Roughness Patents (Class 73/105)
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Publication number: 20080016953Abstract: The present invention relates to an AFM(atomic force microscope) cantilever including a field effect transistor(FET) and a method for manufacturing the same; and, more particularly, to a method for manufacturing an AFM cantilever including an FET formed by a photolithography process, wherein an effective channel length of the FET is a nono-scale. Therefore, The present invention can easily implement a simulation for manufacturing the AFM cantilever including he FET by accurately controlling the effective channel length. And also, the present invention can manufacturer the AFM cantilever including the FET having the effective channel ranging several tens to several hundreds nanometers by applying the low price photolithography device, thereby enhancing an accuracy and yield of the manufacturing process and drastically reducing process costs.Type: ApplicationFiled: December 21, 2006Publication date: January 24, 2008Applicant: KOREA ELECTRONICS TECHNOLOGY INSTITUTEInventors: Moon Suhk Suh, Jin-Koog Shin, Churl Seung Lee, Kyoung Il Lee
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Publication number: 20080021626Abstract: A system and a method for determining when to update a surface estimation value indicative of a condition of a roadway surface are provided. The method includes determining a front axle cornering force error value based on a predicted front axle cornering force value and a first front axle cornering force value. The method further includes determining a threshold yaw rate error value based on the front axle cornering force error value. The method further includes indicating that the surface estimation value is to be updated when a yaw rate error value is greater than the threshold yaw rate error value.Type: ApplicationFiled: July 18, 2006Publication date: January 24, 2008Inventors: Kevin A. O'Dea, Aleksander B. Hac, Todd A. Belvo
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Publication number: 20080011065Abstract: A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.Type: ApplicationFiled: July 12, 2006Publication date: January 17, 2008Inventors: Chanmin Su, Robert C. Daniels, Craig Prater
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Publication number: 20080011066Abstract: The present invention relates to various types of atomic force microscope (AFM) cantilevers formed by using a photolithography process and an etching process and a method for manufacturing the same, the AFM cantilever includes a handling unit made of a semiconductor substrate, a cantilever unit extendedly formed on a bottom surface of the handling unit in a shape of a rod, a probe unit formed in a shape of a vertically protruded peak by being extendedly formed on one side surface of the cantilever unit and a probe being in contact with a surface of an object to be analyzed by being formed on the peak of the probe unit. Therefore, the present invention has an advantage that the probe of several hundred nanometers can easily formed through a general photolithography process as well as it can easily obtain a natural resonance frequency of the designed cantilever by easily setting a thickness of the cantilever member.Type: ApplicationFiled: December 21, 2006Publication date: January 17, 2008Applicant: KOREA ELECTRONICS TECHNOLOGY INSTITUTEInventors: Moon Suhk Suh, Jin-Koog Shin, Churl Seung Lee, Kyoung Il Lee
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Publication number: 20080011064Abstract: A low voltage signal amplifying apparatus includes a probe device, an actuator providing relative motion between the probe device and the sample, and a transducer that generates a voltage signal indicative of a property of at least one of the probe device, the sample, and the actuator. A differential voltage to current converter receives a differential voltage signal from the transducer and generates a differential current signal to provide a balanced, differential, low impedance current mode amplified signal that can be readily carried over a signal transmission device.Type: ApplicationFiled: July 11, 2006Publication date: January 17, 2008Inventors: Carl Masser, Henry Mittel
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Publication number: 20080000292Abstract: In accordance with the invention, an estimator is used in the controller portion of a scanning probe microscope to provide precise position estimates of the probe tip which is controlled in the vertical direction by a microelectromechanical system (MEMS) actuator. The precise position estimates typically enhance the ability of the scanning probe microscope to follow the surface and typically provide improved measurements of the surface topography.Type: ApplicationFiled: June 30, 2006Publication date: January 3, 2008Inventor: Daniel Y. Abramovitch
