Field Effect Transistors (fets) With Nanowire- Or Nanotube-channel Region Patents (Class 977/938)
-
Patent number: 11456597Abstract: Voltage clamping and level shifting is provided. A first reverse direction high-electron-mobility transistor includes a source connected to an input pad, and a drain connected to a first reference voltage. A second reverse direction high-electron-mobility transistor includes a source and a gate connected to a second reference voltage, and a drain connected to the input pad. A gate of the first reverse direction high-electron-mobility transistor is connected to the second reference voltage.Type: GrantFiled: April 3, 2021Date of Patent: September 27, 2022Inventors: David L. Whitney, Manuel M. Del Arroz
-
Patent number: 9040957Abstract: According to example embodiments, a field effect transistor includes a graphene channel layer on a substrate. The graphene channel layer defines a slit. A source electrode and a drain electrode are spaced apart from each other and arranged to apply voltages to the graphene channel layer. A gate insulation layer is between the graphene channel layer and a gate electrode.Type: GrantFiled: February 21, 2013Date of Patent: May 26, 2015Assignees: SAMSUNG ELECTRONICS CO., LTD., SEOUL NATIONAL UNIVERSITY R&DB FOUNDATIONInventors: Jae-ho Lee, Seong-jun Park, Kyung-eun Byun, David Seo, Hyun-jae Song, Hyung-cheol Shin, Jae-hong Lee, Hyun-jong Chung, Jin-seong Heo
-
Patent number: 9030187Abstract: A nanogap device includes a first insulation layer having a nanopore formed therein, a first nanogap electrode which may be formed on the first insulation layer and may be divided into two parts with a nanogap interposed between the two parts, the nanogap facing the nanopore, a second insulation layer formed on the first nanogap electrode, a first graphene layer formed on the second insulation layer, a first semiconductor layer formed on the first graphene layer, a first drain electrode formed on the first semiconductor layer, and a first source electrode formed on the first graphene layer such as to be apart from the first semiconductor layer.Type: GrantFiled: April 3, 2013Date of Patent: May 12, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Chang-seung Lee, Yong-sung Kim, Jeo-young Shim, Joo-ho Lee
-
Patent number: 9029936Abstract: A memory device includes a semiconductor channel, a tunnel dielectric layer located over the semiconductor channel, a first charge trap including a plurality of electrically conductive nanodots located over the tunnel dielectric layer, dielectric separation layer located over the nanodots, a second charge trap including a continuous metal layer located over the separation layer, a blocking dielectric located over the second charge trap, and a control gate located over the blocking dielectric.Type: GrantFiled: December 7, 2012Date of Patent: May 12, 2015Assignee: SanDisk Technologies Inc.Inventors: Vinod Purayath, George Samachisa, George Matamis, James Kai, Yuan Zhang
-
Patent number: 9029836Abstract: In a method for fabricating a graphene structure, there is formed on a fabrication substrate a pattern of a plurality of distinct graphene catalyst materials. In one graphene synthesis step, different numbers of graphene layers are formed on the catalyst materials in the formed pattern. In a method for fabricating a graphene transistor, on a fabrication substrate at least one graphene catalyst material is provided at a substrate region specified for synthesizing a graphene transistor channel and at least one graphene catalyst material is provided at a substrate region specified for synthesizing a graphene transistor source, and at a substrate region specified for synthesizing a graphene transistor drain. Then in one graphene synthesis step, at least one layer of graphene is formed at the substrate region for the graphene transistor channel, and at the regions for the transistor source and drain there are formed a plurality of layers of graphene.Type: GrantFiled: September 8, 2011Date of Patent: May 12, 2015Assignee: President and Fellows of Harvard CollegeInventors: Jung-Ung Park, SungWoo Nam, Charles M. Lieber
-
Patent number: 9012278Abstract: In some embodiments, a method for manufacturing forms a semiconductor device, such as a transistor. A dielectric stack is formed on a semiconductor substrate. The stack comprises a plurality of dielectric layers separated by one of a plurality of spacer layers. Each of the plurality of spacer layers is formed of a different material than immediately neighboring layers of the plurality of dielectric layers. A vertically-extending hole is formed through the plurality of dielectric layers and the plurality of spacer layers. The hole is filled by performing an epitaxial deposition, with the material filling the hole forming a wire. The wire is doped and three of the dielectric layers are sequentially removed and replaced with conductive material, thereby forming upper and lower contacts to the wire and a gate between the upper and lower contacts. The wire may function as a channel region for a transistor.Type: GrantFiled: October 3, 2013Date of Patent: April 21, 2015Assignee: ASM IP Holding B.V.Inventors: Qi Xie, Vladimir Machkaoutsan, Jan Willem Maes
-
