With Electrical Readout Patents (Class 73/717)
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Patent number: 8312775Abstract: A diaphragm for a pressure sensor includes: a central section serving as a diaphragm body, the central section including: an external surface deformed upon receipt of an external pressure; and an internal surface transmitting a force to a pressure sensitive element inside a housing of the pressure sensor; a peripheral section that is an exterior of the central section and welded to an outer circumference of a pressure input orifice that is provided to the housing; and a step wall provided between the central section and the peripheral section. The central section and the peripheral section are integrally and concentrically provided. The diaphragm seals the pressure input orifice.Type: GrantFiled: June 10, 2009Date of Patent: November 20, 2012Assignee: Seiko Epson CorporationInventor: Hisao Motoyama
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Publication number: 20120279310Abstract: The pressure sensor of the invention includes at least one platform, at least one measuring membrane 30, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bed 21 has a glass layer 20, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membrane 30 in the case of overload, characterized in that the contour of the membrane bed 21 is obtainable by a saggingType: ApplicationFiled: October 7, 2010Publication date: November 8, 2012Applicant: Endress + Hauser GmbH + Co. KGInventors: Timo Kober, Michael Philipps, Dieter Stolze, Anh Tuan Tham, Roland Werthschutzky
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Publication number: 20120266683Abstract: A sensor for measuring pressures in low-viscosity media for use in injection moulding includes a housing with an axis A, a flat end face to be exposed to a pressure space, and a diaphragm that is arranged on the end face and is permanently connected to the housing. A measuring element that can infer a pressure prevailing in the pressure space on the basis of deflection of the diaphragm is arranged behind the diaphragm. A pressure sleeve that is tightly connected to the sensor on the end face and is arranged at a distance from the housing with a gap behind this connection is arranged coaxially with the housing axis A outside the housing. The gap extends axially further across the measuring element than the region of the force path in the direction away from the pressure space.Type: ApplicationFiled: November 18, 2010Publication date: October 25, 2012Applicant: KISTLER HOLDING AGInventor: Ernst Pletscher
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Publication number: 20120247217Abstract: A pressure sensor includes: a supporting body which has an opening; a pressure detecting portion which includes a supporting film provided on the supporting body and having a diaphragm portion closing the opening, and a piezoelectric body provided on the diaphragm portion and deflecting to output an electric signal; a frame body which has, on the pressure detecting portion, a cylindrical cavity along a film thickness direction of the supporting film, and is formed, in plan view when viewed from the film thickness direction of the supporting film, at a position where a cylindrical inner peripheral wall of the cavity overlaps with the opening, or outside of the opening; a sealing film which closes the frame body; and a silicone oil which is filled in an inner space formed of the cylindrical inner peripheral wall of the cavity, the sealing film, and the pressure detecting portion.Type: ApplicationFiled: May 11, 2011Publication date: October 4, 2012Applicant: SEIKO EPSON CORPORATIONInventor: Hironori SUZUKI
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Patent number: 8276458Abstract: An industrial process transmitter includes a sensing system and transmitter electronics. The sensing system senses a process variable over a range. The transmitter electronics is connected to the sensing system and produces a scaled analog communication signal to communicate the process variable over an analog loop. The range is disproportionately distributed over the scale by the transmitter electronics.Type: GrantFiled: July 12, 2010Date of Patent: October 2, 2012Assignee: Rosemount Inc.Inventor: Robert C. Hedtke
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Patent number: 8276456Abstract: A differential pressure sensor for measuring a pressure difference between two high-pressure environments is comprised of a sensor block including internal, oil-filled channels leading to an internally positioned differential pressure sensor element. Two process diaphragms are provided for transferring pressure from the high-pressure environments for isolating two distinct internal oil channels from the high-pressure environments. In order to achieve small internal oil volumes in the sensor block, additionally two separating discs, which initially separate between the two internal oil channels, are positioned in fluid communication with the high-pressure environments in order to block for the pressure from the high-pressure environments against the oil channels “from behind.” The separating discs bear against abutment faces having small openings into the internal oil channels.Type: GrantFiled: June 3, 2008Date of Patent: October 2, 2012Assignee: Presens ASInventor: Bjorn Erik Seeberg