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Publication number: 20080000291Abstract: A method and apparatus are provided for monitoring motion of a scanning probe microscope (SPM) actuator using an improved optical displacement sensor (ODS) including a light emitter, an intensifier, and a photodetector. One of these three devices, most preferably the intensifier, is preferably movable with the actuator and relative to the other two devices. The intensifier intensifies the light incident on the detecting face of the photodetector, increasing the sensitivity of the ODS and improving the ability of the SPM to translate the actuator in the desired manner. The photodetector preferably is a split diode or a quad diode photodetector. The light emitter includes at least a light source such as an LED and may additionally include an aperture that limits the light passing therethrough to that which contributes to the displacement signal, thereby reducing shot noise and increasing the signal-to-noise ratio.Type: ApplicationFiled: June 30, 2006Publication date: January 3, 2008Applicant: Veeco Instruments Inc.Inventor: Carl Masser
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Patent number: 7313948Abstract: An approach to detect when a cantilever loses interaction with a sample, thereby detecting when a portion of an image obtained using a cantilever is spurious is presented. An observer based estimation of cantilever deflection is compared to the cantilever deflection and the resulting innovation is used to detect when the cantilever loses interaction. The loss of interaction is determined when the innovation is outside of and/or below a threshold level.Type: GrantFiled: May 22, 2006Date of Patent: January 1, 2008Assignee: Iowa State University Research FoundationInventors: Murti V. Salapaka, Tathagata De, Pranav Agarwal, Deepak Ranjan Sahoo
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Patent number: 7309863Abstract: A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.Type: GrantFiled: June 19, 2006Date of Patent: December 18, 2007Assignee: Japan Science and Technology AgencyInventor: Hideki Kawakatsu
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Patent number: 7305869Abstract: The invention relates to scanning magnetic microscope which has a photoluminescent nanoprobe implanted in the tip apex of an atomic force microscope (AFM), a scanning tunneling microscope (STM) or a near-field scanning optical microscope (NSOM) and exhibits optically detected magnetic resonance (ODMR) in the vicinity of unpaired electron spins or nuclear magnetic moments in the sample material. The described spin microscope has demonstrated nanoscale lateral resolution and single spin sensitivity for the AFM and STM embodiments.Type: GrantFiled: April 11, 2005Date of Patent: December 11, 2007Assignee: U. S. Department of EnergyInventors: Gennady P. Berman, Boris M. Chernobrod
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Publication number: 20070277600Abstract: Method and apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.Type: ApplicationFiled: May 4, 2007Publication date: December 6, 2007Applicant: JEOL LTD.Inventors: Takeshi Nokuo, Jun Toyaba
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Publication number: 20070277599Abstract: Methods and apparatus for automatically determining a feedback setpoint for use in operating an atomic force microscope (AFM) are provided. The setpoint may be determined by modulating a feedback setpoint while monitoring for a change in a detector signal. In an effort to avoid tip damage and remain in non-contact, attractive mode during use, a setpoint just above a setpoint corresponding to a detected change in a parameter of the detector signal, such as an abrupt change in phase, may be used to operate the AFM.Type: ApplicationFiled: May 31, 2006Publication date: December 6, 2007Inventors: CHIKUANG C. WANG, YURI S. URITSKY, THAI CHENG CHUA
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Patent number: 7302832Abstract: A surface analysis device is disclosed for identifying molecules by simultaneously scanning nanocodes on a surface of a substrate. The device includes a scanning array that is capable of simultaneously scanning the nanocodes on the surface of the substrate and an analyzer that is coupled with the scanning array. The analyzer is capable of receiving simultaneously scanned information from the scanning array and identifying molecules associated with the nanocodes.Type: GrantFiled: December 29, 2003Date of Patent: December 4, 2007Assignee: Intel CorporationInventors: Andrew Berlin, Narayanan Sundararajan, Mineo Yamakawa, Valluri R. Rao