Patent number: 9006087Abstract: In one aspect, a method of fabricating an electronic device includes the following steps. An alternating series of device and sacrificial layers are formed in a stack on an SOI wafer. Nanowire bars are etched into the device/sacrificial layers such that each of the device layers in a first portion of the stack and each of the device layers in a second portion of the stack has a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region. The sacrificial layers are removed from between the nanowire bars. A conformal gate dielectric layer is selectively formed surrounding the nanowire channels in the first portion of the stack which serve as a channel region of a nanomesh FET transistor. Gates are formed surrounding the nanowire channels in the first and second portions of the stack.Type: GrantFiled: February 7, 2013Date of Patent: April 14, 2015Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Isaac Lauer, Chung-Hsun Lin, Jeffrey W. Sleight
-
Patent number: 9007732Abstract: Device structures and methods for providing carbon nanotube field effect transistor (CNTFET) devices with enhanced current carrying capability at lower densities are disclosed. Apparatuses and methods using CNTFET devices for providing protection from electrostatic discharge (ESD) voltages are also disclosed. According to some aspects of the present disclosure the electrostatic discharge protection circuits are configured with CNTFET diodes and provide protection from electrostatic discharge induced voltages for a protected circuit without affecting the normal operation of the protected circuit. According to some aspects of the present disclosure the methods for providing protection from electrostatic discharge voltages create conducting paths for providing protection from electrostatic discharge induced voltages for a protected circuit without affecting the normal operation of the protected circuit.Type: GrantFiled: March 15, 2013Date of Patent: April 14, 2015Assignee: Nantero Inc.Inventor: Claude L. Bertin
-
Patent number: 9000499Abstract: A method of fabricating a semiconducting device is disclosed. A carbon nanotube is formed on a substrate. A portion of the substrate is removed to form a recess below a section of the carbon nanotube. A doped material is applied in the recess to fabricate the semiconducting device. The recess may be between one or more contacts formed on the substrate separated by a gap.Type: GrantFiled: August 20, 2013Date of Patent: April 7, 2015Assignee: International Business Machines CorporationInventors: Aaron D. Franklin, Siyuranga O. Koswatta, Joshua T. Smith
-
Patent number: 8987707Abstract: Thin-film transistors comprising buckled films comprising carbon nanotubes as the conductive channel are provided. Also provided are methods of fabricating the transistors. The transistors, which are highly stretchable and bendable, exhibit stable performance even when operated under high tensile strains.Type: GrantFiled: August 20, 2013Date of Patent: March 24, 2015Assignee: Wisconsin Alumni Research FoundationInventors: Michael S. Arnold, Feng Xu
-
Publication number: 20150069330Abstract: Provided are a nanowire field-effect transistor and a method for manufacturing the same. The nanowire field-effect transistor can enable a source region to be positioned, with respect to an asymmetrical nanowire channel, adjacent to a region in which the diameter of the nanowire channel is large, can enable a drain region to be positioned adjacent to a region in which the diameter of the nanowire channel is small, can enable an ON current to be increased in a state in which a threshold voltage level is kept the same, and can enable the current drivability of a gate electrode to be improved.Type: ApplicationFiled: March 11, 2013Publication date: March 12, 2015Inventors: ChangKi Baek, TaiUk Rim, MyungDong Ko
-
Patent number: 8969145Abstract: In one aspect, a method of fabricating a nanowire FET device includes the following steps. A layer of III-V semiconductor material is formed on an SOI layer of an SOI wafer. Fins are etched into the III-V material and SOI layer. One or more dummy gates are formed over a portion of the fins that serves as a channel region of the device. A gap filler material is deposited onto the wafer. The dummy gates are removed selective to the gap filler material, forming trenches in the gap filler material. The SOI layer is removed from portions of the fins within the trenches thereby forming suspended nanowire channels in the channel regions of the device. The trenches are filled with at least one gate material to form one or more replacement gates surrounding the nanowire channels in a gate-all-around configuration.Type: GrantFiled: January 19, 2013Date of Patent: March 3, 2015Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Isaac Lauer, Jeffrey W. Sleight, Amlan Majumdar
-
Patent number: 8969148Abstract: The present invention relates to a method for producing a microelectronic device having a channel structure formed from superimposed nanowires, in which a nanowire stack having a constant transverse section is firstly formed, followed by a sacrificial gate and insulating spacers, where source and drain areas are then formed by growth of semiconductor material on areas of the stack which are not protected by the sacrificial gate and the insulating spacers (FIG. 4D).Type: GrantFiled: April 15, 2013Date of Patent: March 3, 2015Assignee: Commissariat a l'energie atomique et aux energies alternativesInventors: Maud Vinet, Sylvain Barraud, Laurent Grenouillet
-
Publication number: 20150053913Abstract: A mandrel having vertical planar surfaces is formed on a single crystalline semiconductor layer. An epitaxial semiconductor layer is formed on the single crystalline semiconductor layer by selective epitaxy. A first spacer is formed around an upper portion of the mandrel. The epitaxial semiconductor layer is vertically recessed employing the first spacers as an etch mask. A second spacer is formed on sidewalls of the first spacer and vertical portions of the epitaxial semiconductor layer. Horizontal bottom portions of the epitaxial semiconductor layer are etched from underneath the vertical portions of the epitaxial semiconductor layer to form a suspended ring-shaped semiconductor fin that is attached to the mandrel. A center portion of the mandrel is etched employing a patterned mask layer that covers two end portions of the mandrel. A suspended semiconductor fin is provided, which is suspended by a pair of support structures.Type: ApplicationFiled: October 2, 2014Publication date: February 26, 2015Inventors: Kangguo Cheng, James J. Demarest, Balasubramanian S. Haran