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Publication number: 20120137783Abstract: A generator includes a bio-compatible substrate onto which one mechanical generating unit is disposed. A plurality of elongated piezoelectric fibers each have a first end that is in electrical communication with a first electrode and an opposite second end that is in electrical communication with a second electrode. An insulative layer covers the first electrode, the second electrode and the elongated piezoelectric fibers. A third electrode and a fourth electrode are each disposed on the bio-compatible substrate opposite from the mechanical generating unit. A proton conducting member is in contact with both the third electrode and the fourth electrode. A glucose catalyzing enzyme is electrically coupled to the third electrode. An oxidase enzyme is electrically coupled to the fourth electrode. The third electrode is in electrical communication with each first electrode and the fourth electrode is in electrical communication with each second electrode.Type: ApplicationFiled: December 2, 2011Publication date: June 7, 2012Applicant: GEORGIA TECH RESEARCH CORPORATIONInventors: Zhong L. Wang, Caofeng Pan, Ben Hansen, Ying Liu
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Patent number: 8182435Abstract: An implantable intraocular pressure sensor system has a sealed geometric shape with an internal pressure at a first value. A strain gauge wire is embedded in a surface of the sealed geometric shape. When the surface is deflected by intraocular pressure, a measured resistance of the strain gauge wire indicates the intraocular pressure. The system also has a processor coupled to a power source and memory. The processor is configured to read the measured resistance and write values corresponding to intraocular pressure to the memory.Type: GrantFiled: May 4, 2009Date of Patent: May 22, 2012Assignee: Alcon Research, Ltd.Inventors: Bruno Dacquay, Matthew J. A. Rickard
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Publication number: 20120079884Abstract: A process transmitter for measuring a process variable comprises a sensor module and a static pressure coupling. The sensor module comprises a sensor for measuring a process variable of an industrial process and for generating a sensor signal. The sensor includes a hydraulic fluid inlet within the module. The static pressure coupling is connected to the sensor module and comprises a isolator fitting, a process fluid coupling and an isolation diaphragm. The isolator fitting is inserted into the sensor module and connected to the hydraulic fluid inlet. The process fluid coupling is joined to the isolator fitting. The isolation diaphragm is positioned between the isolator fitting and the process fluid coupling outside of the sensor module.Type: ApplicationFiled: October 5, 2010Publication date: April 5, 2012Applicant: Rosemount Inc.Inventors: David Andrew Broden, David Anthony Horky
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Patent number: 8141429Abstract: Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is disposed within an interior sensing chamber of the probe housing and has a first electrode formed on a central portion thereof. The central portion of the diaphragm and the first electrode are adapted and configured to deflect in response to pressure variations encountered within an interior sensing chamber and by the pressure sensor. A sapphire substrate which has a second electrode formed thereon is fused to the sapphire diaphragm about its periphery to form a sapphire stack and to define a reference chamber therebetween. Prior to fusing the sapphire diaphragm to the sapphire substrate, all contact surfaces are chemically treated and prepared using plasma activation, so as to create a bonding layer and to reduce the temperature required for the fusion.Type: GrantFiled: July 30, 2010Date of Patent: March 27, 2012Assignee: Rosemount Aerospace Inc.Inventor: Shuwen Guo
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Patent number: 8132465Abstract: Circuits, methods, and systems that calibrate or account for packaging and related stress components in a pressure sensor. Further examples provide an improved sensor element or device. One example provides one or more sensing elements on the diaphragm and near the diaphragm-bulk boundary. Sensors near the diaphragm-bulk are used to estimate package-induced stress. This estimation can then be used in calibrating package stress from pressure measurements.Type: GrantFiled: July 31, 2008Date of Patent: March 13, 2012Assignee: Silicon Microstructures, Inc.Inventors: Michael B. Doelle, Joachim Bergmann
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Patent number: 8122770Abstract: A single wire interface for a transducer transmits the transducer output as a frequency modulated signal over one single wire during one interval. During a second interval a reference signal is transmitted as a frequency modulated signal. Both the transducer output and the reference signal output are processed by the same circuitry during the respective intervals to provide both frequency modulated signals. The frequencies of the two signals are measured and then the ratio of the two periods which is the reciprocal of the two frequencies is calculated. This ratio is the direct measure of the output of the transducer and when provided eliminates sources of errors.Type: GrantFiled: March 30, 2010Date of Patent: February 28, 2012Assignee: Kulite Semiconductor Products, Inc.Inventor: Wolf S. Landmann
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Publication number: 20120031189Abstract: A pressure sensor includes: a pressure receiving member; and first and second pressure sensitive elements which have a pressure sensing portion and a pair of base portions connected to both ends of the pressure sensing portion, and which have a detection axis parallel to a line connecting the base portions, and in which the detection axis is parallel to a displacement direction of the flexible portion. One base portion of the first pressure sensitive element is fixed to the flexible portion, and the other base portion is fixed to a first supporting member that is supported by the peripheral portion. One base portion of the second pressure sensitive element is fixed to the peripheral portion, and the other base portion is fixed to a second supporting member that is supported by the flexible portion.Type: ApplicationFiled: July 12, 2011Publication date: February 9, 2012Applicant: SEIKO EPSON CORPORATIONInventor: Kenta SATO