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Patent number: 7302833Abstract: A method for measuring high frequency force of interaction between a tip of a cantilever and a sample includes providing a cantilever having a cantilever arm and a probe tip formed on a free end of the cantilever arm where the cantilever arm has a first shape and an axis of torsion associated with the first shape and the probe tip is positioned in an offset displacement from the axis of torsion, vibrating the cantilever at or near the fundamental flexural resonance frequency with a predetermined oscillation amplitude, bringing the cantilever to the vicinity of the sample, tapping the surface of the sample repeatedly using the probe tip, and detecting changes in the amplitude or the phase of a high frequency vibration harmonic of the cantilever as the cantilever is deflected in response to features on the surface of the sample.Type: GrantFiled: July 11, 2006Date of Patent: December 4, 2007Assignee: The Board of Trustees of the Leland Stanford Junior UniversityInventors: Ozgur Sahin, Calvin F. Quate, Olav Solgaard
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Publication number: 20070272005Abstract: The present invention provides a technique for eliminating the effect of the thermal drift and other variances and to improve the observing or manipulating accuracy of a scanning probe microscope or atom manipulator by using the technique to correct the aforementioned change in the relative position of the probe and the sample due to heat or other factors during the observation or manipulation. To obtain an image of the sample surface at the atomic level or perform a certain manipulation on an atom on the sample surface, the present invention can be applied to a probe position control method for controlling the relative position of the probe and the sample while measuring an interaction between the objective atom on the sample surface and the tip of the probe. In the present method, the relative position of the probe and the sample are changed while the probe is oscillated relative to the sample in two directions parallel to the sample surface at frequencies of f1 and f2 (S1a).Type: ApplicationFiled: May 24, 2007Publication date: November 29, 2007Applicants: SHIMADZU CORPORATION, OSAKA UNIVERSITYInventors: Masayuki Abe, Masahiro Ota, Yoshiaki Sugimoto, Kenichi Morita, Noriaki Oyabu, Seizo Morita, Oscar Custance
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Patent number: 7301146Abstract: A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the height of the probe from the sample surface is obtained by detecting a probe shadow (54) appearing immediately before the probe contacts the sample, or based on a change in relative positions of a probe image and a sample image that are formed as an ion beam is irradiated diagonally.Type: GrantFiled: August 11, 2005Date of Patent: November 27, 2007Assignees: Hitachi, Ltd., Hitachi ULSI Systems Co., Ltd.Inventors: Satoshi Tomimatsu, Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto, Yuichi Hamamura, Isamu Sekihara, Akira Shimase
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Compressive fatigue and energy test apparatus and method for testing clutch plate friction materials
Patent number: 7299701Abstract: The present invention presents a means for simultaneously testing the compressive strength and measuring the thermal energy dissipated by a given friction material during slip. The testing apparatus includes a rotatable flywheel that rotates a transmission reaction plate to simulate a typical reaction plate in a vehicle transmission assembly. A plurality of test samples selectively interact with the reaction plate while being elevated by hydraulically actuated cylinders. The thermal energy dissipated between the reaction plate and each test sample is measured for each test sample. A method for accomplishing the same for a bill-of-design reference is also included.Type: GrantFiled: September 23, 2005Date of Patent: November 27, 2007Assignee: General Motors CorporationInventors: Timothy J. Reinhart, Kerry W. Stadtfeld -
Publication number: 20070266781Abstract: An approach controller (234) of a coordinate measuring instrument enables a position control loop (RP) and drives an actuator (133) so that a force sensor (1) is brought to a close position under a position control. When recognizing that the force sensor (1) reaches the close position, a contact controller (235) controls a switch (227) to enable a force control loop (RF) and drives the actuator (133) to bring the force sensor (1) into contact with a workpiece under a force control.Type: ApplicationFiled: May 14, 2007Publication date: November 22, 2007Applicant: MITUTOYO CORPORATIONInventors: Kentaro Nemoto, Takeshi Yamamoto
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Patent number: 7297946Abstract: An automated nanomanipulation system is provided for manufacturing a nanoscale structure. The system includes: a design model for the nanoscale structure; image data of a sample surface upon which the nanoscale structure is to be manufactured; a movable member configured to perform a nanomanipulation operation on the sample surface; and a path planning subsystem adapted to receive the design model and the image data. The path planning subsystem generates path data indicative of a path for traversing the movable member along the sample surface such that the movable member manipulates one or more randomly distributed nanoobjects in accordance with the design model.Type: GrantFiled: August 16, 2005Date of Patent: November 20, 2007Assignee: Board of Trustees operating Michigan State UniversityInventors: Ning Xi, Guangyong Li, Heping Chen
