved away from the specimen surface. A servo system for maintaining a gap between the probe and specimen surface is stopped. The probe is moved to a measurement point along the specimen surface while kept away from the specimen. The vibration frequency is a frequency slightly offset from the cantilever resonance point. The atomic force is detected based on the vibration amplitude of the cantilever.

Abstract: An optical microcantilever capable of reducing loss when propagating light. An optical microcantilever 10 comprises a support 1, an optical waveguide 2, a light-blocking film 3, a reflecting film 4, a pointed tip 5, a microscopic aperture 6 formed at the end of the tip 5, and a mirror 7 for reflecting propagating light H propagated from a light input/output end 8 of the optical waveguide 2 towards the microscopic aperture 6.

Abstract: A method of amplitude modulated electrostatic polymer nanolithography providing rapid creation of features in a polymer film is disclosed. The nanolithography method of the present invention generates features by mass transport of polymer within an initially uniform, planar film via localized softening of attoliters (102-105 nm3) of polymer by Joule heating enabling high data densities upon the surface of the polymer. This localized Joule heating is accomplished by current flow between the cantilever AFM tip and a conductive wafer upon which the layer of polymer is grown or mounted.

Abstract: A method for producing probes for atomic force microscopy comprises producing, on a surface of one side of a semiconductor substrate, one or more moulds for the production of one or more probe tips. One or more probe configurations and at least one set of a probe tip and a cantilever are also produced on the side of the substrate, wherein each configuration comprises a contact region for attachment of a holder. The surface area of each contact region is smaller in size than the surface area of the holder. The method further includes attaching one or more holders to the contact region(s), and releasing the probe configuration and the holder from the substrate by under-etching the probe configuration from the side of the substrate on which the probe configuration is produced.

Abstract: Evanescent wave scattering by a scanning probe in a scanning probe microscope is utilized to determine and monitor separation between a scanning probe and a sample. A laser light is totally internally reflected at the interface between a more optically dense (incident) medium and less optically dense (transmitting) medium, exciting a decaying evanescent field in the less optically dense medium. A scanning probe, such as a colloidal probe, is dipped into the evanescent field, which scatters off the scanning probe. The portion of the scattered field propagates back into the incident medium and is then detected by a detector. A dependency between the intensity of the scattered evanescent field and the separation between the probe and the incident medium was measured and used in determining the separation. This dependency of intensity is used to prepare images or maps of interfaces. A particular application of determining the separation between the probe and the sample in an atomic force microscope is disclosed.

Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.

Abstract: A system for inspecting a pattern shape operates to detect secondary electrons from a specimen by irradiation of a focused electron beam and perform arithmetic processing on this detected signal. The detected signal waveform is divided into a plurality of regions on the basis of a variation of the signal quantity. The size of the divided regions is used for quantitative evaluation of a three dimensional shape of the specimen. This system, especially by displaying measurement results of the pattern shape for each divided signal waveform (bottom width in the final shape, resist bottom width, etching shift quantity, and etching slope-angle component by the exposure), permits an easy check on which a component varies and how the component varies in all shape variations. With this arrangement, a pattern cross section information effective in determining etching process conditions can be acquired using images by an in-line SEM capable of nondestructive observation.

Abstract: A method of measuring the shape of a glass sheet is provided. The method includes positioning the glass sheet in contact with a fluid and measuring the distance between a sensor and a surface of the glass sheet at a plurality of locations on the surface thereof. The method may further include deconvolving the shape of the glass sheet into at least one simple shape element, such as cylindrical or spherical, and may further include varying the temperature profile of an array of heaters in a glass manufacturing process based on the at least one shape element.

Abstract: There are provided a cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers (3) sliding on a surface (2) of a sample (1).

Abstract: A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members each having extensible and retractable distal ends. The distal ends extend or retract substantially simultaneously in response to a signal from a detector thus balancing the momentums of the first and second members and reducing the net momentum of the probe holder to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.

Abstract: An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness elements, and a second surface facing opposite from the first surface and having second topographical features, such as protruding conductive structures. In one embodiment, the apparatus can include a support member configured to carry the microelectronic substrate with a first portion of the first surface exposed and a second portion of the second surface exposed. The apparatus can further include a topographical feature detector positioned proximate to support member and aligned with the first portion of the first surface of the microelectronic substrate to detect characteristics, such as a roughness, of the first surface while the microelectronic substrate is carried by the support member.