-
Patent number: 8962408Abstract: A self-aligned carbon nanostructure transistor is formed by a method that includes providing a material stack including a gate dielectric material having a dielectric constant of greater than silicon oxide and a sacrificial gate material. Next, a carbon nanostructure is formed on an exposed surface of the gate dielectric material. After forming the carbon nanostructure, metal semiconductor alloy portions are formed self-aligned to the material stack. The sacrificial gate material is then replaced with a conductive metal.Type: GrantFiled: June 4, 2013Date of Patent: February 24, 2015Assignee: International Business Machines CorporationInventors: Qing Cao, Zhengwen Li, Fei Liu, Zhen Zhang
-
Patent number: 8946680Abstract: A tunnel field effect transistor (TFET) includes a source region, the source region comprising a first portion of a nanowire; a channel region, the channel region comprising a second portion of the nanowire; a drain region, the drain region comprising a portion of a silicon pad, the silicon pad being located adjacent to the channel region; and a gate configured such that the gate surrounds the channel region and at least a portion of the source region.Type: GrantFiled: August 10, 2012Date of Patent: February 3, 2015Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Isaac Lauer, Amlan Majumdar, Jeffrey Sleight
-
Patent number: 8946683Abstract: The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.Type: GrantFiled: June 16, 2009Date of Patent: February 3, 2015Assignees: The Board of Trustees of the University of Illinois, Purdue Research FoundationInventors: John A. Rogers, Qing Cao, Muhammad Alam, Ninad Pimparkar
-
Patent number: 8940562Abstract: The present disclosure provides the ability to produce backplanes for AMLCD and AMOLED. Specifically, each and every component of the backplanes can be printed. Depending on the resolution and screen size of the displays, backplanes can include over a million different components that must be printed that include components of the thin film transistor (TFT) and electrodes to address each of those TFTs. Even a slight misregistry of components during printing can lead to failure of one or more pixels, potentially rendering the entire display unsuitable for use. The present disclosure provides the ability to reproducibly and accurately print each and every component of the backplane for both AMLCD and AMOLED. The ability to completely print backplanes provides numerous advantages, such as reduced costs, improved throughput, more environmental friendliness, and the like.Type: GrantFiled: July 21, 2014Date of Patent: January 27, 2015Assignee: Atom Nanoelectronics, IncInventor: Huaping Li
-
Patent number: 8927968Abstract: A method of forming a semiconductor device is provided. The method includes providing a structure including, a handle substrate, a buried boron nitride layer located above an uppermost surface of the handle substrate, a buried oxide layer located on an uppermost surface of the buried boron nitride layer, and a top semiconductor layer located on an uppermost surface of the buried oxide layer. Next, a first semiconductor pad, a second semiconductor pad and a plurality of semiconductor nanowires connecting the first semiconductor pad and the second semiconductor pad in a ladder-like configuration are patterned into the top semiconductor layer. The semiconductor nanowires are suspended by removing a portion of the buried oxide layer from beneath each semiconductor nanowire, wherein a portion of the uppermost surface of the buried boron nitride layer is exposed. Next, a gate all-around field effect transistor is formed.Type: GrantFiled: August 26, 2013Date of Patent: January 6, 2015Assignee: International Business Machines CorporationInventors: Guy Cohen, Michael A. Guillorn, Alfred Grill, Leathen Shi
-
Patent number: 8927397Abstract: A method of fabricating an electronic device includes the following steps. A SOI wafer is provided having a SOI layer over a BOX. At least one first/second set of nanowires and pads are patterned in the SOI layer. A conformal gate dielectric layer is selectively formed surrounding a portion of each of the first set of nanowires that serves as a channel region of a transistor device. A first metal gate stack is formed on the conformal gate dielectric layer surrounding the portion of each of the first set of nanowires that serves as the channel region of the transistor device in a gate all around configuration. A second metal gate stack is formed surrounding a portion of each of the second set of nanowires that serves as a channel region of a diode device in a gate all around configuration.Type: GrantFiled: February 7, 2013Date of Patent: January 6, 2015Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Isaac Lauer, Chung-Hsun Lin, Jeffrey W. Sleight
-