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Patent number: 7293451Abstract: A sharpness tester for testing the sharpness of a blade. The tester has a blade holder 19 and a mounting arrangement 21, 22 for mounting a cuttable material 20. The blade holder 19 is mounted by a carriage 18 which is moveable on a track 14 so that the blade can move relative to the material 20 and contact the material. A linear distance measuring device and a force measuring device 21 enable the tester to determine the force required by part of the blade B to cut the material 20.Type: GrantFiled: March 10, 2005Date of Patent: November 13, 2007Inventor: Peter Christopher Dowd
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Patent number: 7288762Abstract: The invention provides a fine-adjustment mechanism for a scanning probe microscopy with high rigidity and high degree of measurement accuracy wherein a strain gauge displacement sensor which can be installed in a small space is arranged so that temperature compensation is achieved. The fine-adjustment mechanism composed of a piezoelectric device is provided with at least two-piece electrode. One of the electrodes is configured as a dummy electrode, to which no voltage is applied, and the other electrode is configured as an active electrode which generates strain when voltage is applied. One or two resistors are provided on each of the active electrode and dummy electrode, and a bridge circuit is configured by the resistors.Type: GrantFiled: January 28, 2005Date of Patent: October 30, 2007Assignee: SII NanoTechnology Inc.Inventors: Masato Iyoki, Akihiko Hidaka, Kazutoshi Watanabe
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Patent number: 7287421Abstract: A semiconductor probe with a high-resolution tip and a method of fabricating the same are provided. The semiconductor probe includes: a cantilever doped with a first impurity; a resistive convex portion projecting from an end portion of the cantilever and lightly doped with a second impurity opposite in polarity to the first impurity; and first and second electrode regions formed on either side of the resistive convex portion and heavily doped with the second impurity.Type: GrantFiled: July 10, 2006Date of Patent: October 30, 2007Assignees: Samsung Electronics Co., Ltd., Seoul National University Industry FoundationInventors: Ju-hwan Jung, Jun-soo Kim, Hyung-cheol Shin, Seung-bum Hong
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Publication number: 20070245815Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: ApplicationFiled: October 5, 2006Publication date: October 25, 2007Inventor: Roger B. Proksch
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Patent number: 7284415Abstract: A scanning probe microscope has a cantilever having a minute probe on a distal end thereof and a displacement detecting device for detecting displacement of the cantilever. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant a displacement amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or a sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. An XY scanning mechanism relatively moves the probe in a direction of an XY plane with respect to the sample to measure an uneven shape and/or a physical characteristic of the surface of the sample. A controlling range limiting device limits a driving range of the Z-axis driving mechanism. A controlling range setting device optionally sets the driving range of the Z-axis driving mechanism.Type: GrantFiled: March 9, 2005Date of Patent: October 23, 2007Assignee: SII NanoTechnology Inc.Inventors: Yoshiteru Shikakura, Kazutoshi Watanabe
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Patent number: 7281419Abstract: A probe array for includes a handle, a first probe and a second probe. The first probe has a first shank, connected to the handle, and a first tip; and the second probe has a second shank, connected to the handle, and second tip. The first tip contains a different material from the second tip. The probe array may be used to write on a surface by contacting the first tip with a surface, where a first ink is on the first tip. This writing method may further include lifting the first tip from the surface and contacting the second tip with the surface.Type: GrantFiled: September 23, 2005Date of Patent: October 16, 2007Assignee: The Board of Trustees of the University of IllinoisInventors: Xuefeng Wang, Chang Liu
