Field Effect Transistors (fets) With Nanowire- Or Nanotube-channel Region Patents (Class 977/938)
  • Publication number: 20110073835
    Abstract: A film comprised of semiconductor nanocrystals having an aspect ratio less than 3:1 and a diameter greater than 10 nanometers, wherein the film has less than 5% by volume of organic material.
    Type: Application
    Filed: September 29, 2009
    Publication date: March 31, 2011
    Inventors: Xiaofan Ren, Keith B. Kahen
  • Publication number: 20110073841
    Abstract: A method of forming a microelectronic device includes forming a groove structure having opposing sidewalls and a surface therebetween on a substrate to define a nano line arrangement region. The nano line arrangement region has a predetermined width and a predetermined length greater than the width. At least one nano line is formed in the nano line arrangement region extending substantially along the length thereof and coupled to the surface of the groove structure to define a nano line structure. Related devices are also discussed.
    Type: Application
    Filed: December 7, 2010
    Publication date: March 31, 2011
    Inventors: ZhongLiang Huo, Subramanya Mayya, Xiaofeng Wang, In-Seok Yeo
  • Publication number: 20110062418
    Abstract: A carbon nanotube electronic circuit utilizing a differential amplifier is implemented on a single carbon nanotube. Field effect transistors are formed from a first group of electrical conductors in contact with the carbon nanotube and a second group of electrical conductors insulated from, but exerting electric fields on, the carbon nanotube form the gates of the field effect transistors. A signal input circuit has a first input portion and a second input portion. A first field effect transistor electrically responsive to a first incoming signal is formed on the first input portion. A carbon nanotube actuator having electrical terminals and responsive to electrical conditions is an electrical load. A current source, connected to the signal input circuit, is formed on the carbon nanotube from one or more second field effect transistors.
    Type: Application
    Filed: November 22, 2010
    Publication date: March 17, 2011
    Inventor: Lester F. Ludwig
  • Publication number: 20110062417
    Abstract: First semiconductor layers are in source/drain regions on the semiconductor substrate. A second semiconductor layer comprises first portions on the first semiconductor layers and a second portion on a channel region between the source/drain regions. Third semiconductor layers are on the first portions of the second semiconductor layer. A gate electrode is around the second portion of the second semiconductor layer via an insulating film. Contact plugs are in the first semiconductor layers, the first portions of the second semiconductor layers and the third semiconductor layers in the source/drain regions. A diameter of the contact plug in the second semiconductor layer is smaller than a diameter of the contact plug in the first and third semiconductor layers.
    Type: Application
    Filed: February 4, 2010
    Publication date: March 17, 2011
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Masayoshi Iwayama, Takeshi Kajiyama, Yoshiaki Asao
  • Publication number: 20110062421
    Abstract: First semiconductor layers are in source/drain regions on the semiconductor substrate. A second semiconductor layer comprises first portions on the first semiconductor layers and a second portion in a linear form in a channel region between the source/drain regions. A gate electrode is around the second portion of the second semiconductor layer via an insulating film. A film thickness of the second portion of the second semiconductor layer is smaller than a film thickness of the first portion of the second semiconductor layer.
    Type: Application
    Filed: February 4, 2010
    Publication date: March 17, 2011
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Masayoshi Iwayama, Yoshiaki Asao, Takeshi Kajiyama
  • Publication number: 20110062313
    Abstract: A multiple transistor differential amplifier is implemented on a single graphene nanoribbon. Differential amplifier field effect transistors are formed on the graphene nanoribbon from a first group of electrical conductors in contact with the graphene nanoribbon and a second group of electrical conductors insulated from, but exerting electric fields on, the graphene nanoribbon thereby forming the gates of the field effect transistors. A transistor in one portion of the differential amplifier and a transistor in another portion of the differential amplifier are responsive to an incoming electrical signal. A current source, also formed on the graphene nanoribbon, is connected with the differential amplifier, and the current source and the differential amplifier operating together generate an outgoing signal responsive to the incoming electrical signal.
    Type: Application
    Filed: November 17, 2010
    Publication date: March 17, 2011
    Inventor: Lester F. Ludwig
  • Patent number: 7906380
    Abstract: An electric device having a plurality of nanowires, in which at least one of the nanowires is cut or changed in its electric characteristics so as to have a desired characteristic value of the electric device.
