Abstract: A nondestructive apparatus uses a guided wave. The nondestructive apparatus has a waveform forming apparatus for forming a transmission waveform by employing a reference waveform, a transmitting element for generating the guided wave within an object under inspection based upon the transmission waveform, a receiving element for receiving a reflection wave of the guided wave from an inspection region of the object under inspection, an analyzing apparatus for outputting inspection information which is acquired based upon the reception waveform of the reflection wave received by the receiving element, and the display apparatus for displaying the inspection information.

Abstract: A method and apparatus for retaining a part in a carrier during an ultrasonic scan. The part is positioned above a first opening in a lower chamber while air is drawn out of a second opening in the lower chamber to apply suction to the lower surface of the part. An ultrasonic transducer is housed in an upper chamber that dispenses coupling fluid to the top surface of the object.

Abstract: An apparatus examines the internal structure of an object disposed substantially in a medium such as air, which essentially totally reflects acoustic signals in the 1-200 MHz frequency range. The apparatus has an acoustic transducer that emits and receives acoustic signals in the 1-200 MHz frequency range and an acoustic coupler that acoustically couples the acoustic transducer to the object. The acoustic coupler is adapted to essentially retain a body of fluid such as water between a section of the surface of the object and the acoustic transducer for carrying acoustic signals in the 1-200 MHz frequency range between the acoustic transducer and the object.

Abstract: An improved method and apparatus for non-destructive cleanliness evaluation in sputter targets using radio frequency waveform phase change and amplitude detection is disclosed. The apparatus acquires phase change and amplitude for a plurality of data points. The method disclosed for characterizing the sputter target material (52) employs the phase change and amplitude magnitude data for calculating cleanliness factors and generating pareto histograms.

Abstract: An ultrasonic inspection apparatus obtains information on the interface of a sample as digital waveform data for any “unit measurement range” and is provided with at least two data memories and controlled by a scan state monitoring signal showing the scan state of a unit measurement range belonging to a first group or a unit measurement range belonging to a second group. A comparator-register/memory-control-circuit outputs the scan state monitoring signal to the two data memories. The operating states of the two data memories being controlled by the scan state monitoring signal to alternate between writing of digital waveform data and readout of digital waveform data.

Abstract: In a method for examining objects using ultrasound according to the reflection process, in particular 3D scanning, the object is scanned with an ultrasound transducer (1) with associated transmit/receive unit (2, 4) appropriate for volume scanning and the obtained echo data are stored in a volume memory (5) in clear assignation to the local coordinates of the reflection points. During scanning the spatial line density and/or the temporal repetition frequency, in which certain volume areas are scanned, is deflected by the contents of the information obtained or obtainable from these areas in such a form that areas having less information content are scanned more seldom and/or with less scanning density than areas having a higher information content.

Abstract: A measurement head for a device for measuring the level of a product in a container comprises a transmitter/receiver unit to transmit a scanning signal and receive an echo of the scanning signal returned by the product, a fastening element to fasten the transmitter/receiver unit to a support and at least one actuator to move the transmitter/receiver unit relative to the fastening element.

Abstract: An apparatus examines the internal structure of an object disposed substantially in a medium such as air, which essentially totally reflects acoustic signals in the 1-200 MHz frequency range. The apparatus has an acoustic transducer that emits and receives acoustic signals in the 1-200 MHz frequency range and an acoustic coupler that acoustically couples the acoustic transducer to the object. The acoustic coupler is adapted to essentially retain a body of fluid such as water between a section of the surface of the object and the acoustic transducer. The fluid carries acoustic signals in the 1-200 MHz frequency range between the acoustic transducer and the object.

Abstract: A method for quality control monitoring of laser shock peening a surface of a production workpiece during which laser beam pulses form a plurality of corresponding plasmas. An acoustic signal of each laser beam pulse during a period of time during a duration of each corresponding one of the plasmas is monitored and an acoustic energy parameter value for each of the acoustic signals for each of the corresponding laser pulses is calculated. A statistical function value of the workpiece based on the acoustic energy parameter values is calculated and compared to a pass or fail criteria for accepting or rejecting the workpiece. The criteria may be based on a pre-determined correlation of test piece statistical function data such as high cycle fatigue failure data of test pieces. The statistical function value may be an average of the acoustic energy parameter values of the laser beam pulses.