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Publication number: 20120024072Abstract: A single wire interface for a transducer transmits the transducer output as a frequency modulated signal over one single wire during one interval. During a second interval a reference signal is transmitted as a frequency modulated signal. Both the transducer output and the reference signal output are processed by the same circuitry during the respective intervals to provide both frequency modulated signals. The frequencies of the two signals are measured and then the ratio of the two periods which is the reciprocal of the two frequencies is calculated. This ratio is the direct measure of the output of the transducer and when provided eliminates sources of errors.Type: ApplicationFiled: October 4, 2011Publication date: February 2, 2012Applicant: Kulite Semiconductor Products, Inc.Inventor: WOLF S. LANDMANN
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Publication number: 20120024071Abstract: A device for measuring fluid pressure, includes at least one flexible layer having a first surface adapted for fixing the layer to a structure, and having a second surface having at least one recess; at least one pressure sensor, provided in the at least one recess; and at least two wires connected to the at least one pressure sensor for connecting the at least one pressure sensor to a signal receiving unit. Further, a method for measuring fluid pressure is provided.Type: ApplicationFiled: May 3, 2011Publication date: February 2, 2012Inventors: Andreas HERRIG, Klaus Ulrich KOEGLER
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Patent number: 8096187Abstract: A pressure sensor element includes: a package, a first diaphragm provided on a first surface of the package, a second diaphragm provided on a second surface of the package, and a pressure sensing element disposed in the package, the pressure sensing element including: a first base formed at one end in a longitudinal direction of the pressure sensing element, a second base formed at the other end in the longitudinal direction, and a resonating portion formed between the first base and the second base. In the element, the first and second surfaces are opposed to each other. The pressure sensor element is disposed such that the longitudinal direction is orthogonal to a displacement direction of each of the first and second diaphragms. The first base is connected to the first diaphragm while the second base is connected to the second diaphragm.Type: GrantFiled: February 17, 2010Date of Patent: January 17, 2012Assignee: Seiko Epson CorporationInventor: Kenta Sato
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Publication number: 20120006120Abstract: An industrial process transmitter includes a sensing system and transmitter electronics. The sensing system senses a process variable over a range. The transmitter electronics is connected to the sensing system and produces a scaled analog communication signal to communicate the process variable over an analog loop. The range is disproportionately distributed over the scale by the transmitter electronics.Type: ApplicationFiled: July 12, 2010Publication date: January 12, 2012Applicant: ROSEMOUNT INC.Inventor: Robert C. Hedtke
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Patent number: 8091431Abstract: A pressure sensor includes: a housing; a pressure input orifice opened at a pipe sleeve of the housing; a diaphragm sealing the pressure input orifice, the diaphragm having a first surface serving as a pressure receiving surface; a pressure sensitive unit using a direction of detecting a force as a detecting axis. A first end of the pressure sensitive unit is connected to a central area of a second surface of the diaphragm. A second end of the pressure sensitive unit is connected to the housing. The detecting axis is approximately orthogonal to the pressure receiving surface. A circumference of a portion where the central area and the first end of the pressure sensitive unit are in contact with each other is located inside a circumference of the central area. A thickness of the central area is larger than a thickness of an area surrounding the central area.Type: GrantFiled: July 19, 2010Date of Patent: January 10, 2012Assignee: Seiko Epson CorporationInventor: Hisao Motoyama
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Patent number: 8079269Abstract: A pressure sensor comprises a first pressure chamber containing fill fluid at a first pressure, a second pressure chamber containing fill fluid at a second pressure, a porous dielectric diaphragm having first and second major surfaces exposed to the first and second pressure chambers, and first and second electrodes positioned with respect to the first and second major surfaces. A method for sensing pressure is also disclosed, comprising applying first and second pressures to fill fluid in first and second pressure chambers of a pressure sensor having a porous dielectric diaphragm, and producing an output representative of a pressure differential between the pressures, as a function of surface charges on first and second major surfaces of the porous dielectric diaphragm.Type: GrantFiled: May 16, 2007Date of Patent: December 20, 2011Assignee: Rosemount Inc.Inventor: Swapan Chakraborty
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Patent number: 8047079Abstract: The invention provides a method for controlling an electronic manometer for measuring pressure (p) inside a pressurized gas receptacle. The manometer comprises at least one pressure sensor, an electronic unit designed for the acquisition, storage and processing of data, and at least one information device device capable of transmitting at least one item of information (p).Type: GrantFiled: March 27, 2008Date of Patent: November 1, 2011Assignee: L'Air Liquide Societe Anonyme pour l'Etude et Exploitation des Procedes Georges ClaudeInventors: Christian Bleys, Fabrice Pin, Philippe Deck