    Type: Grant
    Filed: January 13, 2010
    Date of Patent: March 15, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventor: Sotomitsu Ikeda
  • Patent number: 7902541
    Abstract: A semiconductor nanowire having two semiconductor pads on both ends is suspended over a substrate. Stress-generating liner portions are formed over the two semiconductor pads, while a middle portion of the semiconductor nanowire is exposed. A gate dielectric and a gate electrode are formed over the middle portion of the semiconductor nanowire while the semiconductor nanowire is under longitudinal stress due to the stress-generating liner portions. The middle portion of the semiconductor nanowire is under a built-in inherent longitudinal stress after removal of the stress-generating liners because the formation of the gate dielectric and the gate electrode locks in the strained state of the semiconductor nanowire. Source and drain regions are formed in the semiconductor pads to provide a semiconductor nanowire transistor. A middle-of-line (MOL) dielectric layer may be formed directly on the source and drain pads.
    Type: Grant
    Filed: April 3, 2009
    Date of Patent: March 8, 2011
    Assignee: International Business Machines Corporation
    Inventors: Lidija Sekaric, Dureseti Chidambarrao, Xiao H. Liu
  • Patent number: 7897960
    Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.
    Type: Grant
    Filed: August 20, 2009
    Date of Patent: March 1, 2011
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
  • Publication number: 20110042649
    Abstract: The present invention relates to a thin-film transistor which comprises a conductive and predominantly continuous carbon-based layer (3) comprising predominantly planar graphene-like structures. The graphene-like structures may be in the following various forms: planar graphene-like nanoribbons oriented predominantly perpendicularly to the carbon-based layer surface or planar graphene-like sheets oriented predominantly parallel to the carbon-based layer surface. The carbon-based layer thickness is in the range from approximately 1 to 1000 nm.
    Type: Application
    Filed: February 16, 2009
    Publication date: February 24, 2011
    Inventors: Steven Grant Duvall, Pavel Khokhlov, Pavel I. Lazarev
  • Patent number: 7893423
    Abstract: A device and method associated with carbon nanowires, such as single walled carbon nanowires having a high degree of alignment are set forth herein. A catalyst layer is deposited having a predetermined crystallographic configuration so as to control a growth parameter, such as an alignment direction, a diameter, a crystallinity and the like of the carbon nanowire. The catalyst layer is etched to expose a sidewall portion. The carbon nanowire is nucleated from the exposed sidewall portion. An electrical circuit device can include a single crystal substrate, such as Silicon, and a crystallographically oriented catalyst layer on the substrate having an exposed sidewall portion. In the device, carbon nanowires are disposed on the single crystal substrate aligned in a direction associated with the crystallographic properties of the catalyst layer.
    Type: Grant
    Filed: January 21, 2010
    Date of Patent: February 22, 2011
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Vincent Gambin, Roger Su-Tsung Tsai
  • Patent number: 7893492
    Abstract: A semiconductor structure is provided that includes a plurality of vertically stacked and vertically spaced apart semiconductor nanowires (e.g., a semiconductor nanowire mesh) located on a surface of a substrate. One end segment of each vertically stacked and vertically spaced apart semiconductor nanowires is connected to a source region and another end segment of each vertically stacked and vertically spaced apart semiconductor nanowires is connected to a drain region. A gate region including a gate dielectric and a gate conductor abuts the plurality of vertically stacked and vertically spaced apart semiconductor nanowires, and the source regions and the drain regions are self-aligned with the gate region.
    Type: Grant
    Filed: February 17, 2009
    Date of Patent: February 22, 2011
    Assignee: International Business Machines Corporation
    Inventors: Stephen W. Bedell, Josephine B. Chang, Paul Chang, Michael A. Guillorn, Jeffrey W. Sleight
  • Publication number: 20110037105
    Abstract: A transistor structure includes a semiconductor substrate with a first surface, a diffusion region at the first surface of the substrate, a sacrificial gate formed on the diffusion region, and insulating side walls formed adjacent to the sacrificial gate. A metal gate is formed by etching out the sacrificial gate and filling in the space between the insulating side walls with gate metals. Silicided source and drain contacts are formed over the diffusion region between the side walls of two adjacent aluminum gates. One or more oxide layers are formed over the substrate. Vias are formed in the oxide layers by plasma etching to expose the silicided source and drain contacts, which simultaneously oxidizes the aluminum gate metal. A first metal is selectively formed over the silicided contact by electroless deposition, but does not deposit on the oxidized aluminum gate.
    Type: Application
    Filed: October 22, 2010
    Publication date: February 17, 2011
    Inventor: Peter Chang
  • Publication number: 20110031473
    Abstract: Nanowire-based devices are provided. In one aspect, a SRAM cell includes at least one pair of pass gates and at least one pair of inverters formed adjacent to one another on a wafer. Each pass gate includes one or more device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the pass gate device layers surrounding the nanowire channels. Each inverter includes a plurality of device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the inverter device layers surrounding the nanowire channels.