Abstract: A method for ultrasonically inspecting a tubular member which has a first surface spaced-apart from a second surface by a thickness of the tubular member, and two spaced-apart ends the method including transmitting sonic beams to the tubular member with transducer apparatus which are reflected from the first surface and from the second surface, the transducer apparatus controlled by control apparatus, while to inspect the first surface for first surface defects, moving the transducer apparatus adjacent sensing apparatus which signals the control apparatus to cease processing of signals related to inspection of the second surface, and, the transducer apparatus continuing to transmit sonic beams for the inspection of the first surface, and completing inspection of substantially all of the second surface for second surface defects while continuing to inspect the first surface.

Abstract: An ultrasonic inspection apparatus obtaining information on the interface of a sample as digital waveform data for any “unit measurement range” provided with at least two data memories and controlled by a scan state monitoring signal showing the scan state of a unit measurement range belonging to a first group or a unit measurement range belonging to a second group and a comparator-register/memory-control-circuit outputting the scan state monitoring signal to the at least two data memories, the operating states of the two data memories being controlled by the scan state monitoring signal to alternate between writing of digital waveform data and readout of digital waveform data, whereby digital type ultrasonic inspection and a high speed data transfer not having an effect on the data sampling at the time of scanning in a specific direction in any scan are realized, the dead time at the time of scanner scanning by transfer of a large volume of data is reduced to zero, and high speed planar scanning

Abstract: A two-dimensional ultrasonic probe has a transmitting function of an ultrasonic signal without electric interconnection of a numerous number of microcomponents and without increase in crosstalk and electric impedance. This probe includes an optical fiber array having a plurality of optical fibers to which light generated from a light source is made incident, a plurality of ultrasonic detecting elements, formed at one ends of the respective optical fibers, for modulating incident light via the optical fibers on the basis of the ultrasonic signal to be applied, and an ultrasonic transmitting element using a piezoelectric element.

Abstract: An ultrasonic inspection device is constructed of an ultrasonic scanning unit, drive unit for the ultrasonic scanning unit, and a computing unit. The ultrasonic scanning unit is provided with an ultrasonic probe for two-dimensionally scanning a surface of a specimen with an ultrasonic wave through a medium such as water for the ultrasonic wave. The computing unit controls the ultrasonic scanning unit via the drive unit and performs an inspection for any flaw in a film formed on a surface of abase material as the specimen. From the ultrasonic probe to the specimen, an angled incident wave is transmitted such that a leaked elastic surface wave is induced, and a leaked wave from the specimen is received at the ultrasonic probe. When the adhesion is good, the reception level of the leaked wave becomes low. When the adhesion is poor, on the other hand, the reception level of the leaked wave becomes high.

Abstract: A method for ultrasonically inspecting a tubular member, the tubular member having an inner surface, an outer surface, and two spaced-apart ends including a first end of the tubular member, the method including transmitting sonic beams to the tubular member with transducers such that sonic beams are reflected from: the first end and the inner and outer surface of the tubular member, completing inspection of the outer surface of the tubular member while continuing to inspect the inner surface of the tubular member, and sensing a distance from the transducers to the first end of the tubular member, continuing to transmit sonic beams for the inspection of the inner surface of the tubular member until the transducers are near its first end; and, in one aspect, detecting an inner surface defect near the first end of the tubular member after the outer surface inspection has ceased.

Abstract: A system and method for delivering a laser beam from a remote laser source through a gantry positioning system for performing ultrasonic testing on a test object. The invention provides for closed-loop error correction of a laser beam delivered through the gantry members of a gantry positioning system (GPS) to ensure unobstructed transmission of the laser beam as the GPS changes operates and changes shape. The invention provides for ultrasonic testing of a test object for identifying material defects by moving the end gantry member of the GPS thereby permitting data acquisition of the test object from various fields of view. The invention also provides for controlling the divergence of the laser beam used for ultrasonic testing.