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Publication number: 20110252861Abstract: A machine for plasma treatment of containers, including a chamber for receiving a container to be treated, the chamber connected to a primary vacuum circuit. A pressure sensor is connected to the chamber. There is a first mechanism for communicating the pressure sensor with the chamber; a secondary vacuum circuit dependent on the first circuit and connected to the pressure sensor; and second mechanism for communicating the pressure sensor with the secondary vacuum circuit.Type: ApplicationFiled: June 7, 2007Publication date: October 20, 2011Applicant: Sidel ParticipationsInventor: Jean-Michel Rius
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Patent number: 8015881Abstract: A pressure sensor includes: a housing; an attachment portion coupled to the housing and having a pressure input orifice; a diaphragm sealing the pressure input orifice of the attachment portion and having a first surface that is a pressure receiving surface; and a pressure sensitive unit having a detecting axis in a direction in which a force is detected. In the sensor, an end of the pressure sensitive unit is connected to a central area of a second surface of the diaphragm, another end of the pressure sensitive unit is connected to the housing, and the detecting axis is approximately orthogonal to the pressure receiving surface.Type: GrantFiled: March 24, 2009Date of Patent: September 13, 2011Assignee: Epson Toyocom CorporationInventor: Hisao Motoyama
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Patent number: 8011252Abstract: A pressure sensor includes: a housing having openings at both ends thereof; a pair of pressure-receiving devices configured to seal the openings respectively and transmit a pressure from the outside to the interior of the housing; a force transmission device configured to connect the pair of pressure-receiving devices and transmit a force that one of the pressure-receiving devices receives to the other pressure-receiving device; and a pressure-sensitive element having a pressure-sensitive portion and a pair of base portions to be connected to both ends of the pressure-sensitive portion, wherein a line connecting the pair of base portions and a detection axis, which is a direction of detection of the force, and the direction of displacement of the force transmission device are arranged in parallel; the one of the base portions is a first fixed portion, a pair of connecting devices extending from the other base portion so as to interpose the pressure-sensitive portion are connected respectively to a pair of secType: GrantFiled: January 27, 2010Date of Patent: September 6, 2011Assignee: Epson Toyocom CorporationInventors: Jun Watanabe, Hisao Motoyama
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Patent number: 8006565Abstract: A pressure sensor grid can comprise a plurality of bottom wires, arranged substantially parallel to each other and overlaid by a plurality of top wires arranged substantially perpendicular to the bottom wires. Each intersection of the top and bottom wires includes a pressure sensor. The sensor comprises a switching junction situated between the bottom wire and the top wire and a conducting channel extending through the switching junction from the bottom wire to the top wire. Pressure applied to the top wire causes an increase in conductance between the bottom wire and the top wire.Type: GrantFiled: April 30, 2009Date of Patent: August 30, 2011Assignee: Hewlett-Packard Development Company, L.P.Inventors: Wel Wu, Shih-Yuan (S Y) Wang, Pratik Chaturvedi, Sagl Varghese Mathal
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Patent number: 7987726Abstract: A method and apparatus for diagnosis of liquid losses in pressure measuring transducers including a pressure sensor arranged in a pressure measuring chamber, and a pressure transfer structure connected to the pressure measuring chamber A sealed inner space of a separating diaphragm is composed of the inner spaces of the pressure transfer structure and the pressure measuring chamber and is filled with a pressure transmitting liquid, which, serves for transmitting pressure acting on the separating diaphragm to the pressure sensor. An apparatus for detecting liquid losses. The apparatus for detecting liquid losses includes a test element arranged in the sealed inner space. The outer volume of the test element is reducible for diagnosis of liquid losses.Type: GrantFiled: July 16, 2007Date of Patent: August 2, 2011Assignee: Endress + Hauser GmbH + Co. KGInventor: Wolfgang Dannhauer
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Patent number: 7954383Abstract: A pressure sensor includes a fill tube which is arranged to couple to a process pressure. A sensor is coupled to the fill tube and is configured to measure pressure of fluid in the fill tube as a function of a change of a physical property of the fill tube. Circuitry is provided to measure pressure using the pressure sensor, and to measure pressure based upon the change of the physical property of the fill tube.Type: GrantFiled: December 3, 2008Date of Patent: June 7, 2011Assignee: Rosemount Inc.Inventors: Charles R. Willcox, Robert C. Hedtke, Liangju Lu