Patent number: 8927405Abstract: A method of forming a semiconductor device is provided. The method includes providing a structure including, a handle substrate, a buried boron nitride layer located above an uppermost surface of the handle substrate, a buried oxide layer located on an uppermost surface of the buried boron nitride layer, and a top semiconductor layer located on an uppermost surface of the buried oxide layer. Next, a first semiconductor pad, a second semiconductor pad and a plurality of semiconductor nanowires connecting the first semiconductor pad and the second semiconductor pad in a ladder-like configuration are patterned into the top semiconductor layer. The semiconductor nanowires are suspended by removing a portion of the buried oxide layer from beneath each semiconductor nanowire, wherein a portion of the uppermost surface of the buried boron nitride layer is exposed. Next, a gate all-around field effect transistor is formed.Type: GrantFiled: December 18, 2012Date of Patent: January 6, 2015Assignee: International Business Machines CorporationInventors: Guy Cohen, Michael A. Guillorn, Alfred Grill, Leathen Shi
-
Patent number: 8921825Abstract: A field effect transistor device includes a nanowire, a gate stack comprising a gate dielectric layer disposed on the nanowire, a gate conductor layer disposed on the dielectric layer and a substrate, and an active region including a sidewall contact portion disposed on the substrate adjacent to the gate stack, the side wall contact portion is electrically in contact with the nanowire.Type: GrantFiled: September 10, 2012Date of Patent: December 30, 2014Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Guy M. Cohen, Jeffrey W. Sleight
-
Patent number: 8912545Abstract: A method is provided for fabricating a nanowire-based semiconductor structure. The method includes forming a first nanowire with a first polygon-shaped cross-section having a first number of sides. The method also includes forming a semiconductor layer on surface of the first nanowire to form a second nanowire with a second polygon-shaped cross-section having a second number of sides, the second number being greater than the first number. Further, the method includes annealing the second nanowire to remove a substantial number of vertexes of the second polygon-shaped cross-section to form the nanowire with a non-polygon-shaped cross-section corresponding to the second polygon-shaped cross-section.Type: GrantFiled: March 15, 2013Date of Patent: December 16, 2014Assignee: Semiconductor Manufacturing International Corp.Inventors: Deyuan Xiao, James Hong
-
Patent number: 8901655Abstract: A method of fabricating an electronic device includes the following steps. A SOI wafer is provided having a SOI layer over a BOX. At least one first/second set of nanowires and pads are patterned in the SOI layer. A conformal gate dielectric layer is selectively formed surrounding a portion of each of the first set of nanowires that serves as a channel region of a transistor device. A first metal gate stack is formed on the conformal gate dielectric layer surrounding the portion of each of the first set of nanowires that serves as the channel region of the transistor device in a gate all around configuration. A second metal gate stack is formed surrounding a portion of each of the second set of nanowires that serves as a channel region of a diode device in a gate all around configuration.Type: GrantFiled: August 19, 2013Date of Patent: December 2, 2014Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Isaac Lauer, Chung-Hsun Lin, Jeffrey W. Sleight
-
Patent number: 8900935Abstract: In one exemplary embodiment, a method includes: providing a semiconductor device having a substrate, a nanowire, a first structure and a second structure, where the nanowire is suspended between the first structure and the second structure, where the first structure and the second structure overly the substrate; and performing atomic layer deposition to deposit a film on at least a portion of the semiconductor device, where performing atomic layer deposition to deposit the film includes performing atomic layer deposition to deposit the film on at least a surface of the nanowire.Type: GrantFiled: January 25, 2011Date of Patent: December 2, 2014Assignee: International Business Machines CorporationInventors: Dechao Guo, Zhengwen Li, Kejia Wang, Zhen Zhang, Yu Zhu
-
Publication number: 20140346442Abstract: Disclosed herein is an isolable colloidal particle comprising a nanoparticle and an inorganic capping agent bound to the surface of the nanoparticle, a method for making the same in a biphasic solvent mixture, and the formation of structures and solids from the isolable colloidal particle. The process can yield photovoltaic cells, piezoelectric crystals, thermoelectric layers, optoelectronic layers, light emitting diodes, ferroelectric layers, thin film transistors, floating gate memory devices, phase change layers, and sensor devices.Type: ApplicationFiled: May 16, 2012Publication date: November 27, 2014Applicant: THE UNIVERSITY OF CHICAGOInventors: Angshuman Nag, Dmitri V. Talapin
-
Patent number: 8895371Abstract: A fin structure including a vertical alternating stack of a first isoelectric point material layer having a first isoelectric point and a second isoelectric material layer having a second isoelectric point less than the first isoelectric point is formed. The first and second isoelectric point material layers become oppositely charged in a solution with a pH between the first and second isoelectric points. Negative electrical charges are imparted onto carbon nanotubes by an anionic surfactant to the solution. The electrostatic attraction causes the carbon nanotubes to be selectively attached to the surfaces of the first isoelectric point material layer. Carbon nanotubes are attached to the first isoelectric point material layer in self-alignment along horizontal lengthwise directions of the fin structure. A transistor can be formed, which employs a plurality of vertically aligned horizontal carbon nanotubes as the channel.Type: GrantFiled: September 6, 2012Date of Patent: November 25, 2014Assignee: International Business Machines CorporationInventors: Qing Cao, Dechao Guo, Shu-Jen Han, Yu Lu, Keith Kwong Hon Wong