Abstract: An ultrasonic image process and system for accurately evaluating the quality of a weld using ultrasonic responses and operator entered data to enhance the quality of weld inspection. Ultrasonic responses useful in accurately indicating the actual location of the weldment, detecting the actual component thickness and the location and characteristic of any other relevant ultrasonic reflectors located in or near the weld heat effected zone are input to a composite image of a weldment for the purpose of enhancing the quality and the ease of detecting, evaluating and sizing of weld defects. Through the superposition of ultrasonic image data from additional complimentary sensors and operator inputs based on prior known data, useful images can be formed to improve the decision making in weldment inspection and evaluation.

Abstract: A wheel inspection system based on electromagnetic acoustic signals and having improved inspection by the use of a noise removing system and/or a pivotal mounting system. The invention also includes an improved detection head and data analysis.

Abstract: The invention is directed to an apparatus and method for inspecting spring hold down bolts of an upper tie plate of a fuel rod assembly in a nuclear reactor and includes an inspection fixture adapted to be aligned with the upper tie plate of the nuclear reactor fuel rod assembly for placement into a position for rapid and easy insitu inspection of the hold down bolts of the upper tie plate. The fixture is provided with a plurality of ultrasonic transducers which are positioned on the fixture so that when the fixture is placed into the inspection position each transducer will be located proximate to one of the hold down bolts for conducting effective ultrasonic scanning of the bolt while the bolt is in place. A multi-channel ultrasonic flaw detector is connected to each of the transducers for indicating whether there are any flaws in each of the hold down bolts when the fixture is placed into the inspection position and the ultrasonic transducers are activated.

Abstract: A method for ultrasonically inspecting a tubular member, the tubular member having an inner surface, an outer surface, and two spaced-apart ends including a first end of the tubular member, the method including transmitting sonic beams to the tubular member with transducers such that sonic beams are reflected from: the first end and the inner and outer surface of the tubular member, completing inspection of the outer surface of the tubular member while continuing to inspect the inner surface of the tubular member, and sensing a distance from the transducers to the first end of the tubular member, continuing to transmit sonic beams for the inspection of the inner surface of the tubular member until the transducers are near its first end; and, in one aspect, detecting an inner surface defect near the first end of the tubular member after the outer surface inspection has ceased.

Abstract: A portable ultrasound diagnostic device dynamically collecting diagnostic data from a patient and, once the portable ultrasound diagnostic device determines that collecting the diagnostic data is complete, the portable ultrasound diagnostic device transmits the diagnostic data using a communication channel to a person at another location to analyze the diagnostic data.

Abstract: A sputtering target (24) under test is irradiated with an ultrasonic pulse (20). The ultrasonic pulse (20) has a wavelength in the sputtering target (24) in the range of the average grain size for the target (24) under test. Backscattering echoes (28) are produced by the interaction of the pulse (20) with grain boundaries in the target (24) under test. The backscattering echoes (28) are detected and a representative electrical signal is generated. The number of occurrences of the backscattering echoes (28) having amplitudes within predetermined ranges are determined. A histogram of the number of occurrences versus amplitude is plotted. The histogram for the target (24) under test is compared with reference histograms for sputtering targets having known crystallographic orientations to determine the texture of the target (24) under test.

Abstract: A non-destructive method for characterizing a sputter target material comprises the steps of sequentially irradiating a test sample of the sputter target material with sonic energy at a plurality of positions on a surface of the sample; detecting echoes induced by the sonic energy; discriminating texture-related back-scattering noise from the echoes to obtain modified amplitude signals; comparing the modified amplitude signals with said at least one calibration value to detect flaw data points and no-flaw data points; counting the flaw data points to determine a flaw count; counting the total flaw data points and the no-flaw data points to determine a total number of data points and calculating a cleanliness factor.

Abstract: The ultrasonic scatterer of the invention comprises gas-containing particles having an average particle size of 0.01 &mgr;m 10 &mgr;m, the ultrasonic imaging method of the invention comprises transmitting an ultrasonic wave continuing for ten cycles or more; transmitting an ultrasonic wave continuing for four cycles or more and less than ten cycles after a predetermined period passes, and the ultrasonic imaging apparatus of the invention comprises transmitting means for sending a driving signal to the ultrasonic probe so as to transmit, to a subject, an ultrasonic wave continuing for four cycles or more and less than ten cycles after a predetermined period passes subsequently to transmitting, to the subject, of an ultrasonic wave continuing for ten cycles or more.