Abstract: Adhesive compositions and a method for selecting adhesive compositions are disclosed herein. Preferred adhesives generally have small domains and/or a homogeneous domain distribution. The method of selecting adhesives is based on size and distribution of the domains.

Abstract: The present invention discloses a front-wing cantilever for the conductive probe of electrical scanning probe microscopes, wherein two symmetrical front wings are installed to extend from two lateral sides of the front end of the cantilever so that those two front wings are positioned on two lateral sides of the conductive tip. The front-wing structure of the cantilever can effectively inhibit the optical perturbation in the electrical scanning probe microscopes and obviously promote the analysis accuracy thereof. The front-wing structure can provide the scanned region with an effective dark field lest the optical absorption appears in the scanned region of semiconductor specimen and inhibit the optical perturbation occurs during the measurement and analysis of the differential capacitance.

Abstract: We disclose an apparatus and method for detecting probe-tip contact with a surface, generally inside a focused ion-beam instrument, where the probe tip is attached to a capsule, and the capsule is movably secured in a probe shaft. There is a fiber-optic cable having a first end and a second end; a beam splitter having first and second output ports; and a light source connected to the beam splitter. The first output port of the beam splitter is connected to the first end of the fiber-optic cable, and the second output port of the beam splitter is connected to a photodiode. The second end of the fiber-optic cable has a mirror for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable and onto the capsule, so that the intensity of the light reflected back from the capsule through the fiber-optic cable is proportional to the deflection of the capsule as the probe tip makes contact with the surface.

Abstract: A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.

Abstract: A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in a shape of comb-teeth and being electrically connected to one another, a capacitor dielectric layer covering the plurality of fixed charge plates, a movable charge plate structure spaced apart from the capacitor dielectric layer, and arranged on the plurality of fixed charge plates, wherein the movable charge plate structure includes a plurality of movable charge plates arranged corresponding the plurality of fixed charge plates, and an actuator connected to the movable charge plate structure allowing the movable charge plate structure to move in a horizontal direction.

Abstract: Methods and apparatus are disclosed for nanomachining operations. Excitation energy settings are provided to minimize machine induced scan cutting. Cut operations can be operated in a feedback mode to provide controlled cutting operations. Measurement and sweep techniques to facilitate nanomachining operations are disclosed.

Abstract: An apparatus capable of tracking a sample surface level in a z direction and oscillating a cantilever at resonant frequency by using a frequency separation scheme in non-contact mode and method thereof. The inventive apparatus includes a sensing unit for sensing a sample surface; a frequency transforming unit for transforming the sensed signal; a frequency combining unit for combining signals; and an actuating unit for actuating the sensing unit.

Abstract: The present invention provides a method for the selective growth of single carbon nanotubes (CNT) on the tip apex of a conventional cantilever. Selective CNT growth is established by coating the backside of a cantilever, having a through-hole at a tip apex, with a catalyst material followed by a cover layer. The exposed catalyst at the bottom of the hole at the apex of the cantilever induces growth of a single CNT at this location.

Abstract: Information is collected from a region of interest using a scanning probe microscope having a tip by moving the tip along at least one predefined path extending from a center location to a peripheral location in the region of interest and collecting information using the tip at a plurality of sample points along the at least one predefined path. The predefined path may be based on a radial line defined between the center location and the peripheral location, and may follow a zig-zag, sinusoidal, constant-curve, rectangular trajectory generally tracking the radial line.

Abstract: A slider-disk interface tester for measuring the friction force at the interface uses a “negative-pitch” slider in contact with a rotating disk. The tester includes a base that supports a motor for rotating the disk and an actuator for supporting the slider and moving it to a desired radial location on the disk surface. The slider is connected to the actuator by a rigid arm and a suspension like the suspension used in disk drives. When the disk is rotating, the negative-pitch slider has its upstream or leading portion in contact with the disk surface and its downstream or trailing portion not in contact with the disk surface. A contact pad is located at the leading portion of the slider and is in contact with the disk surface. The tester includes a friction-force sensor and associated measurement circuitry, such as strain gauge, piezoelectric and temperature sensors, and is located at one of several locations on the rigid arm, suspension or slider.