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Patent number: 7282710Abstract: A structure and method for improving the spatial resolution of a scanning probe microscope (SPM) tip, which has been coated with a layer of chemically-synthesized nanoparticles. The nanoparticles are either single-species or heterogeneous, such that the single-species nanoparticles can be either ferromagnetic, paramagnetic, superparamagnetic, antiferromagnetic, ferrimagnetic, magneto-optic, ferroelectric, piezoelectric, superconducting, semiconducting, magnetically-doped semiconducting, insulating, fluorescent, or chemically catalytic. The layer of nanoparticles is at least two nanoparticles thick, or alternatively, is a single layer of nanoparticles thick, or alternatively, is a single layer of nanoparticles thick and covers only the tip apex portion of the tip, or alternatively, only a single nanoparticle is affixed to the tip apex. Alternatively, the layer of nanoparticles is transformed into an electrically-continuous magnetic film by annealing at a high temperature.Type: GrantFiled: January 2, 2002Date of Patent: October 16, 2007Assignee: International Business Machines CorporationInventors: Charles T. Black, Adam E. Cohen, Christopher B. Murray, Robert L. Sandstrom
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Patent number: 7278299Abstract: An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for measuring the indentation. A high-fidelity AFM observation is performed on the shape of the formed indentation with a thin probe with high aspect ratio, the direction of the vertical surface or the vertical ridge is inspected, and the angle error ? is stored. By rotating a sample stage by an angle corresponding to the measured mounting angle error ? of the probe, the mounting angle error of the probe is corrected in advance.Type: GrantFiled: May 23, 2005Date of Patent: October 9, 2007Assignee: SII NanoTechnology Inc.Inventors: Osamu Takaoka, Masatoshi Yasutake, Shigeru Wakiyama, Naoya Watanabe
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Patent number: 7278300Abstract: An atomic force microscope (AFM) having a hollowed cantilever ending in a hollowed tip is described, wherein the end of the tip is immersed in a liquid. The AFM includes a gas source that provides and controls the flow of gas into the hollowed tip. The flow rate of the gas is regulated to form and sustain a static bubble at the end of the hollowed tip. The formation of the static bubble is verified optically. A gas control manifold allows an easy switch of gasses that are fed into the probe tip. The gas that is introduced acts like a chemically modified tip, and is selected to increase the deflection signal for the material of interest. The tip of the present invention is a highly versatile AFM tool that is easily adjusted to provide optimized imaging for a wide variety of materials, in contrast with standard AFMs that require a plethora of chemically modified tips to obtain equivalent results.Type: GrantFiled: September 29, 2005Date of Patent: October 9, 2007Assignee: International Business Machines CorporationInventors: Michael R. Sievers, Siddhartha Panda, Richard Wise
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Patent number: 7278296Abstract: The present invention is intended to solve the problem that the tip of the probe of a scanning probe microscope cannot be conditioned stably due to overload in a contact region. This problem is solved by a scanning probe microscope for scanning the probe and a sample relative to each other. The microscope has a cantilever, a vibration means for vibrating the cantilever, and a vibration signal-switching means for switching a vibration signal applied to the vibration means between at least two different signals. The cantilever has a resilient body that supports the probe.Type: GrantFiled: October 1, 2004Date of Patent: October 9, 2007Assignee: JEOL Ltd.Inventor: Shinichi Kitamura
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Patent number: 7278902Abstract: Various embodiments of the present invention pertain to enabling location specific burnishing of a disk. According to one embodiment, the smoothness of a disk is evaluated by gliding over a disk to determine if there is an asperity on the disk. If there is an asperity on the disk, a location of the asperity is stored to enable location specific burnishing of the disk.Type: GrantFiled: March 14, 2006Date of Patent: October 9, 2007Assignee: Hitachi Global Storage Technologies Netherlands, B.V.Inventors: Masayuki Kurita, Remmelt Pit, Shozo Saegusa, Toshiya Shiramatsu, Mike Suk, Hideaki Tanaka
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Patent number: 7278301Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.Type: GrantFiled: June 8, 2006Date of Patent: October 9, 2007Assignee: KLA-Tencor CorporationInventors: Thomas McWaid, Peter Panagas, Steven G. Eaton, Amin Samsavar, William R. Wheeler