    Type: Application
    Filed: August 6, 2009
    Publication date: February 10, 2011
    Applicant: International Business Machines Corporation
    Inventors: Josephine Chang, Paul Chang, Michael A. Guillorn, Jeffrey Sleight
  • Patent number: 7883968
    Abstract: The present invention is an object to provide a high-performance vertical field effect transistor having a microminiaturized structure in which the distance between the gate and the channel is made short not through a microfabrication process, having a large gate capacitance, and so elaborated that the gate can control the channel current with a low voltage, and a method for simply and efficiently manufacturing such a field effect transistor not through a complex process such as a microfabrication process.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: February 8, 2011
    Assignee: Fujitsu Limited
    Inventor: Mizuhisa Nihei
  • Patent number: 7884359
    Abstract: Described herein is a field ionization and electron impact ionization device consisting of carbon nanotubes with microfabricated integral gates that is capable of producing short pulses of ions.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: February 8, 2011
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: David S. Y. Hsu, Jonathan L Shaw
  • Patent number: 7880163
    Abstract: A novel nanostructure device operating in Junction Field Effect Transistor (JFET) mode is provided that avoids the majority of the carriers that interact with the interface (e.g. surface roughness, high-k scattering).
    Type: Grant
    Filed: October 6, 2008
    Date of Patent: February 1, 2011
    Assignee: IMEC
    Inventors: Bart Soree, Wim Magnus
  • Publication number: 20100327255
    Abstract: A field effect transistor device includes: a reservoir bifurcated by a membrane of three layers: two electrically insulating layers; and an electrically conductive gate between the two insulating layers. The gate has a surface charge polarity different from at least one of the insulating layers. A nanochannel runs through the membrane, connecting both parts of the reservoir. The device further includes: an ionic solution filling the reservoir and the nanochannel; a drain electrode; a source electrode; and voltages applied to the electrodes (a voltage between the source and drain electrodes and a voltage on the gate) for turning on an ionic current through the ionic channel wherein the voltage on the gate gates the transportation of ions through the ionic channel.
    Type: Application
    Filed: June 29, 2009
    Publication date: December 30, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Hongbo Peng, Stanislav Polonsky, Stephen Rossnagel, Gustavo Alejandro Stolovitzky
  • Publication number: 20100330687
    Abstract: Techniques for ultra-sensitive detection are provided. In one aspect, a detection device is provided. The detection device comprises a source; a drain; a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain and suspended freely therebetween; and a gate in close proximity to the nanowire.
    Type: Application
    Filed: July 31, 2006
    Publication date: December 30, 2010
    Applicant: International Business Machines Corporation
    Inventors: Ali Afzali - Ardakani, Sudhir Gowda, Supratik Guha, Hendrik F. Hamann, Emanuel Tutuc
  • Publication number: 20100327259
    Abstract: Techniques for ultra-sensitive detection are provided. In one aspect, a detection device is provided. The detection device comprises a source; a drain; a nanowire comprising a semiconductor material having a first end clamped to the source and a second end clamped to the drain and suspended freely therebetween; and a gate in close proximity to the nanowire.
    Type: Application
    Filed: July 15, 2010
    Publication date: December 30, 2010
    Applicant: International Business Machines Corporation
    Inventors: Ali Afzali-Ardakani, Sudhir Gowda, Supratik Guha, Hendrik F. Hamann, Emanuel Tutuc
  • Publication number: 20100320438
    Abstract: Separation of carbon nanotubes or fullerenes according to diameter through non-covalent pi-pi interaction with molecular clips is provided. Molecular clips are prepared by Diels-Alder reaction of polyacenes with a variety of dienophiles. The pi-pi complexes of carbon nanotubes with molecular clips are also used for selective placement of carbon nanotubes and fullerenes on substrates.
    Type: Application
    Filed: May 14, 2010
    Publication date: December 23, 2010
    Applicant: International Business Machines Corporation
    Inventors: Ali Afzali-Ardakani, Cherie R. Kagan, Rudolf Tromp
  • Patent number: 7855403
    Abstract: Hybrid carbon nanotube FET (CNFET), static ram (SRAM) and method of making same. A static ram memory cell has two cross-coupled semiconductor-type field effect transistors (FETs) and two nanotube FETs (NTFETs), each having a channel region made of at least one semiconductive nanotube, a first NTFET connected to the drain or source of the first semiconductor-type FET and the second NTFET connected to the drain or source of the second semiconductor-type FET.
    Type: Grant
    Filed: September 29, 2009
    Date of Patent: December 21, 2010
    Assignee: Nantero, Inc.
