Probes, Their Manufacture, Or Their Related Instrumentation, E.g., Holders (epo) Patents (Class 850/40)
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Publication number: 20100251439Abstract: Better leveling procedures for patterning at the small scale including the nanoscale. A method comprising: providing at least one array of cantilevers comprising tips thereon, wherein the cantilevers comprise at least one relatively bright spot, or at least two relatively bright spots, near the tip upon viewing, providing a substrate, leveling the array and the substrate with respect to each other, wherein the relatively bright spot near the tip is viewed to determine a contact of the tip and substrate.Type: ApplicationFiled: January 25, 2010Publication date: September 30, 2010Inventors: Nabil A. Amro, Raymond Sanedrin
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Publication number: 20100235954Abstract: A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height.Type: ApplicationFiled: May 13, 2009Publication date: September 16, 2010Inventors: Albert K. HENNING, Joseph S. Fragala, Raymond Roger Shile
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Publication number: 20100229264Abstract: Improved methods for loading arrays of tips with a material for subsequent deposition of the material from the tip to the substrate. Tip loading can be done by controlled vapor deposition which reduces the amount of non-specific material deposition onto a substrate. Improved nanoscale and microscale engineering and lithography can be achieved. Applications include better cellular studies including stem cell studies and stem cell differentiation control.Type: ApplicationFiled: January 25, 2010Publication date: September 9, 2010Inventors: Nabil A. Amro, Raymond Sanedrin
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Patent number: 7775087Abstract: A method of forming a microchannel as well as a thin film structure including same is made by forming a first thin film on a side of a substrate, forming a fugitive second thin film on the first thin film such that the second thin film defines a precursor of the elongated microchannel and a plurality of extensions connected to and extending transversely relative to the precursor along a length thereof A third thin film is formed on the first thin film and the fugitive second thin film such that the second thin film resides between the first thin film and the third thin film. A respective access site is formed in a region of the third thin film residing on a respective extension and penetrating to the fugitive second thin film. The fugitive second thin film forming the precursor is selectively removed from between the first thin film and the third thin film using an etching medium introduced through the access sites, thereby forming the microchannel between the first thin film and the third thin film.Type: GrantFiled: September 5, 2006Date of Patent: August 17, 2010Assignee: Northwestern UniversityInventors: Horacio D. Espinosa, Nicolaie A. Moldovan
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Publication number: 20100205698Abstract: A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P1) projecting from said resonator, the probe being characterized in that: it also includes means (EL1) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P1, P1?) projects from said resonator substantially in correspondence with an antinode point (PV1) of said volume mode of oscillation. An atomic force microscope including such a probe (SM?). A method of atomic force microscopy including the use of such a probe.Type: ApplicationFiled: April 23, 2008Publication date: August 12, 2010Applicants: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITE DE BORDEAUX 1,Inventors: Marc Faucher, Lionel Buchaillot, Jean-Pierre Aime, Bernard Louis Amand Legrand, Gerard Couturier
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Publication number: 20100154087Abstract: The invention relates to a method for the catalytic growth of carbon nanotubes on nanometric tips by chemical vapour deposition assisted by a hot filament, that comprises a first step of applying a preliminary dual-layer coating of cobalt and titanium on said tip, the titanium layer having a thickness of between 0.1 nm and 0.2 nm and cobalt layer having a thickness of between 0.3 nm and 2 nm.Type: ApplicationFiled: February 1, 2008Publication date: June 17, 2010Applicant: Centre National De La Rechereche Scientifique (C.N.R.SInventors: Anne-Marie Bonnot, Frederic Gay, Pierre Henri Perrier
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Publication number: 20100154085Abstract: A microscope including both an atomic force microscope and a near-field optical microscope and capable of performing electrochemical measurements and a cantilever for the microscope are disclosed. A pointed light transmitting material employed as the probe of an atomic force microscope is coated with a metal layer; the metal layer is further coated with an insulating layer; the insulating layer is removed only at the distal end to expose the metal layer; the slightly exposed metal layer is employed as a working electrode; and the probe can be employed not only as the probe of the atomic force microscope and the near-field optical microscope but also as the electrode of an electrochemical microscope. Consequently, the microscope can have the functions of an atomic force microscope, a near-field optical microscope and an electrochemical microscope.Type: ApplicationFiled: March 30, 2006Publication date: June 17, 2010Inventors: Kenichi Maruyama, Koji Suzuki, Masato Iyoki