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Patent number: 7278297Abstract: An oscillating probe of an elongated rod, having a first free end, and a second end that is attached to at least one actuator to apply oscillation cycles to the rod. Oscillation of the elongated rod during at least one complete cycle of oscillation of the actuator causes the free end to move in at least one-dimensional envelope, producing a defined virtual probe tip geometry at the free end. The probe is connected to a system for utilizing information sensed as the free end is placed near a surface.Type: GrantFiled: November 16, 2004Date of Patent: October 9, 2007Assignee: Insitutec, Inc.Inventors: Marcin B. Bauza, Robert J. Hocken, Stuart T. Smith
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Patent number: 7278298Abstract: A scanner for probe microscopy that avoids low resonance frequencies and accounts better for piezo nonlinearities. The x, y and z axes of a linear stack scanner are partially decoupled from each other while maintaining all mechanical joints stiff in the direction of actuation. The scanning probe microscope comprises a probe, a housing, at least two actuators, each coupled to the housing, and a support coupled to the housing and to at least a first of the actuators at a position spaced from the point at which the actuator is coupled to the housing. The support constrains the motion of the first actuator along a first axis while permitting translation along a second axis. The actuators are preferably orthogonally arranged linear stacks of flat piezos, preferably in push-pull configuration. The support can take different forms in different embodiments of the invention.Type: GrantFiled: November 30, 2004Date of Patent: October 9, 2007Assignee: The Regents of the university of CaliforniaInventors: Paul K. Hansma, Georg Fantner, Johannes H. Kindt
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Publication number: 20070227235Abstract: There are provided an apparatus for evaluating a piezoelectric film, which contains: a detection unit containing a pair of probes, each probe containing a cantilever and a probe tip; and an evaluation unit, wherein the detection unit is configured to respectively place the probe tips on both surfaces of a sample comprising a piezoelectric film so as to detect a displacement magnitude of the pair of probes, and the evaluation unit is configured to evaluate either or both a deformation and a displacement of the piezoelectric film based upon the detected displacement magnitude of the pair of probes, and a method for evaluating a piezoelectric film by using the apparatus for evaluating a piezoelectric film.Type: ApplicationFiled: August 30, 2006Publication date: October 4, 2007Applicant: FUJITSU LIMITEDInventors: Toshihisa Anazawa, Mineharu Tsukada
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Publication number: 20070220959Abstract: A monolithically integrated 3-D membrane or diaphragm/tip (called 3-D tip) of substantially all UNCD having a tip with a radius of about less than 50 nm capable of measuring forces in all three dimensions or being used as single tips or in large arrays for imprint of data on memory media, fabrication of nanodots of different materials on different substrates and many other uses such as nanolithography production of nanodots of biomaterials on substrates, etc. A method of molding UNCD is disclosed including providing a substrate with a predetermined pattern and depositing an oxide layer prior to depositing a carbide-forming metallic seed layer, followed by seeding with diamond nano or micropowder in solvent suspension, or mechanically polishing with diamond powder, or any other seeding method, followed by UNCD film growth conforming to the predetermined pattern.Type: ApplicationFiled: October 4, 2006Publication date: September 27, 2007Applicant: UChicago Argonne LLCInventors: Anirudha V. Sumant, Robert W. Carpick, Orlando H. Auciello, John A. Carlisle
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Patent number: 7274012Abstract: An optical fiber probe is disclosed that comprises an optical fiber and an optical probe. The optical fiber includes a core though which light emitted from a light source travels. The optical probe is configured to emit the light from a projecting end portion of the core. An inclination angle of a normal line of a part or all of a surface of the optical probe with respect to an optical axis of propagating light that travels through the core is smaller than a total reflection angle of the propagation light but greater than zero degrees.Type: GrantFiled: July 11, 2005Date of Patent: September 25, 2007Assignee: Ricoh Company, Ltd.Inventors: Izumi Itoh, Masato Takada, Taroh Terashi
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Publication number: 20070214875Abstract: A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.Type: ApplicationFiled: February 22, 2007Publication date: September 20, 2007Inventors: Masatsugu Shigeno, Osamu Matsuzawa, Naoya Watanabe, Amiko Nihei, Akira Inoue, Yoshiharu Shirakawabe, Hiroshi Muramatsu, Yuji Yamamoto