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Patent number: 7942062Abstract: A pressure sensor includes: a housing; an attachment having a pressure input orifice communicating with an interior of the housing; a first diaphragm that seals an opening of the pressure input orifice of the attachment, an external surface of the first diaphragm being a pressure receiving surface; a force transmitting member having an end which is coupled approximately perpendicular to a main surface of the first diaphragm, the main surface being opposite from the pressure receiving surface; a swing arm which is joined to the force transmitting member and is held to a retainer at a pivoting point as a fulcrum; and a pressure sensing element having a first end coupled to the retainer and a second end coupled to the swing arm, so that a displacement direction of the force transmitting member is the same direction as a line joining the first end and the second end.Type: GrantFiled: March 24, 2009Date of Patent: May 17, 2011Assignee: Epson Toyocom CorporationInventor: Hisao Motoyama
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Patent number: 7928960Abstract: In an input device, a control element is operated by a user; a pressure sensor is mechanically coupled to the control element and is provided with a monolithic body of semiconductor material housing a first sensitive element, which detects an actuation of the control element; a supporting element is connected to the pressure sensor; and connection elements electrically connect the monolithic body to the supporting element without interposition of a package. In particular, the monolithic body has electrical-contact areas carried by one main surface thereof, and the printed circuit board has conductive regions carried by a main face thereof; the connection elements are conductive bumps and electrically connect the electrical-contact areas to the conductive regions.Type: GrantFiled: September 8, 2006Date of Patent: April 19, 2011Assignee: STMicroelectronics S.r.l.Inventors: Lorenzo Baldo, Chantal Combi, Dino Faralli
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Publication number: 20100275697Abstract: A pressure sensor grid can comprise a plurality of bottom wires, arranged substantially parallel to each other and overlaid by a plurality of top wires arranged substantially perpendicular to the bottom wires. Each intersection of the top and bottom wires includes a pressure sensor. The sensor comprises a switching junction situated between the bottom wire and the top wire and a conducting channel extending through the switching junction from the bottom wire to the top wire. Pressure applied to the top wire causes an increase in conductance between the bottom wire and the top wire.Type: ApplicationFiled: April 30, 2009Publication date: November 4, 2010Inventors: Wei Wu, Shih-Yuan (SY) Wang, Pratik Chaturvedi, Sagl Varghese Mathal
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Publication number: 20100275698Abstract: A pressure sensor includes: a housing; a pressure input orifice opened at a pipe sleeve of the housing; a diaphragm sealing the pressure input orifice, the diaphragm having a first surface serving as a pressure receiving surface; a pressure sensitive unit using a direction of detecting a force as a detecting axis. A first end of the pressure sensitive unit is connected to a central area of a second surface of the diaphragm. A second end of the pressure sensitive unit is connected to the housing. The detecting axis is approximately orthogonal to the pressure receiving surface. A circumference of a portion where the central area and the first end of the pressure sensitive unit are in contact with each other is located inside a circumference of the central area. A thickness of the central area is larger than a thickness of an area surrounding the central area.Type: ApplicationFiled: July 19, 2010Publication date: November 4, 2010Applicant: EPSON TOYOCOM CORPORATIONInventor: Hisao Motoyama
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Publication number: 20100224003Abstract: A pressure sensor includes: a housing having openings at both ends thereof; a pair of pressure-receiving devices configured to seal the openings respectively and transmit a pressure from the outside to the interior of the housing; a force transmission device configured to connect the pair of pressure-receiving devices and transmit a force that one of the pressure-receiving devices receives to the other pressure-receiving device; and a pressure-sensitive element having a pressure-sensitive portion and a pair of base portions to be connected to both ends of the pressure-sensitive portion, wherein a line connecting the pair of base portions and a detection axis, which is a direction of detection of the force, and the direction of displacement of the force transmission device are arranged in parallel; the one of the base portions is a first fixed portion, a pair of connecting devices extending from the other base portion so as to interpose the pressure-sensitive portion are connected respectively to a pair of secType: ApplicationFiled: January 27, 2010Publication date: September 9, 2010Applicant: EPSON TOYOCOM CORPORATIONInventors: Jun WATANABE, Hisao MOTOYAMA
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Publication number: 20100212435Abstract: A pressure sensor element includes: a package, a first diaphragm provided on a first surface of the package, a second diaphragm provided on a second surface of the package, and a pressure sensing element disposed in the package, the pressure sensing element including: a first base formed at one end in a longitudinal direction of the pressure sensing element, a second base formed at the other end in the longitudinal direction, and a resonating portion formed between the first base and the second base. In the element, the first and second surfaces are opposed to each other. The pressure sensor element is disposed such that the longitudinal direction is orthogonal to a displacement direction of each of the first and second diaphragms. The first base is connected to the first diaphragm while the second base is connected to the second diaphragm.Type: ApplicationFiled: February 17, 2010Publication date: August 26, 2010Applicant: Epson Toyocom CorporationInventor: Kenta SATO