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Patent number: 7735358Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.Type: GrantFiled: June 15, 2007Date of Patent: June 15, 2010Assignee: Insitutec, Inc.Inventors: Marcin B. Bauza, Shane C. Woody, Stuart T. Smith
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Publication number: 20100132079Abstract: Methods and systems for improving high resolution imaging using a polarization-modulated tip enhanced optical microscope. A polarizer is configured to alternately create and remove a region of enhanced optical intensity adjacent the tip of the microscope probe at the focus of a light source. The sample being studied emits photons at specific rates relative to a background rate depending on the existence or nonexistence of the region of enhanced optical intensity. Comparing the rate of emissions when the region of enhanced optical intensity exists to when it does not creates a detailed image of the sample. By not requiring the probe to oscillate, this system enhances the resolution of the microscope without potentially causing damage to the sample.Type: ApplicationFiled: August 6, 2009Publication date: May 27, 2010Inventor: Jordan M. Gerton
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Publication number: 20100115672Abstract: A dual tip probe for scanning probe epitaxy and a method of forming the dual tip probe are disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The first tip can remain in contact with a substrate during writing and provide in situ characterization of the substrate and or structures written, while the second tip can perform in non-contact mode to write and synthesis nanostructures. This feature can allow the dual tip probe to detect errors in a printed pattern using the first tip and correct the errors using the second tip.Type: ApplicationFiled: May 13, 2009Publication date: May 6, 2010Applicant: NORTHWESTERN UNIVERSITYInventors: Chad A. Mirkin, Chang Liu, Yuhuang Wang, Adam B. Braunschweig, Xing Liao, Louise R. Giam, Byung Y. Lee, Shifeng Li
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Publication number: 20100071477Abstract: Measurement apparatus having a cantilever and a fluid flow channel, the cantilever being positioned in the channel so that it projects in a direction parallel to the direction of fluid flow. In an associated method, the cantilever is positioned in a fluid flow channel such that the cantilever extends parallel with the direction of fluid flow in the channel. Fluid is caused to flow in the channel at a known velocity. The resonant frequency of the cantilever is measured at one or more velocities of fluid flow and calculating the spring constant of the cantilever using the measured resonant frequency or frequencies. If the spring constant of the cantilever is known, the measurement of resonant frequency of the cantilever is used to determine the velocity of the fluid flow.Type: ApplicationFiled: January 31, 2008Publication date: March 25, 2010Inventors: Georg Haehner, Gennady Lubarsky
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Publication number: 20100077515Abstract: A method of forming a microchannel as well as a thin film structure including same is made by forming a first thin film on a side of a substrate, forming a fugitive second thin film on the first thin film such that the second thin film defines a precursor of the elongated microchannel and a plurality of extensions connected to and extending transversely relative to the precursor along a length thereof A third thin film is formed on the first thin film and the fugitive second thin film such that the second thin film resides between the first thin film and the third thin film. A respective access site is formed in a region of the third thin film residing on a respective extension and penetrating to the fugitive second thin film. The fugitive second thin film forming the precursor is selectively removed from between the first thin film and the third thin film using an etching medium introduced through the access sites, thereby forming the microchannel between the first thin film and the third thin film.Type: ApplicationFiled: September 5, 2006Publication date: March 25, 2010Inventors: Horacio D. Espinosa, Nicolaie A. Moldovan
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Publication number: 20100043107Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: ApplicationFiled: October 20, 2009Publication date: February 18, 2010Applicant: ASYLUM RESEARCH CORPORATIONInventor: Roger B. Proksch