-
Publication number: 20140339507Abstract: A structure is provided that includes at least one multilayered stacked semiconductor material structure located on a semiconductor substrate and at least one sacrificial gate material structure straddles a portion of the at least one multilayered stacked semiconductor structure. The at least one multilayered stacked semiconductor material structure includes alternating layers of sacrificial semiconductor material and semiconductor nanowire template material. End segments of each layer of sacrificial semiconductor material are then removed and filled with a dielectric spacer. Source/drain regions are formed from exposed sidewalls of each layer of semiconductor nanowire template material, and thereafter the at least one sacrificial gate material structure and remaining portions of the sacrificial semiconductor material are removed suspending each semiconductor material.Type: ApplicationFiled: September 16, 2013Publication date: November 20, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: Effendi Leobandung
-
Patent number: 8890116Abstract: Transistor devices having vertically stacked carbon nanotube channels and techniques for the fabrication thereof are provided. In one aspect, a transistor device is provided. The transistor device includes a substrate; a bottom gate embedded in the substrate with a top surface of the bottom gate being substantially coplanar with a surface of the substrate; a stack of device layers on the substrate over the bottom gate, wherein each of the device layers in the stack includes a first dielectric, a carbon nanotube channel on the first dielectric, a second dielectric on the carbon nanotube channel and a top gate on the second dielectric; and source and drain contacts that interconnect the carbon nanotube channels in parallel. A method of fabricating a transistor device is also provided.Type: GrantFiled: September 11, 2012Date of Patent: November 18, 2014Assignee: International Business Machines CorporationInventors: Zhihong Chen, Aaron Daniel Franklin, Shu-Jen Han
-
Patent number: 8890261Abstract: Improved fin field effect transistor (FinFET) devices and methods for the fabrication thereof are provided. In one aspect, a field effect transistor device is provided. The field effect transistor device includes a source region; a drain region; a plurality of fins connecting the source region and the drain region, the fins having a pitch of between about 40 nanometers and about 200 nanometers and each fin having a width of between about ten nanometers and about 40 nanometers; and a gate stack over at least a portion of the fins, wherein the source region and the drain region are self-aligned with the gate stack.Type: GrantFiled: October 17, 2013Date of Patent: November 18, 2014Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Michael A. Guillorn, Wilfried Haensch, Katherine Lynn Saenger
-
Publication number: 20140332753Abstract: A method is provided for fabricating a nano field-effect vacuum tube. The method includes providing a substrate having an insulating layer and a sacrificial layer; and forming a sacrificial line, a source sacrificial layer and a drain sacrificial layer. The method also includes forming a trench in the insulating layer; and forming a dielectric layer on the surface of the sacrificial line. Further, the method includes forming a metal layer on the dielectric layer to fill up the trench, cover the sacrificial line and expose the source sacrificial layer and the drain sacrificial layer; and removing the source sacrificial layer and the drain sacrificial layer. Further, the method also includes removing the sacrificial line to form a through channel; forming an isolation layer on the metal layer; and forming a source region and a drain region on the insulating layer at both ends of the metal layer.Type: ApplicationFiled: September 9, 2013Publication date: November 13, 2014Applicant: Semiconductor Manufacturing International (Shanghai) CorporationInventor: DEYUAN XIAO
-
Publication number: 20140306185Abstract: A thin film transistor is provided. The thin film transistor includes a source electrode, a drain electrode, a semiconducting layer, an insulating layer and a gate electrode. The insulating layer has a first surface and a second surface opposite to the first surface. The gate electrode is located on the first surface of the insulating layer. The source electrode, the drain electrode, and the semiconductor layer are located on the second surface of the insulating layer. The gate electrode, the source electrode, and the drain electrode include a first carbon nanotube layer. The semiconductor layer includes a second carbon nanotube layer. A first film resistor of the first carbon nanotube layer is smaller than or equal to 10 k? per square. A second film resistor of the second carbon nanotube layer is greater than or equal to 100 k? per square.Type: ApplicationFiled: December 24, 2013Publication date: October 16, 2014Applicants: HON HAI PRECISION INDUSTRY CO., LTD., Tsinghua UniversityInventors: YUAN ZOU, QUN-QING LI, SHOU-SHAN FAN
-