Abstract: A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180° out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.

Abstract: A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.

Abstract: An optical observation image obtained through an objective lens is displayed on a display unit, and a marker indicating a position of a tip portion of a cantilever is displayed on the optical observation image displayed on the display unit.

Abstract: Nanotubes and nanotube-based devices are implemented in a variety of applications. According to an example embodiment of the present invention, nanotube tips are coated with metal. In some applications, the metal coating facilitates the resolution of nano-scale magnetic features, such as features smaller than about 20 nanometers. In another embodiment, such metal-coated nanotubes are implemented with magnetic force microscopy (MFM) applications and adapted for implementation with structures and arrangements exhibiting a high aspect ratio, facilitating quantitative analysis of MFM data.

Abstract: Conventionally, there is no method for quantitatively evaluating the three-dimensional shape of an etched pattern in a non-destructive manner and it takes much time and costs to determine etching conditions. With the conventional length measuring method only, it has been impossible to detect an abnormality in the three-dimensional shape and also difficult to control the etching process. According to the present invention, variations in signal amounts of an SEM image are utilized to compute three-dimensional shape data on the pattern associated with the etching process steps, whereby the three-dimensional shape is quantitatively evaluated. Besides, determination of etching process conditions and process control are performed based on the three-dimensional shape data obtained. The present invention makes it is possible to quantitatively evaluate the three-dimensional shape of the etched pattern in a non-destructive manner.

Abstract: A digital system for controlling the quality factor in a resonant device. The resonant device can be any mechanically driven resonant device, but more particularly can be a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to avoid noise effect in the analog components. One of the controls can use a direct digital synthesizer implemented in a way that provides access to the output of the phase accumulator. That output is a number which usually drives eight lookup table to produce a cosine or sign output wave. The output wave is created, but the number is also adjusted to form a second number of the drives a second lookup table to create an adjustment factor. The adjustment factor is used to adjusts the output from the cosine table, to create an adjusted digital signal. The adjusted digital signal than drives a DA converter which produces an output drive for the cantilever.

Abstract: In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (xc, zc) and the radius is “r”, and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.

Abstract: A touch sensor 10 having a stylus 12 with a tip 12A making contact with a test piece W has an operational control structure including an oscillator 3 which oscillates the stylus 12 in the axial direction; a detecting circuit 4 which detects changes of oscillation of the stylus 12; an adjustor unit 5 which removes noise added to an output signal from the detecting circuit 4; a fine motion mechanism controller 6 which controls the operation of a fine motion mechanism 21 in such a manner that the change of the quantity of state of the detection signal is maintained constant; and a PZT driver 7 which operates the fine motion mechanism 21. The measuring force during surface configuration measurement can be adjusted by adjusting an alternating signal to be applied to the touch sensor or by reducing the noise added to the detection signal without making modifications to a shape or structure of the touch sensor.

Abstract: The invention relates to the objectification of surface test methods through image processing. Information z(x, y) is measured and recorded for each image point (x, y) of the measuring field of an examined specimen surface, and resultant magnitudes are calculated therefrom. An objective correlation of these resultant magnitudes occurs with a scale of so far subjectively measured quality characteristic numbers of a characteristic of the examined specimen. A method for an objective evaluation of a bending edge of metal bands and for a wear test on metal bands is described in detail.

Abstract: A sensor for detecting mechanical perturbations represented by a change in an electrical signal includes a structure such as a cantilever, membrane, etc. and a field effect transistor such as a MOSFET embedded in the structure. The drain current of the embedded transistor changes with mechanical perturbations in the structure caused, for example, by a bio-chemical interaction being sensed. A scanning probe microscope utilizes the embedded MOSFET with a BiMOS actuator.

Abstract: The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.