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Patent number: 7637960Abstract: Thin and short cantilevers possess both a low force constant and a high resonance frequency, thus are highly desirable for atomic force microscope (AFM) imaging and force measurement. According to some embodiments, the invention provides small silicon (Si) cantilevers integrated with a Si tip, for example fabricated from SOI wafers that are used for reducing the variation of thickness of the cantilevers. In one example, the fabrication process provided SOI chips containing 40 silicon cantilevers integrating with an ultra-sharp Si tip. The resolution of images obtained with these tips was much higher than those obtained with the commercial tips, while the force constants were much less, that is, more suitable for imaging soft samples.Type: GrantFiled: November 15, 2006Date of Patent: December 29, 2009Assignee: University of HoustonInventors: Chengzhi Cai, Chi-Ming Yam, Guoting Qin, Steven Pei, Qingkai Yu
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Publication number: 20090320167Abstract: A mechanical oscillator which defines a starting point of a cantilever at a front edge of a base and can determine the length of the cantilever without depending on an alignment accuracy and an etching amount, and a fabrication method of the mechanical oscillator. The mechanical oscillator, produced by processing a wafer, comprises a base (101) formed from a substrate supporting an SOI wafer and a structure to be a cantilever (102) which is formed from a silicon thin film of the SOI wafer and is horizontally protruding from the base (101), wherein a part of a buried oxide film (103) between the base (101) and the structure to be a cantilever (102) is removed, and a cantilever (104) starting from the front edge (105) of the base (101) is formed by directly jointing the structure to be a cantilever (102) to a part including at least the front edge (105) of the base (101) where the buried oxide film was removed.Type: ApplicationFiled: December 5, 2005Publication date: December 24, 2009Applicant: Japan Science and Technology AgencyInventors: Dai Kobayashi, Hideki Kawakatsu, Hiroshi Toshiyoshi
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Patent number: 7635392Abstract: The present invention provides a scanning probe microscope cantilever comprising a support portion, a lever portion extended from the support portion, and a needle projecting out of a first surface of the cantilever in the vicinity of a free end of the lever portion. From a second surface of the cantilever opposite the first surface, a bore extends through the needle to an aperture formed at a tip of the needle. To the tip of the needle, a substantially globular particle is attached. A method of scanning a sample surface comprises creating relative cantilever motion substantially toward the sample such that the particle experiences a contact force with the sample, illuminating a top surface of the cantilever with laser light such that a portion of the laser light passes through the hollow needle and is emitted from the aperture onto the particle, and detecting scattered light from the sample.Type: GrantFiled: August 14, 2007Date of Patent: December 22, 2009Assignee: Qimonda AGInventors: Harald Bloess, Andreas Heidelberg, Jens-Hendrik Zollondz
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Publication number: 20090313730Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.Type: ApplicationFiled: June 11, 2009Publication date: December 17, 2009Applicant: Interuniversitair Microelektronica Centrum vzw (IMEC)Inventors: Thomas Hantschel, Wilfried Vandervorst, Kai Arstila
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Patent number: 7631548Abstract: With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed.Type: GrantFiled: April 20, 2007Date of Patent: December 15, 2009Assignee: Hitachi, Ltd.Inventors: Shuichi Baba, Masahiro Watanabe, Toshihiko Nakata, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto, Yukio Kembo, Manabu Edamura
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Publication number: 20090300807Abstract: The present invention relates to a method for providing a measuring probe (1, 1a, 2) for a probe microscopic examination of a sample in a probe microscope, in particular a scanning probe microscope, in which the measuring probe (1), which has a probe base (1a) and a probe extension (2) formed thereon, is held on a carrier device and the measuring probe (1) is processed before or after a measurement by detaching a section of the probe extension (2). The invention further relates to an arrangement having a probe microscope for the probe microscopic examination of a sample, in particular a scanning probe microscope.Type: ApplicationFiled: January 16, 2009Publication date: December 3, 2009Inventors: Torsten Jähnke, Torsten Müller, Detlef Knebel, Kathryn Poole
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MONOLITHIC HIGH ASPECT RATIO NANO-SIZE SCANNING PROBE MICROSCOPE (SPM) TIP FORMED BY NANOWIRE GROWTH
Publication number: 20090293162Abstract: A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.Type: ApplicationFiled: July 31, 2009Publication date: November 26, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Guy M. Cohen, Hendrik F. Harmann -