    Inventors: Claude L. Bertin, Mitchell Meinhold, Steven L. Konsek, Thomas Rueckes, Frank Guo
  • Publication number: 20100315153
    Abstract: In one or more embodiments described herein, there is provided an apparatus comprising a substrate, and a plurality of carbon nanotubes (semiconducting nano-elements) disposed and fixed with said substrate. The nanotubes are disposed and fixed on said substrate such that they define a carbon nanotube network substantially at the percolation threshold of the network. As the network is at the percolation threshold, this provides for one or more signal paths extending from an input region to an output region. The apparatus is configured to, upon receiving particular input signalling via the input region, provide particular predefined output signalling at the output via the one or more signal paths, the particular output signalling being predefined according to the one or more one signal paths.
    Type: Application
    Filed: June 12, 2009
    Publication date: December 16, 2010
    Inventors: Markku Anttoni Oksanen, Eira Seppälä, Vladmir Ermolov, Pirjo Pasanen
  • Publication number: 20100314604
    Abstract: The gate-all-around (GAA) type semiconductor device may include source/drain layers, a nanowire channel, a gate electrode and an insulation layer pattern. The source/drain layers may be disposed at a distance in a first direction on a semiconductor substrate. The nanowire channel may connect the source/drain layers. The gate electrode may extend in a second direction substantially perpendicular to the first direction. The gate electrode may have a height in a third direction substantially perpendicular to the first and second directions and may partially surround the nanowire channel. The insulation layer pattern may be formed between and around the source/drain layers on the semiconductor substrate and may cover the nanowire channel and a portion of the gate electrode. Thus, a size of the gate electrode may be reduced, and/or a gate induced drain leakage (GIDL) and/or a gate leakage current may be reduced.
    Type: Application
    Filed: August 19, 2010
    Publication date: December 16, 2010
    Inventors: Sung-Dae Suk, Dong-Won Kim, Kyoung-Hwan Yeo
  • Patent number: 7851841
    Abstract: A method and apparatus for an electronic substrate having a plurality of semiconductor devices is described. A thin film of nanowires is formed on a substrate. The thin film of nanowires is formed to have a sufficient density of nanowires to achieve an operational current level. A plurality of semiconductor regions are defined in the thin film of nanowires. Contacts are formed at the semiconductor device regions to thereby provide electrical connectivity to the plurality of semiconductor devices. Furthermore, various materials for fabricating nanowires, thin films including p-doped nanowires and n-doped nanowires, nanowire heterostructures, light emitting nanowire heterostructures, flow masks for positioning nanowires on substrates, nanowire spraying techniques for depositing nanowires, techniques for reducing or eliminating phonon scattering of electrons in nanowires, and techniques for reducing surface states in nanowires are described.
    Type: Grant
    Filed: June 8, 2007
    Date of Patent: December 14, 2010
    Assignee: Nanosys, Inc.
    Inventors: Xiangfeng Duan, Chunming Niu, Stephen A. Empedocles, Linda T. Romano, Jian Chen, Vijendra Sahi, Lawrence Bock, David P. Stumbo, J. Wallace Parce, Jay L. Goldman
  • Patent number: 7851294
    Abstract: A method for manufacturing a nanotube non-volatile memory cell is proposed. The method includes the steps of: forming a source electrode and a drain electrode, forming a nanotube implementing a conduction channel between the source electrode and the drain electrode, forming an insulated floating gate for storing electric charges by passivating conductive nanoparticles with passivation molecules and arranging a disposition of passivated conductive nanoparticles on the nanotube, the conductive nanoparticles being adapted to store the electric charges and being insulated by the passivation molecules from the nanotube, and forming a control gate coupled with the channel.
    Type: Grant
    Filed: September 8, 2006
    Date of Patent: December 14, 2010
    Assignee: STMicroelectronics, S.r.l.
    Inventors: Andrea Basco, Maria Viviana Volpe, Maria Fortuna Bevilacqua, Valeria Casuscelli
  • Patent number: 7842955
    Abstract: A method of forming a single wall thickness (SWT) carbon nanotube (CNT) transistor with a controlled diameter and chirality is disclosed. A photolithographically defined single crystal silicon seed layer is converted to a single crystal silicon carbide seed layer. A single layer of graphene is formed on the top surface of the silicon carbide. The SWT CNT transistor body is grown from the graphene layer in the presence of carbon containing gases and metal catalyst atoms. Silicided source and drain regions at each end of the silicon carbide seed layer provide catalyst metal atoms during formation of the CNT. The diameter of the SWT CNT is established by the width of the patterned seed layer. A conformally deposited gate dielectric layer and a transistor gate over the gate dielectric layer complete the CNT transistor. CNT transistors with multiple CNT bodies, split gates and varying diameters are also disclosed.