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Patent number: 7269995Abstract: There is provided a method and an apparatus for isolating mechanical vibrations reacting to beam metrology tools. The apparatus includes an outer structure for supporting a metrology instrument, and a chuck for holding a specimen with respect to the metrology instrument in an intended defined position for performing measurements on the specimen by the metrology instrument. The apparatus also includes at least one active vibration isolator means coupled to the chuck for compensating relative movement between the specimen and the metrology instrument. A method is also provided that includes detecting change of position of the specimen in response to mechanical vibrations, and effectuating an active modification of the position of the chuck in response to the detection for counteracting a relative displacement between the specimen and the metrology instrument.Type: GrantFiled: September 24, 2004Date of Patent: September 18, 2007Assignee: Integrated Dynamics Engineering GmbInventor: Peter Heiland
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Patent number: 7268348Abstract: A cantilever device for scanning a surface comprises a support, a tip platform and a flexible arm arrangement. The tip platform has a plurality of tips. These comprise at least two contact tips providing points of contact with a surface to be scanned, and a scanning tip for scanning the surface, where the scanning tip may be one of the two or more contact tips provided on the platform. The flexible arm arrangement connects the tip platform to the support and allows orientation of the platform, via flexing of the arm arrangement, to bring the contact tips into contact with a surface to be scanned. The platform is then at a well-defined orientation relative to the scan surface, and the scanning tip is appropriately positioned for the scanning operation. Scanning probe microscopes and data storage devices incorporating such cantilever devices are also provided.Type: GrantFiled: December 11, 2002Date of Patent: September 11, 2007Assignee: International Business Machines CorporationInventors: Gerd K. Binning, Michel Despont, Walter Haeberle, Mark A. Lantz
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Patent number: 7266998Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.Type: GrantFiled: November 3, 2004Date of Patent: September 11, 2007Assignee: General Nanotechnology LLCInventor: Victor B. Kley
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Patent number: 7266997Abstract: An apparatus for simulating a tactile interface with the relative position of the probe of a cantilever-based force measurement instrument, such as an atomic force microscope, molecular force probe or profilometer, or the force between the probe and a sample. The device can be easily incorporated into existing control electronics for such instruments or can be incorporated into a relatively small and simple hand-held device to be used with such instruments.Type: GrantFiled: February 11, 2003Date of Patent: September 11, 2007Assignee: Asylum Research CorporationInventors: Roger Proksch, Jason Cleveland, Dan Bocek, Todd Day
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Publication number: 20070204681Abstract: A carbon thin line probe having a carbon thin line selectively formed at a projection-like terminal end portion thereof by means of an irradiation of high-energy beam, the carbon thin line internally containing a metal. Thereby achieved is a carbon thin line probe suitable for example for the probe of SPM cantilever, which has a high aspect ratio and high durability and reliability, capability of batch processing based on a simple manufacturing method, and to which magnetic characteristic can be imparted.Type: ApplicationFiled: February 27, 2007Publication date: September 6, 2007Applicant: OLYMPUS CORPORATIONInventors: Masashi Kitazawa, Masaki Tanemura, Junya Tanaka, Tatsuhiko Okita
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Patent number: 7263876Abstract: A method of detecting a convexity present on a surface of a belt-shaped member (belt) or a roll-shaped member (roller), includes frictionizing (abrading) a surface of the member with a plate, and detecting at least one of (1) a vibration generated on the plate or (2) a change of pressure applied to the plate, to detect the convexity on the surface of the member.Type: GrantFiled: September 19, 2002Date of Patent: September 4, 2007Assignee: Ricoh Company LimitedInventors: Junichi Yamazaki, Kazuya Suzuki
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Patent number: 7262408Abstract: An apparatus and process for manufacturing changes of a substrate in a work region which is 100×100×100 microns or smaller is described. The apparatus uses a plasma source adjacent to the work region to produce radiation or matter which changes the surface. An atomic force microscope or laser can be used in addition. The process and apparatus can be used to produce MEMS devices on a substrate for use in a wide variety of applications.Type: GrantFiled: June 14, 2006Date of Patent: August 28, 2007Assignee: Board of Trustees of Michigan State UniversityInventors: Jes Asmussen, Timothy Grotjohn, Ning Xi, Timothy P. Hogan