Patent number: 7610797Abstract: A carbon nanotube detection system is disclosed. The detection system is suitable to detect carbon nanotube vibrations. Types of detection systems include but are not limited to: magnetic coupling to a magnetic particle attached at the distal end of the nanotube oscillator, current readout from the nanotube oscillator that has been exposed to electromagnetic radiation or a stress, inductive pick-up coil and corresponding tank circuit, capacitive readout element positioned next to the nanotube oscillator having a charged particle attached at its distal end, an optical beam illumination and detection of its scattering, or combination of any of the above means of detection.Type: GrantFiled: November 16, 2007Date of Patent: November 3, 2009Assignee: Xidex CorporationInventor: Vladimir Mancevski
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Patent number: 7605368Abstract: A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body.Type: GrantFiled: November 9, 2006Date of Patent: October 20, 2009Assignee: SII NanoTechnology Inc.Inventors: Masatsugu Shigeno, Masato Iyoki
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Publication number: 20090241233Abstract: An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the faceType: ApplicationFiled: March 12, 2009Publication date: September 24, 2009Inventors: Thomas SULZBACH, Christoph Richter
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Publication number: 20090205092Abstract: A method of producing a probe device for a metrology instrument such as an AFM includes providing a substrate and forming a tip stock extending upwardly from the substrate. The tip stock is preferably FIB milled to form a tip of the probe device. The tip preferably has a high aspect ratio, with a height that is at least about 1 micron for performing critical dimension (e.g., deep trench) atomic force microscopy. The stock is preferably pedestal shaped having a distal end that is substantially planar which can be machined into a tip in at least less than about 2 minutes. With the preferred embodiments, the FIB milling step can be completed in substantially fewer and less complicated steps than known techniques to produce a high aspect ratio tip suitable for DT-AFM in less than about one minute.Type: ApplicationFiled: December 29, 2008Publication date: August 13, 2009Applicant: Veeco Instruments Inc.Inventors: Weijie Wang, Steven Nagle
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Publication number: 20090178166Abstract: A simple method for integrating a circuit onto a probe with a handle, a cantilever and a tip is provided. By fabricating a probe whose surface has recessed patterns of the desirable profile, a circuit can be formed on one part of the handle out over the cantilever and back onto a different part of the handle without employing a circuit lithography step. The circuit material constituting the circuit is deposited orthogonally to the probe surface with a line-of-sight technique.Type: ApplicationFiled: December 11, 2008Publication date: July 9, 2009Applicant: Asylum Research CorporationInventors: Roger Proksch, Hector Cavazos
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Publication number: 20090151030Abstract: One inventive aspect is related to an atomic force microscopy probe. The probe comprises a tip configuration with two probe tips on one cantilever arm. The probe tips are electrically isolated from each other and of approximately the same height with respect to the cantilever arm. The outer surface of the tip configuration has the shape of a body with a base plane and an apex. The body is divided into two sub-parts by a gap located approximately symmetrically with respect to the apex and approximately perpendicular to the base plane. Another inventive aspect related to methods for producing such an AFM probe.Type: ApplicationFiled: February 6, 2009Publication date: June 11, 2009Applicant: Interuniversitair Microelektronica Centrum vzw (IMEC)Inventor: Marc Fouchier
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Publication number: 20090133169Abstract: An improved method of loading tips and other surfaces with patterning compositions or inks for use in deposition. A method of patterning is described, the method comprising: (i) providing at least one array of tips; (ii) providing a plurality of patterning compositions; (iii) ink jet printing at least some of the patterning compositions onto some of the tips; and (iv) depositing at least some of the patterning compositions onto a substrate surface; wherein the ink jet printing is adapted to prevent substantial cross-contamination of the patterning composition on the tips. Good printing reproducibility and control of printing rate can be achieved. The surfaces subjected to ink jet printing can be treated to encourage localization of the ink at the tip. The method is particularly important for high density arrays.Type: ApplicationFiled: August 8, 2008Publication date: May 21, 2009Inventors: Chad A. Mirkin, Yuhuang Wang, Louise R. Giam, Matthew Park