    Type: Grant
    Filed: February 4, 2010
    Date of Patent: November 30, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Ashesh Parikh, Andrew Marshall
  • Publication number: 20100297816
    Abstract: A semiconductor structure is provided that includes a plurality of vertically stacked and vertically spaced apart semiconductor nanowires (e.g., a semiconductor nanowire mesh) located on a surface of a substrate. One end segment of each vertically stacked and vertically spaced apart semiconductor nanowires is connected to a source region and another end segment of each vertically stacked and vertically spaced apart semiconductor nanowires is connected to a drain region. A gate region including a gate dielectric and a gate conductor abuts the plurality of vertically stacked and vertically spaced apart semiconductor nanowires, and the source regions and the drain regions are self-aligned with the gate region.
    Type: Application
    Filed: August 2, 2010
    Publication date: November 25, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen W. Bedell, Josephine B. Chang, Paul Chang, Michael A. Guillorn, Jeffrey W. Sleight
  • Publication number: 20100297833
    Abstract: Separation of carbon nanotubes or fullerenes according to diameter through non-covalent pi-pi interaction with molecular clips is provided. Molecular clips are prepared by Diels-Alder reaction of polyacenes with a variety of dienophiles. The pi-pi complexes of carbon nanotrubes with molecular clips are also used for selective placement of carbon nanotubes and fullerenes on substrates.
    Type: Application
    Filed: May 28, 2010
    Publication date: November 25, 2010
    Applicant: International Business Machines Corporation
    Inventors: Ali Afzali-Ardakani, Cherie R. Kagan, Rudolf Tromp
  • Publication number: 20100295020
    Abstract: A nanowire product and process for fabricating it has a wafer with a buried oxide (BOX) upper layer in which a well is formed and the ends of a nanowire are on the BOX layer forming a beam that spans the well. A mask coating is formed on the upper surface of the BOX layer leaving an uncoated window over a center part of the beam and also forming a mask coating around the beam intermediate ends between each end of the beam center part and a side wall of the well. Applying oxygen through the window thins the beam center part while leaving the wire intermediate ends over the well thicker and having a generally arched shape. A thermal oxide coating can be placed on the wire and also the mask on the BOX layer before oxidation.
    Type: Application
    Filed: May 20, 2009
    Publication date: November 25, 2010
    Inventors: Tymon Barwicz, Lidija Sekaric, Jeffrey W. Sleight
  • Patent number: 7838368
    Abstract: A transistor device is formed of a continuous linear nanostructure having a source region, a drain region and a channel region between the source and drain regions. The source (20) and drain (26) regions are formed of nanowire ania the channel region (24) is in the form of a nanotube. An insulated gate (32) is provided adjacent to the channel region (24) for controlling conduction i ni the channel region between the source and drain regions.
    Type: Grant
    Filed: July 12, 2005
    Date of Patent: November 23, 2010
    Assignee: NXP B.V.
    Inventors: Radu Surdeanu, Prabhat Agarwal, Abraham Rudolf Balkenende, Erik P. A. M. Bakkers
  • Patent number: 7838809
    Abstract: Small-signal and other circuit design techniques realized by carbon nanotube field-effect transistors (CNFETs) to create analog electronics for analog signal handling, analog signal processing, and conversions between analog signals and digital signals. As the CNFETs exist and operate at nanoscale, they can be readily collocated or integrated into carbon nanotube sensing and transducing systems. The resulting collocation and integration may be at, or adequately near, nanoscale. One embodiment implements an analog differential amplifier having transistors which include carbon nanotubes, electrical contacts, and insulating material. The differential amplifier may be used in isolation or as an element of an operational amplifier. Negative feedback may be used to implement a wide range of analog signal processing functions, and to provide conversions among analog and digital signals. In some cases, an entire analog differential amplifier is implemented with a single carbon nanotube.
    Type: Grant
    Filed: February 19, 2008
    Date of Patent: November 23, 2010
    Inventor: Lester F. Ludwig
  • Publication number: 20100291759
    Abstract: Separation of carbon nanotubes or fullerenes according to diameter through non-covalent pi-pi interaction with molecular clips is provided. Molecular clips are prepared by Diels-Alder reaction of polyacenes with a variety of dienophiles. The pi-pi complexes of carbon nanotubes with molecular clips are also used for selective placement of carbon nanotubes and fullerenes on substrates.