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Patent number: 7257992Abstract: Automated apparatus and methods for testing surface finishes. In at least one preferred embodiment, automated apparatus capable of reliably, automatically testing surface finishes in industrial environments. In at least one further preferred embodiment, an automated, robotic surface finish tester programmable to measure surface finishes of a plurality of spatially separate surfaces and simultaneously and/or thereafter displaying, transmitting, processing, and/or storing data related thereto.Type: GrantFiled: July 6, 2005Date of Patent: August 21, 2007Assignee: Cim Systems, Inc.Inventor: David J Fox
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Patent number: 7253407Abstract: A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever having an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, an interference structure is provided to limit the range of deflection of the probe.Type: GrantFiled: March 22, 2005Date of Patent: August 7, 2007Assignee: General Nanotechnology LLCInventor: Victor B. Kley
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Patent number: 7251987Abstract: A scanning probe microscope is capable of radiating light on a sample without moving the sample from the scanning probe microscope and is capable of measuring the sample while controlling the conditions under which the sample is placed without changing the location of the sample. The scanning probe microscope includes a cantilever having a probe at a distal end thereof, a sample moving device for moving the sample, and a detection unit for detecting deflection of the cantilever using a laser beam. The detection unit is detachably mounted to the scanning probe microscope during measurement of the sample and is detachable from the microscope to enable radiation of the sample with light without changing the location of the sample.Type: GrantFiled: March 23, 2005Date of Patent: August 7, 2007Assignee: SII NanoTechnology Inc.Inventors: Masafumi Watanabe, Kazunori Ando
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Patent number: 7253408Abstract: An environmental cell for use with a scanning probe microscope includes a cell chamber, a probe mounted to the cell chamber, a puck selectively connected to the cell chamber, a sample holder selectively inserted in the puck, and a translation mechanism coupled to the sample holder to move the sample holder. Gasses or liquids may be introduced to the environmental cell through channels formed in either the puck, sample holder, or cell chamber.Type: GrantFiled: August 31, 2004Date of Patent: August 7, 2007Inventor: Paul E. West
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Patent number: 7251988Abstract: A topography analyzing system (10) for analyzing a topographic microstructure is provided. The topography analyzing system includes a three-dimensionally adjustable platform (12), a loading platform (13), a microscopic viewing device (14), a topography measuring device (11), and a mirror (15). The adjustable platform is adapted for adjusting the spatial positions of itself and what is loaded thereon. The loading platform is disposed on the adjustable platform and is adapted for having a workpiece (17) to be evaluated loaded thereon. The topography measuring device is aside/adjacent the adjustable platform. The topography measuring device includes a probe extending to and overhanging the workpiece for detecting topography of the workpiece. The mirror is secured at an adjustable angle relative to the three-dimensional adjustable platform and is adapted for forming a mirror image of the probe and a selected measuring area of the workpiece.Type: GrantFiled: January 20, 2006Date of Patent: August 7, 2007Assignee: Hon Hai Precision Industry Co., Ltd.Inventor: Chuan-De Huang
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Patent number: RE39803Abstract: A non-vibrating capacitance probe for use as a non-contact sensor for tribological wear on a component. The device detects surface charge through temporal variation in the work function of a material. A reference electrode senses changing contact potential difference over the component surface, owing to compositional variation on the surface. Temporal variation in the contact potential difference induces a current through an electrical connection. This current is amplified and converted to a voltage signal by an electronic circuit with an operational amplifier.Type: GrantFiled: May 1, 2001Date of Patent: September 4, 2007Assignee: Georgia Tech Research CorporationInventors: Steven Danyluk, Anatoly Zharin, Elmer Zanoria, Lennox Reid, Kenneth Hamall