Abstract: A system for selectively sensing and removing asperities from hard disk drive disk is disclosed. The system includes a test stand supporting the disk, the test stand having at least one suspension for flying over a surface of the disk. The system also includes a glide pad coupled to the at least one suspension for flying over the surface and locating asperities. A PZT sensor is coupled to the glide pad for sensing and mapping asperities on the surface of the disk. A burnish pad is coupled to the at least one suspension for wearing-away sensed and mapped asperities on the surface of the disk and a thermal fly height controller is coupled to the burnish pad for protruding the burnish pad when it is proximate to one of the mapped asperities for facilitating the wearing-away of the mapped asperity.

Abstract: A recognition force microscope for detecting interactions between a probe and a sensed agent on a scanned surface and methods for its operation are provided. The microscope includes a scanning probe having a tip that is sensitive to a property of the scanned surface, and the probe is adapted to oscillate with a low mechanical Q factor. Operation of the microscope includes recording the displacement of the probe tip as a function of time and simultaneously recording both topographic images and the spatial location of interactions between said probe and one or more sensed agents on the surface.

Abstract: The invention relates to a method for determination of the depth of depressions which are formed in a mount substrate. According to the invention, an essentially uniform layer of a wetting agent is applied, which contains depressions, on a surface of the mount substrate, a time profile of the decrease in weight of the mount substrate is recorded, and the recorded time profile of the decrease in weight of the mount substrate is evaluated. The invention also relates to a measurement apparatus.

Abstract: A method for selectively sensing and removing asperities from the surface of hard disk drive media is disclosed. A thermally controlled flying height burnish slider is flown on a test stand with its thermal flying height control deactivated. The burnish slider flies at a nominal flying height over the surface of the media to remove any existing loose particles from the surface. A glide slider coupled to a PZT sensor is then flown over the surface of the media, the PZT sensor head mapping locations of any asperities on the surface of the media. The thermal flying height controlled burnish slider is next flown over the surface of the media with the thermal flying height control activated. The thermal flying height control is actuated when a mapped location of an asperity on the surface is proximate to the burnish slider, causing the burnish slider to protrude, wearing off the asperity.

Abstract: Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An apparatus includes a cantilever structure including a substrate including a cantilever body, that optionally includes a doped layer, and a vertically aligned nanostructure coupled to the cantilever body.

Abstract: An optical microcantilever for a scanning near field microscope has an optical waveguide for propagating light. The optical waveguide has a longitudinal axis, a light input/output end, a free end opposite to the light input/output end, and a tip formed at the free end of the cantilever and having a microscopic aperture at an end thereof. A support section has a first portion supporting the optical waveguide, a second portion and a third portion. The second portion has an optical element guide channel formed in the support section for supporting an optical element acting on light entering the optical waveguide or on light exiting from the optical waveguide and for determining a position of the optical element. The third portion is disposed between the first portion and the second portion and has a surface disposed at an angle of inclination relative to the longitudinal axis of the optical waveguide.

Abstract: A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or molecule. A first resonant frequency is determined for the cantilever having the immobilized binding partner. Upon exposure of the cantilever to a solution that binds with the binding partner, the mass of the cantilever beam increases. A second resonant frequency is determined and the differential resonant frequency provides the basis for detecting the target cell or molecule. The cantilever may be driven externally or by ambient noise. The frequency response of the beam can be determined optically using reflected light and two photodetectors or by interference using a single photodetector.

Abstract: A non-contact apparatus and method for precision measurement of the surface characteristics of work rolls which are used in the manufacture of sheet steel and other sheet metal products. The apparatus and method can be used to accurately measure the parameters of crown, taper, Ra, PPI, traverse, chatter, body diameter, minor defects and inclusions of a steel work roll.

Abstract: The invention relates to a device and a method for maskless microlithography. Several microstructured cantilevers (2) are arranged in an array (26) and an actuator is integrated in each of the cantilevers (2) of the array (26). A power supply and control unit (24) is provided, said unit adjusting the distance of the cantilevers (6) relative to a surface (4) that is to be structured by means of an appropriate voltage. Every point of the needles (6) is connected to said power supply and control unit (24). In order to implement the inventive method, an array (26) with cantilevers, each of which carries a point of a needle (6), is brought into contact with a surface (4) to be structured in such a way that the points of the needles (6) are arranged close to the surface (4) to be structured.

Abstract: A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever have an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, the tip and cantilever members have active components to produce kinetic action, thus facilitating the utility of the probe assembly in various SPM applications.