Publication number: 20140306175Abstract: A thin film transistor includes a source electrode, a drain electrode, a semiconducting layer, a first conductive layer, a second conductive layer, an insulating layer and a gate electrode. The drain electrode is spaced apart from the source electrode. The first conductive layer is sandwiched between the source electrode and the semiconductor layer. The second conductive layer is sandwiched between the drain electrode and the semiconductor layer. The gate electrode is insulated from the source electrode, the drain electrode, the first conductive layer, the second conductive layer, and the semiconductor layer by the insulating layer. A first work-function of a first material of the first conductive layer and the second conductive layer is same as a second work-function of a second material of the semiconductor layer.Type: ApplicationFiled: August 7, 2013Publication date: October 16, 2014Applicants: HON HAI PRECISION INDUSTRY CO., LTD., TSINGHUA UNIVERSITYInventors: QING-KAI QIAN, QUN-QING LI
-
Publication number: 20140268444Abstract: Device structures and methods for providing carbon nanotube field effect transistor (CNTFET) devices with enhanced current carrying capability at lower densities are disclosed. Apparatuses and methods using CNTFET devices for providing protection from electrostatic discharge (ESD) voltages are also disclosed. According to some aspects of the present disclosure the electrostatic discharge protection circuits are configured with CNTFET diodes and provide protection from electrostatic discharge induced voltages for a protected circuit without affecting the normal operation of the protected circuit. According to some aspects of the present disclosure the methods for providing protection from electrostatic discharge voltages create conducting paths for providing protection from electrostatic discharge induced voltages for a protected circuit without affecting the normal operation of the protected circuit.Type: ApplicationFiled: March 15, 2013Publication date: September 18, 2014Inventor: Claude L. Bertin
-
Publication number: 20140273361Abstract: Methods of fabricating patterned substrates, including patterned graphene substrates, using etch masks formed from self-assembled block copolymer films are provided. Some embodiments of the methods are based on block copolymer (BCP) lithography in combination with graphoepitaxy. Some embodiments of the methods are based on BCP lithography techniques that utilize hybrid organic/inorganic etch masks derived from BCP templates. Also provided are field effect transistors incorporating graphene nanoribbon arrays as the conducting channel and methods for fabricating such transistors.Type: ApplicationFiled: March 14, 2013Publication date: September 18, 2014Applicant: Wisconsin Alumni Research FoundationInventors: Michael S. Arnold, Padma Gopalan, Nathaniel S. Safron, Myungwoong Kim, Jonathan Woosun Choi
-
Publication number: 20140264279Abstract: Selective epitaxy of a semiconductor material is performed on a semiconductor fin to form a semiconductor nanowire. Surfaces of the semiconductor nanowire include facets that are non-horizontal and non-vertical. A gate electrode can be formed over the semiconductor nanowire such that the faceted surfaces can be employed as channel surfaces. The epitaxially deposited portions of the faceted semiconductor nanowire can apply stress to the channels. Further, an additional semiconductor material may be added to form an outer shell of the faceted semiconductor nanowire prior to forming a gate electrode thereupon. The faceted surfaces of the semiconductor nanowire provide well-defined charge carrier transport properties, which can be advantageously employed to provide a semiconductor device with well-controlled device characteristics.Type: ApplicationFiled: March 14, 2013Publication date: September 18, 2014Applicant: International Business Machines CorporationInventors: Kangguo Cheng, Juntao Li, Zhen Zhang, Yu Zhu
-
Patent number: 8835191Abstract: Methods for sensing a mechanical stress and methods of making stress sensor integrated circuits. The sensing methods include transferring the mechanical stress from the object to one or more nanowires in a stress sensor or stress sensor circuit and permitting the nanowires to change in length in response to the mechanical stress. An electrical characteristic of the stress sensor or stress sensor circuit, which has a variation correlated with changes in the magnitude of the mechanical stress, is measured and then assessed to determine the stress magnitude. The manufacture methods include electrically connecting nanowire field effect transistors having, as channel regions, one or more nanowires of either a different crystalline orientation or a different body width for the individual nanowires so that an offset output voltage results when mechanical strain is applied to the nanowires.Type: GrantFiled: February 11, 2013Date of Patent: September 16, 2014Assignee: International Business Machines CorporationInventors: Andres Bryant, Oki Gunawan, Shih-Hsien Lo, Jeffrey W. Sleight
-
Patent number: 8835231Abstract: A method for forming a nanowire field effect transistor (FET) device includes forming a nanowire over a semiconductor substrate, forming a gate stack around a portion of the nanowire, forming a capping layer on the gate stack, forming a spacer adjacent to sidewalls of the gate stack and around portions of nanowire extending from the gate stack, forming a hardmask layer on the capping layer and the first spacer, forming a metallic layer over the exposed portions of the device, depositing a conductive material over the metallic layer, removing the hardmask layer from the gate stack, and removing portions of the conductive material to define a source region contact and a drain region contact.Type: GrantFiled: August 16, 2010Date of Patent: September 16, 2014Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Guy M. Cohen, Shreesh Narasimha, Jeffrey W. Sleight