Abstract: An ultrasonic testing method uses surface waves to prevent false detection of primary cracks, to lower the level of structural noises from grain boundaries, and to improve the detectability in the ultrasonic testing by surface wave testing of hot rolling rolls. A surface wave probe 10 capable of transmitting and receiving a surface wave is provided with a piezoelectric element 10A, a resin wedge 10C disposed on the front surface of the piezoelectric element 10A and a damping block 10B disposed on the back surface. The surface wave probe 10 is driven to produce a short pulse having a pulse length being at most 2.5 times the wavelength of the surface wave to be produced. A coupling liquid medium is supplied to the probe 10 in accordance with the peripheral speed of the roll to be tested. Depending on the height of the reflected waves measured, the grinding allowance of the roll is determined, and the roll is ground according to the thus-determined grinding allowance.

Abstract: The invention includes a method for testing materials, such as for example sputtering target materials, other materials for electronics applications, or other materials in general in which homogeneity throughout the material is desired. A plurality of positions are defined across at least a portion of a material. Sonic energy is sequentially irradiated across the plurality of positions. Echoes are induced by the sonic energy, and detected. At least some of the detected echoes are associated with individual positions of the plurality of positions that triggered the detected echoes. Information pertaining to at least one physical attribute of the detected echoes is processed to sort the detected echoes into a first group indicative of inhomogeneities in the material, and a second group which does not indicate inhomogeneities in the material. The echoes of the first group are sorted into clusters, with the clusters being defined as echoes from adjacent positions of the plurality of positions.

Abstract: A tank 10 has an opening through which enters a molded material P1, which is the object of inspection, and water W1 is filled within the tank 10. One side wall of said tank 10 is equipped with the plurality of ultrasonic search units 40. On the other side wall of said tank 10 is mounted a reflector plate 100 opposing to said ultrasonic search units 40. The reflection surface 100a of said reflector plate 100 is positioned away from the surface of an object portion P10 by a predetermined distance D1. The ultrasonic waves generated from the search units are reflected, and the reflected waves are transduced into electric signals, and the signals are compared with the signals received from the solid portion, so as to detect flaw.

Abstract: This portable ultrasonic detector has a moved distance instrument comprised of an encoder for detecting a moved amount and a counter for counting the moved amount signal outputted from the encoder, as a means for obtaining position information of an ultrasonic probe. When moving the ultrasonic probe on the surface of the object on the occasion of the inspection, the moved distance instrument measures the moved amount of the ultrasonic probe. The measured moved amount of the ultrasonic probe is sent to an arithmetic processing section of the device body. Also, the ultrasonic detector detects A-scope data when scanning the inspected object with the ultrasonic probe, and executes the predetermined processing by using the data. The ultrasonic detector combines the A-scope data and the moved distance data of the ultrasonic probe to make an inner scope image (B-scope image, etc). When repeatedly scanning the same spot of the object with the ultrasonic probe in order to make the B-scope image, etc.

Abstract: An ultrasonic defect detection system includes a steered beam transmitter for directing an ultrasonic beam through the front face to the back face of a specimen; a sensor device for sensing the location on the front face of the near shadow of a defect from the beam reflected from the back face before the defect and the far shadow of the defect from the beam reflected from the back face after the defect; and an arithmetic circuit responsive to the location of the shadows on the front face for determining the distance between the transmitter and the near and far boundary of the near shadow and at least the near boundary of the far shadow for calculating the location and/or the size and/or the orientation of the defect.

Abstract: An ultrasonic diagnostic apparatus wherein a three dimensional space is scanned by ultrasonic beams and echo signals are received simultaneously in parallel to produce ultrasonic information. During operation, transmitting/receiving conditions are selected from a plurality of transmitting/receiving conditions. Operation is then switched at a predetermined period between the selected transmitting/receiving conditions so that the three dimensional space is scanned by ultrasonic beams and echo signals are alternately received, at the predetermined period, under the selected transmitting/receiving conditions. Image information for each selected transmitting/receiving condition is obtained and respective ultrasonic images corresponding to each transmitting/receiving condition are simultaneously displayed.