    Type: Application
    Filed: May 10, 2010
    Publication date: November 18, 2010
    Applicant: International Business Machines Corporation
    Inventors: Ali Afzali-Ardakani, Cherie R. Kagan, Rudolf Tromp
  • Publication number: 20100270536
    Abstract: Single-walled carbon nanotube transistor devices, and associated methods of making such devices include a porous structure for the single-walled carbon nanotubes. The porous structure may be anodized aluminum oxide or another material. Electrodes for source and drain of a transistor are provided at opposite ends of the single-walled carbon nanotube devices. A concentric gate surrounds at least a portion of a nanotube in a pore. A transistor of the invention may be especially suited for power transistor or power amplifier applications.
    Type: Application
    Filed: July 6, 2010
    Publication date: October 28, 2010
    Applicant: ETAMOTA CORPORATION
    Inventor: Thomas W. Tombler, JR.
  • Patent number: 7821079
    Abstract: The invented ink-jet printing method for the construction of thin film transistors using all SWNTs on flexible plastic films is a new process. This method is more practical than all of existing printing methods in the construction TFT and RFID tags because SWNTs have superior properties of both electrical and mechanical over organic conducting oligomers and polymers which often used for TFT. Furthermore, this method can be applied on thin films such as paper and plastic films while silicon based techniques can not used on such flexible films. These are superior to the traditional conducting polymers used in printable devices since they need no dopant and they are more stable. They could be used in conjunction with conducting polymers, or as stand-alone inks.
    Type: Grant
    Filed: November 24, 2006
    Date of Patent: October 26, 2010
    Assignee: William Marsh Rice University
    Inventors: Gyou-Jin Cho, Min Hun Jung, Jared L. Hudson, James M. Tour
  • Publication number: 20100264403
    Abstract: A method for forming an electronic switching device on a substrate, wherein the method comprises depositing the active semiconducting layer of the electronic switching device onto the substrate from a liquid dispersion of ligand-modified colloidal nanorods, and subsequently immersing the substrate into a growth solution to increase the diameter and/or length of the nanorods on the substrate, and wherein the as-deposited nanorods are aligned such that their long-axis is aligned preferentially in the plane of current flow in the electronic switching device.
    Type: Application
    Filed: August 9, 2006
    Publication date: October 21, 2010
    Inventors: Henning Sirringhaus, Baoquan Sun
  • Patent number: 7816275
    Abstract: Methodologies and gate etching processes are presented to enable the fabrication of gate conductors of semiconductor devices, such as NFETs and/or PFETs, which are equipped with nano-channels. In one embodiment, a sacrificial spacer of equivalent thickness to the diameter of the gate nano-channel is employed and is deposited after patterning the gate conductor down to the gate dielectric. The residue gate material that is beneath the nano-channel is removed utilizing a medium to high density, bias-free, fluorine-containing or fluorine- and chlorine-containing isotropic etch process without compromising the integrity of the gate. In another embodiment, an encapsulation/passivation layer is utilized. In yet further embodiment, no sacrificial spacer or encapsulation/passivation layer is used and gate etching is performed in an oxygen and nitrogen-free ambient.
    Type: Grant
    Filed: April 3, 2009
    Date of Patent: October 19, 2010
    Assignee: International Business Machines Corporation
    Inventors: Nicholas C. M. Fuller, Sarunya Bangsaruntip, Guy Cohen, Sebastian U. Engelmann, Lidija Sekaric, Qingyun Yang, Ying Zhang
  • Patent number: 7816675
    Abstract: Provided are an organic thin film transistor (OTFT) and a fabrication method thereof, an organic semiconductor device having the OTFT, and a flexible display device having the OTFT. The OTFT includes a substrate, a gate electrode, an insulating layer, an active layer, and a source/drain electrode. The gate electrode may be made of a nanocrystalline carbon layer.
    Type: Grant
    Filed: December 27, 2007
    Date of Patent: October 19, 2010
    Assignee: Sungkyunkwan University Foundation for Corporate Collaboration
    Inventors: Byung You Hong, Yong Seob Park, Won Seok Choi, Nae Eung Lee, Young Gug Seol, Hwa Young Noh
  • Publication number: 20100261338
    Abstract: A method for depositing nanowires is disclosed. The method includes depositing multiple nanowires onto a surface of a liquid. The method also includes partially compressing the nanowires. The method also includes dipping a substrate into the liquid. The method further includes pulling the substrate out of the liquid at a controlled speed. The method also includes transferring the nanowires onto the substrate parallel to a direction of the pulling.