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Patent number: 7779700Abstract: A pressure sensor includes: a housing; a pressure input orifice opened at a pipe sleeve of the housing; a diaphragm sealing the pressure input orifice, the diaphragm having a first surface serving as a pressure receiving surface; a pressure sensitive unit using a direction of detecting a force as a detecting axis. A first end of the pressure sensitive unit is connected to a central area of a second surface of the diaphragm. A second end of the pressure sensitive unit is connected to the housing. The detecting axis is approximately orthogonal to the pressure receiving surface. A circumference of a portion where the central area and the first end of the pressure sensitive unit are in contact with each other is located inside a circumference of the central area. A thickness of the central area is larger than a thickness of an area surrounding the central area.Type: GrantFiled: June 8, 2009Date of Patent: August 24, 2010Assignee: Epson Toyocom CorporationInventor: Hisao Motoyama
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Patent number: 7754089Abstract: A method and apparatus for monitoring an underdrain in a filter system for filtering water or wastewater. At least one diagnostic condition relating to the performance of the underdrain is monitored to determine if the underdrain is operating in an acceptable manner.Type: GrantFiled: January 27, 2006Date of Patent: July 13, 2010Assignee: RG Delaware, Inc.Inventor: R. Lee Roberts
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Patent number: 7730772Abstract: A wireless and batteryless pressure sensor apparatus comprises of a SAW sensor and an antenna mounted on a printed circuit board. Optionally, and RFID tag in used in combination with the SAW sensor. A sensor antenna and a RFID antenna can be located on the printed circuit board such that the antennas communicate electrically with the sensor and the RFID device. The sensor can be interrogated utilizing a radio frequency, which is used to excite a SAW crystal inside the sensor. The interrogation signal causes the SAW to resonate wherein a resonant frequency changes with the pressure and temperature that is applied to the sensor. An interrogator can receive a return (echo) signal representing a change in SAW sensor properties (e.g., diaphragm change). A printed circuit board can be mounted on a stainless steel port and overpackaged with standard processes for hermetically sealing the sensor, or sensor and RFID device with at least one antenna.Type: GrantFiled: December 28, 2007Date of Patent: June 8, 2010Assignee: Honeywell International Inc.Inventors: James D. Cook, Brian J. Marsh, Mohammed A J Qasimi, Daniel Dixon, Sachin Kumar
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Patent number: 7685880Abstract: A single wire interface for a transducer transmits the transducer output as a frequency modulated signal over one single wire during one interval. During a second interval a reference signal is transmitted as a frequency modulated signal. Both the transducer output and the reference signal output are processed by the same circuitry during the respective intervals to provide both frequency modulated signals. The frequencies of the two signals are measured and then the ratio of the two periods which is the reciprocal of the two frequencies is calculated. This ratio is the direct measure of the output of the transducer and when provided eliminates sources of errors.Type: GrantFiled: August 11, 2008Date of Patent: March 30, 2010Assignee: Kulite Semiconductor Products, Inc.Inventor: Wolf S. Landmann
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Patent number: 7681456Abstract: In a particular embodiment, a field device is disclosed that includes a housing defining a fluid cavity and a sensor cavity and having an isolation barrier to isolate the fluid cavity from the sensor cavity. The field device further includes a pressure sensor disposed within the sensor cavity. The pressure sensor includes at least one pressure inlet. The field device also includes a capillary tube extending from the at least one pressure inlet to the fluid cavity through the isolation barrier. The capillary tube includes a lumen having a non-cylindrical shape.Type: GrantFiled: June 20, 2008Date of Patent: March 23, 2010Assignee: Rosemount Inc.Inventor: George Hausler
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Publication number: 20100058874Abstract: Described are method and apparatus for diagnosis of liquid losses in pressure measuring transducers filled with pressure transmitting liquids. Such pressure measuring transducers include a pressure sensor (3) arranged in a pressure measuring chamber (1), and a pressure transfer means (5) connected to the pressure measuring chamber (1) and sealed against external surroundings by a separating diaphragm (7), on which a pressure to be measured acts in measurement operation. A sealed inner space (15) thereof is composed of the inner spaces of the pressure transfer means (5) and the pressure measuring chamber (1) and is filled with a pressure transmitting liquid (17), which, in measurement operation, serves for transmitting pressure acting on the separating diaphragm (7) to the pressure sensor (3). Such pressure measuring transducers further includes an apparatus for detecting liquid losses (L). The apparatus for detecting liquid losses (L) includes a test element (25) arranged in the sealed inner space (15).Type: ApplicationFiled: July 16, 2007Publication date: March 11, 2010Applicant: Endress + Hauser GmbH + Co. KGInventor: Wolfgang Dannhauer