Abstract: An improved tray-scanning station for a tray-fed scanning acoustic microscope prevents the dislodging of small, loosely held parts from the trays by coupling fluid as the trays pass through an inspection station, or by the action of a dryer as the trays pass through a drying station.

Abstract: An ultrasonic testing method uses surface waves to prevent false detection of primary cracks, to lower the level of structural noises from grain boundaries, and to improve the detectability in the ultrasonic testing by surface wave testing of hot rolling rolls. A surface wave probe 10 capable of transmitting and receiving a surface wave is provided with a piezoelectric element 10A, a resin wedge 10C disposed on the front surface of the piezoelectric element 10A and a damping block 10B disposed on the back surface. The surface wave probe 10 is driven to produce a short pulse having a pulse length being at most 2.5 times the wavelength of the surface wave to be produced. A coupling liquid medium is supplied to the probe 10 in accordance with the peripheral speed of the roll to be tested. Depending on the height of the reflected waves measured, the grinding allowance of the roll is determined, and the roll is ground according to the thus-determined grinding allowance.

Abstract: Cleanliness of a metallic material to be tested is provided. The method includes the steps of setting n inspection fields in predetermined portions of the metallic material to be tested, scanning each inspection field by ultrasonic flaw detection method for non-metallic inclusions in the metal thereby to determine the maximum non-metallic inclusion diameter aj (j=1,n), and calculating the estimated maximum non-metallic inclusion diameter amax in the metallic material to be tested from the maximum non-metallic inclusion diameter aj (j=1,n) determined for each inspection field, thereby evaluating the cleanliness of metallic materials quickly with high accuracy and high reliability.

Abstract: An ultrasound system determines the relative movement in a first direction (F1) of first matter, such as blood flow, and second matter, such as an artery wall, in a subject under study (S). A beam (B1) of ultrasound waves defining a plurality of beam positions (BP1 and BP2) and beam axes (A1and A2) are moved in scan directions having components parallel to direction F1. First and second blocks of data representing the first and second matter, respectively, are generated. A processor (20) performs an estimation of speckle size on first data to obtain a first result, and performs analysis of the second block of data to obtain a second result. The two results are analyzed to obtain a measure of the relative movement of the first and second matter.

Abstract: A two-dimensional ultrasonic probe has a transmitting function of an ultrasonic signal without electric interconnection of a numerous number of microcomponents and without increase in crosstalk and electric impedance. This probe includes an optical fiber array having a plurality of optical fibers to which light generated from a light source is made incident, a plurality of ultrasonic detecting elements, formed at one ends of the respective optical fibers, for modulating incident light via the optical fibers on the basis of the ultrasonic signal to be applied, and an ultrasonic transmitting element using a piezoelectric element.

Abstract: This invention relates to a method and apparatus for imaging acoustic fields in high-frequency acoustic resonators. More particularly, the invention is directed to a scanning RF mode microscope system that detects and monitors vibration of high frequency resonators that vibrate in the frequency range of approximately 1 MHz to 20 GHz. The system then maps with sub-Angstrom resolution vibration modes of such devices and obtains quantitative measurements of the piezoelectric properties of the materials.

Abstract: The invention relates to an ultrasonic measuring instrument comprising a housing which contains a transducer for transmitting and receiving ultra-sound waves, and a rotatable mirror placed inside the housing for directing ultra-sound waves coming from the transducer through a tapering window comprised in the housing to an object of measuring outside the housing, and for directing ultra-sound waves which are reflected by the object of measuring and which enter the housing through the window to the transducer. Around, and rotating with the mirror a tube is provided, comprising a recess for the passage of ultra-sound waves.

Abstract: A flaw detecting method and apparatus for continuously testing a strip that is continuously carried through a liquid includes features for reducing air bubble generation in a liquid. The apparatus includes a liquid, carrying rolls for passage of the strip through the liquid, and ultrasonic testing probes arranged in the liquid for testing the strip. A carrying roll in contact with the liquid is fully immersed. Air bubble generation is inhibited to improve the testing reliability by at least one of (a) shielding the liquid dropping from the portion of the strip leaving the liquid, (b) reducing the dropping force of the liquid onto the liquid surface by inclining the strip, (c) installing the fully immersed carrying roll at a depth of at least 5 mm in the liquid, and (d) using a carrying speed of less than about 200 m/min. Upon manufacturing steel strips, testing is carried out in the stage of hot-rolled steel sheet, or, preferably, in pickling equipment.