    Type: Application
    Filed: December 4, 2006
    Publication date: October 14, 2010
    Inventors: Loucas Tsakalakos, Joleyn Eileen Balch
  • Publication number: 20100252813
    Abstract: A fabrication method is provided for a core-shell-shell (CSS) nanowire transistor (NWT). The method provides a cylindrical CSS nanostructure with a semiconductor core, an insulator shell, and a conductive shell. The CSS nanostructure has a lower hemicylinder overlying a substrate surface. A first insulating film is conformally deposited overlying the CSS nanostructure and anisotropically plasma etched. Insulating reentrant stringers are formed adjacent the nanostructure lower hemicylinder. A conductive film is conformally deposited and selected regions are anisotropically plasma etched, forming conductive film gate straps overlying a gate electrode in a center section of the CSS nanostructure. An isotropically etching removes the insulating reentrant stringers adjacent the center section of the CSS nanostructure, and an isotropically etching of the conductive shell overlying the S/D regions is performed. A screen oxide layer is deposited over the CSS nanostructure.
    Type: Application
    Filed: July 17, 2007
    Publication date: October 7, 2010
    Applicant: SHARP LABORATORIES OF AMERICA, INC.
    Inventors: Mark A. Crowder, Yutaka Takafuji
  • Publication number: 20100252434
    Abstract: Embodiments of the present invention provide a method and apparatus for selective electrokinetic separation. In an embodiment, a local gate electric field is applied to a voltage-gated nanochannel filled with an aqueous solution. Additionally, a surface charge may be present on the walls of the nanochannel. This local gate electric field shows a selective quenching feature of ionic density and behaves as a potential shield against selective charge from entering the nanochannel while facilitating transport of the opposite charge. Embodiments of the subject method can also be used to enhance osmotic diffusion of selective electrolytes through biological cells. Specific embodiments can be useful as a biosensor since most biological cells contain an aqueous solution. A surface charge and local gate electric field can be applied to a biological cell to selectively separate molecules, such as proteins or ions.
    Type: Application
    Filed: August 28, 2008
    Publication date: October 7, 2010
    Applicant: University of Florida Research Foundation, Inc.
    Inventor: Subrata Roy
  • Publication number: 20100252800
    Abstract: A p-type semiconductor nanowire transistor is formed on the first semiconductor nanowire and an n-type semiconductor nanowire transistor is formed on the second semiconductor nanowire. The first and second semiconductor nanowires have a rectangular cross-sectional area with different width-to-height ratios. The type of semiconductor nanowires for each semiconductor nanowire transistor is selected such that top and bottom surfaces provide a greater on-current per unit width than sidewall surfaces in a semiconductor nanowire having a greater width-to-height ratio, while sidewall surfaces provide a greater on-current per unit width than top and bottom surfaces in the other semiconductor nanowire having a lesser width-to-height ratio. Different types of stress-generating material layers may be formed on the first and second semiconductor nanowire transistors to provide opposite types of stress, which may be employed to enhance the on-current of the first and second semiconductor nanowire transistors.
    Type: Application
    Filed: April 3, 2009
    Publication date: October 7, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dureseti Chidambarrao, Xiao H. Liu, Lidija Sekaric
  • Publication number: 20100252801
    Abstract: A semiconductor nanowire having two semiconductor pads on both ends is suspended over a substrate. Stress-generating liner portions are formed over the two semiconductor pads, while a middle portion of the semiconductor nanowire is exposed. A gate dielectric and a gate electrode are formed over the middle portion of the semiconductor nanowire while the semiconductor nanowire is under longitudinal stress due to the stress-generating liner portions. The middle portion of the semiconductor nanowire is under a built-in inherent longitudinal stress after removal of the stress-generating liners because the formation of the gate dielectric and the gate electrode locks in the strained state of the semiconductor nanowire. Source and drain regions are formed in the semiconductor pads to provide a semiconductor nanowire transistor. A middle-of-line (MOL) dielectric layer may be formed directly on the source and drain pads.
    Type: Application
    Filed: April 3, 2009
    Publication date: October 7, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Lidija Sekaric, Dureseti Chidambarrao, Xiao H. Liu
  • Patent number: 7801687
    Abstract: Methods for using modified single wall carbon nanotubes (“SWCNTs”) to detect presence and/or concentration of a gas component, such as a halogen (e.g., Cl2), hydrogen halides (e.g., HCl), a hydrocarbon (e.g., CnH2n+2), an alcohol, an aldehyde or a ketone, to which an unmodified SWCNT is substantially non-reactive. In a first embodiment, a connected network of SWCNTs is coated with a selected polymer, such as chlorosulfonated polyethylene, hydroxypropyl cellulose, polystyrene and/or polyvinylalcohol, and change in an electrical parameter or response value (e.g., conductance, current, voltage difference or resistance) of the coated versus uncoated SWCNT networks is analyzed. In a second embodiment, the network is doped with a transition element, such as Pd, Pt, Rh, Ir, Ru, Os and/or Au, and change in an electrical parameter value is again analyzed. The parameter change value depends monotonically, not necessarily linearly, upon concentration of the gas component.