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Publication number: 20090314093Abstract: In a particular embodiment, a field device is disclosed that includes a housing defining a fluid cavity and a sensor cavity and having an isolation barrier to isolate the fluid cavity from the sensor cavity. The field device further includes a pressure sensor disposed within the sensor cavity. The pressure sensor includes at least one pressure inlet. The field device also includes a capillary tube extending from the at least one pressure inlet to the fluid cavity through the isolation barrier. The capillary tube includes a lumen having a non-cylindrical shape.Type: ApplicationFiled: June 20, 2008Publication date: December 24, 2009Applicant: Rosemount Inc.Inventor: George Charles Hausler
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Publication number: 20090308167Abstract: A pressure sensor includes: a housing; a pressure input orifice opened at a pipe sleeve of the housing; a diaphragm sealing the pressure input orifice, the diaphragm having a first surface serving as a pressure receiving surface; a pressure sensitive unit using a direction of detecting a force as a detecting axis. A first end of the pressure sensitive unit is connected to a central area of a second surface of the diaphragm. A second end of the pressure sensitive unit is connected to the housing. The detecting axis is approximately orthogonal to the pressure receiving surface. A circumference of a portion where the central area and the first end of the pressure sensitive unit are in contact with each other is located inside a circumference of the central area. A thickness of the central area is larger than a thickness of an area surrounding the central area.Type: ApplicationFiled: June 8, 2009Publication date: December 17, 2009Applicant: EPSON TOYOCOM CORPORATIONInventor: Hisao MOTOYAMA
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Publication number: 20090308168Abstract: A diaphragm for a pressure sensor includes: a central section serving as a diaphragm body, the central section including: an external surface deformed upon receipt of an external pressure; and an internal surface transmitting a force to a pressure sensitive element inside a housing of the pressure sensor; a peripheral section that is an exterior of the central section and welded to an outer circumference of a pressure input orifice that is provided to the housing; and a step wall provided between the central section and the peripheral section. The central section and the peripheral section are integrally and concentrically provided. The diaphragm seals the pressure input orifice.Type: ApplicationFiled: June 10, 2009Publication date: December 17, 2009Applicant: EPSON TOYOCOM CORPORATIONInventor: Hisao MOTOYAMA
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Patent number: 7624642Abstract: A differential pressure transmitter includes first and second process fluid inlets. A differential pressure sensor is disposed within the transmitter and has first and second sensor inlets. A first isolator diaphragm is located proximate the first process fluid inlet and is operably coupled to the first sensor inlet through a first fill fluid volume. A second isolator diaphragm is located proximate the second process fluid inlet and is operably coupled to the second sensor inlet through a second fill fluid volume. Measurement circuitry is operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication of the measured parameter. A third fluid volume substantially surrounds the differential pressure sensor. The third fluid volume exerts a compressive force on the differential pressure sensor.Type: GrantFiled: September 20, 2007Date of Patent: December 1, 2009Assignee: Rosemount Inc.Inventor: Mark G. Romo
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Publication number: 20090249881Abstract: A pressure sensing device particularly intended to equip a flowmeter of fluidic oscillator type, this device comprising a pressure orifice (3) linked to a measuring circuit (4) so as to send audible signals to a measuring membrane (1) fixed into a measuring cavity (2), a deformation sensor (5) sensitive to the deformations of this membrane and capable of converting them into electric signals, and an electronic amplifier associated with this deformation sensor (5), characterized in that the measuring circuit (4) comprises corrosion- and explosion-proof protection means (7, 8, 9) and filtering means (9, 10; 11, 12; 13, 2) for filtering the audible signals so as to enable the disturbance frequencies of these signals to be removed.Type: ApplicationFiled: January 16, 2009Publication date: October 8, 2009Applicant: TOKHEIM HOLDING BVInventor: Jean-Pierre Nitecki
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Publication number: 20090241678Abstract: A pressure sensor includes: a housing; an attachment having a pressure input orifice communicating with an interior of the housing; a first diaphragm that seals an opening of the pressure input orifice of the attachment, an external surface of the first diaphragm being a pressure receiving surface; a force transmitting member having an end which is coupled approximately perpendicular to a main surface of the first diaphragm, the main surface being opposite from the pressure receiving surface; a swing arm which is joined to the force transmitting member and is held to a retainer at a pivoting point as a fulcrum; and a pressure sensing element having a first end coupled to the retainer and a second end coupled to the swing arm, so that a displacement direction of the force transmitting member is the same direction as a line joining the first end and the second end.Type: ApplicationFiled: March 24, 2009Publication date: October 1, 2009Applicant: EPSON TOYOCOM CORPORATIONInventor: Hisao MOTOYAMA