-
Patent number: 8816326Abstract: A semiconductor device, which comprises: a semiconductor substrate; a channel region on the semiconductor substrate, said channel region including a quantum well structure; a source region and a drain region on the sides of the channel region; a gate structure on the channel region; wherein the materials for the channel region, the source region and the drain region have different energy bands, and a tunneling barrier structure exists between the source region and the channel region.Type: GrantFiled: November 25, 2011Date of Patent: August 26, 2014Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huaxiang Yin, Jun Luo, Chao Zhao, Honggang Liu, Dapeng Chen
-
Patent number: 8816328Abstract: A method to fabricate a carbon nanotube (CNT)-based transistor includes providing a substrate having a CNT disposed over a surface; forming a protective electrically insulating layer over the CNT and forming a first multi-layer resist stack (MLRS) over the protective electrically insulating layer. The first MLRS includes a bottom layer, an intermediate layer and a top layer of resist. The method further includes patterning and selectively removing a portion of the first MLRS to define an opening for a gate stack while leaving the bottom layer; selectively removing a portion of the protective electrically insulating layer within the opening to expose a first portion of the CNT; forming the gate stack within the opening and upon the exposed first portion of the carbon nanotube, followed by formation of source and drain contacts also in accordance with the inventive method so as to expose second and third portions of the CNT.Type: GrantFiled: September 14, 2012Date of Patent: August 26, 2014Assignee: International Business Machines CorporationInventors: Josephine B Chang, Martin Glodde, Michael A. Guillorn
-
Publication number: 20140231820Abstract: A graphene memory includes a source and a drain spaced apart from each other on a conductive semiconductor substrate, a graphene layer contacting the conductive semiconductor substrate and spaced apart from and between the source and the drain, and a gate electrode on the graphene layer. A Schottky barrier is formed between the conductive semiconductor substrate and the graphene layer such that the graphene layer is used as a charge-trap layer for storing charges.Type: ApplicationFiled: August 6, 2013Publication date: August 21, 2014Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jae-ho LEE, Hyun-jong CHUNG, Seong-jun PARK, Kyung-eun BYUN, David SEO, Hyun-jae SONG, Jin-seong HEO
-
Patent number: 8810009Abstract: A composition comprises a semiconductor substrate having a crystallographic plane oriented parallel to a surface of the substrate and at least one planar semiconductor nanowire epitaxially disposed on the substrate, where the nanowire is aligned along a crystallographic direction of the substrate parallel to the crystallographic plane. To fabricate a planar semiconductor nanowire, at least one nanoparticle is provided on a semiconductor substrate having a crystallographic plane oriented parallel to a surface of the substrate. The semiconductor substrate is heated within a first temperature window in a processing unit. Semiconductor precursors are added to the processing unit, and a planar semiconductor nanowire is grown from the nanoparticle on the substrate within a second temperature window. The planar semiconductor nanowire grows in a crystallographic direction of the substrate parallel to the crystallographic plane.Type: GrantFiled: April 24, 2009Date of Patent: August 19, 2014Assignee: The Board of Trustees of the University of IllinoisInventors: Xiuling Li, Seth A. Fortuna
-
Patent number: 8809834Abstract: Apparatuses capable of and techniques for detecting long wavelength radiation are provided.Type: GrantFiled: July 6, 2009Date of Patent: August 19, 2014Assignee: University of Seoul Industry Cooperation FoundationInventor: Doyeol Ahn
-
Patent number: 8803129Abstract: A structure includes a substrate having a carbon nanotube (CNT) disposed over a surface. The CNT is partially disposed within a protective electrically insulating layer. The structure further includes a gate stack disposed over the substrate. A first portion of a length of the CNT not covered by the protective electrically insulating layer passes through the gate stack. Source and drain contacts are disposed adjacent to the gate stack, where second and third portions of the length of CNT not covered by the protective electrically insulating layer are conductively electrically coupled to the source and drain contacts. The gate stack and the source and drain contacts are contained within the protective electrically insulating layer and within an electrically insulating organic planarization layer that is disposed over the protective electrically insulating layer. A method to fabricate a CNT-based transistor is also described.Type: GrantFiled: October 11, 2011Date of Patent: August 12, 2014Assignee: International Business Machines CorporationInventors: Josephine B Chang, Martin Glodde, Michael A. Guillorn
-