Abstract: A system which rapidly determines the elastic stiffness constants of materials in plate shape as well as characterize material flaws that are affecting these constants. Rapid (below a minute) nondestructive evaluation system allow for the determination of material stiffness constants, low noise data acquisition algorithm for measuring spectral data. A real time method of displaying leaky Lamb wave spectral data.

Abstract: An ultrasound imaging system having an integrated touch-pad pointing device is provided. The touch-pad pointing device can be used to perform the functions currently performed by a trackball while overcoming the disadvantages commonly associated with trackballs. In addition to being integrated with the ultrasound imaging system, the touch-pad pointing device can also externally interface with the ultrasound imaging system, allowing the touch-pad pointing device to be easily added to existing ultrasound imaging systems that are not integrated with a touch-pad pointing device. Further, the touch-pad pointing device can be located on a remote user-interface device coupled with the ultrasound system to provide the further advantage of physically positioning the touch-pad pointing device closer to the user and away from the ultrasound machine.

Abstract: A levitated rotor, neutrally buoyed in ultrasound transmission fluid, moves to position and aim an ultrasound transducer in up to five servo-controlled coordinates of position and tilt rotation. Stator drive/sense windings drive the rotor via a rotor magnet and sense coordinates via inductive interactions with a rotor coil. For five-axis control, one set of stator windings controls two-axis lateral translation while a second set controls axial translation plus two-axis tilt rotation. The windings produce a comparatively linear relationship between the five rotor geometric coordinates and the electromagnetic couplings that drive and sense these coordinates. To produce this linearity seamlessly over a wide coordinate range coming close to the windings, each set of windings is divided into overlapping subsets. A two-way drive/sense matrix mapping translates between up to five control coordinates and more than five winding circuits.

Abstract: An ultrasonic flaw detection apparatus is equipped with a probe which is driven by a transmission signal and which transmits an ultrasonic pulse at an angle with respect to a surface of a test object. The probe receives an ultrasonic pulse, which has been reflected by a defect in the test object, as an echo. The apparatus further includes a scanner for scanning the probe over a predetermined scanning zone on the test object and for outputting a spatial position of the probe. The apparatus is further equipped with a transmitter-receiver which has a transmitter for generating a transmission signal and outputting the transmission signal to the probe, a position detector for receiving a spatial position of the probe from the scanner, and a signal processor for detecting the defect according to the stored spatial position of the probe and the stored echo, taking the spread of an ultrasonic beam attributable to diffraction into account.

Abstract: A method and apparatus for nondestructive inspection of packaged integrated circuits and defect detection in the integrated circuits. In a scanning acoustic microscopy system, a packaged integrated circuit under test 31 is placed in a tank containing an acoustic transmission medium such as de-ionized water. An acoustic reflector 29 is placed beneath the integrated circuit 31. A pulse-echo mode transducer 17 is used to scan the area containing the integrated circuit 31 with ultrasonic energy. The reflective signal energy is captured by the transducer 17 and the signals are digitized and stored. A computer system analyzes the reflective signal amplitude, and presents a visual image based on where the reflective signal was strong and where it was weak. In a preferred embodiment the image is presented so that the signal from the reflective plate is shown as a dark region where the reflection was weak or zero.

Abstract: The invention provides a device for the ultrasonic inspection of a multilayer metal workpiece consisting of at least one parent metal layer and a clad metal layer, and having an outer surface, at least one boundary surface, and an inner surface, the device comprising a housing accommodating at least three spaced-apart, ultrasonic transducing means capable of receiving electrical input signals, initiating transmission of ultrasonic waves to the workpiece, and receiving reflected ultrasonic waves to be transduced into electrical output signals, the transducing means being constituted by an acoustic prism having a first face for at least indirectly contacting a workpiece, a second face extending in a plane forming an angle .alpha. with the plane of the outer surface of the workpiece, and a piezocrystal attached to the second face, wherein the distance L.sub.