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Publication number: 20090241679Abstract: A pressure sensor includes: a housing; an attachment portion coupled to the housing and having a pressure input orifice; a diaphragm sealing the pressure input orifice of the attachment portion and having a first surface that is a pressure receiving surface; and a pressure sensitive unit having a detecting axis in a direction in which a force is detected. In the sensor, an end of the pressure sensitive unit is connected to a central area of a second surface of the diaphragm, another end of the pressure sensitive unit is connected to the housing, and the detecting axis is approximately orthogonal to the pressure receiving surface.Type: ApplicationFiled: March 24, 2009Publication date: October 1, 2009Applicant: EPSON TOYOCOM CORPORATIONInventor: Hisao MOTOYAMA
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Patent number: 7516667Abstract: A differential pressure sensor includes a case, a first and a second pressure sensing element, a first and a second pressure introduction passage, and a differential pressure determining element. The first and second pressure sensing elements work to respectively sense a first and a second pressure. The first and second pressure introduction passages are provided to respectively introduce the first and second pressures to the first and second pressure sensing elements. The differential pressure determining element works to determine a differential pressure as the difference between the first and second pressures sensed by the first and second sensing elements. The first and second pressure sensing elements have the same shape and size and are symmetrically arranged in the case with respect to a reference. The first and second pressure introduction passages also have the same shape and size and are symmetrically positioned in the case with respect to the reference.Type: GrantFiled: June 28, 2007Date of Patent: April 14, 2009Assignee: DENSO CORPORATIONInventor: Masato Ueno
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Patent number: 7513163Abstract: A pressure sensor and a pressure measuring device are provided applicable to a variety of pressure detection targets and capable of measuring a surface pressure. The pressure sensor is configured by laminating a metal layer made of a metal film, an elastic member layer made of a non-metal material, and a coil layer including an exciting coil. Also, as for a sensor sheet on which sensors that each measure point pressure are arranged in an array, variable elements of the elastic member layer and the coil layer are appropriately changed, thereby forming sensors with a single sheet that are different in pressure detection accuracy or pressure detection range for predetermined areas. Also provided is a pressure measuring device that controls exciting timing or frequency of applied voltage of each exciting coil on a sensor sheet.Type: GrantFiled: April 3, 2007Date of Patent: April 7, 2009Assignee: Central Research Institute of Electric Power IndustryInventors: Hiroyuki Fukutomi, Takashi Ogata
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Publication number: 20090078054Abstract: A differential pressure transmitter includes first and second process fluid inlets. A differential pressure sensor is disposed within the transmitter and has first and second sensor inlets. A first isolator diaphragm is located proximate the first process fluid inlet and is operably coupled to the first sensor inlet through a first fill fluid volume. A second isolator diaphragm is located proximate the second process fluid inlet and is operably coupled to the second sensor inlet through a second fill fluid volume. Measurement circuitry is operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication of the measured parameter. A third fluid volume substantially surrounds the differential pressure sensor. The third fluid volume exerts a compressive force on the differential pressure sensor.Type: ApplicationFiled: September 20, 2007Publication date: March 26, 2009Applicant: Rosemount Inc.Inventor: Mark G. Romo
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Publication number: 20090056461Abstract: A single wire interface for a transducer transmits the transducer output as a frequency modulated signal over one single wire during one interval. During a second interval a reference signal is transmitted as a frequency modulated signal. Both the transducer output and the reference signal output are processed by the same circuitry during the respective intervals to provide both frequency modulated signals. The frequencies of the two signals are measured and then the ratio of the two periods which is the reciprocal of the two frequencies is calculated. This ratio is the direct measure of the output of the transducer and when provided eliminates sources of errors.Type: ApplicationFiled: August 11, 2008Publication date: March 5, 2009Applicant: Kulite Semiconductor Products, Inc.Inventor: Wolf S. Landmann
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Patent number: 7495302Abstract: A micromechanical component having a diaphragm is provided, the structure of which effectively prevents the penetration of dirt particles into the cavity. A method for manufacturing such a component is also provided. The structure of the component is implemented in a layer structure which includes at least one first sacrificial layer and a layer system over the first sacrificial layer. A cavity is formed in the first sacrificial layer underneath the diaphragm. In the region of the diaphragm between the upper layer and the lower layer of the layer system situated directly above the first sacrificial layer, at least one access channel to the cavity is formed which has at least one opening in the upper layer and at least one opening in the lower layer, the opening in the upper layer and the opening in the lower layer being offset with respect to each other.Type: GrantFiled: March 3, 2005Date of Patent: February 24, 2009Assignee: Robert Bosch GmbHInventors: Frank Fischer, Hans Artmann, Lars Metzger, Arnim Hoechst, Julian Gonska