Patent number: 8803131Abstract: An integrated circuit includes a graphene layer, the graphene layer comprising a region of undoped graphene, the undoped graphene comprising a channel of a transistor, and a region of doped graphene, the doped graphene comprising a contact of the transistor; and a gate of the transistor, the gate comprising a carbon nanotube film. A method of fabricating an integrated circuit comprising graphene and carbon nanotubes, includes forming a graphene layer; doping a portion of the graphene layer, resulting in doped graphene and undoped graphene; forming a carbon nanotube film; and etching the carbon nanotube film to form a gate of a transistor, wherein the transistor further comprises a channel comprising the undoped graphene and a contact comprising the doped graphene. A transistor includes a gate, the gate comprising a carbon nanotube film; a channel, the channel comprising undoped graphene; and a contact, the contact comprising doped graphene.Type: GrantFiled: September 5, 2012Date of Patent: August 12, 2014Assignee: International Business Machines CorporationInventors: Yu-Ming Lin, Jeng-Bang Yau
-
Publication number: 20140217507Abstract: A method of fabricating an electronic device includes the following steps. A SOI wafer is provided having a SOI layer over a BOX. At least one first/second set of nanowires and pads are patterned in the SOI layer. A conformal gate dielectric layer is selectively formed surrounding a portion of each of the first set of nanowires that serves as a channel region of a transistor device. A first metal gate stack is formed on the conformal gate dielectric layer surrounding the portion of each of the first set of nanowires that serves as the channel region of the transistor device in a gate all around configuration. A second metal gate stack is formed surrounding a portion of each of the second set of nanowires that serves as a channel region of a diode device in a gate all around configuration.Type: ApplicationFiled: February 7, 2013Publication date: August 7, 2014Applicant: International Business Machines CorporationInventors: Josephine B. Chang, Isaac Lauer, Chung-Hsun Lin, Jeffrey W. Sleight
-
Publication number: 20140217509Abstract: A method of fabricating an electronic device includes the following steps. A SOI wafer is provided having a SOI layer over a BOX. At least one first/second set of nanowires and pads are patterned in the SOI layer. A conformal gate dielectric layer is selectively formed surrounding a portion of each of the first set of nanowires that serves as a channel region of a transistor device. A first metal gate stack is formed on the conformal gate dielectric layer surrounding the portion of each of the first set of nanowires that serves as the channel region of the transistor device in a gate all around configuration. A second metal gate stack is formed surrounding a portion of each of the second set of nanowires that serves as a channel region of a diode device in a gate all around configuration.Type: ApplicationFiled: August 19, 2013Publication date: August 7, 2014Applicant: International Business Machines CorporationInventors: Josephine B. Chang, Isaac Lauer, Chung-Hsun Lin, Jeffrey W. Sleight
-
Patent number: 8796668Abstract: An integrated circuit includes a graphene layer, the graphene layer comprising a region of undoped graphene, the undoped graphene comprising a channel of a transistor, and a region of doped graphene, the doped graphene comprising a contact of the transistor; and a gate of the transistor, the gate comprising a carbon nanotube film. A method of fabricating an integrated circuit comprising graphene and carbon nanotubes, includes forming a graphene layer; doping a portion of the graphene layer, resulting in doped graphene and undoped graphene; forming a carbon nanotube film; and etching the carbon nanotube film to form a gate of a transistor, wherein the transistor further comprises a channel comprising the undoped graphene and a contact comprising the doped graphene. A transistor includes a gate, the gate comprising a carbon nanotube film; a channel, the channel comprising undoped graphene; and a contact, the contact comprising doped graphene.Type: GrantFiled: November 9, 2009Date of Patent: August 5, 2014Assignee: International Business Machines CorporationInventors: Yu-Ming Lin, Jeng-Bang Yau
-
Publication number: 20140209997Abstract: A thin film transistor based on carbon nanotubes includes a source electrode, a drain electrode, a semiconducting layer, an insulating layer and a gate electrode. The drain electrode is spaced apart from the source electrode. The semiconductor layer is electrically connected with the source electrode and the drain electrode. The gate electrode is insulated from the source electrode, the drain electrode, and the semiconductor layer by the insulating layer. The work-functions of the source electrode and of the drain electrode are different from that of the semiconductor layer, enabling the creation of both p-type and n-type field-effect transistors.Type: ApplicationFiled: June 26, 2013Publication date: July 31, 2014Inventors: QING-KAI QIAN, QUN-QING LI
-
Publication number: 20140203290Abstract: In one aspect, a method of fabricating a nanowire FET device includes the following steps. A layer of III-V semiconductor material is formed on an SOI layer of an SOI wafer. Fins are etched into the III-V material and SOI layer. One or more dummy gates are formed over a portion of the fins that serves as a channel region of the device. A gap filler material is deposited onto the wafer. The dummy gates are removed selective to the gap filler material, forming trenches in the gap filler material. The SOI layer is removed from portions of the fins within the trenches thereby forming suspended nanowire channels in the channel regions of the device. The trenches are filled with at least one gate material to form one or more replacement gates surrounding the nanowire channels in a gate-all-around configuration.Type: ApplicationFiled: August 15, 2013Publication date: July 24, 2014Applicant: International Business Machines CorporationInventors: Josephine B. Chang, Isaac Lauer, Jeffrey W. Sleight, Amlan Majumdar