    Type: Grant
    Filed: July 8, 2005
    Date of Patent: September 21, 2010
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration (NASA)
    Inventors: Jing Li, Meyya Meyyappan
  • Patent number: 7795677
    Abstract: Field-effect transistors (FETs) having nanowire channels are provided. In one aspect, a FET is provided. The FET comprises a substrate having a silicon-on-insulator (SOI) layer which is divided into at least two sections electrically isolated from one another, one section included in a source region and the other section included in a drain region; a channel region connecting the source region and the drain region and including at least one nanowire; an epitaxial semiconductor material, grown from the SOI layer, covering the nanowire and attaching the nanowire to each section of the SOI layer; and a gate over the channel region.
    Type: Grant
    Filed: September 5, 2007
    Date of Patent: September 14, 2010
    Assignee: International Business Machines Corporation
    Inventors: Sarunya Bangsaruntip, Guy Moshe Cohen, Katherine Lynn Saenger
  • Patent number: 7795044
    Abstract: An electronically scannable multiplexing device is capable of addressing multiple bits within a volatile or non-volatile memory cell. The multiplexing device generates an electronically scannable conducting channel with two oppositely formed depletion regions. The depletion width of each depletion region is controlled by a voltage applied to a respective control gate at each end of the multiplexing device. The present multi-bit addressing technique allows, for example, 10 to 100 bits of data to be accessed or addressed at a single node. The present invention can also be used to build a programmable nanoscale logic array or for randomly accessing a nanoscale sensor array.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: September 14, 2010
    Assignee: International Business Machines Corporation
    Inventors: Hemantha Kumar Wickramasinghe, Kailash Gopalakrishnan
  • Patent number: 7790539
    Abstract: A microelectronic device and a method for producing the device can overcome the disadvantages of known electronic devices composed of carbon molecules, and can deliver performance superior to the known devices. An insulated-gate field-effect transistor includes a multi-walled carbon nanotube (10) having an outer semiconductive carbon nanotube layer (1) and an inner metallic carbon nanotube layer (2) that is partially covered by the outer semiconductive carbon nanotube layer (1). A metal source electrode (3) and a metal drain electrode (5) are brought into contact with both ends of the semiconductive carbon nanotube layer (1) while a metal gate electrode (4) is brought into contact with the metallic carbon nanotube layer (2). The space between the semiconductive carbon nanotube layer (1) and the metallic carbon nanotube layer (2) is used as a gate insulating layer.
    Type: Grant
    Filed: November 20, 2008
    Date of Patent: September 7, 2010
    Assignee: Sony Corporation
    Inventors: Ryuichiro Maruyama, Masafumi Ata, Masashi Shiraishi
  • Patent number: 7791108
    Abstract: A transistor comprises a nanowire (22, 22?) having a source (24) and a drain (29) separated by an intrinsic or lowly doped region (26, 28). A potential barrier is formed at the interface of the intrinsic or lowly doped region (26, 28) and one of the source (24) and the drain (29). A gate electrode (32) is provided in the vicinity of the potential barrier such that the height of the potential barrier can be modulated by applying an appropriate voltage to the gate electrode (32).
    Type: Grant
    Filed: January 24, 2007
    Date of Patent: September 7, 2010
    Assignee: NXP B.V.
    Inventors: Fred Hurkx, Prabhat Agarwal
  • Publication number: 20100221882
    Abstract: The present invention relates to semiconductor devices comprising semiconductor nanoelements. In particular the invention relates to devices having a volume element having a larger diameter than the nanoelement arranged in epitaxial connection to the nanoelement. The volume element is being doped in order to provide a high charge carrier injection into the nanoelement and a low access resistance in an electrical connection. The nanoelement may be upstanding from a semiconductor substrate. A concentric layer of low resistivity material forms on the volume element forms a contact.
    Type: Application
    Filed: May 13, 2010
    Publication date: September 2, 2010
    Inventors: Lars Ivar Samuelson, Patrick Svensson, Jonas Ohlsson, Truls Lowgren
  • Publication number: 20100207103
    Abstract: A nanotube field effect transistor and a method of fabrication are disclosed. The method includes electrophoretic deposition of a nanotube to contact a region of a conductive layer defined by an aperture.
    Type: Application
    Filed: May 3, 2010
    Publication date: August 19, 2010
    Applicant: NEW JERSEY INSTITUTE OF TECHNOLOGY
    Inventors: Reginald Conway Farrow, Amit Goyal