Abstract: In an ultrasonic detecting method for a bearing ring in which a bearing ring 2 and an ultrasonic detection probe 3 are disposed within ultrasonic transmission medium such as water, then ultrasonic wave is transmitted from the ultrasonic detection probe 3 to the bearing ring 2, and a defect of the bearing ring 2 is detected on the basis of an ultrasonic wave echo reflected from the bearing ring 2, wherein at least a defect in a range from the surface of the bearing ring 2 to a position beneath by 2 mm from the surface of the bearing ring which is deeper than a maximum shearing stress position of the bearing ring 2 is detected by an angle beam method with an incident angle in a range of 10 to 30.degree., preferably in a range of 25 to 30.degree., and a defect in a range deeper than the range detected by the angle beam method is detected by a normal beam method with an incident angle in a range of 0 to 10.degree., preferably in a range of 0 to 5.degree.

Abstract: An apparatus for detecting defects in a wafer edge and a method for detecting are disclosed. In the apparatus, an ultrasonic detection unit is used to detect crazing or micro-cracks in a wafer edge, while a laser detection unit is used for detecting cracks in the wafer edge. The ultrasonic detection unit and the laser detection unit may be positioned in a detection module together with a wafer platform for holding and rotating a wafer positioned thereon. The detection module is placed in a mini-environment of clean room conditions which also include a robot transport device and a wafer storage cassette. The present invention novel apparatus is compact in size and can be moved to any location in a fab plant such that it is positioned adjacent to a process machine.

Abstract: An ultrasonic inspection system for ultrasonic inspection of the guide structure of a reactor pressure vessel having two shear wave transducers, one positioned to face in a first direction about 30.degree. from normal to a top edge of the grid members of the top guide structure and a second one positioned to face in a second direction about 30.degree. from normal to a top edge of the grid members of the top guide.

Abstract: An optoacoustic system comprises an optoacoustic transducer including a first array of acoustic transducers and a second array of optical fibers; an acoustic subsystem for controllably exciting at least a first subset of the acoustic transducers to generate acoustic pulses with a prescribed pulse width, and for forming a first image based on return acoustic pulses reflected from a patient; an optical subsystem for controllably generating optical pulses to be transmitted through at least a first subset of the optical fibers toward the patient, and for forming a second image based on light reflected from the patient; and image correlation means for correlating the first and second images. The first and second arrays may take various forms, including the form of an annular array in which the acoustic transducers are arranged coaxially and the optical fibers are disposed around an outer periphery of the first array. The first and second arrays may also take the form of linear arrays.

Abstract: A method for determining changes in the average wall thickness or the mean radius of a pipe or tube using ultrasonic and/or magnetostrictive wave probes by analyzing the dispersive behavior of waves traveling in the tube wall volume. The method examines certain wave propagation modes and identifies a cut-off frequency that is characteristic for a particular wall thickness or tube diameter. This method permits the rapid and accurate inspection of a length of pipe or tube from a single location on the inside diameter of the pipe and permits a comparison of data gathered with similar data for the structure in its original condition. Changes in the cut-off frequency, indirectly determined by the method of the present invention are inversely related to changes in the wall thickness and/or the mean radius for the cylindrical structure. In this manner the method of the present invention provides a mechanism for determining the remaining service life for such pipes and tubes.

Abstract: A method and apparatus are provided for simultaneously measuring the anisotropic orientation and the thickness of an article. The apparatus comprises a transducer assembly which propagates longitudinal and transverse waves through the article and which receives reflections of the waves. A processor is provided to measure respective transit times of the longitudinal and shear waves propagated through the article and to calculate respective predicted transit times of the longitudinal and shear waves based on an estimated thickness, an estimated anisotropic orientation, and an elasticity of the article. The processor adjusts the estimated thickness and the estimated anisotropic orientation to reduce the difference between the measured transit times and the respective predicted transit times of the longitudinal and shear waves.

Abstract: A system which enables the user to measure continuously or intermittently or by remote command the thickness changes, above or below the water, under variable temperature changes of underground culverts with reliability. A liquid delay is used to couple the sound to the culvert comprising a focused transducer (10) screwed into a hollow cone-like structure called a "squirter" or "bubbler" (11) providing the operator of the system a means for searching for good echoes from which calculations of thickness with a computer can be made using the known velocity and echo return times.